JP5759023B2 - Euv光源のための駆動レーザ送出システム - Google Patents
Euv光源のための駆動レーザ送出システム Download PDFInfo
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—X-ray radiation generated from plasma
- H05G2/008—X-ray radiation generated from plasma involving a beam of energy, e.g. laser or electron beam in the process of exciting the plasma
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70025—Production of exposure light, i.e. light sources by lasers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70033—Production of exposure light, i.e. light sources by plasma extreme ultraviolet [EUV] sources
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70983—Optical system protection, e.g. pellicles or removable covers for protection of mask
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
- H01S3/2308—Amplifier arrangements, e.g. MOPA
- H01S3/2316—Cascaded amplifiers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
- H01S3/2383—Parallel arrangements
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—X-ray radiation generated from plasma
- H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—X-ray radiation generated from plasma
- H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
- H05G2/005—X-ray radiation generated from plasma being produced from a liquid or gas containing a metal as principal radiation generating component
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/10061—Polarization control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/22—Gases
- H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
- H01S3/2232—Carbon dioxide (CO2) or monoxide [CO]
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- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Epidemiology (AREA)
- Environmental & Geological Engineering (AREA)
- Health & Medical Sciences (AREA)
- Public Health (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- X-Ray Techniques (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Lasers (AREA)
Description
本出願は、引用によって本明細書に組み込まれている2011年3月17日出願の「EUV光源のための駆動レーザ送出システム(DRIVE LASER DELIVERY SYSTEMS FOR EUV LIGHT SOURCE)」という名称の米国特許出願番号第13/050,198号、代理人整理番号2011−0002−01号に対する優先権を請求するものである。
50 ビーム調整ユニット
90 プラズマ源材料送出システム
104 光学系
118 ターゲット材料小滴
Claims (9)
- 第1のビーム経路上の光を増幅する第1の光学利得媒質と、ここで前記第1のビーム経路上の光は第1の直線偏光方向を有し、前記第1のビーム経路はターゲット材料照射サイトと第1の光学系との間に配置された第1の光共振器の一部であり、
第2のビーム経路上の光を増幅する第2の光学利得媒質と、ここで前記第2のビーム経路上の光は第2の偏光方向を有し、前記第2のビーム経路はターゲット材料照射サイトと前記第1の光学系との間に配置された第2の光共振器の一部であり、
光の一部分を前記第1のビーム経路から第2のビーム経路にかつ前記第2の光学利得媒質を通るように迂回させる第1のビーム結合器と、
前記第1のビーム経路及び前記第2のビーム経路上の光を組み合わせ、組み合わせた光で前記ターゲット材料照射サイトにおいてターゲット材料小滴を照射し、EUV光放出プラズマを発生させる第2のビーム結合器と、
を含むことを特徴とするEUV光源。 - 前記第1のビーム経路及び前記第2のビーム経路上の光子を増幅する第3の光学利得媒質を更に含むことを特徴とする請求項1に記載のEUV光源。
- 前記第1のビーム経路上の光を減衰させる可変減衰器を更に含むことを特徴とする請求項1に記載のEUV光源。
- 前記可変減衰器は、偏光補償デバイスを含むことを特徴とする請求項1に記載のEUV光源。
- 前記ビーム結合器は、偏光ビーム結合器を含むことを特徴とする請求項1に記載のEUV光源。
- EUV光を発生させる方法であって、
第1の光学利得媒質を用いて第1のビーム経路上の光を増幅する段階と、ここで前記第1のビーム経路上の光は第1の直線偏光方向を有し、前記第1のビーム経路はターゲット材料照射サイトと第1の光学系との間に配置された第1の光共振器の一部であり、
第2の光学利得媒質を用いて第2のビーム経路上の光を増幅する段階と、ここで前記第2のビーム経路上の光は第2の偏光方向を有し、前記第2のビーム経路はターゲット材料照射サイトと前記第1の光学系との間に配置された第2の光共振器の一部であり、
光の一部分を前記第1のビーム経路から第2のビーム経路にかつ前記第2の光学利得媒質を通るように迂回させる段階と、
前記第1のビーム経路及び前記第2のビーム経路上の光を組み合わせ、組み合わせた光で前記ターゲット材料照射サイトにおいてターゲット材料小滴を照射し、EUV光放出プラズマを発生させる段階と、
を含むことを特徴とする方法。 - 第3の光学利得媒質を用いて前記第1のビーム経路及び前記第2のビーム経路上の光子を増幅する段階を更に含むことを特徴とする請求項6に記載の方法。
- 可変減衰器を用いて前記第1のビーム経路上の光を減衰させる段階を更に含むことを特徴とする請求項6に記載の方法。
- 前記迂回させる段階は、偏光ビーム結合器を用いて達成されることを特徴とする請求項6に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/050,198 US8604452B2 (en) | 2011-03-17 | 2011-03-17 | Drive laser delivery systems for EUV light source |
US13/050,198 | 2011-03-17 | ||
PCT/US2012/027026 WO2012125287A2 (en) | 2011-03-17 | 2012-02-28 | Drive laser delivery systems for euv light source |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2014510377A JP2014510377A (ja) | 2014-04-24 |
JP2014510377A5 JP2014510377A5 (ja) | 2015-04-23 |
JP5759023B2 true JP5759023B2 (ja) | 2015-08-05 |
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JP2013558029A Expired - Fee Related JP5759023B2 (ja) | 2011-03-17 | 2012-02-28 | Euv光源のための駆動レーザ送出システム |
Country Status (6)
Country | Link |
---|---|
US (2) | US8604452B2 (ja) |
EP (1) | EP2686649A4 (ja) |
JP (1) | JP5759023B2 (ja) |
KR (1) | KR101963673B1 (ja) |
TW (1) | TWI559635B (ja) |
WO (1) | WO2012125287A2 (ja) |
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-
2011
- 2011-03-17 US US13/050,198 patent/US8604452B2/en not_active Expired - Fee Related
-
2012
- 2012-02-28 WO PCT/US2012/027026 patent/WO2012125287A2/en active Application Filing
- 2012-02-28 EP EP12757203.0A patent/EP2686649A4/en not_active Withdrawn
- 2012-02-28 KR KR1020137027303A patent/KR101963673B1/ko active IP Right Grant
- 2012-02-28 JP JP2013558029A patent/JP5759023B2/ja not_active Expired - Fee Related
- 2012-03-02 TW TW101106944A patent/TWI559635B/zh not_active IP Right Cessation
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US20140077104A1 (en) | 2014-03-20 |
US8604452B2 (en) | 2013-12-10 |
KR101963673B1 (ko) | 2019-03-29 |
WO2012125287A3 (en) | 2013-12-27 |
US20120235066A1 (en) | 2012-09-20 |
EP2686649A4 (en) | 2014-10-29 |
US8829478B2 (en) | 2014-09-09 |
TW201244305A (en) | 2012-11-01 |
EP2686649A2 (en) | 2014-01-22 |
KR20140016338A (ko) | 2014-02-07 |
WO2012125287A2 (en) | 2012-09-20 |
JP2014510377A (ja) | 2014-04-24 |
TWI559635B (zh) | 2016-11-21 |
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