JP5748474B2 - Method for manufacturing liquid discharge head - Google Patents

Description

  The present invention relates to a method for manufacturing a liquid discharge head that discharges liquid such as ink.

  2. Description of the Related Art Conventionally, an ink jet recording apparatus that records an image on a recording medium by discharging ink is known as a recording apparatus. An ink jet recording apparatus is generally equipped with a liquid discharge head for discharging ink.

  As a mechanism for ejecting ink by a liquid ejection head, a mechanism using a pressure chamber that can be deformed by a piezoelectric member typified by PZT (lead zirconate titanate) is known. The pressure chamber is provided with a liquid supply path through which ink flows and an ejection port for ejecting ink. When the volume of the pressure chamber shrinks, the ink is ejected as droplets from the ejection port, and the ink is introduced into the liquid supply path when the volume of the pressure chamber expands.

  In recent years, in order to reduce deformation (curling, cockling, etc.) of a recording medium due to moisture contained in ink, the use of high-viscosity ink with reduced moisture content of ink has been studied. In order to eject high viscosity ink, a large ejection force is required. In response to this demand, a cylindrical piezoelectric member called a Gould type has been proposed in which a pressure chamber is formed by a cylindrical piezoelectric member having a circular or rectangular cross section. In the Gould type liquid discharge head, the pressure chamber is expanded and contracted by the cylindrical piezoelectric member being uniformly deformed in the inner and outer directions (radial direction). The Gould-type liquid discharge head deforms all the walls of the pressure chamber and contributes to the ink discharge force. Therefore, a large ink discharge force can be obtained compared to a liquid discharge head of the type where one wall is formed of a diaphragm. It is done.

  In printing by a liquid discharge head using a piezoelectric member, in order to obtain a higher resolution while maintaining the printing speed, it is necessary to arrange a plurality of discharge ports at a higher density in the liquid discharge head. Accordingly, a piezoelectric member provided corresponding to each discharge port is required to have a smaller size and a structure that can be arranged with high density. A manufacturing method of a liquid discharge head capable of arranging pressure chambers at high density is disclosed in Patent Document 1.

  In the manufacturing method disclosed in Patent Document 1, first, a plurality of piezoelectric plates having a plurality of grooves are stacked with the longitudinal direction of the grooves aligned. The plurality of stacked piezoelectric plates are cut in a direction orthogonal to the longitudinal direction of the groove. The groove portion of the cut piezoelectric plate becomes a pressure chamber. Thereafter, in order to separate the pressure chambers, the piezoelectric member between the pressure chambers is removed by dicing to a certain depth. The wiring board, the orifice plate, and the manifold are connected above and below the piezoelectric plate, thereby completing the liquid discharge head. According to the manufacturing method disclosed in Patent Document 1, since the pressure chambers can be two-dimensionally arranged, the pressure chambers can be arranged with high density. Further, according to this manufacturing method, it is said that forming the groove in the piezoelectric plate is easier to process than forming the hole, so that the pressure chamber can be formed with high accuracy.

  Patent Document 2 discloses a method for manufacturing a liquid discharge head in which a plurality of cylindrical piezoelectric members are arranged in a staggered two-dimensional matrix to increase the density of discharge ports. In the manufacturing method, a piezoelectric member made into ultrafine particles toward a mold having a plurality of recesses is ejected from an aerosol nozzle and deposited on the mold, and a femtosecond laser or the like penetrates into the center of the recess to form a pressure chamber or discharge port. Mouth is provided. This manufacturing method is a method called an aerosol deposition method (AD method), and fine particles are injected into a mold at several hundred m / s in a decompressed chamber (about 50 to 1 kPa). When the injected fine particles collide with the mold, the kinetic energy is converted into thermal energy and solidified at room temperature. By integrally forming the piezoelectric member with such a manufacturing method, it is said that the accuracy of the discharge port arrangement can be improved and the manufacturing process of the piezoelectric member can be simplified.

