JP5554297B2 - Optical module and optical module manufacturing method - Google Patents

Description

  The present invention relates to an optical module and an optical module manufacturing method.

2. Description of the Related Art Conventionally, a semiconductor laser module used for optical communication or the like has a lens, light, and the like fixed on the same substrate by placing a semiconductor laser element on a bonding layer that adjusts the height position of an optical component formed on the substrate. It was optically coupled to a fiber or the like (see, for example, Patent Document 1).
Japanese Patent Application Laid-Open No. 2010-73758

  However, if there is a manufacturing variation in the thickness of the bonding layer at the stage of forming such a bonding layer on the substrate, the height position of the semiconductor laser element is shifted by the amount of the variation. There is a problem that the optical axis of the element and the optical axis of the lens, optical fiber, etc. fixed on the substrate are shifted.

  In the first aspect of the present invention, the substrate, the first and second adjustment portions of the same thickness provided on the substrate, the first optical component provided on the first adjustment portion, A second optical component provided on the second adjustment unit, and at least one of the first and second adjustment units has an optical shape that matches the optical axes of the first optical component and the second optical component. Provide modules.

  It should be noted that the above summary of the invention does not enumerate all the necessary features of the present invention. In addition, a sub-combination of these feature groups can also be an invention.

1 shows a configuration example of an optical module according to a first embodiment of the present invention. The structural example of the optical component mounting part which concerns on 1st Embodiment is shown. The top view of the optical component mounting part which concerns on 1st Embodiment is shown. The AA 'cross section in FIG. 2 is shown. The top view of the modification of the optical component mounting part which concerns on 1st Embodiment is shown. The structural example of the optical component mounting part which concerns on the 2nd Embodiment of this invention is shown. The top view of the optical component mounting part which concerns on 2nd Embodiment is shown. The structural example of the optical component mounting part which concerns on the 3rd Embodiment of this invention is shown. The structural example of the optical module which concerns on the 4th Embodiment of this invention is shown. The manufacturing flow of the optical module which concerns on 1st Embodiment is shown.

  Hereinafter, the present invention will be described through embodiments of the invention, but the following embodiments do not limit the invention according to the claims. In addition, not all the combinations of features described in the embodiments are essential for the solving means of the invention.

  FIG. 1 shows a configuration example of an optical module 100 according to the first embodiment of the present invention. FIG. 1 is an example of a side view in which the casing 110 of the optical module 100 is cut away. The optical module 100 mounts a plurality of optical components on an adjustment unit that is formed on a substrate and adjusts the arrangement of the optical components, and optically couples the plurality of optical components. The optical module 100 includes an optical component mounting part 10, a casing 110, a bottom plate part 112, a cylindrical hole part 114, a temperature adjustment part 120, a base part 124, an optical fiber 150, and a fiber coating part 152. The fiber fixing unit 160 and the light receiving unit 170 are provided.

  The housing 110, the bottom plate portion 112, and the cylindrical hole portion 114 are made of metal. The housing 110, the bottom plate portion 112, and the cylindrical hole portion 114 are formed of aluminum (Al) as an example and seal the inside. Instead, the housing 110, the bottom plate portion 112, and the cylindrical hole portion 114 may be a package formed of resin. Alternatively, the housing 110 and the cylindrical hole portion 114 may be a package formed of resin, and the bottom plate portion 112 may be formed of metal. The casing 110, the bottom plate portion 112, and the cylindrical hole portion 114 may form a butterfly type package.

  The temperature control unit 120 is placed on the bottom plate part 112 and keeps the temperature of the upper surface of the temperature control unit 120 constant. The temperature adjustment unit 120 may be an electronic cooling device using a Peltier element or the like. The base unit 124 is placed on the upper surface of the temperature control unit 120, and transmits a temperature that the temperature control unit 120 keeps constant to the upper surface of the base unit 124. The base portion 124 may be formed from a material including aluminum nitride (AlN), copper tungsten (CuW), Si, or diamond.

