JP5737583B2 - Manufacturing method of plate member supporting device - Google Patents

Description

The present invention, as the optical element such as a piezoelectric device or a lens, such as a piezoelectric microphone, relates to a method for producing a plate member supporting equipment having a structure in which the plate member is supported, and more particularly, is supported by and plate member the method of manufacturing a plate member supporting equipment having a curved shape.

  Conventionally, various methods for manufacturing a plate member supporting device in which the plate member has a curved shape have been proposed.

  For example, in the manufacturing method disclosed in Patent Document 1, the air in the recesses is reduced by lowering the atmospheric pressure from the atmosphere in a state where a member having a recess formed on the lower surface is in close contact with the upper surface of the uncured ultraviolet curable resin. A step of forming a recess on the upper surface of the uncured UV curable resin, a step of curing the UV curable resin by irradiating with UV light, and a step of peeling the member formed with the recess. It is a manufacturing method of optical elements, such as a micro lens.

  In addition, the manufacturing method disclosed in Patent Document 2 includes a lid having an air blowing hole after a ceramic green sheet is disposed on a mold having a hemispherical recess and an air suction hole so as to cover the recess. A step of covering the mold with a step, a step of forming a ceramic green sheet into a curved shape along the concave portion of the mold by blowing high pressure air from the air blowing hole in a state covered with a lid, and a ceramic A method of manufacturing a piezoelectric device such as a piezoelectric sensor, which includes a step of firing after removing the green sheet from the mold.

JP 2001-315217 A JP-A-4-198827

  In plate member support devices that detect light, sound waves, etc., such as piezoelectric devices such as piezoelectric microphones and optical elements such as lenses, a thin plate member made of ceramics or resin is formed into a curved shape, thereby widening the directivity angle. And increase sensitivity. Therefore, it is conceivable to produce a plate member having a curved shape.

  However, the manufacturing method disclosed in Patent Document 1 is limited to the material of the plate member having photocurability. Moreover, since the manufacturing method disclosed in Patent Document 2 uses a sintering method, the material of the plate member is limited to ceramics, and the material of the member other than the plate member is set to the sintering temperature of the plate member made of ceramics. Limited to what can be tolerated.

In view of such a situation, the present invention is not limited to the material of the plate member having photo-curing property or ceramics, and the material of the member other than the plate member is not limited to one that can withstand high temperature, and has a curved surface. can plate member having a shape to produce a plate member supporting device having a structure that is supported, it is intended to provide a method of manufacturing a plate member supporting equipment.

  In order to solve the above-mentioned problems, the present invention provides a method for manufacturing a plate member support device configured as follows.

  A manufacturing method of a plate member supporting device includes a housing member having an opening formed in at least one main surface and a space communicating with the opening formed therein, a plate member covering the opening of the housing member, and a main surface of the housing member And a joining member that joins the plate member to each other, and the plate member supporting device fixed to the housing member by the joining member in a state where the plate member is deformed. In the method of manufacturing the plate member supporting device, an assembly in which the plate member is temporarily fixed to at least a part of the main surface of the housing member by an uncured bonding member so as to cover the opening of the housing member is provided. While maintaining the internal pressure of the space and the external pressure in an equilibrium state, the assembly is cooled with the first step of heating and the space of the housing member sealed, and the interior of the space of the housing member The second step of reducing the pressure of the plate member and deforming the plate member into a concave shape on the space side of the housing member, and the plate member being deformed, the joining member is cured to fix the plate member to the housing member. And a third step.

  According to the manufacturing method described above, the plate member is deformed by controlling the pressure in the space inside the housing member by heating and cooling the assembly, and then the joining member is cured to fix the plate member to the housing member. . After the bonding member is cured, the plate member maintains a curved surface shape due to deformation even if the space inside the housing member communicates with the outside. The material of the plate member is not limited to those having photocurability or ceramics. Moreover, the material of members other than a plate member is not limited to what can endure high temperature.

  Preferably, the joining member is made of a material having a glass transition temperature, and the assembly is heated in the first step so as to be higher than the glass transition temperature of the joining member. In the second step, the assembly is cooled so that the temperature is lower than the glass transition temperature of the joining member.

  In this case, the plate member can be easily deformed in the second step. In the third step, the plate member can be easily fixed to the housing member.

