JP5544124B2 - Polishing pad - Google Patents

Description

  The present invention relates to a polishing pad, and more particularly, to a polishing pad provided with a resin sheet material having a polishing surface for polishing by rotating relative to the processing surface of an object to be polished.

  Conventionally, optical materials such as lenses, parallel plane plates and reflecting mirrors, hard disk substrates, silicon wafers, glass substrates for liquid crystal displays and the like (objects to be polished) require high-precision flatness. Polishing processing using is performed. In the polishing process of such an object to be polished, a chemical mechanical polishing (chemical mechanical polishing, CMP) method is used. In the CMP method, single-side polishing for polishing one surface of the object to be polished, double-side polishing for simultaneously polishing both surfaces of the object to be polished, and the like are widely performed. At the time of polishing, a polishing liquid (slurry) containing abrasive grains and the like is supplied between the object to be polished and the polishing pad. Slurry has acidic and basic properties, and polishing is performed using a chemical action due to the liquidity of the slurry in addition to the mechanical action due to the abrasive grains.

  Generally, when a slurry is supplied between a polishing pad and an object to be polished during polishing, the components of the slurry and a part of the material of the object are chemically reacted to perform polishing. At this time, since the polishing surface of the polishing pad and the slurry are in contact with each other, a fragile layer is formed on the surface side of the polishing pad due to the liquidity of the slurry. For this reason, as the polishing process proceeds, the fragile layer may be ground by the abrasive grains contained in the slurry. When the fragile layer on the surface side of the polishing pad is ground, the flatness of the polished surface is deteriorated, so that the degree of polishing of the object to be polished becomes uneven and the polishing rate may be lowered. In addition, due to the temperature rise due to the reaction heat and frictional heat partially generated on the surface of the object during polishing, the object to be polished is softened, and the object to be polished is partially excessively polished. The polishing rate may become unstable.

  Therefore, a polishing pad having a groove formed on the polishing surface has been proposed for the purpose of uniformly supplying the slurry between the object to be polished and the polishing pad during polishing and stabilizing the polishing rate. For example, a polishing pad is disclosed in which different depth grooves in which a small depth portion and a large depth portion are formed in the same groove are formed on a polishing surface (see Patent Document 1). Further, a polishing pad is disclosed in which grooves are formed with a stepless change in depth from the center to the outside and from the outside to the center (see Patent Document 2).

JP 2005-177934 A JP 2001-291687 A

  Normally, during polishing, centrifugal force and inertia act on the slurry by the rotation of the polishing surface and the object to be polished, so that the slurry moves toward the outer edge and to the rear in the rotation direction. In order to disperse the slurry uniformly within the processing surface of the object to be polished during the polishing process, the slurry is continuously supplied and a certain amount is held between the polishing pad and the object to be polished, and the slurry is consumed for polishing. When it is done, it is important to discharge outside so as not to obstruct the flow of the slurry. However, in the technique of Patent Document 1, by forming grooves at different depths on the polishing surface, the retention of the slurry is improved, but the grooves are not formed in the direction in which the slurry moves during the polishing process. For this reason, the groove hinders the movement of the slurry, and there is a problem in the discharge property of the slurry. Moreover, in the technique of Patent Document 2, although the slurry can be prevented from being excessively discharged by forming a groove having a shape that allows the slurry to flow in the center side, the groove moves in the same manner as in Patent Document 1. As a result, the discharge of slurry deteriorates. When the discharge property of the slurry is deteriorated, the dispersion state of the slurry used for polishing becomes non-uniform, and the polishing rate becomes unstable. Further, since a polishing residue or the like generated by the polishing process remains and aggregates are formed, scratches or the like are formed on the surface of the object to be polished, and haze deteriorates. Further, in the operation of rinsing and cleaning the liquid property on the polishing pad after the polishing process (rinsing step), the discharge property of the cleaning liquid is also deteriorated due to the shape of the groove. Washing is inhibited. Therefore, when the polishing process is performed next, the portion where neutralization or cleaning is inhibited is transferred to the object to be polished, and the flatness is impaired.

  An object of the present invention is to provide a polishing pad that can improve the discharge of slurry and improve the flatness of an object to be polished.

