JP5610259B2 - Amorphous alloy, optical component, and method of manufacturing optical component - Google Patents

Description

  The present invention relates to an amorphous alloy containing Fe as a main component, an optical component using the same, and a method for manufacturing the optical component.

  Conventionally, Fe-based amorphous alloys have been studied. Japanese Patent Application Laid-Open No. 11-074110 (Patent Document 1) discloses a composition for widening the supercooling temperature interval of an Fe-based amorphous alloy for a bulk magnetic core of an electronic component. Specifically, one or more elements of Fe, Co, and Ni are the main components, and one or more elements of Zr, Nb, Ta, Hf, Mo, Ti, and V are used. And Fe-based amorphous alloys containing B are described. In addition, (Fe1-a-bCoaNib) 100-xyMxBy (where 0.042 ≦ a ≦ 0.29, 0.042 ≦ b ≦ 0.43, 5 atomic% ≦ x ≦ 20 atomic%, 10 atomic% ≦ y ≦ 22 atomic%, and M is an element composed of one or more of Zr, Nb, Ta, Hf, Mo, Ti, and V).

JP 11-074110

  The above-mentioned conventional amorphous alloy containing Fe as a main component has a supercooling region, and has been a material aimed at improving the properties of high strength, high Young's modulus, and soft magnetism. In particular, many manufacturers have focused on the use of magnetic properties and have continued to search for bulk amorphous alloys having larger soft magnetic properties. However, conventional amorphous alloys containing Fe as a main component are produced by a combination of only metal elements. Therefore, although a magnetic material having high characteristics can be obtained, it has been difficult to obtain a metastable bulk amorphous alloy excellent in oxidation resistance.

  Therefore, in Patent Document 1 described above, a metalloid such as B having a large mixing enthalpy is mixed to stabilize amorphous. In this case, the selection of elements has been made with the maximum consideration of magnetic properties, a large amount of Co and Ni elements other than Fe are combined, and the addition range of metalloids such as B is set to such an extent that amorphous stability is not reduced. At that time, the addition range of the metalloid such as B is 22 at% or less, and adding a metalloid in an amount larger than 22 at% inhibits the amorphous stabilization of the material and causes embrittlement. Moreover, although there is a report that Cr or Co is added in an amount of 20% or more for the purpose of improving the oxidation resistance, there has been no report on the effect by addition of a trace amount or substitution.

The present invention has been made in view of such a background art, and an object thereof is to provide an amorphous alloy excellent in oxidation resistance, castability, formability, and amorphous stability.
Another object of the present invention is to provide an optical component using the above amorphous alloy and a method for producing the same.

The amorphous alloy that solves the above-described problem is a composition formula Fe _a -B _b -Zr _c -Ni _d -Co _e (a, b, c, d, e indicate atomic composition percentages (at%), 60 0.0 ≦ a ≦ 69.4, 22.3 ≦ b ≦ 29.3, 3.6 ≦ c ≦ 7.8, 3.0 ≦ d ≦ 7.0, 0.5 ≦ e ≦ 2.0 And the sum of a + b + c + d + e is 99.8 or more).

An optical component that solves the above-mentioned problems is made of the above amorphous alloy, and the volume fraction of the amorphous phase of the amorphous alloy is at least 60% or more.
A method of manufacturing an optical component that solves the above-described problem is that the amorphous alloy is heated to a temperature range of a supercooled liquid region ΔTx (ΔTx = crystallization temperature Tx−glass transition point Tg) and added by molding. It is characterized by having a step of cooling to at least the glass transition point Tg or less in a state where the pressure is maintained after being pressed.

According to the present invention, it is possible to provide an amorphous alloy having excellent oxidation resistance, castability, formability, and amorphous stability.
Moreover, the optical component using said amorphous alloy and its manufacturing method can be provided.

