JP5729328B2 - Group III nitride semiconductor light emitting device and method of manufacturing the same - Google Patents

Description

  The present invention relates to a group III nitride semiconductor light-emitting device in which a growth substrate is removed by a substrate lift-off method and bonded to a support, and a method for manufacturing the same.

  A sapphire substrate is generally used as a growth substrate for a group III nitride semiconductor. However, sapphire has problems with conductivity and thermal conductivity, and it is not easy to process without a clear cleavage plane. Therefore, as a technique for solving these problems, a technique (substrate lift-off) has been developed in which a growth substrate is removed after a group III nitride semiconductor is grown on the growth substrate.

  One such technique is the laser lift-off method. This is because after the group III nitride semiconductor layer and the support substrate are joined, the interface between the growth substrate and the group III nitride semiconductor is irradiated with a laser to decompose the group III nitride semiconductor layer and remove the growth substrate. It is a method to do. As another technique, a layer that can be dissolved in a chemical solution is introduced into a layer close to the growth substrate of the group III nitride semiconductor layer, the group III nitride semiconductor layer and the support substrate are joined, and then the above-described method is performed using a desired chemical solution. A method of removing a growth substrate by dissolving a layer that can be dissolved in a chemical solution (chemical lift-off method) is also known.

  In such a group III nitride semiconductor light-emitting device by substrate lift-off, for example, an n-electrode is provided on the surface of an n-type layer exposed by removing the substrate, and a conductive material is used as a supporting substrate, thereby providing a vertical conduction structure. Yes. In such a group III nitride semiconductor light-emitting device, it is known that an n-electrode is composed of a pad portion and a linear portion in order to diffuse current over the entire surface of the device (for example, Patent Documents 1 and 2). The pad portion is a portion to which a bonding wire is connected, and the linear portion is a portion that extends linearly from the pad portion.

  Further, in the group III nitride semiconductor light emitting device by substrate lift-off, light is extracted from the n-type layer side, but the problem that the n electrode reflects and absorbs light and deteriorates the light extraction efficiency. is there. Further, if the area of the n electrode is reduced to suppress reflection / absorption, the drive voltage is increased. In order to solve these problems, Patent Documents 1 and 2 further devise the following for the pad portion and the linear portion of the n-electrode.

  In Patent Document 1, the linear portion has an outer peripheral line portion formed in a frame shape along the outer periphery, so that current can be supplied to the entire light emitting region. Further, by forming a part of the pad portion of the n-electrode on the insulating film, it is possible to suppress the current from being concentrated on the pad portion and to diffuse the current over the entire light emitting region. Since the area in contact with the n-type layer is reduced, light emission directly under the pad portion can be suppressed, and reflection / absorption of light can be suppressed.

  Patent Document 2 discloses that two pad portions, a first extending portion, a second extending portion, a first extending portion, and a second extending portion that are linearly extended from the two pad portions and spaced apart from each other in parallel. And connecting the third stretched portion, the first stretched portion and the third stretched portion, and the second stretched portion and the third stretched portion, which are linearly stretched in parallel with each other, An n-electrode having a structure having linearly connected first connection extension portions and second connection extension portions spaced apart in parallel is shown. Further, it is described that the n-electrode does not have an outer peripheral portion formed in a frame shape along the outer periphery. It is described that such an n electrode can suppress an increase in driving voltage while improving light extraction efficiency.

JP 2010-157579 JP2011-114240

  However, even if the n-electrode structure as in Patent Documents 1 and 2 is adopted, the effect of suppressing the reflection / absorption of light by the n-electrode is not sufficient. Therefore, the light extraction efficiency could not be sufficiently improved.

  Accordingly, an object of the present invention is to realize a group III nitride semiconductor light-emitting device with reduced light reflection / absorption by an n-electrode and improved light extraction efficiency, and to provide a manufacturing method thereof.

According to a first aspect of the present invention, there is provided a conductive support, a first electrode positioned on the support, a first conductivity type first layer made of a group III nitride semiconductor positioned on the first electrode, a light emitting layer A group III nitride semiconductor light emitting device having a semiconductor layer that is a second layer of the second conductivity type opposite to the first conductivity type, and an element isolation groove for dividing the light emitting layer into each device, , it is formed in at least a partial region of the second layer side exposed in the isolation trench side, and a second electrode which is not formed on the second layer, have a device isolation trench, the emission of the first layer The first element isolation groove having a depth reaching the second layer from the surface opposite to the layer side, and the depth reaching the first element isolation groove from the surface of the second layer opposite to the light emitting layer side. An insulating first for preventing a short circuit between the first layer and the second layer on the side surface of the first element isolation groove. Having Mamorumaku a III-nitride semiconductor light emitting device characterized by.

  If the first conductivity type is p-type, the second conductivity type is n-type. If the first conductivity type is n-type, the second conductivity type is p-type.

  An insulating first protective film may be formed continuously from the partial region of the second layer to the first layer among the side surfaces of the semiconductor layer exposed at the side surfaces of the element isolation trench. This is to prevent a short circuit between the first layer and the second layer.

  An uneven shape may be provided on the surface of the second layer (the surface opposite to the light emitting layer side) to improve the light extraction efficiency. Moreover, it is good also as a structure which provides a transparent electrode in the whole surface of a 2nd layer surface, and connects with a 2nd electrode. Thereby, current diffusibility can be improved and the uniformity of light emission can be improved. Moreover, it may replace with the transparent electrode, or may form a 2nd protective film on a transparent electrode, and may make it protect a 2nd layer surface or a transparent electrode surface.

  The second electrode may be in direct contact with the side surface of the second layer, or may be in contact via a transparent electrode. The second electrode may also be formed on the first protective film.