In order to solve the above-mentioned problem, in the polishing pad provided with a resin sheet material having a polishing surface for polishing by rotating relative to the processing surface of the object to be polished, A plurality of grooves are formed from the center portion to the outer edge, and each of the plurality of grooves is directed rearward from a tangent at the starting point of the center portion with respect to the rotation direction of the polishing surface, and each of the plurality of grooves. A cross-sectional area in a direction intersecting with a tangential direction at any point of is enlarged on the outer edge side from the center part side, and each groove and a concentric circle centering on the center part at an arbitrary point of the groove; There are have a point of inflection angle larger than the angle of forming the groove of the outer edge side than the inflection point, with respect to the rotational direction, the variations of the central portion of the groove than the inflection point Behind the tangent at the point Characterized in that it is formed as buy.

In the present invention, as each of the plurality of grooves is directed toward the outer edge, the tangential direction at each arbitrary point of the plurality of grooves is directed rearward from the tangent at the starting point of the central portion with respect to the rotation direction of the polishing surface. with the cross-sectional area in a direction crossing it is formed to expand and have a point of inflection of each groove and an angle greater than the angle of concentric circle and form around the center at any point of the groove The groove on the outer edge side from the inflection point is formed so as to be directed rearward from the tangent at the inflection point of the groove on the center side from the inflection point with respect to the rotation direction. Slurry moves through the groove in the outer edge direction and backward in the rotational direction without countering the working centrifugal force and inertia, improving the slurry discharge and making the dispersion state of the slurry uniform in the processing surface. Of the workpiece It can be improved Tansei.

In the present invention, each of the plurality of grooves is formed from the central portion without forming an inflection point having the same and smaller angle as the angle formed by the groove and a concentric circle centered on the central portion at an arbitrary point of the groove. It is preferable that it is formed so as to go to the outer edge. Each of the plurality of grooves may be widened in the range of 200 μm to 3000 μm. The plurality of grooves may be gradually deepened in a range of 10% to 80% with respect to the thickness of the sheet material .

According to the present invention, as each of the plurality of grooves is directed toward the outer edge, the tangent at the arbitrary point of each of the plurality of grooves is directed rearward from the tangent at the starting point of the central portion with respect to the rotation direction of the polishing surface. The cross-sectional area in the direction intersecting the direction is enlarged and has an inflection point with an angle larger than the angle formed by each groove and a concentric circle centered at the center at an arbitrary point of the groove. The groove on the outer edge side from the inflection point is formed so as to be directed rearward from the tangent at the inflection point of the groove on the center side from the inflection point with respect to the rotation direction. Slurry moves through the groove in the outer edge direction and backward in the rotation direction without countering the centrifugal force and inertia acting by rotation, improving the slurry discharge performance and making the slurry dispersed in the processing surface uniform. For polishing It is possible to improve the flatness, it is possible to obtain an effect that.

It is sectional drawing which shows typically the polishing pad of embodiment to which this invention is applied. It is a top view which shows typically the groove | channel formation pattern of the polishing pad of embodiment. It is a top view which shows typically the groove | channel formation pattern of the polishing pad of another form which can apply this invention. It is explanatory drawing which shows typically the groove | channel in which the inflection point of the polishing pad was formed. It is a top view which shows typically the groove | channel formation pattern of the conventional polishing pad, (A) is the pattern in which the groove | channel was formed radially, (B) is the pattern formed in left-right symmetry with the groove formation pattern of FIG. Each is shown.

  Hereinafter, embodiments of a polishing pad to which the present invention is applied will be described with reference to the drawings.

(Polishing pad)
As shown in FIG. 1, the polishing pad 10 of the present embodiment includes a urethane sheet 2 as a sheet material formed of urethane resin. The urethane sheet 2 has a substantially flat polished surface P.

