JP5593814B2 - Airflow generator and sensory presentation device - Google Patents

Description

  The present invention relates to an airflow generation device and a sensory presentation device that generate an airflow by electrical control.

Patent Document 1 discloses an apparatus that controls an air flow by applying a voltage to an electrode formed on an insulating substrate.
FIG. 1 is a diagram showing the configuration of the surface plasma actuator of Patent Document 1. In FIG. As shown in FIGS. 1A and 1B, the first front electrode 102 and the second front electrode 103 are arranged in parallel and opposed to each other on the surface of the insulator 101 at intervals. When a high electric field is generated between the first front side electrode 102 and the second front side electrode 103 and the back side electrode 104 provided on the back side, the front side electrode and the back side electrode are arranged according to the arrangement relationship between the front side electrode and the back side electrode. Plasma jets are generated in parallel to the surface from the mutually facing edges. These plasma jets collide at the middle part of each electrode, and a plasma jet 105 perpendicular to the surface of the insulator 101 is formed as shown in FIG. At that time, an induced air flow 106 is generated in which surrounding gas is guided at right angles to the surface of the insulator 101.

  As shown in FIGS. 1C, 1D, and 1E, a ring-shaped surface side electrode 108 having a central opening 107 or a quadrangular surface side electrode 108 having a central opening 107 is provided. When a high electric field is generated between the back side electrode provided on the back side, the surface from the edge on the center opening 107 side of the front side electrode 108 toward the center depends on the arrangement relationship between the front side electrode and the back side electrode. A plasma jet 109 is generated in parallel with each other. The plasma jets collide with each other at the center, and a plasma jet 110 is formed that moves upward at a right angle therefrom. In addition, an induced air flow 111 is generated at a right angle to the surface by being induced by the plasma jet 110.

JP 2008-270110 A

  However, since the surface plasma actuator shown in Patent Document 1 applies a voltage between the electrode formed on the surface of the insulator and the electrode formed on the back surface, for example, a high voltage of about 3000 V is required. Become. Further, since the plasma jet is generated from the electrode on the surface, it is basically necessary to expose the electrode. Even if the protective film is coated, a porous protective film is provided, which causes a problem in terms of durability. Furthermore, if the air volume and speed of the induced airflow are increased, the voltage applied between the electrodes is increased, but arc discharge may occur, and there is a problem that it is difficult to obtain a sufficient induced airflow.

  An object of the present invention is to provide a highly durable airflow generation device and a sensory presentation device that generate an airflow having a high air volume and speed in a direction perpendicular to the surface of a substrate.

The airflow generation device of the present invention is arranged at least locally on an insulating substrate in parallel or substantially in parallel with each other, and includes a plurality of linear electrodes covered with a dielectric film, and an n-phase (n is 3 or more). And a multi-phase pulse power supply that outputs a pulse voltage of
The plurality of linear electrodes are opposed to each other across an arbitrary center point or center line on the insulating substrate,
The plurality of linear electrodes are connected to the multi-phase pulse power supply so that the same pulse voltage is applied to the central electrode or the linear electrode symmetrical to the central line,
A pulse voltage is configured to be applied to the plurality of linear electrodes so that an air flow is generated toward the center point or the center line .

  With this configuration, among the plurality of linear electrodes, a dielectric barrier discharge is generated between a pair of adjacent linear electrodes to which a voltage is applied, and the charged particles generated by the discharge are accelerated by the electric field. Gas molecules are transported. Therefore, the flow rate of the airflow can be increased by relatively increasing the number of linear electrodes. Further, since the linear electrode is covered with the dielectric film, durability can be maintained.

A connection portion for electrically connecting the multiphase pulse power supply to the plurality of linear electrodes may be provided, and a capacitor may be inserted in series in the connection portion.
According to this configuration, the discharge between the linear electrodes does not lead to a spark discharge, and the breakdown of the electrode and the dielectric film in the vicinity of the electrode due to the spark discharge is prevented.

