JP5771852B2 - A thermoelectric conversion element that includes a space part or a connected space part that reduces the amount of heat transfer to the thermoelectric material and the working material flow is greater than the original thermoelectric material - Google Patents

A thermoelectric conversion element that includes a space part or a connected space part that reduces the amount of heat transfer to the thermoelectric material and the working material flow is greater than the original thermoelectric material Download PDF

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JP5771852B2
JP5771852B2 JP2011057202A JP2011057202A JP5771852B2 JP 5771852 B2 JP5771852 B2 JP 5771852B2 JP 2011057202 A JP2011057202 A JP 2011057202A JP 2011057202 A JP2011057202 A JP 2011057202A JP 5771852 B2 JP5771852 B2 JP 5771852B2
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有 芦田
有 芦田
眞人 馬淵
眞人 馬淵
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発明の詳細な説明Detailed Description of the Invention

本発明は、熱エネルギーと電気エネルギーとの変換方法に関する。  The present invention relates to a method for converting thermal energy and electrical energy.

熱エネルギーを電気エネルギーに変換する発電システムに熱電材料を用いた熱電発電や、熱電子発電などがある。熱電材料を逆変換として用いると冷却システムに利用できる。伝熱量と電流量が関連して輸送される現象を利用する材料が熱電材料であり、熱輸送現象を担う作業物質として、系が古典力学で扱える場合の電子やホールなどの古典系作業物質や、おもに極低温になると量子効果が顕著になる場合の量子系作業物質がある。また、電流輸送現象も金属から絶縁物にいたる幅広い電気伝導度が利用される。伝熱量に比べて電荷の輸送量が多い材料が性能の良い熱電材料である。  There are thermoelectric power generation using a thermoelectric material and thermionic power generation in a power generation system that converts thermal energy into electric energy. When thermoelectric material is used as reverse conversion, it can be used in a cooling system. Thermoelectric materials are materials that use the phenomenon of transport in relation to the amount of heat transfer and the amount of current, and work materials responsible for the heat transport phenomenon are classical work materials such as electrons and holes that can be handled by classical mechanics. There is a quantum working material where the quantum effect becomes prominent mainly at extremely low temperatures. The current transport phenomenon also uses a wide range of electrical conductivity from metal to insulator. A material having a larger amount of charge transport than the amount of heat transfer is a thermoelectric material with good performance.

古典系作業物質の場合の電子やホールの熱電材料の性能は、通常、性能指数Zは

Figure 0005771852
で定義され、無次元性能指数ZT(Tは絶対温度)が大きな材料ほど熱電エネルギー変換効率が高い。ここで、Sはゼーベック係数と呼ばれる熱電能、熱伝導率κは作業物質の熱伝導成分κと格子による熱伝導成分κph成分の和、ρは作業物質の電気抵抗率である。温度を変化させないで大きいZTを得るためには、大きなS、小さなκ及び小さなρにすればいい。これら三つの熱電特性はいずれも作業物質の濃度の関数であり、その濃度が高くなるとSおよびρは小さくなり、κは大きくなる。半導体理論によると使用温度域によって最適な電子あるいはホール濃度が存在する。
その濃度に対して熱電性能をよくするには
1)電子あるいはホール濃度を高くしρを小さくする
2)Wiedemann−Franzの法則よりκ∝1/ρであることからκphを小さくする
3)電子あるいはホールの有効質量の大きな材料系でSを大きくする
の3通りが考えられる。
上記の無次元性能指数は古典系作業物質の伝熱量と電流量に関する熱平衡輸送理論を用いて導出されている。この理論は量子系作業物質にも拡張できる。The performance index of thermoelectric materials for electrons and holes in the case of classical working substances is usually the figure of merit Z
Figure 0005771852
A material having a larger dimensionless figure of merit ZT (T is an absolute temperature) has a higher thermoelectric energy conversion efficiency. Here, S is the thermoelectric power called Seebeck coefficient, the thermal conductivity κ is the sum of the thermal conduction component κ c of the working material and the thermal conduction component κ ph component of the lattice, and ρ is the electrical resistivity of the working material. In order to obtain a large ZT without changing the temperature, a large S, a small κ, and a small ρ can be used. These three thermoelectric properties are all a function of the concentration of the working substance. As the concentration increases, S and ρ decrease and κ increases. According to semiconductor theory, there is an optimum electron or hole concentration depending on the operating temperature range.
To improve the thermoelectric performance with respect to the concentration, 1) increase the electron or hole concentration and decrease ρ. 2) reduce κ ph because it is κ c ∝1 / ρ from the Wiedemann-Franz law 3) There are three ways to increase S in a material system having a large effective mass of electrons or holes.
The above dimensionless figure of merit has been derived using the thermal equilibrium transport theory for the amount of heat transfer and current of classical working materials. This theory can be extended to quantum working materials.

熱電材料としてはゼーベック係数Sが大きく、熱伝導率κが絶縁体のように小さく、しかも電気抵抗率ρが金属のように低いことが望ましい。このような特徴はPhonon Glass Electron Crystalとして表現され、格子振動に対してはガラスのように乱れた物質として振る舞い、電子あるいはホールに対しては結晶のように振る舞う高移動度物質を目指している。このような材料は古典系作業物質濃度が高く、縮退状態化合物やこれらの固溶体の中から見出されるが、格子振動による熱伝導成分κphを小さくすることが熱電材料の性能を上げることにつながる。As a thermoelectric material, it is desirable that the Seebeck coefficient S is large, the thermal conductivity κ is as small as an insulator, and the electrical resistivity ρ is as low as a metal. Such a feature is expressed as Phonon Glass Electron Crystal, which aims at a high-mobility material that behaves like a turbulent material like glass for lattice vibration and behaves like a crystal for electrons or holes. Such materials have high classical system working substance concentration, are found among the degenerate state compounds and solid solutions thereof, to reduce the heat conduction component kappa ph due to lattice vibrations leads to increasing the performance of the thermoelectric material.

非特許文献1によるとBiTeでは、フォノンの平均自由行程よりも長さが短くなると、その方向にはフォノンは弾道的に伝導する。細線での伝熱は熱伝方向を細線の長さ方向を取ると、細線の長さとそれと垂直方向である肉厚と、フォノンの平均自由行程との大小関係によって特徴づけられる。長さや肉厚がフォノンの平均自由行程よりも長い場合には熱伝導はフーリエ法則に従い、拡散的フォノンである。太さがフォノンの平均自由行程より短いときには、フォノンは肉厚方向に対しては弾道的フォノン伝導するが細線の表面粗さによるフォノン散乱のために拡散的フォノン伝導で特徴づけられる値よりも熱伝導が小さくなってしまう。長さがフォノンの平均自由行程より短いときには、表面粗さに影響を受けないと弾道的なフォノン伝導により、拡散的フォノン伝導で特徴づけられるものより長さ方向の熱伝導が大きくなる。一方非特許文献2ではナノチューブに対して非平衡分子動力学を用いて太さ方向の伝熱量に対する依存性を評価している。1シートからなるナノチューブでは表面粗さが減少し室温では1.6μmまで長さ方向に弾道的なフォノン伝導の影響がある。その結果拡散的フォノン伝導で特徴づけられる値より熱伝導が大きい。一方、電気伝導度は導電材料の空間次元が小さい場合や、それが層状に重なった場合は、電子が移動するときに横切る断面積が微小であれば、狭い方向に流れる電流を担う電子の許されるエネルギー状態間隔が大きく電子の散乱が起こりにくくなり、電子の状態密度が空間次元によって変化し電気伝導がよくなる。低次元になると熱電材料の性能指数が改善されることを利用するものにナノ薄膜・超格子・ナノワイヤーなどの熱電材料がある。According to Non-Patent Document 1, in Bi 2 Te 3 , when the length becomes shorter than the phonon mean free path, the phonon conducts ballistically in that direction. The heat transfer in the thin wire is characterized by the magnitude relationship between the length of the thin wire, the thickness in the direction perpendicular thereto, and the mean free path of the phonon when the heat transfer direction is taken along the length of the thin wire . When the length and thickness are longer than the phonon mean free path, the heat conduction follows the Fourier law and is a diffusive phonon. When the thickness is shorter than the phonon mean free path , the phonon conducts ballistic phonon in the thickness direction but heats more than the value characterized by diffusive phonon conduction due to phonon scattering due to the surface roughness of the wire. Conduction is reduced. When the length is shorter than the phonon mean free path, the ballistic phonon conduction, if not affected by the surface roughness, results in greater thermal conduction in the length direction than that characterized by diffusive phonon conduction. On the other hand, Non-Patent Document 2 evaluates the dependence on the amount of heat transfer in the thickness direction using non-equilibrium molecular dynamics for nanotubes. In a single-sheet nanotube, the surface roughness is reduced and there is an influence of ballistic phonon conduction in the length direction up to 1.6 μm at room temperature. As a result, the heat conduction is greater than the value characterized by diffusive phonon conduction. On the other hand, when the spatial dimension of the conductive material is small or when it is layered, the electrical conductivity is the allowance of the electrons carrying the current flowing in a narrow direction if the cross-sectional area traversed when the electrons move is small. The energy state interval generated is large and the scattering of electrons is less likely to occur, and the density of states of electrons changes depending on the spatial dimension, resulting in improved electrical conduction. Thermoelectric materials such as nanothin films, superlattices, and nanowires take advantage of the improvement in the figure of merit of thermoelectric materials at lower dimensions.

現在利用されている熱電材料には、ビスマス・テルル系、シリサイド系化合物などの金属間化合物がある。また新たな熱電材料として層状コバルト酸化物、クラスレート化合物などのかご状型のものや、強相関電子を利用したものがある。PbTe系化合物の最高使用温度は950K程度であるが、n型PbTeは不純物ドープによる電子濃度が5×1025−3のとき、約450K最高性能指数が1.7×10−3−1を持ち、電子濃度を増やすと徐々に最高性能指数が比例して減り、7×1025−3では、約800Kでは最高性能指数が1.2×10−3−1となる。PbTe系化合物は低温端温度が300で高温端温度が950Kである広い温度域をもつ。Thermoelectric materials currently in use include intermetallic compounds such as bismuth / tellurium and silicide compounds. Also, new thermoelectric materials include cage -type materials such as layered cobalt oxides and clathrate compounds, and those using strongly correlated electrons. The maximum use temperature of the PbTe-based compound is about 950K, but n-type PbTe has an about 450K maximum performance index of 1.7 × 10 −3 K −1 when the electron concentration by impurity doping is 5 × 10 25 m −3. When the electron concentration is increased, the maximum performance index gradually decreases in proportion. At 7 × 10 25 m −3 , the maximum performance index becomes 1.2 × 10 −3 K −1 at about 800K. PbTe-based compound hot end temperature at the cold end temperature 300 K has a wide temperature range is 950K.

電子が電極間の空間に移動することを使う発電方法に熱電子発電がある。この発電方法は、高温電極のエミッタから電子が熱エネルギーによって放出される熱電子放出現象を利用している。熱電子発電では空間電荷制限のため、電子がエミッタから放出するのを空間の電荷が阻害する可能性があるが、これを防ぐ方法には、セシウムを用いる方法と、電極間隔を数マイクロメートルまで狭くする方法がある。セシウムは電極間の空間電荷制限を防ぐために使用され、あるいは起電力を高めるためにエミッタの仕事関数とコレクタの仕事関数との差を大きくしているが、電極間で電子同士あるいは電子とセシウムとの弾性・非弾性衝突により電子のエネルギーが失われる。電極間距離を0.1mmにした宇宙用のものがある。  Thermoelectric power generation is a power generation method that uses the movement of electrons into the space between electrodes. This power generation method uses a thermionic emission phenomenon in which electrons are emitted from the emitter of a high temperature electrode by thermal energy. In thermionic power generation, space charge may block the discharge of electrons from the emitter due to space charge limitation. To prevent this, there are methods using cesium and electrode spacing up to several micrometers. There is a way to make it narrower. Cesium is used to prevent space charge limitation between electrodes, or the difference between the work function of the emitter and that of the collector is increased to increase the electromotive force. Electron energy is lost due to elastic / inelastic collisions. Some are for space use with a distance between electrodes of 0.1 mm.