  The urethane sheet 2 is formed into a sheet shape with a urethane resin by a wet film forming method. The urethane sheet 2 is buffed so as to have a uniform thickness on the side of the skin layer (surface layer on which dense micropores are formed) formed during wet film formation. The urethane sheet 2 is formed with cells 3 having a triangular cross section rounded in the thickness direction. The cell 3 is formed so that the hole diameter on the polishing surface P side is smaller than the surface side opposite to the polishing surface P. That is, the cell 3 is reduced in diameter on the polishing surface P side. In the urethane sheet 2, the skin layer is removed by buffing, and the opening 5 is formed in the polishing surface P by opening the cell 3. In the urethane resin between the cells 3, small pores (not shown) having a pore diameter smaller than that of the cells 3 are formed. The cells 3 and the small pores (not shown) of the urethane sheet 2 are communicated in a mesh pattern with communication holes (not shown). That is, the urethane sheet 2 has a continuous cell structure. The urethane sheet 2 has a plurality of grooves 4 on the polishing surface P side.

  As shown in FIG. 2, the groove 4 is formed from the center of the polishing surface P to the outer edge. The groove 4 is formed in a continuous curved shape having no inflection point. That is, the groove 4 is formed in a smooth curved line whose direction does not change along the way from the center to the outer edge. Further, the groove 4 is rearward from the tangent (line indicated by a broken line in FIG. 2) at the starting point of the groove 4 (center portion of the polishing surface P) with respect to the rotation direction of the polishing surface P (direction of arrow ω), It is formed so as to go in the direction opposite to the rotation direction. The cross-sectional area in the direction intersecting the tangential direction at an arbitrary point of the groove 4 is formed to expand toward the outer edge. The cross-sectional shape of the groove 4 is formed in a rectangular shape. At this time, the width of the groove 4 can be increased in the range of 200 to 3000 μm. If the width of the groove 4 is less than 200 μm, the slurry cannot move smoothly in the groove 4, and the slurry discharge performance is not sufficiently exhibited. If the width of the groove 4 exceeds 3000 μm, the width of the groove 4 formed on the polishing surface P is large, so that the shape of the groove 4 is transferred to the object to be polished by the pressure applied to the polishing process, and Flatness will deteriorate. Further, the depth of the groove 4 can be gradually increased in the range of 10 to 80% with respect to the thickness of the urethane sheet 2. If the depth of the groove 4 is less than 10%, the polishing surface P is worn down to the bottom surface of the groove 4 in a short time during the polishing process, so that the movement of the slurry is hindered and the discharge performance is deteriorated. When the depth of the groove 4 exceeds 80%, the thickness of the urethane sheet 2 becomes extremely thin at the bottom portion of the groove 4, and when the laminating process (described later in detail) and the polishing pad 10 is applied to the polishing surface plate, There is a risk that wrinkles or the like may occur in the grooves 4. When polishing is performed with a polishing pad having wrinkles or the like, the flatness of the object to be polished is impaired.

  The polishing pad 10 has a double-sided tape 6 attached to the surface opposite to the polishing surface P of the urethane sheet 2 for attaching the polishing pad 10 to a polishing machine. The double-sided tape 6 has a base material (not shown) of a flexible film such as a film made of polyethylene terephthalate (hereinafter abbreviated as PET), and an acrylic adhesive or the like is provided on both sides of the base material. An adhesive layer is formed. The double-sided tape 6 is bonded to the urethane sheet 2 with an adhesive layer on one side of the substrate, and the adhesive layer on the other side is covered with a release paper 7.

(Manufacturing)
The polishing pad 10 is a preparation step for preparing a resin solution in which a urethane resin is dissolved, a coagulation regeneration step in which the polyurethane resin is solidified and regenerated into a sheet form in an aqueous coagulation liquid by continuously applying the resin solution to the film-forming substrate, Cleaning / drying process for cleaning and drying the solidified and regenerated urethane resin, buffing process for making the thickness uniform by buffing, groove processing process for forming the groove 4, and double-sided tape for mounting the urethane sheet 2 on the polishing surface plate Manufactured through a laminating process of attaching 6. Hereinafter, it demonstrates in order of a process.

  In the preparation step, a urethane resin, N, N-dimethylformamide (hereinafter abbreviated as DMF), which is a water-miscible organic solvent capable of dissolving the urethane resin, and an additive are mixed to dissolve the urethane resin. For the urethane resin, a polyester resin, a polyether resin, a polycarbonate resin, or the like is selected and used. For example, the urethane resin is dissolved in DMF so as to be 30% by weight. Additives include pigments such as carbon black, hydrophilic activators that promote cell formation, and hydrophobic activators that stabilize the coagulation and regeneration of urethane resins in order to control the size and quantity (number) of the cells 3. Can be used. The resulting solution is degassed under reduced pressure to obtain a urethane resin solution.

