JP5703365B1 - 微小孔フィルタの製造方法 - Google Patents
微小孔フィルタの製造方法 Download PDFInfo
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- JP5703365B1 JP5703365B1 JP2013267956A JP2013267956A JP5703365B1 JP 5703365 B1 JP5703365 B1 JP 5703365B1 JP 2013267956 A JP2013267956 A JP 2013267956A JP 2013267956 A JP2013267956 A JP 2013267956A JP 5703365 B1 JP5703365 B1 JP 5703365B1
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 18
- 239000000843 powder Substances 0.000 claims abstract description 30
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims abstract description 28
- 239000011324 bead Substances 0.000 claims abstract description 20
- 239000002245 particle Substances 0.000 claims abstract description 16
- 238000005554 pickling Methods 0.000 claims abstract description 11
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 11
- 239000010935 stainless steel Substances 0.000 claims abstract description 11
- 238000010304 firing Methods 0.000 claims description 2
- 238000003825 pressing Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 7
- 239000007789 gas Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 229910001873 dinitrogen Inorganic materials 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000011065 in-situ storage Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/10—Sintering only
- B22F3/11—Making porous workpieces or articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D39/00—Filtering material for liquid or gaseous fluids
- B01D39/14—Other self-supporting filtering material ; Other filtering material
- B01D39/20—Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D39/00—Filtering material for liquid or gaseous fluids
- B01D39/14—Other self-supporting filtering material ; Other filtering material
- B01D39/20—Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
- B01D39/2068—Other inorganic materials, e.g. ceramics
- B01D39/2072—Other inorganic materials, e.g. ceramics the material being particulate or granular
- B01D39/2075—Other inorganic materials, e.g. ceramics the material being particulate or granular sintered or bonded by inorganic agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/14—Ultrafiltration; Microfiltration
- B01D61/147—Microfiltration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0039—Inorganic membrane manufacture
- B01D67/0041—Inorganic membrane manufacture by agglomeration of particles in the dry state
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0039—Inorganic membrane manufacture
- B01D67/0041—Inorganic membrane manufacture by agglomeration of particles in the dry state
- B01D67/00411—Inorganic membrane manufacture by agglomeration of particles in the dry state by sintering
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/022—Metals
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/022—Metals
- B01D71/0221—Group 4 or 5 metals
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/06—Metallic powder characterised by the shape of the particles
- B22F1/068—Flake-like particles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/10—Sintering only
- B22F3/11—Making porous workpieces or articles
- B22F3/1103—Making porous workpieces or articles with particular physical characteristics
- B22F3/1109—Inhomogenous pore distribution
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
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- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/12—Both compacting and sintering
- B22F3/16—Both compacting and sintering in successive or repeated steps
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/20—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces by extruding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
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- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/02—Making metallic powder or suspensions thereof using physical processes
- B22F9/04—Making metallic powder or suspensions thereof using physical processes starting from solid material, e.g. by crushing, grinding or milling
