JP5721817B2 - Cathode - Google Patents

Description

The present invention relates to a cathode used in a film forming apparatus using a sputtering method.
This application claims priority based on Japanese Patent Application No. 2011-091188 for which it applied on April 15, 2011, and uses the content here.

In the semiconductor device field or the flat panel display (FPD) field, a sputtering apparatus is used as an apparatus for forming various thin films.
In a general sputtering apparatus, a cathode for sputtering is provided in a chamber, and an object to be processed is arranged so as to face a target attached to the cathode at a predetermined interval in a decompressed chamber.
Next, an inert gas (for example, argon gas) is introduced into the chamber, a negative voltage is applied to the target to discharge, and the inert gas ionized by the discharge collides with the target.
And the film-forming process is performed by making the particle which jumps out of a target adhere to a to-be-processed object.

FIG. 4A shows an example of a conventional film forming apparatus 600 using a sputtering method (see Patent Document 1).
FIG. 4B is an enlarged view showing the target and the member C arranged in the vicinity thereof in each of the plurality of chambers 601 in FIG. 4A (see Patent Document 2).
As shown in FIG. 4B, the target includes a backing plate 604 and a base material 605 disposed on the surface of the backing plate 604. The cathode body 610 for applying a sputtering voltage to the target is attached to the target using a plurality of bolt members.
The cathode body 610 is attached to a cathode attachment flange 611 disposed in the chamber 601 using a plurality of bolt members via an insulating plate 612. The cathode mounting flange 611 is grounded.

Inside the backing plate 604, a magnetic field generation unit H that generates a leakage magnetic flux on the surface of the base material 605 is provided.
In addition, in the backing plate 604, a circulation flow path including a flow path 608a into which cooling water is introduced and a flow path 608b from which cooling water is led out is provided in order to cool the target.
The backing plate 604 and the cathode body 610 are covered with a ground shield 601a. The ground shield 601a has an opening that exposes the target to a space (deposition space) in the chamber.
The ground shield 601a suppresses discharge generated in members other than the target among the members facing the film formation space, and is usually attached to the chamber (wall portion) 601 using a plurality of bolt members in a grounded state. It has been.

By the way, in the conventional film-forming apparatus using sputtering method, there is only one kind of base material of the sputtering target with which the cathode provided in one chamber is equipped. In one chamber, only a film forming process using one kind of base material is performed.
Therefore, when performing a plurality of types of film formation continuously, it is necessary to use separate chambers corresponding to the types of film formation, and it is necessary to provide a plurality of spaces in which the chambers are installed.
In addition, every time processing is completed, it is necessary to transfer the object to be processed to a chamber for performing the next processing. Therefore, the time required for the work to transport the object to be processed and the time required for the work (process) to exhaust the gas in the chamber in accordance with the process of carrying the object in and out of the chamber occur. The time from the end of the process to the start of the next process becomes longer. As a result, the time required for the film forming process is shortened.

JP 2009-280834 A JP 2003-328119 A

  The present invention has been made in view of such circumstances, and is a cathode used in a film forming apparatus by sputtering, and can perform two different types of sputtering processes in one chamber continuously. The object is to provide a possible cathode.

The cathode of one embodiment of the present invention includes a first main surface, a second main surface located on the side opposite to the first main surface, a first side surface, and a second side surface located on the side opposite to the first side surface. A backing plate having a first base material disposed on the first main surface, a second base material disposed on the second main surface, and the backing from the first side surface toward the second side surface. A rotating shaft that penetrates the plate, a target provided in the film formation space, a control unit that rotates the rotating shaft and supplies power used for sputtering to the target via the rotating shaft; as the leakage flux in the first workpiece or the second workpiece is generated, seen including a magnetic field generator provided in a position close to the surface of the backing plate away from the film forming space, the magnetic field The generator is outside the backing plate and When magnetic flux is generated in the first base material, it is arranged at a position close to the second base material, and when magnetic flux leakage is generated in the second base material, it is close to the first base material. Has been placed.

  In the cathode of one aspect of the present invention, the magnetic field generation unit retracts the magnetic field generation unit outside the rotation radius of the target when the target rotates, and the magnetic field generation unit when the rotation ends. It is preferable to provide a retracting drive unit that returns to the original position.