The plurality of linear electrodes are each linear, for example, arranged on the left and right of the center line in parallel or substantially parallel to the center line, and the direction following the order of the phase of the pulse voltage is the center line. In contrast, the direction is symmetrical.
If it is this structure, since the shape of a linear electrode is simple, while being easy to manufacture, the connection with a polyphase pulse power supply also becomes easy.

  The plurality of linear electrodes are, for example, concentric polygons or concentric circles. With this structure, it is possible to generate an air current spotwise in a direction perpendicular to the surface of the insulating substrate.

In the linear electrode, for example, a distance between adjacent linear electrodes among the plurality of linear electrodes is a value within a range of 1.7 μm to 90 μm, and a peak voltage of the pulse voltage is 330 V to 950 V. It is a value within the range.
With this configuration, discharge is generated by a voltage that is relatively easy to use (950 V or less), and thus the apparatus can be easily configured.

  The sensation presentation device of the present invention includes the airflow generation device, and can apply an airflow generated by the airflow generation device to an operation unit of an operator. Since the airflow is applied, it is possible to generate a sensation as if it was actually in contact with no contact.

  According to the present invention, it is possible to drive at a relatively low voltage, and to generate an air flow having high durability and high air volume / velocity in a direction perpendicular to the surface of the substrate.

It is a figure which shows the structure of the surface plasma generator of patent document 1. FIG. It is a block diagram of the airflow generator 201 which concerns on 1st Embodiment. 3 (A) and 3 (B) are diagrams showing a plurality of linear electrodes and a connection structure for applying a pulse voltage from a multiphase pulse power supply to the plurality of linear electrodes. Is a plan view of a dielectric substrate on which linear electrodes are formed, and FIG. 3B is a sectional view thereof. 2 is a block diagram showing a configuration of a multiphase pulse power supply 40. FIG. It is a figure showing the pulse voltage waveform of 4 phases output from the multiphase pulse power supply 40 shown in FIG. It is a figure which shows the rise time (tau) r of a voltage pulse. FIG. 4 is a diagram showing action regions S41 and S12 between two adjacent electrodes with respect to the cross-sectional view of the dielectric substrate 51 shown in FIG. It is a figure which shows a motion of a charged particle and a gas molecule about action area | region S12 between linear electrode E1 (j) and linear electrode E2 (j). FIG. 9A is a plan view illustrating the entire configuration of the array electrode substrate 50 of the airflow generation device 201 according to the first embodiment, and FIG. 9B is a front view thereof. 10A is a plan view of the array electrode substrate 50 of the airflow generation device 202 according to the second embodiment, FIG. 10B is a bottom view thereof, and FIG. 10C is a cross section shown in FIG. It is sectional drawing in PP. FIG. 11A is a plan view of the airflow generation device 202 according to the second embodiment, and FIG. 11B is a front view thereof. FIG. 12A is a plan view of the array electrode substrate 50 of the airflow generation device 203 according to the third embodiment, and FIG. 12B is a bottom view thereof. FIG. 13A is a plan view of the array electrode substrate 50 of the airflow generation device 204 according to the fourth embodiment, and FIG. 13B is a bottom view thereof. It is a top view which shows schematic structure of the electronic device 301 provided with the sensory presentation device which concerns on 5th Embodiment. It is a figure which shows the relationship between an airflow and an operator. FIG. 16A is a perspective view of a convergent flow type airflow generation device 206 according to the sixth embodiment. FIG. 16B is a front view thereof. It is a wave form diagram of the pulse voltage of the divergent flow type airflow generator concerning a 7th embodiment. It is a front view of the diverging flow type airflow generation device 207 which concerns on 7th Embodiment. It is a figure which shows the structure of the 1st type ventilation apparatus which concerns on 8th Embodiment.