  In the application step, the urethane resin solution prepared in the preparation step is applied almost uniformly to the belt-shaped film forming substrate at a normal temperature by an application device such as a knife coater. At this time, the application thickness (application amount) of the urethane resin solution is adjusted by adjusting the gap between the knife coater and the film forming substrate. A flexible film, a nonwoven fabric, a woven fabric, etc. can be used for the film-forming substrate. When using a nonwoven fabric or a woven fabric, in order to suppress the penetration of the urethane resin solution into the film-forming substrate during application of the urethane resin solution, it is preliminarily immersed in water or a DMF aqueous solution (mixed solution of DMF and water). Preprocessing (sealing) is performed. In the case where a flexible film made of PET or the like is used as the film forming substrate, pretreatment is not necessary because it does not have liquid permeability. Hereinafter, in this example, the film forming substrate is described as a PET film.

  In the coagulation regeneration process, the film-forming substrate coated with the urethane resin solution in the coating process is guided to a coagulation liquid (water-based coagulation liquid) whose main component is water which is a poor solvent for the urethane resin. In the coagulation liquid, first, a skin layer having a thickness of about several μm is formed on the surface side of the applied urethane resin solution. Thereafter, the polyurethane resin coagulates and regenerates in a sheet form on one side of the film forming substrate by the progress of substitution between the DMF in the urethane resin solution and the coagulating liquid. When DMF removes the solvent from the urethane resin solution and DMF and the coagulating liquid are replaced, cells 3 and small pores (not shown) are formed inside the skin layer (in the urethane resin). A communication hole (not shown) communicating in a mesh shape is formed. At this time, since the PET film of the film formation substrate does not allow water to permeate, desolvation occurs on the surface side (skin layer side) of the urethane resin solution, and cells 3 having a larger film formation substrate side than the surface side are formed. .

  In the cleaning / drying process, the sheet-like urethane resin coagulated and regenerated in the coagulation / regeneration process (hereinafter referred to as film-forming resin) is peeled off from the film-forming substrate, washed in a cleaning solution such as water and washed into the film-forming resin. Residual DMF is removed. After cleaning, the film forming resin is dried with a cylinder dryer. The cylinder dryer includes a cylinder having a heat source therein. The film-forming resin is dried by passing along the peripheral surface of the cylinder. The film-forming resin after drying is wound up in a roll shape.

  In the buffing process, buffing is performed on the skin layer side formed on the surface of the film-forming resin. That is, the substantially flat surface of the pressure welding jig is pressed against the surface opposite to the skin layer of the film forming resin, and the buff treatment is performed on the skin layer side. Thereby, some of the cells 3 are opened in the polishing surface P to form the openings 5, and the thickness of the film forming resin is made uniform.

  In the groove processing step, the groove 4 is formed in the film-forming resin after the buffing process. That is, when the groove 4 is formed, a three-dimensional router is used in this example. The three-dimensional router has a groove forming drill. The drill is pivotally supported so as to be orthogonal to the film forming resin placed on a horizontal table from above. In this three-dimensional router, the drill is movable in the horizontal direction according to a preset groove forming pattern, and the drill itself is also movable in the vertical direction. Grooves are formed by contacting the film-forming resin while rotating the drill and moving it horizontally. Further, the depth of the groove can be changed by moving up and down in the vertical direction in accordance with the movement in the horizontal direction. The width of the groove can be adjusted by the diameter of the drill. When the width of the groove 4 is increased from the starting point of the central portion toward the outer periphery as in this example, it can be realized by forming the groove a plurality of times. That is, the groove formation for the first time may be started from the same starting point and shifted from the first groove toward the outer periphery. By using a three-dimensional router, the groove 4 is formed in the film-forming resin, and the urethane sheet 2 is obtained.

  In the laminating process, one surface of the double-sided tape 6 is bonded to the surface opposite to the polishing surface P of the obtained urethane sheet 2. The other side of the double-sided tape 6 is covered with a release paper 7. The polishing pad 10 is completed by performing an inspection such as confirming that there is no adhesion of dirt or foreign matter.

