JP5656525B2 - Processing apparatus and operation program management method in processing apparatus - Google Patents

Description

  The present invention relates to a processing device such as a cutting device (dicing device) and a grinding device, and an operation program management method in the processing device.

  A semiconductor wafer in which a plurality of devices such as IC, LSI, etc. are defined by dividing lines and formed on the front surface is ground by a grinding device and thinned to a predetermined thickness, and then cut by a cutting device (dicing device). The device is divided into individual devices, and the divided devices are used for electric devices such as mobile phones and personal computers.

  The grinding apparatus includes a transfer robot for transferring the wafer to and from the cassette, a temporary table for centering the transferred wafer, and a transfer means for transferring the wafer to a chuck table for sucking and holding the wafer from the temporary table. And a grinding means for grinding the wafer held on the chuck table, an unloading means for unloading the ground wafer, and a cleaning means for cleaning the unloaded wafer. (For example, refer to JP 2008-183659 A).

  Further, the cutting apparatus includes a carry-in / out means for carrying the wafer in and out of the cassette, a temporary placement table for centering the carried-out wafer, a conveyance means for conveying the wafer from the temporary placement table, and a conveyed wafer A chuck table for sucking and holding the wafer, cutting means for cutting the wafer held on the chuck table, unloading means for unloading the cut wafer, and cleaning means for cleaning the unloaded wafer, The wafer can be divided into individual devices with high accuracy (see, for example, JP-A-7-45556).

  Processing devices such as grinding devices and cutting devices are controlled by multiple operating programs, and manufacturers of processing devices modify or upgrade operating programs in accordance with user requests such as troubleshooting, function changes, and addition of sensors. The operation program of the machining apparatus stored in the user is appropriately changed.

  In addition, a manufacturer who has received a request for modification or version upgrade of an operation program from a user confirms which operation program should be modified or upgraded while looking at the history of past modification or version upgrade.

JP 2008-183659 A Japanese Patent Laid-Open No. 7-45556

  However, the product number that identifies the processing device may be mistakenly reported by the user or the manufacturer's service person. Even if necessary corrections or version upgrades are made after confirming the correction or version upgrade history, the desired product number There is a problem that cannot be corrected or upgraded.

  In addition, when standard correction software must be installed on all the processing equipment delivered to the user, the installation omission occurs and the operating history installed by the manufacturer does not match the operating program installed on the processing equipment. However, there is a problem in that the manufacturer is confused and the work is troublesome and productivity is poor.

  The present invention has been made in view of the above points, and the object of the present invention is to provide a machining apparatus capable of reliably identifying a machining apparatus and knowing the history of a correct operation program, and an operation program management method for the machining apparatus. Is to provide.

According to the first aspect of the present invention, there is provided a processing apparatus including a chuck table that holds a workpiece and a processing unit that processes the workpiece held on the chuck table, and the processing apparatus is specified. Storage means storing a product number and a plurality of part numbers for specifying a plurality of operation programs for operating the machining apparatus, and converting the product number and the part number stored in the storage means into a two-dimensional code And a processing device comprising: a code updating means for automatically updating the two-dimensional code when the operation program is modified or upgraded ; and a display means for displaying the two-dimensional code. Is done.

  According to invention of Claim 2, it is the operation program management method in the processing apparatus of Claim 1, Comprising: The imaging process which images the said two-dimensional code displayed on this display means, It imaged by this imaging process A transmission step of transmitting the two-dimensional code to the manufacturer managing the operation program of the processing apparatus by means of transmission; a decoding step of decoding the received two-dimensional code to obtain the product number of the processing apparatus and the part number of the operation program; A confirmation step of confirming the machining device by the decoded product number and confirming part numbers of a plurality of operation programs installed in the machining device; a correction program installation step of correcting or upgrading the operation program; An operating program management method is provided.

  According to the operation program management method of the present invention, the two-dimensional code displayed on the display means by a mobile phone or the like is imaged and the two-dimensional code is transmitted to the manufacturer. The manufacturer then decodes the received two-dimensional code. The machining device to be upgraded or the operation program to be corrected can be specified, and the history of the correct operation program can be recognized to smoothly correct or upgrade the operation program.

It is an external appearance perspective view of the cutting device which can apply the operation program management method of the present invention. It is a schematic diagram of a code update means. It is a figure which shows the two-dimensional code displayed on the display means. It is a schematic diagram which shows a mode that the two-dimensional code imaged with the mobile telephone is transmitted to the manufacturer of a cutting device. It is a schematic diagram which shows the decoding process by a decoding apparatus.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 shows an external view of a dicing apparatus (cutting apparatus) 2 that can divide a semiconductor wafer and divide it into individual chips (devices) to which the operation program management method of the present invention can be applied.

  On the front side of the cutting device 2, there is provided operating means 4 for an operator to input instructions to the device such as machining conditions. In the upper part of the apparatus, there is provided a display means 6 such as a CRT for displaying a guidance screen for an operator and an image taken by an imaging means described later.

  The wafer W to be diced is attached to a dicing tape T that is an adhesive tape, and the outer peripheral edge of the dicing tape T is attached to an annular frame F. As a result, the wafer W is supported by the frame F via the dicing tape T, and a plurality of wafers (for example, 25 sheets) are accommodated in the wafer cassette 8 shown in FIG. The wafer cassette 8 is placed on a cassette elevator 9 that can move up and down.