It is a graph which shows the correlation of Co substitution amount of Example 1 and a supercooled liquid temperature. 4 is a graph showing the results of thermogravimetric analysis when Co substitution amount α = 0 in Example 1. FIG. 4 is a graph showing the results of thermogravimetric analysis when Co substitution amount α = 1 in Example 1. FIG. 4 is a graph showing the results of thermogravimetric analysis when Co substitution amount α = 3 in Example 1. FIG. 4 is a graph showing the results of thermogravimetric analysis when Co substitution amount α = 5 in Example 1. FIG. 2 is a graph showing a bending point temperature and an oxidation weight increase rate of Example 1. It is a graph which shows the correlation of B addition amount and supercooled liquid temperature of Example 1. It is a graph which shows the correlation of Ni addition amount of Example 1, and a supercooled liquid temperature. It is a graph which shows the correlation of Zr addition amount and supercooled liquid temperature of Example 1. It is process drawing which shows one Example of the manufacturing method of the optical component of this invention. It is the schematic which shows the phase transition of the amorphous alloy of this invention.

Hereinafter, the present invention will be described in detail.
The amorphous alloy according to the present invention has a composition formula Fe _a -B _b -Zr _c -Ni _d -Co _e (a, b, c, d, e indicate atomic composition percentages (at%), 60.0 ≦ a ≦ 69.4, 22.3 ≦ b ≦ 29.3, 3.6 ≦ c ≦ 7.8, 3.0 ≦ d ≦ 7.0, 0.5 ≦ e ≦ 2.0 And the sum of a + b + c + d + e is 99.8 or more). In addition, atomic composition percentage (at%) represents the ratio of each element which comprises an alloy.

Further, Co of the amorphous alloy according to the present invention is formed by replacing Ni. Further, the amorphous alloy according to the present invention includes the composition formula _{Fe a -B b -Zr c -Ni d} -Co e, and the crystallization temperature Tx of the amorphous alloy, the glass transition temperature Tg Then, the temperature range of the supercooled liquid region ΔTx (ΔTx = crystallization temperature Tx−glass transition point Tg) is 50K or more.
The amorphous alloy mainly composed of Fe of the present invention has excellent oxidation resistance, castability, amorphous stability and formability, and has a wide supercooling liquid temperature range, low cost, and a composition that contributes to resource saving. is there.

The amorphous alloy of the present invention may further contain inevitable impurities composed of elements other than Fe 2 _, B, Zr, Ni and Co as long as they are less than 0.2 at% based on the whole. What is considered as an inevitable impurity is an element contained in the original raw material or an element mixed in the following manufacturing process. Inevitable impurities may include Ti, V, Cr, Y, Nb, Ta, Mo, W, Cu, La, Hf, Al, Sn, Ca, Mg, Ge, C, Si, P, and the like.

Amorphous alloys of the present invention, in the composition formula _{Fe a -B b -Zr c -Ni d} -Co e, has a high oxidation resistance, amorphous stability and castability.
The content of Fe element is desirably 60.0 ≦ Fe _a ≦ 69.4, and preferably 60 ≦ Fe _a ≦ 68. Fe element is the main component of the amorphous alloy of the present invention, and when it is less than 60 at%, it does not become an amorphous alloy having a supercooled liquid temperature range. Moreover, an upper limit can be defined from content of the other element mentioned later.

The B element content is 22.3 ≦ B _b ≦ 29.3 at%, preferably 23.0 ≦ B _b ≦ 25.5. Conventionally, when the content of the metalloid such as B is more than 22 at% as described above, it is considered that the amorphous stabilization is inhibited and embrittlement occurs. However, in the case of the present invention, it has been found that when the content is smaller than 22.3 at%, the amorphous stability is lowered and brittleness is likely to occur. However, if it is greater than 29.3 at%, the metal properties of the material will be reduced and extreme embrittlement will occur.

The Zr element content is 3.6 ≦ Zr _c ≦ 7.8, preferably 4.6 ≦ Zr _c ≦ 6.8. By containing a Zr element of 3.6 at% or more and 7.8 at% or less, an amorphous alloy having a wide supercooled liquid temperature range can be obtained. When the Zr element is smaller than 3.6 at%, the supercooled liquid temperature range is narrowed, which adversely affects the subsequent secondary forming. Moreover, when more than 7.8 at%, the viscosity of a molten metal increases rapidly, castability deteriorates, and raw material cost becomes higher.