熱流は許すが電流を流さないような絶縁膜あるいは空間をもち、発電に使用するために熱電材料を用いたものに、輻射伝熱型熱電変換システムがある。n型とp型の半導体を対にしてモジュールにしこれら絶縁膜あるいは空間が高温側壁か低温側壁のどちらかに接している。このモジュールでは電気回路は熱電材料や電極などに直接接続し離れていない。  A radiation heat transfer type thermoelectric conversion system has an insulating film or space that allows heat flow but does not flow current, and uses a thermoelectric material for power generation. An n-type and p-type semiconductor are paired to form a module, and these insulating films or spaces are in contact with either the high temperature side wall or the low temperature side wall. In this module, the electrical circuit is not directly connected to the thermoelectric material or electrodes.

熱流や電流がお互いに平行で、それらの流れる方向にそれらの流れを妨げるように空間を配した熱電材料を用いたシステムに、特許文献1、特許文献2の冷却システムがある。これらのシステムでは、外部に電源があるのでその電圧を大きくすれば、空間を電流が流れ、半導体中を熱も移動することになる。  As a system using thermoelectric materials in which a heat flow and an electric current are parallel to each other and a space is arranged so as to prevent the flow in the flow direction, there are cooling systems of Patent Document 1 and Patent Document 2. In these systems, since there is an external power supply, if the voltage is increased, a current flows through the space, and heat also moves through the semiconductor.

多結晶体を用いて化学組成を変えることなく熱電材料の性能指数を向上させるものに特許文献3のメカニカルアロイング法を用いるのもがある。また特許文献4ではバインダーにポリビニル・アルコールを使った鉄シリサイド粉体をプレス後、加熱してポリビニル・アルコールを取り除くそれまでの方法に対して、ゾルゲル法や乾式成膜法により作製したアモルファス構造の膜にすることで製作コストの低減を狙っている。特許文献5では放電プラズマ焼結して再結晶化を防いでいる。  The mechanical alloying method of Patent Document 3 is sometimes used to improve the figure of merit of a thermoelectric material without changing the chemical composition using a polycrystal. Further, in Patent Document 4, an iron silicide powder using polyvinyl alcohol as a binder is pressed, and then heated to remove polyvinyl alcohol by heating, an amorphous structure produced by a sol-gel method or a dry film forming method. The film aims to reduce manufacturing costs. In Patent Document 5, spark plasma sintering is used to prevent recrystallization.

電気伝導度を損なうことなく熱伝導度を小さくさせて性能指数を上げるために、非特許文献3では、BiSbTeの結晶をアルゴン中で数十ナノメートルに砕いてからホット・プレスして固めている。結晶間の「アモルファスと結晶の中間的な構造」を低コストで作製し40%の改良でZT=1.4している。特許文献6では熱流を防いで電流を流すために、結晶同士の界面にガラス層からなる粒界層が実質的に存在しないようにして格子振動を防ぐ工夫を行った熱電材料に100ナノメートル以下の多結晶を利用している。ここでは、かご状構造の熱電材料を用いてエアロゾルデポジション法による常温衝撃固化現象で基板上に構成している。In Non-Patent Document 3, BiSbTe crystals are crushed to a few tens of nanometers in argon and then hot-pressed and hardened in order to increase the figure of merit by reducing thermal conductivity without impairing electrical conductivity. . An “amorphous structure between crystals” is produced at low cost between crystals, and ZT = 1.4 with 40% improvement. In Patent Document 6, in order to prevent heat flow and flow current, a thermoelectric material in which a grain boundary layer composed of a glass layer is not substantially present at the interface between crystals to prevent lattice vibration is 100 nanometers or less. Is used. Here, a thermoelectric material having a cage structure is used and formed on a substrate by a normal temperature impact solidification phenomenon by an aerosol deposition method.

物体間の空間をどのように作業物質が移動するかは作業物質のポテンシャルによって決まる。その空間に接する表面近傍では電気鏡像効果によりそのポテンシャルが低くなる。そのポテンシャルは、シミュレーションによって、あるいは非特許文献4ように解析的に求められる。How the working material moves in the space between the objects depends on the potential of the working material. In the vicinity of the surface in contact with the space, the potential is lowered by the electromirror effect. Its potential, by simulation, or analytically determined as non-patent document 4.

表面の周りを囲む空間の作業物質のポテンシャル障壁を、熱・電磁波などのエネルギーによる作業物質のポテンシャル越え乃至トンネルによって通り抜けることによって、表面から作業物質を空間に移動させることができる。熱電子放出ではRichardson−Dushmanの式で仕事関数と放出電流は関係づけられている。電界電子放出では、トンネル透過による電流はFowler Nordheimの式などで電界強度と関係づけることができる。トンネル確率・熱・電磁波などにより空間内の作業物質の放出量が決まる。レーザー照射をおこなうとレーザー照射量によって作業物質の放出量がきまる。電流密度が1×1010A/mを超えると空間内の電荷量が大きくなり、電流が空間電荷で制限を受け性能指数が悪くなる(非特許文献5)。空間内の電流は端子間距離が短いほど効率がよくなる。The working substance can be moved from the surface to the space by passing through the potential barrier of the working substance in the space surrounding the surface through the tunnel through the potential of the working substance by energy such as heat and electromagnetic waves. In thermionic emission, the work function and emission current are related by the Richardson-Dushman equation. In field electron emission, the current due to tunnel transmission can be related to the electric field strength by the Fowler Nordheim equation or the like. The amount of work substance released in the space is determined by the tunnel probability, heat, and electromagnetic waves. When laser irradiation is performed, the amount of work substance released is determined by the amount of laser irradiation. When the current density exceeds 1 × 10 10 A / m 2 , the amount of charge in the space increases, and the current is limited by the space charge, resulting in a poor figure of merit (Non-patent Document 5). The current in the space becomes more efficient as the distance between the terminals is shorter.

放射線のエネルギーを利用して電力に変換するものとして原子力電池がある。これには原子核崩壊に伴う熱を利用するものとしないものに分けられる。熱を利用するものには熱電変換方式や熱イオン変換方式などがある。熱を利用しないものには放射線を半導体のpn接合に照射して起電力を得るものがある。  There is a nuclear battery that converts radiation energy into electric power. This can be divided into those that do not use the heat associated with nuclear decay and those that do not. There are a thermoelectric conversion method and a thermionic conversion method for using heat. Among those that do not use heat, there is one that obtains an electromotive force by irradiating a semiconductor pn junction with radiation.

放射性同位元素を使った熱電発電では、段落0035で説明するように放射性同位元素が自然崩壊の過程における放射粒子線を利用し放射性同位元素を含む部位の崩壊熱あるいは放射粒子線の捕集部でそのとき発生した熱エネルギーを使って熱電発電を行っている。In thermoelectric power generation using radioisotopes , as described in paragraph 0035, the radioisotope uses the radiation particle beam in the process of natural decay, and the decay heat of the part containing the radioisotope or the collection part of the radiation particle beam. Thermoelectric power generation is performed using the thermal energy generated at that time.

熱電材料を接合してモジュールに組み立てるには、接合する必要がある。接合する方法は、はんだ接合法・熱パルス法(熱プラズマ溶射法)・物理蒸着法・溶接法・電気めっき法(化学蒸着法)・加圧接触法・拡散接合法・厚膜焼成法(接合集合化法)などがある。はんだ接合法では、使用中のはんだ材料の拡散のために劣化が起こる。厚膜焼成法では、接合界面に於いて不純物や酸素の混入などにより物理的欠陥が生じやすい。また接合するため、その接合界面において熱応力が発生し熱電材料の耐久年数に大きく影響する。  To join thermoelectric materials into a module, they must be joined. Bonding methods include solder bonding method, heat pulse method (thermal plasma spraying method), physical vapor deposition method, welding method, electroplating method (chemical vapor deposition method), pressure contact method, diffusion bonding method, thick film firing method (bonding) There is an aggregation method). In the solder joint method, deterioration occurs due to diffusion of the solder material in use. In the thick film firing method, physical defects are likely to occur at the bonding interface due to impurities and oxygen mixing. Moreover, since it joins, a thermal stress generate | occur | produces in the joining interface, and has a big influence on the durable years of thermoelectric material.

熱電材料を用いたシステムは、使用する温度領域や熱量にあわせて、熱電材料の種類・形状・大きさや、その周りの断熱材の種類・厚みを選ぶことで最適化されている。空冷フィン、ファン付き空冷フィン、あるいは水冷などを用いて放熱を行い、そのほかの構造物との熱のやり取りも考慮しなければならない。そして、熱電材料はグリース・接着・はんだづけによって、電極・構造物に取り付けられている。また、はんだの電気化学的溶出がないように、あるいは請求項1で記載するようにグリース・接着剤などの拡散がないように、システム内のモジュール内部への湿気侵入防止のために、エポキシ樹脂、シリコン樹脂などでシールしている。こういったグリースやシール材によってモジュールの低温部と高温部間の熱伝導が生じて性能が下がっている。Systems using thermoelectric materials are optimized by selecting the type / shape / size of the thermoelectric material and the type / thickness of the surrounding heat insulating material according to the temperature range and heat quantity to be used. Heat should be dissipated using air-cooled fins, air-cooled fins with fans, or water cooling, and heat exchange with other structures must also be considered. The thermoelectric material is attached to the electrode / structure by grease, adhesion, or soldering. In addition, an epoxy resin is used to prevent moisture from entering the module in the system so that there is no electrochemical elution of solder, or there is no diffusion of grease or adhesive as described in claim 1. Sealed with silicon resin. Such grease and sealing material cause heat conduction between the low-temperature part and the high-temperature part of the module, which reduces the performance.

