JP5686398B2 - Environmental tank, environmental device and environmental treatment method - Google Patents

Description

  The present invention relates to an apparatus for environmentally treating an article under certain conditions. More specifically, an apparatus for automatically performing heating, cooling, drying, high humidity, inert gas treatment, etc. on an article is provided.

Articles such as printed circuit boards, silicon wafers, solar cell panels, glass substrates and other electronic substrates are kept in a high temperature environment and / or a low temperature environment for a certain period of time in order to inspect reliability by applying a heat shock. After or after repeating this, the energization characteristics are measured to determine pass / fail. In addition, the printed wiring board after the application of the resist and various articles after the coating are dried while being kept in a constant temperature and / or air blowing environment in order to volatilize the contained solvent. Furthermore, in the case of synthetic resin products, they are put into an environmental device for testing heat resistance, cold resistance, moisture resistance and the like. At this time, it is often desired to continuously test a large number of test pieces efficiently, and automation of environmental tests has been attempted.

In JP 2004-45057 PR, regarding an electronic component testing apparatus, each of a plurality of tray support members passed between the vicinity of the outer periphery of two disk support members rotating around one horizontal axis in an environmental tank, We have proposed a device that hangs a tray that is always level and places electronic components on the tray for testing. As a result, the electronic component is reduced in size compared to the case where the electronic component is horizontally placed on the horizontal belt passed through the conventional long environmental tank (FIG. 3), but the balance is required to place the electronic component on the unstable tray. It is difficult to remove and the horizontal tray must be suspended to the extent that the horizontal tray does not interfere with it. Therefore, in order to process each electronic component defined by JIS standard for a fixed time of 30 to 60 minutes, the number of processing per hour is reduced or the disk radius is increased, and a large number of rotating bodies are arranged side by side. It must be made.

In Japanese Laid-Open Patent Publication No. 2002-67051, a workpiece is placed on a multi-stage turntable provided in a housing, hot air is blown from a rotatable hollow cylindrical shaft having a large number of holes, and heat treatment is performed. The furnace which carries in and carries out a to-be-processed object with a robot through the opening-and-closing mechanism which performs is processed, for example, the to-be-processed object which processed the epoxy resin type adhesion processing is processed. However, when curing a plate-like object such as a printed circuit board made of glass fiber reinforced epoxy resin, there is a gap between the square plate-like object on the turntable, and a wasteful space is provided in the housing. Becomes larger and wastes heat. Further, since a plurality of opening / closing mechanisms (doors) must be provided for each turntable, it is not preferable because the amount of heat leaks from the door of the opening / closing mechanism and its periphery.

Japanese Laid-Open Patent Publication No. 2001-263944 proposed a method of vertically holding a printed circuit board printed on a conventional chain conveyor and introducing it into a drying furnace, and the number of stored sheets was greatly increased. Became higher and the furnace volume became larger. Also, in order to prevent the substrate from dropping from the chain conveyor, the printed circuit board is inserted only into the upper part, and the printed circuit board is taken out when leaving the furnace, so the return chain conveyor is idle and the length of the furnace is increased. A complicated ventilation path structure is unavoidable so as not to provide a useless ventilation path.

Japanese Laid-Open Patent Publication No. 10-213375 relates to a method of standing a plurality of coated articles on a turntable in a hot air dryer and drying them in a batch manner. However, since it is a batch type, it cannot be automatically and continuously dried. .

In each of Documents 1 to 3, samples can be put in one by one, taken out one by one, and continuously operated. However, when a new sample is introduced, the influence of changes in environmental conditions on other samples before and after is unavoidable. For example, in the example of Document 2 shown in FIG. 11, when a new epoxy resin uncured substrate is introduced, the temperature of the substrates already on the left, right, top and bottom is lowered, adversely affecting the thermosetting conditions, and having a certain quality. There is a possibility that the substrate cannot be obtained.
JP 2004-45057 PR Japanese Laid-Open Patent Publication No. 2002-67051 JP 2001-263944 A JP 10-213375

According to the present invention, in a method of processing an article in an environmental tank in which a plurality of article storage units are installed in a circulation mechanism and circulated, the article is carried in and / or out through at least one opening with a door provided in the environmental tank. The environmental air blown in parallel to the partition plate is brought into contact with the article, and the circulation mechanism is intermittently operated for each of the at least one article accommodating portion to stop in front of the opening, In addition, the present invention provides an environmental treatment method, an environmental tank and an automation device for carrying out the treated article and / or carrying in a new article.

