JP5622293B2 - Nested modulator - Google Patents

Nested modulator Download PDF

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JP5622293B2
JP5622293B2 JP2012281359A JP2012281359A JP5622293B2 JP 5622293 B2 JP5622293 B2 JP 5622293B2 JP 2012281359 A JP2012281359 A JP 2012281359A JP 2012281359 A JP2012281359 A JP 2012281359A JP 5622293 B2 JP5622293 B2 JP 5622293B2
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sub
waveguide
mach
branch
electrode
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JP2013080251A (en
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市川　潤一郎
潤一郎 市川
日隈　薫
薫 日隈
太 山本
太 山本
及川哲
哲 及川
森　慎吾
慎吾 森
栗村　直
直 栗村
北村　健二
健二 北村
川西　哲也
哲也 川西
昌弘 土屋
昌弘 土屋
井筒　雅之
雅之 井筒
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Sumitomo Osaka Cement Co Ltd
National Institute for Materials Science
National Institute of Information and Communications Technology
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Sumitomo Osaka Cement Co Ltd
National Institute for Materials Science
National Institute of Information and Communications Technology
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect

Description

本発明は、主マッハツェンダ型導波路の２つの分岐導波路に副マッハツェンダ型導波路を組み込んだネスト型変調器に関する。   The present invention relates to a nested modulator in which a sub Mach-Zehnder type waveguide is incorporated in two branch waveguides of a main Mach-Zehnder type waveguide.

従来、光通信技術や光計測技術において、主マッハツェンダ型導波路（以下、「主ＭＺ型導波路」という）の２つの分岐導波路に副マッハツェンダ型導波路（以下、「副ＭＺ型導波路」という）を組み込んだネスト型変調器の一種であるＳＳＢ（Single Side Band、単側波帯）変調器が利用されている。これは、以下の特許文献１にも開示されているように、例えば、主ＭＺ型導波路１に周波数ωの光波を導入すると共に、２つの副ＭＺ型光導波路２，３に、単一周波数のＲＦ信号（周波数Ω）ＲＦＡと該信号をヒルベルト変換した信号ＲＦＢとを印加し、主ＭＺ型導波路及び各副ＭＺ型導波路に印加するＤＣバイアスＤＣＡ，ＤＣＢ，ＤＣＣを調整することにより、主ＭＺ型導波路から出射する変調光（周波数ω＋ｎΩの離散的スペクトル。ｎは整数）の特定スペクトルを抑圧することを可能とするものである（図１参照）。また、ネスト型変調器には、図１のＤＣバイアスＤＣＣの代わりにＲＦ信号ＲＦＣを印加するＦＳＫ変調器や、ＤＱＰＳＫ変調器などがある。 Conventionally, in optical communication technology and optical measurement technology, a sub Mach-Zehnder type waveguide (hereinafter referred to as “sub-MZ type waveguide”) is divided into two branch waveguides of a main Mach-Zehnder type waveguide (hereinafter referred to as “main MZ type waveguide”). SSB (Single Side Band) modulators, which are a type of nested modulators, are incorporated. As disclosed in the following Patent Document 1, for example, a light wave having a frequency ω is introduced into the main MZ type waveguide 1 and a single frequency is supplied to the two sub MZ type optical waveguides 2 and 3. DC bias DC A , DC B , and DC C applied to the main MZ type waveguide and each sub MZ type waveguide are applied to the RF signal (frequency Ω) RF A and the signal RF B obtained by Hilbert transform of the signal. By adjusting, it is possible to suppress a specific spectrum of modulated light (discrete spectrum of frequency ω + nΩ, where n is an integer) emitted from the main MZ waveguide (see FIG. 1). In addition, the nested modulator, and the like FSK modulator and, DQPSK modulator for applying a RF signal RF C instead of the DC bias DC C of FIG.

