CN104238150A - Electro-optical modulator - Google Patents
Electro-optical modulator Download PDFInfo
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- CN104238150A CN104238150A CN201310225079.3A CN201310225079A CN104238150A CN 104238150 A CN104238150 A CN 104238150A CN 201310225079 A CN201310225079 A CN 201310225079A CN 104238150 A CN104238150 A CN 104238150A
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Abstract
The invention relates to an electro-optical modulator which comprises a base, a ridge-shaped optical waveguide structure, a first ground electrode, a first modulation electrode, a second ground electrode and a second modulation electrode. The ridge-shaped optical waveguide structure is located at the top surface of the base and comprises a ridge-shaped structure and an optical waveguide formed in the ridge-shaped structure; the ridge-shaped structure comprises a Y-shaped fork part; the fork part comprises a first branch and a second branch; the first branch comprises a first sub-Y-shaped optical waveguide and comprises a first sub-branch and a second sub-branch; the second branch comprises a second sub-Y-shaped optical waveguide and comprises a third sub-branch and a fourth sub-branch; both the first ground electrode and the first modulation electrode are used for modulating the first sub-Y-shaped optical waveguide; both the second ground electrode and the second modulation electrode are used for modulating the second sub-Y-shaped optical waveguide. Therefore, the first sub-Y-shaped optical waveguide and the second sub-Y-shaped optical waveguide output the same power, and the extinction ratio is accordingly improved.
Description
Technical field
The present invention relates to integrated optics, particularly a kind of electrooptic modulator.
Background technology
Mach-Zehnder (Mach-Zehner) electrooptic modulator utilizes electrooptical effect to change the equivalent refractive index of one of Y type optical waveguide Liang Ge branch by modulated electric fields, thus change the phase place of light beam transmitted wherein, make it to there is phase differential with the light beam that transmits in the other branch of Y type optical waveguide.So, will interfere after the light beam transmitted in Y type optical waveguide Liang Ge branch converges again, output power depends on phase differential, that is to say and is determined by modulated electric fields, thus realizes modulation.But, often there is fine difference in the power of the light beam transmitted in Y type planar optical waveguide Liang Ge branch, cause when electrooptic modulator uses as switch, closed condition still have micropower to export and opening time the power that exports not maximum, extinction ratio (extinction ratio) declines.
Summary of the invention
In view of this, be necessary to provide a kind of electrooptic modulator improving extinction ratio.
A kind of electrooptic modulator, it comprises:
Substrate, ridge optical waveguide structure, the first ground electrode, the first modulator electrode, the second ground electrode and the second modulator electrode;
This substrate comprises an end face, this ridge optical waveguide structure is formed on this end face, this ridge optical waveguide structure comprises the ridge structure be formed on this end face and the optical waveguide be formed in ridge structure, this ridge optical waveguide structure has the branched portion in Y type, and this branched portion comprises the first branch and the second branch;
This first branch comprises the first sub-Y type optical waveguide, and this first sub-Y type optical waveguide comprises the first sub-branch and the second sub-branch; This second branch comprises the second sub-Y type optical waveguide, and this second sub-Y type optical waveguide comprises the 3rd sub-branch and the 4th sub-branch; This second sub-branch and the 4th sub-branch lay respectively at this first sub-branch and the 3rd sub-branch both sides;
This first ground electrode to be arranged on this end face and between this first sub-branch and this second sub-branch, and this first modulator electrode to be arranged on this end face and to be positioned at the side of this second sub-branch away from this first sub-branch; This second ground electrode to be arranged on this end face and between the 3rd sub-branch and the 4th sub-branch, and this second modulator electrode to be arranged on this end face and to be positioned at the side of the 4th sub-branch away from the 3rd sub-branch; This first ground electrode and this first modulator electrode coordinate and to coordinate with this second modulator electrode for modulating this second sub-Y type optical waveguide identical with the power making this first sub-Y type optical waveguide and this second sub-Y type optical waveguide and export for modulating this first sub-Y type optical waveguide and this second ground electrode.
