JP5585130B2 - Gas supply device - Google Patents

Description

  The present invention relates to a gas supply device that dissolves a gas (gas component) in a reaction solution while suppressing foaming.

  2. Description of the Related Art In recent years, technologies relating to so-called bioreactors, which are apparatuses for synthesizing and decomposing substances from raw materials in solution using enzyme reactions or biological reactions using microorganisms, have been actively developed.

  In general, biological reactions do not require high temperature and high pressure unlike chemical reactions, so they are excellent in energy saving, reaction equipment does not need to be heat and pressure resistant, and there are few side reactions depending on the species used in the reaction. It has features such as the ability to build a system, and has attracted a lot of industrial advantages. In addition, there is a known facility (activated sludge tank) that uses activated sludge containing aerobic microorganisms as a main component to purify organic pollution in the wastewater. It's being used.

  These bioreactors that require a specific gas in the biological reaction of the microorganism to be used consume the dissolved gas components contained in the reaction solution such as the raw material liquid and waste water used in the biological reaction. For example, the aerobic reaction consumes dissolved oxygen contained in the raw material liquid and wastewater, and the anaerobic reaction in which methane fermentation is performed consumes dissolved carbon dioxide. In order to continue the biological reaction, it is necessary to supply the gas component to be consumed in this way. Therefore, the dissolved gas concentration is usually increased by aeration treatment in which the required gas component is blown into the reaction solution ( For example, see Patent Documents 1 to 4).

Japanese Utility Model Publication No. 7-7799 JP 2004-141730 A JP 2002-59189 A Japanese Patent Laid-Open No. 5-177191

  However, in the above method, the reaction solution may foam. Such bubbles entrap microorganisms used in the reaction and stay on the liquid surface, and may inhibit the activity of the microorganisms in the reaction solution. For example, in a scene where domestic wastewater is treated with activated sludge, detergent is often contained in the wastewater, and a large amount of bubbles stays on the liquid surface due to the aeration treatment. In an activated sludge facility outdoors, bubbles on the liquid level may be blown off by the wind, and the surroundings may be soiled. If the amount of aeration is reduced in order to suppress such foaming, the supply rate of the gas component is lowered, so that it is difficult to adjust the operating conditions of the bioreactor.

  In order to suppress foaming, a measure to add an antifoaming agent to the reaction solution can be considered, but since the generation of bubbles is suppressed, the generation of bubbles for aeration is also suppressed at the same time, and the aeration efficiency is lowered and gas components are reduced. The supply speed of the is reduced. Alternatively, the use of an antifoaming agent increases the running cost, the use of an antifoaming agent in a bioreactor for the production of useful substances such as pharmaceuticals, etc. New challenges may arise.

  In addition, since a large amount of bubbles released into the reaction solution by aeration rises while vigorously flowing in the liquid, in the bioreactor used for cell culture, the cultured cells may be damaged by the intense liquid flow. is there. Damaged cells often die, leading to reduced production efficiency.

  Further, in the above method, it is necessary to pressurize the gas in order to supply the gas below the liquid level, and energy for pressurization is required.

  The present invention has been made in view of such circumstances, and is an apparatus used in a bioreactor, which can efficiently dissolve a gas into a processing liquid with less energy while suppressing foaming. An object of the present invention is to provide a gas supply device.

  In order to solve the above problems, a gas supply device of the present invention is a gas supply device that dissolves a gas in a liquid, the storage tank storing the liquid, and a part of the inner peripheral surface inside the liquid. A first cylindrical member immersed so as to be exposed, and a second cylindrical member inserted on the inner peripheral surface side of the first cylindrical member and immersed in the liquid except for a part of the outer peripheral surface A member, the first tubular member and the second tubular member, a first rotation axis parallel to the longitudinal direction of the first tubular member, and a second parallel to the longitudinal direction of the second tubular member. And a drive device that rotates around the rotation axis.

  According to this configuration, when the first cylindrical member and the second cylindrical member rotate, the surface of each cylindrical member enters the liquid while entraining more gas due to friction with the gas above the liquid level. . Alternatively, a large amount of liquid is pulled up above the liquid level by friction with the liquid, and exposed above the liquid level.

  In addition, when the liquid surface is made rippled by the rotation of each cylindrical member, the gas-liquid contact surface is increased on the liquid surface, so that the gas component is dissolved into the liquid. Furthermore, since each cylindrical member is hollow, it is possible to suppress a decrease in the storage amount of the storage tank due to the arrangement of each cylindrical member as much as possible. And since the some cylindrical member is used, melt | dissolution of the gas to a process liquid is further accelerated | stimulated.