熱電材料を用いたモジュールに、電極対の間に一対のp型n型という極性の異なる熱電材料が挟まれたπ型のものがある。モジュール内部抵抗Rmod と熱伝導度κmodは、これらの熱電材料対の断面積や長さに依存する。モジュール性能指数Zmod

Figure 0005771852
となる。
mod κmodを形状因子(直方体形状の熱電材料の断面積/長さ)とπ型の数を成績係数Φ(=Q/P 冷却稼動、=Q/P 発電稼動)の向上によるジュール熱発生と外界への熱放出による非可逆過程による損出の低減。ここで、QとQはそれぞれ低熱源と高熱源からの吸収熱量、Pは電気的仕事を表す。また、絶縁体にセラミックス基盤が用いられるモジュールとセラミック基盤のない(スケルトンタイプ)ものがある。熱源間温度差や基盤の大きさによるがセラミックス基盤では高熱源と低熱源に挟まれた熱電モジュールに生じる熱応力が、スケルトンタイプより大きくなる。また、熱源と絶縁体、絶縁体と電極、電極と熱電材料、複数の異種熱電材料の接合からなるセグメント異種熱電材料、組成比や不純物濃度の最適化を温度分割し、熱流が直列になるように積重ねて一つの素子にするセグメント素子等の界面に生じる熱応力に対する耐久性の向上による耐熱サイクル性の改善が行われている。Some modules using thermoelectric materials are π-type modules in which a pair of p-type and n-type thermoelectric materials having different polarities are sandwiched between electrode pairs. The module internal resistance R mod i and the thermal conductivity κ mod depend on the cross-sectional area and length of these thermoelectric material pairs. Module performance index Z mod is
Figure 0005771852
It becomes.
R mod i κ mod is improved by improving the shape factor (cross-sectional area / length of a rectangular parallelepiped-shaped thermoelectric material) and the number of π-type coefficients of performance Φ (= Q c / P cooling operation, = Q h / P power generation operation) Reduction of loss due to irreversible processes due to Joule heat generation and heat release to the outside world. Here, Q c and Q h absorption heat from each low-temperature heat source and a high heat source, P is representative of the electrical work. In addition, there are a module in which a ceramic substrate is used as an insulator and a module without a ceramic substrate (skeleton type). Depending on the temperature difference between the heat sources and the size of the substrate, the thermal stress generated in the thermoelectric module sandwiched between the high and low heat sources is greater in the ceramic substrate than in the skeleton type. In addition, heat source and insulator, insulator and electrode, electrode and thermoelectric material, segment heterogeneous thermoelectric material consisting of joints of multiple different thermoelectric materials, optimization of composition ratio and impurity concentration, temperature division, so that the heat flow is in series The heat cycle resistance is improved by improving the durability against thermal stress generated at the interface of the segment element or the like which is stacked to form one element.

ある熱源に接触する絶縁体皮膜された電極板とそれと異なる熱源に接触する面が絶縁体で皮膜された電極板の対がある。この電極対の間にπ型モジュールを単位にシステムが構成される。例えば、発電稼動で出力電流を上げるために、複数のπ型モジュールの足部分の極性がそれぞれ同じ熱電材料になるように一枚の皮膜された電極板上に並ぶ並列配列あるいは出力電圧を上げるために、π型モジュールを上下に反転し極性の異なる対同士が一枚の皮膜された電極板に並ぶ直列配列、またこれらの複合した配列がある。このように複数のπ型モジュールは熱源、電極そして極性の異なる熱電材料の複数の対から組み立てられている。モジュールの性能を向上させるに熱電材料対の性能指数を変えることが必要である。このとき各π型の足の熱電材料対の断面積と長さがそれぞれ違う。熱電システムは、ある熱源から熱量Qinを取得し、それを熱電モジュールに与え、熱量は熱電材料中を流れて放熱量Qoutとしてもう一方の熱源へと放出される。この間に電気的仕事Pが外界に作用する。すなわち、

Figure 0005771852
(+はゼーベック効果による発電動作、−はペルチェ効果による冷却動作)
なるエネルギー収支バランスが生じる。システム効率ηは
Figure 0005771852
である。ηを最大化するには
1)使用するモジュールの能力と目標性能とをバランスさせる。
2)モジュール単体の性能を適当な経済性で最大発揮できるようにする。
を考慮に入れる。
例えば、発電稼動のシステム効率ηgen
Figure 0005771852
である。モジュール内部抵抗R MODと外部仕事する際の抵抗Rの比m=R/R MODについて、ηgenを最大にするmになるように最適化する。最大効率ηmaxは温度条件と熱電材料の物性値すなわち性能指数のみによって決まることが知られている。また、冷却稼動のシステム効率ηre
Figure 0005771852
で表される。ηreを最大にするmになるように最適化する。その結果、Rに流れる作業物質流が最小化されPが最小になる。Surface contacting the coating is an electrode plate with an insulator in contact with a certain heat source to that different heat source is a pair of film is an electrode plate with an insulator. A system is configured between the electrode pairs in units of π-type modules. For example, in order to increase the output current in power generation operation, in order to increase the parallel arrangement or the output voltage on a single coated electrode plate so that the legs of the plurality of π-type modules have the same thermoelectric material, respectively. In addition, there are a series arrangement in which π-type modules are turned upside down and pairs having different polarities are arranged on a single coated electrode plate, or a composite arrangement of these. Thus, the plurality of π-type modules are assembled from a plurality of pairs of heat sources, electrodes, and thermoelectric materials having different polarities. It is necessary to change the figure of merit of thermoelectric material pairs to improve module performance . At this time, the cross-sectional areas and lengths of the thermoelectric material pairs of each π-type foot are different. The thermoelectric system obtains a heat quantity Q in from one heat source and applies it to the thermoelectric module, and the heat quantity flows through the thermoelectric material and is released to the other heat source as a heat release quantity Q out . During this time, electrical work P acts on the outside world. That is,
Figure 0005771852
(+ Is power generation operation by Seebeck effect,-is cooling operation by Peltier effect)
The energy balance becomes. System efficiency η is
Figure 0005771852
It is. To maximize η 1) Balance the capabilities of the modules used and the target performance.
2) To maximize the performance of a single module with appropriate economic efficiency.
Take into account.
For example, the system efficiency η gen for power generation operation is
Figure 0005771852
It is. The ratio m = R o / R i MOD of the module internal resistance R i MOD and the resistance R o at the time of external work is optimized so as to be m that maximizes η gen . It is known that the maximum efficiency η max is determined only by temperature conditions and physical property values of thermoelectric materials, that is, performance indexes. The system efficiency η re for cooling operation is
Figure 0005771852
It is represented by Optimize for m to maximize ηre . As a result, P working substance flowing through the R o is minimized is minimized.

US2005/0016575A1US2005 / 0016575A1 特開2009−21593JP2009-21593 特開平9−55542JP-A-9-55542 特開平10−27927JP-A-10-27927 特開平10−41554JP 10-41554 A 特開2007−246326JP2007-246326

Phys.Rev.B47,(1993)16631Phys. Rev. B47, (1993) 16631 Jpn.J.Appl.Phys.,47(2008)2005Jpn. J. et al. Appl. Phys. 47 (2008) 2005 Poudel,B.et al.,“High−Thermoelectric Performance of Nanostructured Bismuth Antimony Telluride Bulk Alloys,”Science,vol.320,no.5876,pp.634−638,May 2008.Poudel, B.M. et al. , “High-Thermoelectric Performance of Nanostructured Bismuth Antimony Telluride Bulk Alloys,” Science, vol. 320, no. 5876, pp. 634-638, May 2008. Jpn.J.Appl.Phys.48,098006(2009)Jpn. J. et al. Appl. Phys. 48,098006 (2009) Appl.Phys.33,2917(1962)Appl. Phys. 33, 2917 (1962) J.−P.Fleurial,G.J.Snyder,J.A.Herman,P.H.Giauque,W.M.Phillips,M.A.Ryan,P.Shakkottai,E.A.Kolawa and M.A.Nicolet:18th International Conference on Thermoelectrics(1999).J. et al. -P. Fleurial, G.M. J. et al. Snyder, J .; A. Herman, P.M. H. Giaque, W.M. M.M. Phillips, M.M. A. Ryan, P.A. Shakkottai, E .; A. Kolawa and M.K. A. Nicolet: 18th International Conference on Thermoelectrics (1999).

熱電材料には熱伝導度が絶縁体のように小さく、しかも電気抵抗が金属のように低いことが望ましいが、電気抵抗率と熱伝導率は相互依存している。その結果、良い熱電材料を開発するには苦労を必要とする。空間あるいは細線で空間を架橋することにより熱電システムの効率をさらに向上させることを目的とする。  The thermoelectric material preferably has a low thermal conductivity like an insulator and a low electric resistance like a metal, but the electrical resistivity and the thermal conductivity are interdependent. As a result, developing a good thermoelectric material requires effort. The purpose is to further improve the efficiency of the thermoelectric system by bridging the space with spaces or fine wires.

請求項1は、図1のように熱電材料10、11の熱流乃至作業物質流が伝わる方向に伝熱を防げるように、サブマイクロメートルの空間12を配し、この空間12での作業物質流が左右の2つの熱電材料10、11での作業物質流と、ほとんど変えずあるいはより大きな値を保ちつつ、格子振動・マグノン・スピン波といった擬粒子が存在することに起因する伝熱や、熱源による熱揺らぎ、そして低温での量子揺らぎを抑えることで熱電システムの効率を向上させることを特徴とする。図1の空間12を造る2つの熱電材料10、11の端子間内の尖塔表面13から、対峙端子表面14間距離が尖塔表面13での絶対温度Tに依存した「距離」Lmax(T)を超えると、空間12のフォノンによる熱伝達をほとんど無視できるようになる。なお、格子振動のLmax(T)に比べマグノンやスピン波などのLmax(T)は遥かに小さい。Lmax(T)は、原子間力顕微鏡と測定表面間距離の実測測定範囲から得ることができる。一方、空間はサブマイクロ以下にすることによって、作業物質の空間電荷に制限されるのを回避することを可能とする。空間の大きさをサブマイクロメートルからLmax(T)に近づけることで、この部分の作業物質流をより大きくできる。以後、熱流乃至作業物質流の伝わるのを防げるように1つ以上存在する上記構造を含んだ空間を空間部分と略する。熱電材料10,11のいずれか一方を熱電材料以外の作業物質良導体にすることもできる。稼働時は空間部分の輻射エネルギー損失による熱エネルギーの伝導は空間部分の対峙端子間13,14の温度差と、対峙する面積に依存する。端子間13、14がLmax(T)より広いがサブマイクロメートルよりも狭いと、空間部分を挟む熱電材料間や熱電材料と電極間の温度差は数ケルビン程度のため殆ど損出は抑えられる。また空間12を真空にすることで、そこでの対流による伝熱を抑えられる。金属では熱伝導は古典系作業物質の熱伝導成分κによるものがほとんどであるが、半導体になってくると、格子による熱伝導成分κph成分が大きくなっていく。空間部分でのκとκphの物理伝達現象の要因の違いを利用して、κphをゼロそしてκ を低減する工夫である。
κph成分とκ成分が同じ場合には、フォノンによる熱伝導だけを抑えて他が変わらなくすると数1の性能指数は容易に2倍になる。性能指数の良い熱電材料にκph成分とκ成分が同程度のものがある。
本明細書に組み込まれ、その一部を構成する添付の図面は、本発明の原理に従った1つ以上の実施例を図示し、本明細書とともに、そのような実施例を模式的に説明するものである。発明の概念図では発明の本質を強調した説明になっている。
In the first aspect, as shown in FIG. 1, a submicrometer space 12 is arranged so as to prevent heat transfer in the direction in which the heat flow or working substance flow of the thermoelectric materials 10 and 11 is transmitted. The heat transfer due to the existence of quasi-particles such as lattice vibration, magnon, and spin wave while maintaining almost the same or larger value as the working substance flow in the two left and right thermoelectric materials 10, 11 It is characterized by improving the efficiency of the thermoelectric system by suppressing the thermal fluctuations due to, and the quantum fluctuations at low temperatures. The distance between the pinnacle surfaces 13 between the terminals of the two thermoelectric materials 10, 11 that make up the space 12 in FIG. 1 depends on the absolute temperature T at the pinnacle surface 13, “distance” L max (T) Exceeding this makes it possible to almost ignore the heat transfer due to the phonons in the space 12. Incidentally, compared to the lattice vibration L max (T) magnon and L max, such as spin waves (T) is much smaller. L max (T) can be obtained from the actual measurement range of the distance between the atomic force microscope and the measurement surface. On the other hand, by making the space below sub-micro, it is possible to avoid being limited to the space charge of the working substance. The working material flow in this portion can be made larger by making the size of the space closer to L max (T) from submicrometers. Hereinafter, a space including one or more of the above-described structures so as to prevent transmission of heat flow or working material flow is abbreviated as a space portion. Either one of the thermoelectric materials 10 and 11 can be a good working substance conductor other than the thermoelectric material. During operation, conduction of thermal energy due to radiation energy loss in the space portion depends on the temperature difference between the opposed terminals 13 and 14 in the space portion and the area to be opposed. When terminals 13 and 14 are wider than L max (T) but narrower than sub-micrometers, the temperature difference between thermoelectric materials sandwiching the space and between thermoelectric materials and electrodes is about several Kelvin, so that almost no loss can be suppressed. . Further, by making the space 12 into a vacuum, heat transfer by convection there can be suppressed. Although the thermal conductivity in the metal is mostly due to heat conduction component kappa c classical system working substance and becomes a semiconductor, the thermal conductivity component kappa ph component due to the lattice becomes larger. By utilizing a difference in factors of physical transfer phenomena kappa c and kappa ph in space portion, a contrivance for reducing the zero and kappa c the kappa ph.
If the κ ph component and the κ c component are the same, the performance index of Equation 1 can easily be doubled if only the heat conduction by phonons is suppressed and the others remain unchanged. Thermoelectric materials with good figure of merit have the same κ ph and κ c components .
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate one or more embodiments in accordance with the principles of the invention and together with the description schematically illustrate such embodiments. To do. The conceptual diagram of the invention emphasizes the essence of the invention.