The content of Ni element is 3.0 ≦ Ni _d ≦ 7.0, preferably 4.0 ≦ Ni _d ≦ 6.0. When the Ni element is less than 3 at%, the metallic characteristics are reduced and embrittled. When the Ni element is more than 7 at%, the supercooled liquid temperature range is narrowed and adversely affects the subsequent secondary forming.

The content of Co element is 0.5 ≦ Co _e ≦ 2.0, preferably 0.7 ≦ Co _e ≦ 1.5. When the content of Co element is less than 0.5 at%, oxidation during casting and secondary molding increases, resulting in an increase in the viscosity of the melt and corrosion on the product surface. Gets worse. That is, the moldability deteriorates due to the reduction in oxidation resistance. At the same time, the cost of a highly accurate atmosphere control device for preventing oxidation increases. On the other hand, when the content of Co element is more than 2.0 at%, the amorphous stability is lowered, the supercooled liquid temperature range is narrowed, and there is an adverse effect such that high shape accuracy is not obtained in secondary molding. . Note that the Co element is more preferable because an amorphous alloy advantageous in terms of productivity can be obtained by substituting a part of the Ni element.

  FIG. 8 is a schematic view showing the phase transition of the amorphous alloy of the present invention. As shown in the figure, an amorphous alloy undergoes a phase change of amorphous phase (solid) -supercooled liquid-crystal layer (solid) -liquid phase by heating. Tg represents a glass transition point, Tx represents a crystallization temperature, ΔTx represents a supercooled liquid region, and ΔTx = crystallization temperature Tx−glass transition point Tg. Tm represents a melting point.

  The amorphous alloy of the present invention has a supercooled liquid region ΔTx (ΔTx = crystallization temperature Tx−glass transition point Tg) of 50K or more. In a preferred embodiment, 60K or more is realized. Widening the supercooled liquid region means that the non-equilibrium amorphous phase becomes more stable with respect to temperature. That is, it becomes easy to produce an amorphous mass (bulk) having a large volume by casting. Furthermore, it is possible to obtain a wide range of molding conditions in the supercooled liquid region, which greatly contributes to productivity.

  The method for producing an amorphous metal according to the present invention comprises a step of melting and mixing raw materials and alloying, and melting and heating the alloy ingot to a melting temperature Tm (melting point) + about 280 K in a quartz nozzle. It consists of the process of producing a ribbon by the method (4000 rpm).

Further, the glass transition point Tg, the crystallization temperature Tx, and the supercooled liquid temperature ΔTx of the alloy are confirmed by the process and the differential scanning calorimetry process (heating rate of +40 K / min).
Further, the castability of the alloy plate and the crystal phase of the plate are confirmed by a process of melting and mixing raw materials to form an alloy, a process of remelting and compressing the alloy ingot, and an X-ray diffraction analysis process.

  As a means other than the confirmation of castability from the surface, an ingot crushed in a quartz building is heated and melted by a high frequency power source, and a copper mold (φ0) is melted with an inert gas from a melting crucible (quartz, outlet hole diameter φ0.8 mm). (5 mm, length 75 mm), and the filling amount, casting surface, and X-ray diffraction are confirmed, and the viscosity, defect, and amorphous stability are confirmed.

Finally, as secondary molding for obtaining an optical component, the plate is formed into an optical component shape by a mold compression molding process, and then the shape accuracy (deviation from the mold shape) is confirmed.
The above plate manufacturing process and secondary forming process means are examples, and products obtained by other means are also included.

  The final product is mainly for optical parts, that is, products such as high-precision molds, various reflecting mirrors, anti-reflection surfaces, etc. It can also be used for small products. Further, the final optical component is not only obtained from a bulk material, but also an optical component obtained by secondary molding of a film or foil.