Compared with prior art, when this electrooptic modulator that this case provides uses as switch, the power that this first sub-Y type optical waveguide and this second sub-Y type optical waveguide export determines that this first branch and this second branch participate in the power of interfering respectively, and the power of the light beam exported due to this first sub-Y type optical waveguide and this second sub-Y type optical waveguide is identical, thus make closed condition output power minimum and opening time output power maximum, extinction ratio improve; And optical waveguide metal level is formed in ridge structure by this case, ridge structure all produces larger refractive index variable quantity at the side of optical waveguide, so not easily have Transmission Problem, and has divided light wave not easily to produce coupling (crosstalk) effect.
Accompanying drawing explanation
Fig. 1 is the schematic perspective view of the electrooptic modulator of better embodiment of the present invention.
Fig. 2 is the diagrammatic cross-section of the electrooptic modulator II-II along the line of Fig. 1.
Main element symbol description
| Electrooptic modulator | 100 |
| Substrate | 10 |
| End face | 101 |
| Ridge optical waveguide structure | 20 |
| First ground electrode | 30 |
| First modulator electrode | 40 |
| Second ground electrode | 50 |
| Second modulator electrode | 60 |
| Ridge structure | 12 |
| Optical waveguide | 13 |
| Input section | 120 |
| Branched portion | 122 |
| First branch | 121 |
| Second branch | 221 |
| First son input section | 127 |
| Deferent segment | 126 |
| First sub-Y type optical waveguide | 123 |
| First sub-deferent segment | 128 |
| First sub-branch | 124 |
| Second sub-branch | 125 |
| First section | 301 |
| Second section | 302 |
| 3rd section | 303 |
| Second son input section | 227 |
| Second sub-Y type optical waveguide | 223 |
| Second sub-deferent segment | 228 |
| 3rd sub-branch | 224 |
| 4th sub-branch | 225 |
| 4th section | 501 |
| 5th section | 502 |
| 6th section | 503 |
Following embodiment will further illustrate the present invention in conjunction with above-mentioned accompanying drawing.
Embodiment
Refer to Fig. 1-2, a kind of electrooptic modulator 100 that better embodiment of the present invention provides, it comprises: substrate 10, ridge optical waveguide structure 20, first ground electrode 30, first modulator electrode 40, second ground electrode 50 and the second modulator electrode 60.
This substrate 10 comprises end face 101, and this ridge optical waveguide structure 20 is positioned on this end face 101, and this ridge optical waveguide structure 20 comprises the ridge structure 12 be formed on this end face 101 and the optical waveguide 13 be formed in ridge structure 12.The material of this substrate 10 is lithium columbate crystal or niobic acid crystal of barium.The material of this optical waveguide 13 is titanium, nickel, zinc, gallium or admiro.The width of this optical waveguide 13 is less than the width of this ridge structure 12.In the present embodiment, the height of this substrate 10 is 3mm, and the height of this ridge structure is between 2-4um.
This ridge optical waveguide structure 20 has input section 120, branched portion 122 in Y type and deferent segment 126.This branched portion 122 comprises the first branch 121 and the second branch 221.This first branch 121 and this second branch 221 go out from this input section 120 bifurcated and converge into this deferent segment 126, and in the present embodiment, the angle between this first branch 121 and this second branch 221 is less than 1 degree.
This first branch 121 comprises the first son be connected with this input section 120 and inputs section 127, first sub-Y type optical waveguide 123 and the first sub-deferent segment 128.This first sub-Y type optical waveguide 123 comprises the first sub-branch 124 and the second sub-branch 125.This second sub-branch 125 comprises first section 301, the 3rd section 303 and connects second section 302 of this first section 301 and the 3rd section 303.This second section 302 is parallel with this first sub-branch 124, and this second section 302 is shorter than this first sub-branch 124.This first section 301 inputs section 127 with this first sub-branch 124 from this first son and separates, and converges into this first sub-deferent segment 128 with this first sub-branch 124 finally by the 3rd section 303.