空間部分をいれることで、発電稼働時に空間部分が作業物質流を主に妨げる可能性がある。熱、電界、電磁波などを利用して作業物質は表面から放出される。図1で作業物質が11から10の方向に移動するとき、空間部分では、熱電材料内13,14の熱などのエネルギーによる作業物質が励起することによって、あるいは尖塔表面13近傍で作業物質がそのポテンシャル障壁をトンネル透過することによって、作業物質が空間部分12に移り、対峙極14へと移動する。巨視的量子力学によると、空間部分界面13の作業物質のポテンシャル障壁をトンネル透過する確率は作業物質質量が大きくなれば成るほど指数関数的に小さくなるが、極低温で稼動するときは揺らぎが抑えられるのでLmax(T)がより小さくなり、13,14の端子間距離をより狭くできることで、作業物質質量が大きいイオンによる熱電変換素子も可能になる。半導体での電子とホールでは、一般にホールの質量が電子の質量の数倍である。その結果、ある程度空間12が離れるとp形半導体でもホールがトンネル透過するよりは電子がトンネル透過する。熱電材料11が半導体、尖塔13が金属であるときは、半導体11と尖塔13とは発電稼働時はオーミック接合、冷却稼働ではショットキー接合であるほうがいい。 By inserting the space portion, the space portion may mainly hinder the work material flow during power generation operation. The work substance is released from the surface using heat, electric field, electromagnetic waves, and the like. When the working substance moves in the direction from 11 to 10 in FIG. 1, the working substance is excited in the space portion by the excitation of the working substance by energy such as heat in the thermoelectric materials 13, 14 or in the vicinity of the spire surface 13. By tunneling through the potential barrier, the working substance moves to the space portion 12 and moves to the counter electrode 14. According to macroscopic quantum mechanics, the probability of tunneling through the potential barrier of the working material at the space interface 13 decreases exponentially as the working material mass increases, but fluctuations are suppressed when operating at very low temperatures. Therefore, L max (T) becomes smaller and the distance between the terminals 13 and 14 can be made narrower, so that a thermoelectric conversion element using ions having a large working substance mass is also possible. In the case of electrons and holes in a semiconductor, the mass of holes is generally several times the mass of electrons. As a result, when the space 12 is separated to some extent, electrons are tunneled through the p-type semiconductor rather than through holes. When the thermoelectric material 11 is a semiconductor and the steeple 13 is a metal, the semiconductor 11 and the steeple 13 are preferably ohmic junctions during power generation operation and Schottky junctions during cooling operation .

空間部分をいれることで、発電稼働時に空間部分が作業物質流を主に妨げる可能性がある。熱、電界、電磁波などを利用して作業物質は表面から放出される。図1で作業物質が11から10の方向に移動するとき、空間部分では、熱電材料内13,14の熱などのエネルギーによる作業物質が励起することによって、あるいは尖塔表面13近傍で作業物質がそのポテンシャル障壁をトンネル透過することによって、作業物質が空間部分12に移り、対峙極14へと移動する。巨視的量子力学によると、空間部分界面13の作業物質のポテンシャル障壁をトンネル透過する確率は作業物質質量が大きくなれば成るほど指数関数的に小さくなるが、極低温で稼動するときは揺らぎが抑えられるのでLmax(T)がより小さくなり、13,14の端子間距離をより狭くできることで、作業物質質量が大きいイオンによる熱電変換素子も可能になる。半導体での電子とホールでは、一般にホールの質量が電子の質量の数倍である。その結果、ある程度空間12が離れるとp形半導体でもホールがトンネル透過するよりは電子がトンネル透過する。熱電材料11が半導体、尖塔13が金属であるときは、半導体11と尖塔13とは発電稼働時はオーミック接合、冷却稼働ではショットキー接合であるほうがいい。By inserting the space portion, the space portion may mainly hinder the work material flow during power generation operation. The work substance is released from the surface using heat, electric field, electromagnetic waves, and the like. When the working substance moves in the direction from 11 to 10 in FIG. 1, the working substance is excited in the space portion by the excitation of the working substance by energy such as heat in the thermoelectric materials 13, 14 or in the vicinity of the spire surface 13. By tunneling through the potential barrier, the working substance moves to the space portion 12 and moves to the counter electrode 14. According to macroscopic quantum mechanics, the probability of tunneling through the potential barrier of the working material at the space interface 13 decreases exponentially as the working material mass increases, but fluctuations are suppressed when operating at very low temperatures. Therefore, L max (T) becomes smaller and the distance between the terminals 13 and 14 can be made narrower, so that a thermoelectric conversion element using ions having a large working substance mass is also possible. In the case of electrons and holes in a semiconductor, the mass of holes is generally several times the mass of electrons. As a result, when the space 12 is separated to some extent, electrons are tunneled through the p-type semiconductor rather than through holes. When the thermoelectric material 11 is a semiconductor and the steeple 13 is a metal, the semiconductor 11 and the steeple 13 are preferably ohmic junctions during power generation operation and Schottky junctions during cooling operation.

空間部分に電圧が印加されると、尖塔の高さが高く、表面13、14の端子間距離がL  When voltage is applied to the space, the height of the spire is high and the distance between the terminals of the surfaces 13 and 14 is L maxmax (T)に大きいほうから近づけたり、図1の尖塔表面13の凸先端部で曲率半径が小さかったりすれば電界が大きくなり、作業物質である荷電粒子の尖塔表面13近傍での作業物質のポテンシャル障壁の高さと厚さが大きく低減する。最大電界は尖塔表面13の凸先端部近傍であり、熱電材料11と尖塔表面13の接合面から尖塔表面13の凸先端までの高さと凸先端部の曲率半径に依存する増強因子βを用いるとその最大電界EIf the radius is closer to (T) or the radius of curvature is small at the convex tip portion of the spire surface 13 in FIG. 1, the electric field becomes larger, and the potential of the working substance in the vicinity of the spire surface 13 of charged particles as the working substance. The height and thickness of the barrier are greatly reduced. The maximum electric field is in the vicinity of the convex tip of the steeple surface 13, and an enhancement factor β that depends on the height from the joint surface of the thermoelectric material 11 and the steeple surface 13 to the convex tip of the steeple surface 13 and the radius of curvature of the convex tip is used. Its maximum electric field E Convex はEIs E Convex =βE= ΒE s となる。ここで、EIt becomes. Where E s は熱電変換素子の作業物質放出表面13が平板のときの平板近傍電界である。作業物質がトンネル透過するにはこの値が10Is an electric field in the vicinity of a flat plate when the working substance discharge surface 13 of the thermoelectric conversion element is flat. This value is 10 for the working material to pass through the tunnel. 9 [V/m]より大きい必要がある。尖塔表面13の曲率半径を小さくし、尖塔の高さを高くし、表面13、14の端子間距離を短くすることで電界を高めることができる。電流は尖塔先端の表面近傍の電界や作業物質放出面積に依存し、作業物質の種類や作業物質の熱励起放出・作業物質の電界放出・作業物質の光放出などの放出方法によってあるいは空間12での空間電荷分布にしたがって流れる。It must be larger than [V / m]. The electric field can be increased by reducing the radius of curvature of the steeple surface 13, increasing the height of the steeple, and shortening the distance between the terminals of the surfaces 13 and 14. The current depends on the electric field in the vicinity of the surface of the tip of the spire and the work substance emission area. Depending on the type of the work substance, the thermal excitation emission of the work substance, the field emission of the work substance, the light emission of the work substance, or the space 12 It flows according to the space charge distribution.

図1の空間12に与えられた電圧では空間部分に生じる電界の強さを必要な値まで大きくできない場合、あるいは作業物質流が小さい場合は、図2のように作業物質である荷電粒子受取端子表面22の形状を、作業物質である荷電粒子放出尖塔表面24を囲むように変形することで、最大電界E  When the voltage applied to the space 12 in FIG. 1 cannot increase the intensity of the electric field generated in the space portion to a required value or when the working material flow is small, the charged particle receiving terminal which is the working material as shown in FIG. By deforming the shape of the surface 22 so as to surround the charged particle emission spire surface 24 which is a working substance, the maximum electric field E Convex の値は変形する前より高まりそこでの荷電粒子放出する面積部分は増加する。またその他の尖った部位の電界が最大になる可能性もでてくる。その結果、荷電粒子放出量が増える。このように、表面22,24の形状を変化させることにより、作業物質である荷電粒子の電界放出による空間23での作業物質流が空間を挟む熱伝導材料20,21のいずれかの作業物質流に出来るだけ近づけ、あるいはより良くすることで、数1の性能指数を向上させることを可能とする。作業物質流量が小さい場合に図3のよう複数の尖塔構造30,31,32にし、並列にすることで作業物質流量を増やすことができる。The value of becomes higher than before deformation, and the area where charged particles are emitted increases. There is also a possibility that the electric field of other pointed parts will be maximized. As a result, the amount of charged particle emission increases. In this way, by changing the shape of the surfaces 22 and 24, the working substance flow in the space 23 due to the electric field emission of the charged particles as the working substance causes the working substance flow of any of the heat conducting materials 20 and 21 to sandwich the space. It is possible to improve the figure of merit of Equation 1 by making it as close as possible or better. When the working material flow rate is small, the working material flow rate can be increased by forming a plurality of spire structures 30, 31, and 32 in parallel as shown in FIG.

図1の熱電材料10、11の温度勾配によって発生した電圧を、空間12での作業物質の移動に利用することで、外部に電源などを設置することなく、空間12に作業物質を流すための電界による力が発生する。尖塔部分が熱電材料であれば、その部分でも電圧を得るごとができ、数1の性能指数が大きくなる。10、11間が広いときには尖塔部分も高くなり、その部分での温度差も大きくなることから、多くの起電力を生じさせるように数十ナノメートル長程度の微結晶体の集合体からなる熱電材料、あるいは熱電材料の空間次元の制御を含めた素材形状やそれらの集合体などを尖塔の部分に用いれば最大電界Eがその部分に熱電材料を用いない場合より大きくなり、空間部分の作業物質流が増え数1の性能指数を更に改善できる。尖塔部分の熱電材料の空間次元は、1次元(図4a)あるいは2次元(図4b,c)あるいは層状(図5)にすることができる。The voltage generated by the temperature gradient of the thermoelectric materials 10 and 11 in FIG. 1 is used for the movement of the working substance in the space 12, so that the working substance can flow in the space 12 without installing a power source or the like outside. A force is generated by the electric field. If the steeple portion is a thermoelectric material, voltage can be obtained even at that portion, and the figure of merit of Equation 1 is increased. When the space between 10 and 11 is wide, the steeple portion becomes high, and the temperature difference at that portion also becomes large. Therefore, a thermoelectric power composed of an aggregate of microcrystals of about several tens of nanometers long so as to generate many electromotive forces. If the shape of the material, including the control of the spatial dimension of the material or thermoelectric material, or an assembly thereof is used for the spire part, the maximum electric field E convex will be larger than if no thermoelectric material is used for that part, and work in the space part The material flow increases and the figure of merit index can be further improved. The spatial dimension of the thermoelectric material in the spire portion can be one-dimensional (FIG. 4a), two-dimensional (FIG. 4b, c) or layered (FIG. 5).