  The optical component mounting part 10 is placed on the upper surface of the base part 124, and transmits the temperature maintained by the temperature adjusting unit 120 to the upper surface of the optical component mounting part 10. The optical component mounting unit 10 optically couples and fixes a plurality of optical components mounted on the upper surface of the optical component mounting unit 10.

  The optical fiber 150 is inserted into the housing 110 from the outside of the housing 110 through the cylindrical hole portion 114. The optical fiber 150 is covered and protected by the fiber coating portion 152 outside the housing 110. The fiber coating portion 152 may include a resin having a diameter of 250 μm or 400 μm. The fiber covering portion 152 may have a structure in which the optical fiber 150 is covered with the resin and then covered with fibers or the like.

  The fiber fixing part 160 is provided between the cylindrical hole part 114 and the optical fiber 150, and fixes the optical fiber 150 to the cylindrical hole part 114. The fiber fixing unit 160 may fix the optical fiber 150 using resin, low melting point glass, adhesive, or the like.

  The light receiving unit 170 receives the optical output of the semiconductor laser mounted on the optical component mounting unit 10 and monitors the optical output of the semiconductor laser. The light receiving unit 170 may be a photodiode. The optical module 100 according to this embodiment described above monitors the optical output of the semiconductor laser mounted on the optical component mounting unit 10 while keeping the ambient temperature of the optical component mounted on the optical component mounting unit 10 constant. Stable and high power laser output is obtained.

  FIG. 2 shows a configuration example of the optical component mounting unit 10 according to the first embodiment. FIG. 3 is a top view of the optical component mounting unit 10 according to the first embodiment. The optical component mounting unit 10 includes a substrate 200, a first adjustment unit 210, a second adjustment unit 220, and a third adjustment unit 230, and includes a first optical component 130 and a second optical component 140. And the third optical component 142 are mounted.

  The substrate 200 has a mounting surface for optical components. The substrate 200 may be formed from a material including aluminum nitride (AlN), copper tungsten (CuW), Si, or diamond.

  The first to third adjustment units 210 to 230 are provided on the substrate 200 with the same thickness. The first to third adjustment units 210 to 230 are a metallized layer in which a metal is grown on the substrate 200 or a plating layer in which a metal is coated on the substrate 200. The first to third adjustment units 210 to 230 include one or more materials of Au, Ag, Cu, Al, In, Ni, and Sn, and two or more of these materials It may be an alloy. Instead, the first to third adjustment units 210 to 230 may be ceramic layers.

  The first to third adjustment units 210 to 230 are formed of substantially the same material and the same means on the substrate 200. Further, the first to third adjustment units 210 to 230 may be formed on the substrate 200 at the same time. The first to third adjustment units 210 to 230 can be formed on the substrate 200 with the same thickness T by being simultaneously formed of the same material and by the same means. Even if a manufacturing error occurs, the first to third adjustment units 210 to 230 can have the same thickness error ΔT, so that they can be formed with the same thickness T + ΔT. .

  The first optical component 130 is provided on the first adjustment unit 210. In the first embodiment, the first optical component 130 is a semiconductor laser element. As an example, the semiconductor laser element is a ridge type semiconductor laser element having a ridge structure. The semiconductor laser element emits laser light on the optical axis indicated by a one-dot chain line in the figure from the end face of the laser element in response to external current injection. In the first embodiment, the optical axis determined by the laser light emitted from the first optical component 130 is the laser emission position of the first optical component 130 at the thickness T of the first adjustment unit 210 on the substrate 200. It is located at the height of T + h with the height h of.

  The second optical component 140 is provided on the second adjustment unit 220. In the first embodiment, the second optical component 140 is a sphere or a cylinder. In the first embodiment, the second optical component 140 is a lens that condenses the laser light output from the semiconductor laser element. For example, the second optical component 140 is a cylindrical lens formed of quartz glass or the like that is placed so that the central axis intersects perpendicularly with the optical axis determined by the laser light.