  Preferably, the joining member includes a thermosetting resin.

  In this case, it is easy to cure the joining member after heating and cooling the assembly.

  Preferably, the plate member includes a first portion having a rectangular shape, a second portion disposed on both sides of the first portion with a gap between a pair of opposing sides of the first portion, And a sealing member disposed in a gap between the second portion. The sealing member seals the gap between the first portion and the second portion until the deformation of the first portion reaches a predetermined size, while the deformation of the first portion exceeds the predetermined size. The sealing of the gap between the first part and the second part is configured to be released. The sealing member keeps the pressure inside the space of the housing member and the external pressure in an equilibrium state in the first step, and the sealing member is between the first portion and the second portion in the second step. Is sealed.

  In this case, it is easy to control pressure and sealing for the space inside the housing member.

  Preferably, the housing member has a communication portion that communicates the space of the housing member with the outside. In the first step, the gas in the space of the housing member is discharged from the communicating portion with the heating. In the second step, the space of the housing member is sealed by filling the communication part with the sealing member and sealing the communication part.

  In this case, it is easy to control the pressure and sealing of the space inside the housing member.

  Preferably, the sealing member is made of silicone gel.

  Silicone gel is suitable for a sealing member because it has heat resistance and is easily deformed.

  Preferably, the plate member is made of piezoelectric ceramics.

  In this case, it is possible to provide a piezoelectric microphone or the like having a wide directivity angle or increased sensitivity due to the curved surface of the plate member made of piezoelectric ceramics.

  According to the present invention, the material of the plate member is not limited to a photocurable material or ceramic, and the material of the member other than the plate member is not limited to a material that can withstand high temperatures, and has a curved shape. A plate member support device having a structure in which the plate member is supported can be manufactured.

It is sectional drawing of the board member support apparatus which concerns on Example 1 of this invention. It is sectional drawing which shows the manufacturing process of the board member support apparatus which concerns on Example 1 of this invention. It is a disassembled perspective view of the plate member support apparatus which concerns on Example 2 of this invention. It is principal part sectional drawing of the board member support apparatus which concerns on Example 2 of this invention. It is a disassembled perspective view of the plate member support apparatus which concerns on Example 3 of this invention. It is a disassembled perspective view of the plate member support apparatus which concerns on Example 4 of this invention.

  Embodiments of the present invention will be described below with reference to FIGS.

  <Example 1> The manufacturing method of the board member supporting apparatus of Example 1 is demonstrated, referring FIG.1 and FIG.2.

  FIG. 1 is a cross-sectional view schematically illustrating a configuration of a plate member support device 10 according to the first embodiment.

  The plate member support device 10 includes a housing member 12, a plate member 14, and a joining member 16.

  The housing member 12 has an opening 12x formed on one main surface. Inside the housing member 12, a space 11 communicating with the opening 12x is formed. That is, the housing member 12 has a recess. A plate member 14 is joined to the housing member 12 by a joining member 16 so as to cover the opening 12x. The plate member 14 is made of ceramics or resin. The joining member 16 extends between the housing member 12 and the plate member 14 so as to surround the opening 12x, and keeps the space 11 of the housing member 12 airtight. The joining member 16 is an adhesive made of an epoxy-based thermosetting resin. In the space 11, there is a gas, for example, air. The housing member 12 has a pipe that communicates the space 11 with the outside. That is, the pipe is a communication part. The pipe is provided with a fluid valve (gas valve), for example, an air valve 18. When the air valve 18 is closed, the space 11 inside the housing member 12 is sealed.

  Next, a method for manufacturing the plate member support apparatus 10 will be described with reference to FIG. FIG. 2 is a cross-sectional view schematically showing the manufacturing process of the plate member support apparatus 10. In FIG. 2, drawing of the piping and the air valve 18 is omitted.

  First, as shown in FIG. 2A, the flat plate member 14 is temporarily fixed to the housing member 12 by the joining member 16 so as to cover the opening 12 x of the housing member 12. In this way, the assembly is configured.

  The assembly is then heated. At this time, the bonding member 16 is heated at a temperature higher than the glass transition point. That is, by heating, the joining member 16 is softened by exceeding the glass transition point. Note that the temperature at this time is a temperature at which the plate member 14 can be kept deformed and is lower than the temperature at which the bonding member 16 is carbonized.