作業物質は、図1の空間12中を移動しているとき、物質中10を移動しているとき、物質中11を移動しているとき、対峙表面13に存在しているとき、対峙表面14に存在しているときで位置エネルギー・運動エネルギーが異なっている。また作業物質の種類自体も変わる可能性もある。作業物質が11から10の方向に移動する場合、表面13から出る作業物質は熱電材料11から熱を奪う。一方、作業物質が空間12を移動して受取対峙端子14に結合したときには、空間12での作業物質のエネルギーと物質10での作業物質のエネルギーとの差が、熱などのエネルギーとして放出される。このとき発生される熱エネルギーを使い熱電材料10の起電力を大きくすることができる。  When the working substance is moving in the space 12 of FIG. 1, moving in the substance 10, moving in the substance 11, or existing on the facing surface 13, the facing surface 14 The potential energy and kinetic energy are different when they exist. In addition, the type of working substance itself may change. When the working substance moves in the direction from 11 to 10, the working substance exiting the surface 13 takes heat away from the thermoelectric material 11. On the other hand, when the working substance moves through the space 12 and is coupled to the receiving terminal 14, the difference between the working substance energy in the space 12 and the working substance energy in the substance 10 is released as energy such as heat. . The electromotive force of the thermoelectric material 10 can be increased using the thermal energy generated at this time.

図1の空間12を移動する作業物質が熱電材料表面あるいは電極表面を通過する際に、この作業物質がもつエネルギーがトンネル透過時のトンネル摩擦により表面近傍の表面作業物質状態へ散逸し、材料部分内の伝導する作業物質濃度が増加し作業物質流が多くなる。材料内や材料間の空間を移動する作業物質はその移動する方向に運動量を持っている。一方、対峙表面のエネルギー状態を変化させ作業物質の対峙面内に進入する際の摩擦エネルギー損出が少なくして、この運動量を利用することにより、さらに電流量を大きくすることができる。  When the working substance moving in the space 12 in FIG. 1 passes through the surface of the thermoelectric material or the electrode surface, the energy of the working substance is dissipated to the surface working substance state near the surface due to tunnel friction during tunnel transmission. The concentration of the working substance to be conducted increases, and the working substance flow increases. A working substance that moves in and between materials has momentum in the direction of movement. On the other hand, the amount of current can be further increased by changing the energy state of the facing surface to reduce frictional energy loss when the working substance enters the facing surface and using this momentum.

空間12があると、異種固体接合界面を透過する拡散固体原子の拡散が少なくなり、特に、高温部での熱電材料と電極間での相互の固体原子拡散が少なくなり、熱変換素子の内部抵抗Rが小さい上、耐久年数が向上する。冷却稼働時のように熱電変換素子の内部抵抗Rを小さくなるので消費電力が低減できるだけでなく、使用する電源に交流成分Iacが含まれるとRのためにR(Iac/2だけ吸熱量が低下する。このため印加する直流電源は交流成分の含有率であるリップル率が同じ電源では効率が上がる。When the space 12 is present, the diffusion of the diffused solid atoms that permeate the heterogeneous solid junction interface is reduced. In particular, the mutual diffusion of the solid atoms between the thermoelectric material and the electrode at the high temperature portion is reduced, and the internal resistance of the heat conversion element is reduced. R i is small and the durability is improved. The cooling decreases the internal resistance R i of the thermoelectric conversion element as during operation not only the power consumption can be reduced, R i (I ac) for the include AC component I ac to power supply used R i 2 The endothermic amount decreases by / 2. For this reason, the direct-current power source to be applied is more efficient when the power source has the same ripple rate as the AC component content.

請求項1は図1の対峙端子対13、14が分離した空間部分の存在する熱電変換素子であるが、上記の方法を用いても作業物質が空間部分を移動しにくく、空間部分内の伝導する作業物質流が空間部分を挟む両端の熱伝導材料内の作業物質流に満たない場合がある。この場合には図6のように作業物質良導体で空間62を架橋することで、熱流を抑えた状態で、Lmax(T)よりも長い部材を用いることで対峙する端面61から端面60への直接の格子振動による熱流を抑えて、分離しているときより大きな作業物質流を得ることが可能である。図6で63として、数ナノメートルの径をもつ柱状(図4a)あるいは、数ナノメートルの厚みをもつ筒状(図4b)あるいは、作業物質流の方向に対して垂直面の少なくとも一辺が、数ナノメートルの長さである板状(図4c)の部材を使うと肉厚を表わす断面ではない表面でのフォノン散乱の影響が表面以外でのフォノン散乱の影響に比べて顕著になる。また、この場合作業物質流の方向以外で作業物質が散乱を受けにくい状態が存在することになり、表面が作業物質流の方向での作業物質の散乱にあまり影響を与えないほどの微小断面積であれば、作業物質流が大きくなる。空間次元の影響が作業物質流に影響を与える。この断面積で、架橋部材内部の作業物質流が架橋部材を挟む両端の熱電材料の作業物質流より小さくなるときには、作業物質良導体の断面積を大きくするか、複数の作業物質良導体を用いる(以後、微細構造物で架橋した空間を繋がった空間部分と略す)。数ナノメートルの肉厚の板状の部材(図4b,c)では細い部材(図4a)に比べて作業物質流が悪くなるが、三次元であるバルクに比べてはよくなる。請求項2では図6のように熱電変換素子60、61の間62に細い伝導体小体63で対峙端子対が繋がった空間部分を持つことにより性能指数を高めることを特徴とする。Claim 1 is a thermoelectric conversion element in which a space portion where the counter terminal pairs 13 and 14 of FIG. 1 are separated exists. However, even if the above method is used, the working substance is difficult to move in the space portion, and conduction in the space portion is performed. There are cases where the working substance flow to be performed is less than the working substance flow in the heat conducting material at both ends sandwiching the space portion. In this case, the space 62 is bridged with a working material good conductor as shown in FIG. 6, so that the heat flow is suppressed and a member longer than L max (T) is used to face the end surface 61 to the end surface 60. It is possible to suppress the heat flow due to direct grid vibration and obtain a larger working material flow when separated. As 63 in FIG. 6, at least one side of a columnar shape having a diameter of several nanometers (FIG. 4a), a cylindrical shape having a thickness of several nanometers (FIG. 4b), or a plane perpendicular to the direction of the working substance flow, When a plate-like member having a length of several nanometers (FIG. 4c) is used, the influence of phonon scattering on a surface that is not a cross section representing the thickness becomes more significant than the influence of phonon scattering outside the surface. In addition, in this case, there is a state where the working substance is not easily scattered in the direction other than the working substance flow direction, and the surface has a small cross-sectional area that does not significantly affect the scattering of the working substance in the working substance flow direction. If so, the working material flow is increased. Spatial dimension influences the working material flow. When the working material flow inside the bridging member is smaller than the working material flow of the thermoelectric material at both ends sandwiching the bridging member with this cross-sectional area, the cross-sectional area of the working material good conductor is increased or a plurality of working material good conductors are used (hereinafter referred to as the working material good conductor). , A space that is cross-linked with a fine structure is abbreviated as a space part). A plate-like member having a thickness of several nanometers (FIGS. 4B and 4C) has a worse working substance flow than a thin member (FIG. 4A), but is better than a three-dimensional bulk. As shown in FIG. 6, the figure of merit is enhanced by having a space portion where a pair of opposite terminals are connected by a thin conductor body 63 between the thermoelectric conversion elements 60 and 61 as shown in FIG.

図4aあるいは、図4で斜線をつけた断面方向から見て、図4bを組み合わせて図5aのような構成の円筒層状構造、あるいは図4cを組み合せて図5bのような構成の平板層状構造あるいは熱電材料中の作業物質流を、繋がった空間部分のない熱電材料より小さくしないだけの断面積をもつ細い柱状導体を以後、細線構造と略す。フォノンを散乱させるような界面をもつようにして作業物質の移動度の高い部分を層状にすることにより、熱の伝達を悪くし数1の性能指数を高めることができる。それに加えて、作業物質の移動度の高い隣接する部分に、径方向に作業物質が伝わらないだけの厚みを持つ作業物質の移動度の低い部分を介すことにより、細線構造全体としての作業物質流を高め数1の性能指数を高めることができる。細線63が短いとフォノンが弾道的となりそれによる熱伝導度が大きくなってしまい、性能指数が小さくなる。細線63が長い場合は、その部分に熱電材料を用いることにより、そこでの熱起電力により性能指数を上げることができる。  4a or 4b, the cylindrical layered structure configured as shown in FIG. 5a by combining FIG. 4b, or the flat plate layered structure configured as shown in FIG. A thin columnar conductor having a cross-sectional area that does not make the working substance flow in the thermoelectric material smaller than that of a thermoelectric material without a connected space portion is hereinafter abbreviated as a thin wire structure. By forming an interface that scatters phonons and stratifying a portion having a high mobility of the working substance, heat transfer can be deteriorated and the figure of merit of Equation 1 can be increased. In addition, the work material as a whole of the thin wire structure is formed by passing the low work material mobility part having a thickness sufficient to prevent the work material from being transmitted in the radial direction to the adjacent part where the work material mobility is high. The flow can be increased and the figure of merit of number 1 can be increased. If the thin wire 63 is short, the phonon becomes ballistic, resulting in an increase in thermal conductivity and a decrease in the figure of merit. When the thin wire 63 is long, by using a thermoelectric material for that portion, the figure of merit can be increased by the thermoelectromotive force there.

細線構造はフォノンの平均自由行程よりも長いと熱伝導はフーリエ法則に従う。短く弾道的になると熱伝導が大きくなり効率がわるくなる。図6で細線構造63と60または61との界面に格子不整合、不純物、格子欠陥をできる限り少なくすることで、そこでの作業物質流がその両側にある熱電材料60、61の作業物質流にできる限り近づけるかあるいはより良くすることができる。繋がった部分空間を挟む両端の熱電材料の作業物質流を凌駕する作業物質流が得られるように図7のように複数の細線構造を空間に導入する。  If the wire structure is longer than the phonon mean free path, the heat conduction follows the Fourier law. Shorter ballistics increase heat transfer and reduce efficiency. In FIG. 6, by reducing lattice mismatch, impurities, and lattice defects as much as possible at the interface between the thin wire structures 63 and 60 or 61, the working material flow there becomes a working material flow of the thermoelectric materials 60 and 61 on both sides thereof. It can be as close or better as possible. A plurality of fine wire structures are introduced into the space as shown in FIG. 7 so as to obtain a working material flow that exceeds the working material flow of the thermoelectric material at both ends across the connected partial space.