  The optical component of the present invention is made of the above amorphous alloy, and the volume fraction of the amorphous phase of the amorphous alloy is at least 60% or more. This describes the crystalline phase of an optical component processed from the amorphous alloy hot, and the amorphous phase of the component processed from the amorphous alloy heated is at least 60% of the component. With the above (volume ratio), since a high amorphous volume ratio can be maintained, sufficient shape transferability can be exhibited, and an optical product with high shape accuracy can be obtained.

  In the method for producing an optical component according to the present invention, the amorphous alloy is heated to a temperature range of a supercooled liquid region ΔTx (ΔTx = crystallization temperature Tx−glass transition point Tg), and is pressed by molding to form. Then, it is characterized by having a step of cooling to at least the glass transition point Tg or less while maintaining the pressure.

Hereinafter, the present invention will be specifically described with reference to examples.
A high-purity (purity 98% or more) Fe, B, Zr, Ni, Co material is mixed and melted by arc discharge heating to produce a button-shaped ingot, which is re-melted by high-frequency heating, and then a quartz nozzle with Ar gas Then, the molten metal was extruded and rapidly solidified with a copper roll to form a ribbon. The alloy component is composed of Fe _65.6 -B _23.7 -Zr _5.7 -Ni _5-α -Co _α (where α = 0.5, 1.0, 2.0 at%). The produced amorphous alloy is refined to 99.8% or more by removing impurities such as oxygen and low-melting point metals during melting by arc discharge.

FIG. 1 shows a composition formula Fe _65.6 -B _23.7 -Zr _5.7 -Ni _5-α -Co _α (where α = 0, 0.5, 1.0, 2.0, 3.0 , 5.0 at%) and the supercooled liquid temperature (ΔTx).

2 (a) to (d) show the TGA (thermal properties) of an amorphous alloy ribbon of the composition formula Fe _65.6 -B _23.7 -Zr _5.7 -Ni _{5 -α} -Co _α due to atmospheric oxidation. It is the graph which showed the result of gravimetric analysis. 2A is α = 0 in FIG. 1, FIG. 2B is α = 1.0 in FIG. 1, FIG. 2C is α = 3 in FIG. 1, and FIG. FIG. 1 shows a plot of the rate of increase in weight due to oxidation in simultaneous differential thermal calorimetry when α = 5 in FIG.
FIG. 3 shows the temperature at the inflection point of the TGA plot and the rate of increase in oxidized weight at that time for each Co element substitution amount in FIGS. 2 (a) to 2 (d).

  Table 1 shows experimental results of glass transition point (Tg), crystallization temperature (Tx), supercooled liquid temperature (ΔTx), and castability obtained from endothermic exothermic reaction data by differential scanning calorimetry using the ribbon. Show. Comparative Example 1 when α = 0, Experimental Example 1 when α = 0.5, Experimental Example 2 when α = 1, Experimental Example 3 when α = 2, and Comparative Example when α = 3 In Experimental Example 2, α = 5 is set as Comparative Experimental Example 3.

(Measuring method)
(1) Glass transition point Tg
It calculated | required from the endothermic bending point of the graph shown to Fig.2 (a)-(d).
(2) Crystallization temperature Tx
It calculated | required from the exothermic bending point of the graph shown to Fig.2 (a)-(d).
(3) Tg point weight increase rate The temperature of the supercooled liquid of the alloy is confirmed by differential scanning calorimetry (heating rate of +40 K / min). Further, by the differential thermal calorific value simultaneous measurement step, a change in weight due to oxidation at the glass transition point Tg is confirmed at a heating rate of +10 K / min in an air flow atmosphere. From the scale of Tg% on the right axis of the graph shown in FIGS. 2A to 2D at the glass transition point Tg obtained in (1), the Tg point weight increase rate was calculated.

