JP5574008B2 - Processing method and processing device for micro-machined part in mechanical component - Google Patents

Description

  The present invention relates to a processing method and a processing apparatus for a finely processed portion in a mechanical component.

Conventionally, well-known drilling and electric discharge machining have been used for precision machining for forming fine through holes and fine grooves in various mechanical components.
In the drilling process, the smaller the diameter of the drilled hole, the smaller the corresponding drill diameter needs to be. Therefore, the breakage rate of the drill increases, and the defective product occurrence rate of the mechanical parts increases.
Moreover, since the electrical discharge machining has a gap (discharge gap) of several tens to several hundreds of μm between the machining site and the electrode due to the characteristics of electromachining, the smaller the machining hole diameter, Ultra-fine electrodes are required. A high voltage cannot be applied to such an ultrafine electrode, and in addition, the electrode cannot be regenerated and is extremely expensive, resulting in an increase in running cost.

Therefore, the present applicant paid attention to a water jet laser machining apparatus as a machining method that replaces machining methods such as electric discharge machining and drill machining (see Patent Document 1). In other words, the water jet laser processing apparatus performs processing by injecting high-pressure water from a high-pressure water supply unit to a processing site as a cylindrical water column and irradiating laser light from a laser generation unit using the water column as a waveguide. .
According to such a water jet laser processing apparatus, the water column injected into the processing site is cylindrical, and the laser light travels while totally reflecting inside the cylindrical water column, so that the straightness is high. Therefore, the processing site can be accurately positioned, and energy is concentrated in the water column, so that efficient and highly accurate processing can be expected.

JP 2008-6471 A

As described above, water jet laser machining has advantages that cannot be obtained by electrical discharge machining, but the machining range for each time is limited to the range of the cross-sectional area of the water column, depending on the mechanical parts. It is necessary to move the water jet and laser oscillation source or the mechanical component side in order to form a free shape, an arbitrarily sized processing hole, and a groove.
At that time, it is necessary to pay attention to the difference in the attenuation rate of the laser power value between the processed surface and the deep part. Since this water jet laser processing method uses a thin water jet as a laser waveguide, the water jet reaches the deep part while interfering with the wall surface in a very fine width. Is considered to be less effective because the water jet is disturbed. That is, it seems that the surface roughness in the vicinity of the abyss tends to be rougher than in the vicinity of the surface of the workpiece.
The present invention has been proposed from the background as described above. In order to make use of the water jet laser processing method, the mechanical component and the laser light emitting side can be moved during processing of the mechanical component, so that the processing accuracy can be improved. Another object of the present invention is to provide a processing method and a processing apparatus for a finely processed portion in a mechanical component, which can form a through hole having a favorable and more free shape.

In order to solve the above-mentioned problem, in the invention according to claim 1, processing of the micro-machined portion in the mechanical component (20) for forming the micro-machined portion by water jet laser processing for the mechanical component (20). A laser head (7) that emits laser light together with high-pressure water when the water jet laser processing is performed on a portion of the mechanism component (20) where a finely processed portion is to be formed, and the mechanism component ( 20) is performed while working to obtain the finely machined portion whose vertical cross-sectional shape is a fan-shaped hole, starting from the inner peripheral side of the position corresponding to the outermost periphery of the hole, Water jet laser processing is started, and after the start of water jet laser processing, the laser head (7) is placed in front of the mechanical component (20) on the inner peripheral side of the outermost peripheral position. While reciprocating along the formation direction of the microfabricated part, around the swing center point on the central axis of the mechanical components (20), the rocking part (20) a predetermined angle, the machining with rocking The outer peripheral side is processed after performing it.

  Thereby, when forming a micro process part by water jet laser processing, the micro process part whose longitudinal cross-sectional shape corresponding to a mechanism component (20) is a fan-shaped hole can be formed easily.

  In addition, the finely processed portion is more efficiently formed at the site where the finely processed portion is to be formed in the mechanical component (20). In that case, by changing the moving direction and speed of the laser head (7) side and the mechanism component (20), it is possible to form a micro-machined portion of a hole having a fan-shaped longitudinal section.

  In the invention according to claim 2, the laser head (7) and the mechanical component (20) are moved in the direction opposite to the swinging operation direction of the mechanical component (20) to perform processing. It is characterized by.

  Thereby, a finely processed part can be formed more efficiently, and a finely processed part having a fan-shaped hole having a vertical cross-sectional shape can be formed at will depending on how it is moved.

