JP5962800B2 - Light control device - Google Patents

Description

  The present invention relates to a light control device.

  The following Patent Document 1 describes an optical waveguide element applied to an optical modulator or the like. The optical waveguide device described in the document applies a plurality of optical waveguide portions arranged in parallel to each other on a substrate and an electric field based on an independent modulation signal to each of the optical waveguide portions. A plurality of modulation electrodes.

JP 2009-53444 A JP 2010-237593 A

  An optical modulator having a plurality of optical waveguide portions arranged in parallel and close to each other on a substrate, and a plurality of modulation electrodes for applying independent modulation signals to each of the optical waveguide portions, etc. In an optical control device, since a plurality of optical waveguide portions are close to each other, a separation distance between portions (working electrode portions) for applying an electric field to the plurality of optical waveguide portions among the plurality of modulation electrodes is short. Become. Therefore, there is a problem of crosstalk between the working electrode portions of the plurality of modulation electrodes (a phenomenon in which a part of the modulation signal transmitted through one working electrode portion moves into the other working electrode portion).

  In the optical waveguide element described in Patent Document 1, a groove is formed in a region between the working electrode portions on the main surface of the substrate, thereby crossing the working electrode portions among the plurality of modulation electrodes. Talk is suppressed.

  In general, in a light control device provided with a plurality of modulation electrodes, each modulation electrode includes a working electrode section as described above and an input-side signal electrode that transmits a modulation signal input from the outside to the working electrode section. And have. In general, the distance between the input signal electrodes of the plurality of modulation electrodes can be easily made larger than the distance between the working electrode portions. For this reason, it is recognized by those skilled in the art that the crosstalk between the modulation electrodes is a phenomenon that occurs between the working electrode portions having a short separation distance. Various methods for suppressing crosstalk between the working electrode portions, such as the method described in Patent Document 1, have been proposed.

  However, the present inventors have found that the crosstalk between the modulation electrodes may be a problem even between the input side signal electrodes that are spaced apart from each other by the distance between the working electrode portions. . In the above-mentioned Patent Document 1, there is no description about the generation of crosstalk between the input side signal electrodes and the method of suppressing the crosstalk between the input side signal electrodes. The above-mentioned Patent Document 2 discloses a method for suppressing crosstalk between input-side signal electrodes having bent portions where wirings are folded back. However, the thickness of a substrate used for an optical modulator is extremely reduced to 30 μm to 100 μm. There is a need.

  In the case of an integrated light control device having a plurality of control signal electrodes, it is common to incorporate a signal delay circuit or an impedance conversion circuit in the input side signal electrode. In such a device, it is necessary to increase the length of each input-side signal electrode, and each input-side signal electrode has a bent portion, a meandering portion, a signal electrode width changing portion, and a signal electrode-ground electrode interval. Often includes a structure change section such as a change section. Therefore, the present inventors have found that in such a device, control signal propagation is unstable, so that crosstalk of the control signal between the input side signal electrodes is particularly likely to occur.

  The present invention has been made in view of such a problem, and is an optical control device having a plurality of modulation electrodes, and between input signal electrodes of each modulation electrode without reducing the thickness of the substrate. An object of the present invention is to provide a light control device in which crosstalk is suppressed.

  In order to solve the above-described problems, a light control device according to the present invention includes a substrate, first and second optical waveguides extending along a main surface of the substrate, and a first supplied from the outside. A first control signal electrode provided on the main surface of the substrate for changing the refractive index of light propagating in the first optical waveguide based on an electric signal, and an electric field can be applied to the first optical waveguide. A first working electrode portion extending along the first optical waveguide, a first input signal electrode extending along the main surface of the substrate so as to transmit the first electric signal to the first working electrode portion, And a second control signal provided on the main surface of the substrate for changing a refractive index of light propagating in the second optical waveguide based on a second electric signal supplied from the outside. A control signal electrode for applying an electric field to the second optical waveguide. 2nd control which has the 2nd working electrode part extended along 2 optical waveguides, and the 2nd input side signal electrode extended along the principal surface of a substrate so that a 2nd electric signal may be transmitted to the 2nd working electrode part A signal electrode, a ground electrode between signal electrodes provided on the main surface of the substrate so as to be spaced between the first input signal electrode and the second input signal electrode in plan view, and a plane A first ground electrode provided on the main surface of the substrate so as to be spaced apart from the first input-side signal electrode on the side opposite to the signal-electrode ground electrode side across the first input-side signal electrode, And a second electrode provided on the main surface of the substrate so as to be spaced apart from the second input side signal electrode on the opposite side of the signal electrode ground electrode side across the second input side signal electrode in plan view. A ground electrode, and the substrate has a first input signal electrode and a ground electrode between the signal electrodes in plan view. A first groove provided in the first groove, a second groove provided between the first input-side signal electrode and the first ground electrode, and a second groove provided between the second input-side signal electrode and the signal-electrode ground electrode. And a third groove portion and a fourth groove portion provided between the second input-side signal electrode and the second ground electrode.

  In the light control device according to the present invention, since the substrate has the first groove portion and the second groove portion, one end of the first ground electrode and the signal electrode indirect are compared with the case where the substrate does not have these groove portions. The separation distance along the first direction with one end of the ground electrode can be reduced. When the separation distance is small, the separation distance between the first input-side signal electrode, the first ground electrode, and the inter-signal electrode ground electrode can also be reduced. As a result, the spread of the lines of electric force between the first input side signal electrode, the first ground electrode, and the inter-signal electrode ground electrode can be reduced, so that the first ground electrode and the signal electrode indirectly from the first input side signal electrode. The electric lines of force directed to the ground electrode can be terminated more effectively. That is, even if the separation distance between the first input side signal electrode and the second input side signal electrode is not large, the electric force generated from the first input side signal electrode by the substrate having the first groove portion and the second groove portion. Since the line is terminated more effectively, the crosstalk of the control signal to the second input side signal electrode can be reduced without reducing the thickness of the substrate.

  Similarly, since the substrate has the third groove portion and the fourth groove portion, the first end of the second ground electrode and the one end of the signal electrode ground electrode are compared with the case where the substrate does not have these groove portions. The separation distance along one direction can be reduced. When the separation distance is small, the separation distance between the second input-side signal electrode, the second ground electrode, and the inter-signal electrode ground electrode can also be reduced. As a result, the spread of the electric lines of force between the second input-side signal electrode, the second ground electrode, and the signal-electrode ground electrode can be reduced, so that the second ground-side electrode and the signal electrode indirectly from the second input-side signal electrode. The electric lines of force directed to the ground electrode can be terminated more effectively. That is, even if the separation distance between the first input side signal electrode and the second input side signal electrode is not large, the electric force generated from the second input side signal electrode by the substrate having the third groove portion and the fourth groove portion. Since the line is terminated more effectively, the crosstalk of the control signal to the first input side signal electrode can be reduced without reducing the thickness of the substrate. As a result, according to the light control device of the present invention, it is possible to suppress crosstalk between the first input side signal electrode and the second input side signal electrode.

  Furthermore, in the light control device according to the present invention, it is preferable that the first groove portion, the second groove portion, the third groove portion, and the fourth groove portion have a depth of 2 μm or more. Thereby, the crosstalk between the first input side signal electrode and the second input side signal electrode can be particularly suppressed.

  Furthermore, in the light control device according to the present invention, the signal electrode ground electrode includes a main portion, a first thin portion thinner than the main portion provided on the first groove portion side with respect to the main portion, and / or Alternatively, the second thin portion thinner than the main portion provided on the third groove portion side with respect to the main portion, and / or the first ground electrode is more than the main portion and the main portion. A thin portion thinner than the main portion provided on the second groove portion side, and / or the second ground electrode is provided on the fourth groove portion side with respect to the main portion and the main portion. It is preferable to have a thin part thinner than the main part.

  In this case, the signal electrode ground electrode has a step between the main portion and the first thin portion, and / or the first ground electrode has a step between the main portion and the thin portion. Therefore, the surface area of the signal electrode ground electrode and / or the first ground electrode facing the first input signal electrode increases. As a result, the electric lines of force radiated from the first input-side signal electrode are likely to terminate at the inter-signal electrode ground electrode and / or the first ground electrode, so that the electric lines of force reach the second input-side signal electrode. Is suppressed. Similarly, the signal electrode ground electrode has a step between the main portion and the second thin portion, and / or the second ground electrode has a step between the main portion and the thin portion. Therefore, the surface area of the signal electrode ground electrode and / or the second ground electrode facing the second input side signal electrode increases. As a result, the electric lines of force radiated from the second input-side signal electrode are easily terminated at the inter-signal electrode ground electrode and / or the second ground electrode, so that the electric lines of force reach the first input-side signal electrode. Is suppressed. As a result, crosstalk between the first input side signal electrode and the second input side signal electrode can be further suppressed.

  Furthermore, in the light control device according to the present invention, the first control signal electrode includes a main portion, a first thin portion thinner than the main portion provided on the first groove portion side with respect to the main portion, and / or Alternatively, the second thin-film portion thinner than the main portion provided on the second groove portion side with respect to the main portion, and / or the second control signal electrode includes the main portion and the main portion. A first thin part thinner than the main part provided on the third groove part side and / or a second thin part thinner than the main part provided on the fourth groove part side relative to the main part. It is preferable to have.

  In this case, when the first electric signal is applied from the outside to the first input signal electrode of the first control signal electrode, the electric field concentrates on the first thin portion and / or the second thin portion having a small thickness. The electric lines of force are mainly emitted from the first thin part and / or the second thin part. The first thin portion and / or the second thin portion of the first input-side signal electrode emits electric lines of force from a position closer to the substrate than the main part, so that the electric lines of force radiated from these are generated on the substrate. Reaching the second input side signal electrode via the upper surface of the main surface is suppressed. Similarly, when a second electric signal is applied to the second input signal electrode of the second control signal electrode from the outside, the electric field concentrates on the first thin portion and / or the second thin portion having a small thickness. The electric lines of force are mainly emitted from the first thin part and / or the second thin part. The first thin portion and / or the second thin portion of the second input-side signal electrode emits electric lines of force from a position closer to the substrate than the main part, and thus the electric lines of force radiated from these are generated on the substrate. Reaching the first input signal electrode via the upper surface of the main surface is suppressed. As a result, crosstalk between the first input side signal electrode and the second input side signal electrode can be further suppressed.

  Furthermore, in the light control device according to the present invention, it is preferable that at least one of the signal electrode ground electrode, the first ground electrode, and the second ground electrode has a through hole. This increases the surface area of at least one of the signal electrode ground electrode, the first ground electrode, and the second ground electrode, so that the electric lines of force radiated from the first input side signal electrode are The electric lines of force radiated from the second input-side signal electrode are easily terminated at the inter-signal electrode ground electrode and the second ground electrode. As a result, crosstalk between the first input side signal electrode and the second input side signal electrode can be further suppressed.

  Further, the light control device according to the present invention is provided in the first groove portion, and is provided in the first groove portion ground electrode electrically connected to the signal electrode ground electrode and / or in the second groove portion, A second in-groove ground electrode electrically connected to the first ground electrode, and / or a third in-groove ground electrode provided in the third groove and electrically connected to the inter-signal electrode ground electrode, and It is preferable to further include a fourth in-groove ground electrode provided in the fourth groove and electrically connected to the second ground electrode.

  In this case, a part of the electric lines of force radiated from the first input-side signal electrode is terminated at the first groove-in-ground electrode and / or the second groove-in-ground electrode, and / or the second input-side signal electrode. A portion of the electric field lines radiated from the terminal ends at the third groove ground electrode and / or the fourth groove ground electrode. As a result, the electric lines of force radiated from the first input-side signal electrode and the electric lines of force radiated from the second input-side signal electrode are likely to be terminated at a closer location. Crosstalk between the two input side signal electrodes can be further suppressed.