  When polishing the object to be polished with the obtained polishing pad 10, for example, the polishing pad 10 is attached to the upper surface plate of the single-side polishing machine via the double-sided tape 6, and the holding pad is attached to the lower surface plate. To do. In the single-side polishing machine, the surface (processed surface) that contacts the polishing pad 10 of the object to be polished is polished between the polishing pad 10 attached to the upper surface plate and the holding pad attached to the lower surface plate. . The surface to which the polishing pad 10 and the holding pad of the single-side polishing machine are attached, that is, the lower surface of the upper surface plate and the upper surface of the lower surface plate are both formed flat. For this reason, in the polishing pad 10 and the holding pad adhered to the upper surface plate and the lower surface plate, the surface of the object to be polished becomes flat. The object to be polished is polished by rotating at least one of the upper surface plate and the lower surface plate while applying pressure.

(Function)
Next, the operation and the like of the polishing pad 10 of this embodiment will be described.

  Conventionally, in a polishing pad equipped with a urethane sheet formed from a urethane resin, the slurry that is supplied during polishing is used for polishing, and then the slurry remains unevenly between the object to be polished and the polishing pad. There is. The polishing performance of the slurry used for polishing may be remarkably deteriorated. If such a slurry is unevenly distributed during polishing, the polishing rate becomes unstable. In addition, due to abrasive grains and polishing debris remaining together with the slurry, scratches, haze, etc. are generated on the object to be polished, and the flatness is deteriorated. If polishing abrasive grains and the like remain on the polishing pad after the polishing process, the polishing abrasive grains inhibit neutralization and cleaning in the rinsing step of neutralizing and cleaning the liquid properties on the polishing pad. Sometimes. For this reason, there exists a possibility that the flatness of a polishing pad may be impaired. The present embodiment is a polishing pad that can solve these problems.

  In the polishing pad 10 of the present embodiment, as the groove 4 moves from the center portion of the polishing surface P toward the outer edge, it is behind the tangent at the starting point of the groove 4 (center portion of the polishing surface P) with respect to the rotation direction of the polishing surface P. It is formed to face. Further, the groove 4 is formed such that a cross-sectional area in a direction intersecting the tangential direction at an arbitrary point is enlarged on the outer edge side from the center side. For this reason, the slurry can move in the groove 4 without countering the centrifugal force or inertia that is caused by the rotation of the polishing surface. Since the slurry can smoothly move through the groove 4 in the outer edge direction and rearward in the rotational direction, the slurry discharge performance is improved. Polishing pad wear debris and polishing debris generated during the polishing process are quickly removed from the polishing pad together with the slurry, so that scratches on the object can be suppressed and the flatness of the object can be reduced. Can be improved.

  Further, in the polishing pad 10 of the present embodiment, all the grooves 4 are formed on a continuous curve from the center of the polishing surface P to the outer edge without having an inflection point. That is, the groove 4 is formed in a smooth curved shape whose direction does not change in the middle so that the groove 4 is directed from the center to the outer edge. For this reason, the slurry can always move smoothly to the outer edge side without countering the centrifugal force and inertia acting by the rotation of the workpiece and the polishing surface P. The discharge property of the slurry is improved, and the slurry used for polishing can be prevented from remaining unevenly on the object to be polished. Therefore, since the dispersed state of the slurry is made uniform, polishing can be performed at a stable polishing rate.

  Further, in the polishing pad 10 of the present embodiment, the cross-sectional area in the direction intersecting the tangential direction at an arbitrary point of the groove 4 is enlarged from the center side to the outer edge side. That is, the width or depth of the groove 4 is increased or gradually increased as it goes toward the outer edge. Usually, since the slurry moves from the central portion toward the outer edge due to centrifugal force and inertia acting in the polishing process, the polishing ability is considered to be higher on the center portion side of the object to be polished than on the outer edge side. In order to make the degree of polishing of the object to be polished uniform, it is necessary to bring a large amount of slurry into contact with the outer edge side and improve the polishing ability on the outer edge side. For this reason, a large amount of slurry can be present on the outer edge side through the groove 4, and the polishing ability can be uniformly exhibited in the polishing surface, so that the object to be polished can be flattened.