Among several embodiments described below, the seventh embodiment and the eighth embodiment are the embodiments given as a reference.
<< First Embodiment >>
The airflow generation device according to the first embodiment will be described with reference to the drawings.
FIG. 2 is a block diagram of the airflow generation device 201 according to the first embodiment. As shown in FIG. 2, the airflow generator 201 is connected in series to a multiphase pulse power source 40, an array electrode substrate 50, and a multiphase pulse power source line connecting the multiphase pulse power source and the array electrode substrate. An inserted additional capacitor C is provided.

  3 (A) and 3 (B) are diagrams showing a plurality of linear electrodes and a connection structure for applying a pulse voltage from a multiphase pulse power supply to the plurality of linear electrodes. Is a plan view of a dielectric substrate on which linear electrodes are formed, and FIG. 3B is a sectional view thereof. 3A and 3B show a part of the array electrode substrate 50. FIG.

  The insulator substrate 51 corresponds to the insulating substrate according to the present invention. A plurality of linear electrodes 52 are arranged in parallel and at regular intervals on the upper surface of the insulating substrate 51. The multiphase pulse power source 40 shown in FIG. 2 outputs four-phase pulse voltages V1 to V4. The linear electrodes 52 are connected in common in every four in the order of arrangement, and are connected to the output terminals of the multiphase pulse power supply 40, respectively. In addition, the drawing direction of the connection end with respect to the multiphase pulse power supply 40 is alternately switched between the odd-numbered and even-numbered linear electrodes 52.

  A dielectric film 54 such as a resin film or a silicate glass film is formed on the entire upper surface of the insulating substrate 51 so as to cover the linear electrodes 52. With this configuration, oxidation and sulfurization of the electrode are suppressed, and stable characteristics can be maintained over a long period of time.

  In FIG. 2, the + x direction is illustrated as the alignment direction of the linear electrodes 52.

  FIG. 4 is a block diagram showing the configuration of the multiphase pulse power supply 40. As shown in FIG. 4, the multiphase pulse power supply 40 is composed of a constant voltage DC power supply circuit 42, a gate driver circuit 43, and a timing signal generation circuit 41. The timing signal generation circuit 41 provides a timing signal for generating a positive voltage, and the gate driver circuit 43 switches the ground potential or + V volt voltage input from the constant voltage DC power supply circuit 42 in accordance with the timing signal, thereby generating a pulse voltage. V1 to V4 are output. The gate driver circuit can be configured with, for example, a power MOS FET as a main element.

The voltage Vi (i = 1, 2, 3, or 4) output from the gate driver circuit 43 is a periodic function of a period T, and between time t = 0 and t = T,
+ V {(T / 4) × (i−1) <t <(T / 4) × (i−1) + τw}
0 {when other than t}
Each value of is taken. However, V is a positive voltage. By outputting such a voltage, the voltage waveform shown in FIG. 5 is repeatedly output.

  FIG. 5 is a diagram illustrating a four-phase pulse voltage waveform output from the multiphase pulse power supply 40 illustrated in FIG. 4. The drive voltage of each phase is repeatedly generated in a + V volt interval across a 0 [V] interval. Adjacent phases are shifted by ¼ period. In this example, only one of the pulse voltages V1 to V4 is output with + V volts, and + V volts are not simultaneously output from two or more terminals.

  The rise of each voltage pulse will be described with reference to FIG. In FIG. 6, the pulse rise time τr is defined as the time from 20% to 80% of the peak voltage V. The pulse rise time τr is set to be 1 μs or less.

  As described above, the time waveform of the n-phase pulse voltage is cyclically output as step pulses each of which lasts for a certain time, whereby the power supply circuit can be configured at low cost.

Next, the operation of the airflow generation device according to the first embodiment will be described.
Although the mechanism by which the flow of gas is generated has not been fully clarified, it is assumed that the following processes (actions) (a) to (d) are involved.

(A) At the rise of each pulse voltage, the electric field between the electrodes sharply increases, thereby causing discharge in the gas. Due to this discharge, gas molecules between the electrodes are ionized to generate charged particles.