The present invention firstly, in an environmental tank having a plurality of article storage portions arranged in a radial direction from one rotating shaft and rotating in the environmental tank, to carry in and / or carry out an article on a side surface of the environmental tank. At least one door opening, a plurality of partition plates rotating in the environmental tank and disposed in the direction of the rotation axis, and the article accommodating portion between the partition plates, and environmental wind is provided to the partition plate An environmental tank is provided in which air is blown in parallel.

The inner wall of the environmental tank is preferably cylindrical so as to accommodate a rotating body having one rotating shaft, a plurality of partition plates, and a plurality of article accommodating portions, but a polygon such as a hexagon, octagon, or dodecagon It may be a cylindrical shape. When the rotation axis is vertical, the ceiling surface of the inner wall has a portion for introducing environmental wind, and the bottom surface has a portion for discharging it. The same applies to the side surface when the rotating shaft cylinder is horizontal. The outer wall of the environmental tank may be of any shape, but a cube is usually preferred. A heat insulating material is inserted between the outer wall and the inner wall to isolate the environment inside and outside the environmental tank.

  When an article is carried into and out of the environmental tank, the rotating shaft is intermittently stopped before the opening, and the opening door is opened for operation. An important point in the present invention is a partition plate, and the rotating shaft side is fixed to the rotating shaft. The function of the partition plate is, for example, when unloading an article that has been processed in a heating environment test and carrying in a new article at room temperature or low temperature, the effect of the cold of the new article on the article that has already been stored and heated. A partition plate is installed in order not to give Therefore, the material of the partition plate is preferably not a metal but a material having low thermal conductivity such as phenol resin, epoxy resin, polycarbonate, foamed polycarbonate, polyphenylene sulfide, foamed polyphenylene sulfide, polyphenylene oxide, and aromatic polyamide fiber board.

  In addition, these two partition plates block the two sides of the opening by the two adjacent partition plates, and alleviate the blowing of environmental wind when the door is opened. Preferably, on the environment wind upstream side and / or downstream side of the outer periphery of the opening, the environment is perpendicular to the partition plate so that the two adjacent partition plates cover one article storage portion. If it fixes to a tank inner wall, it can almost stop that an environmental wind blows off from the open opening part. The lid is attached so as not to contact the rotating partition plate.

  When the rotation shaft is a thin shaft, the distance between the partition plates is small near the center. In order to provide a large number of article storage sections or to enlarge each article storage section, the rotation shaft is preferably a cylindrical body. Further, in order not to introduce wasteful environmental wind into the cylindrical body, the cylindrical lid is fixed to the inner wall of the environmental tank in a non-contact manner with the rotating cylindrical body on the upstream side and / or downstream side of the environmental wind. Is preferred. Although the partition plate of this invention changes with sizes of the articles | goods to accommodate, ten or more sheets are normally installed. For example, in the case where the article is an A4 size plate-like article, 12 to 120 sheets, that is, 12 to 120 article storage units may be installed, and the number may be larger.

  The rotation axis may be vertical or horizontal. If a flat article such as a printed board, a silicon wafer, a solar battery panel, or a glass substrate is accommodated in the radial direction and parallel to the rotation axis, a large number of sheets can be accommodated and the environmental tank can be made compact. When the rotation axis is vertical, a simple jig such as an article placement jig such as a V-shaped groove for placing a flat article vertically on the lower side and the rear side may be provided. When the article is three-dimensional or has a complicated shape, the article placement jig uses a horizontal net or the like, and therefore the rotation axis is preferably vertical. In the case of a cylindrical rotary shaft, a slit can be provided on the side surface of the cylinder, and a finger movable up and down can be attached to hold or support the article. When the size of the article is constant, if a ring is provided in the cylinder and the finger is fixed to the ring through the slit, the article can be supported efficiently at the same time. In the case of the flat plate-shaped article, the rotation axis may be horizontal, but an article placement jig that arranges key claws up and down or a holding jig that applies stress is used so that the article does not fall.