しかしながら、図２のように、ネスト型変調器の基板としてＸカット板を利用した場合には、基板１０上の各副ＭＺ型導波路２，３の副分岐導波路１１，１２及び１３，１４に対し、変調電極である信号電極を１５，１６の位置に形成し、さらに接地電極を１７，１８，１９の位置に形成することとなる。なお、図２は、図１のネスト型変調器の一点鎖線Ａにおける断面図を示す。
図２の場合には、副ＭＺ型導波路毎に単一の信号電極を形成するだけであるため、比較的構造がシンプルなものとなる利点があるものの、導波路と信号電極間が離間するため、駆動電圧が高くなるという欠点を有している。 However, as shown in FIG. 2, when an X-cut plate is used as the substrate of the nested modulator, the sub-branch waveguides 11, 12 and 13, 14 of the sub-MZ waveguides 2, 3 on the substrate 10 are used. On the other hand, the signal electrode, which is a modulation electrode, is formed at positions 15 and 16, and further, the ground electrode is formed at positions 17, 18, and 19. FIG. 2 is a cross-sectional view taken along one-dot chain line A of the nested modulator shown in FIG.
In the case of FIG. 2, since only a single signal electrode is formed for each sub-MZ waveguide, there is an advantage that the structure is relatively simple, but the waveguide and the signal electrode are separated from each other. Therefore, there is a drawback that the drive voltage becomes high.

これに対し、図３のように、ネスト型変調器の基板としてＺカット板を利用した場合には、基板２０上の各副ＭＺ型導波路２，３の副分岐導波路２１，２２及び２３，２４に対し、信号電極２６，２７，２８，２９を各副分岐導波路に近接位置することが可能となるため、駆動電圧の低減を実現することが可能となる。なお、２５は、バッファ層を示す。
しかしながら、各副ＭＺ型導波路２，３に対し、常に２つの信号電極を確保する必要があり、信号電極の取り回しなどが煩雑化する上、各副分岐導波路に対して逆位相の変調信号を印加することが必要であるため、信号電極の作用部までの長さを調整することが、大変難しい。 On the other hand, when a Z-cut plate is used as the substrate of the nested modulator as shown in FIG. 3, the sub-branch waveguides 21, 22, and 23 of the sub-MZ waveguides 2, 3 on the substrate 20 are used. , 24, the signal electrodes 26, 27, 28, 29 can be positioned close to the sub-branch waveguides, so that the drive voltage can be reduced. Reference numeral 25 denotes a buffer layer.
However, it is necessary to always ensure two signal electrodes for each sub-MZ type waveguide 2 and 3, and the handling of the signal electrodes becomes complicated, and the modulation signal having an antiphase with respect to each sub-branch waveguide Therefore, it is very difficult to adjust the length to the action part of the signal electrode.

特開２００４−２４５７５０号公報JP 2004-245750 A

本発明が解決しようとする課題は、上述した問題を解決し、信号電極を含む変調電極の回路配置を簡素化すると共に、駆動電圧の低減化を実現可能なネスト型変調器を提供することである。   The problem to be solved by the present invention is to solve the above-mentioned problems, simplify the circuit arrangement of the modulation electrode including the signal electrode, and provide a nested modulator capable of realizing a reduction in drive voltage. is there.

請求項１に係る発明では、電気光学効果を有する材料からなる基板と、該基板上に形成された光導波路と、該光導波路を導波する光波を変調する変調電極とを含み、該光導波路が主マッハツェンダ型導波路と該主マッハツェンダ型導波路の２つの分岐導波路に設けられた副マッハツェンダ型導波路とを有し、該変調電極は該副マッハツェンダ型導波路の副分岐導波路に対し設けられているネスト型変調器において、各副マッハツェンダ型導波路には、副マッハツェンダ型導波路における光伝播方向の右側又は左側のいずれか同じ側の副分岐導波路の一部に分極反転領域を形成し、該変調電極が、信号電極と接地電極とから形成され、各副マッハツェンダ型導波路に対し、単一の導入信号電極から分岐する信号電極を２つの副分岐導波路に作用するよう配置すると共に、分岐した信号電極を合流して導出することを特徴とする。 The invention according to claim 1 includes a substrate made of a material having an electro-optic effect, an optical waveguide formed on the substrate, and a modulation electrode that modulates a light wave guided through the optical waveguide. Has a main Mach-Zehnder type waveguide and a sub-Mach-Zehnder type waveguide provided in two branch waveguides of the main Mach-Zehnder type waveguide, and the modulation electrode is connected to the sub-branch waveguide of the sub-Mach-Zehnder type waveguide In the provided nest type modulator, each sub-Mach-Zehnder type waveguide has a polarization inversion region in a part of the sub-branch waveguide on either the right side or the left side of the light propagation direction in the sub-Mach-Zehnder type waveguide. The modulation electrode is formed of a signal electrode and a ground electrode, and for each sub-Mach-Zehnder type waveguide, a signal electrode branched from a single introduction signal electrode acts on the two sub-branch waveguides While so that arrangement, and wherein the deriving and merges the branched signal electrodes.