  Furthermore, in the light control device according to the present invention, at least one of the first groove inner ground electrode, the second groove inner ground electrode, the third groove inner ground electrode, and the fourth groove inner ground electrode has a through hole. It is preferable to have. As a result, the surface areas of the first groove ground electrode, the second groove ground electrode, the third groove ground electrode, and the fourth groove ground electrode are increased, so that the electric power radiated from the first input side signal electrode is increased. The force lines are more easily terminated at the first groove ground electrode and the second groove ground electrode, and the electric force lines radiated from the second input side signal electrode are the third groove ground electrode and the fourth groove ground. It becomes easier to terminate with an electrode. As a result, crosstalk between the first input side signal electrode and the second input side signal electrode can be further suppressed.

  In the light control device according to the present invention, the signal electrode ground electrode, the first ground electrode, and the second ground electrode each preferably have a recess. As a result, the surface areas of the signal electrode ground electrode, the first ground electrode, and the second ground electrode are increased, so that the electric lines of force radiated from the first input side signal electrode are The electric field lines radiated from the second input-side signal electrode are easily terminated at the inter-signal electrode ground electrode and the second ground electrode. As a result, crosstalk between the first input side signal electrode and the second input side signal electrode can be further suppressed.

  Furthermore, in the light control device according to the present invention, one end of the first ground electrode, one end of the first input side signal electrode, one end of the inter-signal electrode ground electrode, one end of the second input side signal electrode, and the second ground One end of the electrode is arranged in this order along the first direction along the main surface of the substrate, and the first end of the first input side signal electrode and the one end of the second input side signal electrode are arranged in the first direction. The separation distance along one direction is D, the separation distance along the first direction between the one end of the first ground electrode and the one end of the ground electrode between signal electrodes, or the one end of the second ground electrode When the separation distance along the first direction from the one end of the signal electrode ground electrode is defined as K, the value of D / K can be set to 3.0 or less. Although it is clear that the larger the value of D is, the more advantageous it is for the prevention of crosstalk. However, the present inventors have found that when the value of K is large, the crosstalk characteristic tends to deteriorate, and the value of D / K. Is effective as a discriminant of the crosstalk characteristic, and in the conventional light control device in which the value of D / K satisfies this condition, the element corresponding to the first input side signal electrode and the second input side signal electrode It has been found that crosstalk between corresponding elements is particularly likely to occur. Therefore, by applying the present invention to a light control device in which the value of D / K satisfies this condition, the effects of the present invention are particularly effectively exhibited.

  According to the present invention, there is provided an optical control device having a plurality of modulation electrodes, in which crosstalk between input-side signal electrodes of each modulation electrode is suppressed.

It is a top view which shows the structure of the light control device which concerns on 1st Embodiment. FIG. 3 is a plan view showing a configuration near one end of a first input signal electrode of a first control signal electrode and a first input signal electrode of a second control signal electrode of the light control device shown in FIG. 1. FIG. 3 is an end view of the light control device taken along line III-III in FIG. 2. It is a perspective view which shows the structure of the end vicinity of the 1st input side signal electrode and 1st input side signal electrode of the light control device shown in FIG. It is a top view which shows the structure of the end vicinity of the 1st input signal electrode of the 1st control signal electrode of 2nd Embodiment, and the 1st input signal signal electrode of the 2nd control signal electrode. FIG. 6 is an end view of the light control device taken along line VI-VI in FIG. 5. It is a top view which shows the structure of the end vicinity of the 1st input side signal electrode of the 1st control signal electrode of 3rd Embodiment, and the 1st input side signal electrode of the 2nd control signal electrode. FIG. 8 is an end view of the light control device taken along line VIII-VIII in FIG. 7. It is a top view which shows the structure of the end vicinity of the 1st input side signal electrode of the 1st control signal electrode of 4th Embodiment, and the 1st input side signal electrode of the 2nd control signal electrode. FIG. 10 is an end view of the light control device taken along line XX in FIG. 9. It is a top view which shows the structure of the end vicinity of the 1st input signal electrode of the 1st control signal electrode of 5th Embodiment, and the 1st input signal signal electrode of the 2nd control signal electrode. FIG. 12 is an end view of the light control device taken along line XII-XII in FIG. 11. It is a top view showing the composition near the end of the 1st input side signal electrode of the 1st control signal electrode of the 6th embodiment, and the 1st input side signal electrode of the 2nd control signal electrode. FIG. 14 is an end view of the light control device taken along line XIV-XIV in FIG. 13.

  Hereinafter, a light control device according to an embodiment will be described in detail with reference to the accompanying drawings. In the drawings, the same reference numerals are used for the same elements when possible. In addition, the dimensional ratios in the components in the drawings and between the components are arbitrary for easy viewing of the drawings.

(First embodiment)
FIG. 1 is a plan view showing the configuration of the light control device according to the first embodiment. As shown in FIG. 1, the light control device 100 according to the present embodiment controls (for example, modulates) the input light CL, which is continuous light introduced by an optical fiber or the like, and outputs the modulated light ML to the outside. Device. The light control device 100 is a device that controls the input light CL, such as an optical modulator, an optical switch, or a polarization controller. For example, when the light control device 100 is an optical modulator, the modulated light ML modulated based on an electric signal supplied from the outside is output.

  The light control device 100 includes a substrate 1, an optical waveguide structure 3 provided on the substrate 1, a first control signal electrode 5, a second control signal electrode 7, a first ground electrode 11, and a second ground. The electrode 12 and the signal electrode ground electrode 13 may be provided. In FIG. 1, the optical waveguide structure 3 is indicated by a broken line, and the first ground electrode 11, the second ground electrode 12, and the signal electrode ground electrode 13 are hatched.

The substrate 1 is a plate-like member made of a dielectric material that exhibits an electro-optic effect, such as lithium niobate (LiNbO ₃ ). The substrate 1 has a longitudinal shape extending along the Y-axis direction (first direction). The substrate 1 has a substantially flat main surface 1S. FIG. 1 shows an orthogonal coordinate system RC in which the X axis and the Y axis are set in a direction parallel to the main surface 1S, and the Z axis is set in a direction orthogonal to the main surface 1S. In each of the drawings subsequent to FIG. 2, the orthogonal coordinate system RC is shown so as to correspond to FIG. 1 as necessary. The shape of the main surface 1S of the substrate 1 in a plan view (when viewed from the Z-axis direction) is a rectangular shape having outer edges along the X-axis and the Y-axis in this embodiment.

The optical waveguide structure 3 is provided on the substrate 1. The optical waveguide structure 3 includes a plurality of optical waveguides having a structure corresponding to the light control method of the light control device 100, and each of the plurality of optical waveguides extends along the main surface 1 </ b> S of the substrate 1. The optical waveguide structure 3 is made of a dielectric material having an electro-optic effect such as lithium niobate (LiNbO ₃ ) in which a metal such as titanium (Ti) is diffused. The refractive index of the material constituting the optical waveguide structure 3 is larger than the refractive index of the material constituting the substrate 1. Therefore, the optical waveguide structure 3 functions as a core with respect to the substrate 1, and the substrate 1 functions as a cladding with respect to the optical waveguide structure 3.

A structure including the substrate 1 and the optical waveguide structure 3 provided on the substrate 1 as described above prepares a plate-like initial substrate made of a dielectric material such as lithium niobate (LiNbO ₃ ), for example. It can be obtained by diffusing a metal such as titanium (Ti) in the region of the initial substrate to be the optical waveguide structure 3 to form a region having a higher refractive index than other regions of the substrate 1. Alternatively, the structure can also be obtained by forming the optical waveguide structure 3 on the main surface 1S of the substrate 1 after preparing the substrate 1.

  In the present embodiment, the optical waveguide structure 3 includes a Mach-Zehnder type optical waveguide. Specifically, the optical waveguide structure 3 includes an input optical waveguide 3D1 that is a Y-branch optical waveguide, a first arm optical waveguide 31 as a first optical waveguide, and a second arm optical waveguide 32 as a second optical waveguide. And an output optical waveguide 3D2 which is a Y-coupled optical waveguide. In this embodiment, the input optical waveguide 3D1, the first arm optical waveguide 31, the second arm optical waveguide 32, and the output optical waveguide 3D2 are arranged on the same substrate 1 to form a Mach-Zehnder optical waveguide. One or both of the input optical waveguide 3D1 and the output optical waveguide 3D2 are arranged on a substrate different from the substrate 1 and are optically connected to the first arm optical waveguide 31 and the second arm optical waveguide 32, so that the Mach-Zehnder A type optical waveguide may be configured.

  The input optical waveguide 3 </ b> D <b> 1 has a light input end provided at one end 1 a in the Y-axis direction of the substrate 1, extends from the light input end along the Y-axis direction, branches, and is input to the first arm optical waveguide 31. And the second arm optical waveguide 32. The first arm optical waveguide 31 and the second arm optical waveguide 32 each extend along the Y-axis direction, which is the direction along the main surface 1S of the substrate 1. The output end of the first arm optical waveguide 31 and the output end of the second arm optical waveguide 32 are respectively connected to the two input ends of the output optical waveguide 3D2. The output optical waveguide 3D2 extends from the input end along the Y-axis direction, and extends to the light output end located at the other end 1b of the substrate 1 in the Y-axis direction.

  The first control signal electrode 5 is an electrode provided on the main surface 1S of the substrate 1 in order to change the refractive index of the first arm optical waveguide 31 based on the first electric signal S1 supplied from the outside. . The first control signal electrode 5 includes a first working electrode portion 51, a first input side signal electrode 53, and a first output side signal electrode 59.

  The first working electrode portion 51 extends along the first arm optical waveguide 31, that is, along the Y-axis direction so that an electric field can be applied to the first arm optical waveguide 31. One end of the first input side signal electrode 53 is located in the vicinity of the one end 1c in the X direction of the substrate 1, and the first electric signal S1 is input to the one end of the first input side signal electrode 53 from the outside. The

  The first input side signal electrode 53 is a first working electrode portion in which the first electric signal S1 input to one end of the first input side signal electrode 53 is connected to the other end of the first input side signal electrode 53. 51 extends along the main surface 1S of the substrate 1 so as to transmit to one end of the substrate 51. The other end of the first working electrode portion 51 is connected to one end of the first output side signal electrode 59. The first output signal electrode 59 transmits the first electric signal S1 transmitted through the first working electrode 51 to the other end of the first output signal electrode 59. The other end of the first output side signal electrode 59 is located in the vicinity of one end 1 c of the substrate 1. The other end of the first output-side signal electrode 59 may be electrically connected to a resistor included in a termination portion (not shown) that is an electrical termination.

  Similarly, the second control signal electrode 7 is provided on the main surface 1S of the substrate 1 in order to change the refractive index of the second arm optical waveguide 32 based on the second electric signal S2 supplied from the outside. Electrode. The second control signal electrode 7 includes a second working electrode portion 71, a second input side signal electrode 73, and a first output side signal electrode 79.

  The second working electrode portion 71 extends along the second arm optical waveguide 32, that is, along the Y-axis direction so that an electric field can be applied to the second arm optical waveguide 32. One end of the second input side signal electrode 73 is located in the vicinity of the one end 1c in the X direction of the substrate 1, and the second electric signal S2 is inputted to the one end of the second input side signal electrode 73 from the outside. The

  The second input side signal electrode 73 is a second working electrode portion in which the second electric signal S2 input to one end of the second input side signal electrode 73 is connected to the other end of the second input side signal electrode 73. It extends along the main surface 1 </ b> S of the substrate 1 so as to transmit to one end of 71. The other end of the second working electrode portion 71 is connected to one end of the first output side signal electrode 79. The first output side signal electrode 79 transmits the second electric signal S2 transmitted through the second working electrode portion 71 to the other end of the first output side signal electrode 79. The other end of the first output side signal electrode 79 is located in the vicinity of one end 1 c of the substrate 1. The other end of the first output-side signal electrode 79 may be electrically connected to a resistor included in a termination portion (not shown) that is an electrical termination.