  In order to further increase the area where the second electrode is connected to the second layer, the element isolation groove may have a comb shape, a lattice shape, a zigzag shape, a stripe shape, or the like in plan view. Since the area of the second layer exposed on the side surface of the element isolation groove is larger than in the conventional case where a frame-like planar pattern is formed along the outer periphery of the element, the area where the second electrode is in contact with the side surface of the second layer is increased. Therefore, the efficiency of injecting electrons into the second layer is improved, and an improvement in light emission efficiency can be expected.

  Further, the element isolation groove only needs to be formed so as to divide the light emitting layer for each element, and may be a groove formed so as to penetrate the outer periphery of the semiconductor layer. The outer periphery of the semiconductor layer means the outer periphery of the group III nitride semiconductor light emitting device in a plan view or a region in the vicinity thereof. Further, the first element isolation groove having a depth reaching the second layer from the surface of the first layer opposite to the light emitting layer side, and the first element isolation from the surface of the second layer opposite to the light emitting layer side. You may comprise by the 2nd element isolation groove of the depth which reaches a groove | channel. In this case, by forming the first protective film on the side surface of the first element isolation trench, the first layer and the second layer exposed on the side surface of the semiconductor layer can be easily covered with the first protective film, and a short circuit is prevented. Can be prevented. Alternatively, the first protective film may be formed so as to fill the first element isolation trench. In addition, since only the second layer is exposed on the side surface of the second element isolation groove, the second electrode can be easily formed.

As another invention , the semiconductor layer side surface exposed on the side surface of the element isolation trench is formed continuously from a partial region of the second layer to the first layer, and a short circuit between the first layer and the second layer is performed. A Group III nitride semiconductor light emitting device characterized by further having an insulating first protective film to be prevented may be used.

As another invention different from the present invention , the element isolation groove may be a group III nitride semiconductor light emitting device characterized by penetrating the outer periphery of the semiconductor layer .

  The first element separation groove and the second element separation groove may have different plane patterns. However, when there is a region in which the first element isolation groove is not formed and only the second element isolation groove is formed in a plan view, the total film thickness from the first layer to the second layer in the region is the other region. The total film thickness from the first layer to the second layer becomes thinner, which is not desirable. Therefore, the first element separation groove and the second element separation groove have the same planar pattern, or the first element separation plane is the first pattern in the plan view as a pattern in which the second element separation groove is included in the first element separation groove. It is desirable that no element isolation trench is formed and there is no region where only the second element isolation trench is formed.

The second invention is Oite the first invention, the light emitting layer side of the second layer and the opposite surface, the transparent second layer of the semiconductor layer side is continuously formed on the exposed region The group III nitride semiconductor light-emitting device further includes an electrode, and the second electrode is in contact with the side surface of the second layer through the transparent electrode.

A third invention is Oite the first invention, the light emitting layer side of the second layer is formed on the surface of the opposite, further comprising a transparent electrode connected to the second electrode, the second electrode, A Group III nitride semiconductor light-emitting device, which is in direct contact with the side surface of the second layer.

A fourth invention is Oite to the first invention, III-group of the light emitting layer side of the second layer formed on the surface of the opposite, further comprising an insulating second protective layer, characterized in that This is a nitride semiconductor light emitting device.

A fifth invention provides a group III nitride semiconductor light emitting device according to any one of the first to fourth inventions, wherein an uneven shape is formed on a surface of the second layer opposite to the light emitting layer side. It is an element.

A sixth invention is a group III nitride semiconductor light emitting device according to the first to fifth inventions, wherein the first conductivity type is p-type and the second conductivity type is n-type.

In a seventh aspect of the present invention, a semiconductor layer is formed by sequentially forming a second layer made of a group III nitride semiconductor, a light emitting layer, and a first layer on a growth substrate, and a first electrode is formed on the first layer. In the method for manufacturing a group III nitride semiconductor light-emitting device according to the fourth aspect of the present invention, the method includes the step of removing the growth substrate by substrate lift-off after bonding the first electrode and the support. Before the formation of the electrode, a first element isolation groove forming step for forming a first element isolation groove and performing pn separation, and after the first element isolation groove forming step and before the formation of the first electrode, A first protective film forming step for forming a first protective film so as to cover the side surface, and after removing the growth substrate, a second element isolation groove is formed to penetrate the semiconductor layer, and the semiconductor layer is separated for each element A second element isolation groove forming step, and after the second element isolation groove forming step, Is a manufacturing method of a group III nitride semiconductor light-emitting device, characterized in that the second layer side and has a second electrode forming step of forming a second electrode.

  In the group III nitride semiconductor light emitting device of the present invention, since the second electrode is not located on the surface of the second layer serving as the light extraction surface, the second electrode does not hinder light extraction. Therefore, the light extraction efficiency can be improved. Conventionally, since light extraction is prevented by the second electrode, the first electrode is not provided in a region overlapping the second electrode in plan view, and the light emitting layer in the region overlapping the second electrode in plan view does not emit light. It was like that. Therefore, the light emission area has been reduced. However, in the group III nitride semiconductor light emitting device of the present invention, since the second electrode is not located on the surface of the second layer as described above, the first electrode can be provided on the entire surface, and the light emitting area can be increased. Therefore, the luminous efficiency can be improved.

  The present invention is also effective for a group III nitride semiconductor light emitting device that is small or rectangular in plan view. In the group III nitride semiconductor light-emitting device having such a shape, the ratio of the area of the semiconductor layer side surface to the area of the element main surface is large, so that electrons can be efficiently injected from the side surface of the second layer. Since the distance to the central portion of the element is shortened, the current diffusibility is improved and the uniformity of light emission can be enhanced.