  In the invention according to claim 3, when forming the micro-machined portion in the mechanical component (20) by the water jet laser processing, a high-pressure water supply unit (5) is provided at a site where the micro-machined portion is to be formed. The high-pressure water from the nozzle is jetted as a cylindrical jet in the vertical direction, and the high-pressure cylindrical jet is used as a waveguide to perform processing by irradiating laser light from the laser generator (4) through the laser head (7). It is characterized by.

  As a result, high-pressure water from the high-pressure water supply unit (5) is jetted as a cylindrical jet in the vertical direction, and a laser beam is irradiated using the high-pressure cylindrical jet as a waveguide to form a finely processed portion. Beam traces are formed in the part, and processed grooves having a corresponding groove width are formed.

According to a fourth aspect of the present invention, the laser beam is irradiated along with the high-pressure cylindrical jet of the high-pressure water in the vertical axis direction from the laser head (7) to the portion where the finely processed portion is to be formed. While the head (7) is reciprocated along the forming direction of the micro-machined portion of the mechanical component (20), the processing table (3) supporting the mechanical component (20) is moved to the center of the mechanical component (20). It is characterized in that it is swung by a predetermined angle around the swing center point on the shaft .

  As a result, the fine groove (10) that expands into a fan shape in cross section is obtained by swinging the mechanical component (20) around the vertical axis at a site where a finely processed portion is to be formed in the mechanical component (20). It is formed.

  The invention according to claim 5 is characterized in that the mechanical component (20) is an injector, and the microfabricated portion is a nozzle hole (26).

  Thus, by processing the nozzle hole (26) of the injector (10) into a fan shape in cross section, the injector (10) can be sprayed at a wide angle without resistance during fuel spraying, thereby improving the spray performance. Can be.

In invention of Claim 6, it is a processing apparatus of the microfabrication part in a mechanism component (20) for forming a microfabrication part with water jet laser processing with respect to a mechanism component (20), Comprising: A water jet laser processing device (2) provided with a laser head (7) that ejects water as a water column (6) and emits a laser beam, and a processing table for mounting and processing the mechanical component (20) ( 3), the laser head (7) includes a laser head driving mechanism (12), and the processing table (3) includes a swing driving mechanism (13). The laser head (7) While being operated by the laser head driving mechanism (12), the processing table (3) is swung by the swing driving mechanism (13), so that the fine processing in the mechanical component (20) is performed. The portion to be formed is irradiated with laser light together with high-pressure water so as to obtain the finely machined portion whose vertical cross-sectional shape is a fan-shaped hole and becomes the outermost periphery of the hole. Water jet laser processing is started from the inner peripheral side of the position as a starting point, and after the start of water jet laser processing, the laser head (7) is moved to the mechanical component (20) on the inner peripheral side from the position of the outermost periphery. While reciprocating along the forming direction of the micro-machined portion of the mechanism component (20) , the swing component (20) is swung by a predetermined angle about the swing center point on the central axis of the mechanical component (20). The outer peripheral side is processed after processing.

  As a result, the processing table (3) on which the mechanical component (20) is placed is swung by the swing driving mechanism (13) while the laser head (7) is operated by the laser head driving mechanism (12). A water column (6) is jetted onto the part where the micro-processed part is to be formed and laser light is irradiated to form a beam trace. The part where the micro-processed part is to be formed includes a micro-processed part having a desired shape. Formed.

  Further, the invention according to claim 7 is an injector, and the finely processed portion is a nozzle hole (26).

  Thus, by processing the nozzle hole (26) of the injector (10) into a fan shape in cross section, the injector (10) can be sprayed at a wide angle without resistance during fuel spraying, thereby improving the spray performance. Can be.

  In addition, the code | symbol in the bracket | parenthesis of each said means is an example which shows a corresponding relationship with the specific means as described in embodiment mentioned later.

When forming the micro-machined part in the mechanical component, the mechanical component side and the laser emission side are actuated, so that the one-time processing range is a water jet laser processing method that is limited to the cross-sectional area of the water column. However, it is possible to form a finely processed portion having a free shape by moving the mechanical component side or the laser emission side.
When the mechanical component is an injector, it can be formed as an injection hole having a fan-shaped cross section, and it is possible to manufacture an injector that has no resistance during fuel spraying and can spray over a wide angle and has improved spraying performance.