(B) The charged particles derived from (a) and (d) receive a force by the electric field and are accelerated along the direction of the electric field.

(C) The accelerated charged particles collide with other gas molecules that are not ionized and give momentum to the gas molecules.

(D) Charged particles adhere to the dielectric coating near the electrode.

  Here, supplementary explanation will be given using the drawings.

  FIG. 7 is a diagram showing action regions S41 and S12 between two adjacent electrodes with respect to the cross-sectional view of the insulator substrate 51 shown in FIG. 3B. The action region S41 is a region on the dielectric film between the linear electrode E4 (j-1) and the linear electrode E1 (j). The action region S12 is a region on the dielectric film between the linear electrode E1 (j) and the linear electrode E2 (j).

  FIGS. 8A and 8B are diagrams showing the movement of charged particles and gas molecules in the action region S12 between the linear electrode E1 (j) and the linear electrode E2 (j).

  In the step (a), at the time t1 of the rise of the voltage V1 shown in FIG. 5, it is considered that the electric field rapidly increases in the action regions S41 and S12 in FIG. The dielectric barrier discharge is a discharge generated when the electrode is covered with the dielectric film 54. In this dielectric barrier discharge, the charged particles generated by the discharge are directed to the linear electrode by the Coulomb force received by the electric field, but cannot reach the linear electrode because the linear electrode is covered with the dielectric film. , It remains attached to the dielectric surface while retaining the charge.

  The charged particles adhering to the dielectric surface generate an electric field opposite to the electric field created by the electrode. When a certain amount of charged particles are generated and attached, the electric field between the electrodes becomes sufficiently small, and the discharge (dielectric barrier discharge) stops. Therefore, the discharge stops in a very short time. For this reason, the discharge normally does not lead to a destructive discharge such as an arc discharge, and the amount of generated charge is limited to a certain amount.

  In the processes (b) and (c), as schematically shown in FIG. 8A, charged particles are generated, and the charged particles are accelerated by an electric field and collide with non-ionized gas molecules. It is done. Due to this collision, the momentum is transferred from the charged particles to the gas molecules, so that the gas is conveyed. Here, when the gas to be transported is air, the charged particles are considered to be mainly monovalent positive ions and electrons obtained by ionizing nitrogen molecules in the air.

  In the step (d), as schematically shown in FIG. 8B, the charged particles attracted toward the linear electrode are considered to remain attached on the dielectric film near the linear electrode. . The attached charged particles (wall charges) generate an electric field, which may work in a direction that cancels out the electric field created by the electrode depending on the time, or may work in a direction that is added to the increasing direction. In the latter case, there is an advantage that discharge is generated with higher efficiency.

  In the above description, it is not determined which direction the gas is conveyed is the + x direction or the −x direction. However, in reality, in at least one of the processes (a) to (d), a flow in one direction is considered to occur due to an asymmetry with respect to the + x direction and the −x direction. According to experiments, in many cases this flow direction was the + x direction. That is, an air flow was generated in the direction of the arrangement order of the linear electrodes E1 (j) to E4 (j) which is the order of the phases of the applied pulse voltages V1 to V4.

  Next, specific dimensions, applied voltage, and applied voltage waveform of each part of the airflow generation device according to the embodiment of the present invention will be described.

  First, the spacing between the linear electrodes and the applied voltage will be described.

  In Paschen's law, it is known that the discharge start voltage Vs is a function of the product pd of the atmospheric pressure p and the interelectrode distance d. In air, the minimum value of the discharge start voltage Vs is around pd = 0.57 mmHg · cm. At this time, the discharge start voltage is 330V. Therefore, the pulse voltage applied to the linear electrode is suitable for the airflow generator when the value is in the range of 330V to 950V.

  According to Paschen's law, the condition that the discharge start voltage Vs is 950 V or less in the case of air corresponds to pd of 0.13 to 6.8 mmHg · cm. This condition corresponds to the inter-electrode distance d being 1.7 μm to 90 μm under 1 atm (p = 760 mmHg). That is, by setting the inter-electrode distance d to 1.7 μm to 90 μm, discharge is generated by a voltage (950 V or less) that is relatively easy to use, and thus the apparatus can be configured easily.