  The third optical component 142 is provided on the third adjustment unit 230. In the first embodiment, the third optical component 142 is an optical fiber 150 fixed to the substrate 200. That is, the third optical component 142 of the optical fiber 150 is fixed on the substrate 200 on the third adjustment unit inside the casing 110 and fixed by the fiber fixing unit 160 at the cylindrical hole 114 in the casing 110. One end. The optical fiber 150 is placed so that the core center portion of the incident end face coincides with the optical axis determined by the laser light.

  The first optical component 130, the second optical component 140, and the third optical component 142 are placed on the corresponding adjustment units, optically coupled, and then fixed to the adjustment unit. The first optical component 130, the second optical component 140, and the third optical component 142 are fixed with an adhesive or the like. Here, the adhesive may be a resin that is solidified by irradiation with ultraviolet rays. The adhesive is desirably light transmissive.

  Here, at least one of the first adjustment unit 210 and the second adjustment unit 220 has a shape that matches the optical axes of the first optical component 130 and the second optical component 140. In the first embodiment, the second adjustment unit 220 has a shape that matches the optical axis of the second optical component 140. At least one of the first adjustment unit 210 and the second adjustment unit 220 has a plurality of holding units, and the first optical component 130 or the second optical component 140 is in contact with each of the plurality of holding units. Hold. In the first embodiment, the second adjustment unit 220 includes a plurality of holding units 222 and holds the second optical component 140 in contact with each of the plurality of holding units 222.

  That is, the second adjustment unit 220 makes the height t1 of the lowest point on the substrate 200 side of the second optical component 140 different from the height T of the lowest point on the substrate 200 side of the first optical component 130. The heights of the optical axes of the first optical component 130 and the second optical component 140 are kept the same. Here, when the optical axis height of the second optical component 140 is r1, the second adjustment unit 220 causes each of the plurality of holding units 222 to be in contact with the second optical component 140 so that t1 + r1 and T + h match. Hold in contact.

  For example, the two holding portions 222 having a thickness T are formed on the substrate 200 with a distance D1 parallel to the optical axis. Here, if the hypotenuse of the right triangle with the half distance D1 as the base and the optical axis height h of the first optical component 130 is the same as the optical axis height r1 of the second optical component 140, t1 + r1 and T + h match.

That is, by setting D1 = 2 × (r1 ² + h ² ) ^1/2 , the two holding units 222 hold the first optical component 130 and the second optical component 140 with the same optical axis height. be able to. Here, even if manufacturing errors are superimposed on the first adjustment unit 210 and the second adjustment unit 220, the thicknesses of the first adjustment unit 210 and the second adjustment unit 220 are the same T + ΔT. Since it is formed, the optical axis heights of the first optical component 130 and the second optical component 140 can be kept the same.

  In this way, the light that is provided in the second adjustment unit 220 having the same thickness T as the first adjustment unit 210 in which the first optical component 130 is provided and is different from the optical axis height h of the first optical component 130. The second optical component 140 having the axial height r1 coincides with the optical axis of the first optical component 130 and is optically coupled to the first optical component 130. The second optical component 140 condenses the laser light emitted from the first optical component 130 and transmits it to the third optical component 142.

  FIG. 4 shows an AA ′ cross section in FIG. The third adjustment unit 230 has a shape that matches the optical axes of the third optical component 142 and the first optical component 130 or the second optical component 140. The third adjustment unit 230 includes a plurality of holding units 232, and holds the third optical component 142 in contact with each of the plurality of holding units 232.

  Similar to the second adjustment unit 220, the third adjustment unit 230 holds the optical axis of the third optical component 142 and the optical axes of the first optical component 130 and the second optical component 140 in the same manner. That is, the third adjustment unit 230 makes the height t2 of the lowest point on the substrate 200 side of the third optical component 142 different from the height T of the lowest point on the substrate 200 side of the first optical component 130.