請求項２に係る発明では、請求項１に記載のネスト型変調器において、前記分岐した信号電極が形成する電界が該副分岐導波路に作用する作用長は、該副マッハツェンダ型導波路毎に等しく設定されていることを特徴とする。   According to a second aspect of the present invention, in the nested modulator according to the first aspect, the action length that the electric field formed by the branched signal electrode acts on the sub-branch waveguide is different for each sub-Mach-Zehnder type waveguide. It is characterized by being set equally.

請求項３に係る発明では、請求項１又は２に記載のネスト型変調器において、該基板はニオブ酸リチウム又はタンタル酸リチウムからなるＺカット板であり、該分岐した信号電極は該副分岐導波路上を通過するよう設定されていることを特徴とする。   In the invention according to claim 3, in the nested modulator according to claim 1 or 2, the substrate is a Z-cut plate made of lithium niobate or lithium tantalate, and the branched signal electrode is the sub-branch conductor. It is set so that it may pass on a waveguide.

請求項１に係る発明により、各副マッハツェンダ型導波路には、副マッハツェンダ型導波路における光伝播方向の右側又は左側のいずれか同じ側の副分岐導波路の一部に分極反転領域を形成し、変調電極が信号電極と接地電極とから形成され、各副マッハツェンダ型導波路に対し、単一の導入信号電極から分岐する信号電極を２つの副分岐導波路に作用するよう配置すると共に、分岐した信号電極を合流して導出するため、各副ＭＺ型導波路に導入する信号電極が単一となり、電極の取り回しが簡素化できる。しかも、各副ＭＺ型導波路においては基板の分極反転と分岐した信号電極により、各副分岐導波路毎に信号電極を設ける場合と同様に、効率的な変調動作が実現でき、駆動電圧の低下を達成することができる。 According to the first aspect of the present invention, each sub-Mach-Zehnder type waveguide is formed with a domain-inverted region in a part of the sub-branch waveguide on either the right side or the left side of the light propagation direction in the sub-Mach-Zehnder type waveguide. The modulation electrode is formed of a signal electrode and a ground electrode, and for each sub Mach-Zehnder type waveguide, a signal electrode branched from a single introduction signal electrode is arranged to act on the two sub branch waveguides and branched. Therefore, the signal electrodes introduced into the sub-MZ waveguides are single, and the handling of the electrodes can be simplified. In addition, in each sub-MZ waveguide, the signal inversion and branching of the substrate can be used to realize an efficient modulation operation as in the case of providing a signal electrode for each sub-branch waveguide, and the drive voltage is reduced. Can be achieved.

請求項２に係る発明により、分岐した信号電極が形成する電界が副分岐導波路に作用する作用長は、副マッハツェンダ型導波路毎に等しく設定されているため、副分岐導波路の一部に分極反転領域を形成すると共に、導入された信号電極を分岐して各副分岐導波路に作用する信号電極を形成するだけで、各副ＭＺ型導波路内の２つの副分岐導波路に、逆位相状態で変調強度の等しい光変調を容易に実現することが可能となる。   According to the second aspect of the present invention, the action length at which the electric field formed by the branched signal electrode acts on the sub-branch waveguide is set to be equal for each sub-Mach-Zehnder waveguide. In addition to forming a domain-inverted region and branching the introduced signal electrode to form a signal electrode that acts on each sub-branch waveguide, the two sub-branch waveguides in each sub-MZ waveguide are inverted. It is possible to easily realize optical modulation having the same modulation intensity in the phase state.

請求項３に係る発明により、基板はニオブ酸リチウム又はタンタル酸リチウムからなるＺカット板であり、分岐した信号電極は副分岐導波路上を通過するよう設定されているため、基板の分極反転が容易に実現できると共に、極めて変調効率の高いネスト型変調器を提供することが可能となる。   According to the invention of claim 3, the substrate is a Z-cut plate made of lithium niobate or lithium tantalate, and the branched signal electrode is set so as to pass over the sub-branch waveguide. It is possible to provide a nested modulator that can be easily realized and has extremely high modulation efficiency.

