JP5559640B2 - 構造体の製造方法 - Google Patents
構造体の製造方法 Download PDFInfo
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- JP5559640B2 JP5559640B2 JP2010188665A JP2010188665A JP5559640B2 JP 5559640 B2 JP5559640 B2 JP 5559640B2 JP 2010188665 A JP2010188665 A JP 2010188665A JP 2010188665 A JP2010188665 A JP 2010188665A JP 5559640 B2 JP5559640 B2 JP 5559640B2
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- conductive film
- tin oxide
- tin
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- film
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- 238000004519 manufacturing process Methods 0.000 title claims description 18
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 85
- 229910001887 tin oxide Inorganic materials 0.000 claims description 81
- 239000002159 nanocrystal Substances 0.000 claims description 47
- 239000000463 material Substances 0.000 claims description 33
- 229910001432 tin ion Inorganic materials 0.000 claims description 18
- 229920000307 polymer substrate Polymers 0.000 claims description 10
- 239000005871 repellent Substances 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 10
- 239000000523 sample Substances 0.000 claims description 7
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 238000000034 method Methods 0.000 description 20
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 17
- QHGNHLZPVBIIPX-UHFFFAOYSA-N tin(II) oxide Inorganic materials [Sn]=O QHGNHLZPVBIIPX-UHFFFAOYSA-N 0.000 description 14
- 229920000642 polymer Polymers 0.000 description 13
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 10
- 238000001228 spectrum Methods 0.000 description 10
- 229920002799 BoPET Polymers 0.000 description 9
- 239000000126 substance Substances 0.000 description 9
- 238000010894 electron beam technology Methods 0.000 description 8
- 238000005530 etching Methods 0.000 description 8
- 229910052718 tin Inorganic materials 0.000 description 8
- 239000000203 mixture Substances 0.000 description 6
- 238000004381 surface treatment Methods 0.000 description 6
- 238000002524 electron diffraction data Methods 0.000 description 5
- 229910052731 fluorine Inorganic materials 0.000 description 5
- 239000011737 fluorine Substances 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 150000003606 tin compounds Chemical class 0.000 description 5
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 4
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000001186 cumulative effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 125000004430 oxygen atom Chemical group O* 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- QPBYLOWPSRZOFX-UHFFFAOYSA-J tin(iv) iodide Chemical compound I[Sn](I)(I)I QPBYLOWPSRZOFX-UHFFFAOYSA-J 0.000 description 4
- 229910006404 SnO 2 Inorganic materials 0.000 description 3
- 229910021626 Tin(II) chloride Inorganic materials 0.000 description 3
- 229910021627 Tin(IV) chloride Inorganic materials 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- -1 polyethylene terephthalate Polymers 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 239000005020 polyethylene terephthalate Substances 0.000 description 3
- 238000001556 precipitation Methods 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- 235000011150 stannous chloride Nutrition 0.000 description 3