For example, the two holding portions 232 having the thickness T are formed on the substrate 200 with a distance D2 perpendicular to the optical axis. Here, if the hypotenuse of a right triangle with the half distance D2 as the base and the optical axis height h of the first optical component 130 is the same as the optical axis height r2 of the third optical component 142, t2 + r2 and T + h match. That is, by setting D2 = 2 × (r2 ² + h ² ) ^1/2 , the two holding units 232 hold the optical axes of the first optical component 130 and the third optical component 142 at the same height. be able to.

  As described above, the third optical component 142 is optically coupled to the second optical component 140 in alignment with the optical axes of the first optical component 130 and the second optical component 140. The third optical component 142 receives the laser beam transmitted from the second optical component 140 and transmits it to the outside of the housing 110. As described above, the first optical component 130, the second optical component 140, and the third optical component 142 are optically coupled on the substrate 200 with their optical axes aligned with each other. Further, even if manufacturing errors are superimposed on the respective adjustment units, the thicknesses of the respective adjustment units are formed with the same T + ΔT, and the optical axis height of each optical component can be made the same.

  FIG. 5 shows a top view of a modified example of the optical component mounting unit 10 according to the first embodiment. In the optical component mounting unit 10 of the present modification, the same reference numerals are given to the substantially same operations as those of the optical component mounting unit 10 according to the first embodiment shown in FIG.

  In the first embodiment, the example in which the second adjustment unit 220 has the two holding units 222 and holds the second optical component has been described. Instead, at least one of the first adjustment unit 210, the second adjustment unit 220, and the third adjustment unit 230 includes at least three holding units, and the first optical component 130 and the second optical unit. The component 140 or the third optical component 142 is held in contact with each of the at least three holding portions.

  In the optical component mounting unit 10 of the present modification, the second adjustment unit 220 includes four holding units 222 and holds the second optical component 140. Here, the second optical component 140 of the present modification is a ball-type lens having a radius r3 made of quartz glass or the like.

Similar to the method described in FIG. 2, the optical axis of the second optical component 140 can be aligned with the optical axis of the first optical component 130 by appropriately determining the intervals between the plurality of holding portions 222. For example, the distance in the direction parallel to the optical axis of the plurality of holding units 222 and the distance in the direction perpendicular to the optical axis are set to be the same D3, and D3 = 2 × (r3 ² + h ² ) ^1/2 is set. The holding unit 222 can hold the first optical component 130 and the second optical component 140 with the same optical axis height.

  Further, the second optical component 140 of the present modification has been described as a ball-type lens, but instead, the second optical component 140 may be a biconic lens having different curvatures on the horizontal axis and the vertical axis. In the case of a shape including such an ellipse, the four holding portions 222 are different in the interval between the first optical component 130 and the second optical component 140 by changing the interval in the direction parallel to the optical axis and the interval in the direction perpendicular to the optical axis. The height of the optical axis can be kept the same.

  According to the modification of the optical component mounting unit 10 according to the first embodiment described above, the second adjusting unit 220 includes the three or more holding units 222, so that the second optical component 140 having various shapes can be obtained. The first optical component 130 can be optically coupled with the first optical component 130 while maintaining the same optical axis height. In the present modification, the second adjustment unit 220 has been described as having three or more holding units 222. Instead, the first adjustment unit 210 and / or the third adjustment unit 230 are three. You may have the above holding | maintenance part. Moreover, all the adjustment parts may have three or more holding parts.

  FIG. 6 shows a configuration example of the optical component mounting unit 10 according to the second embodiment of the present invention. FIG. 7 is a top view of the optical component mounting portion according to the second embodiment. In the optical component mounting portion 10 according to the second embodiment, the same reference numerals are given to the substantially same operations as those of the optical component mounting portion 10 according to the first embodiment shown in FIGS. Description is omitted.

  In the first embodiment, the example in which the second adjustment unit 220 has the two holding units 222 and holds the second optical component 140 has been described. Instead, the second adjustment unit 220 includes a groove-shaped holding unit 222 that holds the second optical component 140. The second optical component 140 is mounted on the groove-shaped holding unit 222 and the second optical component 140 is mounted. The position of the component 140 can be adjusted in the groove direction.

