JP5622434B2 - Coating roll for thin film formation, coating method and coating apparatus - Google Patents

Coating roll for thin film formation, coating method and coating apparatus Download PDF

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JP5622434B2
JP5622434B2 JP2010105630A JP2010105630A JP5622434B2 JP 5622434 B2 JP5622434 B2 JP 5622434B2 JP 2010105630 A JP2010105630 A JP 2010105630A JP 2010105630 A JP2010105630 A JP 2010105630A JP 5622434 B2 JP5622434 B2 JP 5622434B2
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coating
roll
thin film
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JP2011230102A (en
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安彦 三谷
安彦 三谷
辰也 北中
辰也 北中
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Kinyosha Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/02Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to separate articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/28Processes for applying liquids or other fluent materials performed by transfer from the surfaces of elements carrying the liquid or other fluent material, e.g. brushes, pads, rollers

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  • Coating Apparatus (AREA)

Description

本発明は、乾燥後の厚みが1μm以下の極薄膜を形成するための薄膜形成用塗布ロール、塗布方法及び塗布装置に関する。   The present invention relates to a coating roll for forming a thin film, a coating method, and a coating apparatus for forming an ultrathin film having a thickness of 1 μm or less after drying.

従来、被処理物に薄く均一な塗膜を形成するロールコーティング装置としては、特許文献1が知られている。このロールコーティング装置は、塗布ローラを押圧ローラに圧接した一対のローラ間に被処理物を通してローラを回転させ、上記塗布ローラ又は被処理物に塗布した塗布液を被処理物に転写させる技術に関する。ここで、前記塗布ローラは、鋼材等からなる芯体の外周に一定厚みのスポンジ層、表面が平滑な非接着性・非吸着性のチューブ膜を順次被覆した構成となっている。また、押圧ローラは、鋼材等からなる芯体の外周にフッ素樹脂で加工して平滑化した外周層を設けた構成となっている。   Conventionally, Patent Document 1 is known as a roll coating apparatus that forms a thin and uniform coating film on a workpiece. This roll coating apparatus relates to a technique for rotating a roller through a workpiece between a pair of rollers in which the roller is pressed against a pressure roller, and transferring the coating liquid applied to the coating roller or workpiece to the workpiece. Here, the coating roller has a structure in which a sponge layer having a constant thickness and a non-adhesive / non-adsorbing tube film having a smooth surface are sequentially coated on the outer periphery of a core made of steel or the like. The pressing roller has a configuration in which an outer peripheral layer smoothed by processing with a fluororesin is provided on the outer periphery of a core made of steel or the like.

特許第3052127号公報Japanese Patent No.3052127

しかしながら、上記ロールコーティング装置で用いられている塗布ローラによってロールコーティングを行うと、押圧ローラによる押圧の影響で塗布ローラのスポンジ層が変形し、その変形に対してスポンジ層の外周に被覆されたチューブ膜が追随することができず、ローラ表面にしわが生じる。その結果、被処理物表面に形成された塗膜にしわ状の模様が発生し、塗膜の乾燥速度やレベリング性能をうまく調整しなければ、均一な塗布面を得ることが困難であるという問題があった。   However, when roll coating is performed by the application roller used in the roll coating apparatus, the sponge layer of the application roller is deformed due to the pressure of the pressure roller, and the tube coated on the outer periphery of the sponge layer against the deformation. The film cannot follow and wrinkles occur on the roller surface. As a result, a wrinkled pattern occurs on the coating film formed on the surface of the workpiece, and it is difficult to obtain a uniform coating surface unless the drying speed and leveling performance of the coating film are adjusted well. was there.