This second branch 221 comprises the second son be connected with this input section 120 and inputs section 227, second sub-Y type optical waveguide 223 and the second sub-deferent segment 228.This second sub-Y type optical waveguide 223 comprises the 3rd sub-branch 224 and the 4th sub-branch 225.In the present embodiment, this first sub-branch 124 is parallel with the 3rd sub-branch 224.This second sub-branch 125 and the 4th sub-branch 225 lay respectively at this first sub-branch 124 and the 3rd sub-branch 224 both sides.
4th sub-branch 225 comprises the 4th section 501, the 6th section 503 and connects the 5th section 502 of the 4th section 501 and the 6th section 503.5th section 502 is shorter than the 3rd sub-branch 224, and the 5th section 502 is parallel with the 3rd sub-branch 224; 4th section 501 inputs section 227 with the 3rd sub-branch 224 from this second son and separates, and the 6th section 503 converges into this second sub-deferent segment 228 with the 3rd sub-branch 224.
This first ground electrode 30 to be arranged on this end face 101 and between this first sub-branch 124 and this second sub-branch 125, and this first modulator electrode 40 to be arranged on this end face 101 and to be positioned at the side of this second sub-branch 125 away from this first sub-branch 124; This second ground electrode 50 to be arranged on this end face 101 and between the 3rd sub-branch 224 and the 4th sub-branch 225, and this second modulator electrode 60 to be arranged on this end face 101 and to be positioned at the side of the 4th sub-branch 225 away from the 3rd sub-branch 224.This first ground electrode 30 and this second section 302 be parallel, align and isometric; This second ground electrode 50 is parallel with the 5th section 502, align and isometric.This first ground electrode 30, this first modulator electrode 40, this second ground electrode 50 are all formed by the mode of sputter with this second modulator electrode 60.
This first ground electrode 30 coordinates for modulating this first sub-Y type optical waveguide 123 with this first modulator electrode 40; This second ground electrode 50 and the second modulator electrode 60 coordinate one to be used to modulate this second sub-Y type optical waveguide 223 identical with the power making this first sub-Y type optical waveguide 123 and this second sub-Y type optical waveguide 223 and export.
Particularly, according to interference theory, the light beam of this deferent segment 126 transmission can be expressed as:
，
Wherein,
,
and
be respectively the amplitude of the light beam that this deferent segment 126, this first sub-deferent segment 128 and this second sub-deferent segment 228 transmit;
,
and
be respectively the phase place of the light beam that this deferent segment 126, this first sub-deferent segment 128 and this second sub-deferent segment 228 transmit;
for natural Exponents,
for imaginary unit,
for angular velocity and
for time variable.
The power of the light beam of this deferent segment 126 transmission is expressed as:
，
Wherein,
be the light beam power of this deferent segment 126 transmission.
In like manner can obtain, the light beam that this first sub-deferent segment 128 transmits and power thereof:
, and
The light beam that this second sub-deferent segment 228 transmits and power thereof are:
, and
，
Wherein,
,
,
and
be respectively the amplitude of the light beam that this first sub-branch 124, this second sub-branch 125, the 3rd sub-branch 224 and the 4th sub-branch 225 transmit;
,
,
and
be respectively the phase place of the light beam that this first sub-branch 124, this second sub-branch 125, the 3rd sub-branch 224 and the 4th sub-branch 225 transmit;
and
be respectively the power of the light beam that this first sub-output terminal 128 transmits with this second sub-output terminal 228.