  In the second embodiment, the second adjustment unit 220 includes a groove-shaped holding unit 222 that holds the second optical component 140, and the second optical component 140 is mounted on the groove-shaped holding unit 222 and is 2 The position of the optical component 140 can be adjusted in the groove direction. For example, the second optical component 140 can be adjusted in the groove direction perpendicular to the optical axis on the groove-shaped holding part 222.

  In addition, the groove-shaped holding portion 222 may be interrupted at a predetermined position on the substrate 200. Then, the second optical component 140 may move in the groove direction and hit the position where the formation of the groove is interrupted, and may be positioned on the holding unit 222. In this case, the second optical component 140 is positioned at a position where it is optically coupled to the first optical component 130.

  In the second embodiment, the third adjustment unit 230 includes a groove-shaped holding unit 232 that holds the third optical component 142, and the third optical component 142 is mounted on the groove-shaped holding unit 232 and the third adjustment unit 230 is mounted. The position of the three optical components 142 can be adjusted in the groove direction. For example, the third optical component 142 can be adjusted in the groove direction parallel to the optical axis on the groove-shaped holding portion 232.

  In addition, the groove-shaped holding portion 232 may be interrupted at a predetermined position on the substrate 200. Then, the third optical component 142 may move in the groove direction and hit the position where the formation of the groove is interrupted, and may be positioned on the holding portion 232. In this case, the third optical component 142 is positioned at a position where it is optically coupled to the second optical component 140.

  In the second embodiment, the first adjustment unit 210, the second adjustment unit 220, and the third adjustment unit 230 are integrally formed on the substrate 200. For example, the adjustment unit in the drawing is divided into first to third adjustment units for convenience of explanation, but is formed as one adjustment unit formed on the substrate 200. Thereby, the said adjustment part can reduce generation | occurrence | production of manufacturing defects, such as a burr | flash, a crack, a crack, or a chip | tip, in a manufacturing process, and can improve a manufacturing yield.

  In the second embodiment, the substrate 200 has a first adjustment portion 210 or a second adjustment surface on a surface opposite to the first surface on which the first adjustment portion 210 and the second adjustment portion 220 are formed. A fourth adjustment unit 240 provided with substantially the same material as the adjustment unit 220 is further provided. The fourth adjustment unit 240 may be formed in substantially the same shape as the plurality of adjustment units formed on the first surface. Moreover, the 4th adjustment part 240 may be formed in the substantially same thickness as the some adjustment part formed in a 1st surface.

  As described above, the fourth adjustment portion 240 is formed with substantially the same material, substantially the same shape, and substantially the same thickness as the plurality of adjustment portions formed on the first surface. The stress or distortion of the substrate 200 caused by the formation of the adjustment portion can be relaxed. Here, since the fourth adjustment part 240 is formed for the purpose of relieving the stress or distortion of the substrate 200, the fourth adjustment part 240 is completely matched with the materials, shapes, and thicknesses of the plurality of adjustment parts formed on the first surface. It does not have to be. The fourth adjustment unit 240 may have a layer structure with a uniform thickness having a volume substantially equal to the volume of the plurality of adjustment units formed on the first surface.

  FIG. 8 shows a configuration example of the optical component mounting unit 10 according to the third embodiment of the present invention. In the optical component mounting portion 10 according to the third embodiment, the same reference numerals are given to the substantially same operations as those of the optical component mounting portion 10 according to the first embodiment shown in FIGS. Description is omitted.

  In the first embodiment, the example in which the first adjustment unit 210 and the second adjustment unit 220 are formed on the same surface of the substrate 200 has been described. Instead, the substrate 200 is provided at a height different from the first surface on which the first adjustment unit 210 is provided and the first surface on the substrate 200, and the second adjustment unit 220 is provided on the second surface. And a surface.