本発明はこうした事情を考慮してなされたもので、被処理物上に形成される塗膜の乾燥後の厚みが1μm以下になるような極薄膜であっても、被処理物表面に均一な塗膜を形成することができる薄膜形成用塗布ロール、塗布方法及び塗布装置を提供することを目的とする。   The present invention has been made in consideration of such circumstances, and even if the coating film formed on the object to be processed is an extremely thin film having a thickness of 1 μm or less after drying, it is uniform on the surface of the object to be processed. It aims at providing the coating roll for thin film formation which can form a coating film, the coating method, and a coating device.

本発明に係る塗布ロールは、薄膜形成用の塗布液を用いて被処理物に薄膜を形成するための薄膜形成用塗布ロールであって、芯体と、この芯体の外周に設けられたスポンジ層と、このスポンジ層の外周に設けられたソリッド層と、このソリッド層の外周に設けられた,塗布液に対して非粘着性及び非接着性をもった表面層とを具備することを特徴とする。 A coating roll according to the present invention is a coating roll for forming a thin film on an object to be processed using a coating solution for forming a thin film, and a core and a sponge provided on the outer periphery of the core And a solid layer provided on the outer periphery of the sponge layer, and a surface layer provided on the outer periphery of the solid layer and having non-adhesiveness and non-adhesiveness to the coating liquid. And

また、本発明に係る塗布方法は、前記薄膜形成用塗布ロールを用いて被処理物に薄膜を形成する塗布方法であり、前記塗布ロールまたは被処理物に薄膜形成用の塗布液を塗布した後、塗布ロールと被処理物を圧接させた状態で被処理物を通すことで被処理物に薄膜を形成することを特徴とする。   Further, the coating method according to the present invention is a coating method for forming a thin film on an object to be processed using the coating roll for forming a thin film, and after applying a coating liquid for forming a thin film on the coating roll or the object to be processed. A thin film is formed on the object to be processed by passing the object to be processed in a state where the coating roll and the object to be processed are in pressure contact with each other.

更に、本発明に係るロール塗布装置は、前記薄膜形成用塗布ロールと、この塗布ロールに被処理物を圧接した状態で通す圧接手段と、前記塗布ロール又は被処理物に塗膜形成用の塗布液を注出する塗布液注出装置とを具備することを特徴とする。   Furthermore, the roll coating apparatus according to the present invention comprises the coating roll for forming a thin film, a pressure contact means for passing the processing object in pressure contact with the coating roll, and a coating film forming coating on the coating roll or the processing object. And a coating liquid pouring device for pouring out the liquid.

本発明によれば、被処理物上に形成される塗膜の乾燥後の厚みが1μm以下になるような極薄膜であっても、被処理物表面に均一な塗膜を形成することができる薄膜形成用塗布ロール、塗布方法及び塗布装置を提供できる。   According to the present invention, a uniform coating film can be formed on the surface of an object to be processed even if it is an ultrathin film having a thickness of 1 μm or less after drying. A coating roll for forming a thin film, a coating method, and a coating apparatus can be provided.

本発明の実施例1に係るロール塗布装置の説明図。Explanatory drawing of the roll coating device which concerns on Example 1 of this invention. 本発明の実施例2に係るロール塗布装置の説明図。Explanatory drawing of the roll coating device which concerns on Example 2 of this invention. 図1のロール塗布装置による画像データの説明図。Explanatory drawing of the image data by the roll coating device of FIG. 図2のロール塗布装置による画像データの説明図。Explanatory drawing of the image data by the roll coating device of FIG. 従来のロール塗布装置による画像データの説明図。Explanatory drawing of the image data by the conventional roll coating device. 本発明のロール塗布装置において、被処理物を塗布ロールに圧接する他の例を示す説明図。Explanatory drawing which shows the other example which press-contacts a to-be-processed object to a coating roll in the roll coating device of this invention. 本発明のロール塗布装置において、被処理物を塗布ロールに圧接する更に他の例を示す説明図。In the roll coating apparatus of this invention, explanatory drawing which shows the further another example which press-contacts a to-be-processed object to a coating roll.

