JP5771386B2 - Processing equipment - Google Patents

Description

  The present invention relates to a machining apparatus having a servo motor and a servo driver that drives the servo motor.

  A wafer formed by dividing a device such as an IC or LSI on the surface by dividing lines and grinding the back surface by a grinding device to a predetermined thickness is divided into individual devices by a dicing device. It is used in various devices such as personal computers.

  A grinding apparatus used for backside grinding of a wafer includes a holding means for holding a wafer, a grinding means for rotating a grinding wheel for grinding the wafer held by the holding means, and a wafer for holding the grinding means on a chuck table. A feeding means for moving the wafer toward and away from the chuck table, a conveying means for carrying the wafer in and out of the chuck table, a washing means for rotating the wafer to clean it, and the like, so that the wafer can be finished to a desired thickness (for example, Patent Document 1).

  The dicing apparatus also includes a holding means for holding the wafer, a cutting means having a rotatable cutting blade for cutting the wafer held by the holding means, and a process for feeding the chuck table and the cutting means relative to each other in the cutting direction. Feeding means, indexing feeding means for indexing and feeding the chuck table and cutting means relative to the indexing direction, transport means for loading and unloading the wafer with respect to the chuck table, cleaning means for rotating and cleaning the wafer, etc. The wafer can be cut with high accuracy (see, for example, Patent Document 2).

  Processing devices such as a grinding device and a cutting device are provided with a servo motor for moving and rotating the holding means and rotating a grinding wheel and a cutting blade. It is controlled by the driver. The servo driver performs complicated control such as acceleration, deceleration, constant speed, and the like with a signal of, for example, approximately 130,000 pulses per rotation of the motor, thereby enabling highly accurate machining. Conditions for driving the servo motor can be set in advance in the servo driver.

JP 2006-21264 A JP 2006-278869 A

  However, even if the conditions for driving the servo motor are set for the servo driver, the power of the servo motor, the weight of the operating part operated by the rotation of the servo motor, the coupling means such as a coupler and a ball screw connected to the servo motor, etc. Since an inertial force or the like acts due to mechanical elements, the servo motor does not operate according to the set conditions, and there is a problem that high-accuracy machining is hindered by causing vibration or swinging in the operating part.

  In addition, when the servo driver is adjusted to prevent such problems from occurring, or when the mechanical elements related to the servo motor deteriorate and the conditions set for the servo driver must be adjusted, , Relying heavily on operator experience and craftsmanship, is time consuming and inefficient.

  Therefore, the problem to be solved by the present invention is to make it possible to easily set and adjust the drive conditions of the servo motor in a machining apparatus having a servo motor.

The present invention relates to a machining apparatus including at least a servo motor, a servo driver that sets a change in rotational speed with respect to the rotational speed of the servo motor as a drive condition of the servo motor, and an operating unit that operates by driving the servo motor. , A drive condition setting unit for setting a drive condition in the servo driver, an essential condition setting unit for setting an essential condition and an optional condition among the drive conditions, and an actual drive of the servo motor that is driven under the set drive condition The actual driving state recording unit that records the state as a change in the rotational speed with respect to the rotational speed, and the driving condition and the actual driving state recorded in the actual driving state recording unit are compared to detect a matching part and a mismatching part. It is checked whether the comparison part and the mismatched part detected by the comparison part are essential conditions set by the essential condition setting part. A determination unit when a decision is prerequisite and allowed to determine that disables driving conditions, when the determination unit determines that impossible, were recorded in the actual driving state recording unit by adjusting any conditions in the driving condition Servo driver adjustment means comprising a drive condition adjustment unit that matches the actual drive state with the essential condition within an allowable range is provided , and processing is performed under the matched drive condition .

  In the processing apparatus, it is desirable to include an unadjustable display unit that displays that the adjustment is impossible when the actual drive state cannot be matched with the essential condition within the allowable range even by the drive condition adjusting unit. Further, it is desirable that the drive condition adjustment unit adjusts deceleration, acceleration, and constant speed by combining arbitrary acceleration methods among at least direct proportional acceleration, S-shaped acceleration, parabolic acceleration, and the like.

  The machining apparatus according to the present invention compares the relationship between the rotation speed and rotation speed of the servo motor set in advance with the relationship between the actual rotation speed and rotation speed of the servo motor, and determines the matching portion and the mismatching portion. If the mismatched part is an arbitrary condition, it is adjusted so that the actual driving state matches the required condition within the allowable range, so the servo is driven according to the driving condition set by the inertial force of the mechanical element. Even when the motor does not operate, the servo motor can be adjusted to perform a desired operation without depending on the experience and intuition of the operator.