電流は、古典系作業物質あるいは量子系作業物質により伝えられる。熱は電力を生じさせるものに付随して伝えられたり、格子振動、輻射などによって伝えられたりする。空間部分が狭い場合、あるいは空間部分が細線によって架橋された場合は極低温では量子系作業物質を利用することができる。以後細線によって架橋された空間部分を繋がった空間部分と略する。磁場がある場合、ホール効果やネルンスト効果により、あるいはそれに作業物質の抵抗が加わり、熱流や電流や電圧が同じ方向を向かない。格子振動に対してはL max (T)以上の距離であり、作業物質流に対してはそれに付随する伝熱を妨げるように空間部分や繋がった空間部分を設けることにより熱電材料の性能指数を向上させる。The current is transmitted by a classical working material or a quantum working material. Heat is transmitted along with what generates electric power, or is transmitted by lattice vibration, radiation, or the like. When the space portion is narrow, or when the space portion is cross-linked by a thin line , the quantum work material can be used at a very low temperature. Hereinafter, the space part bridged by the thin line is abbreviated as a connected space part. In the presence of a magnetic field, the resistance of the work substance is added due to the Hall effect or the Nernst effect, or the heat flow, current and voltage do not point in the same direction. It is a distance of L max (T) or more with respect to lattice vibration, and the performance index of the thermoelectric material is obtained by providing a space portion or a connected space portion so as to prevent the heat transfer associated with the working material flow. Improve.

光を含む電磁波や放射線を図8の空間82に接し対峙する熱電材料81の界面に照射すると、そのエネルギーが作業物質に与えられる。これにより作業物質が高いエネルギー状態になり、空間部分への作業物質のポテンシャル障壁越えのエネルギーが小さくなる。
また作業物質のポテンシャルをトンネル透過するポテンシャル障壁の幅が小さくなる。あるいは表面上の飛び出しやすい作業物質の状態をとることができる。放射線源は、主に、作業物質の作業物質放出表面から作業物資受取表面への移動を助ける働きをする。請求項3は図8の空間82を移動する作業物質や、放出端子表面をもつ材料81や表面から空間82に出ようとする作業物質に空間82に配した電磁波供給部や放射線源から作業物質にエネルギーを与え、作業物質が空間82を伝導しやすくすることを可能とする。放射線源を作業物質の放出端子乃至放出端子81に対峙する熱電材料80表面部分に埋め込むこともできる。放射線源を作業物質放出端子81近傍に置いた場合あるいは埋め込んだ場合には、放射崩壊による熱を利用することができる。光を用いる場合には光ファイバー等を用いて空間部分内に導き作業物質放出面を照射する。あるいは空間部分での中心部分での対峙端子間距離が短く、外側で対峙端子間距離を長くすることで内部まで光が到達できるようになる。図8において81を尖塔構造にすることで電界電子放出の効果を含めることもできる。
When an electromagnetic wave or radiation containing light is applied to the interface of the thermoelectric material 81 that contacts and opposes the space 82 in FIG. 8, the energy is given to the work substance. As a result, the working substance becomes a high energy state, and the energy exceeding the potential barrier of the working substance to the space portion is reduced.
In addition, the width of the potential barrier that tunnels through the potential of the working material is reduced. Or the state of the working substance which is easy to jump out on the surface can be taken. The radiation source primarily serves to help move the work material from the work material discharge surface to the work material receiving surface. Claim 3 is a working substance moving from the electromagnetic wave supply part or radiation source disposed in the space 82 to the working substance moving in the space 82 in FIG. 8, the material 81 having the discharge terminal surface, or the working substance to be released from the surface into the space 82. The working material can be easily conducted through the space 82. It is also possible to embed the radiation source in the surface portion of the thermoelectric material 80 facing the work substance discharge terminal or the discharge terminal 81. When the radiation source is placed in the vicinity of the working substance discharge terminal 81 or embedded, the heat generated by the radiation decay can be used. When light is used, it is guided into the space using an optical fiber or the like to irradiate the work substance discharge surface. Alternatively, the distance between the counter terminals at the center portion in the space portion is short, and the light can reach the inside by increasing the distance between the counter terminals on the outside. In FIG. 8, the effect of field electron emission can be included by making 81 a spire structure.

空間部分あるいは繋がった空間部分を含む熱変換素子は作業物質の移動度が位置的・時間的に均一でなくなる。作業物質の持つ電荷の流入量と流出量が違う界面では、作業物質の電荷の流入あるいは流出が多く電荷が蓄積し、作業物質流を阻害する。また、作業物質の電荷が蓄積すると熱変換素子の劣化が起こる。請求項4は作業物質受取端子表面あるいは放出端子表面に作業物質良導体薄膜をコーティングすることでそれら表面に局部的に存在する作業物質を拡散させる効果が得られることを特徴とする。作業物質良導体薄膜のコーティングは、素子を強化することにより、あるいは熱の集中を防ぐことにより劣化の影響を少なくし、単位時間に得られるエネルギー量を増加させる。作業物質受取端子表面あるいは放出端子表面を作業物質良導体をコーティングすることにより作業物質受取端子表面あるいは放出端子表面と熱電材料内部との局在濃度差に基づいた端子内部への移動に対する作業物質のポテンシャル障壁を小さくし、あるいは作業物質の濃度が過不足であることに基づく破壊を少なくすることができる。In the heat conversion element including the space portion or the connected space portion, the mobility of the working material is not uniform in position and time. At the interface where the amount of inflow and outflow of electric charge of the working material is different, the inflow or outflow of the electric charge of the working material is large and the electric charge is accumulated, thereby obstructing the working material flow. Further, when the charge of the working substance is accumulated, the heat conversion element is deteriorated. The fourth aspect of the present invention is characterized in that an effect of diffusing a working substance locally present on the surface of the working substance receiving terminal surface or the discharging terminal surface is obtained by coating the working substance good conductor thin film. The coating of the working material good conductor thin film reduces the influence of deterioration by strengthening the element or preventing concentration of heat, and increases the amount of energy obtained per unit time. The potential of the working substance against movement into the terminal based on the local concentration difference between the working substance receiving terminal surface or the discharge terminal surface and the thermoelectric material by coating the working material receiving terminal surface or the discharge terminal surface with a good working material conductor The barriers can be reduced, or destruction caused by excessive or insufficient working substance concentrations can be reduced.

空間部分をもつ熱電変換素子では、作業物質の空間部分での移動にともない、空間内の局所的な移動による衝撃や力学的破壊により端子部分の劣化が起る。また、空間に気体、あるいは金属蒸気を封入することで、気体分子との作業物質との間の衝突、作業物質の空間でのエネルギー状態を変化させる。請求項5は作業物質放出表面透過後の放出表面内あるいは受取表面の作業物質励起による摩擦以外の熱電材料破壊を無くすためにその表面を他の物質でコーティングしたり他の物質を接合させたり、原子間結合力を大きくすることによって、あるいは原子集団で協調した動きをさせることで保護することを特徴とする。あるいは作業物質受取端子をかご型の熱電材料を用いることによって振動を吸収し劣化を防ぐことも可能である。In a thermoelectric conversion element having a space portion, the terminal portion deteriorates due to impact or mechanical destruction due to local movement in the space as the working substance moves in the space portion. In addition, by encapsulating the gas or metal vapor, the space, the collision between the work material and gas molecules, changing the energy state in the space of the working substance. In order to eliminate thermoelectric material destruction other than friction caused by working substance excitation in the release surface or the receiving surface after passing through the work substance release surface, the surface may be coated with another substance or joined with another substance. It is protected by increasing interatomic bonding force or by making coordinated movements in atomic groups. Alternatively, a cage-type thermoelectric material can be used for the work substance receiving terminal to absorb vibration and prevent deterioration.

熱電変換素子では、動作温度範囲にわたって、温度勾配に沿って不純物ドープによる電子濃度を連続的に制御した傾斜構造(FGM:Functionally Graded Material)にすることにより均一組成の熱電材料より性能指数を大きくすることが可能である。熱電変換素子を組み合せて使用する場合、使用目的によって性能の考え方が変わってくる。熱変換素子の電極などの金属部分も性能に影響を及ぼす。また、熱変換材料が空間部分を形成する場合、内部で対峙端面間距離の調整し空間部分の大きさを変えることで、あるいは表面形状を変えることで、作業物質の移動を容易にでき、また伝熱を小さくできる。請求項6は空間あるいは繋がった空間部分によりセグメント化されていることで、熱電材料あるいは電極材料の成分の拡散などによる性能の劣化の影響が少なく、接合による素子作成時の欠陥が無い状態で、システム構成が変更可能であることを特徴とする。図9のように対峙端面間隔距離をアクチュエータで変化させることによって種々の温度領域に対応させることを可能とする。  In a thermoelectric conversion element, a performance index is made larger than that of a thermoelectric material of uniform composition by adopting a graded structure (FGM: Functionally Graded Material) in which the electron concentration by impurity doping is continuously controlled along the temperature gradient over the operating temperature range. It is possible. When thermoelectric conversion elements are used in combination, the concept of performance varies depending on the purpose of use. Metal parts such as electrodes of the heat conversion element also affect the performance. In addition, when the heat conversion material forms a space part, it is possible to easily move the work substance by adjusting the distance between the opposite end faces and changing the size of the space part or by changing the surface shape. Heat transfer can be reduced. Claim 6 is segmented by space or connected space portions, so that there is little influence of performance degradation due to diffusion of components of thermoelectric material or electrode material, and there is no defect at the time of element creation by bonding, The system configuration can be changed. As shown in FIG. 9, it is possible to cope with various temperature regions by changing the distance between the opposing end faces with an actuator.

セグメント化された熱電材料を組み合わせる方式では熱電システムの耐久性は熱電材料と電極部分の接合している部分やセグメントで生じる界面の使用時の温度分布、空間部分の熱膨張や熱源の熱揺らぎによる動作時の温度変化の影響による熱応力での疲労により決まる。また、このために熱電材料と電極間の接触抵抗が大きくなって、その結果、疲労亀裂のジュール熱による焼損が報告されている。空間部分を設けることによって、熱膨張による力学的な破損を防ぐことができる。対峙端子間はLmax (T)より大きくしてあるので、特に低温での量子揺らぎや、動作時の温度変化による界面の揺らぎでの熱応力による破壊や、作業物質以外の界面間移動による疲労破壊が抑えられる。In the method of combining segmented thermoelectric materials, the durability of the thermoelectric system depends on the temperature distribution at the time of using the interface between the thermoelectric material and the electrode part, the interface between the segments, the thermal expansion of the space part, and the thermal fluctuation of the heat source. It is determined by fatigue due to thermal stress due to the influence of temperature change during operation. For this reason, contact resistance between the thermoelectric material and the electrode is increased, and as a result, burnout due to Joule heat of fatigue cracks has been reported. By providing the space portion, mechanical damage due to thermal expansion can be prevented. Since the distance between the opposite terminals is larger than L max (T), fatigue due to thermal fluctuation due to quantum fluctuation at low temperature, fluctuation of the interface due to temperature change during operation, and movement between interfaces other than the working substance Destruction is suppressed.

高温部と低温部の温度差が広域であればあるほど熱変換素子内の空間部分の数は多くできる。一方、高温部と低温部の温度差が広域であるかどうかに関係なく、熱変換素子内の繋がった空間部分の数は多くすればするほど空間部分内の輻射エネルギー損出以外の付加損出が低減できる。  The wider the temperature difference between the high temperature part and the low temperature part, the larger the number of space parts in the heat conversion element. On the other hand, regardless of whether the temperature difference between the high temperature part and the low temperature part is wide, the additional loss other than the radiation energy loss in the space part as the number of connected space parts in the heat conversion element increases. Can be reduced.