  By combining these actions, the efficiency of supplying the gas to the liquid becomes high, and it becomes possible to efficiently dissolve the gas in the liquid without pressurizing the gas above the liquid surface. Therefore, it is possible to provide a gas supply device capable of dissolving the gas above the liquid surface into the liquid with less energy while suppressing foaming.

In the present invention, the first cylindrical member and the second cylindrical member have both longitudinal ends spaced apart from both side walls facing in the longitudinal direction of the storage tank, and the storage tank has the both side walls Extending from at least one of the walls so as to be inserted between the first cylindrical member and the second cylindrical member, both ends in the width direction perpendicular to the extending direction are the liquid liquid It is desirable to have a partition plate exposed from the surface and the liquid discharge port provided at the bottom, and the partition plate preferably has a connection port for connecting the upper surface side and the lower surface side of the partition plate.
According to this configuration, the liquid in the storage tank reaches the discharge port and is discharged while flowing through the flow path between the partition plate and each cylindrical member. Thus, while the processing liquid flows, each cylindrical member continues to supply the gas above the liquid surface to the processing liquid, so that the gas can be supplied efficiently.

In the present invention, the partition plate is configured by a pair of plate-like members provided extending from the both side walls and facing each other, and the ends facing each other in the pair of plate-like members. It is desirable to use the connection port between the parts.
According to this configuration, the apparatus can be easily assembled.

In the present invention, a plurality of the second cylindrical members may be provided.
According to this configuration, the dissolution of the gas into the processing liquid is further promoted on the inner peripheral surface side of the first cylindrical member.

In the present invention, it is desirable that the first rotating shaft and the second rotating shaft are set in parallel with the liquid surface of the liquid.
According to this structure, since each cylindrical member is exposed from the liquid level in the longitudinal direction, each cylindrical member and the gas above the liquid level come into contact with each other over a wide area. Therefore, friction between the surface of each cylindrical member and the gas above the liquid level increases, and the gas can be efficiently supplied into the liquid.

  In the present invention, it is desirable that the outer peripheral surface of the first cylindrical member is provided with a protruding line portion extending in the rotation direction of the first cylindrical member.

  Moreover, in this invention, it is desirable that the outer peripheral surface of the said 2nd cylindrical member is provided with the protruding item | line part extended in the rotation direction of a said 2nd cylindrical member.

  According to these configurations, since the surface area increases on the outer side of the cylindrical member, the friction between the surface of each cylindrical member and the gas above the liquid surface increases, and the gas can be supplied efficiently.

In the present invention, it is desirable that a part of the inner peripheral surface of the second cylindrical member is exposed from the liquid surface of the liquid.
According to this configuration, since the inner peripheral surface of the second cylindrical member is also in contact with the gas above the liquid level, the gas is supplied to the liquid even when the inner peripheral surface passes through the liquid level, and the efficiency is increased. Gas can be supplied.

In the present invention, it is desirable that the inner peripheral surface of the second cylindrical member has a ridge that extends in the rotation direction of the second cylindrical member.
According to this configuration, since the surface area increases on the inner peripheral surface of the second cylindrical member, the friction between the surface of the second cylindrical member and the gas above the liquid surface increases, and the gas can be supplied efficiently. .

In the present invention, it is desirable that the first cylindrical member and the second cylindrical member have an annular shape in cross section by a plane orthogonal to the rotation axis.
According to this configuration, the penetration of the surface of each cylindrical member into the liquid and the exposure from the liquid become a smooth movement, and the gas can be supplied into the liquid while suppressing foaming.

In the present invention, the driving device is inserted through the first cylindrical member, and is inserted through the first shaft portion that supports and suspends the first cylindrical member from the inside, and the second cylindrical member, It is desirable to have a second shaft portion that supports and suspends the second cylindrical member from the inside, and a motor that rotates the first shaft portion and the second shaft portion.
According to this structure, the structure of a cylindrical member can be simplified and it can be set as the drive device of a simple structure.

In the present invention, it is desirable that the first shaft portion and the second shaft portion are disposed above the liquid surface of the liquid.
According to this configuration, since each shaft portion is disposed above the liquid level, deterioration due to rust or the like that may occur when the shaft portion is immersed in the liquid is suppressed even when continuous operation is performed, and reliability is improved. High gas supply device.