JP 2007-168319 A JP 2006-327163 A

  In a Gould-type liquid discharge head, in order to discharge ink with higher viscosity (increase the discharge force), the pressure chamber should have an aspect ratio (ratio of the length of the pressure chamber to the opening diameter on the discharge port side). Need to have a high shape, that is, an elongated shape. In the manufacturing method described in Patent Document 1, two-dimensional deep grooving with a dicer or the like is required to process the pressure chamber with a high aspect ratio shape. However, since a piezoelectric member such as PZT is a brittle material, there is a concern that the pressure chamber is damaged due to vibration of the dicing blade or the water pressure of the cleaning liquid as the pressure chamber structure has a higher aspect ratio. A method of widening the interval between the pressure chambers can be considered as a means for wiping out this concern, but in this case, it is difficult to arrange the pressure chambers at high density. Therefore, it is difficult for the manufacturing method disclosed in Patent Document 1 to discharge a highly viscous ink while ensuring a high-density arrangement of pressure chambers.

  In addition, in the manufacturing method disclosed in Patent Document 2, currently, a piezoelectric member formed by an aerosol deposition method can be used as a piezoelectric member without being fired in principle. Is present in the interior, so the piezoelectric characteristics are very low. Therefore, the defect is recovered by performing a heat treatment at about 600 to 1000 ° C., and piezoelectric characteristics similar to those of a bulk piezoelectric member are obtained. When the heat treatment step is performed in this manner, the piezoelectric member contracts, and it is difficult to form a pressure chamber with high accuracy.

  An object of the present invention has been made in view of the above problems, and provides a method for manufacturing a liquid discharge head capable of disposing high-pressure ink while arranging pressure chambers with high density and high accuracy. That is.

In order to achieve the above object, a method of manufacturing a liquid ejection head according to the present invention includes a pair of main surfaces facing each other, four rectangular side surfaces adjacent to the pair of main surfaces, and one of the four side surfaces. Liquid is discharged from the opening on the first side surface in parallel with the longitudinal direction of a certain first side surface and communicates from the first side surface to the second side surface facing the first side surface. Forming a flat plate-shaped piezoelectric member having a plurality of pressure chambers , wherein a plurality of grooves are formed on one surface of the first piezoelectric plate, and then the first piezoelectric plate of the first piezoelectric plate is formed. One face and by joining the second piezoelectric plates, said plurality of grooves configured as the plurality of pressure chambers and forming the piezoelectric member is a plate-shaped bonded body as a whole, the first Before the second piezoelectric plate is joined to the piezoelectric plate. The after bonding, a step of forming a first electrode on the inner wall surface of the plurality of pressure chambers, comprising the steps of forming a step on one of the previous SL pair of main surfaces of the plate-shaped piezoelectric member, wherein A first region that is adjacent to the first side surface and that faces the plurality of pressure chambers is a second region that is adjacent to the second side surface and bisects the one main surface together with the first region. Hekomase and a step of forming a step between the first region and the second region, between the pressure chamber between the piezoelectric member formed over the step, and the said first side step And cutting the piezoelectric member into a comb shape in which the plurality of pressure chambers independent from each other extend from the step, and the plurality of piezoelectric members processed into a comb shape. were laminated together, the second region between the stacked plurality of said piezoelectric member And a step of bonding the stomach, forming a second electrode on the outer surface of the second plurality of regions with each other are joined in a comb-like piezoelectric member.

  According to the present invention, it is possible to dispose high-viscosity ink while arranging the pressure chambers with high density and high accuracy.

