JP5742382B2 - Traveling wave type light modulator - Google Patents

Description

  The present invention relates to a traveling wave light modulation element, and more particularly to a traveling wave light modulation element having two signal electrodes for applying different modulation signals to two branch waveguides of a Mach-Zehnder optical waveguide.

  In the optical communication field and the optical measurement field, a traveling wave type optical modulation element having a Mach-Zehnder type optical waveguide is frequently used. The Mach-Zehnder type optical waveguide has a configuration in which an input waveguide is branched into two, and the two branched waveguides are coupled to be connected to an output waveguide. Depending on the type of optical modulator, only one Mach-Zehnder type optical waveguide is used, or another Mach-Zehnder type optical waveguide is nested in the middle of each branching waveguide of one Mach-Zehnder type optical waveguide. Various forms exist, for example, in the case of incorporating into the device.

  When different modulation signals are applied to the two branch waveguides constituting the Mach-Zehnder type optical waveguide, two signal electrodes are arranged along each branch waveguide, and light waves and signals propagated through the branch waveguides. It is essential to match the timing with the microwave that is the modulation signal propagating through the electrode. In particular, when the input portions of the two signal electrodes are arranged on the same side of the substrate, the distance from the input portion to each branching waveguide is different, so a device for adjusting the timing is indispensable.

  In Patent Document 1 or 2, in a traveling wave optical modulation element having a Mach-Zehnder optical waveguide, a signal electrode is formed on or near the optical waveguide, and the first light modulation and the second light are performed using two signal electrodes. When modulating, it has been proposed to form a delay line so that each modulation signal has a predetermined phase relationship and perform arbitrary optical modulation.

  On the other hand, there is a phenomenon called electrical crosstalk in which a modulation signal applied to one signal electrode is transferred to the other signal electrode. When trying to make the timing of optical modulation the same as in Patent Document 1 or 2, the portion where the two signal electrodes are arranged in parallel and close to each other becomes longer, and thus electric crosstalk is likely to occur. In order to suppress this electrical crosstalk, Patent Document 3 proposes that an electric signal application portion is made of a low dielectric material.

  In the traveling wave type optical modulation element of Patent Document 2, a U-shaped electrode for adjusting the length is arranged on one signal electrode so that the two signal electrodes have the same length. However, if the electrode is bent in a U shape, the signal path becomes discontinuous, and high frequencies such as microwaves are likely to leak from the signal electrode. Therefore, the leaked high frequency may pass through the ground electrode and transfer to the other signal electrode. For this reason, the problem that the intended optical modulation signal cannot be obtained arises. Furthermore, a similar crosstalk phenomenon occurs at a connection portion such as a signal input portion.

  Further, as in Patent Document 3, when a low dielectric substrate is connected to the outside of the light modulation part, since the substrate material for forming the electrode is different, reflection of electricity or connection loss occurs in the middle of the signal electrode, It leads to deterioration of characteristics. In addition, since the electrical wiring and the optical waveguide portion are separated, there are problems such as an increase in man-hours for mounting and an increase in price due to substrate material costs.

Japanese Patent No. 3558529 JP 2002-182172 A JP 2010-181489 A

  The problem to be solved by the present invention is to solve the above-mentioned problems, and even when there are two signal electrode input portions on the same side of the substrate, the crosstalk of electricity is suppressed and the manufacturing cost is increased. It is an object of the present invention to provide a traveling-wave light modulation element that is suppressed.