With the short transverse of this substrate 10 be
axle (namely perpendicular to the direction of the end face 101 of this substrate), Width is
axle (be namely parallel to the end face 101 of substrate direction and perpendicular to the direction of this second sub-branch 125 and the 4th sub-branch 225), the length direction of this second sub-branch 125 and the 4th sub-branch 225 is
axle, according to the Wave equation analysis of planar light waveguide, transverse electric wave only has edge
axial electric field component
, and transverse magnetic wave only has edge
axial electric field component
and edge
axial electric field component
.
The interpolar electric field produced after loading a modulation voltage between this first modulator electrode 40 and this first ground electrode 30
part through this first sub-branch 125 is parallel to completely
axle, therefore effectively can change the equivalent refractive index of this first sub-branch 125 thus modulate transverse magnetic wave
, and then change
.In like manner, the interpolar electric field produced after loading a modulation voltage between this second modulator electrode 60 and this second ground electrode 50
part through the 4th sub-branch 225 is parallel to completely
axle, therefore effectively can change the equivalent refractive index of the 4th sub-branch 225 thus modulate transverse magnetic wave
, and then change
Change according to formula above
,
,
and
, just can make
, but also can make
(
reach maximum, this electrooptic modulator 100 is in opening) or
(
reach minimum, this electrooptic modulator 100 is in closed condition).
When electrooptic modulator of the present invention uses as switch, the power that this first sub-Y type optical waveguide and this second sub-Y type optical waveguide export determines that this first branch and this second branch participate in the power of interfering respectively, and the power of the light beam exported due to this first sub-Y type optical waveguide and this second sub-Y type optical waveguide is identical, thus make closed condition output power minimum and opening time output power maximum, extinction ratio improve; And be formed at by optical waveguide metal level in ridge structure, ridge structure all produces larger refractive index variable quantity at the side of optical waveguide, so not easily have Transmission Problem, therefore in the process of light splitting, light wave has been divided not easily to produce coupling.
In a word; those skilled in the art will be appreciated that; above embodiment is only used to the present invention is described; and be not used as limitation of the invention; as long as within spirit of the present invention, the suitable change do above embodiment and change all drop within the scope of protection of present invention.
Claims (10)
1. an electrooptic modulator, it comprises:
Substrate, ridge optical waveguide structure, the first ground electrode, the first modulator electrode, the second ground electrode and the second modulator electrode;
This substrate comprises an end face, this ridge optical waveguide structure is formed on this end face, this ridge optical waveguide structure comprises the ridge structure be formed on this end face and the optical waveguide be formed in ridge structure, this ridge optical waveguide structure has the branched portion in Y type, and this branched portion comprises the first branch and the second branch;
This first branch comprises the first sub-Y type optical waveguide, and this first sub-Y type optical waveguide comprises the first sub-branch and the second sub-branch; This second branch comprises the second sub-Y type optical waveguide, and this second sub-Y type optical waveguide comprises the 3rd sub-branch and the 4th sub-branch; This second sub-branch and the 4th sub-branch lay respectively at this first sub-branch and the 3rd sub-branch both sides;
This first ground electrode to be arranged on this end face and between this first sub-branch and this second sub-branch, and this first modulator electrode to be arranged on this end face and to be positioned at the side of this second sub-branch away from this first sub-branch; This second ground electrode to be arranged on this end face and between the 3rd sub-branch and the 4th sub-branch, and this second modulator electrode to be arranged on this end face and to be positioned at the side of the 4th sub-branch away from the 3rd sub-branch; This first ground electrode and this first modulator electrode coordinate and to coordinate with this second modulator electrode for modulating this second sub-Y type optical waveguide identical with the power making this first sub-Y type optical waveguide and this second sub-Y type optical waveguide and export for modulating this first sub-Y type optical waveguide and this second ground electrode.
2. electrooptic modulator as claimed in claim 1, is characterized in that: this first sub-branch is parallel with the 3rd sub-branch.
3. electrooptic modulator as claimed in claim 1, is characterized in that: this ridge optical waveguide structure also comprises input section and deferent segment, and this first branch and this second branch go out from this input section bifurcated and converge into this deferent segment.