  In the cathode according to one aspect of the present invention, the magnetic field generation unit swings the magnetic field generation unit in at least one of a direction perpendicular to the longitudinal direction of the target and a direction parallel to the longitudinal direction of the target. It is preferable to include a dynamic drive unit.

  In the cathode of one aspect of the present invention, it is preferable that the cathode includes a circulation channel that is provided inside the backing plate, is formed at a position close to the first main surface or the second main surface, and in which cooling water flows. .

  In the cathode of one aspect of the present invention, it is preferable that the control unit circulates cooling water through the rotation shaft and through the circulation channel.

  In the cathode of one aspect of the present invention, the backing plate has a third side surface different from the first side surface and the second side surface, and an adhesion preventing plate is disposed on the third side surface via an insulating member. It is preferable that

The cathode of one embodiment of the present invention includes a sputtering target in which base materials are individually arranged on two main surfaces. And it is possible to rotate a target with the rotating shaft provided so that it might penetrate the backing plate toward the 2nd side surface from the 1st side surface.
By rotating the target (backing plate), the main surface (first main surface) facing the object to be processed and the main surface (second main surface) not facing the object to be processed in the same chamber. ) And can be changed (exchanged). That is, both of the two main surfaces of the backing plate can be used as the sputtering process surface, and both of the base materials arranged on the two main surfaces can be applied to the sputtering process.

  Therefore, by performing two types of film forming processes in the same chamber, the space for installing the chambers necessary for the film forming process is reduced as compared with the prior art using a separate chamber for each type of film forming process. be able to.

In addition, after performing the first film forming process using the first base material (first base material), the object to be processed is subjected to the second formation using the second base material (first base material). There is no need to transfer to a chamber for film processing. Therefore, unlike the prior art, there is no time required for transporting the object to be processed, and the process of exhausting the gas in the chamber in accordance with the process of carrying the object in and out of the chamber Time required for (process) does not occur.
Therefore, it is possible to shorten the time from the end of the first film forming process (first type film forming process) to the start of the second film forming process (second type film forming process, next film forming process). In addition, the time required for the film formation process can be set longer than in the case of using the conventional technique.

It is sectional drawing which shows the film-forming apparatus provided with the cathode of embodiment of this invention. It is a perspective view which shows the cathode of embodiment of this invention connected to the control part. It is a figure which shows the cathode of embodiment of this invention, Comprising: It is sectional drawing corresponding to a surface perpendicular | vertical to a rotating shaft. It is process drawing which shows the manufacturing method of the target used for embodiment of this invention. It is process drawing which shows the manufacturing method of the target used for embodiment of this invention. It is process drawing which shows the manufacturing method of the target used for embodiment of this invention. It is process drawing which shows the manufacturing method of the target used for embodiment of this invention. It is process drawing which shows the manufacturing method of the target used for embodiment of this invention. It is process drawing which shows the manufacturing method of the target used for embodiment of this invention. It is a figure which shows the target used in the modification of embodiment of this invention, Comprising: It is sectional drawing corresponding to a surface perpendicular | vertical to a rotating shaft. It is sectional drawing which shows the film-forming apparatus provided with the cathode concerning a prior art. It is a figure which shows the cathode which concerns on a prior art, Comprising: It is sectional drawing corresponding to a surface perpendicular | vertical to a longitudinal direction.

  Hereinafter, based on a preferred embodiment, an embodiment of the present invention will be described with reference to the drawings. In each drawing, the dimensions and ratios of the components are appropriately changed from the actual ones in order to make the components large enough to be recognized on the drawings.