  At the moment when the assembly is heated, the air in the space 11 expands and the pressure in the space 11 of the housing member 12 increases, so that the plate member 14 may be deformed as shown in FIG. . Specifically, the plate member 14 is deformed so that the central portion of the plate member 14 protrudes to the upper surface side of the assembly. Therefore, by opening the air valve 18 (see FIG. 1) during heating of the assembly, a part of the air in the space 11 is discharged from the pipe to the outside. Thereby, the pressure inside the space 11 of the housing member 12 and the outside pressure are in an equilibrium state, and the plate member 14 returns to a flat plate shape as shown in FIG.

  Next, the assembly is cooled to a temperature lower than the glass transition point of the joining member 16 with the air valve 18 (see FIG. 1) closed and the space 11 of the housing member 12 sealed. Specifically, it is cooled to room temperature. During the heating of the assembly, a part of the air in the space 11 is discharged from the pipe to the outside, so that the amount of air in the space 11 is smaller than that before the heating. Therefore, the air in the space 11 contracts due to cooling, and the pressure in the space 11 of the housing member 12 is lowered, so that the plate member 14 is deformed as shown in FIG. Specifically, the plate member 14 is deformed so that the central portion of the plate member 14 protrudes toward the lower surface side of the assembly. In other words, the plate member 14 is deformed into a shape recessed on the space 11 side of the housing member 12.

  At this time, since the joining member 16 is softened until it reaches a temperature equal to or lower than the glass transition point, the binding force on the plate member 14 is weak, and the plate member 14 is easily deformed. Then, the joining member 16 flows along the deformed plate member 14 and maintains a seal between the plate member 14 and the housing member 12.

  When more time elapses after the assembly is cooled, the joining member 16 is cured while the plate member 14 is deformed. Thereby, as shown in FIG. 2E, the joining member 16 fixes the plate member 14 while the plate member 14 remains in a deformed shape, and the plate member 14 is recessed to the space 11 side of the housing member 12. Hold. That is, the plate member 14 is fixed to and supported by the housing member 12 in a state having a curved surface shape due to deformation. In this way, the plate member 14 is joined to the housing member 12.

  After the joining member 16 is cured, the plate member 14 maintains a curved surface shape due to deformation even if the air valve 18 (see FIG. 1) is opened and the space 11 is communicated with the outside by piping.

  When the plate member support apparatus 10 is manufactured by the above manufacturing method, the material of the plate member 14 is not limited to a photocurable material or ceramic. Moreover, the material of members other than a plate member is not limited to what can endure high temperature.

  In addition, by adjusting the heating temperature of the assembly or by adjusting the amount of air in the space 11 of the housing member 12 using the air valve 18, the pressure inside the space 11 of the housing member 12 is changed, The deformation amount of the plate member 14 can be easily controlled.

  The curved shape of the plate member 14 is used to deform the plate member 14 by using the pressure difference between the pressure inside the space 11 of the housing member 12 and the external pressure to equalize the distribution of pressure acting on the plate member 14. The variation of is small. Further, cracking of the plate member due to stress concentration is less likely to occur than a method in which a part of the plate member is deformed by applying a local load from the outside by a protruding member.

  When the plate member support device 10 detects light, sound waves, or the like, such as a piezoelectric device such as a piezoelectric microphone or an optical element such as a lens, the plate member 14 is supported in a deformed curved shape, thereby providing light. In addition, sound waves can be detected with a wide directivity angle, and sensitivity can be increased. Further, the sensitivity can be improved by the presence of the initial stress in the curved surface state.

  <Example 2> The manufacturing method of the plate member support apparatus 10k of Example 2 is demonstrated, referring FIG.3 and FIG.4. The plate member support device 10k according to the second embodiment is a piezoelectric microphone.

  FIG. 3 is an exploded perspective view illustrating a configuration of the plate member support device 10k according to the second embodiment. As shown in FIG. 3, the plate member support device 10 k includes frame members 42, 44, plate members 20, 30, and joining members 52, 54, 56. The frame members 42 and 44 are frame-shaped members having openings 42x and 42y; 44x and 44y on the upper and lower sides, respectively.