高温部と低温部の温度差が広域である発電時稼動中の発電では、複数段空間部分を配すことにより、起電力を大きくすることができる。図10のように複数セグメント化された熱電材料あるいは作業物質良導体により構成されているとする。このとき、段落0038 で述べたように熱電変換素子101表面にあるナノサイズの導体柱あるいはコイルの高さ、これらの作業物質放出面の曲率半径は作業物質の熱電材料のバルク状態密度からの変形や作業物質の移動に影響を与えるが、これらの値や、これら導体柱やコイルの作業物質放出表面積、空間部分端子間の最適距離およびセグメントの数は次のようにして決まる。空間部分端子間距離はサブマイクロメータでLmax(T)より大きい値から近づけることで、図10の発電稼働を具体例として、下記のように作業物質流をより大きくできる。
1)空間部分端子間内の尖塔表面から対峙端子表面間距離がLmax(T)を超えると、この空間部分のフォノンによる熱伝達をほとんど無視できる。このLmax(T)は、 落0023で述べたように尖塔表面と対峙端子を構成する原子間の力と関係があり原子間力顕微鏡と測定表面間距離の実測測定範囲から得ることができる。熱膨張や熱源の熱揺らぎ、特に低温では量子揺らぎを考慮することでLmax(T)を補正できる。
2)動作中の空間部分内の尖塔表面の近傍の増強電界強度は対峙端子間での電位差/距離に曲率を考慮に入れた比例係数βをかけて近似できる。あるいは、シミュレーションによって求められる。また対峙端子間の電位差は空間部分両端の熱電材料の起電力に影響を受ける。
3)作業物質の熱励起や低温での量子揺らぎやトンネル透過による作業物質の移動量は作業物質放出面積・方向に依存する。また段落0005でも述べたように注入された端子でも、作業物質の移動の方向によって作業物質が注入された熱電材料バルクの作業物質の状態密度が注入前から変わり、その結果微視的な電気伝導度、熱伝導度に影響を与える。尖塔乃至尖塔に至る部位を細線にすることで、これらの伝導度が変化し、性能指数がよくなる。空間部分の作業物質受取端面が上記2を満たすように空間形状や空間部分端子間距離を最適化して熱電材料の作業物質流に近づける。このような工夫により段落0005でも 述べたようにスムーズで効率的な作業物質の空間移動が可能となる。
4)一つの尖塔では熱電材料バルク以上の作業物質流が得られないときは、図2のように複数の尖塔を配すことにより作業物質流を大きくすることができる。複数の尖塔が電子放出端子表面に密にあると上記2のβの効果が大きく低減される。電界電子放出による作業物質流が分割される前の両端にある熱電材料の作業物質流以上になるか、あるいはできるだけ近づけるように電子放出端子表面の尖塔密度を含めて最適化する。このようにして適切な空間部分端子間距離が定まる。
温度差が広域であるために、分割される前の両端にある熱電材料の作業物質流以上になるか、空間部分内の増強電界強度による電界電子放出による作業物質流れが熱電材料バルクの作業物質流量以上になるか、あるいはできるだけ近づけるように電子放出端子表面の尖塔密度を含めて最適化できるならば、以上の1から4の工夫を他の空間部分に適応する。上記の結果、1個以上の電極端子表面の形状を含めて最適化された空間部分により、対峙端子間温度差による輻射放出エネルギー損失以外の付加損出を大きく低減できる。高温部と低温部の温度差が狭域である発電稼動がある場合は、空間部分端子間距離の最適化ができない。この場合は図6の繋がった空間部分を用いる。冷却の場合は必要なだけの電圧・電流を印加する。上記のように製造されれば、熱電材料の性能指数が最高であっても、熱変換素子の性能指数は大きく改善される。また冷却稼働は発電稼働の可逆過程なので、冷却稼働でもこのように製造された熱変換素子の効率は大きく改善される。
In power generation in operation during power generation in which the temperature difference between the high-temperature part and the low-temperature part is wide, the electromotive force can be increased by arranging a plurality of stages. As shown in FIG. 10, it is assumed that a plurality of segmented thermoelectric materials or good working substance conductors are used. At this time, as described in Paragraph 0038 , the height of the nano-sized conductive column or coil on the surface of the thermoelectric conversion element 101 and the radius of curvature of these working substance discharge surfaces are the deformations of the working substance from the bulk density of the thermoelectric material. However, these values, the working substance discharge surface area of these conductor columns and coils, the optimum distance between the space terminals and the number of segments are determined as follows. By making the distance between the space partial terminals closer to a value larger than Lmax (T) with a submicrometer, the working material flow can be further increased as described below by taking the power generation operation of FIG. 10 as a specific example.
1) When the distance between the surface of the spire in the space portion terminal to the surface of the counter terminal exceeds Lmax (T), heat transfer due to phonons in this space portion can be almost ignored. The Lmax (T) can be obtained from the actual measuring range between force and is related atomic force microscope and the measurement surface between atoms constituting the a spire surface facing the terminal as described in paragraphs 0023 distance. Lmax (T) can be corrected by taking into account thermal expansion and thermal fluctuations of the heat source, especially quantum fluctuations at low temperatures.
2) The enhanced electric field strength in the vicinity of the surface of the steeple in the operating space can be approximated by multiplying the potential difference / distance between the counter terminals by the proportionality factor β taking into account curvature. Or it is calculated | required by simulation. The potential difference between the opposite terminals is influenced by the electromotive force of the thermoelectric material at both ends of the space portion.
3) The amount of movement of the working substance due to thermal excitation of the working substance, quantum fluctuations at low temperatures, and tunnel transmission depends on the working substance release area and direction. Also, as described in paragraph 0005, even in the injected terminal, the state density of the working substance in the bulk of the thermoelectric material into which the working substance is injected changes depending on the direction of movement of the working substance. Affects the thermal conductivity. By making the spiers to the spiers a thin line, these conductivities change and the figure of merit improves. The space shape and the distance between the space portion terminals are optimized so that the working material receiving end face of the space portion satisfies the above-mentioned 2, and the working material flow of the thermoelectric material is brought close to the working material flow. Such a device enables smooth and efficient space movement of the working substance as described in paragraph 0005 .
4) When a working material flow exceeding the bulk of the thermoelectric material cannot be obtained with one spire, the working material flow can be increased by arranging a plurality of spires as shown in FIG. When the plurality of spires are dense on the surface of the electron emission terminal, the effect of β of 2 is greatly reduced. The work material flow by field electron emission is optimized including the spire density on the surface of the electron emission terminal so that it is greater than or equal to the work material flow of the thermoelectric material at both ends before being divided. In this way, an appropriate distance between the space partial terminals is determined.
Due to the wide temperature difference, the working material flow of the thermoelectric material at both ends before being divided becomes greater than the working material flow of the thermoelectric material at the both ends, or the working material flow due to field electron emission due to the enhanced electric field strength in the space part is the working material of the thermoelectric material bulk If optimization including the spire density on the surface of the electron emission terminal can be performed so that the flow rate is increased or as close as possible, the above ideas 1 to 4 are applied to other space portions. As a result, an additional loss other than the radiation emission energy loss due to the temperature difference between the opposite terminals can be greatly reduced by the optimized space portion including the shape of one or more electrode terminal surfaces. When there is a power generation operation in which the temperature difference between the high temperature part and the low temperature part is narrow, the distance between the space partial terminals cannot be optimized. In this case, the connected space part of FIG. 6 is used. When cooling, apply the necessary voltage and current. If manufactured as described above, even if the performance index of the thermoelectric material is the highest, the performance index of the heat conversion element is greatly improved. Moreover, since the cooling operation is a reversible process of the power generation operation, the efficiency of the heat conversion element manufactured in this way is greatly improved even in the cooling operation.

図10に示された熱電材料群は必ずしも図示された順序で、しかも全てを用いて熱変換素子に作製される必要はない。また、二組の極性の違う熱変換素子からなるπ型モジュールのように、他の熱電材料群に依存しない熱電材料群は、他の熱電材料群と並行して独立した形態でπ型モジュールが作製されてもよい。さらに、複数のπ型モジュールが直列あるいは並列、または直列と並列の混成したπ型モジュール群となる集合でシステムに実装される。直列あるいは並列、または直列と並列の混成したπ型モジュールで実装の数多くの組み合わせを例として説明したが、明らかなように、π型モジュール以外の熱変換素子からなる組み合わせからなるモジュールも本発明の範囲及び精神に従って意図される。The thermoelectric material group shown in FIG. 10 does not necessarily have to be formed into a heat conversion element in the order shown in the drawing. In addition, a thermoelectric material group that does not depend on other thermoelectric material groups, such as a π-type module composed of two sets of heat conversion elements with different polarities, has a π-type module in an independent form in parallel with other thermoelectric material groups. It may be produced. Furthermore, a plurality of π-type modules are mounted on the system in a set that is a series of π-type modules in series, parallel, or a combination of series and parallel. Although a number of combinations of implementations in series, parallel, or a combination of series and parallel π-type modules have been described as examples, as will be apparent, modules composed of combinations of thermal conversion elements other than π-type modules are also included in the present invention. Intended according to scope and spirit.

図9のように熱電材料90と91あるいは熱電材料と端子を移動させる代わりに、熱電材料90との間で作業物質が散乱されにくく、しかも作業物質を放出する対峙端面91の尖塔の放出面積より大きくしかもそれに相似形状またはそれを囲む形状をもつ微小な作業物質の良伝導体94が作業物質の放出面に平行に移動するのをこの95に配置したアクチュエータは助ける。稼働開始時に交流を重畳することによって、空間部分92あるいは、アクチュエータが駆動する面94と電極表面90との間93がコンデンサーの役割を果たすことにより空間部分にかかる電圧を高い状態にすることができる。その結果、その高電圧を初動動作のトリガーとして利用できる。また、多段にすることでCR発振やCL発振を利用することで稼働時に目的とする空間部分にかかる電圧を高い状態にすることができる。As shown in FIG. 9, instead of moving the thermoelectric materials 90 and 91 or the thermoelectric material and the terminal , the working substance is less likely to be scattered between the thermoelectric materials 90, and moreover from the emission area of the spire on the opposite end face 91 that releases the working substance. The actuator arranged in 95 helps the fine working substance 94 having a large shape similar to or surrounding the fine moving substance 94 to move parallel to the working material discharge surface. By superimposing alternating current at the start of operation, the space portion 92 or the space 93 between the surface 94 driven by the actuator and the electrode surface 90 serves as a capacitor, so that the voltage applied to the space portion can be made high. . As a result, the high voltage can be used as a trigger for the initial action. Further, by using multiple stages, the voltage applied to the target space portion during operation can be made high by using CR oscillation or CL oscillation.

本発明の原理に従った熱電材料の性能指数の最大化や最適化されたπ型モジュールやシステム実施形態についての以上の説明は、熱電材料、π型モジュールやシステムの最適化の例示及び説明を提供するものであり、網羅的なものでも、本発明の範囲を開示されたシ  The above description of maximizing the figure of merit of thermoelectric materials and optimized π-type modules and system embodiments in accordance with the principles of the present invention provides examples and explanations for optimizing thermoelectric materials, π-type modules and systems. The scope of the present invention is disclosed, even if it is exhaustive. ステム実施形態そのものに限定するものでもない。以上の教示により変更及び変形が可能であり、あるいは、本発明の様々なシステム実施形態の実施から変更及び変形が得られる。明らかなように、請求項に係る発明に従った空間部分あるいは繋がった空間部分を持つ熱電材料より熱変換素子を実現する方法、π型モジュール及び/又はシステムを提供することには、数多くの実施形態が採用され得る。It is not limited to the stem embodiment itself. Modifications and variations are possible in accordance with the above teachings, or variations and modifications can be obtained from implementations of the various system embodiments of the present invention. As is apparent, there are numerous implementations in providing a method, π-type module and / or system for realizing a thermal conversion element from a thermoelectric material having a space portion or a connected space portion according to the claimed invention. A form may be employed.