<Embodiment of a film forming apparatus provided with a cathode>
FIG. 1A is a diagram illustrating a configuration of a film forming apparatus 100 including a cathode 120 according to an embodiment of the present invention.
The film forming apparatus 100 includes a sputtering chamber 101 and a cathode 120.
An exhaust device (exhaust portion) P for exhausting the inside of the chamber is attached to the wall portion of the chamber 101.
The cathode 120 includes a sputtering target C, a control unit E connected to the target C, and a magnetic field generation unit H.
The control part E has a rotation drive part, an electric power supply part, and a cooling water circulation part. The rotation drive unit rotates the rotation shaft provided in the target C. The power supply unit applies a voltage (power) used for sputtering to the target C or grounds the target C. That is, the power supply unit of the control unit E performs switching of power supply to the target C. The cooling water circulation unit supplies cooling water used for controlling the temperature of the target C to the cathode 120 and discharges the cooling water from the cathode 120.
The target C is disposed in the chamber 101 at a position facing a table (support table) 103 that supports a substrate to be processed (object to be processed) 102. The support base 103 is grounded through the grounding portion.

  The target C includes a backing plate 104 having a flat shape, a first base material 105 disposed on a first main surface 104a (one main surface) of the backing plate 104, and a second main surface 104b (the other main surface). ) And the second base material 106 arranged.

  As a material constituting the backing plate 104, a material having high conductivity, thermal conductivity, and low gas releasing property is desirable, and copper or stainless steel is mainly used.

  As the first base material 105 and the second base material 106, a material of a film formed on the substrate to be processed 102 such as a metal or an insulator is used. The first base material 105 and the second base material 106 may be made of the same material or different materials.

The magnetic field generation unit H generates a film formation space 50 (a region where sputtering is performed) so that a leakage magnetic flux is generated on the surface (the first base material 105 or the second base material 106) of the backing plate close to the film formation space 50. ) And a position close to the surface of the backing plate 104 (on the non-sputtering surface side).
In the following description, the “non-sputtering surface” of the backing plate 104 is the first main surface 104a or the second main surface 104b and is a base material not used for sputtering (the first base material 105 or the second base surface 104b). This means the main surface on which the base material 106) is placed.
The “sputtering surface” of the backing plate 104 is the first main surface 104a or the second main surface 104b, and a base material (first base material 105 or second base material 106) used for sputtering is placed on the backing plate 104. It means a main surface that is placed at a position close to the film formation space 50.
Such “non-sputtering surface” and “sputtering surface” are switched as the backing plate 104 rotates. When the first main surface 104a is a non-sputtering surface, the second main surface 104b is sputtered. When the first main surface 104a is a processing surface and the first main surface 104a is a sputtering processing surface, the second main surface 104b is a non-sputtering processing surface.
A part of the magnetic flux generated by the magnetic field generation unit H penetrates the backing plate 104 from the non-sputtering processing surface toward the sputtering processing surface, and the base material (FIGS. 1A to 1D) arranged on the sputtering processing surface of the backing plate 104. In 1C, it leaks to the surface of the first base material 105).
In the region where the magnetic flux leaks, the base material is intensively sputtered by converging the plasma, so that film formation can be performed at high speed.

When the sputtering process is performed using the first base material 105, the magnetic field generation unit H is disposed at a position close to the second base material 106 and separated from the target C, and the leakage magnetic flux is transferred to the first base material 105. Generated on the surface of 105.
In addition, when performing the sputtering process using the second base material 106, the magnetic field generation unit H is disposed so as to be close to the first base material 105 and to be separated from the target C, and to cause the leakage magnetic flux to be It is generated on the surface of the base material 105.

FIG. 1B is an enlarged perspective view showing a target C constituting the cathode 120 according to the embodiment of the present invention.
The backing plate 104 has a rotating shaft 107 that is a rotating shaft parallel to the longitudinal direction L thereof. The rotating shaft 107 passes through the backing plate 104 from the first side surface 111 (one side surface) of the backing plate 104 toward the second side surface 112 (the other side surface). The rotating shaft 107 is electrically connected to the control unit E and rotates using the control unit E.
Then, the backing plate 104 rotates in conjunction with the rotation of the rotating shaft 107. In order to achieve stable rotation, it is desirable that the rotation shaft penetrates so as to coincide with the center of gravity of the backing plate 104.