  The inter-electrode distance d is [linear electrode arrangement pitch 60 μm] − [linear electrode width 25 μm] = 35 μm.

  FIG. 9A is a plan view illustrating the entire configuration of the array electrode substrate 50 of the airflow generation device 201 according to the first embodiment, and FIG. 9B is a front view thereof. The left LHF and the right RHF are symmetrically connected to the linear electrode from the multiphase pulse power source. As already described, the rightward airflow AF is generated by the left side LHF of the array electrode substrate 50. Similarly, a leftward airflow AF is generated by the right RHF of the array electrode substrate 50.

  In this manner, an air flow is generated in a direction perpendicular to the insulator substrate 51 on a bilaterally symmetric axis indicated by a one-dot chain line in FIG.

<< Second Embodiment >>
10A is a plan view of the array electrode substrate of the airflow generation device 202 according to the second embodiment, FIG. 10B is a bottom view thereof, and FIG. 10C is a cross section P shown in FIG. It is sectional drawing in -P.

  A plurality of annular linear electrodes 52 are concentrically arranged on the upper surface of the insulating substrate 51. That is, these linear electrodes 52 are locally arranged substantially in parallel with each other. A lower surface wiring 56 and terminal electrodes P <b> 1 to P <b> 4 are formed on the lower surface of the insulating substrate 51. Predetermined linear electrodes of the plurality of linear electrodes 52 are commonly connected to the lower surface wiring 56 through via electrodes 55. In this example, the linear electrodes 52 are commonly connected every four in the arrangement order. Four-phase pulse voltages V1 to V4 output from the multiphase pulse power supply 40 shown in FIG. 4 are applied to the terminal electrodes P1 to P4. In this example, when the linear electrode is traced in the order of the phase of the applied pulse voltage, it follows from the periphery of the linear electrode toward the center. Therefore, an airflow that flows from the periphery toward the center is generated.

  FIG. 11A is a plan view of the airflow generation device 202 according to the second embodiment, and FIG. 11B is a front view thereof. Since the airflow AF is generated from the periphery of the linear electrode 52 in the center direction, the airflow collides at the center of the airflow generation device 202 to become an upward airflow, and a vertical airflow is generated with respect to the insulator substrate of the airflow generation device 202. To do.

  The plurality of lower surface wirings 56 are arranged so as to roughly connect the center of the insulating substrate 51 and the center of each side of the insulating substrate 51 and have an angle of 90 degrees with each other. Can be easily arranged. Moreover, since the electrostatic capacitance of adjacent lower surface wiring among the several lower surface wiring 56 becomes small, a required applied voltage may be small.

<< Third Embodiment >>
FIG. 12A is a plan view of the array electrode substrate of the airflow generation device 203 according to the third embodiment, and FIG. 12B is a bottom view thereof. Unlike the airflow generation device 202 shown in the second embodiment, a voltage is applied to the linear electrode 52 via a capacitor.

  A plurality of annular linear electrodes 52 are concentrically arranged on the upper surface of the insulating substrate 51. On the lower surface of the insulating substrate 51, a lower surface wiring 56, a lower surface counter electrode 59, and terminal electrodes P1 to P4 are formed. The lower surface counter electrode 59 is capacitively coupled to the upper surface linear electrode 52 at a predetermined position. By capacitively coupling the electrodes between the front and back surfaces of the insulator substrate in this way, processing of the via electrode becomes unnecessary. In addition, since the capacitances are connected in series, the amount of charge that can flow is limited, and it is difficult for spark discharge to occur between the linear electrodes.