  Behind the wafer cassette 8, a loading / unloading means 10 for unloading the wafer W before cutting from the wafer cassette 8 and loading the wafer after cutting into the wafer cassette 8 is disposed. Between the wafer cassette 8 and the loading / unloading means 10, a temporary placement area 12, which is an area on which a wafer to be carried in / out, is temporarily placed, is provided. Positioning means 14 for positioning at a certain position is provided.

  In the vicinity of the temporary placement area 12, transport means 16 having a turning arm that sucks and transports the frame F integrated with the wafer W is disposed, and the wafer W carried to the temporary placement area 12 is It is sucked by the transport means 16 and transported onto the chuck table 18 and is sucked by the chuck table 18, and is held on the chuck table 18 by clamping the frame F by a plurality of clamps 19.

  The chuck table 18 is configured to be rotatable and reciprocally movable in the X-axis direction. Above the movement path of the chuck table 18 in the X-axis direction, an alignment unit 20 that detects a street to be cut of the wafer W is provided. It is arranged.

  The alignment unit 20 includes an imaging unit 22 that images the surface of the wafer W, and can detect a street to be cut by a process such as pattern matching based on an image acquired by imaging. The image acquired by the imaging unit 22 is displayed on the display unit 6.

  On the left side of the alignment means 20, a cutting means 24 for cutting the wafer W held on the chuck table 18 is disposed. The cutting means 24 is configured integrally with the alignment means 20, and both move together in the Y-axis direction and the Z-axis direction.

  The cutting means 24 is configured by attaching a cutting blade 28 to the tip of a rotatable spindle 26 and is movable in the Y-axis direction and the Z-axis direction. The cutting blade 28 is located on the extended line of the imaging means 22 in the X-axis direction.

  The wafer W that has been cut by the cutting blade 28 is gripped by the transport means 25 that can move in the Y-axis direction and transported to the cleaning device 27. The cleaning device 27 cleans the wafer by rotating the wafer W at a low speed while spraying water from the cleaning nozzle.

  Hereinafter, the operation program management method of the embodiment of the present invention for managing the operation program of the cutting device 2 described above will be described. The storage means (memory) of the cutting device 2 stores a product number (for example, DSA 1120550) of the cutting device and a plurality of installed operation program numbers (part numbers) as a table 32.

  In the operation program management method of the present invention, as shown in FIG. 2, the code update means 30 converts the product number and the part number stored in the storage means as the table 32 into the two-dimensional code 34 and corrects the program. If there is, the two-dimensional code 34 is automatically updated.

  The manufacturer of the cutting device 2 always manages data such as operation program correction or version upgrade performed in accordance with a request from a user such as troubleshooting, function change, addition of a sensor, and the like. Therefore, the data of the two-dimensional code 34 and the data managed by the manufacturer should normally match.

  The two-dimensional code 34 in which the product number and the part number are converted and the update of the two-dimensional code 34 are displayed on the display means 6 of the cutting apparatus 2 as shown in FIG. In the operation program management method of the present invention, the two-dimensional code 34 displayed on the display means 6 is picked up by, for example, a mobile phone 36, and the picked-up two-dimensional code 34 is cut as shown in FIG. Send to.

  On the manufacturer 38 side, as shown in FIG. 5, the received two-dimensional code 34 is decoded by the decoding device 40, and the product number of the cutting device 2 and the part number of the operation program are obtained. By comparing the acquired product number and part number of the operation program with the database managed in-house, the user's cutting device can be confirmed by the decrypted product number, and a plurality of operation programs installed in the cutting device The part number can be confirmed.

  As a result of this confirmation, if the product number and all the part numbers match, there is no problem, and a service program can be sent to the user to install a correction program for correcting or upgrading the operating program.

  If any inconsistencies such as forgetting to install an operation program are found in the above confirmation work, a service person brings a correction program to be newly installed together with the forgotten installation program to the user. The problem can be solved by installing the program.

  In the above description, the example in which the operation program management method of the present invention is applied to the cutting device 2 has been described. However, the operation program management method of the present invention is not limited to this, and other methods such as a grinding device, a polishing device, etc. The present invention can be similarly applied to the above processing apparatus.

2 Cutting device 6 Display means 18 Chuck table 24 Cutting means 30 Code update means 32 Table 34 Two-dimensional code 36 Mobile phone 40 Decoding means

Claims (2)

A processing apparatus comprising: a chuck table that holds a workpiece; and a processing unit that processes the workpiece held on the chuck table.
Storage means for storing a plurality of part numbers identifying a plurality of operating programs for operating the product number and the processing device for specifying the machining apparatus,
A code updating means for converting the product number and the part number stored in the storage means into a two-dimensional code, and automatically updating the two-dimensional code when the operation program is modified or upgraded ;
Display means for displaying the two-dimensional code;
A processing apparatus comprising: An operation program management method in the machining apparatus according to claim 1,
An imaging step of imaging the two-dimensional code displayed on the display means;
A transmission step of transmitting the two-dimensional code imaged in the imaging step to a manufacturer that manages an operation program of the processing apparatus by a transmission unit;
A decoding step of decoding the received two-dimensional code to obtain the product number of the processing apparatus and the part number of the operation program;
A confirmation step of confirming the machining device by the decrypted product number and confirming part numbers of a plurality of operation programs installed in the machining device;
A modification program installation process for modifying or upgrading the operation program;
The operating program management method characterized by comprising.

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