In order to solve the above-mentioned problems, in the invention according to claim 1, a substrate having an electro-optic effect, an optical waveguide including a Mach-Zehnder type optical waveguide formed on the substrate, and a light wave propagating through the optical waveguide are modulated. The modulation electrode has a first signal electrode and a second signal electrode for applying different modulation signals to the two branch waveguides of the Mach-Zehnder optical waveguide. And the first signal electrode and the second signal electrode are arranged in parallel with each other in an operation unit that applies a modulation signal to each branching waveguide, and the first signal electrode and the second signal electrode The second signal electrode is a traveling wave optical modulation element having a modulation signal input unit on the same side surface side of the substrate . In at least a part of the action unit, the first signal electrode and the second signal electrode are used. The ground electrode placed between the signal electrode and the Is composed of the ground electrode, at least in some regions, the first signal electrode and said from the modulation signal input of the signal electrodes, to the acting unit modulation signal is applied to the branch waveguide A ground electrode disposed between the first signal electrode and the second signal electrode; and a second ground electrode extending along the second signal electrode; and The width of one ground electrode is set to be 2 to 10 times the width of the first signal electrode, and the width of the second ground electrode is set to be 2 to 10 times the width of the second signal electrode. It is characterized by being.

According to a second aspect of the present invention, in the traveling wave type optical modulation element according to the first aspect, a ground electrode disposed between the first signal electrode and the second signal electrode is provided in the action portion. Is characterized in that the first ground electrode and the second ground electrode are separated at least partially .

The invention according to claim 3 includes a substrate having an electro-optic effect, an optical waveguide including a Mach-Zehnder optical waveguide formed on the substrate, and a modulation electrode for modulating a light wave propagating through the optical waveguide. The modulation electrode has a first signal electrode and a second signal electrode for applying different modulation signals to the two branch waveguides of the Mach-Zehnder optical waveguide, and the first The signal electrode and the second signal electrode are arranged in parallel with each other in an operation unit that applies a modulation signal to each branch waveguide, and the first signal electrode and the second signal electrode Is a traveling wave optical modulation element having a modulation signal input section on the same side surface side of the substrate, in the region from the modulation signal input section to the modulation signal output section of each signal electrode, A ground electrode disposed between the second signal electrode and the second signal electrode; , Characterized in that it is separated into a second ground electrode along a first ground electrode and the second signal electrode along the first signal electrode.

The invention according to claim 4, in the traveling wave type optical modulator according to any one of claims 1 to 3, between the first ground electrode and the second ground electrode electrically resistive or A groove is arranged.

The invention according to claim 1 comprises a substrate having an electro-optic effect, an optical waveguide including a Mach-Zehnder optical waveguide formed on the substrate, and a modulation electrode for modulating a light wave propagating through the optical waveguide. The modulation electrode has a first signal electrode and a second signal electrode for applying different modulation signals to the two branch waveguides of the Mach-Zehnder optical waveguide, and the first The signal electrode and the second signal electrode are arranged in parallel with each other in an operation unit that applies a modulation signal to each branch waveguide, and the first signal electrode and the second signal electrode Is a traveling wave optical modulation element having a modulation signal input section on the same side surface of the substrate, and is disposed between the first signal electrode and the second signal electrode in at least a part of the action section. The ground electrode is composed of one ground electrode. Between the modulation signal inputs of the signal electrodes, in at least some areas to the action part of the modulation signal is applied to the branch waveguide, and said first signal electrode and the second signal electrode Are separated into a first ground electrode along the first signal electrode and a second ground electrode along the second signal electrode, and the width of the first ground electrode is The width of the first signal electrode is set to be not less than 2 times and not more than 10 times, and the width of the second ground electrode is set to be not less than 2 times and not more than 10 times the width of the second signal electrode. The modulation signal propagating through the signal electrode can be transferred to the second signal electrode, or vice versa, to prevent the occurrence of an electrical crosstalk phenomenon and prevent the deterioration of the characteristics of the traveling wave light modulation element It becomes possible to do. In addition, since the present invention only needs to devise the shape of the ground electrode, the manufacturing process is not complicated and expensive. The width of the first ground electrode is 2 to 10 times the width of the first signal electrode, and the width of the second ground electrode is 2 to 10 times the width of the second signal electrode. Therefore, not only can the electrical crosstalk phenomenon be suppressed, but the function as a ground electrode can be achieved, and the propagation of the modulation signal by the signal electrode can be stabilized.