(4) Tx point weight increase rate The temperature of the supercooled liquid of the alloy is confirmed by differential scanning calorimetry (heating rate of +40 K / min). In addition, by the differential thermal calorific value simultaneous measurement step, the weight change due to oxidation at the crystallization temperature Tx is confirmed at a heating rate of +10 K / min in an air flow atmosphere. From the scale of Tg% on the right axis of the graph shown in FIGS. 2A to 2D at the crystallization temperature Tx obtained in (2), the Tx point weight increase rate was calculated.
(5) Castability It was determined at the time of alloy dissolution preparation and by injection casting into a mold φ0.5 × 70 mm.
(6) Roughness of molding surface (Ra)
The mold of the cemented carbide was smoothed to Ra 1.0 nm, and the surface roughness of the molded product was determined by a non-contact three-dimensional surface shape measuring device after the secondary compression molding. The molding surface becomes rough as the oxidation resistance deteriorates.

  From FIG. 3, it was recognized that as the amount of substitution of Co element with respect to Ni element was increased, the rate of weight increase due to oxidation decreased and the inflection point temperature at which oxidation began increased. That is, it was confirmed that the oxidation resistance was greatly improved by substituting a small amount of Co element as compared with an alloy in which Co element was not substituted.

Comparing the examples and comparative examples of Table 1, castability by substitution of Co element, amorphous stability (Delta] Tx ≧ 50K), the surface roughness Ra after the secondary molding showing the oxidation resistance is good range 0 It was found that .5 ≦ Co substitution amount (at%) ≦ 2.0.

  In the case where no Co element was added, although there was castability and amorphous stability, the oxidation resistance was inferior, and it was necessary to create a sufficient inert atmosphere during production such as secondary molding. Therefore, an expensive device is required, leading to an increase in cost. Next, when the Co element was added at 3 and 5 at%, the oxidation resistance was greatly improved, but ΔTx was decreased and crystals were formed in the cast product.

High purity (98% or more purity) Fe, B, Zr, Ni, and Co materials are mixed and dissolved by arc discharge heating to produce a button-shaped ingot. After melting again by high frequency heating, Ar gas is used to make a quartz nozzle. The molten metal was extruded and rapidly solidified with a copper roll to form a ribbon. The alloy component is composed of Fe _89.1-a -B _a -Zr _5.7 -Ni ₄ -Co ₁ (where a = 22.3, 25, 29.7 at%). The produced amorphous alloy is refined to 99.8% or more by removing impurities such as oxygen and low-melting point metals during melting by arc discharge.

FIG. 4 shows a composition formula Fe _89.1-a -B _a -Zr _5.7 -Ni ₄ -Co ₁ (where a = 15, 20, 22.3, 25, 29.3, 30 at%) and supercooling. It is a graph which shows the correlation of liquid temperature ((DELTA) Tx).

  Table 2 shows the glass transition point (Tg), crystallization temperature (Tx), supercooled liquid temperature (ΔTx), and castability experimental results obtained from the endothermic exothermic reaction data by differential scanning calorimetry using the ribbon. Show. Comparative experiment example 4 when a = 15, comparative experiment example 5 when a = 20, experimental example 4 when a = 22.3, experimental example 5 when a = 25, and a = 29.3 The case is Experimental Example 6, and the case of a = 30 is Comparative Experimental Example 6.

  Comparing the examples in Table 2 and the comparative example, the range in which the surface roughness Ra after secondary molding showing good castability, amorphous stability (ΔTx ≧ 30K) and oxidation resistance by adding a small amount of element B is good It was confirmed that 22.3 ≦ B addition amount (at%) ≦ 29.3.

  When the element B was added at 15 or 20 at%, the hot water temperature dropped and the hot water flow was good, but ΔTx was small and an amorphous bulk could not be obtained. Viscosity sufficient to flow through a thin mold was not obtained, casting defects were also observed, and it was confirmed that the castability was poor. Also, the hot water temperature was high and there was a problem economically. Next, in the case where B element was added at 30 at%, an amorphous ribbon could not be obtained continuously. Also, the hot water temperature was high, and many pores were found on the ribbon, which caused problems both economically and productively. For this reason, the casting experiment to the mold was not performed.