  In the present embodiment, an example in which the urethane sheet 2 is formed by a wet film forming method has been described. However, the present invention is not limited to this, and the urethane sheet may be formed by a dry molding method. In the dry molding method, a mixed liquid is prepared by mixing an isocyanate group-containing compound and an active hydrogen compound having an active hydrogen group that reacts with a terminal isocyanate group of the isocyanate group-containing compound. The isocyanate group-containing compound can be produced by reacting a polyol compound having two or more hydroxyl groups in the molecule with a diisocyanate compound having a diisocyanate group having two isocyanate groups in the molecule. The obtained mixed solution is poured into a mold, and the isocyanate group-containing compound and the active hydrogen compound are reacted and cured in the mold to form a block-shaped polyurethane molded body. The polyurethane molded body is sliced into a sheet to form a urethane sheet. Further, instead of slicing the block-like urethane molded body, it is possible to mold urethane sheets having a desired thickness one by one by changing the form size.

  Further, in this embodiment, instead of the urethane sheet 2, it can be applied to an impregnation type polishing cloth in which a nonwoven fabric is impregnated with a urethane resin. Moreover, in this embodiment, although the example provided with the urethane sheet 2 made from a urethane resin was shown, this invention is not limited to this. For example, a sheet material using a resin such as polyethylene can be used instead of the urethane resin. Furthermore, in this embodiment, although the example which affixes the double-sided tape 6 on the urethane sheet 2 was shown, this invention is not limited to this. For example, a PET base material or the like may be further laminated between the urethane sheet 2 and the double-sided tape 6. Further, in the present embodiment, an example in which the film forming resin is subjected to the groove processing and then the lamination processing is shown, but the present invention is not limited to this. For example, after attaching a double-sided tape etc., you may give a groove process. If it does in this way, it can prevent that a part of slot is lost by press etc. at the time of lamination processing.

  Furthermore, in this embodiment, an example in which a three-dimensional router is used for groove formation has been shown. However, the present invention is not limited to this, and any apparatus and method can be used as long as a groove on a curve can be formed. May be. Further, for example, in the case of molding urethane sheets one by one by a dry molding method, a groove is formed at the time of molding the urethane sheet by previously forming a protrusion matching the groove pattern on the inner bottom surface of the mold. It is also possible.

  Furthermore, in the present embodiment, an example in which the buffing process is performed on the polishing surface P side of the urethane sheet 2 is shown, but the present invention is not limited to this, and the buffing process is performed on the surface opposite to the polishing surface P. It may be applied to make the thickness uniform. Further, the buffing process is not necessarily performed. In consideration of moving the slurry uniformly during the polishing process, it is preferable to buff the polishing surface P side to form the opening 5.

  Furthermore, in this embodiment, if the cross-sectional area that intersects the tangential direction at an arbitrary point of the groove 4 is formed to expand from the center side on the outer edge side, at least one of the width and depth of the groove 4 is widened and It may be formed by gradually deepening. That is, only the width of the groove 4 may be widened, or only the depth may be gradually increased. Each of the plurality of grooves 4 does not necessarily have the same width and depth, and may be different. Further, the cross-sectional shape intersecting the tangential direction at an arbitrary point of the groove 4 is not limited, and may be any shape such as a semicircular shape or a V shape.

  Further, in the present embodiment, an example is shown in which the groove 4 is formed in a continuous curved shape having no inflection point, but the present invention is not limited to this. For example, as shown in FIG. 4, the groove 24 may have an inflection point S having an angle t <b> 2 larger than an angle t <b> 1 formed by a concentric circle centered on the center portion O at an arbitrary point of the groove 24. Further, as shown in FIG. 3, the groove 4 may have an inflection point S having the same size as the angle t1. That is, the groove 4b, which is a part of the groove 4, may be formed concentrically, and the grooves 4a and 4c may be formed in a curved shape that extends backward from the rotation direction of the polishing surface. It is only necessary to form grooves that allow the slurry to move smoothly in the direction of the outer edge and rearward in the rotational direction without resisting centrifugal force and inertia during the polishing process. If the groove has an inflection point having an angle smaller than the angle t1, the groove is formed so as to be directed toward the center, so that the slurry is prevented from moving during the polishing process, and the discharge performance is deteriorated. Therefore, it is not preferable. Considering that the groove processing is easily performed at the time of forming the groove 4, it is preferable that the groove 4 is formed in a continuous curved shape having no inflection point (see FIG. 2).