It is typical structure explanatory drawing which showed an example of the processing apparatus which implements the processing method of the micro process part in the mechanism components concerning this invention. It is principal part explanatory drawing which shows an example of the injector as an object of the mechanism components which comprise a to-be-processed object. It is the top view seen from the upper part of the injector shown in FIG. It is typical perspective explanatory drawing for demonstrating the process sequence of the fine process part in the mechanism components concerning this invention. FIG. 6 is an operation diagram showing a locus of a machining operation of a laser head in a machining procedure of a fine machining part in a mechanical component according to the present invention. It is typical perspective explanatory drawing of the process sequence which processes a round hole as a fine process part using the processing method of this invention. It is typical structure explanatory drawing which showed the reference example 1 of the processing apparatus for implementing another processing method. It is the diagram which showed the irradiation range of the laser beam which is a processing range processed with the processing apparatus shown in FIG. It is the diagram which showed the irradiation range of the laser beam which is a processing range at the time of moving a process part at a fixed speed. It is typical structure explanatory drawing of the processing apparatus concerning the reference example 2 using the water jet laser processing apparatus. It is typical process explanatory drawing which performs the drill process as a finishing process to the workpiece processed with the processing apparatus shown in FIG. It is a section explanatory view showing an example of an injector as an object of mechanism parts which comprise a work.

An example of the processing apparatus 1 used when implementing the processing method of the fine process part in the mechanism components concerning this invention is shown.
The processing apparatus 1 is an apparatus for forming a micro-processed portion by water jet laser processing for a mechanical component (described later).
As will be described in detail later, the present processing apparatus 1 includes a water jet laser processing apparatus 2 that uses a water jet as a laser waveguide, and a processing table 3 on which mechanical parts are mounted for processing.

  The water jet laser processing apparatus 2 emits laser light while jetting high-pressure water as a water column 6 from a laser generator 4 that generates laser light, a high-pressure water supply part 5 that generates high-pressure water, and a high-pressure water supply part 5. And a nozzle 8 for enabling high-pressure water to be ejected from the laser head 7 as a predetermined small-diameter cylindrical water column 6. As a waveguide, the laser beam focused by the laser head 7 is irradiated.

  The laser head 7 is connected to the laser generator 4 via an optical fiber 9. A condensing lens 10 is interposed in the laser head 7, and an introduction port 11 for introducing high-pressure water from the high-pressure water supply unit 5 is provided.

  In the processing apparatus 1 configured as described above, the water head 6 in the water jet laser processing apparatus 2 is not shown in detail, but the water column 6 proceeds along the contour line forming the micro-processed part. While a laser head driving mechanism 12 for moving the laser head 7 is provided, the machining table 3 is oscillatingly driven to oscillate the machining table 3 about an axis penetrating the center of the fine machining portion in the vertical direction. A mechanism 13 is provided.

The laser head drive mechanism 12 for moving the laser head 7 may be a well-known drive mechanism that is configured by, for example, an XY stage and can be controlled by a control panel (not shown).
Further, the swing drive mechanism 13 for swinging the machining table 3 can be constituted by, for example, a multi-axis link turning support mechanism equipped with an expansion / contraction drive mechanism, and the swing drive mechanism 13 is also a control panel (not shown). Therefore, the control operation is possible.
The laser head drive mechanism 12 and the swing drive mechanism 13 store an operation program in the control panel so as to perform operations in association with each other so that a micro-machined part of a mechanical part can have a desired size and shape. Has been.

Here, as an object of the mechanical component 20, as shown in FIG. 2, for example, an injector can be cited as an example.
Although not described in detail, a mechanical component 20 (hereinafter referred to as an injector 20) includes a cylindrical nozzle body 21 on the front end side of the fuel injection, a lid portion 22 that is a work piece that can be fitted to the front end of the nozzle body 21, and a rear part. It has the attachment part 23 attached to an injector main body (illustration omitted) in the end side.

The nozzle body 21 has a circular cross section and extends in the axial direction, and a needle-like needle valve 24 is inserted into the hollow portion 21a so as to be movable in the axial direction.
Moreover, the cover part 22 has the substantially cone-shaped dome part 25 which has a space inside the front end side, as shown in the figure. A frustoconical valve seat portion 25 a is formed in the inner space of the dome portion 25.