It is a schematic block diagram of the inkjet recording device carrying the liquid discharge head manufactured by the manufacturing method of this invention. FIG. 2 is a layout diagram of discharge ports of a liquid discharge head unit provided in the ink jet recording apparatus shown in FIG. 1. FIG. 2 is a perspective view illustrating an appearance of a liquid discharge head unit provided in the ink jet recording apparatus illustrated in FIG. 1. FIG. 4 is an exploded perspective view of the liquid discharge head unit shown in FIG. 3. FIG. 4 is a cross-sectional view taken along a cutting line AA shown in FIG. 3. It is a perspective view for demonstrating from the process 1 to the process 5 among the manufacturing methods of the liquid discharge head in Embodiment 1 of this invention. It is a perspective view for demonstrating from the process 6 to the process 8 among the manufacturing methods of the liquid discharge head in Embodiment 1 of this invention. It is a perspective view for demonstrating the process 9 among the manufacturing methods of the liquid discharge head in Embodiment 1 of this invention. It is a perspective view for demonstrating the process 10 among the manufacturing methods of the liquid discharge head in Embodiment 1 of this invention. FIG. 6 is a perspective view for explaining a part of a process of another manufacturing method of the liquid ejection head in Embodiments 1 and 2 of the present invention. It is a perspective view for demonstrating from the process 1 to the process 7 of the manufacturing method of the liquid discharge head in Embodiment 2 of this invention.

(Embodiment 1)
First, the configuration of an ink jet recording apparatus equipped with a liquid discharge head manufactured by the manufacturing method of the present invention will be described. FIG. 1 is a diagram showing a schematic configuration of an ink jet recording apparatus equipped with a liquid discharge head manufactured by the manufacturing method of the present invention. In the recording apparatus shown in FIG. 1, a recording medium 102 is placed on a conveyor belt 104. The conveyor belt 104 is stretched around the conveyor roller 103 and has an endless belt shape. By driving the conveyance belt 104, the recording medium 102 is conveyed in the conveyance direction (see the arrow in FIG. 1).

  The ink jet recording apparatus shown in FIG. 1 is provided with a liquid discharge head unit 101 that can discharge ink. The liquid discharge head unit 101 includes a liquid discharge head 303 in which a plurality of discharge ports 308 are arranged corresponding to a range corresponding to the width of the recording medium 102. The liquid discharge heads 303 are juxtaposed in the conveyance direction of the recording medium corresponding to, for example, four colors of yellow (Y), magenta (M), cyan (C), and black (Bk). By ejecting each ink from the liquid ejection head 303 while transporting the recording medium 102, high-speed full color recording is performed.

  Next, the arrangement of the discharge ports 308 of the liquid discharge head unit 101 will be described with reference to FIG. The structure of each liquid discharge head unit 101 provided for each ink color is common. In the liquid discharge head 101, as shown in FIG. 2, a short liquid discharge head is formed in which the discharge ports 308 for discharging ink droplets are two-dimensionally arranged to increase the density. By connecting a plurality of short liquid discharge heads, the liquid discharge head unit 101 constitutes one long full line head so as to have a length corresponding to the entire width of the recording medium as a whole.

  Next, the configuration of the liquid discharge head unit 101 mounted on the ink jet recording apparatus shown in FIG. 1 will be described.

  FIG. 3 is a perspective view showing an appearance of the liquid discharge head unit 101. FIG. 4 is an exploded perspective view of the liquid discharge head unit 101 shown in FIG. FIG. 5 is a cross-sectional view taken along a cutting line AA shown in FIG. In the liquid discharge head unit 101, an orifice plate 304, a liquid discharge head 303, a fluid control plate 302, and a manifold 301 are sequentially laminated and joined from the recording medium 102 side.

  The orifice plate 304 is provided with an ejection port 308 through which ink pressurized in the pressure chamber 307 is ejected as droplets.

  The liquid discharge head 303 is entirely composed of a piezoelectric member, and a pressure chamber 307 having a long cylindrical flow path structure is two-dimensionally arranged at a position corresponding to each discharge port 308. A first electrode 309 is formed on the inner wall surface of the pressure chamber 307, and a second electrode 310 (GND electrode) is formed on the outer wall surface of the pressure chamber 307. A cylindrical pressure chamber 307 is formed, and a portion of the piezoelectric member sandwiched between the first electrode 309 and the second electrode 310 functions as a piezoelectric actuator 502 that ejects ink. A first electrode 309, a first electrode pad 311, and a second electrode pad 312 are formed on the surface in contact with the fluid control plate 302. By electrically connecting a flexible cable or the like to these pads, each wiring can be drawn out to a drive circuit unit (not shown).