It is a perspective view which shows an example of a cutting device. It is a flowchart which shows an example of the procedure of drive condition adjustment. It is explanatory drawing which shows an example of a drive condition. It is explanatory drawing which shows an example of an actual drive state.

  A cutting apparatus 1 shown in FIG. 1 is a kind of processing apparatus to which the present invention is applied, and is an apparatus for cutting various workpieces held by a holding means 2 with a cutting means 3. The holding means 2 is driven in the cutting direction (X direction in FIG. 1) by the processing feed means 4. On the other hand, the cutting means 3 is driven in the indexing direction (Y direction in FIG. 1) by the index feeding means 5 and driven in the cutting feed direction (Z direction in FIG. 1) by the cutting feed means 6. Yes.

  The holding means 2 includes a holding table 20 that sucks a workpiece W that is a workpiece. Further, as shown in FIG. 1, when the workpiece W is supported by the ring-shaped frame F via the tape T, a fixing portion 21 for fixing the frame F is disposed around the holding table 20. Yes. The holding table 20 is coupled to a servo motor 22 that rotates the holding table 20 and is rotatably supported by a base 23. The holding table 20 and the fixed unit 21 are operating units that operate in the X direction by driving the servo motor 22.

  The cutting means 3 includes a spindle 30 having an axis in the Y direction, a housing 31 that rotatably supports the spindle 30, a cutting blade 32 connected to one end of the spindle 30, and a spindle connected to the other end of the spindle 30. And a motor 33 that rotates the motor 30. The cutting blade 32 is covered from above by a blade cover 34. In addition, a pair of cutting water nozzles 35 are disposed below the blade cover 34 so as to sandwich the cutting blade 32 from the front surface side and the back surface side.

  The processing feed means 4 includes a ball screw 40 having an axis in the X direction, a pair of guide rails 41 arranged in parallel to the ball screw 40, a servo motor 42 connected to one end of the ball screw 40, and a screw on the ball screw 40. A slide portion 43 having a nut (not shown) in the inside and a lower portion slidably contacting the guide rail 41 is driven. The slide portion 43 is driven by the servo motor 42 and the ball screw 40 is rotated. It slides in the X direction, and the holding means 2 is configured to move in the X direction accordingly.

  The index feeding means 5 includes a ball screw 50 having a Y-direction axis, a pair of guide rails 51 arranged in parallel to the ball screw 50, a servo motor 52 connected to one end of the ball screw 50, and a screw to the ball screw 50. The slide portion 53 includes a slide portion 53 that has a nut (not shown) that fits and has a lower portion that is in sliding contact with the guide rail 51. The slide portion 53 is driven by the servo motor 52 and the ball screw 50 is rotated. The upper part slides in the Y direction, and the cutting means 3 moves in the Y direction along with this. The cutting means 3 is an operating unit that operates in the Y direction by driving the servo motor 52.

  The cutting feed means 6 includes a ball screw 60 having an axis in the Z direction, a pair of guide rails 61 arranged in parallel to the ball screw 60, a servo motor 62 connected to one end of the ball screw 60, and a screw to the ball screw 60. It has an internal nut (not shown), and a side portion that is in sliding contact with the guide rail 61 and supports the cutting means 3, and is supported as the ball screw 60 is rotated by being driven by the servo motor 62. The part 63 is guided by the guide rail 61 and moves up and down in the Z direction, and the cutting means 3 is also moved up and down in the Z direction. The cutting means 3 is an operating unit that operates in the Z direction by driving the servo motor 62.

  The servo motors 22, 42, 52, 62 are individually driven by servo drivers 7a, 7b, 7c, 7d. The servo drivers 7a, 7b, 7c, and 7d are connected to the servo driver adjusting means 8a, 8b, 8c, and 8d, respectively, and depending on the drive conditions adjusted by the servo driver adjusting means 8a, 8b, 8c, and 8d. The servo drivers 7a, 7b, 7c, and 7d drive the servo motors 22, 42, 53, and 62, respectively.