ネスト型変調器の原理を示す図である。It is a figure which shows the principle of a nest type modulator. 従来のＸカット板を用いたネスト型変調器の断面図である。It is sectional drawing of the nest type modulator using the conventional X cut board. 従来のＺカット板を用いたネスト型変調器の断面図である。It is sectional drawing of the nest type modulator using the conventional Z cut board. 本発明のネスト型変調器を示す平面図である。It is a top view which shows the nest type | mold modulator of this invention. 本発明のネスト型変調器を示す断面図である。It is sectional drawing which shows the nest type | mold modulator of this invention. 本発明のネスト型変調器に形成する分極反転領域の例を示す図である。It is a figure which shows the example of the polarization inversion area | region formed in the nest type | mold modulator of this invention.

本発明に係るネスト型変調器について、以下に詳細に説明する。
図４は、本発明に係るネスト型変調器の概略平面図であり、図５は、図４の一点鎖線Ｂにおける断面図を示す。
基板２０は、電気光学効果を有する基板であり、例えば、ニオブ酸リチウム、タンタル酸リチウム、ＰＬＺＴ（ジルコン酸チタン酸鉛ランタン）、及び石英系の材料から構成され、具体的には、これら単結晶材料の、Ｘカット板、Ｙカット板、及びＺカット板から構成され、特に、光導波路デバイスとして構成されやすく、かつ異方性が大きいという理由から、ニオブ酸リチウム（ＬＮ）やタンタル酸リチウムを用いることが好ましい。また、後述する分極反転の形成し易さを考慮して、図５ではＺカット板を利用する例を示す。 The nested modulator according to the present invention will be described in detail below.
FIG. 4 is a schematic plan view of a nested modulator according to the present invention, and FIG. 5 is a cross-sectional view taken along the alternate long and short dash line B of FIG.
The substrate 20 is a substrate having an electro-optic effect, and is composed of, for example, lithium niobate, lithium tantalate, PLZT (lead lanthanum zirconate titanate), and a quartz-based material. It is composed of X-cut plate, Y-cut plate, and Z-cut plate of materials, especially lithium niobate (LN) and lithium tantalate for the reason that it is easy to be configured as an optical waveguide device and has large anisotropy. It is preferable to use it. Further, considering the ease of forming polarization inversion described later, FIG. 5 shows an example using a Z-cut plate.

基板２０上には、主ＭＺ型導波路１の２つの分岐導波路に副ＭＺ型導波路２，３を組み込んだ形状の光導波路が形成されており、これらの光導波路は、Ｔｉなどを熱拡散法やプロトン交換法などで基板表面に拡散させることにより形成することができる。また、変調電極を構成する信号電極（４０〜４５）や該信号電極を取り巻く接地電極（５０〜５４）並びにＤＣバイアスを印加するＤＣバイアス電極（不図示）などは、Ｔｉ・Ａｕの電極パターンの形成及び金メッキ方法などにより形成することが可能である。さらに、必要に応じて光導波路形成後の基板表面に誘電体ＳｉＯ２等のバッファ層２５を設けることや、信号電極が形成する電界が効率的に導波路に印加されるようにリッジ構造を設けることも可能である。 On the substrate 20, optical waveguides having a shape in which the sub-MZ waveguides 2 and 3 are incorporated in the two branch waveguides of the main MZ waveguide 1 are formed. These optical waveguides heat Ti and the like. It can be formed by diffusing to the substrate surface by a diffusion method or a proton exchange method. Further, the signal electrode (40 to 45) constituting the modulation electrode, the ground electrode (50 to 54) surrounding the signal electrode, the DC bias electrode (not shown) for applying the DC bias, etc. are formed of a Ti / Au electrode pattern. It can be formed by a method such as formation and gold plating. Furthermore, if necessary, a buffer layer 25 such as dielectric SiO 2 is provided on the substrate surface after the optical waveguide is formed, or a ridge structure is provided so that the electric field formed by the signal electrode is efficiently applied to the waveguide. It is also possible.