  In the present invention, a plurality of rotating bodies having one rotating shaft, a plurality of partition plates, and a plurality of article accommodating portions may be stacked on the rotating shaft in a large environmental tank. At this time, at least one opening with a door provided in the environmental tank is provided for each rotating body.

Secondly, the circulation mechanism in the environmental tank is a chain conveyor,
The article storage frame is attached to the shaft of the chain piece, the partition plate is attached to the shaft of another piece of the chain, and the article is carried in and / or out through at least one door opening provided in the environmental tank. The environmental air blown in parallel to the partition plate is brought into contact with the article, and the circulation mechanism is intermittently operated for each of the at least one article accommodating portion to stop in front of the opening, The present invention provides an environmental treatment method, and an environmental tank and apparatus for carrying out the treated article and / or carrying in a new article.

  Here, the rotation axis of the chain conveyor, that is, the chain feed gear, may be horizontal or vertical. If it is horizontal, it must be fixed with a key nail or the like so that the article does not fall as described above. In the case of the vertical, since the article does not flip up and down, the shape of the article storage frame may be determined so as to resist gravity, centrifugal force, and environmental wind force. Since this chain conveyor has an oval shape, an extremely large number of partition plates can be installed as long as space permits, and 30 to 300 environmental tanks are also possible. Therefore, the same number of articles can be stored.

  In the case of the chain conveyor type, since the number of articles accommodated can be increased, openings for loading / unloading articles may be provided in the two folded portions of the conveyor. That is, when the article is environmentally treated for a certain staying time, twice the processing capacity can be obtained. If two types of articles are supplied to different openings, the two types can be subjected to environmental treatment at a time. Further, when the rotation axis of the chain feed gear is horizontal, an opening can be provided in the ceiling of the environmental tank so that articles can be carried up and down.

  In the environmental tank, air such as cold air, hot air, humidified air, dry air, etc., prepared from a separately-known environmental wind generator prepared separately, or if there is a requirement for oxidizable goods testing or absolutely dry gas, nitrogen, etc. Active gas is circulated. In general, only one type of the wind is used, but a wind of a reasonable combination such as a temperature change wind that gradually warms from a cold wind, a dried cold wind, a humidified hot wind, and a dried nitrogen wind. It may be introduced.

The operation of carrying the article into and out of the environmental tank through the opening may be performed manually, but it is preferable to use a robot in order to test a large number of articles continuously. The number of robots depends on the number of articles processed per hour, but may be one or more. The robot model is preferably a 6-axis robot when it is necessary to rotate the article 90 degrees before and after carrying the article into and out of the environmental tank. May be provided, or a single-arm or double-arm robot may be used. As a method for fixing the article of the hand, a known method such as dropping, sucking or gripping is used. If the environment tank is a low-temperature tank, when taking out the low-temperature processed article with the robot hand, in order to prevent condensation and icing by touching the atmosphere, install a dehumidified air environment around the opening of the environment tank and the robot hand, A known treatment such as enclosing the entire robot activity area in a dehumidifying atmosphere can be performed.

In the environmental device of the present invention, conditions such as temperature, humidity, wind speed, etc. in the environmental tank, speed of the rotating body, intermittent stop in front of the opening, opening / closing of the door for the opening, loading / unloading of articles by the robot, etc. A controller using a sequencer or a computer is used for the control.

  In the present invention, by providing a partition plate between the articles in the environmental tank, newly introduced articles can minimize adverse effects on other articles already contained in the tank. it can. For example, for electronic parts, there is a test method in which processing is carried out immediately after being processed in an environmental tank at -40 ° C and then transferred to an environmental tank at + 80 ° C, or vice versa. However, since hot air or cold air is allowed to flow in parallel to the partition plate, there is almost no influence on adjacent articles.

Moreover, even if it is a rotating shaft type or a chain conveyor type, it has the structure which accommodates articles | goods in almost all the volumes in an environmental tank, and there is no waste in utilization of space and an environmental wind. In particular, in a type in which the rotary shaft and the chain feed gear shaft are vertical, it is not necessary to consider dropping of the article, and the structure of the article storage frame can be simplified.