  The servo driver adjustment means 8a, 8b, 8c, 8d are configured in the same manner, but the configuration and operation of the servo driver adjustment means 8b will be described below. The servo driver adjustment unit 8b includes a drive condition setting unit 80 that sets a drive condition for the servo driver 42. The drive condition setting unit 80 includes a storage element such as a memory, and the drive condition data can be written and set in the servo driver 42 by transferring the stored drive condition data to the servo driver 7b.

  The driving condition setting unit 80 is connected to an essential condition setting unit 81 that sets essential conditions and optional conditions among the driving conditions. The essential condition setting unit 81 includes a storage element such as a memory, and has a function of creating essential condition data for the servo driver 7b to drive the servo motor 42, and transferring and storing the essential condition data in the drive condition setting unit 80. ing.

  The servo driver adjusting means 8b includes an actual driving state recording unit 82 that records the actual driving state of the servo motor 42. The actual drive state recording unit 82 records the actual drive state of the servo motor 42 as a change in rotational speed with respect to the rotational speed.

  The servo driver adjustment means 8b includes a comparison unit 83. The comparison unit 83 includes a CPU, a memory, and the like, and compares the drive condition set by the drive condition setting unit 80 in the servo driver 7b with the actual drive state recorded in the actual drive state recording unit 82. It has a function of detecting a matching part (matching part) and a non-matching part (mismatched part).

  A determination unit 84 is connected to the comparison unit 83. The determination unit 84 includes a CPU, a memory, and the like, and checks whether or not the mismatched portion detected by the comparison unit 83 is an essential condition set by the essential condition setting unit 81. It has a function of determining that the driving condition is acceptable and determining that the driving condition is not possible when the driving condition is an essential condition.

  A driving condition adjustment unit 85 is connected to the determination unit 84. The drive condition connection unit 85 includes a CPU, a memory, and the like, and when the determination unit 84 determines that it is impossible, the actual drive state recorded in the actual drive state recording unit 82 is adjusted by appropriately adjusting arbitrary conditions. It has a function to match the conditions within an allowable range. The allowable range may be stored in the driving condition adjustment unit 85 or may be stored in the driving condition setting unit 80.

  The determination unit 84 is connected with an unadjustable display unit 86 for displaying that the adjustment is impossible when the actual drive state cannot be matched with the essential condition within the allowable range by the adjustment by the drive condition adjusting unit 85. Yes. The non-adjustable display unit 86 includes, for example, a display device or a device that emits a warning sound.

  As described above, the drive condition setting unit 80, the essential condition setting unit 81, the actual drive state recording unit 82, the comparison unit 83, the determination unit 84, the drive condition adjustment unit 85, and the non-adjustable display unit 86. Servo driver adjustment means 8b is configured.

  When the workpiece W is cut using the cutting apparatus 1 configured as described above, the workpiece W supported by the frame F via the tape T is sucked and held by the holding table 20, and the frame F is fixed to the fixing portion 21. Fixed to.

  Then, the work W approaches the cutting means 3 by being driven by the machining feed means 4 and the holding means 2 moving in the X direction. On the other hand, the cutting means 3 is driven by the cutting feed means 6 while the cutting blade 32 rotates at a high speed after the index feed means 5 aligns the position of the workpiece W to be cut with the cutting blade 32 in the Y-axis direction. Being descended. Then, cutting with the cutting blade 32 is performed on the workpiece W moving in the X direction. Further, the cutting means 3 is sequentially indexed and fed in the Y direction by the index feeding means 5 and the same cutting is performed one after another, whereby the positions to be cut of W are successively cut.

  When cutting is performed in this way, the servo motor 42 is driven by the servo driver 7b to rotate the ball screw 40, and the base 23 moves in the X direction, whereby the holding means 2 moves in the X direction. Therefore, if the holding means 2 that is the operating part has vibration, swinging, etc. and the servo motor 42 does not perform a desired operation, cutting cannot be performed with high accuracy. Therefore, for example, according to the procedure of the flowchart shown in FIG. 2, it is checked whether or not the servo motor 42 performs a desired operation. If the servo motor 42 does not perform the desired operation, the servo driver 7b performs the desired operation. Adjust the control.

  First, before starting cutting, control information for moving the holding means 2 in the X direction, specifically, a change in rotational speed with respect to the rotational speed of the servo motor 42 is set in the servo driver 7b as a drive condition of the servo motor 42. .