  The input light CL is input from the optical input end of the input optical waveguide 3D1, branched into two by the input optical waveguide 3D1, and then propagates through the first arm optical waveguide 31 and the second arm optical waveguide 32. When the first electric signal S1 is supplied to the first input side signal electrode 53, the first working electrode unit 51 applies an electric field corresponding to the first electric signal S1 to the first arm optical waveguide 31, and first The refractive index of the arm optical waveguide 31 is changed according to the first electric signal S1. As a result, the phase of the branched light of the input light CL guided in the first arm optical waveguide 31 changes. Similarly, when the second electric signal S2 is supplied to the second input side signal electrode 73, the second working electrode portion 71 applies an electric field corresponding to the second electric signal S2 to the second arm optical waveguide 32, and The refractive index of the two-arm optical waveguide 32 is changed according to the second electric signal S2. As a result, the phase of the branched light of the input light CL guided in the second arm optical waveguide 32 changes. Thereafter, the two branched lights whose phases have been changed are combined in a predetermined manner by the output optical waveguide 3D2, and are output to the outside as control light ML from the output end of the output optical waveguide 3D2. For example, when the light control device 100 is an optical modulator, the first electric signal S1 and the second electric signal S2 are modulation signals, and the control light ML is modulated light.

  The first control signal electrode 5 and the second control signal electrode 7 are each made of a metal such as gold (Au), for example. For example, when the light control device 100 is an optical modulator, the first electric signal S1 and the second electric signal S2 are modulation signals each including a high-frequency electric signal of, for example, 10 GHz or more.

  The first ground electrode 11, the second ground electrode 12, and the inter-signal electrode ground electrode 13 are electrodes connected to a ground potential, and are each made of a metal such as gold (Au). The first ground electrode 11, the second ground electrode 12, and the signal electrode ground electrode 13 are each provided on the main surface 1 </ b> S of the substrate 1. The first ground electrode 11, the second ground electrode 12, and the inter-signal electrode ground electrode 13 are, for example, layered electrodes, and the thickness of each can be, for example, 10 μm or more and 80 μm or less.

  The inter-signal-electrode ground electrode 13 is at least between the first input-side signal electrode 53 of the first control signal electrode 5 and the second input-side signal electrode 73 of the second control signal electrode 7 in plan view. The first input side signal electrode 53 and the second input side signal electrode 73 are spaced apart from each other. In the present embodiment, the inter-signal electrode ground electrode 13 is arranged between the first control signal electrode 5 and the second control signal electrode 5 and the second control signal electrode 7 in plan view. It is located away from the control signal electrode 7.

  In plan view, the first ground electrode 11 has at least the first input signal electrode 53 on the side opposite to the signal electrode ground electrode 13 with the first input signal electrode 53 of the first control signal electrode 5 interposed therebetween. And are spaced apart. In the present embodiment, the first ground electrode 11 is positioned apart from the first control signal electrode 5 on a side opposite to the inter-signal electrode ground electrode 13 side of the entire first control signal electrode 5 in plan view. doing.

  The second ground electrode 12 has, in plan view, at least the second input signal electrode 73 on the side opposite to the signal electrode ground electrode 13 with the second input signal electrode 73 of the second control signal electrode 7 interposed therebetween. And are spaced apart. In the present embodiment, the second ground electrode 12 is positioned apart from the second control signal electrode 7 on the side opposite to the inter-signal electrode ground electrode 13 side of the entire second control signal electrode 7 in plan view. doing.

The first control signal electrode 5, the second control signal electrode 7, the first ground electrode 11, the second ground electrode 12, and the inter-signal electrode ground electrode 13 are in direct contact with the main surface 1S of the substrate 1. It may be provided on the main surface 1S of the substrate 1 via a buffer layer made of a dielectric material such as silicon oxide (SiO ₂ ).

  FIG. 2 is a plan view showing a configuration in the vicinity of one end of the first input signal electrode of the first control signal electrode and the first input signal electrode of the second control signal electrode of the light control device shown in FIG. 3 is an end view of the light control device taken along line III-III in FIG. 2, and FIG. 4 is a diagram of the first input side signal electrode and the first input side signal electrode of the light control device shown in FIG. It is a perspective view which shows the structure of one end vicinity.

  As shown in FIGS. 2 to 4, the first input signal electrode 53 of the first control signal electrode 5 includes an input pad 55 and a signal transmission unit 57. The input pad 55 is an element that defines one end 53E of the first input-side signal electrode 53, and functions as an electric signal input unit to which the first electric signal S1 (see FIG. 1) is input. The signal transmission unit 57 transmits the first electric signal S1 input to the input pad 55 to the first working electrode unit 51 (see FIG. 1). The first input side signal electrode 53 extends along the main surface 1S of the substrate 1 with a substantially constant width in plan view, and extends along the X-axis direction in the vicinity of the one end 1c of the substrate 1. The width of the first input-side signal electrode 53 in plan view can be appropriately designed in consideration of the continuity of characteristic impedance between the control signal 51 and the input pad 55, the signal delay time, and the like. 50 μm or less. The thickness of the first input side signal electrode 53 can be, for example, 10 μm or more and 80 μm or less. The width and thickness of the input pad 55 can be made larger than the width and thickness of the signal transmission unit 57.

  Similarly, the second input signal electrode 73 of the second control signal electrode 7 includes an input pad 75 and a signal transmission unit 77. The input pad 75 is an element that defines one end 73E of the second input-side signal electrode 73, and functions as an electric signal input unit to which the second electric signal S2 (see FIG. 1) is input. The signal transmission unit 77 transmits the second electric signal S2 input to the input pad 75 to the second working electrode unit 71 (see FIG. 1). The second input side signal electrode 73 extends along the main surface 1S of the substrate 1 with a substantially constant width in plan view, and extends along the X-axis direction in the vicinity of the one end 1c of the substrate 1. The width in plan view of the second input side signal electrode 73 can be appropriately designed in consideration of the continuity of characteristic impedance between the control signal 51 and the input pad 55, the signal delay time, etc., for example, 5 μm or more 50 μm or less. The thickness of the second input side signal electrode 73 can be, for example, 10 μm or more and 80 μm or less. The width and thickness of the input pad 75 can be made larger than the width and thickness of the signal transmission unit 77.

  In the present embodiment, one end 11E of the first ground electrode 11, one end 53E of the first input side signal electrode 53 of the first control signal electrode 5, one end 13E of the inter-signal electrode ground electrode 13, and the second control signal. One end 73E of the second input-side signal electrode 73 of the electrode 7 and one end 12E of the second ground electrode 12 are along a first direction (Y-axis direction in the present embodiment) along the main surface 1S of the substrate 1. They are arranged in this order. The one ends 11E, 53E, 13E, 73E, and 12E may overlap the one end 1c of the substrate 1 in plan view, or may be separated from the one end 1c of the substrate 1.

  The separation distance K1 along the first direction between the one end 11E of the first ground electrode 11 and the one end 13E of the signal electrode ground electrode 13 is suitable for a method of connecting the connection member to the input pad portion 55 and the connection member. Although it can be appropriately designed according to the width of the input pad portion 55, the width and depth of the first groove portion D1 and the second groove portion D2 to be formed, the characteristic impedance of the first control signal electrode 5, and the like, In the case where the light control device 100 is designed as a 50Ω circuit using the substrate 1 to be formed, for example, it can be set to 30 μm or more and 100 μm or less. Similarly, the separation distance K2 along the first direction between the one end 12E of the second ground electrode 12 and the one end 13E of the signal electrode ground electrode 13 can be set to, for example, 30 μm or more and 100 μm or less.

  The smaller the distance D along the first direction between the one end 53E of the first input side signal electrode 53 and the one end 73E of the second input side signal electrode 73 is, the smaller the first input side signal electrode 53 and the second input side signal are. Since the crosstalk characteristic between the electrodes 73 is deteriorated, it is desirable that the value of D is set to be five times or more larger than K1 and / or K2. However, according to the light control device 100 of the present embodiment, the crosstalk between the first input side signal electrode 53 and the second input side signal electrode 73 can be suppressed as will be described later. The value can be, for example, not more than 3 times K1 and / or K2.

  The substrate 1 has a first groove D1, a second groove D2, a third groove D3, and a fourth groove D4. The first groove portion D1 is provided between the first input signal electrode 53 of the first control signal electrode 5 and the inter-signal electrode ground electrode 13 in a plan view, and the second groove portion D2 is the first groove portion D2 in the plan view. The first control signal electrode 5 is provided between the first input-side signal electrode 53 and the first ground electrode 11, and the third groove D 3 is a second input of the second control signal electrode 7 in plan view. The fourth groove portion D4 is provided between the side signal electrode 73 and the inter-signal electrode ground electrode 13, and the fourth groove portion D4 has a second input signal electrode 73 and a second ground electrode of the second control signal electrode 7 in plan view. 12 is provided.

  Each of the first groove portion D1, the second groove portion D2, the third groove portion D3, and the fourth groove portion D4 is a groove provided in the main surface 1S of the substrate 1 and having a depth direction in the Z-axis direction. Each of the first groove portion D1 and the second groove portion D2 extends along at least a part of the first input-side signal electrode 53 in a plan view, and in the present embodiment, the first groove portion D1 and the second groove portion D2 are first from the one end 1c of the substrate 1 in the plan view. It extends along a part of the input signal electrode 53. More specifically, the first groove portion D1 and the second groove portion D2 respectively extend from the one end 1c of the substrate 1 with a substantially constant width along a part of the first input side signal electrode 53 in a plan view. The width further decreases along the part of the first input side signal electrode 53 and terminates while gradually decreasing.

  The width in plan view of the first groove portion D1 and the second groove portion D2 may be substantially constant over the whole, or there may be a portion that changes, for example, gradually or stepwise along the extending direction. By changing the width gradually or stepwise, it is possible to prevent reflection or loss of the control signal due to a sudden change in characteristic impedance in each part of the first groove part D1 and the second groove part D2. Further, the first groove portion D1 and the second groove portion D2 may extend along the whole of the first input side signal electrode 53 or in the whole of the first control signal electrode 5 in a plan view. May be. In this case, the first arm optical waveguide 31 of the optical waveguide structure 3 can be a ridge-type waveguide, which is advantageous for widening the bandwidth of the light control device 100 and reducing the driving voltage.

  Similarly, the third groove portion D3 and the fourth groove portion D4 each extend along at least a part of the second input side signal electrode 73 in a plan view. In the present embodiment, the one end 1c of the substrate 1 in the plan view. Extends along a part of the second input-side signal electrode 73. More specifically, each of the third groove portion D3 and the fourth groove portion D4 extends from the one end 1c of the substrate 1 with a substantially constant width along a part of the second input-side signal electrode 73 in plan view. The width gradually decreases, and further extends along a part of the second input side signal electrode 73 and terminates.

  The width of the third groove portion D3 and the fourth groove portion D4 in plan view may be substantially constant over the whole, or there may be a portion that changes, for example, gradually or stepwise along the extending direction. By changing the width gradually or stepwise, it is possible to prevent reflection and loss of the control signal due to a sudden change in characteristic impedance in each part of the third groove part D3 and the fourth groove part D4. Further, the third groove portion D3 and the fourth groove portion D4 may extend along the entire second input side signal electrode 73 or extend along the entire second control signal electrode 7 in plan view. May be. In this case, the second arm optical waveguide 32 of the optical waveguide structure 3 can be a ridge-type waveguide, which is advantageous for widening the bandwidth of the light control device 100 and reducing the driving voltage.