図５に示すように、副分岐導波路２１〜２４の内、各副ＭＺ型導波路のいずれか一方の副分岐導波路２２，２３の一部には、基板の分極反転領域４６，４７が形成されている。基板結晶内の自発分極方向は、図５において基板２０内に示す矢印の方向で示している。
なお、分極反転を形成する領域については、図４の領域に限らず、例えば、図６（ａ）〜（ｄ）に示すように、ネスト型変調器を構成する主ＭＺ型導波路１及び副ＭＺ型導波路２，３に対し、各種の分極反転領域６０〜６５を選択することが可能である。図６（ｄ）においては、分極反転領域６５を形成し、主ＭＺ型導波路の一部６６に同一のＤＣバイアスやＲＦ信号を印加することにより、バイアス電圧や駆動電圧の低減を図ることが可能となる。 As shown in FIG. 5, among the sub-branch waveguides 21 to 24, the polarization inversion regions 46 and 47 of the substrate are formed in a part of one of the sub-branch waveguides 22 and 23 of each sub-MZ type waveguide. Is formed. The direction of spontaneous polarization in the substrate crystal is indicated by the direction of the arrow shown in the substrate 20 in FIG.
Note that the region where the polarization inversion is formed is not limited to the region shown in FIG. 4, and for example, as shown in FIGS. 6A to 6D, the main MZ waveguide 1 and the sub-waveguide 1 constituting the nested modulator. Various polarization inversion regions 60 to 65 can be selected for the MZ waveguides 2 and 3. In FIG. 6D, the polarization inversion region 65 is formed, and the same DC bias and RF signal are applied to a part 66 of the main MZ type waveguide, thereby reducing the bias voltage and the drive voltage. It becomes possible.

次に、本発明に係るネスト型変調器の信号電極の形状について説明する。
各副ＭＺ型導波路２，３の副分岐導波路２１〜２４に対し、単一の信号電極４０，４３を各々に導入すると共に、該導入信号電極４０，４３から分岐する信号電極４１，４４（図５では、４１−１と４１−２並びに４４−１と４４−２）を、各副ＭＺ型導波路２，３の２つの副分岐導波路（図５では、２１と２２並びに２３と２４）に作用するよう、各副分岐導波路上に配置する。さらに、各副ＭＺ型導波路に対し、分岐された信号電極（４１−１と４１−２並びに４４−１と４４−２）は合流され、導出電極４２，４５を介して、終端器に接続されている。なお、上記合流を行わず、分岐した信号電極の状態で、直接、終端器に接続するよう構成することも可能である。
このような信号電極の形状により、各副ＭＺ型導波路に導入する信号電極が単一であるため、電極の取り回しなどの回路配置が簡素化できる。 Next, the shape of the signal electrode of the nested modulator according to the present invention will be described.
A single signal electrode 40, 43 is introduced into each of the sub-branch waveguides 21-24 of the sub-MZ type waveguides 2, 3, and signal electrodes 41, 44 branched from the introduction signal electrodes 40, 43, respectively. (In FIG. 5, 41-1 and 41-2 and 44-1 and 44-2) are connected to two sub-branch waveguides (in FIG. 5, 21 and 22 and 23 and sub-MZ waveguides 2 and 3, respectively). It is arranged on each sub-branch waveguide so as to act on 24). Further, the branched signal electrodes (41-1 and 41-2 and 44-1 and 44-2) are joined to each sub-MZ type waveguide and connected to the terminator via the lead electrodes 42 and 45. Has been. In addition, it is also possible to connect directly to the terminator in the state of the branched signal electrode without performing the merging.
With such a shape of the signal electrode, a single signal electrode is introduced into each sub-MZ waveguide, so that circuit arrangement such as electrode handling can be simplified.

本発明に係るネスト型変調器においては、上述した分極反転の形成及び分岐した信号電極の形状により、各副ＭＺ型導波路における２つの副分岐導波路に逆位相で同一の変調強度を有する変調信号を印加することができ、副分岐導波路毎に信号電極を設ける場合と同様に、効率的な変調動作が実現でき、駆動電圧の低下を達成することができる。特に、分岐した信号電極が形成する電界が副分岐導波路に作用する作用長を、副ＭＺ型導波路毎に等しく設定することにより、各副ＭＺ型導波路内の２つの副分岐導波路を伝播する光波に対し、常に、逆位相状態で変調強度の等しい光変調を実現することが可能となる。   In the nested modulator according to the present invention, the two sub-branch waveguides in each sub-MZ waveguide have the same modulation intensity in the opposite phase due to the formation of polarization inversion and the shape of the branched signal electrode. A signal can be applied, and as in the case where a signal electrode is provided for each sub-branch waveguide, an efficient modulation operation can be realized, and a reduction in driving voltage can be achieved. In particular, by setting the length of action of the electric field formed by the branched signal electrode on the sub-branch waveguides to be equal for each sub-MZ waveguide, the two sub-branch waveguides in each sub-MZ waveguide are With respect to the propagating light wave, it is possible to always realize light modulation having the same modulation intensity in an antiphase state.