Further, according to the invention of 1, 7, it is possible to facilitate the formation of the first protective layer and the second electrode. That is, if the first element isolation groove is formed after the first layer is formed and the first protective film is formed so as to fill the first element isolation groove, the first layer side surface can be easily formed from the first layer side surface to the second layer side surface. 1 It can be covered with a protective film. In addition, since only the second layer is exposed on the side surface of the second element isolation groove, the second electrode can be easily formed on the side surface of the second layer.

FIG. 3 is a diagram showing a configuration of a group III nitride semiconductor light-emitting device of Example 1. FIG. 3 is a view showing a manufacturing process of the group III nitride semiconductor light emitting device of Example 1. FIG. 3 is a view showing a manufacturing process of the group III nitride semiconductor light emitting device of Example 1. FIG. 3 is a view showing a manufacturing process of the group III nitride semiconductor light emitting device of Example 1. FIG. 3 is a view showing a manufacturing process of the group III nitride semiconductor light emitting device of Example 1. FIG. 3 is a view showing a manufacturing process of the group III nitride semiconductor light emitting device of Example 1. FIG. 3 is a view showing a manufacturing process of the group III nitride semiconductor light emitting device of Example 1. FIG. 3 is a view showing a manufacturing process of the group III nitride semiconductor light emitting device of Example 1. FIG. 3 is a view showing a manufacturing process of the group III nitride semiconductor light emitting device of Example 1. FIG. 3 is a view showing a manufacturing process of the group III nitride semiconductor light emitting device of Example 1. The figure which showed the structure of the group III nitride semiconductor light-emitting device of the modification. FIG. 3 is a diagram showing a configuration of a group III nitride semiconductor light-emitting device of Example 2. FIG. 5 is a diagram showing a configuration of a group III nitride semiconductor light-emitting device of Example 3. FIG. 6 is a view showing a manufacturing process of the group III nitride semiconductor light emitting device of Example 3. FIG. 6 is a view showing a manufacturing process of the group III nitride semiconductor light emitting device of Example 3. FIG. 6 is a view showing a manufacturing process of the group III nitride semiconductor light emitting device of Example 3. FIG. 6 is a view showing a manufacturing process of the group III nitride semiconductor light emitting device of Example 3. FIG. 6 is a view showing a manufacturing process of the group III nitride semiconductor light emitting device of Example 3. FIG. 6 is a view showing a manufacturing process of the group III nitride semiconductor light emitting device of Example 3. FIG. 6 is a view showing a manufacturing process of the group III nitride semiconductor light emitting device of Example 3. The group III nitride semiconductor light-emitting device of Example 1 as viewed from above. The figure which showed the other pattern of the element isolation groove.

  Hereinafter, specific examples of the present invention will be described with reference to the drawings. However, the present invention is not limited to the examples.

  FIG. 1 is a diagram showing a configuration of a group III nitride semiconductor light emitting device of Example 1. As shown in FIG. 1, the group III nitride semiconductor light emitting device is located on the conductive support 10, the p electrode 30 bonded to the support 10 via the bonding layer 20, and the p electrode, And a semiconductor layer 40 made of a group III nitride semiconductor. The semiconductor layer 40 has a structure in which three layers of a p-type layer 41, a light-emitting layer 42, and an n-type layer 43 are stacked in this order from the p-electrode 30 side. A transparent electrode 60 is formed on the surface of the n-type layer 43 (surface opposite to the light emitting layer 42 side). In addition, an element isolation groove 70 is formed at an end of the semiconductor layer 40 (a region corresponding to the outer periphery of the element in plan view). The element isolation trench 70 passes through the semiconductor layer 40. Further, a protective film 80 (corresponding to the first protective film of the present invention), which is an insulator, continues to a region excluding a part of the n-type layer 43 in the bottom surface 70a and the side surface 70b of the element isolation trench 70. Is formed. The n-electrode 50 is formed in contact with the n-type layer 43 on the side surface 70 b of the element isolation trench 70 and in a region where the side surface of the n-type layer 43 is exposed without forming the protective film 80. The n-electrode 50 is not located in the region above the n-type layer 43. In the group III nitride semiconductor light emitting device of Example 1, a voltage is applied between the back electrode (not shown) provided on the back surface of the support 10 (the surface opposite to the bonding layer 20 side) and the n electrode 50. In this structure, light is emitted by conducting in a direction perpendicular to the element main surface, and light is extracted from the n-type layer 43 side.

  As the support 10, a conductive substrate made of Si, GaAs, Cu, Ge, Cu—W, or the like can be used. As the bonding layer 20, a metal eutectic layer such as an Au—Sn layer, an Au—Si layer, an Ag—Sn—Cu layer, or a Sn—Bi layer can be used. A layer, a Cu layer, or the like can also be used. Instead of bonding the support 101 and the p electrode 103 using a bonding layer, a metal layer such as Cu may be formed directly on the p electrode 30 by plating, sputtering, or the like to form the support 10. The p electrode 30 may be made of a metal having high light reflectivity and low contact resistance, such as Ag, Rh, Pt, Ru, or an alloy containing these metals as a main component, Ni, Ni alloy, Au alloy, or the like. The p-electrode 30 may be a composite layer made of a transparent electrode film and a highly reflective metal film (the side in contact with the semiconductor layer 40 is a transparent electrode film). As the transparent electrode film, a transparent conductive oxide such as ITO (tin-doped indium oxide), ICO (cerium-doped indium oxide), IZO (zinc-doped indium oxide), or a metal thin film such as Au can be used.