When performing the sputtering process, it is desirable that the magnetic field generation unit H is disposed at a position close to the target C. However, in order to rotate the target C, the magnetic field generation unit H and the magnetic field generation unit H are backed up so as not to prevent the rotation. It is necessary to leave a distance from the plate 104.
Therefore, the magnetic field generation unit H according to the embodiment of the present invention includes a retract drive unit H1. The retreat drive unit H1 is a device that controls the position of the magnetic field generation unit H, and normally arranges the magnetic field generation unit H at a position close to the target C. Further, when the target C rotates, the retreat drive unit H1 retreats the magnetic field generation unit H outside the rotation radius of the target C. In addition, after the rotation of the target C is completed, the retracting drive unit H1 returns the target C to a normal position (position close to the target C, inside the rotation radius of the target C).

  In addition, the magnetic field generation unit H according to the embodiment of the present invention may be usually located outside the rotation radius of the target C. In this case, only during the sputtering process, the retracting drive unit H1 moves the magnetic field generating unit H to a position close to the target C, and after the sputtering process is completed, the retracting drive unit H1 moves the magnetic field generating unit H to the normal position. You may return to.

Further, the magnetic field generation unit H includes a swing drive unit H2. The swing drive unit H2 swings the magnetic field generation unit H in a direction parallel to the main surfaces (104a, 104b) of the backing plate 104. Further, the swing driving unit H2 swings the magnetic field generating unit H in at least one of a direction perpendicular to the longitudinal direction L of the target C and a direction parallel to the longitudinal direction L of the target C.
By this swinging, the magnetic flux generated by the magnetic field generation unit H can be uniformly leaked to the surface of the base material disposed at a position close to the sputtering processing surface.
By uniformly generating the leakage magnetic flux, a region where the plasma converges is uniformly formed on the surface of the base material.
Therefore, the erosion generated on the surface of the base material by the sputtering process is made uniform, and the utilization efficiency of the target C can be improved.
And the film-forming process which improved the uniformity of in-plane distribution can be performed with respect to the surface of the to-be-processed substrate 102. FIG.

FIG. 1C is a view showing the target C constituting the cathode according to the embodiment of the present invention shown in FIG. 1B, and is a cross-sectional view corresponding to a plane perpendicular to the longitudinal direction L thereof.
In the backing plate 104, a circulation channel (first circulation channel and second circulation channel) formed at a position (near) near the second main surface 104b and configured by the channels 108a and 108b is formed. ing. Cooling water flows through the circulation channel.
The cooling water is introduced from one of the channels 108a and 108b and led out from the other. By flowing the cooling water (refrigerant) through the circulation channels 108a and 108b, the temperature rise of the first base material 105 and the second base material 106 during the sputtering process can be suppressed.

As shown in FIGS. 1B and 1C, the rotation shaft 107 is connected to the control unit E.
A sputtering voltage to be applied to the backing plate 104 is supplied from the control unit E to the backing plate 104 via a power supply line provided in the rotating shaft 107.
Further, the cooling water flowing through the circulation channels 108 a and 108 b is supplied from the control unit E to the circulation channel via a cooling water supply and discharge line provided in the rotating shaft 107.

As shown in FIGS. 1B and 1C, a deposition preventing plate 109 is provided on the third side surface 113 parallel to the longitudinal direction L of the backing plate 104.
The deposition preventing plate 109 is grounded and prevents particles generated during the sputtering process from entering the side surface of the backing plate.
In addition, an insulating member 109a is disposed between the deposition preventing plate 109 and the backing plate 104, and the insulating member 109a prevents the deposition preventing plate 109 from being damaged by a voltage supplied during sputtering.

The cathode according to the embodiment of the present invention includes a sputtering target provided on each of the two main surfaces of the backing plate 104 and having a base material disposed thereon.
And this cathode can rotate a target by the rotating shaft which penetrates a target toward the 2nd side 112 from the 1st side 111.
By rotating the target, the main surface (first main surface) facing the object to be processed and the main surface (second main surface) not facing the object to be processed are changed in the same chamber. (Replacement). That is, both of the two main surfaces of the backing plate can be used as the sputtering process surface, and both of the base materials arranged on the two main surfaces can be applied to the sputtering process.

  Therefore, by performing two types of film forming processes in the same chamber, the space for installing the chambers necessary for the film forming process is reduced as compared with the prior art using a separate chamber for each type of film forming process. be able to.