According to the second aspect of the present invention , at least a part of the ground electrode disposed between the first signal electrode and the second signal electrode is at least partially connected to the first ground electrode and the second ground electrode in the action portion. in because they are separated, not only the region from the modulation signal input section up to the working portion, it becomes possible to suppress the generation of electrical stroke symptoms in separate working portion.

According to a third aspect of the present invention, there is provided a substrate having an electro-optic effect, an optical waveguide including a Mach-Zehnder optical waveguide formed on the substrate, and a modulation electrode for modulating a light wave propagating through the optical waveguide. The modulation electrode has a first signal electrode and a second signal electrode for applying different modulation signals to the two branch waveguides of the Mach-Zehnder optical waveguide, and the first The signal electrode and the second signal electrode are arranged in parallel with each other in an operation unit that applies a modulation signal to each branch waveguide, and the first signal electrode and the second signal electrode Is a traveling wave optical modulation element having a modulation signal input section on the same side surface side of the substrate, in the region from the modulation signal input section to the modulation signal output section of each signal electrode, A grounding power source disposed between the second signal electrode and the second signal electrode; Are separated into a first ground electrode along the first signal electrode and a second ground electrode along the second signal electrode, so that the modulation signal input unit can be divided into all regions of the modulation signal output unit. It is possible to suppress the occurrence of an electrical crosstalk phenomenon.

According to the fourth aspect of the present invention, since an electrical resistor or a groove is disposed between the first ground electrode and the second ground electrode, it is assumed that the modulation signal is between the first and second ground electrodes. Even when the liquid leaks out, it is absorbed by the electrical resistor or released through the groove, so that it is possible to effectively suppress the occurrence of the electrical crosstalk phenomenon.

It is a figure explaining the 1st Example of the traveling wave type | mold light modulation element of this invention. It is a figure explaining the 2nd Example of the traveling wave type | mold light modulation element of this invention. FIG. 3 is a cross-sectional view taken along one-dot chain line A-A ′ in FIG. 2. It is a figure explaining the 3rd Example of the traveling wave type | mold light modulation element of this invention. It is a figure explaining the 4th Example of the traveling wave type | mold light modulation element of this invention. It is a figure explaining the 5th Example of the traveling wave type | mold light modulation element of this invention.

Hereinafter, the present invention will be described in detail using preferred examples.
FIG. 1 shows a first embodiment of a traveling wave light modulation device according to the present invention.
The present invention comprises a substrate 1 having an electro-optic effect, an optical waveguide 2 including a Mach-Zehnder optical waveguide formed on the substrate, and a modulation electrode for modulating a light wave propagating through the optical waveguide, The modulation electrode has a first signal electrode 31 and a second signal electrode 32 that apply different modulation signals to the two branch waveguides (21, 22) of the Mach-Zehnder optical waveguide, In addition, the first signal electrode and the second signal electrode are the traveling wave type light modulation elements having the modulation signal input portions (T1, T2) on the same side surface side of the substrate. In at least a part of the region from the signal input part (T1, T2) to the action part S where the modulation signal is applied to the branching waveguide, the first signal electrode 31 and the second signal electrode 32 A ground electrode disposed between the first signal electrode and the ground electrode Characterized in that it is separated into a second ground electrode 42 along the first signal electrode of the ground electrode 41 and the second.

  As a substrate having an electro-optic effect used in the present invention, for example, lithium niobate, lithium tantalate, PLZT (lead lanthanum zirconate titanate), quartz-based materials, and substrates combining these materials are used. Is available. In particular, a lithium niobate (LN) crystal having a high electro-optic effect is preferably used.