  The p-electrode 30 is formed in contact with almost the entire surface (all regions except the outer periphery of the element) of the surface of the p-type layer 41 (surface opposite to the light emitting layer 42 side). Conventionally, the p-electrode 30 is not provided in a region facing the n-electrode 50 in plan view. This is because such a region is a region where light is absorbed and reflected by the n-electrode and obstructs light extraction, so that the light-emitting layer 42 in that region does not emit light by not providing the p-electrode 30 in that region. Thus, the luminous efficiency is improved. However, in the group III nitride semiconductor light-emitting device of Example 1, since the n-electrode 50 is not located on the n-type layer 43, the p-electrode 30 can be formed on almost the entire surface, and the light-emitting area is increased. Luminous efficiency can be improved.

  As the p-type layer 41, the light-emitting layer 42, and the n-type layer 43 constituting the semiconductor layer 40, any structure known as a structure of a conventional group III nitride semiconductor light-emitting element can be used. For example, the p-type layer 41 has a structure in which a p-contact layer made of GaN doped with Mg and a p-cladding layer made of AlGaN doped with Mg are stacked in this order from the support 10 side. The light emitting layer 42 has, for example, an MQW structure in which a barrier layer made of GaN and a well layer made of InGaN are repeatedly stacked. The n-type layer 43 has, for example, a structure in which an n-clad layer made of GaN and an n-type contact layer doped with Si at a high concentration are laminated in order from the light emitting layer 42 side.

  An uneven shape 44 is formed on the surface of the n-type layer 43 (surface opposite to the light emitting layer 42 side) by wet etching with an aqueous solution of KOH, NaOH, TMAH (tetramethylammonium hydroxide), phosphoric acid or the like. Yes. The concavo-convex shape 44 is formed with a large number of fine pyramids, and the side surfaces of the pyramids form an angle of about 60 degrees with respect to the element main surface. The uneven shape 44 improves the light extraction efficiency. It is not always necessary to form the uneven shape 44, and the surface of the n-type layer 43 may be kept flat without forming the uneven shape 44.

  The transparent electrode 60 is formed on the entire surface of the n-type layer 43 having the concavo-convex shape 44. The transparent electrode 60 is connected to the n-electrode 60 at the end. For the transparent electrode 60, a transparent conductive oxide, a metal thin film, or the like can be used. Examples of the transparent conductive oxide include ITO (tin-doped indium oxide), ICO (cerium-doped indium oxide), IZO (zinc-doped indium oxide), and the like. The metal thin film is, for example, Au.

  Instead of the transparent electrode 60, a translucent insulating film (corresponding to the second protective film of the present invention) may be provided to protect the surface of the n-type layer 43. Moreover, it is good also as a structure which has a protective film on the transparent electrode 60 further. For these protective films, the same material as that of the protective film 80 described later can be used. As an example, FIG. 3 shows an example in which the uneven shape is not provided on the surface of the n-type layer 43 and a protective film 90 is provided on the surface of the n-type layer instead of the transparent electrode 60.

  The element isolation groove 70 is a groove provided for isolating the semiconductor layer 40 formed on the growth substrate for each element in the manufacturing process of the group III nitride semiconductor light emitting element of the first embodiment. 1 is a groove formed in the outer peripheral portion of the element so that the semiconductor layer 40 has a mesa shape as shown in FIG. The element isolation groove 70 penetrates the semiconductor layer 40. The element isolation groove 70 is formed in a frame-like plane pattern along the outer periphery of the element.

For the protective film 80, SiO ₂ , TiO ₂ , ZrO ₂ , Al ₂ O ₃ , Si _x N _y , SiO _x N _y, or the like can be used. Moreover, the composite layer of these materials may be sufficient. As shown in FIG. 1, the protective film 80 includes a region extending from the vicinity of the light emitting layer 12 of the n-type layer 43 to the p-type layer 41 on the side surface of the semiconductor layer 43 exposed on the side surface 70 b of the element isolation groove 70, and the element isolation groove 70. It is continuously formed in a film shape on the bonding layer 20 that is the bottom surface 70a. This protective film 80 prevents current leakage or short-circuit between the p-type layer 41 and the n-type layer 43 exposed on the side surface of the element isolation trench 70. Of the side surface of the semiconductor layer 43 exposed by the element isolation trench 70, the side surface of the n-type layer 43 other than the vicinity of the light emitting layer 42 is exposed without being covered with the protective film 80. That is, of the side surfaces of the element isolation groove 70, a region having a height from the bottom surface of the element isolation groove 70 to the n-type layer 43 near the light emitting layer 42 is covered with the protective film 80, and a region higher than that is covered with the protective film 80. I have not been told. In the case where the n-type layer 43 is composed of a contact layer and a clad layer, it is preferable that the clad layer is covered with the protective film 80 and only the contact layer of the n-type layer 43 is exposed. It can be exposed.

  The n electrode 50 is located on the side surface of the semiconductor layer 43 and on the protective film 80. The n electrode 50 is in direct contact with the exposed side surface of the n-type layer 43 without being covered with the protective film 80 and also connected to the transparent electrode 60. The shape of the n electrode 50 as a whole is a ring shape along the outer periphery of the element. As the material of the n electrode 50, a material conventionally used as a material of the n electrode of the group III nitride semiconductor light emitting device can be used. For example, V / Ni, Ti / Al, V / Au, Ti / Au, Ni / Au. Here, the symbol “/” means stacking, and A / B means that A is deposited and then B is deposited. The same applies to the following. Here, a structure in which layers are stacked in order from the n-type layer 43 side is shown. In Example 1, the n-electrode 50 is also formed on the protective film 80, but it is not necessary to form it on the protective film 80. However, the n electrode 50 may be positioned on the protective film 80 as in the first embodiment from the viewpoint of ease of formation.