In the present invention, the control unit includes a control unit that controls the operation of the first cylindrical member and the second cylindrical member, and a measurement unit that measures the concentration of the gas dissolved in the liquid. Preferably, the operation of the cylindrical member is controlled so that the concentration of the gas measured by the measuring unit approaches a predetermined target value.
According to this configuration, the gas concentration in the liquid can be easily maintained at a desired concentration. Here, “controlling the operation” indicates controlling at least one of the rotational speed and the rotational direction of each cylindrical member.

In the present invention, it is desirable that the bottom of the storage tank has a semi-cylindrical cross-sectional shape by a plane intersecting the first rotation axis.
According to this structure, the location where the convection of the processing liquid stagnates or the solid matter accumulates at the end of the bottom can be eliminated without inhibiting the rotation of each cylindrical member. Therefore, the gas can be effectively supplied into the processing liquid.

In the present invention, it is preferable that an upper portion of the storage tank is closed with a lid, and supply means for supplying the gas is provided in a space between the lid and the liquid surface of the liquid.
According to this configuration, the concentration of the gas supplied to the space between the lid and the liquid surface can be maintained high, and the gas can be efficiently supplied into the liquid. For example, when oxygen is supplied to the space, the oxygen concentration can be kept higher than that in the atmosphere, so that oxygen can be efficiently supplied to the liquid.

  According to the present invention, it is possible to provide a gas supply device that enables gas to be dissolved in the processing liquid with less energy while suppressing foaming.

It is explanatory drawing of the gas supply apparatus which concerns on 1st Embodiment of this invention. It is an assembly drawing of the gas supply apparatus of 1st Embodiment. It is explanatory drawing explaining the flow of the process liquid in the gas supply apparatus which concerns on 1st Embodiment. It is explanatory drawing of the gas supply apparatus which concerns on 2nd Embodiment of this invention.

[First Embodiment]
Hereinafter, a gas supply device according to an embodiment of the present invention will be described with reference to FIGS. In all the drawings below, the dimensions and ratios of the constituent elements are appropriately changed in order to make the drawings easy to see.

  FIG. 1 is an explanatory diagram of a gas supply device according to the present embodiment. FIG. 1A is a cross-sectional view of the gas supply device 1A, and FIG. 1B is a line AA in FIG. It is arrow sectional drawing.

  As shown to Fig.1 (a), 1 A of gas supply apparatuses of this embodiment rotate the periphery of the rotating shaft F which penetrates the storage tank 10 which stores the process liquid S which is the object which supplies and processes gas. By this, it has the stirrer 12 which stirs the process liquid S in the storage tank 10, and the drive device 14 which rotates the stirrer 12.

  The treatment liquid S includes a raw material consumed by a biological reaction, an organism such as a fungus that causes a biological reaction that metabolizes the raw material, an animal cell to be cultured, and the like.

  The storage tank 10 is a rectangular container in plan view in which the upper part 10a is covered and the bottom part 10b has a substantially semicylindrical shape. A through hole 101 is provided in the opposite side wall of the storage tank 10, and a supply pipe 16 for supplying the stock solution of the processing liquid S into the storage tank 10 is provided in the through hole 101. The supply pipe 16 has an end portion provided near the center in the longitudinal direction and the short direction of the storage tank 10, and is provided so as to supply the stock solution of the processing liquid S to the vicinity of the center of the storage tank 10.

  Further, the gas supplied to the processing liquid S is supplied from the through hole 101 to the gas phase part G in the storage tank 10. In the figure, a gas supply device (supply means) 15 supplies gas through the through hole 101. The type of gas to be supplied can be variously selected according to the type of the treatment liquid S. For example, when the treatment liquid S is a culture liquid used for culturing aerobic bacteria, air or oxygen can be selected. In the present embodiment, oxygen is supplied from the supply device 15.

  Since the storage tank 10 is covered with the upper part 10a, the concentration of the gas supplied to the gas phase part G can be kept high. For example, when the treatment liquid S is a culture liquid used for culturing aerobic bacteria, if oxygen is supplied to the gas phase part G, the oxygen concentration in the gas phase part G can be maintained at a higher concentration than in the atmosphere. Oxygen can be well supplied to the treatment liquid S, and bacteria can be cultured efficiently. In that sense, when the gas to be supplied is air, no lid is required on the upper portion 10a of the storage tank 10. Of course, a lid may be provided on the storage tank 10 to prevent foreign matters such as dust from entering.