  Furthermore, in this embodiment, although the example which uses the polishing pad 10 for the grinding | polishing process by single-sided grinding | polishing was shown, in this invention, it is not limited to this. That is, it is possible to handle both single-side polishing and double-side polishing, and polishing processing can be performed by rotating either one or both of the polishing pad 10 and the object to be polished. That is, it is only necessary that the object to be polished and the polishing pad 10 rotate relatively.

  Next, examples of the polishing pad 10 manufactured according to the present embodiment will be described. A comparative polishing pad manufactured for comparison is also shown. In the present embodiment, the circular polishing pad has been described. However, in the examples and comparative examples, a donut-shaped polishing pad is used in accordance with the polishing machine for evaluation.

Example 1
In Example 1, polyester MDI (diphenylmethane diisocyanate) urethane resin was used as the urethane resin. To 100 parts of a solution obtained by dissolving 30% by weight of this urethane resin in DMF, 45 parts of DMF as a solvent and 40 parts of DMF dispersion containing 30% of carbon black as a pigment are added and mixed to obtain a urethane resin solution. Was prepared. The obtained urethane resin solution was applied to a film forming substrate, coagulated and regenerated in a coagulating liquid, washed and dried to obtain a film forming resin having a thickness of 1.0 mm. The obtained film forming resin was buffed on the polishing surface P side so as to have a thickness of 0.8 mm. A PET base material having a thickness of 188 μm was attached to the surface opposite to the polishing surface P of the film-forming resin after buffing, and a double-sided tape 6 was attached to the surface of the PET base material opposite to the film-forming resin. Then, the groove | channel was formed in the grinding | polishing surface P side and the urethane sheet 2 was obtained. At this time, the width of the groove was widened in the range of 1 mm to 3 mm from the center to the outer edge, and the depth was gradually increased from the surface of the urethane sheet 2 in the range of 0.1 mm to 0.7 mm. After the grooving, the polishing pad 10 of Example 1 was manufactured by punching into a donut shape having an outer diameter of 640 mm and an inner diameter of 230 mm.

(Comparative Example 1)
In Comparative Example 1, as shown in FIG. 5A, except that a plurality of grooves 14 having a groove width of 2 mm and a depth of 0.4 mm were formed in a straight line from the center of the polishing surface toward the outer edge. A donut-shaped polishing pad 20 of Comparative Example 1 was produced in the same manner as Example 1. That is, Comparative Example 1 is a conventional polishing pad 20 in which the grooves 14 are not formed so as to be directed rearward in the rotation direction of the polishing surface.

(Comparative Example 2)
In Comparative Example 2, as shown in FIG. 5 (B), the shape is a curve from the center of the polishing surface to the outer edge, and forward from the tangent at the groove start point with respect to the rotation direction of the polishing surface, and the groove width is 2 mm. A donut-shaped polishing pad 20 of Comparative Example 2 was manufactured by forming a plurality of constant grooves 14 at a depth of 0.4 mm. That is, Comparative Example 1 is a polishing pad 20 in which the grooves 14 are formed symmetrically with the groove formation pattern of Example 1.

(Polishing evaluation)
Next, using the polishing pads of Example 1, Comparative Example 1 and Comparative Example 2, the aluminum substrate was polished under the following polishing conditions, and the polishing performance and the waviness Wa were measured to evaluate the polishing performance. The polishing rate is one of the numerical values indicating the polishing efficiency, and represents the polishing amount per minute by the thickness. The weight reduction of the aluminum substrate before and after the polishing process was measured and calculated by calculation from the polished area and specific gravity of the aluminum substrate. The waviness Wa is one of the measurement items for evaluating the surface accuracy (flatness) of an object to be polished, and expresses minute irregularities with a period of 80 to 500 μm in units of angstroms (Å). For the measurement of waviness Wa, NEW VIEW5000 manufactured by Zygo was used. The appearance of the polished aluminum substrate was visually evaluated for the presence or absence of scratches on the surface. Table 1 below shows the evaluation results of the polishing rate, waviness Wa and scratches.
(Polishing conditions)
Polishing machine used: Speedfam, 9B-5P polishing machine Polishing speed (rotation speed): 30 rpm
Processing pressure: 90 g / cm ²
Slurry: Alumina slurry (average particle size: 0.8 μm)
Slurry supply amount: 100cc / min
Object to be polished: 95mmφ hard disk aluminum substrate