  As a method of forming the optical waveguide on the substrate, it can be formed by diffusing Ti or the like on the substrate surface by a thermal diffusion method or a proton exchange method. It is also possible to use a ridge-shaped waveguide having a convex portion corresponding to the optical waveguide, such as etching a substrate other than the optical waveguide or forming grooves on both sides of the optical waveguide. The shape of the optical waveguide in the traveling wave optical modulation element of the present invention has at least one Mach-Zehnder optical waveguide. Nested optical waveguides in which a plurality of Mach-Zehnder optical waveguides are arranged in parallel or in series, or two sub-Mach-Zehnder optical waveguides are incorporated in each branch waveguide of one main Mach-Zehnder optical waveguide. There may be.

In a traveling wave light modulation element, a modulation electrode such as a signal electrode or a ground electrode is formed on a substrate. Such an electrode can be formed by forming a Ti / Au electrode pattern, a gold plating method, or the like. Further, if necessary, a buffer layer such as a dielectric SiO ₂ may be provided on the substrate surface after the optical waveguide is formed, and a modulation electrode may be formed on the buffer layer.

  As shown in FIG. 1, the traveling wave type optical modulation element of the present invention is characterized in that a modulation signal input part (T1, T2) to an action part S (in FIG. 1, the action part in the first signal electrode 31 is denoted by S The ground electrode disposed between the two signal electrodes (31, 32) is separated. Thereby, it is possible to suppress the occurrence of an electrical crosstalk phenomenon in which the modulation signal propagating through the first signal electrode 31 is transferred to the second signal electrode 32.

  In FIG. 1, the ground electrodes (41, 42) are separated also in the action part. However, in the present invention, it is only necessary to be separated in at least a part of the region from the modulation signal input part to the action part. In particular, a place where the first and second signal electrodes are close to each other or a U-shaped delay line 33 as shown in FIG. 1 is formed, and a microwave as a modulation signal is emitted toward the other signal electrodes. It is preferable to separate the ground electrode at an easy place.

  Further, as shown in FIG. 1, also in the action part S, by separating the ground electrodes (41, 42), it is possible to suppress the electric crosstalk phenomenon in the action part. In particular, by separating the ground electrode from the modulation signal input part (T1, T2) to the entire action part, the crosstalk phenomenon via the ground electrode can be effectively suppressed, and the deterioration of the modulation characteristics of the light modulation element is prevented. be able to.

  FIG. 2 is a diagram showing a second embodiment according to the traveling wave light modulation device of the present invention. In a situation where the interval between the signal electrodes in the action part S is narrow, as shown in FIG. 2, the first ground electrode 41 and the second ground electrode 42 are integrated in the action part S. For the signal electrode, a delay line portion is provided in a part of the second signal electrode.

  A cross-sectional view taken along one-dot chain line AA ′ in FIG. 2 is shown in FIG. 3. In the traveling wave type light modulation element of the present invention, since the first ground electrode and the second ground electrode are separated, there is a concern that the width of the first or second ground electrode becomes narrow. When the width of the ground electrode is narrowed, the potential of the ground electrode is not stable with respect to the modulation signal propagating through the signal electrode, and it becomes difficult to stably propagate the modulation signal.

  Therefore, in the present invention, the width w2 of the first ground electrode 41 is 2 to 10 times the width w1 of the first signal electrode 31, or the width w3 of the second ground electrode 42 is the second The width w4 of the signal electrode 32 is not less than 2 times and not more than 10 times. By having a width more than twice the width of the signal electrode, it is possible to stabilize the potential of the ground electrode. If the width exceeds 10, the width of the ground electrode becomes too large. The degree of design freedom will be limited.

  In the present invention, as shown in FIG. 4, it is preferable to dispose the electrical resistor 5 between the first ground electrode 41 and the second ground electrode 42. Even if a modulation signal leaks between the first and second ground electrodes (41, 42), the electrical resistor 5 absorbs the modulation signal, thereby suppressing the occurrence of an electrical crosstalk phenomenon. Is possible. The electrical resistor is not particularly limited as long as it is a material that can absorb microwaves such as ferrite.