  The bottom 10b of the storage tank 10 is designed in a semi-cylindrical shape, and its end is rounded in a direction perpendicular to the extending direction of the rotation axis F of the stirrer 12. By setting it as such a bottom part shape, it is preventing that a convection stagnates at the edge of a bottom part, or a solid substance accumulates. Of course, the shape of the bottom may not be round.

  Furthermore, a discharge port 109 for discharging the processing liquid S from the storage tank 10 is provided at the bottom 10b of the storage tank 10, and a discharge pipe 19 is connected thereto. The discharge port 109 is provided in the vicinity of the center in the longitudinal direction and the lateral direction in the bottom 10 b of the storage tank 10. The processing liquid S supplied with the gas in the storage tank 10 is discharged to a downstream facility through the discharge pipe 19.

  For example, when the discharge port 109 is likely to be blocked by a solid content floating in the storage tank, the processing liquid may be flowed in the reverse direction from the discharge pipe 19 side as necessary. In this case, another facility for extracting the processing solution from the storage tank may be provided as appropriate.

  The stirrer 12 has a plurality of cylindrical axisymmetric rotating bodies having symmetrical axes that substantially overlap with the rotation axis F, and the gas supply device 1A of the present embodiment is a hollow cylindrical first agitating device having different sizes. It has a vessel (first cylindrical member) 12a, a second agitator (second cylindrical member) 12b, and a third agitator (third cylindrical member) 12c. The second stirrer 12b is disposed in the space inside the first stirrer 12a, and the third stirrer 12c is disposed in the space inside the second stirrer 12b. The rotating shafts of the containers are set at a common position. Each stirrer is arranged so that at least a part is exposed from the liquid surface of the processing liquid S in the storage tank 10 and the remaining part is immersed in the processing liquid S.

  The rotation axes F of the first stirrer 12a, the second stirrer 12b, and the third stirrer 12c are set in a substantially horizontal direction (a direction parallel to the liquid level of the processing liquid S stored in the storage tank 10). . Each of these agitators rotates the circumference of the rotation axis F in the circumferential direction to agitate the interface between the processing liquid S and the gas phase part G of the storage tank 10, and the gas in the gas phase part G is treated with the processing liquid S. To supply. The rotation axis F may be set to be inclined from the horizontal direction.

  Provided on the side wall of the storage tank 10 between the first stirrer 12a and the second stirrer 12b, between the second stirrer 12b and the third stirrer 12c, and inside the third stirrer 12c. Partition plates 105 (first partition plate 105a, second partition plate 105b, and third partition plate 105c) are inserted. Each of the partition plates 105a to 105c is configured by a pair of plate-like members provided on opposite side walls, and a gap generated between the opposite plate-like members near the center in plan view is the upper surface side of the partition plate. And the connection port 106 that connects the space on the lower surface side.

  Moreover, as shown in FIG.1 (b), each partition plate is curved and provided so that it may protrude below, and both ends of the direction orthogonal to the extension direction of the rotating shaft F of the stirrer 12 are processing. The liquid S is exposed from the liquid surface. Thus, the flow path of the process liquid S is formed between the partition plate 105 and each stirrer.

  The width of the formed flow path (distance between the partition plate 105 and the stirrer) is selected to be a suitable width depending on the content of the processing liquid S. As the flow path becomes narrower, a higher shearing force is generated in the flow path, and the treatment liquid S is vigorously stirred. For this reason, when animal cells are contained in the treatment liquid S and the animal cells are cultured and increased, the animal cells may be damaged by a high shearing force. Therefore, it is better to set a wide flow path. On the contrary, when there is no possibility that the contents of the processing liquid S are damaged by the shearing force, if the flow path is narrowed, many gas components (for example, oxygen) are supplied to the processing liquid S by the high shearing force. It is expected that

  Returning to FIG. 1A, the drive device 14 includes three shafts (shaft portions) 141 that pass through the insides of the first stirrer 12a, the second stirrer 12b, and the third stirrer 12c, and each shaft. 141 includes rollers 142 provided at a plurality of locations (two locations in the figure) and motors 143 provided at the ends of the three shafts 141 and rotating the shafts 141 around the axes. The shaft 141 is disposed through the through holes 101 to 106 provided in the opposing side walls of the storage tank 10.