  In the present embodiment, the shape in the cross section orthogonal to the extending direction of the first groove portion D1, the second groove portion D2, the third groove portion D3, and the fourth groove portion D4 is rectangular (for example, the direction orthogonal to the extending direction). In the shape of an ellipse (for example, having a long side in a direction perpendicular to the extending direction), a circular shape, and a trapezoid (for example, a direction orthogonal to the extending direction) ), Inverted trapezoidal shape (eg, having a base along a direction perpendicular to their extending direction), rhombus shape (eg, having a side along a direction perpendicular to these extending directions) Other shapes may be used.

  The widths of the first groove D1, the second groove D2, the third groove D3, and the fourth groove D4 in plan view are the widths of the input pad portions 55 and 75, the first groove D1, the second groove D2, and the third. Although it can be appropriately designed according to the depth of the groove D3 and the fourth groove D4 and the characteristic impedance of the first control signal electrode 5 and the second control signal electrode 7, the width of the input pad portions 55 and 75 Ridge waveguide type device using a substrate in which the first groove portion D1, the second groove portion D2, the third groove portion D3, and the fourth groove portion D4 are made of lithium niobate and have a depth of about 50 to 100 μm suitable for wire bonding When the light control device 100 is designed as a 50Ω-based circuit with a depth of about 5 to 10 μm, which is a depth often used in the production of the first groove portion D1, the second groove portion D2, the third groove portion D3, and the fourth groove portion D4. The width in plan view of Example, if 100μm or more, it is possible to 200μm or less, in this case, the distance K1 described above, K2 and 150μm or more, can be reduced to 300μm or less. On the other hand, when the groove portions such as the first groove portion D1, the second groove portion D2, the third groove portion D3, and the fourth groove portion D4 are not formed on the substrate under the same conditions, the light control device is designed with a 50Ω system. Then, the above-mentioned separation distances K1 and K2 become 310 μm or more and 620 μm or less.

  Therefore, when the substrate 1 does not have grooves such as the first groove D1, the second groove D2, the third groove D3, and the fourth groove D4, like the light control device 100 of the present embodiment. Compared with the case where the substrate 1 has these groove portions, even if the separation distance D between the first input side signal electrode 53 and the second input side signal electrode 73 is the same, the value of D / K is approximately 2. Double the size. As described above, in the light control device 100 of the present embodiment, the first groove portion D1, the second groove portion D2, the third groove portion D3, and the fourth groove portion D4 are formed in the substrate 1, so that the conventional light control is performed. Compared to the case of the device, the separation distance K1 along the first direction between the one end 11E of the first ground electrode 11 and the one end 13E of the signal electrode ground electrode 13 and the second ground electrode 12 The distance K2 along the first direction between the one end 12E and the one end 13E of the signal electrode ground electrode 13 can be reduced.

  In the light control device 100 according to the present embodiment as described above, since the substrate 1 has the first groove portion D1 and the second groove portion D2, compared to the case where the substrate 1 does not have these groove portions, The separation distance K1 along the first direction between the one end 11E of the one ground electrode 11 and the one end 13E of the signal electrode ground electrode 13 can be reduced (see FIG. 4). When the separation distance K1 is small, for example, the separation distance between the first input-side signal electrode 53 of the coplanar type, the first ground electrode 11, and the inter-signal electrode ground electrode 13 can also be reduced. Thereby, the spread of the lines of electric force between the first input side signal electrode 53 and the first ground electrode 11 and between the first input side signal electrode 53 and the inter-signal electrode ground electrode 13 can be reduced. Therefore, the electric lines of force from the first input signal electrode 53 to the first ground electrode 11 and the second installation electrode 13 can be terminated more effectively. That is, even if the distance D between the first input side signal electrode 53 and the second input side signal electrode 73 is not large, the substrate 1 has the first groove portion D1 and the second groove portion D2, so that the first input side signal Since the electric lines of force generated from the electrode 53 are more effectively terminated, the crosstalk of the control signal to the second input side signal electrode 73 can be reduced (see FIGS. 2 to 4).

  Similarly, since the substrate 1 has the third groove portion D3 and the fourth groove portion D4, the one end 12E of the second ground electrode 12 and the signal electrode indirect are compared with the case where the substrate 1 does not have these groove portions. The separation distance K2 along the first direction with the one end 13E of the ground electrode 13 can be reduced (see FIG. 4). When the separation distance K2 is small, for example, the separation distance between the second input-side signal electrode 73 of the coplanar type, the second ground electrode 12, and the inter-signal electrode ground electrode 13 can also be reduced. Thereby, the spread of the lines of electric force between the second input side signal electrode 73 and the second ground electrode 12 and between the second input side signal electrode 73 and the inter-signal electrode ground electrode 13 can be reduced. Therefore, the electric lines of force from the second input signal electrode 73 to the second ground electrode 12 and the second installation electrode 13 can be more effectively terminated. That is, even if the separation distance D between the first input-side signal electrode 53 and the second input-side signal electrode 73 is the same, the substrate 1 has the third groove portion D3 and the fourth groove portion D4. Since the electric lines of force generated from the signal electrode 73 are more effectively terminated, the crosstalk of the control signal to the first input side signal electrode 53 can be reduced (see FIGS. 2 to 4). As a result, according to the light control device 100 according to the present embodiment, crosstalk between the first input-side signal electrode 53 and the second input-side signal electrode 73 can be suppressed.

  Furthermore, in the light control device 100 according to the present embodiment, the depth along the Z-axis direction of the first groove portion D1, the second groove portion D2, the third groove portion D3, and the fourth groove portion D4 is larger. The effect of reducing crosstalk between the first input side signal electrode 53 and the second input side signal electrode 73 is high, and is particularly preferably 2 μm or more, more preferably 4 μm or more, and further preferably 6 μm or more. . When the light control device 100 having a 50Ω signal input / output unit is manufactured using the substrate 1 made of a material having a high dielectric constant such as lithium niobate, the first groove D1, the second groove D2, The effect of reducing the separation distances K1 and K2 due to the formation of the third groove part D3 and the fourth groove part D4 is high. For example, when the depths of these groove parts are 2 μm, 4 μm, and 6 μm, the separation distance K1 , K2 can be reduced by a little over 10%, about 30%, or a little under 40%. Therefore, if the depth of these groove portions is 2 μm, the effect of reducing crosstalk between the first input side signal electrode 53 and the second input side signal electrode 73 is particularly high, and the depth is 4 μm or more and 6 μm. In the case of the above, the reduction effect becomes more remarkable.

  In the light control device 100 according to the present embodiment, the depth along the Z-axis direction of the first groove portion D1, the second groove portion D2, the third groove portion D3, and the fourth groove portion D4 is a depth of 10 μm or more. The deeper one is, the higher the effect of reducing crosstalk between the first input side signal electrode 53 and the second input side signal electrode 73 is. However, when the substrate 1 made of a brittle material that is difficult to process, such as lithium niobate, is used, the first groove D1, The processing depth of the second groove part D2, the third groove part D3, and the fourth groove part D4 may be limited.

  In the present embodiment, the first groove portion D1, the second groove portion D2, the third groove portion D3, and the fourth groove portion D4 have a rectangular cross-sectional shape (a cross-sectional shape in a plane orthogonal to the extending direction of these groove portions). However, other shapes, for example, a trapezoidal shape, an inverted trapezoidal shape, a U shape, or a V shape may be used. Further, the cross-sectional shape and width of the first groove D1, the second groove D2, the third groove D3, and the fourth groove D4 may be the same or different from each other.

  In the manufacture of the light control device 100 using the substrate 1 made of lithium niobate, a reactive ion etching method, a chemical etching method, a laser ablation process, a mechanical process using abrasive grains or a super hard material is used for groove processing on the substrate 1. Although processing etc. are used, it is common that the groove has an inverted trapezoidal shape, a U-shape, and a V-shape with a wide opening and a narrow bottom. Also in this embodiment, the cross-sectional shapes of the first groove portion D1, the second groove portion D2, the third groove portion D3, and the fourth groove portion D4 may be any of these shapes. However, a rectangular or trapezoidal cross-sectional shape and a symmetrical arrangement of grooves of the same shape are desirable so that the characteristic analysis calculation scale can be reduced. The symmetrical arrangement of the grooves having the same shape is desirable also in terms of dispersion of stress and strain of the substrate and maintenance of practical strength of the substrate.

  Further, in the light control device 100 according to the above-described embodiment, the one end 11E of the first ground electrode 11, the one end 53E of the first input side signal electrode 53, the one end 13E of the inter-signal electrode ground electrode 13, and the second input side. One end 73E of the signal electrode 73 and one end 12E of the second ground electrode 12 are arranged in this order along the first direction (Y-axis direction) along the main surface 1S of the substrate 1 (FIG. 2). To FIG. 4). In this case, the distance D along the first direction between the one end 53E of the first input side signal electrode 53 and the one end 73E of the second input side signal electrode 73, and the one end 11E of the first ground electrode 11 The first direction of the separation distance K1 along the first direction with the one end 13E of the signal electrode ground electrode 13 and the one end 12E of the second ground electrode 12 and the one end 13E of the signal electrode ground electrode 13 , The D / K1 value and the D / K2 value are desirably large in order to reduce the crosstalk, but according to the light control device 100 of the present embodiment. Since the crosstalk between the first input side signal electrode 53 and the second input side signal electrode 73 can be suppressed as described above, the value of D / K1 and the value of D / K2 are set to 3.0 or less, respectively. You can also

  In the conventional light control device in which the values of D / K1 and / or D / K2 satisfy this condition, the inventors of the present invention have the elements corresponding to the first input side signal electrode 53 and the second input side signal electrode. It was found that crosstalk between elements corresponding to 73 is particularly likely to occur. Therefore, by applying the invention of this embodiment to a light control device in which the values of D / K1 and / or D / K2 satisfy this condition, the effect of this embodiment is particularly effectively exhibited.

(Second Embodiment)
Next, a second embodiment of the present invention will be described. In each of the embodiments after the second embodiment, differences from the other embodiments will be mainly described, and the same elements as those in the other embodiments will be denoted by the same reference numerals and detailed description thereof will be given. May be omitted.

  FIG. 5 is a plan view showing a configuration in the vicinity of one end of the first input signal electrode of the first control signal electrode and the first input signal electrode of the second control signal electrode according to the second embodiment. FIG. 6 is an end view of the light control device taken along line VI-VI in FIG. 5.

  The light control device of the second embodiment is different from the light control device 100 of the first embodiment in the configuration of the first ground electrode, the second ground electrode, and the signal electrode ground electrode.

  Specifically, the first ground electrode 211 of the present embodiment includes the main portion 11M and the thin portion 11A provided on the second groove portion D2 side of the main portion 11M in the first embodiment. Different from the first ground electrode 11 (see FIGS. 2 to 4). The thickness of the thin portion 11A is thinner than the main portion 11M, and can be, for example, 1 μm or more and 3 μm or less. The thickness of the main part 11M is the same as that of the first ground electrode 11 of the first embodiment.

  In addition, the second ground electrode 212 of the present embodiment includes the main portion 12M and the thin portion 12A provided on the fourth groove D4 side of the main portion 12M, so that the second ground of the first embodiment is provided. Different from the electrode 12 (see FIGS. 2 to 4). The thickness of the thin portion 12A is thinner than the main portion 12M, and can be, for example, 1 μm or more and 3 μm or less. The thickness of the main portion 12M is the same as that of the second ground electrode 12 of the first embodiment.