At the tip of the dome portion 25, a different-diameter nozzle hole 26 having a length l that penetrates the dome portion 25 in the thickness direction is formed. The nozzle hole 26 is partitioned by a pair of left and right side walls 26a and a lateral wall 26b as shown in FIG. The groove width h of the different diameter injection hole 26 is constant over the entire length.
On the other hand, as shown in FIG. 2, the width is widened from w1 on the inner peripheral surface side to w2 on the outer peripheral surface side, and the different-diameter injection hole 26 has a fan-shaped vertical cross-sectional shape. Therefore, the left and right side walls 26a have an elongated rectangular shape, but the lateral wall 26b has a fan shape.

  The needle valve 24 has an outer diameter smaller than the inner diameter of the guide hole 21a of the nozzle body 21, and an annular fuel flow passage 27 is defined between the two. Further, the needle valve 24 has a valve portion 28 at the tip thereof that is seated on the valve seat portion 25 a in the inner space of the dome portion 25. The needle valve 24 is moved back and forth in the axial direction (up and down in FIG. 1). When the needle valve 24 moves upward, the valve portion 28 is separated from the valve seat portion 25a and opens the different diameter injection hole 26. As a result, the fuel in the fuel flow passage 27 is injected from the different diameter injection holes 26 in a fan-shaped spray distribution shape.

Next, a processing procedure of the irregularly shaped injection hole 26 which is a finely processed portion in the lid portion 22 at the tip of the nozzle body 21 of the injector 20 using the processing apparatus 1 will be described.
First, the lid 22 that is a workpiece is held on the machining table 3. In this case, in the processing table 3, the placement surface of the lid portion 22 that is the workpiece at the top is initially in a substantially horizontal state, and the lid portion 22 is placed on the placement surface. The water column 6 based on the laser beam from the laser generating unit 4 and the high-pressure water from the high-pressure water supply unit 5 in the water jet laser processing apparatus 2 hits from the vertical direction.

  Next, when an operation command is given by the control panel in the processing apparatus 1, high-pressure water is sent from the high-pressure water supply unit 5 to the laser head 7 in the water jet laser processing apparatus 2, and high pressure is supplied from the laser head 7 through the nozzle 8. Water is jetted as a predetermined small-diameter cylindrical water column 6, while the laser beam generated by the laser generator 4 is sent to the laser head 7 through the optical fiber 9, and is condensed by the laser head 7. The laser beam squeezed by the laser head 7 can be irradiated with the water column 6 of high-pressure water that is squeezed to a desired diameter by the lens 10 and ejected through the nozzle 8 as a waveguide.

  Thus, the laser beam from the laser generating unit 4 and the water column 6 from the high-pressure water supply unit 5 in the water jet laser processing apparatus 2 are in the vertical axis direction at the portion where the irregularly shaped injection hole 26 is to be formed. It becomes a water column 6 from. The laser light emitted from the laser generating unit 4 travels while being totally reflected along the water column 6 and is irradiated without omission to the site where the irregular injection hole 26 is to be formed together with the water column 6.

Since the cross-sectional area of the water column 6 is much smaller than the area of the irregularly shaped nozzle hole 26, a laser head driving mechanism 12 for driving the laser head 7 to obtain the irregularly shaped nozzle hole 26 having a desired shape, The swing drive mechanism 13 that swings the machining table 3 is operated in association with each other by a program stored in advance in the control panel.
For example, as shown in FIGS. 4 and 5, the laser head 7 side initially starts with the laser light from the laser generating unit 4 and the high-pressure water supply unit 5 starting from an appropriate position on the X axis of the lid 22. The water column 6 comes into contact with the water column 6 from the vertical axis direction, and processing starts.
The laser head 7 is reciprocated in the length direction of the irregularly shaped injection hole 26 in the X direction in the drawing by the laser head driving mechanism 12, so that the laser beam and the water column 6 strike parallel to the hole wall surface. The hole wall is gradually scraped. Further, each time the laser head driving mechanism 12 is reciprocated in the X direction, the laser head driving mechanism 12 is gradually moved (offset) in the Y direction by a minute distance, while the processing table 3 side is moved vertically by the swing driving mechanism 13. It can be swung at a constant speed so as to swing a predetermined angle around the axis Z.

  As described above, the laser beam along with the water column 6 is processed from the starting point of the processing table 3 as shown in FIG. Based on the swinging motion of the table 3, it is sprayed and irradiated in a fan shape on the left and right, and a desired irregularly shaped injection hole 26 is formed through (see FIG. 4).