  Each of the plurality of shafts 141 is in contact with the inner wall of the stirrer via a roller 142, and is suspended while supporting the stirrer from the inside. When the shaft 141 rotates, friction between the roller 142 and the inner wall of each stirrer is generated, and each stirrer is rotated in the same direction as the rotation direction of the shaft 141 by the friction force.

  Each shaft 141 is arranged in parallel with the liquid surface. Moreover, since it arrange | positions above a liquid level, even if it performs continuous operation, degradation by the rust etc. which may arise by being immersed in the process liquid S is suppressed.

  In the gas supply device 1A having such a configuration, when the surfaces of the first stirrer 12a, the second stirrer 12b, and the third stirrer 12c exposed to the gas phase part G enter the processing liquid S by rotation, The surface of the stirrer enters the processing liquid S while entraining many gas components by friction with the gas components in the gas phase part G. Further, when the surface of each stirrer exits from the inside of the processing liquid S to the gas phase part G, the surface of the stirrer pulls up a large amount of the processing liquid S to the gas phase part G by friction with the processing liquid S. It is exposed to the gas phase part G.

  Further, the first stirrer 12a, the second stirrer 12b, and the third stirrer 12c are axially symmetric rotators, and the symmetry axis coincides with the rotation axis of each stirrer. The intrusion of the surface of the stirrer into the processing liquid S and the exposure from the processing liquid S move smoothly, and the liquid level is ruffled without causing foaming. Then, the gas-liquid contact surface increases on the liquid surface, so that the gas component dissolves into the processing liquid S. Moreover, since a plurality of stirrers are used, the dissolution of the gas component into the processing liquid S is further promoted.

  When these actions are combined, when the stirrer 12 enters the processing liquid S and stirs the processing liquid S, the efficiency of supplying the gas component to the processing liquid S increases, and the gas component in the gas phase part G is pressurized. It can be efficiently dissolved in the processing solution S without any problem.

  In addition, the gas supply device 1 </ b> A includes a measuring device (measuring unit) 17 that measures the dissolved gas concentration of the processing liquid S. An example of such a measuring device 17 is a dissolved oxygen meter for measuring the dissolved oxygen concentration of the treatment liquid S. The measurement result of the measuring device 17 is transmitted to the control unit 18 that controls the rotation of each stirrer, and the control unit 18 controls the rotation of each stirrer in order to set the dissolved oxygen concentration to a desired target value. .

  For example, when the dissolved oxygen concentration is lower than the target value, in order to supply more oxygen in the gas phase part G to the processing liquid S, the control unit 18 increases the angular velocity of each stirrer, makes the angular velocity different from each other, Further, by controlling the rotation directions of the stirrers to be opposite to each other, the liquid level of the processing liquid S is made more rippled and controlled so that the dissolution of oxygen is promoted. On the other hand, when the dissolved oxygen concentration is higher than the target value, the control unit 18 slows the angular velocities of the stirrers, aligns the angular velocities with each other, and further sets the rotation directions of the stirrers to the same direction. Thus, the oxygen is gradually dissolved in the processing liquid S.

  FIG. 2 is an assembly diagram illustrating an assembly example of the gas supply device 1A of the present embodiment. The storage tank 10 before assembly is divided by a plane orthogonal to the direction of the rotation axis in the vicinity of the center of the rotation axis of the stirrer 12 to form tank components 10A and 10B. Partition plates 105 are provided on the inner walls of the tank parts 10A and 10B, respectively, and a plurality of stirrers are inserted into the gaps between the partition plates so as to sandwich the stirrer 12 between the tank parts 10A and 10B. A stirrer 12 is disposed in the storage tank 10 (FIGS. 2A and 2B). In addition, the assembly method shown here is an example and it is good also as assembling by another assembly method.

  FIG. 3 is an explanatory diagram showing the flow of the processing liquid S in the gas supply apparatus 1A of the present embodiment, and corresponds to FIG. 1 (a). Here, in order to make the drawing easier to see, the driving device 14 shown in FIG. 1 is omitted.

  In the gas supply device 1A of the present embodiment, the stock solution of the processing liquid S supplied from the supply pipe 16 to the storage tank 10 flows while causing a biological reaction in the storage tank 10, and is continuously discharged from the discharge port 109. The continuous operation method is adopted.