  The fluid control plate 302 is provided with a rear throttle 306 at a position corresponding to each pressure chamber 307. The rear diaphragm 306 limits the back flow of ink so that the ink flow generated by driving the piezoelectric actuator 502 is strongly generated on the ejection port side. Since the fluid control plate 302 is in contact with each electrode, the fluid control plate 302 needs to be formed of an insulating material such as resin, glass, or ceramics.

  In the manifold 301, an ink supply port 305 into which ink flows from the ink tank 106 by the pump 105, and a common channel 501 communicating with the ink supply port 305 are formed. The pressure chambers 307 formed in the liquid discharge head 303 communicate with each other through a common channel 501.

  Next, a method for manufacturing the liquid discharge head 303 of this embodiment will be described.

  FIG. 6 is a perspective view for explaining steps 1 to 5 in the manufacturing method of the liquid ejection head 303 of the present embodiment.

  Step 1 is a step of forming a plurality of grooves 602 in a flat plate-like first piezoelectric plate 601 as shown in FIG. Each groove 602 extends from a side surface 6 (first side surface) which is one of the four side surfaces of a rectangle to a side surface 7 (second side surface) opposite to the side surface 6, and is spaced from each other in the longitudinal direction X of the side surface 6. Placed. Since the groove 602 needs to have a predetermined depth uniformly, it is desirable to form the groove 602 by dicing or the like with high accuracy in depth control. A part of the hollow portion of the groove 602 functions as the pressure chamber 307.

  Step 2 is a step of forming the first individual electrode 603 in each groove 602 as shown in FIG. The first individual electrode 603 is patterned by lift-off, laser or dicing patterning, or the like. In the case of forming by lift-off, the resist is formed by photolithography so that the resist remains in a portion where the electrode pattern is not left, and a metal layer to be an electrode is formed on the entire surface including the resist pattern by sputtering or vapor deposition from the upper part. Then, by removing the resist, the metal film formed on the resist is peeled off together with the resist, and a desired metal film pattern is finally obtained. When using laser or dicing, a metal film is first formed on the entire surface by sputtering, vapor deposition, electroless plating, or the like. At this time, since the wall surface of the groove 602 processed by dicing has a shape close to vertical, the film may not be sufficiently formed by sputtering or vapor deposition. In such a case, film formation by electroless plating is preferable. A desired individual electrode pattern can be obtained by removing unnecessary portions of the formed metal film by laser or dicing.

  Step 3 is a step of forming a step 609 on the back surface of the first piezoelectric plate 601 as shown in FIG. Due to the step 609, the first region adjacent to the side surface 6 and facing the groove 602 is adjacent to the side surface 7 and the second region that bisects the back surface of the first piezoelectric plate 601 together with the first region. Dent. In other words, a portion where the thickness in the thickness direction Z of the first piezoelectric plate 601 is smaller than the thickness on the side surface 7 side is formed on the side surface 6 side of the first piezoelectric plate 601. In the present embodiment, the first region is referred to as a notch 604, and the second region is referred to as a base portion 607. The notch 604 is formed by cutting such as milling to a desired depth that does not reach the bottom of the groove 602, leaving the base portion 607. The hollow portion of the groove 602 corresponding to the notch 604 finally becomes the pressure chamber 307.

  Step 4 is a step of forming a pattern of the second individual electrode 605 on the surface of the flat plate-like second piezoelectric plate 608 as shown in FIG. The second piezoelectric plate 608 has a planar shape with the same dimensions as the first piezoelectric plate 601, but the thickness does not need to be the same. The patterning of the second individual electrode 605 pattern is formed by the aforementioned lift-off, metal film etching, or the like, and is formed at a position corresponding to the first individual electrode 603.