As mentioned above, an example of the processing method of the microfabrication part in the mechanical component according to the present invention has been described and explained. As a processing method of the microfabrication part in the mechanical component using water jet laser processing, the laser head 7 side and the mechanism In the method of operating both the processing table 3 side that supports the parts, in order to further improve the processing efficiency, the laser head 7 side and the mechanical part 20 side are relatively moved in the swinging operation direction of the mechanical part 20. It is also possible to perform processing by operating so as to face each other.
For example, referring to FIG. 5, when the laser head 7 is moved to the left along the X-axis direction in the drawing by the laser head driving mechanism 12, the processing table 3 that supports the mechanical component 20 is shaken. The dynamic drive mechanism 13 swings to the right along the X-axis direction.
On the contrary, when the laser head 7 is moved to the right along the X-axis direction, the processing table 3 supporting the mechanical component 20 is swung to the left along the X-axis direction.
As described above, the laser head 7 and the processing table 3 are operated by the laser head driving mechanism 12 and the swing driving mechanism 13 so as to face each other by a program stored in the control panel in advance, thereby providing a mechanical component. The moving speed of the irradiation point of the laser beam at 20 can be doubled, and the progress of processing can be promoted.

Further, in the present invention, if a technique for operating the laser head 7 side and the processing table 3 side supporting the mechanical component 20 using a water jet laser processing apparatus is used, the round hole 30 having an arbitrary diameter can be processed ( (See FIG. 6).
In this case, the operation mechanism (not shown) of the laser head 7 is caused to revolve so that the high-pressure cylindrical jet from the high-pressure water supply unit 5 draws the outline of the round hole 30 which is a microfabrication unit. Thus, the round hole 30 having an arbitrary diameter can be processed.
Of course, the water column 6 from the laser head 7 is ejected so as to draw the outline of the round hole 30 by moving the operating mechanism on the processing table 3 side that supports the mechanical component 20 instead of the laser head 7 side. Thus, it is possible to perform round hole machining.

  In addition to the processing method of the finely processed portion in the mechanical component as described above, as in Reference Example 1 described below, the laser head 7 side is fixed and the processing table 3 side supporting the mechanical component is swung. Is also possible.

(Reference Example 1)
Here, when forming a fine groove on a processed part (described later) of a mechanical part, when performing laser processing on the processed part where the fine groove is to be formed, the mechanical part is swung while performing the machining. It is a thing. In this case, the processing apparatus 40 includes a laser processing apparatus 41 that is substantially the same as the water jet laser processing apparatus 2 in the processing apparatus 1 shown in FIG. In addition, about the laser processing apparatus 41, the same code | symbol is attached | subjected to the same component as the water jet laser processing apparatus 2, and detailed description is abbreviate | omitted.
As shown in FIG. 7, in this laser processing apparatus 41, the laser head 7 is not provided with the laser head driving mechanism 12, but is a fixed type.
In the processing performed by the laser processing device 41 of the processing device 40 as described above, water is sprayed on the lid portion 22 of the injector 20 that is swingably held on the processing table 3 to form the water column 6, and Laser light is irradiated through the water column 6.

  In addition, about the injector 20 which is a process object, since the injector 20 shown in FIG. 2 is assumed as an example, in order to avoid duplication illustration and description, the illustration and description are abbreviate | omitted.

Next, a processing procedure of the irregularly shaped injection hole 26 that is a fine groove in the lid portion 22 at the tip of the nozzle body 21 of the injector 20 will be described by the laser processing device 41 of the processing device 40.
First, the lid portion 22 of the injector 20 is held on the processing table 3. In this case, in the processing table 3, the placement surface of the lid portion 22 that is the workpiece at the top is initially in a substantially horizontal state, and when the lid portion 22 is placed on the placement surface, the center of the lid portion 22 is placed. The axis coincides with the vertical axis, and coincides with the laser beam from the laser generating unit 4 and the water column 6 from the high-pressure water supply unit 5 in the laser processing apparatus 41 (neutral state).