本出願の説明に使用された如何なるアクチュエータ、π型モジュールそしてシステム、特に断らない限り、本発明に決定的に重要な、あるいは不可欠なものとして解されるべきではない。  Any actuators, π-type modules and systems used to describe this application, unless otherwise noted, should not be construed as critical or essential to the invention.

熱電変換素子の尖塔端子を含む空間部分の図。The figure of the space part containing the spire terminal of a thermoelectric conversion element. 熱電変換素子の尖塔端子とそれを囲む端子を含む空間部分の図。The figure of the space part containing the spire terminal of a thermoelectric conversion element, and the terminal surrounding it. 熱電変換素子の尖塔構造を複数持つ空間部分の図。The figure of the space part which has two or more spire structures of a thermoelectric conversion element. 肉厚の断面積が微細な柱構造図。(a)は円柱。(b)は中空筒。(c)は直方体。Column structure diagram with a thin cross-sectional area. (A) is a cylinder. (B) is a hollow cylinder. (C) is a rectangular parallelepiped. 層状構造をもつ架橋部材の肉厚断面図。(a)は円柱。(b)は直方体。The thickness sectional drawing of the bridge | crosslinking member which has a layered structure. (A) is a cylinder. (B) is a rectangular parallelepiped. 熱電変換素子の繋がった空間部分の図。The figure of the space part to which the thermoelectric conversion element was connected. 熱電変換素子で複数の架橋部材をもつ繋がった空間部分の図。The figure of the connected space part which has a some bridge | crosslinking member with a thermoelectric conversion element. 熱電変換素子の空間部分の図。The figure of the space part of a thermoelectric conversion element. 作業物質放出端面と相似形状をもつアクチエータで動作する作業物流のある空間部分の図。The figure of the space part with the work physical distribution which operate | moves with the actuator which has a shape similar to a work substance discharge | release end surface. 熱電変換素子の多段にセグメント化された空間部分の図。 The figure of the space part segmented into the multistage of the thermoelectric conversion element .

10 作業物質受取端子表面をもつ熱電材料または作業物質良導体
11 作業物質放射端子表面をもつ熱電材料または作業物質良導体
12 空間
13 作業物質放出端子の尖塔表面
14 作業物質受取端子表面
20 作業物質受取端子表面をもつ熱電材料または作業物質良導体
21 作業物質放射端子表面をもつ熱電材料または作業物質良導体
22 空間
23 作業物質放出端子の尖塔表面
24 作業物質受取端子表面
30、31、32 尖塔構造
60 熱電材料
61 熱電材料または作業物質良導体
62 空間
63 作業物質良導体である架橋部材
70 作業物質受取端子表面をもつ熱電材料または作業物質良導体
71 作業物質放射端子表面をもつ熱電材料または作業物質良導体
72 空間作業物質良導体
73 複数の架橋部材
80 作業物質受取端子表面をもつ熱電材料または作業物質良導体
81 作業物質放射端子表面をもつ熱電材料または作業物質良導体
82 空間
90、91 熱電材料または作業物質良導体
92 空間
93 相似形状をもつ面と電極表面との間の空間
94 相似形状をもつ面
95 相似形状をもつ面と電極表面との間を保持し、作業物質が流れるようにする材料
100、101、102 熱電材料または作業物質良導体のセグメント
10 Thermoelectric material or working substance good conductor with working substance receiving terminal surface 11 Thermoelectric material or working substance good conductor having working substance radiation terminal surface 12 Space 13 Spire surface of working substance discharge terminal 14 Working substance receiving terminal surface 20 Working substance receiving terminal surface Thermoelectric material or working substance good conductor 21 having a working substance radiation terminal surface thermoelectric material or working substance good conductor 22 Space 23 Spire surface 24 of working substance discharge terminal Working substance receiving terminal surface 30, 31, 32 Spire structure 60 Thermoelectric material 61 Thermoelectric Good material or working substance conductor 62 Space 63 Bridging member 70 which is a working substance good conductor Thermoelectric material or working substance good conductor 71 having working substance receiving terminal surface Thermoelectric material or working substance good conductor 72 having working substance radiation terminal surface Spatial working substance good conductor 73 Bridging member 80 heat having work substance receiving terminal surface Good material or working substance conductor 81 Thermoelectric material or working substance good conductor 82 having working substance radiation terminal surface Space 90, 91 Thermoelectric material or working substance good conductor 92 space 93 Space 94 between the surface having a similar shape and the electrode surface Surface 100 having a similar shape and the surface of the electrode, and the surface of the electrode, and the material 100, 101, 102 that allows the working substance to flow.

Claims (7)

熱電材料の端部とそれと対峙する材料表面との間乃至前記熱電材料を構成する熱電材料部内に、熱流乃至作業物質流の伝わるのを妨げる1つ以上の空間を備え、これら空間と接する熱電材料と同等乃至それ以上の作業物質流量があるが作業物質に起因する以外の熱伝量が殆ど無視できる距離以上の大きさであり、二つの異なる温度の熱源に挟まれた熱電材料の系に、この系外の電場、磁場等によって、この系内にさらなる温度勾配、作業物質濃度勾配、速度勾配等が生じ、それら勾配によって駆動される古典系作業物質と極低温で顕著になる量子系作業物質あるいは巨視的量子系作業物質を含めた外界作業物質粒子放出しやすい形状である空間部分を持つことにより空間部分がなく互いに接合した場合に比べ熱伝導率を低減しあるいは熱応力による損傷乃至素材イオンの拡散混入を低減すること、あるいは作業物質の端部への移動により発生した熱を利用することを特徴とする熱電変換素子。One or more spaces between the end of the thermoelectric material and the surface of the material facing the thermoelectric material or in the thermoelectric material portion constituting the thermoelectric material, which prevent the flow of the heat flow or working substance flow, and the thermoelectric material in contact with these spaces There is a working substance flow rate equal to or higher than that, but the heat transfer amount other than that caused by the working substance is more than a distance that can be ignored, and the thermoelectric material system sandwiched between two different heat sources, The electric field, magnetic field, etc. outside this system cause further temperature gradients, working material concentration gradients, velocity gradients, etc. in this system, and classical working materials driven by these gradients and quantum working materials that become noticeable at extremely low temperatures Alternatively, by having a space part that is easy to release particles of external working material particles including macroscopic working materials, the thermal conductivity is reduced or thermal stress is reduced compared to the case where there is no space part and they are joined together. Thermoelectric conversion element characterized in damage to it to reduce the diffusion mixing of material ions, or utilizing the heat generated by the movement of the end of the working substance due. 熱電材料の端部とそれと対峙する材料表面との間乃至前記熱電材料を構成する熱電材料部内に、熱流乃至作業物質流の伝わるのを殆ど妨げる広がりである1つ以上の空間を備え、これらの少なくとも1つの空間に1つ以上の細線で架橋することにより、この架橋した空間に接する熱電材料と同等乃至それ以上の作業物質流量があるが作業物質に起因する以外の熱伝量がフォノンの散乱によって小さくできる距離以上の細線の長さであり、空間部分がなく互いに接合した場合に比べ熱伝導率を低減しあるいは熱応力による損傷乃至素材イオンの拡散混入を低減することを特徴とする熱電変換素子。One or more spaces are provided between the end of the thermoelectric material and the surface of the material facing the thermoelectric material, or in the thermoelectric material constituting the thermoelectric material. By bridging at least one space with one or more fine wires, there is a working substance flow rate equal to or higher than that of the thermoelectric material in contact with this bridging space, but the heat transfer other than that caused by the working substance causes phonon scattering. Thermoelectric conversion characterized in that it is longer than the distance that can be reduced by the length of the wire, and has reduced thermal conductivity or reduced damage due to thermal stress or diffusion of material ions compared to the case where they are joined together without any space. element. 請求項1、請求項2記載の熱電変換素子において、これらの少なくとも1つの空間に熱電材料などの界面近傍に電磁波源あるいは放射線源を具備した空間をもために、これら線源を具備した空間と接する熱電材料と同等乃至それ以上の電流量があり、空間部分乃至架橋した空間部分がなく互いに接合した場合に比べ熱伝導率を低減することを特徴とする熱電変換素子。Claim 1, in the thermoelectric conversion element according to claim 2, wherein, in order also One space provided with the electromagnetic wave source or radiation source to the vicinity of the interface, such as a thermoelectric material to these at least one space, equipped these ray source space A thermoelectric conversion element having a current amount equal to or greater than that of a thermoelectric material in contact with the thermoelectric material, and having a space portion or a bridged space portion and having reduced thermal conductivity as compared with a case where they are joined to each other. 請求項1、請求項2、請求項3記載の熱電変換素子で空間部分乃至架橋した空間部分に接する表面に作業物質の導電性原子乃至分子を含む材料によりコーティング乃至厚みのある部材(以後簡略のために、コーティング乃至厚みのある部材をコーティング乃至部材と略す)を接合し、局部的な帯電乃至作業物質の滞留を防ぎ空間部分に接するコーティング乃至部材表面部分の振動を吸収する構造を具備することを特徴とする熱電変換素子。A member having a coating or thickness with a material containing conductive atoms or molecules of a working substance on a surface in contact with a space portion or a cross-linked space portion in the thermoelectric conversion element according to claim 1, 2, or 3 For this purpose, a coating or a member having a thickness is abbreviated as a coating or a member), and a structure that absorbs vibration of the coating or member surface portion that is in contact with the space portion is prevented by preventing local charge or retention of a working substance. The thermoelectric conversion element characterized by this. 請求項1、請求項2、請求項3記載の熱電変換素子で空間部分乃至架橋した空間部分に接する表面に、原子間力が大きく、あるいは原子集団の共調した運勤により表面の振動を吸収する材料によりコーティング乃至部材を接合することで、空間部分に接するコーティング乃至部材表面の作業物質のエネルギー状態を変えて大きな作業物質流が流れても劣化しにくいこと特徴とする熱電変換素子。Claim 1, absorption in claim 2, the surface in contact with the third aspect thermoelectric spatial portion or crosslinking spatial part conversion element according atomic force is large, or the vibration of the surface by Tomocho the UnTsutomu atomic population A thermoelectric conversion element characterized in that, by joining a coating or member with a material to be applied, the energy state of the working substance on the surface of the coating or member in contact with the space portion is changed to prevent deterioration even when a large working substance flow flows. 請求項1、請求項2、請求項3、請求項4、請求項5記載の熱電変換素子乃至空間部分に可動部をもつ熱変換素子を用いたセグメント素子であることにより設計しやすいことを特徴とする熱電変換モジュールおよび、それらを内蔵する熱電変換システム。A segment element using a thermoelectric conversion element according to claim 1, claim 2, claim 3, claim 4, or claim 5 or a heat conversion element having a movable portion in a space portion, which is easy to design. A thermoelectric conversion module and a thermoelectric conversion system incorporating them. 請求項1、請求項2、請求項3、請求項4、請求項5に記載の熱電変換素子乃至請求項6に記載の熱電変換モジュールおよび、それらを内蔵する熱電変換システム。The thermoelectric conversion element of Claim 1, Claim 2, Claim 3, Claim 4, and Claim 5 thru | or The thermoelectric conversion module of Claim 6, and the thermoelectric conversion system which incorporates them.
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