  FIG. 7 is a view of the group III nitride semiconductor light-emitting device of Example 1 as viewed from above (on the surface side of the n-type layer 43 that is the light extraction side). As shown in FIG. 7, the group III nitride semiconductor light-emitting device of Example 1 is square in plan view. The element isolation groove 70 is formed in a square frame-shaped pattern along the outer periphery of the element. The region in plan view of the semiconductor layer 40 and the transparent electrode 60 formed thereon is an internal region surrounded by a square frame-like pattern of the element isolation trench 70 and is a square. The pattern of the n-electrode 50 in plan view is approximately the same as the element isolation groove 70, and is a square frame pattern in contact with the transparent electrode 60.

  In the group III nitride semiconductor light-emitting device of Example 1 described above, the n-electrode 50 is provided on the side surface of the n-type layer 43 and is not provided on the surface of the n-type layer 43. Therefore, the surface of the n-type layer 43, which is the light extraction surface, does not hinder light extraction, and the light extraction efficiency is improved.

  Further, since the transparent electrode 60 connected to the n-electrode 50 is formed on the entire surface of the n-type layer 43, the transparent electrode 60 can efficiently diffuse electrons in the element surface direction, and the light emission is uniform. And luminous efficiency are improved.

  Further, since the p-electrode 30 can be formed on almost the entire surface of the p-type layer 41, the light-emitting area can be increased and the light-emitting efficiency can be improved.

  The group III nitride semiconductor light-emitting device of Example 1 is particularly effective for a small device or a rectangular device in plan view. In these group III nitride semiconductor light-emitting devices, the ratio of the area of the semiconductor layer side surface to the area of the device main surface is large, so electrons can be efficiently injected from the side surface of the n-type layer, and from the side surface to the center of the device Therefore, the current diffusibility is improved and the uniformity of light emission can be improved.

  Next, the manufacturing process of the group III nitride semiconductor light-emitting device of Example 1 will be described with reference to the drawings.

(Semiconductor layer 40 formation process)
First, a sapphire substrate 90 is prepared, and thermal cleaning is performed to remove impurities on the surface of the sapphire substrate 90. Then, an n-type layer 43 made of a group III nitride semiconductor, an active layer 42, and a p-type layer 41 are sequentially laminated on the sapphire substrate 90 by a MOCVD method through a buffer layer (not shown) made of AlN. 40 is formed (FIG. 2.A). Raw material gas used in the MOCVD method, as the nitrogen source, ammonia (NH _3), as a Ga source, trimethyl gallium _{(Ga (CH 3) 3)} , as an In source, trimethylindium _{(In (CH 3) 3)} , Al source Trimethylaluminum (Al (CH ₃ ) ₃ ), silane (SiH ₄ ) as an n-type doping gas, cyclopentadienylmagnesium (Mg (C ₅ H ₅ ) ₂ ) as a p-type doping gas, and H as a carrier gas ₂ and N ₂ . In addition to the sapphire substrate 90, a substrate such as SiC, ZnO, or spinel can be used as the growth substrate.

(P electrode 30 formation process)
Next, a p-electrode 30 is formed on the p-type layer 41 in a region excluding the outer periphery of the element by sputtering. Alternatively, a vapor deposition method may be used. Further, the bonding layer 20 is formed on the p-electrode 30 (FIG. 2.B). A diffusion prevention layer is formed between the p electrode 30 and the bonding layer 20 in order to prevent the metal elements constituting the bonding layer 20 from diffusing into the p electrode 30 or the p-type layer 41. Is desirable. As the diffusion preventing layer, a multilayer film containing Ti / Ni such as Ti / Ni / Au or a multilayer film containing W / Pt such as W / Pt / Au can be used.

(Support 10 joining step)
Next, the support 10 is prepared, and the support 10 and the p-electrode 30 are bonded via the bonding layer 20 (FIG. 2.C). At this time, the bonding layer 20 is also formed on one surface of the support 10, and the bonding layer 20 of the support 10 and the bonding layer 20 on the p-electrode 30 are bonded together by hot pressing.

(Laser lift-off process)
Then, the sapphire substrate 90 is separated and removed by laser lift-off (FIG. 2.D). That is, from the sapphire substrate 90 side, a laser beam having a wavelength that is transmitted by sapphire and absorbed by a group III nitride semiconductor (for example, excimer laser such as KrF) is irradiated, and the semiconductor near the interface between the sapphire substrate 90 and the semiconductor layer 40 is irradiated. By decomposing the layer 40, the sapphire substrate 90 is peeled off from the semiconductor layer 40 and removed.

(Element isolation groove 70 forming step)
Next, from the surface side of the n-type layer 43 (surface opposite to the light-emitting layer 42 side), a region for element isolation on the surface of the n-type layer 43 is etched by dry etching such as RIE (reactive ion etching). An element isolation trench 70 having a depth reaching the bonding layer 20 through the semiconductor layer 40 is formed (FIG. 2.E). The element isolation groove 70 may be formed by dry etching, wet etching using KOH, or laser light irradiation.

(Protective film 80 forming step)
Next, the bonding layer exposed to the p-type layer side surface and the element isolation groove 70 bottom surface 70a from the region in the vicinity of the light emitting layer 42 on the side surface of the n-type layer 43 exposed on the side surface 70b of the element isolation groove 70 by CVD or sputtering. A film-like protective film 80 continuous to 20 is formed (FIG. 2.F). By forming the protective film 80 in such a pattern, the protective film 80 is covered from the region near the light emitting layer 42 on the side surface of the n-type layer 43 to the side surface of the p-type layer, and the p-type layer 41 and the n-type layer 43 are covered. Current leakage and short-circuit between the n-type layer 43 and the light-emitting layer 42 are not covered with the protective film 80 but exposed, and the n-electrode 50 comes into contact in a later process. It becomes an area.