Next, an operation command is given to the processing table 3, the high-pressure water supply unit 5, and the laser generation unit 4 by the control panel in the processing apparatus 40, and water is sprayed to a portion where the deformed injection hole 26 of the lid portion 22 is to be formed. Thus, the water column 6 is formed and the laser beam is irradiated through the water column 6.
As a result, the high-pressure water for the water column 6 from the high-pressure water supply unit 5 hits the portion where the deformed injection hole 26 of the lid portion 22 should be formed through the nozzle 8 as the water column 6 from the vertical axis direction.
On the other hand, the laser light emitted from the laser generating unit 4 is guided to the laser head 3 through the optical fiber 9 from the laser generating unit 4 and narrowed to a desired diameter, and along the water column 6 together with the water column 6, It is led to the part where the irregularly shaped injection hole 26 is to be formed.
Here, the processing table 3 is swung at a constant speed so as to swing at a predetermined angle around the vertical axis by a drive mechanism (not shown).
As a result, the laser beam together with the water column 6 is moved from the starting point in the neutral state of the processing table 3 to the portion where the deformed injection hole 26 of the lid portion 22 is to be formed, as shown in FIG. Based on the operation, the right and left sides are ejected and irradiated in a fan shape, and a desired irregularly shaped injection hole 26 is formed therethrough.

By the way, as described above, when the laser beam is irradiated with the water column 6 to the portion where the deformed injection hole 26 of the lid portion 22 is to be formed under the swinging motion of the processing table 3, the power value of the laser beam is appropriate. Even if it is an input value, since the power value in actual processing is surface> deep, the surface roughness in the vicinity of the deep tends to deteriorate.
However, by performing the rocking process as described above, the moving speed V2 of the laser beam irradiation point is lower than the moving speed V1 of the laser beam irradiation point near the surface in the vicinity of the deep part. Thus, even if the power value of the laser beam is lowered, the degree of processing can be maintained at a predetermined level (see FIG. 8).
In other words, the vicinity of the deep part is dense and overlaps in a narrower range of laser beam irradiation points, leading to an improvement in the finished surface.

  On the other hand, in the processing that is not oscillating as described above, as shown in FIG. 9, the moving speed V of the irradiation point of the laser light is near the surface even though the laser power is attenuated near the deep part. It can be easily understood that the machining capability cannot follow and the deterioration of the surface roughness is inevitable because it is the same as the side.

  The above shows an example of processing a microfabricated portion having a deformed shape on a mechanical part using a water jet laser processing apparatus, but the water jet laser processing apparatus can of course be used for processing micro holes, so that Will be described as Reference Example 2.

(Reference Example 2)
Here, as will be described later, while adopting a processing method in which pilot hole processing (water jet laser processing) and finishing processing (drill processing, etc.) are combined and executed, water jet laser processing by a water jet laser processing apparatus is accurate. At the stage of improvement, it is conceivable that fine holes are processed with high accuracy only by water jet laser processing.

A water jet laser processing apparatus 51 (hereinafter referred to as a laser processing apparatus 51) in the processing apparatus 50 forms a fine hole in a workpiece (to be described later) of a mechanical component, and the object held on the processing table 3 in an inclined state. The workpiece W is used as a prepared hole for guiding the formation direction at a portion where the fine hole 52 is to be formed.
The laser processing apparatus 51 in this case has the same configuration as the laser processing apparatus 41 shown in Reference Example 1, and the same reference numerals are given to the respective constituent elements, and detailed descriptions thereof are omitted.

In the pilot hole machining performed by the laser machining device 51 described above, water is sprayed on the portion where the fine holes 52 of the workpiece W held in an inclined state on the machining table 3 are to be formed, and the water column 6 is formed. The laser beam is irradiated through the water column 6.
After the pilot hole machining by the laser machining apparatus 51, the drilling is performed using the drill 53 as a finishing process (see FIG. 11).

As an object of the mechanical component including the workpiece W, for example, an injector 60 can be given as an example, as shown in FIG.
The injector 60 has a cylindrical housing 61 which will not be described in detail. The upper end of the housing 61 serves as a fuel inlet 62. Fuel is supplied to the fuel inlet 62 from a fuel pump (not shown), and the fuel flows into the inner peripheral side of the housing 61 via the fuel filter 63. Yes.
A nozzle holder 64 is provided at the lower end of the housing 61, and a tubular valve body 65 is formed inside. The valve body 65 has an opening 66 at the end opposite to the fuel inlet 62 in the axial direction, and an injection hole plate 67 that is a workpiece W is fixed to the opening 66. . The injection hole plate 67 is provided with micro holes 52 (hereinafter referred to as injection holes 52) that are inclined so as to spread outward. A needle 68 is accommodated on the inner peripheral side of the housing 61, the nozzle holder 64 and the valve body 65 as described above so as to be capable of reciprocating in the axial direction. The needle 68 is moved up and down in the axial direction by a drive unit 69 which is electromagnetic drive means, and forms a fuel passage 70 through which fuel flows between the needle body 68 and the injection of the nozzle hole plate 67 in the opening 66. In this configuration, the fuel is fed into the hole 52 and the fuel is injected outward through the injection hole 52.