A high-purity ferroboron (purity 98 at%) and high-purity (purity 98% or more) Fe, B, Zr, Ni, Co materials are mixed and dissolved by high-frequency heating to produce a rod-shaped ingot. After re-melting by high-frequency heating, The molten metal was extruded from a quartz nozzle with Ar gas and rapidly solidified with a copper roll to form a ribbon. The alloy component is composed of (Fe _0.69 -B _0.25 -Zr _0.06 ) _99.0-X -Ni _X -Co ₁ (where x = 2, 4, 6 at%). The produced amorphous alloy is refined to 99.8% or more by removing impurities such as oxygen and low-melting point metals during melting by arc discharge.

FIG. 5 shows the composition formula (Fe _0.69 -B _0.25 -Zr _0.06 ) _99.0-X -Ni _X -Co ₁ (where x = 0, 2, 4, 6, 9 at%) and the excess. It is a graph which shows the correlation of cooling liquid temperature ((DELTA) Tx).

  Table 3 shows experimental results of glass transition point (Tg), crystallization temperature (Tx), supercooled liquid temperature (ΔTx), and castability obtained from endothermic exothermic reaction data by differential scanning calorimetry using the ribbon. Show. Comparative experiment example 7 when x = 9, experimental example 7 when x = 6, experimental example 8 when x = 4, experimental example 9 when x = 2, comparative experimental example when x = 0 Eight.

  Comparing the examples in Table 3 with the comparative examples, the range in which the surface roughness Ra after the secondary forming showing the castability, amorphous stability and oxidation resistance depending on the amount of addition of Ni element is 3 ≦ Ni It was observed that the amount added (at%) ≦ 7.

  When Ni element was not added, the amorphous stability was low, so that a sufficient amorphous state could not be obtained. Also, the hot water temperature was high, and many pores were found on the ribbon, which caused problems both economically and productively. Next, when Ni element was added at 10 at%, since the amorphous stability was low, crystallization and casting were not filled.

High-purity ferroboron (purity 98 at%) and high-purity (purity 98% or more) Fe, Zr, Ni, Si materials are mixed and dissolved by high-frequency heating to produce a rod-shaped ingot. After melting again by high-frequency heating, Ar gas Then, the molten metal was extruded from a quartz nozzle and rapidly solidified with a copper roll to form a ribbon. The alloy component is composed of Fe _71.3-b -B _23.7 -Zr _b -Ni ₄ -Co ₁ (where b = 3.6, 5.7, 7.8 at%). The produced amorphous alloy is refined to 99.8% or more by removing impurities such as oxygen and low-melting point metals during melting by arc discharge.

FIG. 6 shows a composition formula Fe _71.3-b -B _23.7 -Zr _b -Ni ₄ -Co ₁ (where b = 1.9, 3.6, 5.7, 7.8 at%) and supercooling. It is a graph which shows the correlation of liquid temperature ((DELTA) Tx).

  Table 4 shows experimental results of glass transition point (Tg), crystallization temperature (Tx), supercooled liquid temperature (ΔTx), and castability obtained from endothermic exothermic reaction data by differential scanning calorimetry using the ribbon. Show. Comparative experiment example 9 when b = 1.9, experimental example 10 when b = 3.6, experimental example 11 when b = 5.7, experimental example 12 when b = 7.8, b = 9.5 is set as Comparative Experiment Example 10.

  Comparing the examples in Table 4 with the comparative examples, the range in which the surface roughness Ra after the secondary forming showing the castability, amorphous stability, and oxidation resistance depending on the amount of Zr element added is 3.6. It was observed that ≦ Zr addition amount (at%) ≦ 7.8.

  When Zr element was added at 1.9 and 9.5 at%, an amorphous ribbon could not be obtained in the first place. When 1.9 at% was added, the hot water flow was very good, and although ribbon formation was possible, all was crystallized. Moreover, in the case of 9.5 at%, the hot water flow was bad, and the ribbon could not be produced continuously. For this reason, casting experiments on molds were not performed in both comparative examples.