  As shown in Table 1, the polishing rate of the polishing pad 20 of Comparative Example 1 in which the grooves 14 were linearly formed was 0.402 μm. In the polishing pad 20 of Comparative Example 2 in which the grooves 14 were formed symmetrically with the groove formation pattern of Example 1, it was 0.443 μm. On the other hand, in the polishing pad 10 of Example 1 in which the groove 4 was directed rearward in the rotational direction of the polishing surface P and the width and depth of the groove were increased and gradually increased, the width was 0.480 μm. This is because, in the polishing pad 20 of Comparative Example 1 and Comparative Example 2, the groove 14 hinders the flow of slurry, whereas in the polishing pad 10 of Example 1, the groove 4 does not oppose the flow of slurry. This is thought to be because of the formation of It was found that when the polishing pad 10 of Example 1 was used, polishing could be performed at a stable polishing rate.

  Further, in the polishing pad of Comparative Example 1, the waviness Wa was 3.65 mm. In the polishing pad of Comparative Example 2, it was 3.48 mm. In contrast, the polishing pad 10 of Example 1 showed the smallest value at 3.20 mm. This is because, in the polishing pad 20 of Comparative Example 1 and Comparative Example 2, the groove 14 hinders the flow of the slurry and friction is generated between the slurry and the groove 14, whereas in the polishing pad 10 of Example 1, This is considered to be because the grooves 4 were formed so as not to oppose the flow of the slurry, and the slurry was able to move smoothly through the grooves 4. Further, in the polishing process using the polishing pads of Comparative Example 1 and Comparative Example 2, both of the scratches were observed on the surface of the aluminum substrate, but no scratch was observed in the polishing pad of Example 1. This is because the groove 14 of the polishing pad of Comparative Example 1 and Comparative Example 2 hinders the flow of slurry, whereas the polishing pad 10 of Example 1 is formed so that the groove 4 does not oppose the flow of slurry, This is considered to be because the discharge of the slurry was improved and the scratches caused by the abrasive grains could be suppressed. Therefore, it was found that the polishing pad of Example 1 can improve the flatness of the object to be polished.

  Since the present invention provides a polishing pad that can improve the discharge of the slurry and improve the flatness of the object to be polished, it contributes to the manufacture and sale of the polishing pad. Have

P Polished surface 2 Urethane sheet (sheet material)
4 Groove 10 Polishing pad

Claims (4)

In a polishing pad comprising a resin sheet material having a polishing surface for polishing by rotating relative to the processing surface of an object to be polished, a plurality of grooves are formed on the polishing surface side from the center to the outer edge Each of the plurality of grooves is directed rearward from a tangent at a starting point of the central portion with respect to a rotation direction of the polishing surface, and a tangential direction at each arbitrary point of the plurality of grooves. The cross-sectional area in the intersecting direction is larger on the outer edge side than on the central side, and the angle is larger than the angle formed by each groove and a concentric circle centering on the central part at an arbitrary point of the groove. and have a point of inflection, the groove of the outer edge side than the inflection point, with respect to the rotational direction, towards the rear of the tangent at the inflection point of the groove of the center side from the inflection point It is formed so as to Polishing pad, wherein the door.   Each of the plurality of grooves may form the center portion without forming an inflection point having the same and smaller angle as the angle formed by the groove and a concentric circle centered on the center portion at an arbitrary point of the groove. The polishing pad according to claim 1, wherein the polishing pad is formed so as to extend from the outer edge to the outer edge.   3. The polishing pad according to claim 2, wherein each of the plurality of grooves is widened in a range of 200 μm to 3000 μm.   4. The polishing pad according to claim 2, wherein the depth of each of the plurality of grooves is gradually increased in a range of 10% to 80% with respect to the thickness of the sheet material. 5.

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