  Further, the signal electrode ground electrode 213 of the present embodiment includes a main portion 13M, a first thin portion 13A provided on the first groove portion D1 side with respect to the main portion 13M, and a third groove portion D3 side with respect to the main portion 13M. And a second thin portion 13B provided in the. The thickness of the first thin portion 13A and the second thin portion 13B is thinner than the main portion 13M, and can be, for example, 1 μm or more and 3 μm or less, respectively. The thickness of the main portion 13M is the same as that of the signal electrode ground electrode 13 of the first embodiment.

  The thin portion 11A of the first ground electrode 211 and the first thin portion 13A of the inter-signal electrode ground electrode 213 are each one end 11E of the first ground electrode 211 along a part of the first input signal electrode 53 in plan view. The signal-interelectrode ground electrode 213 extends from one end 13E, but may extend from the one end 11E and one end 13E along the entire first input-side signal electrode 53 or the entire first control signal electrode 5 in plan view. . The thin portion 12A of the second ground electrode 212 and the second thin portion 13B of the inter-signal electrode ground electrode 213 are each one end 12E of the second ground electrode 212 along a part of the second input side signal electrode 73 in plan view. The signal-interelectrode ground electrode 213 extends from one end 13E, but may extend from the one end 12E and one end 13E along the entire second input-side signal electrode 73 or the entire second control signal electrode 7 in plan view. .

  According to the light control device of the present embodiment as described above, similarly to the light control device 100 of the first embodiment, the first input side signal electrode 53, the first ground electrode 211, and the inter-signal electrode ground electrode 213 are connected. Due to the effect of reducing the spread of the lines of electric force and the effect of reducing the spread of the lines of electric force between the second input-side signal electrode 73, the second ground electrode 212, and the signal-electrode ground electrode 213, the first input-side signal Crosstalk between the electrode 53 and the second input side signal electrode 73 can be suppressed.

  According to the light control device of the present embodiment as described above, the signal electrode ground electrode 213 has a step between the main portion 13M and the first thin portion 13A, and the first ground electrode 211 is Since there is a step between the main part 11M and the thin part 11A (see FIG. 6), the surface area of the signal electrode ground electrode 213 and the first ground electrode 211 facing the first input side signal electrode 53 increases. To do. As a result, the electric lines of force radiated from the first input side signal electrode 53 are easily terminated at the inter-signal electrode ground electrode 213 and the first ground electrode 211, so that the electric lines of force are generated by the second input side signal electrode 73. Reaching to is suppressed.

  Similarly, the signal electrode ground electrode 213 has a step between the main portion 13M and the second thin portion 13B, and the second ground electrode 212 has a step between the main portion 12M and the thin portion 12A. Therefore, the surface area of the signal electrode ground electrode 213 and the second ground electrode 212 facing the second input side signal electrode 73 increases (see FIG. 6). As a result, the electric lines of force radiated from the second input side signal electrode 73 are likely to terminate at the inter-signal electrode ground electrode 213 and the second ground electrode 212, so that the electric lines of force become the first input side signal electrode 53. Reaching to is suppressed. As a result, crosstalk between the first input side signal electrode 53 and the second input side signal electrode 73 can be further suppressed.

  Surface area facing the first input side signal electrode 53 and the second input side signal electrode 73 of the first ground electrode 211, the second ground electrode 212, and the inter-signal electrode ground electrode 213 used together with the formation of the groove in the second embodiment. Although the means for increasing the frequency is an effective measure for reducing the crosstalk even when used alone, it is essentially a means accompanied by a decrease in characteristic impedance. Further, in a coplanar electrode on a substrate made of a material having a high dielectric constant such as lithium niobate, formation of a groove is particularly effective as a means for increasing characteristic impedance. Therefore, according to the light control device of the second embodiment that uses these in combination, the improvement of crosstalk reduction with good compatibility and the improvement of the degree of design freedom are performed simultaneously, so that a remarkable synergistic effect is exhibited.

  In the present embodiment, the thin portion 11A of the first ground electrode 211 and the first thin portion 13A of the inter-signal electrode ground electrode 213 are substantially symmetrical with respect to the extending direction of the first input-side signal electrode 53 in plan view. Although arranged, they may be arranged asymmetrically with respect to the extending direction of the first input signal electrode 53 in plan view. Further, the thickness of the thin portion 11A and the first thin portion 13A may be the same or different. Similarly, the second thin portion 13B of the signal electrode ground electrode 213 and the thin portion 12A of the second ground electrode 212 are disposed substantially symmetrically with respect to the extending direction of the second input side signal electrode 73 in plan view. However, they may be arranged asymmetrically with respect to the extending direction of the second input side signal electrode 73 in plan view. Moreover, the thickness of the 2nd thin part 13B and the thin part 12A may be the same, and may differ.

  When there are two control signal electrodes, the first thin portion 13A and the second thin portion 13B formed on the signal electrode ground electrode 213 side of the two control signal electrodes, the first ground electrode 211, and the second ground The thin portion 11A and the thin portion 12A formed on the electrode 212 side have different contribution ratios to the crosstalk suppression effect, but the thin portion has been designed so that the size of the characteristic analysis calculation can be reduced for convenience of design. 11A and the first thin portion 13A are preferably arranged symmetrically with respect to the extending direction of the first input side signal electrode 53, and the second thin portion 13B and the thin portion 12A are It is preferable that they are arranged symmetrically with respect to the extending direction. A symmetrical arrangement is also desirable from the viewpoint of dispersion of stress and strain of the substrate. In the present embodiment, there are four thin portions in the ground electrode (that is, the thin portion 11A of the first ground electrode 211, the thin portion 12A of the second ground electrode 212, and the first thin portion of the signal electrode ground electrode 213). In this embodiment, at least one of these four thin portions may be present, and a plurality of portions 13A and the second thin portion 13B of the signal electrode ground electrode 213 are present. May be present.

(Third embodiment)
Next, a third embodiment of the present invention will be described. FIG. 7 is a plan view illustrating a configuration near one end of the first input signal electrode of the first control signal electrode and the first input signal electrode of the second control signal electrode according to the third embodiment. FIG. 8 is an end view of the light control device taken along line VIII-VIII in FIG. 7.

  The light control device of the third embodiment is the same as the light control of the first embodiment in the configuration of the first input signal electrode of the first control signal electrode and the first input signal electrode of the second control signal electrode. Different from the device 100.

  Specifically, the first input-side signal electrode 355 of the first control signal electrode 5 of the present embodiment includes a main portion 55M and a first thin portion 55A provided on the second groove portion D2 side with respect to the main portion 55M. And the second thin portion 55B provided closer to the first groove D1 than the main portion 55M is different from the input pad 55 of the second embodiment (see FIGS. 5 and 6). The thickness of the first thin portion 55A and the second thin portion 55B is thinner than the main portion 55M, and can be set to 2 μm or more and 5 μm or less, for example. The main portion 55M thickness is the same as that of the input pad 55 of the second embodiment.

  In addition, the second input signal electrode 375 of the first input signal electrode of the second control signal electrode 7 of the present embodiment is a main portion 75M and the third groove portion D3 provided on the third groove D3 side with respect to the main portion 75M. It differs from the input pad 75 (refer FIG.5 and FIG.6) of 2nd Embodiment by the point which has 1 thin part 75A and the 2nd thin part 75B provided in the 4th groove part D4 side rather than the main part 75M. . The thickness of the first thin portion 75A and the second thin portion 75B is thinner than the main portion 75M, and can be, for example, 2 μm or more and 5 μm or less. The main part 75M thickness is the same as that of the input pad 75 of the second embodiment.

  The first thin portion 55A and the second thin portion 55B are provided in the input pad portion of the first input side signal electrode 53 of the first control signal electrode 5, and such a thin layer portion is the input pad. In addition to or instead of this part, it may be provided in all or part of the extending direction of the signal transmitting portion 57 of the first control signal electrode 5 or all of the extending direction of the first control signal electrode 5. Or you may be provided in a part. The first thin portion 75A and the second thin portion 75B are provided in the input pad portion of the second input side signal electrode 73 of the second control signal electrode 7, but such a thin layer portion is In addition to or instead of the input pad portion, the second control signal electrode 7 may be provided in all or part of the extending direction of the signal transmitting portion 77, or the second control signal electrode 7 may be extended. It may be provided in all or a part.

  According to the light control device of the present embodiment as described above, similarly to the light control device 100 of the first and second embodiments, between the first input-side signal electrode 355 and the first ground electrode 211, and The effect of reducing the spread of the lines of electric force between the first input-side signal electrode 355 and the inter-signal electrode ground electrode 213, the second input-side signal electrode 375 and the second ground electrode 212, and The crosstalk between the first input side signal electrode 355 and the second input side signal electrode 375 is suppressed by the effect of reducing the spread of the lines of electric force between the two input side signal electrodes 375 and the inter-signal electrode ground electrode 213. be able to.

  In the light control device of the present embodiment as described above, when the first electric signal S1 is applied to the first input side signal electrode 355 from the outside, the first thin portion 55A and the second thin portion 55B that are thin. Since the electric field is concentrated on the first thin portion 55A and the second thin portion 55B, electric lines of force are mainly emitted. Since the first thin portion 55A and the second thin portion 55B of the first input side signal electrode 355 emit electric lines of force from a position closer to the substrate 1 than the main part 55M, electric lines of force radiated from them are emitted. Is prevented from reaching the second input side signal electrode 375 via the upper surface of the main surface 1S of the substrate 1.

  Similarly, when the second electric signal S2 is applied to the second input side signal electrode 375 from the outside, the electric field concentrates on the first thin portion 75A and the second thin portion 75B having a small thickness. Electric field lines are mainly radiated from the portion 75A and the second thin portion 75B. And since the 1st thin part 75A and the 2nd thin part 75B of the 2nd input side signal electrode 375 generate | occur | produce an electric flux line from the position close | similar to the board | substrate 1 rather than the main part 75M, the electric flux line radiated | emitted from these Is prevented from reaching the first input-side signal electrode 355 via the upper surface of the main surface 1S of the substrate 1. As a result, crosstalk between the first input signal electrode 355 and the second input signal electrode 375 can be further suppressed.

  The means for making the first input side signal electrode 355 and the second input side signal electrode 375 multistage in combination with the formation of the groove in the third embodiment is an effective measure for reducing crosstalk even when used alone. This is a technique for increasing the surface area of these electrodes facing the first ground electrode 211, the second ground electrode 212, and the signal electrode ground electrode 213, and is accompanied by a decrease in characteristic impedance. Therefore, it is particularly effective to form a groove that is highly effective as a means for increasing the characteristic impedance. For this reason, according to the light control device of the third embodiment using both of them, it is possible to improve crosstalk reduction with good compatibility and improve design flexibility at the same time, so that a high synergistic effect is exhibited.

  In the present embodiment, the first thin portion 55A and the second thin portion 55B are arranged substantially symmetrically with respect to the extending direction of the first input-side signal electrode in plan view, but these are the first in plan view. You may arrange | position asymmetrically with respect to the extending direction of the input side signal electrode. Further, the thickness of the first thin portion 55A and the second thin portion 55B may be the same or different. Similarly, the first thin portion 75A and the second thin portion 75B are arranged substantially symmetrically with respect to the extending direction of the second input side signal electrode in plan view, but these are the second input side signal in plan view. You may arrange | position asymmetrically with respect to the extending direction of an electrode. Moreover, the thickness of 75 A of 1st thin parts and the 2nd thin part 75B may be the same, and may differ.