以下、本発明について更に詳しく説明する。
本発明において、塗布ロールと被処理物が接触すると、圧接によりスポンジ層が外圧の影響を受けて変形するので、接触面の均圧化が得られるとともに、被処理物の凹凸の影響を低減することができる。
Hereinafter, the present invention will be described in more detail.
In the present invention, when the coating roll comes into contact with the object to be processed, the sponge layer is deformed by the influence of the external pressure due to the pressure contact, so that the contact surface can be equalized and the unevenness of the object to be processed is reduced. be able to.

本発明において、スポンジ層は柔らかく、かつ均一に変形することが望ましい。スポンジ層の材質としては、例えばシリコーンゴム,ポリビニルアルコール(PVA),ウレタン,ブチルゴム等が挙げられる。また、スポンジ層の厚みはロール径にもよるが、3〜20mmが好ましく、より好ましくは5〜15mm、更に好ましくは5〜10mmである。ここで、厚みが3mm未満では、接触時の変形量が小さくスポンジ層による効果が得られない。また、厚みが20mmを超えると、接触時の変形が大きくなりすぎるため、接触面が大きくなり過ぎてしまい、塗布面が悪化する。   In the present invention, the sponge layer is preferably soft and uniformly deformed. Examples of the material for the sponge layer include silicone rubber, polyvinyl alcohol (PVA), urethane, and butyl rubber. Moreover, although the thickness of a sponge layer is based also on a roll diameter, 3-20 mm is preferable, More preferably, it is 5-15 mm, More preferably, it is 5-10 mm. Here, if the thickness is less than 3 mm, the amount of deformation at the time of contact is small, and the effect of the sponge layer cannot be obtained. On the other hand, when the thickness exceeds 20 mm, deformation at the time of contact becomes too large, so that the contact surface becomes too large and the coated surface is deteriorated.

本発明において、ソリッド層を設けるのは、スポンジ層の変形による(円周距離の変化)表面層のしわ発生を抑制するためであり、ソリッド層はスポンジ層より硬く、最外層(表面層)より柔らかい必要がある。ソリッド層の硬さとしては、一般的なゴム材質の硬度が適用できるが、前述した機能の発現効果の点から10〜95°(JISA)、好ましくは30〜90°(JISA)、より好ましくは40〜80°(JISA)である。ここで、硬さが10°を下回ると、表面層のしわ発生を抑止することができず、硬さが95°を上回るとスポンジ層の変形によるしわ抑止効果が発現されない。   In the present invention, the solid layer is provided in order to suppress wrinkling of the surface layer due to the deformation of the sponge layer (change in circumferential distance). The solid layer is harder than the sponge layer and is more rigid than the outermost layer (surface layer). Need to be soft. As the hardness of the solid layer, the hardness of a general rubber material can be applied, but it is 10 to 95 ° (JISA), preferably 30 to 90 ° (JISA), more preferably from the viewpoint of the effect of the above-described function. It is 40-80 degrees (JISA). Here, if the hardness is less than 10 °, the generation of wrinkles in the surface layer cannot be suppressed, and if the hardness exceeds 95 °, the effect of suppressing wrinkles due to the deformation of the sponge layer is not exhibited.

前記ソリッド層の厚みは、次の理由により0.2〜3mmとすることが望ましい。即ち、厚みが0.2mm未満の場合は、スポンジ層が過度に変形するのを抑制することができず、被処理物表面に形成される塗膜にしわ状の模様が発生する。また、厚みが3mmを超えると、ソリッド層の応力の影響が大きくなりすぎ、スポンジ層による復元効果が発揮されずに均一な膜が得られないからである。   The thickness of the solid layer is preferably 0.2 to 3 mm for the following reason. That is, when the thickness is less than 0.2 mm, it is not possible to suppress excessive deformation of the sponge layer, and a wrinkled pattern is generated on the coating film formed on the surface of the workpiece. On the other hand, if the thickness exceeds 3 mm, the influence of the stress of the solid layer becomes too great, and the restoration effect by the sponge layer is not exhibited and a uniform film cannot be obtained.