<< Fourth Embodiment >>
FIG. 13A is a plan view of the array electrode substrate of the airflow generation device 204 according to the fourth embodiment, and FIG. 13B is a bottom view thereof.
Unlike the second embodiment, a plurality of square-shaped linear electrodes 52 are concentrically arranged on the upper surface of the insulator substrate 51. A lower surface wiring 56 and terminal electrodes P <b> 1 to P <b> 4 are formed on the lower surface of the insulating substrate 51. Predetermined linear electrodes of the plurality of linear electrodes 52 are commonly connected to the lower surface wiring 56 through via electrodes 55. In this example, the linear electrodes 52 are commonly connected every four in the arrangement order. Four-phase pulse voltages V1 to V4 output from the multiphase pulse power supply 40 shown in FIG. 4 are applied to the terminal electrodes P1 to P4. In this example, when the phase of the applied pulse voltage is traced along the linear electrode in order, the phase follows from the periphery of the linear electrode toward the center. Therefore, airflow is generated from the periphery toward the center.

  Thus, by arranging the plurality of linear electrodes in a square shape, the arrangement density of the plurality of airflow generation devices can be easily increased.

<< Fifth Embodiment >>
FIG. 14 is a plan view illustrating a schematic configuration of an electronic apparatus including the sensory presentation device according to the fifth embodiment, and FIG. 15 is a diagram illustrating a relationship between an air flow and an operator.
A non-contact finger position sensor 60 of the electronic device 301 illustrated in FIG. 14 is a sensor that detects which position of the operation positions K1 to K10 is to be touched. This non-contact finger position sensor detects, for example, by image recognition based on a stereo camera image.

  Each of the operation positions K1 to K10 is provided with the airflow generation device described in the second embodiment or the third embodiment. The control unit 70 performs predetermined calculation processing and signal control according to the detection result by the non-contact finger position sensor 60. Further, in response to detection of the position to be touched among the operation positions K1 to K10, the airflow generating device at the corresponding position is driven for a short time to generate a bursty airflow.

  FIG. 15 shows airflow generated when the operator tries to touch the finger FT at the operation position K5. In this way, since the airflow hits the operator's fingers, it is possible to present a feeling as if the user actually touched the panel.

  Corresponding to the “pressing” of the key by non-contact operation, the finger can receive feedback by wind pressure, so that the operator can recognize the key input and which key input is recognized. I can know. Therefore, reliable key input is possible despite the non-contact operation. Also, a good operational feeling can be obtained for the operator.

  For example, it is suitable for various operation panels in an environment that requires a highly sanitary environment such as a medical site or a food factory. Moreover, even in general citizen life, the risk of virus infection due to contact can be reduced by applying it to the operation panel of machinery used by an unspecified number of users such as bank ATMs and station ticket machines.

<< Sixth Embodiment >>
FIG. 16A is a perspective view of a convergent flow type airflow generation device 206 according to the sixth embodiment. FIG. 16B is a front view thereof. This convergent flow type airflow generation device 206 uses two sets of the airflow generation devices shown in FIGS. 10A and 10B in the second embodiment, and is located at the center of the insulator substrate of one of the airflow generation devices. The opening A is formed, facing each other and arranged in parallel at a predetermined interval.

  In this way, by arranging two sets of airflow generation devices 206F and 206C facing each other, as shown in the second embodiment, convergent flows are generated on the surfaces of the airflow generation devices 206F and 206C, respectively. As shown in (B), an air flow AF1 is generated from the periphery toward the inside of the apparatus. As a result, an airflow AF2 that flows out (spouts) from the opening A is generated.

<< Seventh Embodiment >>
The structure of the divergent flow type airflow generation device according to the seventh embodiment is the same as that shown in FIG. However, when the phase of the applied pulse voltage follows the linear electrode in order, the pulse voltage is applied so as to follow from the center of the linear electrode to the peripheral direction. Therefore, an airflow flowing from the center to the peripheral direction is generated.