以上のように、本発明によれば、信号電極を含む変調電極の回路配置を簡素化すると共に、駆動電圧の低減化を実現可能なネスト型変調器を提供することができる。   As described above, according to the present invention, it is possible to provide a nested modulator capable of simplifying the circuit arrangement of the modulation electrode including the signal electrode and reducing the drive voltage.

１ 主ＭＺ型導波路
２，３ 副ＭＺ型導波路
２０ 基板
４０，４３ 導入信号電極
４１，４４ 分岐した信号電極
４２，４５ 導出信号電極
４６，４７ 分極反転領域 DESCRIPTION OF SYMBOLS 1 Main MZ type | mold waveguide 2,3 Sub MZ type | mold waveguide 20 Board | substrate 40,43 Introduction | transduction signal electrode 41,44 Branched signal electrode 42,45 Derived signal electrode 46,47 Polarization inversion area | region

Claims (3)

電気光学効果を有する材料からなる基板と、該基板上に形成された光導波路と、該光導波路を導波する光波を変調する変調電極とを含み、該光導波路が主マッハツェンダ型導波路と該主マッハツェンダ型導波路の２つの分岐導波路に設けられた副マッハツェンダ型導波路とを有し、該変調電極は該副マッハツェンダ型導波路の副分岐導波路に対し設けられているネスト型変調器において、
各副マッハツェンダ型導波路には、副マッハツェンダ型導波路における光伝播方向の右側又は左側のいずれか同じ側の副分岐導波路の一部に分極反転領域を形成し、
該変調電極が、信号電極と接地電極とから形成され、
各副マッハツェンダ型導波路に対し、単一の導入信号電極から分岐する信号電極を２つの副分岐導波路に作用するよう配置すると共に、分岐した信号電極を合流して導出することを特徴とするネスト型変調器。 A substrate made of a material having an electro-optic effect; an optical waveguide formed on the substrate; and a modulation electrode that modulates a light wave guided through the optical waveguide, the optical waveguide including the main Mach-Zehnder type waveguide and the And a sub-Mach-Zehnder type waveguide provided in two branch waveguides of the main Mach-Zehnder type waveguide, and the modulation electrode is provided for the sub-branch waveguide of the sub-Mach-Zehnder type waveguide In
In each sub-Mach-Zehnder type waveguide, a polarization inversion region is formed in a part of the sub-branch waveguide on either the right side or the left side of the light propagation direction in the sub-Mach-Zehnder type waveguide ,
The modulation electrode is formed of a signal electrode and a ground electrode;
For each sub-Mach-Zehnder type waveguide, a signal electrode branched from a single lead-in signal electrode is arranged to act on two sub-branch waveguides, and the branched signal electrodes are merged and derived. Nested modulator. 請求項１に記載のネスト型変調器において、前記分岐した信号電極が形成する電界が該副分岐導波路に作用する作用長は、該副マッハツェンダ型導波路毎に等しく設定されていることを特徴とするネスト型変調器。   2. The nested modulator according to claim 1, wherein an action length of the electric field formed by the branched signal electrode acting on the sub-branch waveguide is set equal for each sub-Mach-Zehnder waveguide. Nested modulator. 請求項１又は２に記載のネスト型変調器において、該基板はニオブ酸リチウム又はタンタル酸リチウムからなるＺカット板であり、該分岐した信号電極は該副分岐導波路上を通過するよう設定されていることを特徴とするネスト型変調器。   3. The nested modulator according to claim 1, wherein the substrate is a Z-cut plate made of lithium niobate or lithium tantalate, and the branched signal electrode is set to pass on the sub-branch waveguide. Nested modulator characterized by that.
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