  When there are two control signal electrodes, the second thin portion 55B and the first thin portion 75A provided closer to the inter-signal electrode ground electrode 213 than the two control signal electrodes, the first ground electrode 211, and the second ground The first thin portion 55A and the second thin portion 75B provided on the electrode 212 side have different contribution ratios to the effect of suppressing the crosstalk, but for the convenience of design, the size of the characteristic analysis calculation may be small. Furthermore, the first thin portion 55A and the second thin portion 55B are preferably arranged symmetrically with respect to the extending direction of the first input side signal electrode 355, and the first thin portion 75A and the second thin portion 75B are It is preferable that the second input side signal electrodes 375 are arranged symmetrically with respect to the extending direction. Such a symmetrical arrangement is also desirable in terms of dispersion of the stress and strain of the substrate. In the present embodiment, there are four thin portions in the signal electrode (that is, the first thin portion 55A of the first input side signal electrode 355, the second thin portion 55B of the first input side signal electrode 355, the second thin portion). In the present embodiment, at least one of these four thin portions is present. The first thin portion 75A of the input side signal electrode 375 and the second thin portion 75B of the second input side signal electrode 375 are present. Alternatively, a plurality may be selectively present.

(Fourth embodiment)
Next, a fourth embodiment of the present invention will be described. FIG. 9 is a plan view illustrating a configuration near one end of the first input signal electrode of the first control signal electrode and the first input signal electrode of the second control signal electrode according to the fourth embodiment. FIG. 10 is an end view of the light control device taken along line XX of FIG. 9.

  The light control device of the fourth embodiment differs from the light control device of the third embodiment in the configuration of the first ground electrode, the second ground electrode, and the signal electrode ground electrode.

  Specifically, the first ground electrode 411 of the present embodiment has a thin portion 11C instead of the thin portion 11A (see FIGS. 7 and 8) of the third embodiment. Different from the one ground electrode 211. The thin portion 11C is different from the thin portion 11A of the third embodiment in that it has a plurality of through holes 11CP. The through hole 11CP is a hole that penetrates the thin portion 11C in the thickness direction. The thin portion 11C may have only one through hole 11CP.

  Further, the second ground electrode 412 of the present embodiment has a thin portion 12C in place of the thin portion 12A (see FIGS. 7 and 8) of the third embodiment, and thus the second ground electrode of the third embodiment. 212. The thin portion 12C is different from the thin portion 12A of the third embodiment in that it has a plurality of through holes 12CP. The through hole 12CP is a hole that penetrates the thin portion 12C in the thickness direction. The thin portion 12C may have only one through hole 12CP.

  Further, the signal electrode ground electrode 413 of the present embodiment replaces the first thin portion 13A and the second thin portion 13B (see FIGS. 7 and 8) of the third embodiment with the first thin portion 13C and the second thin portion 13C. It differs from the signal electrode ground electrode 213 of the third embodiment in that it has a thin portion 13D. Unlike the first thin portion 13A of the third embodiment, the first thin portion 13C has a plurality of through holes 13CP, and the second thin portion 13D has a plurality of through holes 13DP. Different from the second thin portion 13B of the third embodiment. The through hole 13CP is a hole that penetrates the first thin part 13C in the thickness direction, and the through hole 13DP is a hole that penetrates the second thin part 13D in the thickness direction. The first thin portion 13C may have only one through hole 13CP, and the second thin portion 13D may have only one through hole 13DP.

  The thin portion 11C of the first ground electrode 411 and the first thin portion 13C of the inter-signal electrode ground electrode 413 have one end 11E along the entire first input side signal electrode 355 or the entire first control signal electrode 5 in plan view. When extending from the one end 13E, one or a plurality of through holes 11CP, 13CP may be provided over the entire thin portion 11C and the first thin portion 13C, or a part thereof. The thin portion 12C of the second ground electrode 412 and the second thin portion 13D of the inter-signal electrode ground electrode 413 have one end 12E along the entire second input side signal electrode 375 or the entire second control signal electrode 7 in plan view. Similarly, when extending from the one end 13E, one or a plurality of through holes 12CP and 13DP may be provided over the entire thin portion 12C and the second thin portion 13D or in a part thereof. Through holes 11CP, 12CP, 13CP, and 13DP can be appropriately disposed in a section where the crosstalk characteristics are desired to be improved.

  The shape of the through holes 11CP, 12CP, 13CP, and 13DP in plan view is, for example, a rectangular shape, but may be other shapes such as a circular shape and an elliptical shape. Further, the shapes of the through holes 11CP, 12CP, 13CP, and 13DP in plan view may be the same or different from each other. The through holes 11CP, 12CP, 13CP, 13DP may be distributed discretely, and are formed at a predetermined cycle along the extending direction of the first input side signal electrode 53 or the second input side signal electrode 73. Also good. Rather than disposing the through holes 11CP, 12CP, 13CP, 13DP discretely or providing the through holes 11CP, 12CP, 13CP, 13DP having different shapes in plan view, the through holes having the same shape in plan view are provided. When the holes 11CP, 12CP, 13CP, and 13DP are periodically arranged along the extending direction of the first input side signal electrode 355 or the second input side signal electrode 375, the first control signal electrode 5 and the second control signal electrode 5 are provided. Since the scale of the characteristic simulation of the signal electrode 7 is small, it is easy to design, and it is easy to prevent the loss of the propagation signal due to unintended impedance discontinuity.

  When the through holes 11CP, 12CP, 13CP, and 13DP are periodically arranged along the extending direction of the first input side signal electrode 355 or the second input side signal electrode 375, the structure has a specific frequency. It acts as a bandpass filter circuit corresponding to. Therefore, a specific frequency signal may be coupled to the band pass filter circuit, and the modulation signal propagating through the first control signal electrode 5 and the second control signal electrode 7 may be deteriorated. The deterioration of the modulation signal causes the period in which the through holes 11CP, 12CP, 13CP, and 13DP are provided to be ¼ or less of the wavelength of the main frequency component of the modulation signal (the wavelength of the frequency component in the bandpass filter circuit). This can be avoided.

  In the present embodiment, the through-hole 11CP and the through-hole 13CP are arranged substantially symmetrically with respect to the extending direction of the first input-side signal electrode 355 in plan view, but these are the first input-side signal in plan view. The electrodes 355 may be disposed asymmetrically with respect to the extending direction. Further, the through hole 12CP and the through hole 13DP are arranged substantially symmetrically with respect to the extending direction of the second input side signal electrode 375 in plan view, but these extend in the plan view. You may arrange | position asymmetrically with respect to a direction.

  When there are two control signal electrodes, the through holes 13CP and 13DP formed on the signal electrode ground electrode 413 side than the two control signal electrodes, and the first ground electrode 411 and the second ground electrode 412 side are formed. The through holes 11CP and 12CP have different contribution ratios to the effect of suppressing the crosstalk, but for the sake of design, the through holes 11CP and the through holes 13CP are planar so that the size of the characteristic analysis calculation is small. It is preferable that the first input side signal electrode 355 is disposed symmetrically with respect to the direction of extension, and the through hole 12CP and the through hole 13DP are viewed with respect to the direction of extension of the second input side signal electrode 375 in plan view. Are preferably arranged symmetrically. Such a symmetrical arrangement is also desirable in terms of dispersion of the stress and strain of the substrate.

  The main portion 11M may have one or a plurality of through holes similar to the through hole 11CP instead of the thin portion 11C, and the main portion 13M may be similar to the through hole 13CP instead of the first thin portion 13C. One or a plurality of through holes may be provided, and the main part 13M may have one or a plurality of through holes similar to the through hole 13DP instead of the second thin part 13D, and the thin part 12C Instead, the main portion 12M may have one or a plurality of through holes similar to the through hole 12CP.

  According to the light control device of the present embodiment as described above, similarly to the light control device 100 of the first to third embodiments, between the first input-side signal electrode 355 and the first ground electrode 411, and The effect of reducing the spread of the lines of electric force between the first input-side signal electrode 355 and the inter-signal electrode ground electrode 413, the second input-side signal electrode 375 and the second ground electrode 412; The crosstalk between the first input side signal electrode 355 and the second input side signal electrode 375 is suppressed by the effect of reducing the spread of the lines of electric force between the two input side signal electrodes 375 and the inter-signal electrode ground electrode 413. be able to.

  In the light control device according to the present embodiment as described above, the inter-signal electrode ground electrode 413, the first ground electrode 411, and the second ground electrode 412 each have a through hole. As a result, the surface area of the signal electrode ground electrode 413, the first ground electrode 411, and the second ground electrode 412 is increased, so that the electric lines of force radiated from the first input signal electrode are The electric field lines radiated from the second input side signal electrode are easily terminated at the inter-signal electrode ground electrode 413 and the second ground electrode 412. As a result, crosstalk between the first input side signal electrode and the second input side signal electrode can be further suppressed.

  The means for making the first input side signal electrode and the second input side signal electrode multistage in combination with the formation of the groove in the fourth embodiment is an effective measure for reducing crosstalk even when used alone. In the second embodiment and the third embodiment, the electric field lines between the first input signal electrode, the first ground electrode, and the inter-signal electrode ground electrode are mainly increased by increasing the surface area of each electrode facing the adjacent electrode. While the effect of suppressing the spread and the spread of the electric lines of force between the second input-side signal electrode, the second ground electrode, and the signal-electrode ground electrode is obtained, the fourth embodiment has a so-called edge effect. , Spreading of electric lines of force between the first input-side signal electrode and the first ground electrode, and the ground electrode between signal electrodes, and electric lines of force between the second input-side signal electrode, the second ground electrode, and the inter-signal electrode ground electrode The effect of suppressing the spread of is great.

  The influence on the characteristic impedance depends on the thickness of the thin portion 11C, the first thin portion 13C, the thin portion 12C, the second thin portion 13D, the size of the through holes 11CP, 12CP, 13CP, 13DP, the number of installations, etc. Depending on the design, it is possible to compensate for the reduction in characteristic impedance due to the introduction of the thin portion 11C, the first thin portion 13C, the thin portion 12C, and the second thin portion 13D. According to the light control device of the fourth embodiment that uses these in combination, improvement in crosstalk reduction and improvement in design freedom can be performed at the same time, and thus a very high synergistic effect is exhibited. In the present embodiment, there are four types of through holes in the thin portion (that is, there are the through hole 11CP, the through hole 13CP, the through hole 13DP, and the through hole 12CP). Among the four types of through-holes, at least one may be present, or a plurality may be selectively present.

(Fifth embodiment)
Next, a fifth embodiment of the present invention will be described. FIG. 11 is a plan view showing a configuration in the vicinity of one end of the first input signal electrode of the first control signal electrode and the first input signal electrode of the second control signal electrode according to the fifth embodiment. FIG. 12 is an end view of the light control device taken along line XII-XII in FIG. 11.

  The light control device according to the fifth embodiment includes a first in-groove ground electrode 21 provided in the first groove D1, a second in-groove ground electrode 22 provided in the second groove D2, and a third groove D3. The third embodiment is different from the light control device of the first embodiment in that a third in-groove ground electrode 23 provided inside and a fourth in-groove ground electrode 24 provided in the fourth groove D4 are further provided.

  The first in-groove ground electrode 21 is electrically connected to the signal electrode ground electrode 13 through the side surface of the first groove portion D1, and the second in-groove ground electrode 22 is electrically connected to the second groove portion D2 through the side surface. The first ground electrode 11 is electrically connected, the third in-groove ground electrode 23 is electrically connected to the signal electrode ground electrode 13 through the side surface of the third groove D3, and the fourth in-groove ground electrode 24 is The second ground electrode 12 is electrically connected through the side surface of the fourth groove portion D4.

  The first groove-in-ground electrode 21, the second groove-in-ground electrode 22, the third groove-in-ground electrode 23, and the fourth groove-in-ground electrode 24 are respectively the first groove D1, the second groove D2, and the third groove D3. And it can have thickness smaller than the depth of the 4th groove part D4.