  In addition, since a large number of articles can be environmentally processed by providing a large number of article storage units, it is possible to fully inspect all mass-produced products such as printed wiring boards. In particular, in the case of products that require high reliability and must not be defective, such as printed wiring boards for automobiles and printed wiring boards for electric power, it is possible to manufacture only high-reliability electronic components by 100% inspection. It becomes.

  FIG. 1 shows, as an example, an environmental apparatus 1 having two environmental tanks 2 having a vertical rotation axis according to the present invention. The environmental tank 2a on the left side of the drawing is, for example, a low temperature tank of −40 ° C., and the right environmental tank 2b is, for example, a constant temperature tank of 125 ° C. The environmental conditions of these tanks are the cold air supplied from the known dry cold air generator 5a to the left environmental tank 2a by the left blower fan 47, and the known hot air generator 5b. Is determined by the hot air supplied to the right environmental tank 2b by the right air blowing fan 47. These environmental winds pass through the rotator 6 from the top to the bottom of the paper, expose the article 24 stored in the article storage unit 8 to the environmental conditions, and are collected from below the rotator. Both the environmental tank 2a and the environmental tank 2b can accommodate the same number of articles, the rotation speed is the same, and the low temperature treatment and the high temperature treatment are the same.

  The rotating body 6 of the environmental tank 2 of FIG. 1 has a rotating shaft 7 that is vertical and rotates with an article gripping tool 10 and a partition plate 11 attached to the outer periphery of a cylindrical body 13 that is a kind of rotating shaft. An article accommodating portion 8 is formed between two adjacent partition plates 11 and on a wire mesh below the partition plate 11. An opening 3 with a door 4 is provided on the front side of each environmental tank 2, and an elongated trapezoidal lid portion 12 is installed inside the upper end of the opening 3. When the rotating body 6 stops in front of the opening 3, the article accommodating portion 8 is covered with the partition plates 11 on both sides and the lid portion 12 disposed on the ceiling and bottom, and the environmental wind from above is blocked. Almost never escapes from the opening 3.

  Two robots are arranged in front of the environmental tank 2 in FIG. 1, and the robot 18a runs on the robot moving path 27 laid on the left and right, and the article 24 (horizontally placed from the untreated article placing table 25 on the left side. A printed wiring board) is taken with the hand 19, the wrist unit 20 is rotated 90 degrees, the article is made vertical, inserted into the environmental tank 2a through the opening 3, the hand 19 is pulled onto the robot 18a, and the door 4 is The rotating body 6 is closed and the next article storage unit stops before the door 4 (opening 3). Similarly, articles are inserted one after another.

  When one rotation is made for a predetermined processing time, the article 24 first put in the environmental tank 2a returns to the front of the opening 3. Therefore, the robot 18a extracts the article from the environmental tank 2a and stores the article in the environmental tank 2b. It inserts in the part 8, pulls back, picks up the new article 24 from the untreated article placing stand 25, and inserts it in the environmental tank 2a. By repeating this operation, the environment tank 2b becomes full and rotates once, and the robot 18b takes out the first article from the environment tank 2b and places it on the processed article placing table 26 or an inspection machine (not shown). The robot 18a supplies the low-temperature-treated article 24 from the environmental tank 2a to the empty article storage unit 8 in the environmental tank 2b, and the robot 18a supplies the environmental tank 2a from the unprocessed article holder 25. In the same manner, the articles are continuously processed.

Furthermore, as another embodiment, as shown in FIG. 12, the environmental wind generator 5 can be separated from the environmental tank 2 and disposed in another place. Accordingly, the opening 3 and the door 4 can be arranged on the back surface of the environmental tank 2, and the robot 18 can be arranged at each position corresponding to each opening 3. By doing so, one robot 18 can be used for carrying the article 24 into the environmental tank 2 and the other robot 18 can be used for carrying out, and throughput can be improved.