- AXZWODMDQAVCJE-UHFFFAOYSA-L tin(II) chloride (anhydrous) Chemical compound [Cl-].[Cl-].[Sn+2] AXZWODMDQAVCJE-UHFFFAOYSA-L 0.000 description 3
- HPGGPRDJHPYFRM-UHFFFAOYSA-J tin(iv) chloride Chemical compound Cl[Sn](Cl)(Cl)Cl HPGGPRDJHPYFRM-UHFFFAOYSA-J 0.000 description 3
- 238000000026 X-ray photoelectron spectrum Methods 0.000 description 2
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000007688 edging Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 125000001153 fluoro group Chemical group F* 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 150000002894 organic compounds Chemical class 0.000 description 2
- ZSUXOVNWDZTCFN-UHFFFAOYSA-L tin(ii) bromide Chemical compound Br[Sn]Br ZSUXOVNWDZTCFN-UHFFFAOYSA-L 0.000 description 2
- JTDNNCYXCFHBGG-UHFFFAOYSA-L tin(ii) iodide Chemical compound I[Sn]I JTDNNCYXCFHBGG-UHFFFAOYSA-L 0.000 description 2
- YUOWTJMRMWQJDA-UHFFFAOYSA-J tin(iv) fluoride Chemical compound [F-].[F-].[F-].[F-].[Sn+4] YUOWTJMRMWQJDA-UHFFFAOYSA-J 0.000 description 2
- YXTDAZMTQFUZHK-ZVGUSBNCSA-L (2r,3r)-2,3-dihydroxybutanedioate;tin(2+) Chemical compound [Sn+2].[O-]C(=O)[C@H](O)[C@@H](O)C([O-])=O YXTDAZMTQFUZHK-ZVGUSBNCSA-L 0.000 description 1
- NGCDGPPKVSZGRR-UHFFFAOYSA-J 1,4,6,9-tetraoxa-5-stannaspiro[4.4]nonane-2,3,7,8-tetrone Chemical compound [Sn+4].[O-]C(=O)C([O-])=O.[O-]C(=O)C([O-])=O NGCDGPPKVSZGRR-UHFFFAOYSA-J 0.000 description 1
- KVGZZAHHUNAVKZ-UHFFFAOYSA-N 1,4-Dioxin Chemical compound O1C=COC=C1 KVGZZAHHUNAVKZ-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 150000004703 alkoxides Chemical class 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- XLYOFNOQVPJJNP-ZSJDYOACSA-N heavy water Substances [2H]O[2H] XLYOFNOQVPJJNP-ZSJDYOACSA-N 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 238000001027 hydrothermal synthesis Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 239000011356 non-aqueous organic solvent Substances 0.000 description 1
- JFOJYGMDZRCSPA-UHFFFAOYSA-J octadecanoate;tin(4+) Chemical compound [Sn+4].CCCCCCCCCCCCCCCCCC([O-])=O.CCCCCCCCCCCCCCCCCC([O-])=O.CCCCCCCCCCCCCCCCCC([O-])=O.CCCCCCCCCCCCCCCCCC([O-])=O JFOJYGMDZRCSPA-UHFFFAOYSA-J 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000002940 repellent Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- ANOBYBYXJXCGBS-UHFFFAOYSA-L stannous fluoride Chemical compound F[Sn]F ANOBYBYXJXCGBS-UHFFFAOYSA-L 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- YJBKVPRVZAQTPY-UHFFFAOYSA-J tetrachlorostannane;dihydrate Chemical compound O.O.Cl[Sn](Cl)(Cl)Cl YJBKVPRVZAQTPY-UHFFFAOYSA-J 0.000 description 1
- TWRYZRQZQIBEIE-UHFFFAOYSA-N tetramethoxystannane Chemical compound [Sn+4].[O-]C.[O-]C.[O-]C.[O-]C TWRYZRQZQIBEIE-UHFFFAOYSA-N 0.000 description 1
- FAKFSJNVVCGEEI-UHFFFAOYSA-J tin(4+);disulfate Chemical compound [Sn+4].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O FAKFSJNVVCGEEI-UHFFFAOYSA-J 0.000 description 1
- KHMOASUYFVRATF-UHFFFAOYSA-J tin(4+);tetrachloride;pentahydrate Chemical compound O.O.O.O.O.Cl[Sn](Cl)(Cl)Cl KHMOASUYFVRATF-UHFFFAOYSA-J 0.000 description 1
- LTSUHJWLSNQKIP-UHFFFAOYSA-J tin(iv) bromide Chemical compound Br[Sn](Br)(Br)Br LTSUHJWLSNQKIP-UHFFFAOYSA-J 0.000 description 1