ソリッド層の材質としては、例えばシリコーンゴム、アクリロニトリル・ブタジエンゴム、エチレンプロピレンゴム、フッ素ゴム、ウレタンゴム、クロロプレンゴム、エピクロロヒドリンゴム、天然ゴム等、あらゆるゴムが使用できる。また、ソリッド層に用いられるゴムには、必要に応じて加硫剤、加硫助剤、加硫促進剤、老化防止剤、可塑剤、充填剤等公知の添加剤を配合してもよい。   As the material of the solid layer, for example, any rubber such as silicone rubber, acrylonitrile / butadiene rubber, ethylene propylene rubber, fluorine rubber, urethane rubber, chloroprene rubber, epichlorohydrin rubber, natural rubber and the like can be used. Moreover, you may mix | blend well-known additives, such as a vulcanizing agent, a vulcanization adjuvant, a vulcanization accelerator, an anti-aging agent, a plasticizer, a filler, with the rubber used for a solid layer as needed.

本発明において、ソリッド層の外周に設けられる表面層の材質は、基本的には塗布液に対して非粘着性及び非接着性を有しかつ耐性がある材質ならなんでもよい。表面層の材質としては、例えば四ふっ化エチレン樹脂(PTFE),四ふっ化エチレンパーフルオロアルキルビニルエーテル共重合樹脂(PFA),四ふっ化エチレンヘキサフルオロプロピレン共重合樹脂(FEP)等の非接着性,非粘着性,不活性,平滑性を有したフッ素樹脂や、金属,金属酸化物等が挙げられる。前記表面層は、導電性でも絶縁性でもよい。また、表面層はチューブ状でもコート層でもよい。表面層の厚みは、次の理由により0.2mm以下とすることが望ましい。即ち、厚みが0.2mmを超えると、表面層自身の硬さが高すぎるため、被処理物と接触した際の均圧化の効果が十分に得られないからである。   In the present invention, the material of the surface layer provided on the outer periphery of the solid layer may be basically any material that is non-adhesive and non-adhesive and resistant to the coating liquid. Non-adhesive materials such as tetrafluoroethylene resin (PTFE), tetrafluoroethylene perfluoroalkyl vinyl ether copolymer resin (PFA), tetrafluoroethylene hexafluoropropylene copolymer resin (FEP), etc. , Non-adhesive, inert, and smooth fluororesins, metals, metal oxides, and the like. The surface layer may be conductive or insulating. The surface layer may be a tube or a coat layer. The thickness of the surface layer is desirably 0.2 mm or less for the following reason. That is, if the thickness exceeds 0.2 mm, the hardness of the surface layer itself is too high, so that the effect of pressure equalization when contacting the object to be processed cannot be obtained sufficiently.