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C33/00—Making ferrous alloys
- C22C33/02—Making ferrous alloys by powder metallurgy
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/02—Cleaning or pickling metallic material with solutions or molten salts with acid solutions
- C23G1/08—Iron or steel
- C23G1/083—Iron or steel solutions containing H3PO4
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/02—Cleaning or pickling metallic material with solutions or molten salts with acid solutions
- C23G1/08—Iron or steel
- C23G1/085—Iron or steel solutions containing HNO3
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/02—Cleaning or pickling metallic material with solutions or molten salts with acid solutions
- C23G1/08—Iron or steel
- C23G1/088—Iron or steel solutions containing organic acids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/02—Details relating to pores or porosity of the membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/02—Details relating to pores or porosity of the membranes
- B01D2325/0283—Pore size
- B01D2325/02834—Pore size more than 0.1 and up to 1 µm
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/02—Making metallic powder or suspensions thereof using physical processes
- B22F9/04—Making metallic powder or suspensions thereof using physical processes starting from solid material, e.g. by crushing, grinding or milling
- B22F2009/043—Making metallic powder or suspensions thereof using physical processes starting from solid material, e.g. by crushing, grinding or milling by ball milling
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2302/00—Metal Compound, non-Metallic compound or non-metal composition of the powder or its coating
- B22F2302/45—Others, including non-metals
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
- B22F2998/10—Processes characterised by the sequence of their steps
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- General Chemical & Material Sciences (AREA)
- Water Supply & Treatment (AREA)
- Ceramic Engineering (AREA)
- Nanotechnology (AREA)
- Filtering Materials (AREA)
- Powder Metallurgy (AREA)
- Measuring Fluid Pressure (AREA)
- Examining Or Testing Airtightness (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
Description
{(P02−P2)/(P01−P1)×1000}×A
本実施形態の製造方法により得られた微小孔フィルタ9種について、測定装置11を用いてコンダクタンスを測定した。結果を図4に示す。
Claims (1)
- 3〜60μmの範囲の粒子径を備えるステンレス鋼の粒子を、ジルコニアビーズを用いるビーズミルで処理し、長径に対する厚さの比(厚さ/長径)で表される扁平度が0.03〜0.4の範囲にある粉末を調製する工程と、
該ビーズミルでの処理により該粉末の表面に付着したジルコニアを酸洗により除去する工程と、
酸洗後の該粉末0.5〜1.0gに10〜15kNの荷重を付加して成形し、円柱状の成形体を得る工程と、
該成形体を10−5〜10−3Paの範囲の真空雰囲気下、1000〜1300℃の範囲の温度に1〜3時間保持して焼成し、焼結体を得る工程と、
該焼結体を、該焼結体の外径に対し0.90〜0.99倍の範囲の内径を備える管に圧入して押し出す工程とを備えることを特徴とする微小孔フィルタの製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013267956A JP5703365B1 (ja) | 2013-12-25 | 2013-12-25 | 微小孔フィルタの製造方法 |
DE112014006056.9T DE112014006056B4 (de) | 2013-12-25 | 2014-11-26 | Verfahren zur Herstellung eines Mikroporenfilters |
CN201480067487.3A CN105814421B (zh) | 2013-12-25 | 2014-11-26 | 微孔过滤器的制造方法 |
PCT/JP2014/081237 WO2015098406A1 (ja) | 2013-12-25 | 2014-11-26 | 微小孔フィルタの製造方法 |
US15/100,066 US10137501B2 (en) | 2013-12-25 | 2014-11-26 | Method for manufacturing micropore filter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013267956A JP5703365B1 (ja) | 2013-12-25 | 2013-12-25 | 微小孔フィルタの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP5703365B1 true JP5703365B1 (ja) | 2015-04-15 |
JP2015125011A JP2015125011A (ja) | 2015-07-06 |
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ID=52875945
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013267956A Active JP5703365B1 (ja) | 2013-12-25 | 2013-12-25 | 微小孔フィルタの製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US10137501B2 (ja) |
JP (1) | JP5703365B1 (ja) |
CN (1) | CN105814421B (ja) |
DE (1) | DE112014006056B4 (ja) |
WO (1) | WO2015098406A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111761069B (zh) * | 2020-09-01 | 2020-12-01 | 西安赛隆金属材料有限责任公司 | 一种制粉设备及方法 |