  The processing liquid S inside the third partition plate 105c flows through a flow path sandwiched between the third partition plate 105c and the inner wall of the third stirrer 12c via the connection port 106c of the third partition plate 105c. When reaching the end of the third stirrer 12c, it flows through a flow path sandwiched between the outer wall of the third stirrer 12c and the second partition plate 105b and reaches the connection port 106b of the second partition plate 105b.

  Hereinafter, similarly, the flow path sandwiched between the second partition plate 105b and the inner wall of the second stirrer 12b via the connection port 106b, and the sandwiched between the outer wall of the second stirrer 12b and the first partition plate 105a. The processing liquid S that flows through the flow path and reaches the connection port 106a of the first partition plate 105a and further flows along the outer wall of the first stirrer 12a reaches the discharge port 109, and is downstream via the discharge pipe 19 It is discharged to the facility.

  While the processing liquid S flows in this way, the stirrer 12 continues to supply the gas component of the gas phase part G to the processing liquid S, and the stirrer 12 further stirs the processing liquid S, thereby promoting the biological reaction. Therefore, it is possible to efficiently cause a biological reaction while being continuous.

  According to the gas supply device 1A having the above-described configuration, the gas component contained in the gas phase part G can be efficiently dissolved in the reaction solution with less energy while suppressing foaming.

  In the present embodiment, the partition plates to be provided are provided on the side walls facing each other to form a pair. However, the present invention is not limited to this. One plate-like member may be passed to the opposite side wall to constitute a partition plate, and the through-hole may be used as a discharge port by providing the plate-like member with a through-hole. Furthermore, the partition plate may be provided so as to extend from one of the side walls facing each other and be separated from the other side wall, and the gap between the partition plate and the other side wall may be used as a discharge port.

[Second Embodiment]
FIG. 4 is an explanatory view of the gas supply device 1B according to the second embodiment of the present invention, and is a cross-sectional view in a cross section orthogonal to the rotation axis of the stirrer. The gas supply device 1B of the present embodiment is partially in common with the gas supply device 1A of the first embodiment, and the configuration of the gas supply device is different. Therefore, in this embodiment, the same code | symbol is attached | subjected about the component which is common in 1st Embodiment, and detailed description is abbreviate | omitted.

  The stirrer 12 included in the gas supply device 1B includes a first stirrer 12d disposed in the storage tank 10 and two second stirrers 12e disposed in the first stirrer 12d. ing. The two second stirrers 12e are arranged in the direction intersecting with the extending direction of the symmetry axis of the first stirrer 12d near the liquid surface in the first stirrer 12d, and the respective symmetry axes are arranged in the first stirrer. It is set in the same direction as the symmetry axis of 12d. The first stirrer 12d and the two second stirrers 12e have different rotation axes, and rotate around independent rotation axes (first rotation axis, second rotation axis).

  Even in the gas supply apparatus 1B having the gas supply apparatus 1B having such a configuration, it is possible to obtain the effect of the present application that promotes the dissolution of the gas component in the gas phase portion by using a plurality of stirrers.

  In the present embodiment, the two second stirrers 12e are arranged in a direction intersecting with the extending direction of the rotation axis of the first stirrer 12d. However, the present invention is not limited to this, and the first stirrer 12d. These may be arranged side by side in the extending direction of the rotation axis.

  In the present embodiment, the partition plate described in the first embodiment is not provided. Of course, a partition plate may be provided between the first stirrer 12d and the second stirrer 12e. . In that case, a partition plate may be provided corresponding to each of the two second stirrers 12e, and the two second stirrers 12e and the first stirrer 12d may be individually partitioned, The two second stirrers 12e may be collectively covered and the two second stirrers 12e and the first stirrer 12d may be collectively partitioned.

  The preferred embodiments of the present invention have been described above with reference to the accompanying drawings, but it goes without saying that the present invention is not limited to such examples. Various shapes, combinations, and the like of the constituent members shown in the above-described examples are examples, and various modifications can be made based on design requirements and the like without departing from the gist of the present invention.

  For example, in the above embodiment, a hollow cylindrical stirrer is used, but a plurality of ridges are provided along the circumferential direction of the stirrer on one or both of the outer wall and the inner wall of the stirrer. It is good also as providing and uneven | corrugated shape on the surface. If it does in this way, the contact area of the gas component in an agitator surface and a gaseous-phase part will spread. Then, when the surface exposed to the gas phase part of the stirrer enters the processing liquid by rotation, the surface of the stirrer stirs the processing liquid while entraining more gas components by friction with the gas components. Therefore, the efficiency of supplying the gas component is further increased, and the gas component can be efficiently dissolved in the processing liquid.