In addition, after performing the first film forming process using the first base material (first base material), the object to be processed is subjected to the second formation using the second base material (first base material). There is no need to transfer to a chamber for film processing. Therefore, unlike the prior art, there is no time required for transporting the object to be processed, and the process of exhausting the gas in the chamber in accordance with the process of carrying the object in and out of the chamber Time required for (process) does not occur.
Therefore, it is possible to shorten the time from the end of the first film forming process to the start of the second film forming process (next film forming process), and the time required for the film forming process is used. It can be provided longer than the case.

  Further, in the configuration of the embodiment of the present invention, the magnetic field generation unit H is not provided inside the backing plate 104 but is disposed at a position separated from the backing plate 104. Therefore, the leakage magnetic flux can be generated on the surfaces of the two base materials using only one magnetic field generation unit H.

Further, when the second base material 106 is made of the same material as the first base material 105, one target is used as compared with the case where the base material arranged only on one main surface of the backing plate is used as in the prior art. The per-use period can be extended.
Thereby, the frequency | count of replacement | exchange of a base material can be reduced, and the frequency | count of the operation | work (process) which exhausts the gas in a chamber generated with replacement | exchange can be reduced.

Further, when each of the first base material 105 and the second base material 106 is made of a material that forms the lower layer and the upper layer of the laminated film formed on the substrate 102, only one target is used, Two film-forming processes can be performed continuously.
Then, by performing two successive film formation processes in the same chamber, the gas in the chamber is exhausted between the film formation process using the first base material 105 and the film formation process using the second base material 106. A process (process) such as a process and a transfer of a substrate to be processed becomes unnecessary, and the time required for such a process (process) can be shortened.

<Embodiment of target manufacturing method>
A method for manufacturing a target having the configuration of the embodiment of the present invention will be described with reference to process diagrams shown in FIGS. 2A to 2F.
First, in the first step shown in FIG. 2A, the first base material 105 is disposed so as to face the first main surface 104a of the backing plate 104, and the second base material 106 is disposed on the second main surface 104b of the backing plate 104. Arrange to face each other.

Next, in the second step shown in FIG. 2B, the first base material 105 is joined to the first main surface 104a of the backing plate 104 using a first adhesive member (not shown).
More specifically, the first adhesive member is applied to the first main surface 104a of the backing plate 104 forming the bonding surface, and the backing plate 104 and the first adhesive member are heated and melted at a temperature equal to or higher than the melting point.
Then, the first base material 105 is disposed on the melted first adhesive member, and is cooled to room temperature in a state where the melted first adhesive member is sandwiched between the first base material 105 and the backing plate 104.
The first adhesive member used in this step is preferably a low melting point metal, for example, indium.

In the second step, the backing plate 104 and the first base material 105 are joined in a high temperature state, and cooled to room temperature in the joined state.
And the backing plate 104 is compressed with cooling.
At this time, since the first base material 105 is bonded only to the first main surface 104a, the compression rate of the backing plate 104 on the first main surface 104a and the compression rate of the backing plate 104 on the second main surface 104b are Different.
Therefore, the backing plate 104 has a shape in which the first main surface 104a or the second main surface 104b is warped in a convex shape.

  FIG. 2B shows an example in which the backing plate 104 has a convex warp on the first main surface 104a. However, depending on the combination of materials constituting the backing plate 104 and the first base material 105, In some cases, a convex warp may occur on the two principal surfaces 104b.

Next, in the third step shown in FIG. 2C, the backing plate 104 warped by the joining of the first base material 105 and the backing plate 104 is shaped so as to have a flat shape.
The method of shaping the backing plate 104 is not limited to a specific method, but in the present embodiment, pressure is applied to the second main surface 104b of the backing plate 104 in a direction opposite to the direction in which the warping occurs. Use mechanical correction methods.

Next, in the fourth step shown in FIG. 2D, the second base material 106 is joined to the second main surface 104b of the backing plate 104 using a second adhesive member (not shown).
More specifically, the second adhesive member is applied to the second main surface 104b of the backing plate 104 that forms the bonding surface, and the backing plate 104 and the second adhesive member are heated and melted at a temperature equal to or higher than the melting point.
Then, the second base material 106 is disposed on the melted second adhesive member, and is cooled to room temperature in a state where the melted second adhesive member is sandwiched between the second base material 106 and the backing plate 104.
The second adhesive member used in this step is preferably a low melting point metal, for example, indium.