(Uneven shape 44 forming step)
Next, the surface of the n-type layer 43 is wet-etched with a TMAH aqueous solution to form an uneven shape 44 on the surface of the n-type layer 43 (FIG. 2.G). In addition to TMAH, KOH, NaOH, phosphoric acid or the like can be used for this wet etching.

  The element isolation groove 70 forming step, the protective film 80 forming step, and the concavo-convex shape 44 forming step are not limited to the above order, and the order may be changed as follows. First, the concavo-convex shape 44 may be formed first, then the element isolation groove 70 may be formed, and then the protective film 80 may be formed. Alternatively, the protective film 80 may be formed after the element isolation groove 70 is formed and the concavo-convex shape 44 is formed.

(Transparent electrode 60 forming step)
Next, a transparent electrode 60 is formed by sputtering on the entire surface of the n-type layer 43 on which the concavo-convex shape 44 is formed (FIG. 2.H). The formation of the transparent electrode 60 may be performed before the element isolation groove 70 forming process and the protective film 80 forming process as long as the uneven shape 44 is formed. Further, the transparent electrode 60 may be formed by vapor deposition in addition to sputtering.

(N-electrode 50 formation process)
Next, by using sputtering or vapor deposition and a lift-off method, the n-type layer 43 side surface exposed without being covered with the protective film 80 and a continuous region on the protective film 80 are in contact with the transparent electrode 60 to form the n-electrode. 50 (FIG. 2.I).

  Next, the support 10 is polished and thinned, a back electrode (not shown) is formed on the back of the support 10, and element separation is performed by laser dicing. As described above, the Group III nitride semiconductor light-emitting device of Example 1 is manufactured. In addition to laser dicing, element isolation may be performed by scribing or the like.

  FIG. 4 is a diagram showing a configuration of a group III nitride semiconductor light emitting device of Example 2. The group III nitride semiconductor light-emitting device of Example 2 is the same as the group III nitride semiconductor light-emitting device of Example 1, except that the transparent electrode 160 and the n electrode 150 described below are provided instead of the transparent electrode 60 and the n electrode 50. It is a configuration. Other configurations are the same as those of the group III nitride semiconductor light emitting device of Example 1.

  The transparent electrode 160 is continuously formed in a film shape on the entire surface of the n-type layer 43, the exposed region of the side surface of the n-type layer 43 that is not covered with the protective film 80, and the protective film 80. The material of the transparent electrode 160 is the same as that of the transparent electrode 60 of the first embodiment.

  The n electrode 150 is formed in a region on the transparent electrode 160 excluding the region corresponding to the upper portion of the n-type layer 43. That is, the region on the upper side of the protective film 80 of the transparent electrode 60 and the side surface of the n-type layer 43 that is exposed without being covered with the protective film 80 among the side surfaces of the element isolation groove 70 and sandwiches the transparent electrode 160. Are formed continuously.

  In the group III nitride semiconductor light emitting device of Example 2 described above, since the n electrode 150 is not located on the n-type layer 43 that is the light extraction surface, similarly to the group III nitride semiconductor light emitting device of Example 1, There is nothing that hinders light extraction, and light extraction efficiency is improved. In addition, a transparent electrode 160 is formed between the side surface of the n-type layer 43 and the n-electrode 150, and the transparent electrode 160 continues to the entire surface on the n-type layer 43, so that electrons are diffused by the transparent electrode 160. Thus, electrons can be efficiently injected into the n-type layer 43, and the uniformity of light emission and the light emission efficiency are improved.

  FIG. 5 is a view showing a configuration of a group III nitride semiconductor light emitting device of Example 3. As shown in FIG. 5, the group III nitride semiconductor light-emitting device of Example 3 has an element isolation groove 270 including a first element isolation groove 270 </ b> A and a second element isolation groove 270 </ b> B instead of the element isolation groove 70. Group III nitride semiconductor light emitting device of Example 1 in that it has a protective film 280 instead of the protective film 80, a transparent electrode 260 instead of the transparent electrode 60, and an n electrode 250 instead of the n electrode 50. It is different from the element. Other configurations are the same as those in the first embodiment. Hereafter, the part which changed the structure from Example 1 is demonstrated.

  The first element isolation groove 270A is a groove having a depth reaching the n-type layer 43 from the surface of the p-type layer 41 (the surface opposite to the light emitting layer 42 side). The first element isolation groove 270A has a frame shape along the outer periphery of the element. Further, the p-type layer 41, the light emitting layer 42, and the n-type layer 43 of the semiconductor layer 40 are exposed at the first element isolation trench 270A side surface 270Ab. The first element isolation groove 270A is provided to pn-separate the semiconductor layer 40 for each element immediately after the formation of the semiconductor layer 40.

  The second element isolation groove 270B is a groove having a depth reaching the first element isolation groove 270A from the surface of the n-type layer 43 (surface opposite to the light emitting layer 42 side). The second element isolation groove 270B has a frame shape along the outer periphery of the element. Accordingly, the first element isolation groove 270A and the second element isolation groove 270B are integrally configured as an element isolation groove 270, and the element isolation groove 270 penetrates the semiconductor layer 40. The element isolation groove 270 isolates the semiconductor layer 43 for each element. Further, the protective film 280 is exposed on the bottom surface 270Ba of the second element isolation groove 270B, and only the side surface of the n-type layer 43 in the semiconductor layer 40 is exposed on the side surface 270Bb.

For the protective film 280, SiO ₂ , TiO ₂ , ZrO ₂ , Al ₂ O ₃ , Si _x N _y , SiO _x N _y, or the like can be used. Moreover, the composite layer of these materials may be sufficient. The protective film 280 is formed in a film shape along the bottom and side surfaces of the first element isolation groove 270A. Thus, the p-type layer 41 and the n-type layer 43 exposed on the side surface of the first element isolation groove 270A are covered with the protective film 280.