  The plate member 20 includes a first portion 22, a second portion 24, and a sealing member 26. The first portion 22 has a rectangular shape. The second portion 24 is disposed on both sides of the first portion 22 with a gap provided between a pair of opposing sides of the first portion 22. The sealing member 26 is disposed between the first portion 22 and the second portion 24. The plate member 30 includes a first portion 32, a second portion 34, and a sealing member 36. The first portion 32 has a rectangular shape. The second portion 34 is disposed on both sides of the first portion 32 with a gap between a pair of opposing sides of the first portion 32. The sealing member 36 is disposed in the gap between the first portion 32 and the second portion 34. The plate members 20 and 30 are formed with electrodes (not shown).

  The frame member 42 is a housing member. The frame member 42 has openings 42x and 42y formed on both main surfaces. Inside the frame member 42, a space 11k communicating with the openings 42x and 42y is formed. That is, the frame member 42 has a through hole. The plate members 20 and 30 are joined to the frame member 42 by joining members 52 and 54 so as to cover the openings 42x and 42y. For this reason, the space 11k inside the frame member 42 is sealed. A gas, for example, air exists in the space 11k.

  The frame member 44 is provided so that the lower plate member 30 is lifted from the surroundings when the plate member supporting device 10k is installed. The plate member 30 is joined to the frame member 44 by a joining member 56 so as to cover the opening 44x. A configuration in which the frame member 44 and the joining member 56 are not provided is also possible.

  For example, the plate members 20 and 30 have a flat plate shape. The first portions 22 and 32 and the second portions 24 and 34 are made of ceramics, and the sealing members 26 and 36 are made of silicone gel. Silicone gel is suitable for the sealing members 26 and 36 because it has heat resistance and is easily deformed. The sealing members 26 and 36 have a Young's modulus of 1 MPa or more and are more rigid than the first portions 22 and 32 and the second portions 24 and 34 so that the restraining force against the deformation of the first portions 22 and 32 becomes small. Those having a low (Young's modulus) are preferred. The plate members 20 and 30 are formed after forming the first portions 22 and 32 and the second portions 24 and 34 by forming grooves 10 μm to 40 μm in the fired piezoelectric ceramic plate having a thickness of 10 μm to 100 μm. It is created by filling the grooves with sealing members 26 and 36.

  The joining members 52, 54, and 56 are adhesives made of a thermosetting resin such as epoxy. It is preferable that the bonding members 52, 54, and 56 have a Young's modulus that is two orders of magnitude or less at the glass transition temperature (20 ° C. to 100 ° C.).

  The plate member support device 10k can be manufactured in the same manner as in the first embodiment. Next, a manufacturing method of the plate member supporting device 10k will be described with reference to FIG. FIG. 4 is an essential part enlarged cross-sectional view schematically showing the manufacturing process of the plate member supporting apparatus 10k.

  First, the plate members 20 and 30 are temporarily fixed to the frame member 42 by the joining members 52 and 54 so as to cover the openings 42x and 42y of the frame member 42. The plate member 30 is temporarily fixed to the frame member 44 by the joining member 56. In this way, the assembly is configured.

  At this time, as shown in FIG. 4A, the plate members 20 and 30 are flat and are sealed by the sealing members 26 and 36.

  The assembly is then heated. At this time, heating is performed at a temperature higher than the glass transition point of the joining members 52, 54, and 56. That is, by heating, the joining members 52, 54, and 56 are softened by exceeding the glass transition point. Note that the temperature at this time is a temperature at which the plate members 20 and 30 can keep deformation and is lower than the temperature at which the joining members 52, 54 and 56 are carbonized. By heating, the air in the space 11k expands and the pressure in the space 11k of the frame member 42 increases, so that the plate members 20 and 30 are deformed. At this time, the sealing members 26 and 36 of the plate members 20 and 30 function as relief valves, and the internal pressure of the space 11k of the frame member 42 and the external pressure are in an equilibrium state.

  That is, when the pressure inside the space 11k of the frame member 42 rises due to heating, the first portions 22 and 32 of the plate members 20 and 30 expand outward due to the internal pressure indicated by the arrow 13b in FIG. The first parts 22 and 32 are displaced with respect to the second parts 24 and 34. When the pressure inside the space 11k is small and the positional displacement of the first parts 22 and 32 with respect to the second parts 24 and 34 is small, the first parts 22 and 32 and the second part 24 are deformed by the deformation of the sealing members 26 and 36. , 34 is kept sealed.