  In step 5, as shown in FIGS. 6D and 6E, the first piezoelectric plate 601 and the second piezoelectric plate 608 are replaced by the first individual electrode 603 and the second individual electrode 605. It is the process of joining so that it may connect electrically. Thereby, the flat joined body 620 (piezoelectric member) is completed. In the flat joined body 620, a back surface 61 of the first piezoelectric plate 601 on which the step 609 is formed and a back surface 62 of the second piezoelectric plate on which the second individual electrode 605 is not formed are a pair of main members. Make up surface. In Step 5 and subsequent steps, the electrode formed inside the pressure chamber 307 is simply referred to as the first electrode 309. As a bonding method, there are a method of bonding with an adhesive using an apparatus such as a flip chip bonder, and a method of metal bonding the first individual electrode 603 and the second individual electrode 605. In step 5, a flow path structure is formed in which a plurality of pressure chambers 307 for ejecting ink from the opening on the side surface 6 side (the opening on the first side surface side) are arranged one-dimensionally.

  FIG. 7 is a perspective view for explaining steps 6 to 8 in the method for manufacturing the liquid ejection head 303 of the present embodiment.

  Step 6 is a step of forming a gap 606 that separates the plurality of pressure chambers 307 formed in the joined body 620 as shown in FIG. The gap 606 is formed by cutting from the side surface 6 to a portion reaching the step 609. Thereby, a comb-like body 630 (comb-like piezoelectric member) in which a plurality of pressure chambers 307 independent from each other extends from the step 609 is completed. As a cutting method, half dicing using a laser or a dicer is used. In the case of half dicing, since there is a concern that the base portion 607 may have an R shape, the first and second piezoelectric plates 601 and 608 bonded to the thick dummy substrate are temporarily bonded to the depth of the dummy substrate portion. Half dicing is performed so that the blade enters. As a result, the R shape of the base portion 607 can be prevented.

  Step 7 is a step of bonding a plurality of comb-like bodies 630 to each other as shown in FIG. Thereby, the laminated body 640 is completed. In step 7, the plurality of comb-like bodies 630 have the side surfaces 6 aligned and the base portion 607 is joined to complete the stacked body 640. As a bonding method, a method in which a plurality of base parts 607 coated with an adhesive are laminated and a metal film is formed on the entire surface of the notch formation surface including the base part 607 by sputtering or vapor deposition. There is a method using a metal bonding method using a film. By the step 7, the plurality of pressure chambers 307 are separated by the gap 606 in the longitudinal direction X and separated by the step 609 in the thickness direction Z, and are arranged two-dimensionally.

  Step 8 is a step of forming the second electrode 310 on the outer surface of the stacked body 640 as shown in FIG. The second electrode 310 is formed by performing electroless plating in a state where the side surface 6 (including the opening surface on the discharge port side of the pressure chamber 307) of the multilayer body 640 is entirely covered with a masking tape or a resist. As a result, it is possible to form a plating film over the entire periphery while preventing the plating film from adhering to the side surface 6 of the laminate 640.

  FIG. 8 is a perspective view for explaining step 9 in the method for manufacturing the liquid ejection head 303 of the present embodiment.

  Step 9 is a step of forming a wiring pattern for drawing out the first electrode 309 on the side surface 7 of the laminate 640 (including the opening surface on the common flow path side of the pressure chamber 307). As shown in FIG. 8A, since the second electrode 310 is formed on the entire circumference except for the side surface 6 of the multilayer body 640 in the step 8, the first electrode formed on the inner wall surface of the pressure chamber 307 is formed. The electrode 309 and the second electrode 310 are electrically connected. Therefore, in step 9, this conduction is separated and a wiring pattern as shown in FIG. 8B is formed. The wiring pattern includes a first electrode pad 311 and a second electrode pad 312 for electrical connection with a flexible cable or the like. Both electrode pads are formed at the end where the pressure chamber 307 is not formed. As a method of forming a wiring pattern, there are a method using laser ablation and a method using etching of a metal film in combination with resist photolithography.

  FIG. 9 is a perspective view for explaining step 10 and step 11 in the method for manufacturing the liquid ejection head 303 of the present embodiment.

  Step 10 is a step of performing polarization processing. In this polarization treatment, a high electric field is applied to the first electrode 309 and the second electrode 310 while being heated to the vicinity of the Curie point of the piezoelectric member. By this polarization process, the piezoelectric actuator 502 is polarized inward and outward (see arrow 801 in FIG. 9A). Therefore, the pressure chamber 307 can be deformed to expand and contract in accordance with the drive signal. For the first electrode 309 and the second electrode 310, the positive / negative combination of voltages is not particularly limited.