  FIG. 7 is a process diagram showing an embodiment of a method for producing an optical component of the present invention. FIG. 7 shows an example in which a reflective optical element is formed by molding from an alloy plate 5 × 3 × 0.7 mmt of Example 1 obtained by centrifugal casting into a metal mold. The type of alloy is not limited to Example 1. The casting method is not limited as long as it can be rapidly cooled. Further, the alloy plate of the molding includes that the entire plate is made of an amorphous alloy plate or an alloy film made of an amorphous material only at the outer periphery.

  First, in FIG. 7A, an amorphous alloy plate 7 as a molding object was set in the lower mold 8 inside the chamber 2. The upper mold 6 and the lower mold 8 can use cemented carbide, ceramics such as SiC and quartz, stainless steel, various superalloys, tool steel, and amorphous alloys having a high glass transition point. . The mold surface may be coated with a film for improving mold durability such as a nitride film, a carbonized film, or a noble metal film. Although the ceramic heater 5 and the cartridge heater 12 are illustrated as the heating source, the heating method is not limited thereto. A halogen heater 3 and a reflector 10 are disposed around the upper mold 6 and the lower mold 8. Reference numeral 4 denotes a vacuum exhaust port used when replacing the atmosphere in the chamber 2.

  In FIG. 7B, the alloy plate 7 is compression-molded by moving the press shaft in the axial direction after heating in the range of the glass transition point Tg or more and the crystallization temperature Tx or less in the non-oxidizing atmosphere near the forming. . Reference numeral 9 denotes an amorphous alloy plate being formed. After compression molding, pressurization and slow cooling to Tg or less, then release the pressure and take out the optical product 13. FIG. 7C shows the optical product 13.

In order to increase the structural strength of the reflective optical element, the optical product can be provided with ribs on the outer periphery and inside. Further, depending on the plate thickness and size, the ribs may be only on the outer periphery or not. A mounting reference surface can be formed on the side surface at the same time as hot forming. In the present embodiment, an example of a product having a spherical optical surface on a rectangular plate is shown, but the shape and thickness of the alloy plate and the shape to be the optical surface are not particularly limited.
The shape accuracy of the optically effective surface of the produced optical product was shifted by a maximum of 0.5 μm compared to the accuracy of the upper mold 6 finished with high accuracy, and it was confirmed that the transfer was performed with high accuracy.

  The present invention can provide an amorphous alloy mainly composed of Fe, which is excellent in castability and formability, and can be used for an optical component using the amorphous alloy.

DESCRIPTION OF SYMBOLS 1 Press shaft 2 Chamber 3 Halogen heater 4 Vacuum exhaust port 5 Ceramic heater 6 Upper metal mold 7 Amorphous alloy plate 8 Lower metal mold 9 Metal plate in process of molding 10 Reflector 11 Body 12 Cartridge heater 13 Optical product

Claims (5)

Composition formula _{Fe a -B b -Zr c -Ni d} -Co e (a, b, c, d, e represents an atomic composition percent (at%), 60.0 ≦ a ≦ 69.4,22.3 ≦ b ≦ 29.3, 3.6 ≦ c ≦ 7.8, 3.0 ≦ d ≦ 7.0, 0.5 ≦ e ≦ 2.0, and the sum of a + b + c + d + e is 99. It is an amorphous alloy characterized by comprising 8 or more).   The amorphous alloy according to claim 1, wherein the Co is formed by substituting Ni.   When the crystallization temperature of the amorphous alloy is Tx and the glass transition point is Tg, the temperature range of the supercooled liquid region ΔTx (ΔTx = crystallization temperature Tx−glass transition point Tg) is 50K or more. The amorphous alloy according to claim 1 or 2. An optical component comprising the amorphous alloy according to any one of claims 1 to 3, wherein the volume fraction of the amorphous phase of the optical component is at least 60% or more.   The amorphous alloy according to claim 1 is heated to a temperature range of a supercooled liquid region ΔTx (ΔTx = crystallization temperature Tx−glass transition point Tg) and pressed by molding to maintain the pressure. And a process for cooling to at least the glass transition point Tg or less in the finished state.

Images