JP5754525B2 - 振動片、振動子、発振器、及び電子機器 - Google Patents
振動片、振動子、発振器、及び電子機器 Download PDFInfo
- Publication number
- JP5754525B2 JP5754525B2 JP2014029338A JP2014029338A JP5754525B2 JP 5754525 B2 JP5754525 B2 JP 5754525B2 JP 2014029338 A JP2014029338 A JP 2014029338A JP 2014029338 A JP2014029338 A JP 2014029338A JP 5754525 B2 JP5754525 B2 JP 5754525B2
- Authority
- JP
- Japan
- Prior art keywords
- groove
- main surface
- vibration
- vibrating arm
- resonator element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000013078 crystal Substances 0.000 claims description 117
- 238000005452 bending Methods 0.000 description 55
- 239000010453 quartz Substances 0.000 description 44
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 44
- 238000006073 displacement reaction Methods 0.000 description 40
- 239000000758 substrate Substances 0.000 description 28
- 230000005284 excitation Effects 0.000 description 18
- 238000012986 modification Methods 0.000 description 11
- 230000004048 modification Effects 0.000 description 11
- 238000012546 transfer Methods 0.000 description 11
- 230000008602 contraction Effects 0.000 description 10
- 230000000694 effects Effects 0.000 description 10
- 230000007423 decrease Effects 0.000 description 9
- 239000000463 material Substances 0.000 description 7
- 230000010355 oscillation Effects 0.000 description 7
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 5
- 238000004088 simulation Methods 0.000 description 5
- 235000014676 Phragmites communis Nutrition 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000003550 marker Substances 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 101100070120 Xenopus laevis has-rs gene Proteins 0.000 description 3
- 238000013459 approach Methods 0.000 description 3
- 230000001413 cellular effect Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 229910000833 kovar Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 240000006829 Ficus sundaica Species 0.000 description 1
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- PSHMSSXLYVAENJ-UHFFFAOYSA-N dilithium;[oxido(oxoboranyloxy)boranyl]oxy-oxoboranyloxyborinate Chemical compound [Li+].[Li+].O=BOB([O-])OB([O-])OB=O PSHMSSXLYVAENJ-UHFFFAOYSA-N 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014029338A JP5754525B2 (ja) | 2009-10-01 | 2014-02-19 | 振動片、振動子、発振器、及び電子機器 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009229290 | 2009-10-01 | ||
| JP2009229290 | 2009-10-01 | ||
| JP2014029338A JP5754525B2 (ja) | 2009-10-01 | 2014-02-19 | 振動片、振動子、発振器、及び電子機器 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010167853A Division JP5482541B2 (ja) | 2009-10-01 | 2010-07-27 | 振動片、振動子、発振器、及び電子機器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014131327A JP2014131327A (ja) | 2014-07-10 |
| JP2014131327A5 JP2014131327A5 (enExample) | 2014-08-21 |
| JP5754525B2 true JP5754525B2 (ja) | 2015-07-29 |
Family
ID=51409266
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014029338A Expired - Fee Related JP5754525B2 (ja) | 2009-10-01 | 2014-02-19 | 振動片、振動子、発振器、及び電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5754525B2 (enExample) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4257138B2 (ja) * | 2003-02-12 | 2009-04-22 | 京セラキンセキヘルツ株式会社 | 音叉型水晶振動子 |
| US8460561B2 (en) * | 2007-09-13 | 2013-06-11 | Citizen Holdings Co., Ltd. | Crystal oscillator piece and method for manufacturing the same |
-
2014
- 2014-02-19 JP JP2014029338A patent/JP5754525B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2014131327A (ja) | 2014-07-10 |
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