  Step 11 is a step of forming a protective film 319 covering the first electrode 309 as shown in FIG. 9B. The protective film 319 is formed for the purpose of protecting the first electrode 309 from the ink supplied to the pressure chamber 307. In view of the structure in which the pressure chamber 307 has a fine cylindrical shape and constituent materials such as a piezoelectric member and an adhesive, parylene is suitable as the material for the protective film 319. Since parylene can be formed in the gas phase, it can be uniformly formed in the pressure chamber. Moreover, since it has excellent chemical resistance, ink resistance is sufficient. In addition, since it has a heat resistance of up to about 400 ° C., it can cope with a case where a temperature increase or repolarization by driving the piezoelectric actuator 502 becomes necessary.

  In the manufacturing method of the liquid discharge head described above, each pressure chamber 307 such as formation of a step 609 or cutting between the pressure chambers is formed for each flat plate-like joined body 620 in which a plurality of pressure chambers 307 are arranged one-dimensionally. Processing to separate. For this reason, even if vibration occurs during the processing of one flat plate-like bonded body 620, the vibration is generated in the pressure chamber 307 formed in the other flat plate-shaped bonded body 620. The pressure chamber is less likely to be damaged because it has no effect. Therefore, a pressure chamber having a high aspect ratio can be formed without increasing the interval between the pressure chambers, so that it is possible to secure a high-density arrangement of the pressure chambers and discharge high-viscosity ink. Further, according to the manufacturing method of the present embodiment, the pressure chamber 307 can be produced uniformly (highly accurate), and thus it is possible to make the discharge performance such as the ink discharge amount and discharge speed uniform.

  In the manufacturing method of the present embodiment, after the step 609 is formed on the first piezoelectric plate in Step 3, the first piezoelectric plate 601 and the second piezoelectric plate 608 are joined in Step 5. However, in the present invention, as shown in FIG. 10, after the step of bonding the first piezoelectric plate 601 and the second piezoelectric plate 608, the step of forming the step 609 on the first piezoelectric plate may be performed. Good.

(Embodiment 2)
A method for manufacturing the liquid discharge head of this embodiment will be described.

  FIG. 11 is a perspective view for explaining steps 1 to 7 in the manufacturing method of the liquid discharge head of the present embodiment. The following description will be made in detail with a focus on differences from the manufacturing method described in the first embodiment, and detailed description of the same points as the manufacturing method described in the first embodiment will be omitted.

  Step 1 is a step of forming a plurality of grooves 602 in the flat plate-like first piezoelectric plate 601 as in Step 1 described in Embodiment 1 (see FIG. 11A). Step 2 is a step of forming a step 609 on the back surface of the first piezoelectric plate 601 as in Step 3 described in Embodiment 1 (see FIG. 11B). Step 3 is a step of joining the first piezoelectric plate 601 and the second piezoelectric plate 608 similarly to step 5 described in the first embodiment (see FIGS. 11C and 11D).

  In the manufacturing method of Embodiment 1, after forming the first individual electrodes 603 and 605 in Step 2 and Step 4, respectively, the first piezoelectric plate 601 and the second piezoelectric plate 608 are joined in Step 5. On the other hand, in the manufacturing method of the present embodiment, the first piezoelectric plate 601 and the second piezoelectric plate 608 are joined before the first individual electrodes 603 and 605 are formed.

  Step 4 is a step of forming the gap 606 as in step 6 described in the first embodiment (see FIG. 11E). Step 5 is a step of stacking a plurality of comb-like bodies 630 on each other, as in Step 7 described in Embodiment 1 (see FIG. 11F).

  Step 6 is a step of forming the first electrode 309 and the second electrode 310 by electroless plating. As shown in FIG. 11G, a plating film 1001 is formed on the entire exposed surface including the inner wall surface and the outer wall surface of the pressure chamber 307.

