JP5542275B2 - Inspection apparatus, inspection method, and battery manufacturing method - Google Patents

Description

  The present invention relates to an inspection apparatus, an inspection method, and a battery manufacturing method, and more particularly to a technique for detecting impurities and defects by transmitting X-rays to a strip-shaped object to be measured.

  In the manufacturing process of a battery such as a lithium ion secondary battery, impurities may adhere to the electrode sheet, which is a battery component, or a defect may occur. In such a case, since it causes the quality defect of a battery, conventionally, the technique which detects an impurity and a defect by irradiating an X-ray to an electrode sheet is proposed (for example, refer to patent documents 1).

  Moreover, when inspecting using X-rays, it is necessary to prevent the X-rays from leaking out from the X-ray inspection apparatus and affecting the operator. For this reason, an X-ray inspection apparatus is used in which curtain members made of lead rubber or the like are installed as X-ray shielding members at the entrance and exit of the subject in the X-ray inspection apparatus so that X-rays do not leak out of the apparatus. (For example, refer to Patent Document 2).

JP 2006-179424 A JP 2006-58234 A

  However, the technique described in Patent Document 1 does not disclose a configuration for preventing X-ray leakage. For this reason, when manufacturing a battery using the said technique, it is necessary to provide the structure for shielding X-rays, and to test | inspect in it, and an apparatus structure becomes large.

  On the other hand, if it is going to apply the technique of the said patent document 2 to the manufacturing process of a battery, an X-ray shielding member will contact the electrode sheet conveyed, and the cause of peeling of the surface property of an electrode sheet, a wrinkle, and a stripe It becomes. In addition, since the electrode sheet is a continuous long sheet, the entrance and exit of the electrode sheet in the X-ray inspection apparatus can be opened and closed, and it is impossible to shield X-rays by repeating the opening and closing operation of the entrance and exit. It is. As described above, the impurity inspection of the electrode sheet by the X-ray inspection apparatus has a problem in practical use.

  Therefore, the present invention provides an inspection apparatus, an inspection method, and a battery manufacturing that can detect the impurities and defects of the electrode sheet in a non-contact manner by reducing the apparatus configuration while preventing X-ray leakage. A method is provided.

  The problem to be solved by the present invention is as described above. Next, means for solving the problem will be described.

That is, in claim 1, it is formed as a hollow casing that shields X-rays, and an opening is formed in the middle of at least two opposing side surfaces, and a band-like shape is formed inside the opening through the opening. X-rays are measured with respect to an object to be measured that is inserted into one side of the inspection apparatus main body and the inspection apparatus main body that is divided into two by the opening, and is inserted through the opening. irradiating an X-ray generator is housed in the other side of the interior of the inspection apparatus main body, for detecting the X-rays which the X-ray generator is transmitted through the object to be measured by irradiating a detector, wherein A plate-like shape that is disposed on the X-ray generator side of the opening so as to close a portion closer to the X-ray generator than the opening, and can shield X-rays emitted from the X-ray generator. On the detector side of the first shielding member and the opening. A plate-shaped second shielding member that is disposed so as to block a portion closer to the detector than the opening, and that can shield the X-rays emitted from the X-ray generator, The one shielding member and the second shielding member are arranged in a state where there is a gap that does not contact the object to be measured conveyed between the first shielding member and the second shielding member. Has an X-ray passage hole that can transmit X-rays emitted from the X-ray generator, and is continuously conveyed between the first shielding member and the second shielding member , The X-ray generator emits X-rays to the object to be measured inserted through the opening, and the detector detects X-rays transmitted through the object to be measured. Quality inspection is performed.

  According to a second aspect of the present invention, the shielding member has a plate shape and is configured in a multilayer composite structure in which materials whose masses are increased in order from opposite sides are arranged.

  According to a third aspect of the present invention, the shielding member extends from the opening to the outside of the inspection apparatus main body.

  In Claim 4, the said opening part is continuously formed in the middle part in the three side surfaces of the said inspection apparatus main body, and while the said inspection apparatus main body is mounted above a base part, the said opening part The base portion is configured to be slidable in a direction orthogonal to two opposing sides of the side surfaces on which the is formed.