  As indicated by an arrow 13c in FIG. 4C, when the internal pressure increases, the deformation of the first portions 22 and 32 further increases, and the first portions 22 and 32 are displaced relative to the second portions 24 and 34. An excessive portion is generated, and the sealing members 26 and 36 cannot seal the gap between the first portions 22 and 32 and the second portions 24 and 34. Therefore, as indicated by the arrow 13x, a part of the air in the space 11k of the frame member 42 is discharged to the outside through the gap between the first portions 22 and 32 and the second portions 24 and 34. .

  When a part of the air in the space 11k of the frame member 42 is discharged and the internal pressure is reduced as shown by the arrow 13d in FIG. 4D, the deformation of the first portions 22 and 32 is reduced. The sealing members 26 and 36 again seal the gap between the first portions 22 and 32 and the second portions 24 and 34.

  Next, the assembly is cooled to a temperature lower than the glass transition point of the joining members 52, 54, and 56. Specifically, it is cooled to room temperature. During the heating of the assembly, a part of the air in the space 11k is discharged to the outside from the gap between the first portions 22 and 32 and the second portions 24 and 34, so that the amount of air in the space 11k is Less than before heating. Therefore, the air in the space 11k contracts by cooling, and the pressure in the space 11k of the frame member 42 is lowered, so that the plate members 20 and 30 are deformed. Specifically, the plate members 20 and 30 are deformed so that the first portions 22 and 32 of the plate members 20 and 30 protrude toward the space 11 side. In other words, the plate members 20 and 30 are deformed into a shape recessed toward the space 11k of the frame member 42.

  Also at this time, since the sealing members 26 and 36 of the plate members 20 and 30 function as relief valves, the deformation of the first portions 22 and 32 causes the sealing members 26 and 36 to be the second portions and the second portions. The space between the portions 24 and 34 can be sealed.

  When more time elapses after the assembly is cooled, the joining members 52, 54, and 56 are cured while the plate members 20 and 30 are deformed. Thereby, the joining members 52, 54, and 56 fix the plate members 20 and 30 with the shape of the plate members 20 and 30 being deformed, and the plate members 20 and 30 are recessed toward the space 11 k side of the frame member 42. Hold. That is, the plate members 20 and 30 are fixed to and supported by the frame members 42 and 44 in a state having a curved surface shape due to the deformation of the first portions 22 and 32. In this way, the plate members 20 and 30 are joined to the frame members 42 and 44.

  When the plate member supporting apparatus 10k is manufactured by the above manufacturing method, the material of the plate members 20 and 30 is not limited to a photocurable material or ceramic. Moreover, the material of members other than a plate member is not limited to what can endure high temperature. Moreover, since the sealing members 26 and 36 of the plate members 20 and 30 function as relief valves, it is easy to control the pressure and sealing of the space 11k.

  When the joining members 52, 54, and 56 are made of a thermosetting resin, it is easy to cure the joining members 52, 54, and 56 after heating and cooling the assembly.

  For example, the plate members 20 and 30 are made of piezoelectric ceramics having a thickness of 30 μm, the frame members 42 and 44 are made of dielectric ceramics having a thickness of 0.2 mm, the joining members 52, 54 and 56 are 20 μm in thickness, and the glass transition point is 30 ° C. The first portions 22 and 32 and the second portions 24 of the plate members 20 and 30 are made of an adhesive made of a thermosetting resin such as an epoxy resin whose Young's modulus decreases from 3600 MPa to 4 MPa when the temperature is higher than the glass transition point. , 34 is 10 μm and the heating temperature of the assembly is 260 ° C., the deformation amount at the center of the first portions 22 and 32 of the plate members 20 and 30 is 10 μm.

  The first portions 22 and 32 of the plate members 20 and 30 are rectangular, only a pair of opposite sides are fixed to the frame member 42, and the other pair of sides are in contact with the sealing members 26 and 36 having low rigidity. So it is easy to deform. Therefore, if electrodes are formed on the front and back surfaces of the first portions 22 and 32 and the displacement of the first portions 22 and 32 is detected, a piezoelectric microphone with high sensitivity can be provided.