  The first in-groove ground electrode 21 and the second in-groove ground electrode 22 are spaced apart from the first input side signal electrode 53, respectively, and along the part of the first input side signal electrode 53 in plan view, the first groove part. D1 and the second groove D2 may extend along the entire first input side signal electrode 53, and may extend within the first groove D1 and the second groove D2, or the first control signal. You may extend in the 1st groove part D1 and the 2nd groove part D2 along a part or all of the electrode 5.

  Similarly, the third in-groove ground electrode 23 and the fourth in-groove ground electrode 24 are each separated from the second input side signal electrode 73 and along a part of the second input side signal electrode 73 in plan view. It may extend within the third groove portion D3 and the fourth groove portion D4, or may extend within the third groove portion D3 and the fourth groove portion D4 along the entire second input side signal electrode 73, or the second groove portion D4. You may extend in the 3rd groove part D3 and the 4th groove part D4 along some or all of the signal electrode 7 for control.

  The first groove inner ground electrode 21 has a plurality of through holes 21P, the second groove inner ground electrode 22 has a plurality of through holes 22P, and the third groove inner ground electrode 23 has a plurality of through holes. The fourth groove ground electrode 24 has a plurality of through holes 24P. The through-hole 21P, the through-hole 22P, the through-hole 23P, and the through-hole 24P are respectively in the first groove inner ground electrode 21, the second groove inner ground electrode 22, the third groove inner ground electrode 23, and the fourth groove inner. The hole penetrates the ground electrode 24 in the thickness direction. The first in-groove ground electrode 21, the second in-groove ground electrode 22, the third in-groove ground electrode 23, and the fourth in-groove ground electrode 24 each have only one through hole 21P and through hole 22P. The through hole 23P and the through hole 24P may be provided, or the through holes may not be provided.

  The shape of the through hole 21P, the through hole 22P, the through hole 23P, and the through hole 24P in plan view is, for example, a rectangular shape, but may be another shape such as a circular shape or an elliptical shape. Design considerations regarding the shape, arrangement position, periodicity, symmetry, and the like of these through holes are the same as in the fourth embodiment.

  According to the light control device of the present embodiment as described above, similarly to the light control device 100 of the first to fourth embodiments, between the first input-side signal electrode 53 and the first ground electrode 11, and The effect of reducing the spread of the lines of electric force between the first input-side signal electrode 53 and the signal-electrode ground electrode 13, the second input-side signal electrode 73 and the second ground electrode 12, and Crosstalk between the first input side signal electrode 53 and the second input side signal electrode 73 is suppressed by the effect of reducing the spread of the lines of electric force between the two input side signal electrodes 73 and the inter-signal electrode ground electrode 13. be able to.

  Furthermore, according to the light control device of the present embodiment as described above, the first groove inner ground electrode 21, the second groove inner ground electrode 22, the third groove inner ground electrode 23, and the fourth groove inner ground electrode 24 are provided. Therefore, a part of the electric lines of force radiated from the first input side signal electrode 53 are terminated at the first in-groove ground electrode 21 and the second in-groove ground electrode 22, and the second input side signal A part of the lines of electric force radiated from the electrode 73 terminates in the third in-groove ground electrode 23 and the fourth in-groove ground electrode 24. As a result, the electric lines of force radiated from the first input side signal electrode 53 and the electric lines of force radiated from the second input side signal electrode 73 are likely to be terminated at a closer location. 53 and the second input signal electrode 73 can be further suppressed.

  Furthermore, according to the light control device of the present embodiment as described above, the first groove inner ground electrode 21, the second groove inner ground electrode 22, the third groove inner ground electrode 23, and the fourth groove inner ground electrode 24 are provided. Each have through holes (through holes 21P, 22P, 23P, 24P). As a result, the edge effect in the first groove inner ground electrode 21, the second groove inner ground electrode 22, the third groove inner ground electrode 23, and the fourth groove inner ground electrode 24 is increased, so that the first input side signal electrode The electric lines of force radiated from 53 are more easily terminated at the first groove-in-ground electrode 21 and the second groove-in-ground electrode 22, and the electric lines of force radiated from the second input-side signal electrode 73 are the third groove. It becomes easier to terminate at the inner ground electrode 23 and the fourth groove inner ground electrode 24. As a result, crosstalk between the first input side signal electrode 53 and the second input side signal electrode 73 can be further suppressed. Efficacy and design considerations are the same as in the fourth embodiment.

  Also, the first groove portion ground electrode 21, the second groove portion ground electrode 22, the third groove portion ground electrode 23, the fourth groove portion D4, the third groove portion D2, the third groove portion D3, the fourth groove portion D4. Although the arrangement of the in-groove ground electrode 24 is slightly more difficult to manufacture, the width of the first groove D1, the second groove D2, the third groove D3, and the fourth groove D4 is related to the separation distances K1 and K2. The degree of freedom in structural design and characteristic design is drastically improved as compared with the case of the fourth embodiment. In the present embodiment, there are four types of through-holes in the groove ground electrode (that is, the through-hole 22P, the through-hole 21P, the through-hole 23P, and the through-hole 24P are present). Of these four types of through-holes, at least one may be present, or these through-holes may not be present. Further, in the present embodiment, four groove ground electrodes, that is, the first groove ground electrode 21, the second groove ground electrode 22, the third groove ground electrode 23, and the fourth groove ground electrode 24 are provided. Although present, in the present embodiment, at least one of these four in-groove ground electrodes may be present, or a plurality may be selectively present.

(Sixth embodiment)
Next, a sixth embodiment of the present invention will be described. FIG. 13 is a plan view illustrating a configuration near one end of the first input signal electrode of the first control signal electrode and the first input signal electrode of the second control signal electrode according to the sixth embodiment. FIG. 14 is an end view of the light control device taken along line XIV-XIV in FIG. 13.

  The light control device of the sixth embodiment differs from the light control device of the first embodiment in the configuration of the first ground electrode, the second ground electrode, and the signal electrode ground electrode.

  Specifically, the first ground electrode 611 of the present embodiment is different from the first ground electrode 11 of the first embodiment (see FIGS. 2 to 4) in that it has a plurality of recesses 611D. The second ground electrode 612 of the embodiment is different from the second ground electrode 12 (see FIGS. 2 to 4) of the first embodiment in that it has a plurality of recesses 612D, and the signal electrode ground of the present embodiment is different. The electrode 613 differs from the signal electrode ground electrode 13 (see FIGS. 2 to 4) of the first embodiment in that it has a plurality of recesses 613D1 and a plurality of recesses 613D2.

  Each recess 611D does not penetrate the first ground electrode 611 in the thickness direction, and is provided in order along the side surface of the first ground electrode 611 on the first input side signal electrode 53 side in plan view. Each recess 612D does not penetrate the second ground electrode 612 in the thickness direction, and is provided in order along the side surface of the second ground electrode 612 on the second input side signal electrode 73 side in plan view. Each recess 613D1 does not penetrate the signal electrode ground electrode 613 in the thickness direction, and is provided in order along the side surface of the signal electrode ground electrode 613 on the first input side signal electrode 53 side in plan view. The recess 613D2 does not penetrate the signal electrode ground electrode 613 in the thickness direction, and is provided in order along the side surface of the signal electrode ground electrode 613 on the signal transmission unit 57 side in plan view.

  The first ground electrode 611 may have only one recess 611D, the second ground electrode 612 may have only one recess 612D, and the signal electrode ground electrode 613 Only one recess 613D1 may be provided, and the signal electrode ground electrode 613 may have only one recess 613D2.

  The shape of each recess 611D, recess 612D, recess 613D1, and recess 613D2 in plan view is, for example, a rectangular shape, but may be another shape such as a circular shape or an elliptical shape. Design considerations regarding the shape, arrangement, and periodicity of the recesses 611D, 612D, 613D1, and 613D2 are the same as those of the through holes 11CP, 12CP, 13CP, and 13DP (see FIGS. 9 and 10) in the fourth embodiment. It is.

  According to the light control device of the present embodiment as described above, similarly to the light control device 100 of the first to fifth embodiments, the first input-side signal electrode 53, the first ground electrode 611, and the inter-signal electrode ground electrode. The effect of reducing the spread of the lines of electric force between the first and second signal lines 613 and the effect of reducing the spread of the lines of electric force between the second input-side signal electrode 73 and the second ground electrode 612 and the signal-electrode ground electrode 613 are Crosstalk between the input side signal electrode 53 and the second input side signal electrode 73 can be suppressed.

  In the light control device of the present embodiment as described above, the inter-signal electrode ground electrode 13, the first ground electrode 11, and the second ground electrode 12 are provided with the recesses (the first groove ground electrode 21D and the second groove portion, respectively). An inner ground electrode 22D, a third groove inner ground electrode 23D, and a fourth groove inner ground electrode 24D). This increases the surface area of the signal electrode ground electrode 13, the first ground electrode 11, and the second ground electrode 12, so that the electric lines of force radiated from the first input side signal electrode 53 It becomes easy to terminate at the electrode 13 and the first ground electrode 11, and the electric lines of force radiated from the second input-side signal electrode 73 are easily terminated at the inter-signal electrode ground electrode 13 and the second ground electrode 12. As a result, crosstalk between the first input side signal electrode 53 and the second input side signal electrode 73 can be further suppressed.

  In the sixth embodiment, the inter-signal-electrode ground electrode 13, the first ground electrode 11, and the second ground electrode 12 used together with the formation of the groove on the substrate are recessed (the first in-groove ground electrode 21D, in the second groove). The method of forming the ground electrode 22D, the third in-groove ground electrode 23D, and the fourth in-groove ground electrode 24D) is an effective measure for reducing crosstalk even when used alone, but the second embodiment, the third embodiment As in the case of the embodiment, this is a method of increasing the surface area of the signal electrode ground electrode 13, the first ground electrode 11, and the second ground electrode 12, and is inherently accompanied by a decrease in characteristic impedance. Therefore, it is particularly effective to form a groove that is highly effective as a means for increasing the characteristic impedance. According to the light control device of the third embodiment that uses these in combination, it is possible to simultaneously improve the reduction of crosstalk and the degree of freedom of design, and thus exhibit a high synergistic effect.

  In the present embodiment, the concave portion 611D and the concave portion 613D1 are disposed substantially symmetrically with respect to the extending direction of the first input side signal electrode 53 in plan view, but these are extending directions of the first input side signal electrode 53. May be arranged asymmetrically. The recesses 613D2 and 612D are arranged substantially symmetrically with respect to the extending direction of the second input side signal electrode 73 in plan view, but they are asymmetric with respect to the extending direction of the second input side signal electrode 73. May be arranged.

  When there are two control signal electrodes, the recesses 613D1 and 613D2 formed on the signal electrode ground electrode 613 side and the recesses 611D and 612D formed on the first ground electrode 611 and second ground electrode 612 side cause crosstalk. Although the ratio of contribution to the suppression effect is different, the concave portion 611D and the concave portion 613D1 are arranged in the extending direction of the first input-side signal electrode 53 in plan view so that the scale of the characteristic analysis calculation is small for convenience of design. The recesses 613D2 and 612D are preferably arranged symmetrically with respect to the extending direction of the second input signal electrode 73 in plan view. Such a symmetrical arrangement is also desirable in terms of dispersion of the stress and strain of the substrate. In the present embodiment, there are four types of recesses in the ground electrode (that is, there are the recesses 611D, 612D, 613D1, and 613D2). In the present embodiment, these four types of recesses are present. Among these, at least one may exist, and a plurality may selectively exist.

  The present invention is not limited to the above-described embodiment, and various modifications can be made.