  In claim 5, the X-ray generator and the detector are configured to be variable in position inside the inspection apparatus body, and the size of the X-ray passage hole opened in the shielding member is: It is configured to be adjustable according to the distance from the X-ray generator to the object to be measured.

According to a sixth aspect of the present invention, a hollow casing that shields X-rays is formed, and an opening is formed in the middle of at least two opposing side surfaces, and a strip-shaped covering is formed through the opening. X-rays are irradiated to the object to be measured, which is housed in one side of the inspection apparatus body into which the measurement object is inserted and the inspection apparatus body divided into two by the opening, and is inserted through the opening An X-ray generator; a detector that is housed on the other side of the inspection apparatus main body and that detects X-rays irradiated by the X-ray generator and transmitted through the object to be measured; and the opening In the X-ray generator side, the plate-like second plate is disposed so as to block the X-ray generator side portion from the opening, and can shield the X-rays emitted from the X-ray generator. One shielding member and on the side of the detector in the opening, A plate-shaped second shielding member that is disposed so as to close a portion closer to the detector than the opening, and that can shield the X-rays irradiated from the X-ray generator, and the first shielding The member and the second shielding member are arranged in a state where there is a gap so that the object to be measured conveyed between them is not in contact, and each of the first shielding member and the second shielding member includes An inspection method for inspecting the quality of the object to be measured in an inspection apparatus in which an X-ray passage hole capable of transmitting X-rays irradiated from the X-ray generator is opened, wherein the first shielding member and the first The X-ray generator irradiates the object to be measured that is continuously conveyed between the two shielding members and is inserted through the opening of the inspection apparatus body, and passes through the object to be measured. When the X-ray is detected by the detector, a quality inspection of the object to be measured is performed. Than is.

  According to a seventh aspect of the present invention, the shielding member has a plate shape and is configured in a multilayer composite structure in which materials whose masses are increased in order from the sides facing each other are arranged.

  According to an eighth aspect of the present invention, the shielding member extends from the opening to the outside of the inspection apparatus main body.

  In Claim 9, The said opening part is continuously formed in the middle part in the three side surfaces of the said inspection apparatus main body, and while the said inspection apparatus main body is mounted above a base part, the said opening part The base portion is configured to be slidable in a direction orthogonal to two opposing sides of the side surfaces on which the is formed.

  In claim 10, the X-ray generator and the detector are configured to be variably positioned within the inspection apparatus body, and the size of the X-ray passage hole opened in the shielding member is: It is configured to be adjustable according to the distance from the X-ray generator to the object to be measured.

  In Claim 11, the said to-be-measured object is an electrode sheet of a battery, The inspection process of performing the quality inspection of the said electrode sheet using the inspection method of any one of Claim 6-10. Is provided.

  As effects of the present invention, the following effects can be obtained.

  According to the present invention, in an inspection apparatus, inspection method, and battery manufacturing method using X-rays, the apparatus configuration is made compact while preventing leakage of X-rays, and impurities and defects in the electrode sheet are detected in a non-contact manner. It becomes possible to do.

(A), (b) is the front view and right view of an inspection apparatus which concern on 1st embodiment, respectively. AA line sectional view in Drawing 1 (b). (A) is the top view which showed the shielding board of the inspection apparatus which concerns on 1st embodiment, (b) is the BB line expanded sectional view in (a). (A), (b), (c) is the figure which showed the relationship between arrangement | positioning of a shielding board, the internal diameter of a X-ray passage hole, the extension length of a shielding board, and X-ray leakage amount, respectively. (A) is the figure which showed the relationship between the space | interval of a shielding board, and the amount of X-ray leaks, (b1) is the figure which showed the state which a scattered X ray advances when the space | interval of a shielding board is wide, (b2) is shielding The figure which showed the state which a scattered X ray advances when the space | interval of a board is narrow. (A) is the top view which showed the shielding board of the inspection apparatus which concerns on 2nd embodiment, (b), (c) is the figure which showed the internal structure of the inspection apparatus main body in the inspection apparatus which concerns on 2nd embodiment, respectively.