  Step 7 is a step of removing the plating film 1001 formed on the opening surface of the pressure chamber 307 on the discharge port side, as shown in FIG. The removal method is laser, polishing, dicing or the like. When the metal film is removed by polishing or dicing, the pressure chamber 307 may be damaged. For this reason, it is desirable to perform processing after filling a gap portion between the pressure chambers 307 with a resin such as a resist that can be easily removed for reinforcement. After step 7, steps 9 to 11 described in the first embodiment are performed.

  In the manufacturing method of the present embodiment, it is possible to simplify the process of forming the first electrode 309 and the second electrode 310, and therefore the process of the entire manufacturing method can be simplified.

  Further, in the manufacturing method of the present embodiment, after the step 609 is formed on the first piezoelectric plate in Step 2, the first piezoelectric plate 601 and the second piezoelectric plate 608 are joined in Step 3. However, in the present invention, as shown in FIG. 10, after the step of bonding the first piezoelectric plate 601 and the second piezoelectric plate 608, the step of forming the step 609 on the first piezoelectric plate may be performed. Good.

307 Pressure chamber 309 First electrode 310 Second electrode 609 Step

Claims (7)

A pair of main surfaces opposed to each other; four rectangular side surfaces adjacent to the pair of main surfaces; and a first side surface that is one of the four side surfaces, arranged in parallel in the longitudinal direction, and the first Forming a plate-like piezoelectric member having a plurality of pressure chambers communicating from one side surface to a second side surface facing the first side surface and discharging liquid from the opening on the first side surface side A plurality of grooves are formed on one surface of the first piezoelectric plate, and then the one surface of the first piezoelectric plate and the second piezoelectric plate are joined together to form the plurality of grooves. Forming a groove as the plurality of pressure chambers, and forming the piezoelectric member which is a flat plate-like bonded body as a whole ;
Forming a first electrode on an inner wall surface of the plurality of pressure chambers before or after joining the second piezoelectric plate to the first piezoelectric plate ;
A process for forming a step on one of the previous SL pair of main surfaces of the plate-shaped piezoelectric member, a first region opposed to the plurality of pressure chambers adjacent to the first side, the second Forming a step between the first region and the second region by indenting a second region adjacent to the side surface of the first region and bisecting the one main surface together with the first region. When,
Between between the pressure chamber of the piezoelectric member formed over the step, and by cutting a part of between the first side step, the piezoelectric member, wherein the plurality of pressure chambers independent of each other Processing into a comb extending from the step;
A step of a plurality of the piezoelectric member which is processed into a comb-like laminated to each other, joined together the second region between the stacked plurality of the piezoelectric member,
Forming a second electrode on an outer surface of the plurality of comb-shaped piezoelectric members in which the second regions are joined to each other .   The method of manufacturing a liquid ejection head according to claim 1, wherein the second electrode is formed by sputtering, vapor deposition, or plating in a state where the first side surface is masked.   The method for manufacturing a liquid discharge head according to claim 1, wherein the first electrode is formed by electroless plating. Performs the step of forming the first electrode before bonding the second piezoelectric plate to said first piezoelectric plate, said process comprises the steps of forming a first individual electrodes on each of said plurality of grooves And forming a second individual electrode at a position corresponding to the plurality of grooves in the second piezoelectric plate ,
Wherein in the step of forming the piezoelectric member, you joining said first of said and said individual electrode second individual electrodes and the first piezoelectric plate so as to electrically connect the second piezoelectric plate, wherein Item 4. The method for manufacturing a liquid discharge head according to any one of Items 1 to 3.   The method of manufacturing a liquid ejection head according to claim 4, wherein the first individual electrode is formed by sputtering, vapor deposition, or plating. And said second individual electrode and the first individual electrodes and metal bonding, the joined portion of the said metal bonding portion and the first piezoelectric plate second piezoelectric plates, according to claim 4 or 5 Manufacturing method of the liquid discharge head. The method for manufacturing a liquid ejection head according to claim 1, further comprising a step of forming a protective film that covers the first electrode.

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