  In the third embodiment, the substrate 200 is different from the first surface on which the first adjustment unit 210 and the third adjustment unit 230 are formed in the height direction by t4, and the second adjustment. A second surface on which the portion 220 is formed. The 1st adjustment part 210, the 2nd adjustment part 220, and the 3rd adjustment part 230 are each formed by the same thickness T similarly to 1st Embodiment. The second optical component 140 is a cylindrical lens or a ball type lens.

  In the third embodiment, in order to optically couple the second optical component 140 to the first optical component 130, the second adjustment unit 220 sets the height t3 of the lowest point on the substrate 200 side of the second optical component 140. The heights of the optical axes of the first optical component 130 and the second optical component 140 are kept the same, differing from the height T of the lowest point on the substrate 200 side of the first optical component 130. Here, when the optical axis height of the second optical component 140 is r1, the second adjustment unit 220 causes each of the plurality of holding units 222 to be connected to the second optical component 140 so that t3 + r1 and T + h + t4 coincide with each other. Hold in contact.

For example, the two holding portions 222 having a thickness T are formed on the second surface of the substrate 200 with a distance D4 parallel to the optical axis. Here, the sum of t4 which is the difference in height between the first surface and the second surface of the substrate 200 and the optical axis height h of the first optical component 130 is set high with the half distance of the distance D4 as the base. If the hypotenuse of the right triangle matches the optical axis height r1 of the second optical component 140, t3 + r1 and T + h + t4 match. That is, by setting D4 = 2 × (r1 ² + (h + t4) ² ) ^1/2 , the two holding units 222 make the heights of the optical axes of the first optical component 130 and the second optical component 140 the same. Can be held.

  As described above, the second thickness formed on the second surface different from the first surface on which the first optical component 130 is provided with the same thickness T as the first adjustment unit 210 on which the first optical component 130 is provided. The second optical component 140 provided in the adjustment unit 220 is placed in alignment with the optical axis of the first optical component 130 and is optically coupled to the first optical component 130. In the third embodiment, since the second adjustment unit 220 is formed on the second surface that differs from the first surface by a height of t4, the second optical component 140 has a large optical axis height according to t4. Can have r1.

  FIG. 9 shows a configuration example of an optical module 100 according to the fourth embodiment of the present invention. In the optical module 100 according to the fourth embodiment, the same components as those of the optical module 100 according to the first embodiment shown in FIG.

  In the first embodiment, it has been described that the optical fiber 150 is fixed to the third adjustment unit 230 on the optical component mounting unit 10 as the third optical component 142. Instead, the optical fiber 150 is fixed to the housing 110 independently of the optical component mounting unit 10.

  In the third embodiment, the optical component mounting unit 10 includes a first adjustment unit 210 in which the first optical component 130 is provided, and a second adjustment unit 220 in which the second optical component 140 is provided. The first optical component 130 is placed and fixed on the first adjustment unit 210 so that the optical axis of the first optical component 130 coincides with the optical axis of the optical fiber 150. The second optical component 140 is placed and fixed on the second adjustment unit 220 so as to coincide with the optical axis of the first optical component 130. Here, the second optical component 140 is optically coupled to the first optical component 130 and is also optically coupled to the optical fiber 150.

  As described above, the optical component mounting unit 10 according to the third embodiment is the same as the optical component mounting unit 10 while optically coupling the optical axes of a plurality of optical components mounted on the optical component mounting unit 10 to coincide with each other. It optically couples with other optical components that are fixed independently. The optical component mounting portion 10 is formed with the same thickness T on the substrate 200 by forming a plurality of adjustment portions on which a plurality of optical components are placed, with the same material, the same means, and simultaneously. By forming in this way, it is possible to optically couple such a plurality of optical components.

  In the above description, the shape of each adjustment unit formed on the optical component mounting unit 10 has been described as a rectangle. Instead of this, the shape of each adjustment unit may have a shape or the like having a curvature in accordance with the shape of the optical component provided in each adjustment unit. In the above description, the first optical component 130 has been described as a semiconductor laser element. Alternatively, the first optical component 130 may be a photodiode. In this case, the optical module 100 is a light receiving device that receives an optical signal transmitted from the outside via the optical fiber 150.