  <Example 3> The manufacturing method of the plate member support apparatus 10a of Example 3 is demonstrated, referring FIG.

  FIG. 5 is an exploded perspective view illustrating a configuration of the plate member support device 10a according to the third embodiment. As shown in FIG. 5, the plate member support apparatus 10a includes a housing member 12a, a plate member 14a, and a joining member 16a. The housing member 12a has an opening 12x formed on one main surface. A space 11a communicating with the opening 12x is formed in the housing member 12a. That is, the housing member 12a has a cylindrical shape having a recess. A plate member 14a is joined to the upper surface 12s of the housing member 12a by a joining member 16a so as to cover the opening 12x. The plate member 14a has a disk shape and is made of ceramics or resin. The joining member 16a is an adhesive made of an epoxy-based thermosetting resin. A gas, for example, air exists in the space 11a. The housing member 12a has an air hole 17a that allows the space 11a to communicate with the outside. That is, the air hole 17a is a communication part. The air hole 17a is sealed by the sealing member 18a. The space 11a inside the housing member 12a is sealed by the sealing member 18a.

  Next, the manufacturing method of the plate member support apparatus 10a is demonstrated.

  First, the flat plate member 14a is temporarily fixed to the upper surface 12s of the housing member 12a by the joining member 16a so as to cover the opening 12x of the housing member 12a. In this way, the assembly is configured. The assembly is then heated. At this time, heating is performed at a temperature higher than the glass transition point of the joining member 16a. That is, the joining member 16a is softened by exceeding the glass transition point by heating. Note that the temperature at this time is a temperature at which the plate member 14a can be kept deformed and is lower than the temperature at which the bonding member 16a is carbonized. Although the air in the space 11a expands due to heating, a part of the air in the space 11a is discharged from the air hole 17a. Thereby, the internal pressure of the space 11a of the housing member 12a and the external pressure are in an equilibrium state, and the plate member 14a is not deformed.

  After the assembly is heated, the air holes 17a of the housing member 12a are filled with silicone gel as a sealing member 18a and sealed. Then, the assembly is cooled to a temperature lower than the glass transition point of the joining member 16a. Specifically, it is cooled to room temperature. During the heating of the assembly, a part of the air in the space 11a is discharged to the outside from the air hole 17a, so that the amount of air in the space 11a is smaller than that before heating. Therefore, the air in the space 11a contracts due to cooling, and the pressure in the space 11a of the housing member 12a is lowered, whereby the plate member 14a is deformed. Specifically, the plate member 14a is deformed so that the central portion of the plate member 14a protrudes to the lower surface side of the assembly. In other words, the plate member 14a is deformed into a dome-shaped curved surface that is recessed toward the space 11a of the housing member 12a.

  When a further time elapses after the assembly is cooled, the joining member 16a is cured while the plate member 14a is deformed. As a result, the joining member 16a fixes the plate member 14a while keeping the deformed shape of the plate member 14a, and the plate member 14a retains the shape recessed on the space 11a side of the housing member 12a. That is, the plate member 14a is fixed to and supported by the housing member 12a in a state having a curved surface shape due to deformation. In this way, the plate member 14a is joined to the housing member 12a.

  Thereafter, even if the sealing member 18a is removed from the air hole 17a and the space 11a communicates with the outside through the air hole 17a, the plate member 14a maintains a state having a dome-shaped curved surface shape.

  When the plate member support apparatus 10a is manufactured by the above manufacturing method, the material of the plate member 14a is not limited to a photocurable material or ceramic. Moreover, the material of members other than a plate member is not limited to what can endure high temperature. In order to deform the plate member 14a by using the pressure difference between the pressure inside the space 11a of the housing member 12a and the external pressure to equalize the distribution of pressure acting on the plate member 14a, the dome shape of the plate member 14a is used. The variation in the curved surface shape is small. When the plate member support device 10a detects light, sound waves, or the like, such as a piezoelectric device such as a piezoelectric microphone or an optical element such as a lens, the plate member 14a supports the light in a deformed curved shape. In addition, sound waves can be detected with a wide directivity angle, and sensitivity can be increased. Further, the sensitivity can be improved by the presence of the initial stress in the curved surface state.