次に、本発明の具体的な実施例について説明する。
(実施例1)
図1は、本発明に係る薄膜形成用塗布ロールを備えたロール塗布装置の一例を示す。
図中の1は薄膜形成用塗布ロールを示し、被処理物2を挟んで対向して配置されたバックアップロール3と対をなしている。前記塗布ロール1は、鋼材からなる芯体4の外周に厚さ7mm,硬さ25°(アスカーC)のシリコーンゴムスポンジ層5、厚さ1mm,硬さ40°(JISA)のソリッド層6及び厚さ0.05mmの非接着性,非粘着性のチューブ層(表面層)7が順次形成された構成となっている。ここで、ソリッド層6はシリコーンゴムからなり、チューブ層7はPFAからなる。一方、バックアップロール3は、鋼材からなる芯体8と、この芯体8の外周に形成された,平滑化されたフッ素樹脂製の表面層9とから構成されている。塗布ロール1の近傍には、塗布ロール1のチューブ層7に塗膜形成用の塗布液を注出する塗布液注出装置10が配置されている。塗布液注出装置10は、塗布液11を収容し先端にノズル12を備えたタンク13と、タンク13内の塗布液11を塗布ロール1のチューブ層7に供給するためのポンプ等の液供給手段(図示せず)と、ノズル12をチューブ層7に対し接近自在に移動させるためのピストン等の駆動機構(図示せず)を備えている。
Next, specific examples of the present invention will be described.
Example 1
FIG. 1 shows an example of a roll coating apparatus provided with a thin film-forming coating roll according to the present invention.
In the figure, reference numeral 1 denotes a thin film-forming coating roll, which is paired with a backup roll 3 disposed opposite to the object 2 to be processed. The coating roll 1 includes a silicone rubber sponge layer 5 having a thickness of 7 mm and a hardness of 25 ° (Asker C), a solid layer 6 having a thickness of 1 mm and a hardness of 40 ° (JISA), and an outer periphery of a core body 4 made of steel. A non-adhesive and non-adhesive tube layer (surface layer) 7 having a thickness of 0.05 mm is sequentially formed. Here, the solid layer 6 is made of silicone rubber, and the tube layer 7 is made of PFA. On the other hand, the backup roll 3 includes a core body 8 made of a steel material and a smoothed fluororesin surface layer 9 formed on the outer periphery of the core body 8. In the vicinity of the coating roll 1, a coating liquid dispensing device 10 that dispenses a coating liquid for forming a coating film on the tube layer 7 of the coating roll 1 is disposed. The coating liquid dispensing apparatus 10 contains a coating liquid 11 and a tank 13 having a nozzle 12 at the tip, and a liquid supply such as a pump for supplying the coating liquid 11 in the tank 13 to the tube layer 7 of the coating roll 1. Means (not shown) and a drive mechanism (not shown) such as a piston for moving the nozzle 12 so as to approach the tube layer 7 are provided.

こうした構成のロール塗布装置を用いて被処理物2に薄膜を形成するには、次のようにして行う。即ち、まず、塗布ロール1とバックアップロール3間に被処理物2を挟んだ状態で、駆動機構により塗布液注出装置10のノズル12を回転する塗布ロール1に近づけ、液供給手段によりタンク13内の塗布液を塗布ロール1のチューブ層7に塗布する。この後、バックアップロール3の押圧により被処理物2を介して塗布ロール1と被処理物を圧接させることで塗布液を転写させ、被処理物2に均一で薄い膜を形成する。なお、矢印Aは被処理物の移動方向を示す。   In order to form a thin film on the workpiece 2 using the roll coating apparatus having such a configuration, the following process is performed. That is, first, in a state where the workpiece 2 is sandwiched between the coating roll 1 and the backup roll 3, the nozzle 12 of the coating liquid dispensing apparatus 10 is brought close to the rotating coating roll 1 by the drive mechanism, and the tank 13 is driven by the liquid supply means. The inner coating solution is applied to the tube layer 7 of the coating roll 1. Thereafter, the coating liquid is transferred by press-contacting the application roll 1 and the object to be processed via the object to be processed 2 by pressing the backup roll 3, thereby forming a uniform and thin film on the object to be processed 2. The arrow A indicates the moving direction of the workpiece.

実施例1に係るロール塗布装置によれば、シリコーンゴムスポンジ層5とチューブ層7間に厚さ1mm、硬さ40°のソリッド層6を設けた薄膜形成用塗布ロール1を具備することにより、被処理物2にチューブ層7の変形に起因するしわ状の模様の発生を抑制できるとともに、被処理物2の凹凸や傾き、対向するロール1,3の押圧などのロール間の圧力ムラに起因する塗布厚みムラを抑制でき、乾燥後の塗布膜を1μm以下になるような均一な極薄に形成することができる。   According to the roll coating apparatus according to Example 1, by providing the thin film forming coating roll 1 provided with a solid layer 6 having a thickness of 1 mm and a hardness of 40 ° between the silicone rubber sponge layer 5 and the tube layer 7, It is possible to suppress the occurrence of wrinkle-like patterns due to deformation of the tube layer 7 on the workpiece 2, and also due to unevenness and inclination of the workpiece 2, pressure unevenness between rolls such as pressing of the opposing rolls 1, 3. The coating thickness unevenness can be suppressed, and the coating film after drying can be formed in a uniform and extremely thin thickness of 1 μm or less.

