JP5636042B2 - 真空ポンプ - Google Patents

真空ポンプ Download PDF

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Publication number
JP5636042B2
JP5636042B2 JP2012507816A JP2012507816A JP5636042B2 JP 5636042 B2 JP5636042 B2 JP 5636042B2 JP 2012507816 A JP2012507816 A JP 2012507816A JP 2012507816 A JP2012507816 A JP 2012507816A JP 5636042 B2 JP5636042 B2 JP 5636042B2
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JP
Japan
Prior art keywords
pumping
section
stage
vacuum pump
growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2012507816A
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English (en)
Japanese (ja)
Other versions
JP2012525534A (ja
Inventor
エマニュエル ウゾマ オコローフォー
エマニュエル ウゾマ オコローフォー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
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Edwards Ltd
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Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Publication of JP2012525534A publication Critical patent/JP2012525534A/ja
Application granted granted Critical
Publication of JP5636042B2 publication Critical patent/JP5636042B2/ja
Active legal-status Critical Current
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2210/00—Fluid
    • F04C2210/10—Fluid working
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00—Metals
    • F05C2201/04—Heavy metals
    • F05C2201/0433—Iron group; Ferrous alloys, e.g. steel
    • F05C2201/0436—Iron
    • F05C2201/0439—Cast iron
    • F05C2201/0442—Spheroidal graphite cast iron, e.g. nodular iron, ductile iron

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP2012507816A 2009-04-29 2010-03-31 真空ポンプ Active JP5636042B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0907298.4 2009-04-29
GBGB0907298.4A GB0907298D0 (en) 2009-04-29 2009-04-29 Vacuum pump
PCT/GB2010/050572 WO2010125368A2 (en) 2009-04-29 2010-03-31 Vacuum pump

Publications (2)

Publication Number Publication Date
JP2012525534A JP2012525534A (ja) 2012-10-22
JP5636042B2 true JP5636042B2 (ja) 2014-12-03

Family

ID=40791933

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012507816A Active JP5636042B2 (ja) 2009-04-29 2010-03-31 真空ポンプ

Country Status (9)

Country Link
US (1) US20120045322A1 (pt)
EP (1) EP2425137B1 (pt)
JP (1) JP5636042B2 (pt)
KR (2) KR20170063990A (pt)
CN (1) CN102414449B (pt)
BR (1) BRPI1009368A2 (pt)
GB (1) GB0907298D0 (pt)
TW (1) TWI489043B (pt)
WO (1) WO2010125368A2 (pt)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014001668A (ja) * 2012-06-18 2014-01-09 Toshiba Corp ルーツポンプ
FR3051852B1 (fr) * 2016-05-24 2018-06-15 Pfeiffer Vacuum Stator, arbre rotatif, pompe a vide de type seche et procedes de fabrication associes

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3710782A1 (de) * 1987-03-31 1988-10-20 Vacuubrand Gmbh & Co Verfahren und vorrichtung zum abpumpen von daempfen und/oder dampfhaltigen gemischen und/oder gas-dampf-gemischen oder dgl. medien
GB9604486D0 (en) * 1996-03-01 1996-05-01 Boc Group Plc Improvements in vacuum pumps
DE19745615A1 (de) * 1997-10-10 1999-04-15 Leybold Vakuum Gmbh Schraubenvakuumpumpe mit Rotoren
KR100386753B1 (ko) * 1998-03-23 2003-06-09 다이코 기카이 고교 가부시키가이샤 드라이 진공펌프
CN1399074A (zh) * 2001-07-27 2003-02-26 大晃机械工业株式会社 干式真空泵
JP4007130B2 (ja) * 2002-09-10 2007-11-14 株式会社豊田自動織機 真空ポンプ
GB0223767D0 (en) * 2002-10-14 2002-11-20 Boc Group Plc Pump cleaning
TW200506217A (en) * 2003-03-19 2005-02-16 Ebara Corp Positive-displacement vacuum pump
JP2005098210A (ja) * 2003-09-25 2005-04-14 Aisin Seiki Co Ltd 多段ドライポンプ
GB0609306D0 (en) * 2006-05-11 2006-06-21 Boc Group Plc Vacuum pump
GB2440944B (en) * 2006-08-11 2011-10-12 Itt Mfg Enterprises Inc Rotary lobe pump
GB0705971D0 (en) * 2007-03-28 2007-05-09 Boc Group Plc Vacuum pump

Also Published As

Publication number Publication date
JP2012525534A (ja) 2012-10-22
TW201102518A (en) 2011-01-16
KR20120007014A (ko) 2012-01-19
CN102414449A (zh) 2012-04-11
GB0907298D0 (en) 2009-06-10
TWI489043B (zh) 2015-06-21
BRPI1009368A2 (pt) 2016-03-08
EP2425137B1 (en) 2024-10-23
KR20170063990A (ko) 2017-06-08
WO2010125368A3 (en) 2010-12-23
WO2010125368A2 (en) 2010-11-04
US20120045322A1 (en) 2012-02-23
EP2425137A2 (en) 2012-03-07
CN102414449B (zh) 2015-12-16

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