  <Example 4> The manufacturing method of the board | plate member support apparatus 10b of Example 4 is demonstrated, referring FIG.

  FIG. 6 is an exploded perspective view illustrating the configuration of the plate member supporting device 10b according to the fourth embodiment. As shown in FIG. 6, the plate member support apparatus 10b includes a housing member 12b, a plate member 14b, and a joining member 16b. The housing member 12b has a plurality of openings 12y formed on one main surface. A space 11b communicating with the opening 12y is formed inside the housing member 12b. That is, the housing member 12b has a plurality of recesses. A plate member 14b is joined to the upper surface 12t of the housing member 12b by a joining member 16b so as to cover the opening 12y. The plate member 14b is made of ceramics or resin.

  The joining member 16b is an adhesive made of an epoxy-based thermosetting resin. Although the joining member 16b is illustrated in a simplified shape like a frame, in practice, the joining member 16b is arranged around each opening 12y so that the spaces 11b are separated from each other. A gas, for example, air exists in the space 11b.

  Although only part of the housing member 12b is illustrated, the housing member 12b has an air hole 17b that allows the space 11b to communicate with the outside. That is, the air hole 17b is a communication part. The air hole 17b is formed in each of the plurality of recesses of the housing member 12b. The air hole 17b is sealed by the sealing member 18b. The space 11b inside the housing member 12b is sealed by the sealing member 18b.

  The plate member support device 10b is produced in the same manner as in the third embodiment. A method for manufacturing the plate member support device 10b will be described.

  First, the flat plate member 14b is temporarily fixed to the upper surface 12t of the housing member 12b by the joining member 16b so as to cover the opening 12y of the housing member 12b. In this way, the assembly is configured. The assembly is then heated. At this time, heating is performed at a temperature higher than the glass transition point of the bonding member 16b. That is, by heating, the joining member 16b is softened by exceeding the glass transition point. Note that the temperature at this time is a temperature at which the plate member 14b can be kept deformed and is lower than the temperature at which the joining member 16b is carbonized. Although the air in the space 11b expands due to heating, a part of the air in the space 11b is discharged from the air hole 17b. Thereby, the pressure inside the space 11b of the housing member 12b and the outside pressure are in an equilibrium state, and the plate member 14b is not deformed.

  After the assembly is heated, the air hole 17b of the housing member 12b is filled with silicone gel as a sealing member 18b and sealed. Then, the assembly is cooled to a temperature lower than the glass transition point of the joining member 16b. Specifically, it is cooled to room temperature. During the heating of the assembly, a part of the air in the space 11b is discharged to the outside from the air hole 17b, so that the amount of air in the space 11b is smaller than that before the heating. Therefore, the air in the space 11b contracts due to cooling, and the pressure in the space 11b of the housing member 12b is lowered, so that the plate member 14b is deformed. Specifically, the plate member 14b is deformed so that the central portion of the plate member 14b protrudes to the lower surface side of the assembly. In other words, the plate member 14b is deformed into a dome-shaped curved surface that is recessed toward the space 11b of the housing member 12b.

  When further time elapses after the assembly is cooled, the joining member 16b is cured while the plate member 14b is deformed. Thereby, the joining member 16b fixes the plate member 14b with the plate member 14b remaining in a deformed shape, and the plate member 14b holds the shape recessed on the space 11b side of the housing member 12b. That is, the plate member 14b is fixed to and supported by the housing member 12b in a state having a curved surface shape due to deformation. In this way, the plate member 14b is joined to the housing member 12b.

  Thereafter, even if the sealing member 18b is removed from the air hole 17b and the space 11b communicates with the outside through the air hole 17b, the plate member 14b maintains a state having a dome-shaped curved shape.

  When the plate member support apparatus 10b is manufactured by the above manufacturing method, the material of the plate member 14b is not limited to a photocurable material or ceramics. Moreover, the material of members other than a plate member is not limited to what can endure high temperature. In order to deform the plate member 14b by using the pressure difference between the pressure inside the space 11b of the housing member 12b and the external pressure to equalize the distribution of pressure acting on the plate member 14b, the dome shape of the plate member 14b is used. The variation in the curved surface shape is small. When the plate member support device 10b detects light, sound waves, or the like, such as a piezoelectric device such as a piezoelectric microphone or an optical element such as a lens, the plate member 14b supports the light in a deformed curved shape. In addition, sound waves can be detected with a wide directivity angle, and sensitivity can be increased. Further, the sensitivity can be improved by the presence of the initial stress in the curved surface state.