(実施例2)
図2は、本発明に係る薄膜形成用塗布ロールを備えたロール塗布装置の一例を示す。但し、図1と同部材は同符番を付して説明を省略する。
本実施例2のロール塗布装置は、実施例1と比べて塗布液11を被処理物2に塗布し、その後塗布ロール1とバックアップロール3により塗布液を薄い膜にする以外は、実施例1と同様の構成となっている。
実施例2によれば、実施例1とほぼ同様な効果を有する。
(Example 2)
FIG. 2 shows an example of a roll coating apparatus provided with a thin film forming coating roll according to the present invention. However, the same members as those in FIG.
The roll coating apparatus of the second embodiment is the same as that of the first embodiment except that the coating liquid 11 is applied to the workpiece 2 and then the coating liquid is thinned by the coating roll 1 and the backup roll 3. It is the same composition as.
According to the second embodiment, there are almost the same effects as the first embodiment.

(比較例)
比較例に係る薄膜形成用塗布ロールは、実施例1のロールと比較して、ソリッド層を除いた以外は、実施例1のロールと同じ構成となっている。また、被処理物に薄い膜を形成する方法は、実施例1の場合と同様である。
(Comparative example)
The coating roll for forming a thin film according to the comparative example has the same configuration as that of the roll of Example 1 except that the solid layer is excluded from the roll of Example 1. The method for forming a thin film on the object to be processed is the same as in the case of the first embodiment.

上記実施例1,2及び比較例に係る薄膜形成用塗布ロールを備えたロール塗布装置を用いて被処理物としてのガラス基板上に薄膜を形成し、その薄膜の厚みムラを画像処理により評価したところ、夫々図3〜図5に示す結果が得られた。なお、塗布液には、有機染料を有機溶媒で固形分が30wt%になるように希釈したものを用いた。塗布後の薄膜はそのまま風乾し、乾燥後の厚みを原子間力顕微鏡(AFM)を用いて測定するとともに塗布面の画像情報をデータ化し、色の濃い部分/薄い部分を2値化することで形成された膜の厚み分布を評価した。ここで、塗布液に染料を用いているので、色の薄い部分は膜厚が小さく、色の濃い部分は膜厚が大きくなっている。このことは、AFMでの実測値と吸光分析の測定値の比較から確認している。なお、図3〜図5において、紙面の横方向(矢印B方向)はロールの回転方向に対応しており、厚みの厚い部分14は横帯状のしわに相当する。事実、実施例1,2及び比較例に係るAFMによる薄膜の塗布厚みの平均値、薄膜の部分(白い部分),厚みの厚い部分(黒い部分)の面積、全体に対する黒い部分の面積比率を求めた結果、下記表1に示すとおりであった。なお、図3〜図5では、厚みが極端に異なる部分を検出しており、当該事例では色の薄い部分(厚みの薄い部分)がになるように処理している。