Further, in the environmental device 1 shown in FIGS. 1 and 12, the environmental wind 51 generated by the environmental wind generator 5 is supplied into the cylindrical body 13 through the duct 52. The environmental wind 51 supplied to the inside of the cylindrical body 13 passes through the inside of the cylindrical body 13, flows out from the lower part of the rotating body 6 into the environmental tank 2, and passes through the duct 54 from the discharge port 53 disposed above the environmental tank 2. It is also possible to return to the environmental wind generator 5 via By doing so, the environmental wind 51 is smoothly circulated, and there is no need to provide a flow path for the circulation of the environmental wind 51 inside the environmental tank 2, and the area occupied by the apparatus can be reduced. The environmental wind 51 is supplied into the environmental tank 2 through the opposite direction, that is, through the discharge port 53, and returned to the environmental wind generator 5 from below the rotating body 6 through the cylindrical body 13. It is also possible enough.

  The environmental device 1 disclosed in the present embodiment is intended for fully automatic continuous environmental processing, and a controller 28 with a built-in computer is installed for automation. The factors to be managed and controlled are as follows. Collection and arrangement of temperature and humidity measurement data of the cooling environment tank 2a, control of the cold air temperature, humidity, and air volume of the cold air generator 5a, rotation speed and rotation timing of the rotating body 6 of the cooling tank 2a, and stop before the opening 3 Time, opening and closing timing for minimizing the environmental change of the door 4, staying time of each article 24, movement and positioning of the robot 18a on the robot moving path 27, gripping the article 24 on the untreated article placing table 24 90 degree rotation of wrist unit 20, carrying and scheduling of articles to cooling tank 2a, carrying to heating environment tank 2b, movement and positioning of robot 18b in front of heating environment tank 2b, taking out processed articles and list unit Programming corresponding to case-by-case, such as rotation of 20 °, movement and positioning to the processed article table 26, and placement of processed articles.

  In FIG. 2, the rotary body 6 attached in the environmental tank 2 is shown. The cylindrical body 13 connected to the rotary shaft 7 has a shape and is positioned vertically. A cylindrical lid 14 is detachably attached to the upper portion to prevent ambient air from flowing into the cylinder. The partition plate 11 is fixed radially to the outer surface of the cylindrical body 13. The rotating shaft 7 at the bottom of the cylindrical body 13 is connected to the wall on the bottom of the environmental tank by a bearing 23 and is rotated by a motor 21 through a speed reducer 22. The motor 21 is a servo motor and rotates the rotating body 6 by a necessary angle according to a command from the controller 28 to stop.

An article placing jig 9 fixed to a wire mesh is provided at the lower part of the cylindrical body 13 in FIG. A slit provided between the adjacent partition plates 11 with the article gripping jig 10 on the outer surface of the cylindrical body 13 in the axial direction of the outer periphery of the cylindrical body 14 so that various sizes of articles 24 can be gripped. It is attached so that it can move up and down along 50. That is, the space between the adjacent partition plates 11 is the article accommodating portion 8. In this embodiment, the article 24 is a printed circuit board, and the article gripping jig 10 is supported by sandwiching the printed board vertically between the article mounting jig 9 and the article gripping jig 10. . Further, the end face of the printed circuit board is placed on the article placement jig 9 with the V-grooves and stabilized. All the article gripping jigs 10 are fixed to a ring (not shown) that is slidable up and down in a cylinder and can be efficiently gripped at a time as long as the size of the gripped printed circuit board is the same. . Of course, the article gripping jig 10 may be screwed to each slit 50 individually.

  FIG. 3 is an example of the environmental tank 2 when the axis of the rotating body 6 is horizontal. The rotating shaft 7 is connected to the left and right vertical wall surfaces of the environmental tank 2 via bearings 23, the cylindrical body 13 is fixed coaxially to the rotating shaft 7, and the partition plate 11 is fixed with the same structure as in FIG. . The rotating body 6 rotates from the motor 21 through the speed reducer 22. In this case, since the article storage unit 8 is turned upside down with the rotation, an example of a jig required to securely hold the article without dropping it is shown in FIG. The upper part of the environmental tank 2 is an environmental wind generator 5, and this environmental wind is sent to the upstream wind tunnel 15 by the blower fan 47 and passes through the environmental wind control plate 17 made of a punching plate or the like to the rotating body 6. Poured. The environmental wind control plate 17 has an effect of making the flow of air in each article accommodating portion uniform by making the pressure in the upstream wind tunnel 15 higher than the article accommodating portion 8 in the rotating body 6. The environmental wind that has passed through the rotating body 6 passes through the downstream wind tunnel 16 and is collected by the environmental wind generator 5.