  The drive condition data to be set in the servo driver 7b is stored in the drive condition setting unit 80. For example, as shown in FIG. 3, when the servo motor 42 rotates 1000 times from the start of the process feed of the holding means 2 to the stop of the process feed (one stroke), a predetermined rotation is made after the servo motor 42 starts rotating. Until the speed is reached, the rotational speed of the servo motor 42 is accelerated at a constant rate with respect to the rotational speed. Then, after the servo motor 42 reaches a predetermined rotational speed, the constant rotational speed is maintained, and then the rotational speed is decelerated at a constant rate, and finally the rotational speed becomes zero. Here, while the rotational speed is constant, the holding means 2 that is a movable part does not vibrate, swing, or the like, and the workpiece W can be stably cut by the cutting blade 32.

  Data indicating the relationship between the rotation speed and the rotation speed is input to the drive condition setting unit 80 before cutting. Such input can be performed via an input means (not shown) provided in the cutting apparatus 1. The drive state setting unit 80 transfers and stores the input data to the servo driver 7b (step S1).

  Further, the data set in the servo driver 7b by the drive condition setting unit 80 can be allowed even if an error occurs under conditions that must be actually driven within an allowable range for high-accuracy cutting. Since there is a condition (arbitrary condition), an indispensable condition that must be actually driven according to the data set in the driving state setting unit 80 is set in the indispensable condition setting unit 81. For example, since high-precision machining cannot be performed unless the time during which the rotation speed of the servo motor 42 is constant is equal to a predetermined time, the start time and end time at which the rotation speed becomes constant in FIG. An allowable error is input as an essential condition to the essential condition setting unit 81. On the other hand, the other parts are input as optional conditions. Such an input can also be performed via an input means (not shown) provided in the cutting apparatus 1 (step S2).

  In this way, after the driving conditions are set in the servo driver 7b and the indispensable conditions are set in the indispensable condition setting unit 81, the holding means 2 is actually operated, and the actual rotation speed and rotation speed of the servo motor 42 are obtained. Are sequentially recorded in the actual driving state recording unit 82 (step S3).

  The comparison unit 83 compares the relationship between the actual rotation speed and the rotation speed of the servo motor 42 recorded in the actual drive state recording unit 82 with the conditions set in the drive condition setting unit 80 (step S4). Then, a matching part (matching part) and a mismatching part (mismatching part) between the data recorded in the actual driving state recording part 82 and the data recorded in advance in the driving condition setting part 80 are detected (step S5). ). If all of them match, it is determined that the servo motor 42 is performing a desired operation, and the process returns to step S3.

  On the other hand, if there is a mismatch between the data recorded in the actual drive state recording unit 82 and the data recorded in advance in the drive condition setting unit 80, the mismatch is the essential condition set by the essential condition setting unit. The determination unit 84 determines whether or not there is. If the inconsistent portion is not an essential condition, the determining portion 84 determines that the driving condition is acceptable because there is no problem in the actual driving state, and returns to step S3. On the other hand, when the inconsistent portion is an indispensable condition, the determination unit 84 determines that the driving condition is not possible because there is a problem in the driving state.

  For example, when the rotation speed is constant and the value of the rotation speed at that time is an indispensable condition and before and after that is an arbitrary condition, as shown in FIG. 4, from the data set in the drive condition setting unit 80 However, if it takes too much time until the rotational speed of the servo motor 42 actually reaches a constant rotational speed, a shift occurs at the time when the rotational speed becomes constant. Step S6).

  If the determination unit 84 determines that it is not possible, it counts up the number of times it is determined to be impossible, and determines whether or not the number of times it is determined to be impossible exceeds a predetermined number, for example, 10 (step S7). If the number of times of impossibility is 10 times or less, the driving condition adjustment unit 85 adjusts the data stored in the driving condition setting unit 80, and the actual driving state recorded in the actual driving state recording unit 82 is essential. The conditions are matched within the allowable range (step S8). For example, the acceleration method of the rotation speed of the servo motor 42 includes a direct proportional acceleration, an S-shaped acceleration, a parabolic acceleration, and the like. The drive condition adjustment unit 85 can be accelerated by combining any of these acceleration methods. Then, the deceleration and the constant speed are adjusted so as to be close to the setting data shown in FIG. 3 so that at least the times when the rotation speed is constant coincide. That is, the acceleration process does not necessarily follow the data set in the drive condition setting unit 80, but is adjusted so that the rotational speed becomes constant at least at the same timing as the set data. By performing such adjustment, at least the essential condition set in the essential condition setting unit 81 can be satisfied.