In the fourth step, the backing plate 104 and the second base material 106 are bonded in a high temperature state and cooled to room temperature while being bonded.
And the backing plate 104 is compressed with cooling.
At this time, since the first base material 105 is joined to the first main surface 104a and the second base material 106 is joined to the second main surface 104b, the compression rate of the backing plate 104 on the first main surface 104a. And the compression rate of the backing plate 104 on the second main surface 104b is different.
Therefore, the backing plate 104 has a shape in which the first main surface 104a or the second main surface 104b is warped in a convex shape.

Therefore, in the fifth step shown in FIG. 2E, the backing plate 104 warped by the joining of the second base material 106 and the backing plate 104 is shaped so as to have a flat shape.
Although the method of shaping the backing plate 104 is not limited to a specific method, in the present embodiment, a method of mechanically correcting the backing plate 104 by applying pressure in a direction opposite to the direction in which the warping occurs. Is used.

  Then, in the sixth step shown in FIG. 2F, the adhesion preventing plate 109 is joined to the side surface parallel to the longitudinal direction L of the backing plate 104 by using an insulating adhesive member (insulating member) 109a. The target of the embodiment is formed.

  Here, an example is shown in which the first base material 105 and the second base material 106 are joined to the backing plate 104 in this order. However, the joining order may be reversed, or the first base material 105 and the second base material 106 may be joined to both sides of the backing plate 104. Alternatively, the first base material 105 and the second base material 106 may be bonded together and then mechanically corrected.

According to the target manufacturing method of the embodiment of the present invention, it is not necessary to provide a fixing region in the base material as in the case where the base material is fixed to the backing plate using a fixing member such as a bolt or a clamp.
Therefore, the entire region of the first base material 105 and the second base material 106 arranged on each main surface of the backing plate 104 can be used for sputtering.

In the target manufacturing method according to the embodiment of the present invention, after the base material is bonded to the first main surface 104a or the second main surface 104b of the backing plate, the backing plate warped by the bonding becomes a flat shape. Shape as follows.
Therefore, a target in which a base material having a flat surface is bonded to each of the two main surfaces of the backing plate can be manufactured.
Accordingly, since the base material and the substrate to be processed are arranged in parallel, the sputtered particles popping out from the base material can be uniformly attached to the processing surface of the substrate to be processed to form a film.

  2A to 2F exemplify a method of joining the first base material 105 and the second base material 106 to each main surface of the backing plate 104 using an adhesive member. As another example, there is a method of fixing the first base material 105 and the second base material 106 to each main surface of the backing plate 104 using a fixing member such as a bolt or a clamp.

When a fixing member such as a bolt or a clamp is used, warpage due to a difference in thermal expansion coefficient between the first base material 105 and the backing plate or a difference in thermal expansion coefficient between the second base material 106 and the backing plate occurs. There is no.
Therefore, the steps corresponding to the second step and the fourth step are not necessary, and the target can be manufactured by a more simplified process.

<Modification>
FIG. 3 is a view showing a modification of the target and is a cross-sectional view corresponding to a plane perpendicular to the rotation axis.
The backing plate 104 of the above embodiment is formed of a single plate, whereas the backing plate 214 of a modified example is formed of a plywood in which two plates (backing plates) 204 and 211 are overlapped.
Inside the backing plate 214 are formed at positions close to the first main surface 214a, which is the outermost surface of the backing plate, and circulation channels 208a, 208b through which cooling water flows, and a second main surface, which is the outermost surface of the backing plate. Circulating flow paths 213a and 213b that are formed near the surface 214b and through which cooling water flows are provided.
In the modification, the other configuration of the target is the same as the configuration of the embodiment of the present invention. In FIG. 3, the same members as those in the above embodiment are denoted by the same reference numerals, and the description thereof is omitted or simplified.