  And the nozzle hole plate 67 which is the workpiece W is formed in thin plate shape. The nozzle hole plate 67 is a fine hole formed in a plurality of inclinations near the center of the nozzle hole plate 67 so as to follow the substantially circular opening 66 at the end of the valve body 65 on the nozzle hole plate 67 side. The nozzle hole 52 is provided.

Next, a processing procedure of the injection hole 52 will be described as a fine hole in the injection hole plate 67 which is the workpiece W of the injector 60 described above.
First, the nozzle hole plate 67 that is the workpiece W is held in an inclined state on the processing table 3. In this case, the inclination holding angle of the nozzle hole plate 67 with respect to the processing table 3 is adjusted to the inclination angle of the nozzle hole 52 to be formed.
Next, an operation command is given to the high-pressure water supply unit 5 and the laser generation unit 4 by the control panel in the laser processing apparatus 51, and water is sprayed onto the part where the micropores of the workpiece W are to be formed, so And the laser beam is irradiated through the water column 6.
Thereby, the high-pressure water for the water column 6 from the high-pressure water supply part 5 becomes the water column 6 through the nozzle 8 and forms a fine hole of the workpiece W with an inclined holding angle.
On the other hand, the laser beam emitted from the laser generator 4 is guided to the laser head 7 through the optical fiber 9 from the laser generator 4 and is reduced to a desired diameter, and the workpiece W along with the water column 6 along the water column 6. It is guided to the site where the fine holes are to be formed, and can be processed.
As a result, a pilot hole is formed at the site where the fine hole of the workpiece W is to be formed. The pilot hole is oriented toward the inclination holding angle of the injection hole plate 67, that is, the inclination angle of the injection hole 52.
By repeating such pilot hole machining, a desired number of pilot holes Ph can be formed in the workpiece W.

Then, when the pilot hole Ph as described above is formed in the workpiece W, drilling as finishing is performed with the machining table 3 held at the same inclination angle (see FIG. 11).
A drill bit 53p having a diameter corresponding to the nozzle hole 52 is attached to the drill 53, and the drill bit 53p is covered along the same processing axis direction as the water column 6 and the laser beam in the laser processing apparatus 1. Advancing toward the pilot hole Ph in the workpiece W, drilling is performed.
In this case, the drill bit 53p is extremely thin corresponding to the injection hole 52 having a fine diameter, but the preparation hole Ph is formed along the preparation hole Ph that directs the drill bit 53p to the inclination angle of the injection hole 52. Since it can be advanced as a guide, stress applied to the drill bit 53p can be suppressed as much as possible, so that the drill bit 53p can be surely drilled without breaking.

  In addition to using a water jet laser processing device as a pilot hole, normal laser processing is also possible. However, using a water jet laser processing device is a finishing process in the drilling process. Since the amount (removed amount) can be reduced to the limit, it is more advantageous and efficient.

  Moreover, electric discharge machining is also possible for finishing.

  Furthermore, the above-described water jet laser processing apparatus can be expected to improve with accuracy in the future. If the desired level of accuracy can be achieved, high-precision machining of fine holes can be expected with a single water jet laser machining apparatus from pilot hole machining to finishing machining.

  As mentioned above, in carrying out the processing method of the micromachined portion in the mechanical component according to the present invention, the injector is given as the target of the mechanical component, and the processing procedure of the irregular injection hole which is the microgroove in the lid portion has been described. Of course, the target of the component is not limited to the injector, and various mechanical components (vaporizer ejection holes, fluid flow rate adjusting orifices, printing machine ejection nozzles, etc.) having fine grooves are also possible.