CN113466101B (zh) * | 2021-06-24 | 2023-05-12 | 华中科技大学 | 渗透率检测设备与检测方法 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56150155A (en) * | 1980-04-22 | 1981-11-20 | Sumitomo Electric Ind Ltd | Preparation of ferrous sintered material |
JPS57169002A (en) * | 1981-04-06 | 1982-10-18 | Nippon Seisen Kk | Sintered body |
JPS59172353U (ja) * | 1983-04-30 | 1984-11-17 | 三菱重工業株式会社 | 真空計較正装置 |
JPH03199331A (ja) * | 1989-12-27 | 1991-08-30 | Mitsubishi Heavy Ind Ltd | 多孔質金属の製造方法 |
JP2000063967A (ja) * | 1998-08-19 | 2000-02-29 | Shinko Res Kk | 中空状金属多孔質体 |
JP2001345238A (ja) * | 2000-06-01 | 2001-12-14 | Showa Kyabotto Super Metal Kk | ニオブまたはタンタル粉末およびその製造方法ならびに固体電解コンデンサー |
JP2011047855A (ja) * | 2009-08-28 | 2011-03-10 | National Institute Of Advanced Industrial Science & Technology | 標準混合ガスリーク用微小孔フィルターの校正方法及び校正装置 |
JP2012154720A (ja) * | 2011-01-25 | 2012-08-16 | National Institute Of Advanced Industrial & Technology | 基準微小ガス流量導入装置 |
JP2013156273A (ja) * | 2009-08-28 | 2013-08-15 | National Institute Of Advanced Industrial & Technology | 予め校正されているガスリーク用微小孔フィルター |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS63185421A (ja) * | 1986-09-11 | 1988-08-01 | Micro Filter Kk | 多孔質フイルタエレメント |
GB8823706D0 (en) * | 1988-10-10 | 1988-11-16 | Alcan Int Ltd | Microfilter device |
CN2133349Y (zh) * | 1992-09-30 | 1993-05-19 | 上海青浦环保设备厂 | 微孔过滤的固液分离装置 |
CN2193199Y (zh) * | 1994-05-06 | 1995-03-29 | 甘国工 | 微孔过滤器件 |
US6630016B2 (en) * | 2002-01-31 | 2003-10-07 | Koslow Technologies Corp. | Microporous filter media, filtration systems containing same, and methods of making and using |
DE102004051900A1 (de) | 2004-10-26 | 2006-04-27 | Robert Bosch Gmbh | Verfahren zur Herstellung von porösen Filterelementen |
US7829012B2 (en) | 2005-12-19 | 2010-11-09 | Worldwide Energy, Inc. Of Delaware | Enhancement of thermal stability of porous bodies comprised of stainless steel or an alloy |
CN101422669B (zh) * | 2008-11-26 | 2012-02-08 | 南昌大学 | 一种亲水性高分子微孔过滤材料的制备方法 |
IT1400278B1 (it) * | 2010-05-14 | 2013-05-24 | K4Sint S R L | Procedimento per la fabbricazione di manufatti sinterizzati |
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2013
- 2013-12-25 JP JP2013267956A patent/JP5703365B1/ja active Active
-
2014
- 2014-11-26 DE DE112014006056.9T patent/DE112014006056B4/de active Active
- 2014-11-26 CN CN201480067487.3A patent/CN105814421B/zh active Active
- 2014-11-26 WO PCT/JP2014/081237 patent/WO2015098406A1/ja active Application Filing
- 2014-11-26 US US15/100,066 patent/US10137501B2/en active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56150155A (en) * | 1980-04-22 | 1981-11-20 | Sumitomo Electric Ind Ltd | Preparation of ferrous sintered material |
JPS57169002A (en) * | 1981-04-06 | 1982-10-18 | Nippon Seisen Kk | Sintered body |
JPS59172353U (ja) * | 1983-04-30 | 1984-11-17 | 三菱重工業株式会社 | 真空計較正装置 |
JPH03199331A (ja) * | 1989-12-27 | 1991-08-30 | Mitsubishi Heavy Ind Ltd | 多孔質金属の製造方法 |
JP2000063967A (ja) * | 1998-08-19 | 2000-02-29 | Shinko Res Kk | 中空状金属多孔質体 |
JP2001345238A (ja) * | 2000-06-01 | 2001-12-14 | Showa Kyabotto Super Metal Kk | ニオブまたはタンタル粉末およびその製造方法ならびに固体電解コンデンサー |
JP2011047855A (ja) * | 2009-08-28 | 2011-03-10 | National Institute Of Advanced Industrial Science & Technology | 標準混合ガスリーク用微小孔フィルターの校正方法及び校正装置 |
JP2013156273A (ja) * | 2009-08-28 | 2013-08-15 | National Institute Of Advanced Industrial & Technology | 予め校正されているガスリーク用微小孔フィルター |
JP2012154720A (ja) * | 2011-01-25 | 2012-08-16 | National Institute Of Advanced Industrial & Technology | 基準微小ガス流量導入装置 |
Also Published As
Publication number | Publication date |
---|---|
DE112014006056T5 (de) | 2016-09-08 |
CN105814421A (zh) | 2016-07-27 |
JP2015125011A (ja) | 2015-07-06 |
US10137501B2 (en) | 2018-11-27 |
CN105814421B (zh) | 2018-03-20 |
US20170028474A1 (en) | 2017-02-02 |
WO2015098406A1 (ja) | 2015-07-02 |
DE112014006056B4 (de) | 2019-03-14 |
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