- CKUBWOWGEBSNBJ-UHFFFAOYSA-N tin;trifluoromethanesulfonic acid Chemical compound [Sn].OS(=O)(=O)C(F)(F)F CKUBWOWGEBSNBJ-UHFFFAOYSA-N 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- YJGJRYWNNHUESM-UHFFFAOYSA-J triacetyloxystannyl acetate Chemical compound [Sn+4].CC([O-])=O.CC([O-])=O.CC([O-])=O.CC([O-])=O YJGJRYWNNHUESM-UHFFFAOYSA-J 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
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- Other Surface Treatments For Metallic Materials (AREA)
- Non-Insulated Conductors (AREA)
- Manufacturing Of Electric Cables (AREA)
Description
基材と、該基材上に設けられる導電膜と、該導電膜上に設けられる酸化スズの微細構造体とを備える構造体の製造方法において、
前記基材として高分子基材を用い、
マスクパターンを介して光を前記導電膜の表面に照射することで(または、走査型プローブ顕微鏡のプローブで前記導電膜の表面を走査することで)、当該表面に親水性領域および撥水性領域を形成し、
次いで、前記導電膜の前記親水性領域および前記撥水性領域をスズイオン含有溶液に接触させ、前記スズイオン含有溶液から酸化スズのナノ結晶を前記親水性領域に選択的に析出成長させて、前記酸化スズの微細構造体を形成する、構造体の製造方法が提供される。
図1は、本発明の一実施形態による構造体の製造方法の工程図である。構造体は、基材と、該基材上に設けられる導電膜と、該導電膜上に設けられる酸化スズの微細構造体とを備える。
例えば1nm〜300nm程度である。導電膜表面の近傍では5〜10nm程度の長軸長さを有するナノ結晶が多く、一方、導電膜表面から離れた領域では100〜300nm程度の長軸長さを有するナノ結晶が多い傾向にある。
図3は、本発明の別の実施形態による電極の製造方法の工程図である。なお、図3において、図1と同一工程には同一符号を付して説明を省略する。
[実施例1]
(導電膜の表面処理)
まず、高分子基材と導電膜とからなるフィルム基板(縦305mm×横305mm×厚さ0.125mm、Aldrich社製、ITOコートPETシート)を用意した。このフィルム基板において、高分子基材はPETフィルムであり、導電膜はITO膜であった。
酸化スズの微細構造体の形成のため、溶液を調製した。溶液は、90℃の蒸留水に、SnF2(和光純化学社製、質量数156.71g、純度90.0%)を5mMの濃度で溶解して調製した。
得られた構造体の評価結果について図5〜図15を参照して説明する。図5〜図9には、構造体100、PETフィルム110、ITO膜120、酸化スズの微細構造体130、酸化スズのナノ結晶140の少なくとも1つが図示されている。
20 導電膜
60 スズイオン含有溶液
70 マスクパターン
72 遮光膜
74 開口部
80 露光の光
100 構造体
110 PETフィルム(高分子基材)
120 ITO膜(導電膜)
130 酸化スズの微細構造体
140 酸化スズのナノ結晶
Claims (2)
- 基材と、該基材上に設けられる導電膜と、該導電膜上に設けられる酸化スズの微細構造体とを備える構造体の製造方法において、
前記基材として高分子基材を用い、
マスクパターンを介して光を前記導電膜の表面に照射することで、当該表面に親水性領域および撥水性領域を形成し、
次いで、前記導電膜の前記親水性領域および前記撥水性領域をスズイオン含有溶液に接触させ、前記スズイオン含有溶液から酸化スズのナノ結晶を前記親水性領域に選択的に析出成長させて、前記酸化スズの微細構造体を形成する、構造体の製造方法。 - 基材と、該基材上に設けられる導電膜と、該導電膜上に設けられる酸化スズの微細構造体とを備える構造体の製造方法において、
前記基材として高分子基材を用い、
走査型プローブ顕微鏡のプローブで前記導電膜の表面を走査することで、当該表面に親水性領域および撥水性領域を形成し、
次いで、前記導電膜の前記親水性領域および前記撥水性領域をスズイオン含有溶液に接触させ、前記スズイオン含有溶液から酸化スズのナノ結晶を前記親水性領域に選択的に析出成長させて、前記酸化スズの微細構造体を形成する、構造体の製造方法。
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JP2012048912A JP2012048912A (ja) | 2012-03-08 |
JP5559640B2 true JP5559640B2 (ja) | 2014-07-23 |
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Families Citing this family (1)
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JP7113511B2 (ja) * | 2018-12-28 | 2022-08-05 | 国立研究開発法人産業技術総合研究所 | ブリッジ型の酸化スズ含有シートとその製造方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH11232940A (ja) * | 1998-02-12 | 1999-08-27 | Fuji Photo Film Co Ltd | 透明導電体の製造方法および透明導電性フイルム |
US20040067444A1 (en) * | 2000-12-28 | 2004-04-08 | Makoto Wakabayashi | Method for patterning electroconductive tin oxide film |
JP4620298B2 (ja) * | 2001-07-23 | 2011-01-26 | パイオニア株式会社 | 銀若しくは銀合金配線及びその形成方法並びに表示パネル基板 |
JP2003257254A (ja) * | 2002-02-27 | 2003-09-12 | Toppan Printing Co Ltd | 導電性フィルム |
JP2004332085A (ja) * | 2003-05-12 | 2004-11-25 | Seiko Epson Corp | 透明導電膜によるパターン形成方法 |
JP4540311B2 (ja) * | 2003-06-26 | 2010-09-08 | ジオマテック株式会社 | 透明導電膜及びその製造方法 |
JP4920266B2 (ja) * | 2006-02-17 | 2012-04-18 | 株式会社フルヤ金属 | 積層構造体を有する基板の製造方法 |
JP5154346B2 (ja) * | 2008-09-04 | 2013-02-27 | 独立行政法人産業技術総合研究所 | センサ用の電極およびセンサ |
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