DESCRIPTION OF SYMBOLS 1 Processing apparatus 2 Water jet laser processing apparatus 3 Processing table 4 Laser generating part 5 High pressure water supply part 6 Water column 7 Laser head water column 8 Nozzle 9 Optical fiber 10 Condensing lens 11 Inlet 12 Laser head drive mechanism 13 Oscillation drive mechanism DESCRIPTION OF SYMBOLS 20 Injector 21 Nozzle body 21a Hollow part 22 Lid part 23 Mounting part 24 Needle valve 25 Dome part 25a Valve seat part 26 Injection hole 26a Side wall 26b Horizontal wall 27 Fuel flow path 28 Valve part 30 Round hole 40 Processing apparatus 41 Water jet laser processing apparatus DESCRIPTION OF SYMBOLS 50 Processing apparatus 51 Water jet laser processing apparatus 52 Micro hole 53 Drill 53p Drill bit 60 Injector 61 Housing 62 Fuel inlet 63 Fuel filter 64 Nozzle holder 65 Valve body 66 Opening 67 Injection hole plate 68 Needle 6 Driver 70 fuel passage W workpiece h groove width

Claims (7)

A method for processing a finely processed portion in the mechanical component (20) for forming a finely processed portion by water jet laser processing for the mechanical component (20),
When the water jet laser processing is performed on a portion of the mechanical component (20) where a finely processed portion is to be formed, the laser head (7) that emits laser light together with high-pressure water and the mechanical component (20) are operated. While processing, while trying to obtain the finely processed portion is a fan-shaped hole in the longitudinal cross-sectional shape,
Water jet laser processing is started from the inner peripheral side of the hole as the outermost peripheral position, and after the start of the water jet laser processing, the laser head (7) on the inner peripheral side of the outermost peripheral position. Is reciprocated along the forming direction of the micro-machined portion of the mechanical component (20) , and the swing component (20) is moved around the swing center point on the central axis of the mechanical component (20). A processing method for a micro-machined portion in a mechanical component, wherein the outer peripheral side is machined after machining while rocking at a predetermined angle .   The laser head (7) and the mechanical component (20) are processed by moving them in a direction opposite to the swinging direction of the mechanical component (20). Processing method for micro-machined parts in mechanical parts.   In forming the micro-machined portion in the mechanical component (20) by the water jet laser processing, the high-pressure water from the high-pressure water supply unit (5) is vertically cylindrical at the site where the micro-machined portion is to be formed. 3. The processing is performed by irradiating a laser beam from the laser generating section (4) through the laser head (7) while injecting the jet as a jet and using the high-pressure cylindrical jet as a waveguide. 4. The processing method of the fine processing part in the mechanism components as described in 2. The laser head (7) is irradiated with laser light together with the high-pressure cylindrical jet of high-pressure water in the vertical axis direction from the laser head (7) to the portion where the microfabricated portion is to be formed, and the laser head (7) is moved to the mechanical component ( 20) while reciprocating along the forming direction of the finely processed portion, the processing table (3) supporting the mechanical component (20) is centered on the swing center point on the central axis of the mechanical component (20). The method for machining a microfabricated portion in a mechanical component according to claim 1, wherein the micromachined portion is rocked by a predetermined angle.   The method for processing a micromachined portion in a mechanical component according to any one of claims 1 to 4, wherein the mechanical component (20) is an injector, and the micromachined portion is a nozzle hole (26). . A processing device for a microfabricated portion in the mechanical component (20) for forming a microfabricated portion by water jet laser processing for the mechanical component (20),
A water jet laser processing apparatus (2) provided with a laser head (7) for jetting high-pressure water as a water column (6) and emitting laser light;
A processing table (3) for mounting and processing the mechanical component (20);
Comprising
The laser head (7) includes a laser head driving mechanism (12), and the processing table (3) includes a swing driving mechanism (13).
While the laser head (7) is operated by the laser head drive mechanism (12), the processing table (3) is swung by the swing drive mechanism (13), so that the fineness in the mechanical component (20) is obtained. By applying the laser beam with high-pressure water to the site where the processed part is to be formed, the finely processed part whose vertical cross-sectional shape is a fan-shaped hole is obtained,
Water jet laser processing is started from the inner peripheral side of the hole as the outermost peripheral position, and after the start of the water jet laser processing, the laser head (7) on the inner peripheral side of the outermost peripheral position. Is reciprocated along the forming direction of the micro-machined portion of the mechanical component (20) , and the swing component (20) is moved around the swing center point on the central axis of the mechanical component (20). An apparatus for processing a finely processed portion in a mechanical part, wherein the outer peripheral side is processed after performing processing while swinging at a predetermined angle .   The processing device for a microfabricated portion in a mechanical component according to claim 6, wherein the mechanical component (20) is an injector, and the microfabricated portion is a nozzle hole (26).

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