Figure 0005622434
A thin film was formed on a glass substrate as an object to be processed using a roll coating apparatus including the thin film forming coating rolls according to Examples 1 and 2 and Comparative Example, and the thickness unevenness of the thin film was evaluated by image processing. However, the results shown in FIGS. 3 to 5 were obtained. In addition, what diluted the organic dye with the organic solvent so that solid content might be 30 wt% was used for the coating liquid. The coated thin film is air-dried as it is, the thickness after drying is measured using an atomic force microscope (AFM), and the image information on the coated surface is converted into data, and the dark / light portions are binarized. The thickness distribution of the formed film was evaluated. Here, since the dye is used for the coating liquid, the light-colored portion has a small film thickness, and the dark-colored portion has a large film thickness. This is confirmed from the comparison between the actual measurement value by AFM and the measurement value by absorption spectrometry. 3-5, the horizontal direction (arrow B direction) of a paper surface respond | corresponds to the rotation direction of a roll, and the thick part 14 is corresponded to a horizontal strip-like wrinkle. In fact, the average value of the coating thickness of the thin film by AFM according to Examples 1 and 2 and the comparative example, the area of the thin film portion ( white portion), the thick portion ( black portion), and the area ratio of the black portion to the whole are obtained. The results were as shown in Table 1 below. In FIGS. 3 to 5, portions with extremely different thicknesses are detected, and in this case, processing is performed so that light-colored portions (thick-thickness portions) become white .
Figure 0005622434

上記画像処理の試験により、実施例1,2に夫々対応する図3,図4では厚みの厚い部分14の領域は、比較例に対応する図5に比べて著しく少ないことが分かる。本発明の場合は上述したような厚み及び硬さを有したソリッド層の存在により、比較例の場合と比べ、しわ模様の発生が抑制されており、その結果として塗膜の厚み均一性が大幅に改善されていることがわかる。なお、本試験の画像処理では、特定色のみを注出し、エッヂ検出を行ってからコントラストを調整し、2値化することで図3〜図5のような画像を得た。この画像は塗布物の色が濃い部分と薄い部分を明確に切り分けたものに相当する。 From the above image processing test, it can be seen that in FIGS. 3 and 4 corresponding to the first and second embodiments, the region of the thick portion 14 is remarkably smaller than that in FIG. 5 corresponding to the comparative example. In the case of the present invention, the presence of the solid layer having the thickness and hardness as described above suppresses the generation of wrinkle patterns as compared with the comparative example, and as a result, the thickness uniformity of the coating film is greatly increased. It can be seen that it has been improved. In the image processing of this test, only specific colors were poured out, edge detection was performed, contrast was adjusted, and binarization was performed to obtain images as shown in FIGS. This image corresponds to an image obtained by clearly separating a dark portion and a light portion of the coated material.

なお、この発明は、上記実施形態そのままに限定されるものではなく、実施段階ではその要旨を逸脱しない範囲で構成要素を変形して具体化できる。また、上記実施形態に開示されている複数の構成要素の適宜な組み合せにより種々の発明を形成できる。例えば、実施形態に示される全構成要素から幾つかの構成要素を削除してもよい。更に、異なる実施形態に亘る構成要素を適宜組み合せてもよい。   Note that the present invention is not limited to the above-described embodiment as it is, and can be embodied by modifying the constituent elements without departing from the scope of the invention in the implementation stage. Further, various inventions can be formed by appropriately combining a plurality of constituent elements disclosed in the embodiment. For example, some components may be deleted from all the components shown in the embodiment. Furthermore, you may combine suitably the component covering different embodiment.

具体的には、上記実施例では、ソリッド層上に非粘着性のチューブ層を設けた場合について述べたが、これに限らず、非粘着性のコーティング層を設けてもよい。また、ソリッド層の厚さ、硬さも上記実施例で記載した数値に限らない。更に、ロール塗布装置において、塗布ロール及びバックアップロールの下流側に、被搬送物上に形成した薄膜を乾燥するヒータ等からなる乾燥装置を配置してもよい。   Specifically, in the above embodiment, the case where the non-adhesive tube layer is provided on the solid layer has been described. However, the present invention is not limited to this, and a non-adhesive coating layer may be provided. Further, the thickness and hardness of the solid layer are not limited to the values described in the above embodiments. Furthermore, in the roll coating device, a drying device including a heater or the like for drying the thin film formed on the transported object may be disposed on the downstream side of the coating roll and the backup roll.

