JP5765804B2 - 質量分析計用のイオン源及びこれを備えた質量分析計 - Google Patents
質量分析計用のイオン源及びこれを備えた質量分析計 Download PDFInfo
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- JP5765804B2 JP5765804B2 JP2011104541A JP2011104541A JP5765804B2 JP 5765804 B2 JP5765804 B2 JP 5765804B2 JP 2011104541 A JP2011104541 A JP 2011104541A JP 2011104541 A JP2011104541 A JP 2011104541A JP 5765804 B2 JP5765804 B2 JP 5765804B2
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- 238000003780 insertion Methods 0.000 claims description 19
- 230000037431 insertion Effects 0.000 claims description 19
- 230000001846 repelling effect Effects 0.000 claims description 16
- 150000002500 ions Chemical class 0.000 description 71
- 230000035945 sensitivity Effects 0.000 description 28
- 239000007789 gas Substances 0.000 description 16
- 238000002474 experimental method Methods 0.000 description 14
- 230000000052 comparative effect Effects 0.000 description 10
- 239000000356 contaminant Substances 0.000 description 10
- 238000012360 testing method Methods 0.000 description 10
- 230000007423 decrease Effects 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 230000001133 acceleration Effects 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 230000009191 jumping Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910001422 barium ion Inorganic materials 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000004868 gas analysis Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- -1 siloxane compound Chemical class 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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Description
Claims (5)
- 通電により熱電子を放出するフィラメントと、このフィラメントとの電位差で熱電子を引き込むグリッドとを備えてガスをイオン化する質量分析計用のイオン源において、
前記グリッドが筒状の輪郭を有し、このグリッド内にフィラメントを挿設したことを特徴とする質量分析計用のイオン源。
- 前記フィラメントの挿入方向の前端が、前記グリッドの母線方向の中点より挿入方向後側に位置することを特徴とする請求項1記載の質量分析計用のイオン源。
- 前記フィラメントの周囲に電子を反発させるシート状の電子反発電極を更に備えることを特徴とする請求項1または請求項2記載の質量分析計用のイオン源。
- 請求項3記載の質量分析計用のイオン源であって、前記電子反発電極が筒状に成形されてグリッドに同心に配置されたものにおいて、前記グリッド内部の容積をグリッドと電子反発電極との間の空間の容積より大きくしたことを特徴とする質量分析計用のイオン源。
- 請求項4記載のイオン源を備え、前記電子反発電極が全圧測定用のイオンコレクタを兼用することを特徴とする質量分析計。
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JP2011104541A JP5765804B2 (ja) | 2011-05-09 | 2011-05-09 | 質量分析計用のイオン源及びこれを備えた質量分析計 |
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JP2011104541A JP5765804B2 (ja) | 2011-05-09 | 2011-05-09 | 質量分析計用のイオン源及びこれを備えた質量分析計 |
Publications (2)
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JP2012234776A JP2012234776A (ja) | 2012-11-29 |
JP5765804B2 true JP5765804B2 (ja) | 2015-08-19 |
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JP2011104541A Active JP5765804B2 (ja) | 2011-05-09 | 2011-05-09 | 質量分析計用のイオン源及びこれを備えた質量分析計 |
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JP (1) | JP5765804B2 (ja) |
Families Citing this family (1)
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JP6335376B1 (ja) * | 2017-08-07 | 2018-05-30 | 株式会社アルバック | 四重極型質量分析計及びその感度低下の判定方法 |
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US5302827A (en) * | 1993-05-11 | 1994-04-12 | Mks Instruments, Inc. | Quadrupole mass spectrometer |
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