  <Summary> When the plate member supporting device is manufactured by the manufacturing method described above, the material of the plate member is not limited to those having photocurability or ceramics. Moreover, the material of members other than a plate member is not limited to what can endure high temperature.

  The amount of deformation of the plate member can be easily controlled by changing the pressure inside the space of the housing member by adjusting the heating temperature of the assembly or adjusting the amount of air in the space of the housing member. be able to.

  When a plate member is deformed under a local load, it is likely to break due to stress concentration, but the pressure difference between the pressure inside the housing member space and the outside pressure is used to distribute the pressure acting on the plate member. Since the plate member is deformed evenly, cracking of the plate member due to stress concentration hardly occurs.

  The present invention is not limited to the above embodiment, and can be implemented with various modifications.

10, 10a, 10b, 10k Plate member support device 11, 11a, 11b, 11k Space 12, 12a, 12b Housing member 12x, 12y Opening 14, 14a, 14b Plate member 16, 16a, 16b Joint member 17a, 17b Air hole 18 Air valve 18a, 18b Sealing member 20, 30 Plate member 22, 32 First part 24, 34 Second part 26, 36 Sealing member 42 Frame member (housing member)
42x, 42y Opening 44 Frame member 44x, 44y Opening 52, 54, 56 Joining member

Claims (7)

A housing member in which an opening is formed in at least one main surface, and a space communicating with the opening is formed inside;
A plate member covering the opening of the housing member;
A joining member that joins the plate member to the main surface of the housing member;
With
In the method of manufacturing a plate member support device, which is fixed to the housing member by the joining member in a state where the plate member is deformed,
An assembly in which the plate member is temporarily fixed to at least a part of the main surface of the housing member by the uncured joining member so as to cover the opening of the housing member is formed in the space of the housing member. A first step of heating while maintaining an internal pressure and an external pressure in equilibrium;
The assembly is cooled in a state where the space of the housing member is sealed, the pressure inside the space of the housing member is reduced, and the plate member is deformed into a shape recessed on the space side of the housing member. A second step of
A third step of curing the joining member and fixing the plate member to the housing member in a state where the plate member is deformed;
A method for manufacturing a plate member supporting device. The joining member is made of a material having a glass transition temperature,
In the first step, the assembly is heated so as to be higher than the glass transition temperature of the joining member,
2. The method for manufacturing a plate member support device according to claim 1, wherein, in the second step, the assembly is cooled so that the temperature is lower than a glass transition temperature of the joining member.   The method for manufacturing a plate member support device according to claim 2, wherein the joining member includes a thermosetting resin. The plate member is
A rectangular first portion;
A second portion disposed on both sides of the first portion with a gap between a pair of opposing sides of the first portion;
A sealing member disposed in the gap between the first portion and the second portion;
Including
The sealing member seals the gap between the first portion and the second portion until the deformation of the first portion reaches a predetermined size, while the deformation of the first portion is predetermined. If the size of the first member exceeds the first member, the sealing of the gap between the first portion and the second portion is released. In the first step, the pressure inside the space of the housing member The external pressure is kept in an equilibrium state, and the sealing member seals between the first portion and the second portion in the second step. The manufacturing method of the board member support apparatus as described in any one of these. The housing member has a communication portion for communicating the space of the housing member with the outside,
In the first step, with heating, the gas in the space of the housing member is discharged from the communication portion,
The said 2nd process WHEREIN: The said space of the said housing member is sealed by filling the said communication part in the said communication part and sealing the said communication part, The Claim 1 thru | or 3 characterized by the above-mentioned. The manufacturing method of the board member support apparatus as described in any one.   The said sealing member consists of silicone gel, The manufacturing method of the board member support apparatus of Claim 4 or 5 characterized by the above-mentioned.   The method for manufacturing a plate member support device according to any one of claims 1 to 6, wherein the plate member is made of piezoelectric ceramics.

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