  DESCRIPTION OF SYMBOLS 1A, 1B ... Gas supply apparatus, 10 ... Reservoir, 10a ... Upper part, 10b ... Bottom part, 12 ... Stirrer, 12a, 12d ... 1st stirring part (1st cylindrical member), 12b, 12e ... 2nd stirring part (Second cylindrical member), 14 ... drive device, 15 ... supply device (supply means), 16 ... supply pipe (supply port), 17 ... measurement device (measurement means), 18 ... control unit, 19 ... discharge port, 105 ... Partition plate, 106 ... Connection port, 141 ... Shaft (shaft), 143 ... Motor, F ... Rotating shaft, S ... Treatment liquid,

Claims (14)

A gas supply device for dissolving a gas in a liquid,
A storage tank for storing the liquid;
A first tubular member immersed in the liquid such that a part of the inner peripheral surface is exposed;
A second cylindrical member inserted on the inner peripheral surface side of the first cylindrical member and immersed in the liquid except for a part of the outer peripheral surface;
The first cylindrical member and the second cylindrical member are connected to a first rotating shaft parallel to the longitudinal direction of the first cylindrical member and a second rotating shaft parallel to the longitudinal direction of the second tubular member. have a, a driving device for rotating around,
The first cylindrical member and the second cylindrical member have both longitudinal ends spaced apart from both side walls facing each other in the longitudinal direction of the storage tank,
The storage tank is provided to extend from at least one of the both side walls so as to be inserted between the first cylindrical member and the second cylindrical member, and is in a width direction orthogonal to the extending direction. A partition plate having both ends thereof exposed from the liquid surface;
An outlet for the liquid provided at the bottom,
The partition plate has a connection port for connecting an upper surface side and a lower surface side of the partition plate . The partition plate is formed by a pair of plate-like members provided to extend from the both side walls and facing each other.
2. The gas supply device according to claim 1 , wherein in the pair of plate-like members, the connection port is formed between ends facing each other. Gas supply device according to claim 1 or 2, wherein a plurality of said second tubular member. Gas supply device according to any one of claims 1 to 3, characterized in that said first rotary shaft and the second rotation axis is set parallel to the liquid surface of the liquid. Wherein the outer peripheral surface of the first tubular member, according to any one of the four from claim 1, characterized in that the convex portion extending in the direction of rotation of said first tubular member is provided Gas supply device. Wherein the outer peripheral surface of the second tubular member, according to any one of claims 1 to 5, characterized in that the convex portion extending in the direction of rotation of the second tubular member is provided Gas supply device. The gas supply device according to any one of claims 1 to 6 , wherein a part of an inner peripheral surface of the second cylindrical member is exposed from a liquid surface of the liquid. The gas supply device according to claim 7 , wherein the inner peripheral surface of the second cylindrical member has a ridge portion extending in a rotation direction of the second cylindrical member. The gas supply according to any one of claims 1 to 8 , wherein the first cylindrical member and the second cylindrical member have an annular shape in cross section by a plane orthogonal to the rotation axis. apparatus. The drive device is inserted through the first tubular member, and a first shaft portion that supports and suspends the first tubular member from the inside;
A second shaft portion that is inserted through the second tubular member and supports and suspends the second tubular member from the inside;
Gas supply apparatus according to any one of claims 1 to 9, characterized in that it comprises a and a motor for rotating the first shaft portion and the second shaft portion. The gas supply device according to claim 10 , wherein the first shaft portion and the second shaft portion are disposed above a liquid surface of the liquid. A control unit for controlling the operation of the first cylindrical member and the second cylindrical member;
Measuring means for measuring the concentration of the gas dissolved in the liquid,
The said control part controls the driving | operation of the said cylindrical member so that the density | concentration of the said gas measured by the said measurement means may approach predetermined | prescribed target value, It is any one of Claim 1 to 11 characterized by the above-mentioned. The gas supply device described. The storage tank, the cross-sectional shape by a plane that intersects the first axis of rotation, a gas supply apparatus according to claim 1, any one of 12, which is a semi-cylindrical shape. The upper part of the storage tank is closed with a lid,
The gas supply device according to any one of claims 1 to 13 , further comprising supply means for supplying the gas in a space between the lid and the liquid level.

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