更には、上記実施例では、塗布ロールとバックアップロールを用いて塗布ロールと被処理物を圧接させる場合について述べたがこれに限らず、例えば図6に示すように薄膜形成用塗布ロール1に対して2つの張架ロール16a,16bを配置し、塗布ロール1と張架ロール16a,16b間に被処理物2を圧接する場合、あるいは図7に示すように薄膜形成用塗布ロール1の下に架台17を設け、塗布ロール1を架台17側に押し付けて被処理物2を圧接する場合が挙げられる。   Furthermore, in the said Example, although the case where a coating roll and a to-be-processed object were press-contacted using a coating roll and a backup roll was described, it is not restricted to this, For example, as shown in FIG. Two stretching rolls 16a and 16b are disposed and the workpiece 2 is pressed between the coating roll 1 and the stretching rolls 16a and 16b, or under the thin film forming coating roll 1 as shown in FIG. The case where the mount 17 is provided, the to-be-processed object 2 is pressed-contacted by pressing the application roll 1 to the mount 17 side is mentioned.

1…薄膜形成用塗布ロール、2…被処理物、3…バックアップロール、4,8…芯体、5…シリコーンゴムスポンジ層、6…ソリッド層、7…チューブ層、9…表面層、10…塗布液塗布装置、12…ノズル、14…厚みの厚い部分、15…薄膜の部分。 DESCRIPTION OF SYMBOLS 1 ... Coating roll for thin film formation, 2 ... To-be-processed object, 3 ... Backup roll, 4, 8 ... Core body, 5 ... Silicone rubber sponge layer, 6 ... Solid layer, 7 ... Tube layer, 9 ... Surface layer, 10 ... Coating liquid coating apparatus, 12 ... nozzle, 14 ... thick part, 15 ... thin film part.

Claims (3)

薄膜形成用の塗布液を用いて被処理物に薄膜を形成するための薄膜形成用塗布ロールであって、芯体と、この芯体の外周に設けられたスポンジ層と、このスポンジ層の外周に設けられたソリッド層と、このソリッド層の外周に設けられた,塗布液に対して非粘着性及び非接着性をもった表面層とを具備することを特徴とする薄膜形成用塗布ロール。 A thin film forming coating roll for forming a thin film on an object to be processed using a thin film forming coating liquid, a core body, a sponge layer provided on an outer periphery of the core body, and an outer periphery of the sponge layer A coating roll for forming a thin film, comprising: a solid layer provided on the surface; and a surface layer provided on the outer periphery of the solid layer and having non-adhesiveness and non-adhesiveness to the coating solution. 請求項1記載の薄膜形成用塗布ロールを用いて被処理物に薄膜を形成する塗布方法であり、前記塗布ロールまたは被処理物に薄膜形成用の塗布液を塗布した後、塗布ロールと被処理物を圧接させた状態で被処理物を通すことで被処理物に薄膜を形成することを特徴とする塗布方法。   A coating method for forming a thin film on an object to be processed using the coating roll for forming a thin film according to claim 1, wherein a coating liquid for forming a thin film is applied to the coating roll or the object to be processed, and then the coating roll and the object to be processed. A coating method, wherein a thin film is formed on an object to be processed by passing the object to be processed in a state where the object is in pressure contact. 請求項1記載の薄膜形成用塗布ロールと、この塗布ロールに被処理物を圧接した状態で通す圧接手段と、前記塗布ロール又は被処理物に塗膜形成用の塗布液を注出する塗布液注出装置とを具備することを特徴とするロール塗布装置。   2. A coating roll for forming a thin film according to claim 1, press-contacting means for passing an object to be processed in pressure contact with the application roll, and a coating liquid for pouring a coating liquid for forming a coating film on the coating roll or the object to be processed. A roll coating apparatus comprising: a pouring device.
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