  The stored data adjusted by the driving condition adjusting unit 85 and set in the driving condition setting unit 80 is transferred to the servo driver 7b, and the subsequent operation of the servo motor 42 is controlled by the adjusted condition. When the data recorded in the actual drive state recording unit 82 after the adjustment satisfies the indispensable condition, the cutting can be performed with high accuracy. In this way, after a highly accurate state is possible, the workpiece W can be cut with high accuracy by performing actual cutting.

  On the other hand, when the number of times that the determination unit 84 determines that the determination is impossible exceeds 10, it is determined that the solution by adjusting the driving condition is impossible. In this case, an indication that adjustment is impossible is displayed on the adjustment impossible display section 86. Then, the operator replaces the servo motor 42 with a servo motor with a high output, or replaces parts constituting a part that operates by rotation of the servo motor 42, such as the holding table 20, the ball screw 40, and the like (step S9). ).

  As described above, the actual driving state of the servo motor 42 can be automatically matched with the driving conditions set in the servo driver 7b for driving the servo motor 42 within an allowable range. In addition, the driving conditions of the servo driver 42 can be adjusted efficiently without relying on the craftsmanship.

  With the same method as the adjustment of the driving condition of the servo motor 42 described above, the other servo motors 22, 52 and 62 can be adjusted for desired driving. By setting drive conditions and essential conditions suitable for the respective servo drivers 7a, 7c, 7d to the respective drive condition setting sections 80 and essential condition setting sections 81 constituting the servo driver adjusting means 8a, 8c, 8d Each servo motor can perform a desired operation. That is, the drive conditions of the servo motors 22, 52, 62 are individually adjusted by the respective servo driver adjusting means 8a, 8c, 8d.

  In addition, not only the cutting device but also other processing devices having a configuration in which the servo driver drives the servo motor can be adjusted by the same method.

1: Cutting device 2: Holding means 20: Holding table 21: Fixed portion 22: Servo motor 23: Base 3: Cutting means 30: Spindle 31: Housing 32: Cutting blade 33: Motor 34: Blade cover 35: Cutting water nozzle 4: Processing feed means 40: Ball screw 41: Guide rail 42: Servo motor 43: Slide part 5: Index feed means 50: Ball screw 51: Guide rail 52: Servo motor 53: Slide part 6: Cut feed means 60: Ball screw 61: Guide rail 62: Servo motor 63: Elevating units 7a, 7b, 7c, 7d: Servo drivers 8a, 8b, 8c, 8d: Servo driver adjusting means 80: Driving condition setting unit 81: Essential condition setting unit 82: Actual driving state recording Unit 83: Comparison unit 84: Determination unit 85: Drive condition adjustment unit 86: Adjustment not possible Display unit

Claims (3)

A processing device including at least a servo motor, a servo driver that sets a change in rotational speed with respect to the rotational speed of the servo motor as a drive condition of the servo motor, and an operating unit that operates by driving the servo motor,
A drive condition setting unit for setting a drive condition in the servo driver;
An indispensable condition setting unit for setting an indispensable condition and an optional condition among the driving conditions;
An actual drive state recording unit for recording the actual drive state of the servo motor driven under the set drive conditions as a change in rotational speed with respect to the rotational speed;
A comparison unit that compares the driving condition with the actual driving state recorded in the actual driving state recording unit to detect a matching portion and a mismatching portion;
Check whether the inconsistency detected by the comparison unit is an essential condition set by the essential condition setting unit, and if it is not an essential condition, determine that the drive condition is acceptable and A determination unit that determines that the driving condition is not possible;
When the determination unit determines that the drive condition is not possible , the drive condition adjustment is performed so that the actual driving state recorded in the actual driving state recording unit is matched with the essential condition within an allowable range by adjusting the arbitrary condition in the driving condition. And
A processing apparatus including a servo driver adjusting unit configured by the above , and performs processing under the matched driving conditions .   The processing apparatus according to claim 1, further comprising an unadjustable display unit that displays that the adjustment is not possible when the actual drive state cannot be matched with the essential condition within an allowable range even by the drive condition adjustment unit.   The drive condition adjustment unit adjusts deceleration, acceleration, and constant speed by combining any arbitrary acceleration method among at least the direct acceleration, sigmoid acceleration, parabolic acceleration, and the like as the arbitrary condition. The processing apparatus as described in.

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