4 is a cross-sectional view taken along the line AB of FIG. The environmental wind generated by the environmental wind generator 5 is sent to the upstream wind tunnel 15 and poured into the rotating body 6 through a number of holes in the environmental wind control plate 17. Here, the hole of the environmental wind control plate 17 is not formed in the cylindrical lid 14 of the rotating body 6 and the outer edge portion of the partition plate 11, but is opened only in the article accommodating portion 8 of the rotating body 6. Is devised so that it can be poured into goods without waste. In addition, a lid 12 is attached to the wall of the environmental tank 2 on the upstream side of the environmental wind of the opening 3 of the environmental tank 2, and while the one article storage unit 8 is in front of the opening 3, the environmental wind is It is blocked so that it does not flow. The environmental wind passing through the rotating body 6 returns to the environmental wind generator 5 through the downstream wind tunnel 16 located on the other side.

FIG. 5 shows an article storage frame 30 that is fixed to the cylindrical body 13 shown in FIGS. 3 and 4 and holds a square plate-like article sample. Inside the frame 30, the sample size and width are substantially the same, the depth is slightly longer, the thickness of the frame is such that the robot hand can be inserted, and an article restraining plate 37 is attached to the upper side on both inner sides of the frame 30. Then, two article support pin bars, each having two article support pins 36 under the frame, are fixed at the depth side and the near side. Here, the height difference between the apex of the pin 36 and the lower surface of the article restraining plate 37 is set to about 5 mm to 20 mm, and when the article is thicker than 5 mm, the height difference is appropriately increased. An article support rotation bar 31 is rotatably attached to the upper surfaces of both ends on the front side of the article storage frame 30, an article support protrusion is attached downward to the other end of the rotation center, and a spring 33 is connected to the article support rotation bar 31. Fit between the spring retaining pins 34. The article support rotation bar 31 does not rotate about 90 degrees or more with respect to both sides of the article storage frame 30 by the stopper 48, but it rotates about 90 degrees toward the back side, and the article support rotation bar 31 The article support protrusion 32 is accommodated in the protrusion accommodating portion 49.

FIG. 6 shows a robot hand 19 corresponding to the article storage frame 30 of FIG. The robot hand 19 and the article storage frame 30 deliver a square plate-like article in a horizontal state. The hand 19 has a bifurcated and square plate-like article 24 mounted thereon, and the tips of both the outer sides are vertical surfaces and are tapered inward. These two tips hit the two article support protrusions 32 of the article storage frame 30 to spread the two article support rotating bars 31 and the hand side surface 39 slides on the article support protrusion 32, while the article restraining plate 37 and the article support pin. The article is carried to the back through the space 36, and the hand 19 is lowered to place the square plate-like article 24 on the article support pin 36. Then, the article support protrusion 32 is detached from the hand side surface 39 and opened 90 degrees, and the article 24 is placed on the article restraining coil spring 38 and abuts against the article support protrusion 32 to be fixed. Next, the robot hand 19 is pulled out under the article support protrusion 32.

FIG. 7 shows a robot hand 19 used in the environmental tank 2 having the vertical rotation shaft 7 shown in FIG. 2 to grip the end of a square plate-like article 24 such as a printed circuit board. The two fingers 40 are both long-side inner V-grooves, and sandwich the plate-like object from both sides. The robot hand 19 is connected to the robot arm via the wrist unit 20 on the front side, and is further connected to the robot 18. The wrist unit 20 has a rotation mechanism, and rotates the plate-like article 24 placed horizontally horizontally after gripping it, or rotates the plate-like article 24 placed vertically vertically 90 degrees after gripping. .