In the configuration of the embodiment of the present invention, the cooling water circulation channels 108 a and 108 b are formed in the backing plate 104 at positions close to either the first main surface 104 a or the second main surface 104 b.
On the other hand, in the configuration of the modified example, the cooling water circulation channels 208a and 208b are formed in the backing plate 214 at positions close to both the first main surface 214a and the second main surface 214b.
Therefore, according to the configuration of the modification, a target having a high cooling function for cooling both the first base material 205 and the second base material 212 can be obtained.

In the modification of the target, a base material used for sputtering is disposed on each of two main surfaces which are the outermost surfaces of the backing plate.
Therefore, in the chamber, after performing the sputtering process using the first base material 205 disposed on the first main surface 214a, the target is reversed and the second base material 212 disposed on the second main surface 214b. Can be used for sputtering.

Therefore, when the second base material 212 is made of the same material as the first base material 205, one target is used as compared with the case where the base material arranged only on one main surface of the backing plate is used as in the prior art. The per-use period can be extended.
Thereby, the frequency | count of replacement | exchange of a base material can be reduced, and the frequency | count of the operation | work (process) which exhausts the gas in a chamber generated with replacement | exchange can be reduced.

In addition, when each of the first base material 205 and the second base material 212 is made of a material that forms a lower layer and an upper layer of a stacked film formed on the substrate to be processed, the two base materials are formed using only one target. Two film forming processes can be performed continuously.
Then, by performing two successive film forming processes in the same chamber, the gas in the chamber is exhausted between the film forming process using the first base material 205 and the film forming process using the second base material 212. A process (process) such as a process and a transfer of a substrate to be processed becomes unnecessary, and the time required for such a process (process) can be shortened.

<Modification of target manufacturing method>
An example of a method for manufacturing a target having the configuration of the modified example will be described.

First, in the first step, the first base material 205 is joined to the first main surface 204a of the backing plate 204 using the first adhesive member.
More specifically, the first adhesive member is applied to the first main surface 204a of the backing plate 204 that forms the bonding surface, and the backing plate 204 and the first adhesive member are heated and melted at a temperature equal to or higher than the melting point.
Then, the first base material 205 is disposed on the melted first adhesive member, and is cooled to room temperature in a state where the melted first adhesive member is sandwiched between the first base material 205 and the backing plate 204.
The first adhesive member used in this step is preferably a low melting point metal, for example, indium.

In the first step, the backing plate 204 and the first base material 205 are bonded in a high temperature state and cooled to room temperature while being bonded.
And the backing plate 204 is compressed with cooling.
At this time, since the first base material 205 is bonded only to the first main surface 204a, the compression rate of the backing plate 204 on the first main surface 204a and the compression rate of the backing plate 204 on the second main surface 204b are Different.
Therefore, the backing plate 204 has a shape in which the first main surface 204a or the second main surface 204b is warped in a convex shape.

Next, in the second step, the backing plate 204 warped by the joining of the first base material 205 and the backing plate 204 is shaped so as to have a flat shape.
The method of shaping the backing plate 204 is not limited to a specific method, but in this modification, a method of mechanically correcting the backing plate 204 by applying pressure in a direction opposite to the direction in which the warping occurs. Is used.

Next, in the third step, the second base material 212 is joined to the first main surface 211 a of the backing plate 211 using the second adhesive member.
More specifically, the second adhesive member is applied to the first main surface 211a of the backing plate 211 that forms the bonding surface, and the backing plate 211 and the second adhesive member are heated and melted at a temperature equal to or higher than the melting point.
Then, the second base material 212 is disposed on the melted second adhesive member, and is cooled to room temperature in a state where the melted second adhesive member is sandwiched between the second base material 212 and the backing plate 211.
The second adhesive member used in this step is preferably a low melting point metal, for example, indium.

Next, in the fourth step, the backing plate 211 warped by the joining of the backing plate 211 and the second base material 212 is shaped so as to have a flat shape.
The method of shaping the backing plate 211 is not limited to a specific method, but in this modification, a method of mechanically correcting the backing plate 211 by applying a pressure in a direction opposite to the direction in which the warping occurs. Is used.