  FIG. 10 shows a manufacturing flow of the optical module 100 according to the first embodiment. First, the first adjustment unit 210, the second adjustment unit 220, and the third adjustment unit 230 having the same thickness are formed on the substrate 200 (S1000). Each adjusting portion is formed by plating or ceramic growth. It is desirable that each adjustment unit is made of substantially the same material, substantially the same means, and simultaneously (in the same batch).

  As a result, each adjustment portion can be formed on the substrate 200 with the same thickness T. Further, even if a manufacturing error occurs, the thickness error ΔT of each adjustment portion to be formed can be made the same, so that each adjustment portion can be formed with the same thickness T + ΔT. Each adjustment unit has a shape that matches the optical axes of the optical components provided in each adjustment unit.

  Next, the first optical component 130, the second optical component 140, and the third optical component 142 are mounted on the corresponding adjustment units (S1010). That is, the first optical component 130 is provided on the first adjustment unit 210, the second optical component 140 is provided on the second adjustment unit 220, and the third optical component 142 is provided on the third adjustment unit 230.

  Here, when the third optical component 142 is the optical fiber 150, the third optical component 142 may be provided on the third adjustment unit 230 after the substrate 200 is accommodated in the housing 110. Here, the shape and arrangement of each adjustment unit are formed so that the optical axes of the respective optical components have the same height and the optical components adjacent to each other are optically coupled. Without being able to mount each optical component.

  When the arrangement of each optical component is determined, the adjustment unit and the optical component are fixed using an adhesive or the like. In this case, the adhesive is poured into the contact portion between the optical component and the adjustment portion or the gap between the optical component and the adjustment portion and fixed. Instead of this, a resin to be solidified by irradiating with ultraviolet rays may be applied in advance, and then each optical component may be arranged. After the arrangement of each optical component is determined, the resin may be solidified by irradiating with ultraviolet rays. Thus, the optical component mounting part 10 is formed.

  Next, the optical component mounting unit 10 is accommodated in the casing 110 and packaged (S1020). A temperature adjustment unit 120 and a base unit 124 are formed in the housing 110 in advance, and the optical component mounting unit 10 is fixed on the base unit 124. When the third optical component 142 is the optical fiber 150, the optical fiber 150 may be placed and fixed on the third adjustment unit 230 after the optical component mounting unit 10 is fixed. Further, the light receiving unit 170 may be fixed on the base unit 124. Further, a temperature detection unit for temperature monitoring may be provided on the base unit 124 or the optical component mounting unit 10.

  After fixing the parts to be housed in the housing 110, the lid of the housing 110 is closed and sealed. Here, the housing 110 may be sealed after the inside of the housing 110 is filled with nitrogen gas or the like. According to the manufacturing flow according to the first embodiment described above, even if there is a manufacturing variation in the adjustment unit formed on the substrate 200, the optical component can be placed without shifting the optical axis. The optical module 100 can be formed by easily and inexpensively adjusting the optical axes of a plurality of optical components placed on the optical module.

  As mentioned above, although this invention was demonstrated using embodiment, the technical scope of this invention is not limited to the range as described in the said embodiment. It will be apparent to those skilled in the art that various modifications or improvements can be added to the above-described embodiment. It is apparent from the scope of the claims that the embodiments added with such changes or improvements can be included in the technical scope of the present invention.

  The order of execution of each process such as operations, procedures, steps, and stages in the apparatus, system, program, and method shown in the claims, the description, and the drawings is particularly “before” or “prior to”. It should be noted that the output can be realized in any order unless the output of the previous process is used in the subsequent process. Regarding the operation flow in the claims, the description, and the drawings, even if it is described using “first”, “next”, etc. for convenience, it means that it is essential to carry out in this order. It is not a thing.