  The transparent electrode 260 is formed in a film shape continuously on the entire surface of the n-type layer 43 on which the concavo-convex shape 44 is formed, and on the second element isolation groove 270B side surface 270Bb and the bottom surface 270Ba. As the material of the transparent electrode 260, the same material as that of the transparent electrode 60 can be used.

  The n electrode 250 is formed in a region on the transparent electrode 260 excluding a region corresponding to the upper portion of the n-type layer 43. That is, it is formed continuously on the region corresponding to the upper portion of the protective film 280 of the transparent electrode 260 and on the side surface 270Bb of the second element isolation groove 270B and sandwiching the transparent electrode 260.

  The group III nitride semiconductor light-emitting device of Example 3 described above can achieve the same effects as the group III nitride semiconductor light-emitting device of Example 1. That is, since the n-electrode 250 is not located on the n-type layer 43 that is the light extraction surface, there is nothing that hinders light extraction, and the light extraction efficiency is improved. In addition, a transparent electrode 260 is formed between the side surface of the n-type layer 43 and the n-electrode 250, and the transparent electrode 260 is continuous with the entire surface of the n-type layer 43, so that electrons are diffused by the transparent electrode 260. Thus, electrons can be efficiently injected into the n-type layer 43, and the uniformity of light emission and the light emission efficiency are improved.

  In the group III nitride semiconductor light emitting device of Example 3, the uneven shape 44 is provided on the surface of the n-type layer 43, but it may be left flat without being provided. The transparent electrode 260 is also formed on the second element isolation groove 270B side surface 270Bb so that the transparent electrode 260 is positioned between the n electrode 250 and the n-type layer 43 side surface. The n electrode 250 and the n-type layer 43 may be configured to be in direct contact with each other only on the surface of the layer 43.

  Next, the manufacturing process of the group III nitride semiconductor light-emitting device of Example 3 will be described with reference to the drawings.

  The steps up to the semiconductor layer 40 forming step (step of FIG. 2.A) in the manufacturing process of the group III nitride semiconductor light emitting device of Example 1 are the same steps, and thus the description thereof is omitted.

(Step of forming first element isolation groove 270A)
After the formation process of the semiconductor layer 40, the pn-isolated region of the semiconductor layer 40 is dry-etched until reaching the n-type layer 43 from the surface of the p-type layer 41. Thus, a first element isolation groove 270A for pn-isolating the semiconductor layer 40 for each element is formed (FIG. 6.A).

(Protective film 280 forming step)
Next, a protective film 280 is formed in a film shape along the side surface 270Ab and the bottom surface 270Aa of the first element isolation groove 270A by using CVD, sputtering, and photolithography (FIG. 6.B). The protective film 280 is not formed on the surface of the p-type layer 41, but is exposed.

(P-electrode 30 formation process, support 10 bonding process, laser lift-off process)
Next, the p-electrode 30 is formed on the p-type layer 41, the support 10 and the p-electrode 30 are bonded via the bonding layer 20, and the sapphire substrate 90 is removed by laser lift-off (FIG. 6.C). These steps are the same as those in the first embodiment, and details are omitted.

(Second element isolation groove 270B forming step)
Next, the element isolation region (the region overlapping with the first element isolation groove 270A in plan view) is dry-etched from the surface side of the n-type layer 43 exposed by laser lift-off until it reaches the protective film 280, and the second element isolation groove 270B is formed (FIG. 6.D). The semiconductor layer 40 penetrates through the second element isolation groove 270B and the first element isolation groove 270A and is separated for each element.

(Uneven shape 44 forming step)
Next, the surface of the n-type layer 43 is wet-etched with a TMAH aqueous solution to form an uneven shape 44 on the surface of the n-type layer 43 (FIG. 6.E). The formation of the concavo-convex shape 44 may be performed after the laser lift-off process and before the formation of the second element isolation groove 270B.

(Transparent electrode 260 forming step)
Next, the entire surface of the surface of the n-type layer 43 on which the concavo-convex shape 44 is formed, the side surface of the n-type layer 43 exposed to the side surface 270Bb of the second element isolation groove 270, and the bottom surface of the second element isolation groove 270B by sputtering the transparent electrode 260 A continuous film is formed on the protective film 280 exposed to 270Ba (FIG. 6.F). The transparent electrode 260 may be formed before the formation of the second element isolation groove 270 </ b> B as long as the uneven shape 44 is formed.

(N-electrode 250 formation process)
Next, by using sputtering or vapor deposition and a lift-off method, the region corresponding to the side surface 270Bb of the second element isolation groove 270B with the transparent electrode 260 interposed therebetween and the region continuous on the protective film 280 are in contact with the transparent electrode 60. The electrode 250 is formed (FIG. 6.G).

  Next, the support 10 of Example 1 is polished and thinned, a back electrode (not shown) is formed on the back of the support 10, and element separation is performed by laser dicing. As described above, the Group III nitride semiconductor light-emitting device of Example 3 is manufactured.

  The manufacturing method of the group III nitride semiconductor light emitting device of Example 3 described above has the following advantages. In the first embodiment, the protective film 80 is formed so as to cover a part of the side surface of the n-type layer 43 and to expose the other region without covering it. For this reason, it is necessary to accurately control the pattern of the protective film 80. On the other hand, in Example 3, the protective film 280 can be formed on the entire side surface of the first element isolation groove 270A, and it is not necessary to expose a part of the side surface of the first element isolation groove 270A. Therefore, in the third embodiment, accurate pattern control is not necessary as compared with the formation of the protective film 80 of the first embodiment, and the protective film 280 can be easily formed. In addition, since only the side surface of the n-type layer 43 can be exposed on the side surface by the second element isolation groove 270B, the n-electrode 250 having a contact on the side surface can be easily formed.