  For example, in the light control device 100 of the first embodiment, the first ground electrode 11 is one or a plurality of through holes corresponding to the through hole 11CP of the fourth embodiment, and is a first input side signal electrode in plan view. One or a plurality of through-holes facing the first input-side signal electrode 53 may be provided in a direction (Y-axis direction) orthogonal to the extending direction of 53. In the light control device 100 of the first embodiment, the second ground electrode 12 is a single or a plurality of through holes corresponding to the through hole 12CP of the fourth embodiment, and is a second input side signal electrode in plan view. You may have the 1 or several through-hole which opposes the said 2nd input side signal electrode 73 in the direction (Y-axis direction) orthogonal to the extending direction of 73. FIG.

  In the light control device 100 of the first embodiment, the signal electrode ground electrode 13 is a single or a plurality of through holes corresponding to the through hole 13CP of the fourth embodiment, and is a first input side signal in plan view. It may have one or a plurality of through holes facing the first input side signal electrode 53 in a direction (Y-axis direction) orthogonal to the extending direction of the electrode 53, and corresponds to the through hole 13DP of the fourth embodiment. One or a plurality of through-holes that are opposed to the second input-side signal electrode 73 in a direction (Y-axis direction) orthogonal to the extending direction of the second input-side signal electrode 73 in plan view. You may have a hole.

  In the light control device of each of the above-described embodiments, the substrate 1 is provided in a region between the first arm optical waveguide 31 and the second arm optical waveguide 32 in a plan view on the main surface 1S of the substrate 1. The first arm optical waveguide 31 and the second arm optical waveguide 32 may have a groove extending along the extending direction.

  In addition, the light control device 100 of each of the above embodiments includes a Mach-Zehnder type optical waveguide as the optical waveguide structure 3, but the present invention is a cross between the first input side signal electrode 53 and the second input side signal electrode 73. This is a technique for reducing talk, and can naturally be applied to an optical control device having another type of optical waveguide structure. For example, it goes without saying that the present invention can also be applied to an optical control device having an optical waveguide structure including a plurality of linear waveguides, crossed waveguides, multi-branch waveguides, ring waveguide resonators, and the like.

  The light control device in each of the above-described embodiments includes two control signal electrodes, but it goes without saying that the present invention can be applied to a light control device including three or more control signal electrodes. .

  In each of the above-described embodiments, the method for suppressing crosstalk between the input-side signal electrodes of each modulation electrode has been described. However, the method for suppressing crosstalk between each action electrode of each modulation electrode and each modulation is described. This is also effective for suppressing crosstalk between the output side signal electrodes from the working electrode of the electrode to the terminal resistor.

  Further, in each of the above-described embodiments, the description has been made mainly on the method for suppressing the crosstalk in the input pad portion. However, the method for suppressing the crosstalk is incorporated in the first control signal electrode 5 and the second control signal electrode 7 as a whole. Alternatively, it may be incorporated into the entire first input side signal electrode 53 and the second input side signal electrode 73, may be incorporated only into the input pad 55 and the input pad 75, or the input pad 55 and the input pad 75 may be incorporated. The first input side signal electrode 53 and the second input side signal electrode 73 may be incorporated. The introduction method does not need to have the same configuration, and a configuration that is easy to design and manufacture may be selected as appropriate.

  Although the length of the input pad 55 and the input pad 75 occupies the first control signal electrode 5 and the second control signal electrode 7 as a whole, the first ground in the vicinity of the input pad 55 and the input pad 75 is small. Since the distance between the electrode and the ground electrode between the signal electrodes and the distance between the second ground electrode and the ground electrode between the signal electrodes are large, crosstalk is particularly likely to occur between the input pad 55 and the input pad 75. Therefore, the application of the suppression method to the input pad 55 and the input pad 75 is effective. In the case of an integrated device having a plurality of control signal electrodes, each input-side signal electrode part is longer than each input pad, and a bent part, a meandering part, a signal electrode width changing part, a signal, and the like that are likely to generate crosstalk Since the structure change part such as the change part of the electrode-ground electrode interval is often included, the application of the suppression method to each input-side signal electrode part is effective. The application site and the application method of the suppression method may be appropriately selected according to the desired crosstalk characteristics.

  The effect of applying the suppression method to the output-side signal electrode part will be briefly described. In the case of a broadband traveling wave electrode type light control device, generally, after the control signal is transmitted to the output side signal electrode portion, it is terminated by a terminating resistor and does not act on the light. Therefore, even if the above-described suppression method is applied to the output-side signal electrode unit, it does not lead to improvement of the characteristics of the important modulated output light. However, in the manufacture of the optical control device, if the above-described suppression method is applied when evaluating the propagation characteristic (S21) of the control signal electrode with a network analyzer, the propagation characteristic due to crosstalk in the output-side signal electrode part. The unfair evaluation of can be suppressed. On the other hand, in the light control device configured to reflect the control signal without terminating completely and to act on the light again, the output side signal electrode portion also functions as the input side signal electrode portion. Needless to say, the application of the above-described suppression method to the above is effective for improving the characteristics of the optical output signal.

  Further, in each of the above-described embodiments, the thickness of the substrate 1 has been described without limitation. However, the crosstalk suppression effect between the input-side signal electrodes according to the present invention can be obtained using any thickness of the substrate 1. Is also effective. The above-described effects of the present invention are effectively exhibited when a substrate having a thickness of 0.4 mm to 1.00 mm, which is generally used for manufacturing a lithium niobate optical modulator, is used. Even when a substrate having a thickness of 30 μm to 100 μm is used as in the case of the present invention, it is effectively exhibited.

  DESCRIPTION OF SYMBOLS 1 ... Substrate, 1S ... Main surface of substrate, 3 ... Optical waveguide structure, 31 ... First arm optical waveguide (first optical waveguide), 32 ... Second arm optical waveguide (first (2 optical waveguides), 5 ... first control signal electrode, 7 ... second control signal electrode, 11 ... first ground electrode, 12 ... second ground electrode, 13 ... signal Interelectrode ground electrode, 53... First input side signal electrode, 73... Second input side signal electrode, D1... First groove, D2. , D4 ... fourth groove.

Claims (9)

A substrate,
First and second optical waveguides provided along the main surface of the substrate provided on the substrate;
A traveling wave type first control signal provided on the main surface of the substrate to change the refractive index of light propagating in the first optical waveguide based on a first electric signal supplied from the outside. An electrode,
A first working electrode portion extending along the first optical waveguide so that an electric field can be applied to the first optical waveguide; and the substrate so as to transmit the first electric signal to one end of the first working electrode portion. A first input-side signal electrode extending along the main surface, and a first output-side signal electrode having one end connected to the other end of the first working electrode portion, and transmitted through the first working electrode portion. A first control signal electrode having a first output signal electrode that transmits the first electrical signal to the other end of the first output signal electrode;
A traveling wave type second control signal provided on the main surface of the substrate in order to change a refractive index of light propagating in the second optical waveguide based on a second electric signal supplied from the outside. An electrode,
A second working electrode portion extending along the second optical waveguide so that an electric field can be applied to the second optical waveguide; and the substrate so as to transmit the second electric signal to one end of the second working electrode portion. A second input-side signal electrode extending along the main surface, and a second output-side signal electrode having one end connected to the other end of the second working electrode portion, and transmitted through the second working electrode portion. A second output signal electrode that transmits the second electrical signal to the other end of the second output signal electrode, and a second output signal electrode;
An inter-signal electrode ground electrode provided on the main surface of the substrate so as to be spaced apart between the first output signal electrode and the second output signal electrode in plan view;
Provided on the main surface of the substrate so as to be spaced apart from the first output-side signal electrode on a side opposite to the signal-electrode ground electrode side across the first output-side signal electrode in plan view. A first ground electrode;
Provided on the main surface of the substrate so as to be spaced apart from the second output side signal electrode on the opposite side to the inter-signal electrode ground electrode side across the second output side signal electrode in plan view. A second ground electrode;
A first termination resistor electrically connected to the other end of the first output-side signal electrode;
A second termination resistor electrically connected to the other end of the second output-side signal electrode;
With
The substrate has a first groove provided between the first output-side signal electrode and the inter-signal electrode ground electrode in a plan view, and between the first output-side signal electrode and the first ground electrode. A second groove provided, a third groove provided between the second output-side signal electrode and the ground electrode between the signal electrodes, and between the second output-side signal electrode and the second ground electrode. Having a fourth groove provided in
One end of the first ground electrode, one end of the second groove portion, the other end of the first output side signal electrode, one end of the first groove portion, one end of the inter-signal electrode ground electrode, one end of the third groove portion, The other end of the second output signal electrode, one end of the fourth groove, and one end of the second ground electrode are arranged in this order along a first direction along the main surface of the substrate. Has been
A distance along the first direction between the other end of the first output-side signal electrode and the other end of the second output-side signal electrode is defined as D, the one end of the first ground electrode, The separation distance along the first direction with the one end of the signal electrode ground electrode, or the first direction between the one end of the second ground electrode and the one end of the signal electrode ground electrode. When the separation distance is K, the value of D / K is 3.0 or less,
After the first electric signal is transmitted through the first output side signal electrode, it is reflected without being completely terminated by the first termination resistor, and is reflected from the first output side signal electrode to the first working electrode unit. After the second electric signal is transmitted through the second output side signal electrode so as to act again on the light that is input and propagated through the first optical waveguide, and is completely transmitted by the second termination resistor. A light control device configured to be reflected without being terminated and to act again on the light that is input from the second output-side signal electrode to the second working electrode portion and propagates through the second optical waveguide.   2. The light control device according to claim 1, wherein the first groove part, the second groove part, the third groove part, and the fourth groove part have a depth of 2 μm or more. The ground electrode between the signal electrodes includes a main portion, a first thin portion thinner than the main portion provided on the first groove portion side than the main portion, and / or the third groove portion than the main portion. And / or a second thin portion thinner than the main portion provided on the side, and / or
The first ground electrode has a main part and a thin part thinner than the main part provided on the second groove part side with respect to the main part, and / or
3. The light control device according to claim 1, wherein the second ground electrode has a main part and a thin part thinner than the main part provided on the fourth groove part side with respect to the main part. The first control signal electrode includes a main portion, a first thin portion thinner than the main portion provided on the first groove portion side than the main portion, and / or the second portion than the main portion. A second thin part thinner than the main part provided on the groove part side, and / or
The second control signal electrode includes a main part, a first thin part thinner than the main part provided on the third groove part side than the main part, and / or the fourth part than the main part. The light control device according to any one of claims 1 to 3, further comprising a second thin portion that is thinner than the main portion provided on the groove portion side.   5. The light control device according to claim 1, wherein at least one of the signal-electrode ground electrode, the first ground electrode, and the second ground electrode has a through hole.   A first in-groove ground electrode provided in the first groove and electrically connected to the inter-signal electrode ground electrode and / or provided in the second groove and electrically connected to the first ground electrode. The second groove ground electrode connected to the third groove and / or the third groove ground electrode provided in the third groove and electrically connected to the signal electrode ground electrode, and / or the second groove ground electrode. The light control device according to any one of claims 1 to 5, further comprising a fourth in-groove ground electrode provided in the fourth groove and electrically connected to the second ground electrode.   The at least one of the first groove ground electrode, the second groove ground electrode, the third groove ground electrode, and the fourth groove ground electrode has a through hole. The light control device described.   The light control device according to claim 1, wherein at least one of the signal electrode ground electrode, the first ground electrode, and the second ground electrode has a recess. The first output-side signal electrode includes at least one of a bent portion, a meandering portion, an electrode width changing portion, and a changing portion of a separation interval from the first output-side signal electrode or the inter-signal electrode ground electrode. Including the structure change part,
The second output-side signal electrode includes at least one of a bent portion, a meandering portion, an electrode width changing portion, and a changing portion of a separation interval from the second output-side signal electrode or the inter-signal electrode ground electrode. The light control device according to claim 1, comprising a structure changing unit.

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