FIG. 8 shows only the main part of the left part of the environmental conveyor 2 for a chain conveyor type flat object having a horizontal rotation axis. As shown in detail in FIG. 10, the partition plate 11 is attached to the chain connecting shaft 42 of the chain piece 41 and the article storage frame 30 (see FIG. 5) is connected to the adjacent piece 41. In this way, the partition plate 11 and the article storage frame 30 are alternately attached to all the chain pieces. The partition plate 11 and the article storage frame 30 are connected and stabilized over two adjacent chain connecting shafts 42. When the chain piece 41 is small, the partition plate 11 and the article storage frame 30 may be provided by providing a chain connecting shaft for every two or more fixed pieces.

FIG. 8 shows a situation in which the article storage portion 8 is also sent from the lower side to the upper side by the chain feed gear 45 sending the top of each chain from the lower side to the upper side. The chain feed gear 45 is temporarily stopped when the article storage frame 30 becomes horizontal, that is, in front of the opening 3, the door 4 is opened, the environmentally treated article 24 is taken out, and the article 24 to be newly processed is taken. Inserted. When the exchange of the article 24 is completed, the chain feed gear 45 is rotated again, temporarily stops when the next article storage frame 30 becomes horizontal, and the next article 24 is similarly exchanged. The environmental wind is blown from the top to the bottom of FIG. However, on the windward side and leeward side of the opening 3, a lid 12 is fixed to the wall of the environmental tub 2 so that one article accommodating portion 8 is covered. Consideration is made so as to suppress the outflow from the opening 3.

FIG. 9 shows a CD cross-sectional view of FIG. Chain support gears 43 are attached to the lower side of the upper chain feed side and return side to support the chain piece 41 on the left and right chain support frames 44. The article storage frame 30 and the partition plate 11 are connected to the connecting shaft 42 of the chain top 41. An environmental wind control plate 17 made of a porous plate or the like is provided on one side of the environmental tank 2, and through this, the environmental wind 51 is sent from the upstream wind tunnel 15 to the article storage unit 8 and the partition plate 11. The environmental wind 51 passes through to the opposite side and returns to the environmental wind generator 5 through the downstream wind tunnel 16. Here, there is no article 24 such as a printed circuit board inside the chain conveyor, and the windshield plate 46 is fixed to the chain support frame 44 so as not to send wasteful environmental wind.

  In recent years, electronic components for automobile engine combustion control, solar battery panels, solar battery panel control panels, and the like are often used in situations where reliability is required in a harsh environment for a long period of time. When used in such a harsh environment, there are many problems such as defects in the substrate itself before mounting electronic components or missing patterns on the solar cell panel. In order to improve the performance, it is required to perform an acceleration test by exposure to a low temperature environment and a high temperature environment, and then perform a known quality inspection to eliminate defective products. In the present invention, particularly when inspecting a printed wiring board or a solar cell panel, a large number of articles are automatically subjected to an environmental test to complete a finished product such as a printed circuit board or a solar cell panel after mounting electronic components. It is possible to reduce the generation of defective products and provide a highly reliable product.

It is a figure which shows an automatic environment apparatus. It is a perspective view which shows a vertical shaft cantilever rotating body. It is a figure which shows the environmental tank which has a horizontal axis | shaft rotary body. It is sectional drawing which shows the cross section between AB of FIG. It is a perspective view which shows the goods storage frame which fixes goods. It is a perspective view which shows the robot hand corresponding to FIG. It is a perspective view which shows the other Example of the robot hand. It is sectional drawing which shows a part of environmental tank using a chain belt. It is sectional drawing which shows the cross section between CD of FIG. It is a figure which shows the attachment part of the partition plate and article | item storage frame to a chain. It is a perspective view which shows the conventional heat processing apparatus. It is a figure which shows the Example which isolate | separated and arrange | positioned the environmental tank and the environmental wind generator.