  In the first to third embodiments, the planar pattern of the element isolation groove is a frame shape along the outer periphery, but is not necessarily limited to such a pattern. The planar pattern of the element isolation trench may be a comb-like shape, a zigzag shape, a stripe shape, a lattice shape, or the like. As an example, FIG. 8 shows an example in which the pattern of the element isolation groove 70 is modified in the group III nitride semiconductor light emitting device of the first embodiment. FIG. 8 is a plan view of the group III nitride semiconductor light emitting device of Example 1 as viewed from above. FIG. 8A shows a comb-like pattern for the element isolation groove 70, and FIG. 8B shows a zigzag pattern. 8C shows a stripe pattern, and FIG. 8D shows a lattice pattern. If the element isolation groove 70 is formed of these patterns, the area of the side surface of the element isolation groove 70 is increased as compared with the case where the pattern is simply a frame shape as shown in FIG. For this reason, the area where the n-electrode 50 contacts the side surface of the n-type layer 43 also increases, and an improvement in light emission efficiency can be expected. In addition, since the distance from the side surface of the element isolation groove 7 to the center part of the element is shortened, the current diffusibility to the center part of the element is improved, the current can be efficiently diffused in the direction of the element surface, and the light emission is uniform. Can be expected to improve.

  Moreover, in Examples 1-3, although the laser lift-off is used for the removal of the sapphire substrate which is a growth substrate, the buffer layer which can be dissolved in a chemical | medical solution is formed between a sapphire substrate and an n-type layer, and is supported. You may use the chemical lift-off which isolate | separates and removes a sapphire substrate by melt | dissolving a buffer layer with a chemical | medical solution after joining with a body.

  In the first to third embodiments, the element isolation grooves 70 and 270 penetrate the semiconductor layer. However, the element separation grooves 70 and 270 do not necessarily have to penetrate, and may be any element that divides the light emitting layer for each element.

  In Examples 1 to 3, the protective films 80 and 280 for preventing a short circuit between the p-type layer and the n-type layer are provided, but the n-electrodes 50, 150, and 250 are changed from the p-type layer to the n-type layer. The protective films 80 and 280 are not necessarily required if they are formed only on the side surfaces of the n-type layer without being formed across the layers.

  The present invention is also applicable to structures in which the positions of the p-type layer and the n-type layer are switched in the first to third embodiments.

  The group III nitride semiconductor light-emitting device of the present invention can be used for lighting devices, display devices, and the like.

10: support 20: bonding layer 30: p electrode 40: semiconductor layer 41: p-type layer 42: light-emitting layer 43: n-type layer 50, 150, 250: n-electrode 60, 160, 260: transparent electrode 70, 270: Element isolation groove 80, 90, 280: Protective film 270A: First element isolation groove 270B: Second element isolation groove

Claims (7)

A conductive support; a first electrode located on the support; a first conductive type first layer comprising a group III nitride semiconductor located on the first electrode in sequence; a light emitting layer; In a group III nitride semiconductor light-emitting device having a semiconductor layer that is a second layer of a second conductivity type opposite to the conductivity type,
An element isolation groove for dividing the light emitting layer for each element;
A second electrode formed on at least a partial region of the side surface of the second layer exposed on the side surface of the element isolation trench and not formed on the second layer;
I have a,
The element isolation groove is
A first element isolation groove having a depth reaching the second layer from a surface opposite to the light emitting layer side of the first layer;
A second element isolation groove having a depth reaching the first element isolation groove from a surface of the second layer opposite to the light emitting layer side;
Is composed of
An insulating first protective film for preventing a short circuit between the first layer and the second layer on a side surface of the first element isolation groove;
A group III nitride semiconductor light emitting device characterized by the above. A transparent electrode continuously formed on a surface of the second layer opposite to the light emitting layer side and a region of the side surface of the semiconductor layer where the second layer is exposed;
The second electrode is in contact with the side surface of the second layer through the transparent electrode.
III-nitride semiconductor light emitting device according to claim 1, characterized in that. A transparent electrode formed on the surface of the second layer opposite to the light emitting layer side and connected to the second electrode;
The second electrode is in direct contact with the side surface of the second layer;
The group III nitride semiconductor light-emitting device according to claim 1 . An insulating second protective film formed on the surface of the second layer opposite to the light emitting layer side;
III-nitride semiconductor light emitting device according to claim 1, characterized in that. The group III nitride semiconductor light-emitting device according to any one of claims 1 to 4 , wherein an uneven shape is formed on a surface of the second layer opposite to the light emitting layer side. element. It said first conductivity type p-type, the second conductivity type III nitride semiconductor light-emitting device according to any one of claims 1 to 5, characterized in that an n-type. Forming the semiconductor layer by sequentially forming the second layer, the light emitting layer, and the first layer made of a group III nitride semiconductor on a growth substrate; and forming the first electrode on the first layer; The method for manufacturing a group III nitride semiconductor light emitting device according to claim 4, further comprising a step of removing the growth substrate by substrate lift-off after joining the first electrode and the support.
A first element isolation groove forming step of forming the first element isolation groove and performing pn separation after the formation of the first layer and before the formation of the first electrode;
A first protective film forming step of forming the first protective film so as to cover a side surface of the first element isolation groove after the first element isolation groove forming step and before forming the first electrode;
A second element isolation groove forming step of forming the second element isolation groove after the growth substrate is removed, penetrating the semiconductor layer, and separating the semiconductor layer for each element;
A second electrode forming step of forming the second electrode on the side surface of the second layer exposed by the second element isolation groove after the second element isolation groove forming step;
A method for producing a Group III nitride semiconductor light-emitting device, comprising:

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