4. electrooptic modulator as claimed in claim 3, is characterized in that: this first branch comprises the first son be connected with this input section and inputs section and the first sub-deferent segment; This second sub-branch comprises first section, the 3rd section and connects second section of this first section and the 3rd section, and this second section is parallel with this first sub-branch, and this second section is shorter than this first sub-branch; This first section and this first sub-branch separate from this first sub-input end, and the 3rd section and this first sub-branch converge into this first sub-deferent segment.
5. electrooptic modulator as claimed in claim 3, it is characterized in that: this second branch comprises the second son be connected with this input section and inputs section and the second sub-deferent segment, 4th sub-branch comprises the 4th section, the 6th section and connects the 5th section of the 4th section and the 6th section, 5th section is shorter than the 3rd sub-branch, and the 5th section is parallel with the 3rd sub-branch; 4th section and the 3rd sub-branch separate from this second sub-input end, and the 6th section and the 3rd sub-branch converge into this second sub-deferent segment.
6. electrooptic modulator as claimed in claim 1, is characterized in that: the material of this substrate is lithium columbate crystal or niobic acid crystal of barium.
7. electrooptic modulator as claimed in claim 4, is characterized in that: this first ground electrode and this second section be parallel, align and isometric.
8. electrooptic modulator as claimed in claim 5, is characterized in that: this second ground electrode is parallel with the 5th section, align and isometric.
9. electrooptic modulator as claimed in claim 1, is characterized in that: the material of this optical waveguide is titanium, nickel, zinc, gallium or admiro.
10. electrooptic modulator as claimed in claim 1, is characterized in that: the width of this optical waveguide is less than the width of this ridge structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310225079.3A CN104238150A (en) | 2013-06-07 | 2013-06-07 | Electro-optical modulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310225079.3A CN104238150A (en) | 2013-06-07 | 2013-06-07 | Electro-optical modulator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104238150A true CN104238150A (en) | 2014-12-24 |
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ID=52226561
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310225079.3A Pending CN104238150A (en) | 2013-06-07 | 2013-06-07 | Electro-optical modulator |
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|---|---|
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020166100A (en) * | 2019-03-29 | 2020-10-08 | Tdk株式会社 | Electro-optical device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH116932A (en) * | 1997-06-16 | 1999-01-12 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of ridge structural optical waveguide |
| JP2000162658A (en) * | 1998-11-25 | 2000-06-16 | Toyo Commun Equip Co Ltd | Optical logic circuit |
| EP0817988B1 (en) * | 1996-01-26 | 2001-12-19 | Hughes Electronics Corporation | Polarization-insensitive, electro-optic modulator |
| JP2010096958A (en) * | 2008-10-16 | 2010-04-30 | Anritsu Corp | Optical modulator |
| JP2013080251A (en) * | 2012-12-25 | 2013-05-02 | Sumitomo Osaka Cement Co Ltd | Nested modulator |
-
2013
- 2013-06-07 CN CN201310225079.3A patent/CN104238150A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0817988B1 (en) * | 1996-01-26 | 2001-12-19 | Hughes Electronics Corporation | Polarization-insensitive, electro-optic modulator |
| JPH116932A (en) * | 1997-06-16 | 1999-01-12 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of ridge structural optical waveguide |
| JP2000162658A (en) * | 1998-11-25 | 2000-06-16 | Toyo Commun Equip Co Ltd | Optical logic circuit |
| JP2010096958A (en) * | 2008-10-16 | 2010-04-30 | Anritsu Corp | Optical modulator |
| JP2013080251A (en) * | 2012-12-25 | 2013-05-02 | Sumitomo Osaka Cement Co Ltd | Nested modulator |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020166100A (en) * | 2019-03-29 | 2020-10-08 | Tdk株式会社 | Electro-optical device |
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Application publication date: 20141224 |