  FIG. 17 is a waveform diagram of the pulse voltage. As is clear from the waveform shown in FIG. 5, the phase order of the four-phase pulse voltages is reversed. Therefore, as shown in FIG. 18, an airflow AF1 is generated that flows from the inside of the apparatus in the peripheral direction. As a result, an airflow AF2 flowing into the opening A is generated.

<< Eighth Embodiment >>
FIG. 19 is a diagram showing a configuration of a first type ventilation apparatus according to the eighth embodiment.
The convergent flow type airflow generation device 206 and the divergent flow type airflow generation device 207 are provided in the building to ventilate the room. As shown in FIG. 19, the first type ventilation (mechanical intake / exhaust) can be performed by providing the converging flow type airflow generation device and the diverging flow type airflow generation device at the diagonal positions of the room.

  This device can easily change the direction of airflow by changing the input voltage pattern. Further, since both the convergent flow type air flow generator 206 and the divergent flow type air flow generator 207 can be configured to be ultra-thin, they can be used as a space-saving ventilation facility.

  In addition to the ventilation of the living room, it can also be applied as a cooling ventilator in the housing of the electronic device.

<< Other embodiments >>
In each of the embodiments described above, the four-phase pulse voltage is applied to the plurality of linear electrodes. The number n of phases may be 3 or more.
Further, the annular linear electrode is not limited to an annular shape or a rectangular shape, but may be a polygonal shape of pentagon or more.

A ... Openings AF, AF1, AF2 ... Airflow C ... Additional capacitors E1-E4 ... Linear electrodes FT ... Fingers K1-K10 ... Operating position LHF ... Left half surface RHF ... Right half surface S12, S41 ... Action region 40 ... Multiphase pulse Power supply 41 ... Timing signal generation circuit 42 ... Constant voltage DC power supply circuit 43 ... Gate driver circuit 51 ... Insulator substrate 52 ... Linear electrode 54 ... Dielectric film 55 ... Via electrode 56 ... Lower surface wiring 59 ... Lower surface counter electrode 60 ... Non Contact finger position sensor 70 ... Control units 201 to 204 ... Airflow generator 206 ... Convergent flow airflow generators 206F and 206C ... Airflow generator 207 ... Divergent flow airflow generator 301 ... Electronic equipment

Claims (8)

A plurality of linear electrodes arranged at least locally on the insulating substrate in parallel or substantially parallel to each other and coated with a dielectric coating;
a multi-phase pulse power supply that outputs a pulse voltage of n-phase (n is an integer of 3 or more);
Have
The plurality of linear electrodes are opposed to each other across an arbitrary center point or center line on the insulating substrate,
The plurality of linear electrodes are connected to the multi-phase pulse power supply so that the same pulse voltage is applied to the central electrode or the linear electrode symmetrical to the central line,
An airflow generation device in which a pulse voltage is applied to the plurality of linear electrodes so that an airflow is generated toward the center point or the center line . A connection part for electrically connecting the multi-phase pulse power supply to the plurality of linear electrodes;
The airflow generation device according to claim 1, wherein a capacitor is inserted in series in the connection portion.   Each of the plurality of linear electrodes is linear, and is arranged parallel to or substantially parallel to the center line on the left and right of the center line, and the direction in which the phase of the pulse voltage follows in order with respect to the center line The airflow generation device according to claim 1, wherein the airflow generation device is in a bilaterally symmetric direction.   The airflow generation device according to claim 1, wherein the plurality of linear electrodes are concentric polygonal shapes. The airflow generation device according to claim 1 or 2 , wherein the plurality of linear electrodes are concentric.   The airflow generation device according to claim 1, wherein a rise time of the pulse voltage is 1 μs or less.   The distance between adjacent linear electrodes among the plurality of linear electrodes is a value in the range of 1.7 μm to 90 μm, and the peak voltage of the pulse voltage is a value in the range of 330 V to 950 V. The airflow generation device according to any one of claims 1 to 6.   A sensory presentation device comprising the airflow generation device according to any one of claims 1 to 7 and generating an airflow generated by the airflow generation device in an operation unit of an operator.

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