Next, in the fifth step, the backing plate 204 and the backing plate 211 are integrated so that the second major surface 204b of the backing plate 204 and the second major surface 211b of the backing plate 211 face each other.
As a method for integrating the two backing plates, for example, a method in which an adhesive member is disposed between the main surface 204b and the main surface 211b and the two plates are joined to each other can be cited. Alternatively, there is a method in which both the plates are fixed by a fixing member such as a bolt or a clamp in a state where the main surface 204b and the main surface 211b are overlapped.

  Next, in the sixth step, the adhesion preventing plate 209 is joined to the side surface (third side surface 113) parallel to the longitudinal direction of the backing plate 214 using an insulating adhesive member (insulating member) 209a. A variation of the target is formed.

  In addition, a 1st process-a 2nd process and a 3rd process-a 4th process may be performed by changing order, and may be performed simultaneously.

  Further, in the modification of the target, the backing plate 214 is formed in advance by superimposing the two plates 204 and 211, and then the target manufacturing method described above is performed in the same manner as the backing plate 104 in the embodiment of the present invention. It is also formed by using.

According to the modification of the target manufacturing method, it is not necessary to provide a fixing region in the base material as in the case where the base material is fixed to the backing plate using a fixing member such as a bolt or a clamp.
Therefore, the entire area of the first base material 205 and the second base material 212 arranged on the main surface of each backing plate 214 can be used for sputtering.

Further, in a modification of the target manufacturing method, after the base material is bonded to the first main surface 214a or the second main surface 214b of the backing plate, the backing plate warped by the bonding is shaped to have a flat shape. To do.
Therefore, a target in which a base material having a flat surface is bonded to each of the two main surfaces of the backing plate can be manufactured.
Accordingly, since the base material and the substrate to be processed are arranged in parallel, the sputtered particles popping out from the base material can be uniformly attached to the processing surface of the substrate to be processed to form a film.

  The present invention can be widely applied to a case where a film formation process by a sputtering method is performed on an object to be processed.

DESCRIPTION OF SYMBOLS 100 ... Film-forming apparatus, 104 ... Backing plate, 104a, 104b ... Main surface, 105 ... First base material, 106 ... Second base material, 107 ... Rotating shaft, 108a , 108b, a flow path, 109, a deposition plate, 109a, an insulating member, 120, a cathode, C, a target, E, a control unit, H, a magnetic field generation unit, L: Longitudinal direction.

Claims (6)

A backing plate having a second side first main surface, the second main surface located on the opposite side to the first major surface, the first side surface, and the first side surface located on the opposite side, the first A first base material disposed on the main surface; a second base material disposed on the second main surface; and a rotating shaft penetrating the backing plate from the first side surface toward the second side surface. And a target provided in the deposition space,
A controller that rotates the rotating shaft and supplies power used for sputtering to the target via the rotating shaft;
As the leakage flux in the first workpiece or the second workpiece is generated, seen including a magnetic field generator provided in a position close to the surface of the backing plate away from the film forming space,
The magnetic field generation unit is outside the backing plate, and when leakage magnetic flux is generated in the first base material, the magnetic field generation unit is disposed at a position close to the second base material, and the leakage magnetic flux is in the second base material. When produced , the cathode is disposed at a position close to the first base material . The cathode of claim 1 ,
The magnetic field generator is
A retraction drive unit is provided that retracts the magnetic field generation unit outside the rotation radius of the target when the target rotates, and returns the magnetic field generation unit to the original position when the rotation is completed. And cathode. The cathode according to claim 1 or 2 ,
The magnetic field generator is
A cathode comprising: a swing drive unit that swings the magnetic field generating unit in at least one of a direction perpendicular to a longitudinal direction of the target and a direction parallel to the longitudinal direction of the target. The cathode according to any one of claims 1 to 3 ,
A cathode provided inside the backing plate, formed at a position close to the first main surface or the second main surface, and through which a cooling water flows. The cathode according to claim 4 , wherein
The cathode is characterized in that the control unit circulates cooling water in the circulation channel through the rotating shaft. A cathode according to any one of claims 1 to 5 ,
The backing plate has a third side surface different from the first side surface and the second side surface, and a deposition preventing plate is disposed on the third side surface via an insulating member.

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