1.
Environmental device 2.
Environmental tank 2a. Cryogenic bath 2b. 2. High temperature bath
Opening 4.
Door 5.
Environmental wind generator 5a. Dry cold air generator 5b. Hot air generator 6.
Rotating body 7.
Rotation axis 8.
Article storage unit 9.
9. Article placing jig 10. Article holding jig Partition plate 12. Lid 13. Cylindrical body 14. Cylinder lid 15. Upstream wind tunnel 16. Downstream wind tunnel 17. Environmental wind control board 18. Robot 18a. Robot a
18b. Robot b
19. Robot hand 20. List part 21. Motor 22. Reducer 23. Bearing 24. Article 25. Untreated article table 26. Processed article table 27. Robot movement path 28. Controller 30. Article storage frame 31. Article support rotation bar 32. Article support protrusion 33. Spring 34. Spring retaining pin 35. Article support pin bar 36. Article support pin 37. Article holding plate 38. Article holding coil spring 39. Hand side surface 40. Finger 41. Chain top 42. Chain connecting shaft 43. Chain support gear 44. Chain support frame 45. Chain feed gear 46. Windbreak plate 47. Blower fan 48. Stopper 49. Projection accommodating part 50. Slit 51. Environmental wind 52. Duct 53. Outlet 54. duct

Claims (15)

A circulation mechanism for continuously moving articles in an environmental tank;
A plurality of partition plates fixed at right angles to the direction of travel of the circulation mechanism;
At least one door opening provided in the environmental tank;
A lid provided in the vicinity of the opening at a right angle to the partition plate and in a non-contact manner;
An article accommodating portion formed between two adjacent partition plates;
Consisting of
Environmental wind is blown in parallel with the partition plate,
The environmental storage tank, wherein the article storage unit stopped in front of the opening is shielded from the environmental wind by the adjacent partition plate and the lid. The lid fixed to the inner wall of the environmental tank near the end of the opening is
Upstream and / or downstream of the environmental wind,
It is non-contacting and perpendicular to the partition plate,
The lid is formed in an elongated trapezoidal shape,
The environmental tank according to claim 1. The circulating mechanism is a rotating body having one rotating shaft,
The partition plate is fixed radially to the rotating shaft,
The environmental tank according to claim 1 or 2. The rotating shaft is a cylindrical body,
The environmental tank according to claim 3. The cylindrical cover is provided detachably on the upstream side and / or the downstream side of the environmental wind,
The environmental tank according to claim 4. The rotation axis is vertical or horizontal,
The environmental tank according to any one of claims 3 to 5. The rotating body having one rotating shaft, a plurality of the partition plates, and a plurality of the article accommodating portions,
It is overlapped on the rotating shaft,
The environmental tank according to any one of claims 3 to 6. The circulation mechanism is a chain conveyor;
The article accommodating part is attached to the shaft of the top of the chain;
The environmental tank according to claim 1, wherein the partition plate is attached to a shaft of at least another frame of the chain. On the inner wall of the environmental tank near the end of the opening,
In the upstream and / or downstream of the environmental wind in a non-contact and perpendicular manner to the partition plate,
The lid is fixed,
The environmental tank according to claim 8. The chain feed gear shaft of the chain conveyor is vertical or horizontal,
The environmental tank according to claim 8 or 9. The windshield plate is provided on at least one side of the oval surface of the space portion formed by the chain conveyor,
The environmental tank according to any one of claims 8 to 10. The environmental air is at least one or more rationally selected from the group consisting of hot air, cold air, constant temperature air, humidified air, dry air, and inert gas air,
The environmental tank according to claim 1. The partition plate is made of a heat insulating material,
The environmental tank according to any one of claims 1 to 12. At least one environmental tank according to any one of claims 1 to 13;
At least one robot for loading and unloading the article through the opening;
A controller;
An environmental device comprising: Articles are processed in an environmental tank in which a plurality of article storage units are installed and circulated in a circulation mechanism,
In a method in which an article is carried in and / or carried out through at least one door opening provided in the environmental tank,
To the partition plate fixed at right angles to the traveling direction of the circulation mechanism,
Contacting the article with ambient air blown in parallel;
The circulation mechanism is operated intermittently,
Stopping at least one of the article storage portions in front of the opening,
An environmental treatment method for carrying out the article that has been treated during the stop and / or carrying in a new article ,
A lid is fixed to the inner wall of the environmental tank near the end of the opening,
The lid is upstream and / or downstream of the environmental wind.
Non-contact and perpendicular to the partition plate,
An environmental treatment method, wherein the lid portion and the two partition plates cover one article storage portion to prevent outflow of environmental wind and inflow of air from the opening.

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