  Furthermore, as shown in FIG. 5, it is possible to form a groove 6 in the substrate 1 between the first ground electrode 41 and the second ground electrode 42. This groove 6 makes it possible to emit a modulation signal propagating beyond each ground electrode to the outside of the substrate, and to suppress the crosstalk phenomenon.

  As shown in FIG. 6, the region for separating the ground electrodes (41, 42) arranged between the signal electrodes is the entire region from the modulation signal input unit (T1, T2) to the modulation signal output unit (T3, T4). May be passed. This makes it possible to effectively suppress the electrical crosstalk phenomenon between the signal electrodes. Reference numeral L1 indicates incident light incident on the light modulation element, and L2 indicates outgoing light.

  As described above, according to the traveling wave optical modulation element according to the present invention, even when there are two signal electrode input portions on the same side surface of the substrate, electrical crosstalk is suppressed and the manufacturing cost is increased. It is possible to provide a traveling-wave light modulation element that is suppressed.

DESCRIPTION OF SYMBOLS 1 Substrate 2 having electro-optic effect Optical waveguides 21 and 22 Branched waveguide 31 First signal electrode 32 Second signal electrode 41 First ground electrode 42 Second ground electrode 5 Electrical resistor 6 Groove

Claims (4)

A substrate having an electro-optic effect;
An optical waveguide including a Mach-Zehnder type optical waveguide formed on the substrate;
A modulation electrode for modulating a light wave propagating through the optical waveguide,
The modulation electrode has a first signal electrode and a second signal electrode for applying different modulation signals to the two branch waveguides of the Mach-Zehnder optical waveguide, and the first electrode The signal electrode and the second signal electrode are arranged in parallel with each other in the operation unit that applies a modulation signal to each branching waveguide, and further, the first signal electrode and the second signal electrode are In the traveling wave type light modulation element having the modulation signal input part on the same side surface side of the substrate,
In at least a part of the action portion, the ground electrode arranged between the first signal electrode and the second signal electrode is constituted by one ground electrode,
Between the modulation signal inputs of the signal electrodes, in at least some areas to the action part of the modulation signal is applied to the branch waveguide, and said first signal electrode and the second signal electrode Are separated into a first ground electrode along the first signal electrode and a second ground electrode along the second signal electrode, and the width of the first ground electrode is The width of the first signal electrode is set to be 2 to 10 times and the width of the second ground electrode is set to be 2 to 10 times the width of the second signal electrode. Traveling wave type light modulation element. The traveling wave optical modulation element according to claim 1, wherein a ground electrode disposed between the first signal electrode and the second signal electrode is disposed between the first ground electrode and the action portion. A traveling wave type light modulation element characterized by being separated at least partially from the second ground electrode. A substrate having an electro-optic effect;
An optical waveguide including a Mach-Zehnder type optical waveguide formed on the substrate;
A modulation electrode for modulating a light wave propagating through the optical waveguide,
The modulation electrode has a first signal electrode and a second signal electrode for applying different modulation signals to the two branch waveguides of the Mach-Zehnder optical waveguide, and the first electrode The signal electrode and the second signal electrode are arranged in parallel with each other in the operation unit that applies a modulation signal to each branching waveguide, and further, the first signal electrode and the second signal electrode are In the traveling wave type light modulation element having the modulation signal input part on the same side surface side of the substrate,
A ground electrode disposed between the first signal electrode and the second signal electrode in a region from the modulation signal input unit to the modulation signal output unit of each signal electrode is the first signal electrode. The traveling wave type light modulation element is characterized by being separated into a first ground electrode along the second signal electrode and a second ground electrode along the second signal electrode.   The traveling wave type light modulation element according to any one of claims 1 to 3, wherein an electrical resistor or a groove is disposed between the first ground electrode and the second ground electrode. A traveling wave type light modulation device characterized.

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