DESCRIPTION OF SYMBOLS 10 Optical component mounting part, 100 Optical module, 110 Case, 112 Bottom plate part, 114 Cylindrical hole part, 120 Temperature control part, 124 Base part, 130 1st optical part, 140 2nd optical part, 142 3rd optical part , 150 optical fiber, 152 fiber coating unit, 160 fiber fixing unit, 170 light receiving unit, 200 substrate, 210 first adjustment unit, 220 second adjustment unit, 222 holding unit, 230 third adjustment unit, 232 holding unit , 240 Fourth adjustment unit

Claims (15)

A substrate,
First and second adjustment portions of the same thickness provided on the substrate;
A first optical component provided on the first adjustment unit;
A second optical component provided on the second adjustment unit;
With
The first and second adjustment units are
A metallized layer in which a metal is grown on the substrate, a plating layer in which the metal is coated on the substrate, or a ceramic layer,
On the substrate, the same material, formed by the same means,
The first optical component and the second optical component are in contact with the first optical component and the second optical component on the top surfaces of the first and second adjustment parts, respectively, so that the optical axes of the first optical component and the second optical component coincide with each other. An optical module that holds the first optical component and the second optical component .   The second adjustment unit is configured such that the height of the lowest point on the substrate side of the second optical component is different from the height of the lowest point on the substrate side of the first optical component. The optical module according to claim 1, wherein the height of the optical axis of the second optical component is kept the same. At least one of the first and second adjustment units includes a plurality of holding units, and holds the first optical component or the second optical component in contact with the upper surfaces of the plurality of holding units. The optical module according to claim 1 or 2. At least one of the first and second adjustment units has at least three holding units, and the first optical component or the second optical component is in contact with the upper surfaces of the at least three holding units. The optical module according to claim 3, which is held.   The second adjustment unit has a groove-shaped holding unit that holds the second optical component, and the second optical component is mounted on the groove-shaped holding unit to position the second optical component in the groove. The optical module according to claim 1, wherein the optical module can be adjusted in a direction.   The optical module according to any one of claims 1 to 5, wherein the second optical component has a shape including a sphere, a cylinder, or an ellipse.   The optical module according to any one of claims 1 to 6, wherein the first optical component is a semiconductor laser element, and the second optical component is a lens that condenses laser light output from the semiconductor laser element. The substrate is
A first surface on which the first adjustment unit is provided;
The optical module according to claim 1, further comprising: a second surface provided at a height different from the first surface on the substrate and provided with the second adjustment unit. The optical module according to any one of claims 1 to 8, wherein the first and second adjustment units are simultaneously formed on the substrate. The optical module according to any one of claims 1 to 9, wherein the first and second adjustment units are integrally formed on the substrate. The optical module is
A third adjustment unit having the same thickness as the first and second adjustment units provided on the substrate;
A third optical component provided on the third adjustment unit;
Further comprising
The third adjustment unit is in contact with the third optical component so that the optical axes of the third optical component and the first optical component or the second optical component coincide with each other, and the optical module according to claim 1, any one of 10 to hold. The optical module according to claim 11 , wherein the third optical component is an optical fiber fixed to the substrate. The substrate, the the surface opposite to the first and the second surface adjustment portion is formed, the first or the second adjustment unit and the fourth adjusting portion provided at the same material Furthermore the optical module according to claim 1, any one of 12 with a. An adjustment portion forming step of providing the first and second adjustment portions on the substrate with the same thickness , the same material, and the same means ;
An optical component mounting stage in which a first optical component is provided on the first adjustment unit and a second optical component is provided on the second adjustment unit;
With
The first and second adjustment units are
A metallized layer in which metal is grown on the substrate, or a plating layer in which metal is coated on the substrate, or a ceramic layer ,
The first optical component and the second optical component are respectively in contact with the first optical component and the second optical component on the top surfaces of the first and second adjustment units so that the optical axes of the first optical component and the second optical component are aligned with each other. An optical module manufacturing method for holding one optical component and the second optical component . The optical module manufacturing method according to claim 14 , wherein in the adjustment portion forming step, the first and second adjustment portions are simultaneously formed on the substrate.

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