Next, embodiments of the invention will be described.
It should be noted that the technical scope of the present invention is not limited to the following examples, but broadly covers the entire scope of the technical idea that the present invention truly intends, as will be apparent from the matters described in the present specification and drawings. It extends.

[First embodiment]
First, the inspection apparatus 10 according to the first embodiment of the present invention will be described with reference to FIGS. 1 to 5. In this specification, for convenience of explanation, as indicated by arrows in FIG. 1A, the upper side is the upper side, the lower side is the lower side, and the right side is the right side and the left side is the left side. In addition, the front side of the page in FIG. 1A is the front side, and the depth side of the page is the back side. That is, FIG. 1B is a right side view of the inspection apparatus 10.

  The inspection apparatus 10 according to the present embodiment is used in a manufacturing process of a battery such as a lithium ion secondary battery. Specifically, by irradiating the belt-shaped electrode sheet S, which is a battery component, with X-rays, impurities and defects present in the electrode sheet S are detected, and battery quality defects are prevented. That is, the electrode sheet S is a measurement object in the present embodiment.

  As shown in FIGS. 1A and 1B, the inspection apparatus 10 according to the present embodiment includes an inspection apparatus main body 11, a base 12 on which the inspection apparatus main body 11 is placed, and the inside of the inspection apparatus main body 11. An X-ray generator 15 and a detector 17 housed in a first shielding plate 21 and a second shielding plate 31 which are shielding members disposed in an opening 11a formed in the inspection apparatus main body 11. .

The inspection apparatus body 11 is formed as a hollow casing using a material (for example, a lead composite plate) that shields X-rays. In the present embodiment, the inspection apparatus main body 11 is configured in a rectangular parallelepiped shape with the longitudinal direction directed in the vertical direction.
Further, an opening portion 11 a that is continuous in the horizontal direction is formed in a slit shape from the front surface to the left and right side surfaces at a substantially midway portion in the vertical direction of the inspection apparatus main body 11. In other words, the opening 11a is formed continuously (substantially U-shaped in a plan view) at the front and right and left side surfaces of the inspection apparatus body 11 in the vertical direction.

  As shown by the arrow f in FIG. 1A, the electrode sheet S is inserted into the inspection apparatus main body 11 through the opening 11a. That is, the opening 11a may be configured such that a part of the electrode sheet S in the conveying direction can be inserted into the inspection apparatus main body 11, and is formed in the middle of at least two opposing side surfaces (for example, the left and right side surfaces). It is also possible to adopt a configuration.

  The electrode sheet S which is a measurement object in the present embodiment is a positive electrode plate which is a component of a lithium ion secondary battery. Specifically, the electrode sheet S is a long strip-shaped thin film component formed by applying a mixture containing a positive electrode active material to a part of the surface of an electron conductive current collector foil (for example, a metal foil such as aluminum). It is.

  Then, as indicated by an arrow f in FIG. 1A, the electrode sheet S is subjected to an inspection process in the inspection apparatus 10 according to the present embodiment from the upper process on the left side of the inspection apparatus 10 and more than the inspection apparatus 10. It is continuously conveyed horizontally to the lower process on the right side. In other words, a part in the conveyance direction of the electrode sheet S formed by applying a mixture containing a positive electrode active material is continuously inserted into the inspection apparatus 10 and the electrode sheet S is irradiated with X-rays. Thus, the quality inspection of the electrode sheet S is performed. Specifically, the quality inspection of the electrode sheet S performed by the inspection apparatus 10 according to the present embodiment is one process after the composite material including the positive electrode active material is applied to the current collector foil in the battery manufacturing process. It is done.

The X-ray generator 15 and the detector 17 are devices generally used in X-ray examination.
The X-ray generator 15 has an X-ray irradiation unit 15a disposed on one side (lower side in the present embodiment) inside the inspection apparatus main body 11 that is vertically divided by the opening 11a, on the other side (in the present embodiment). Is stored upward. The X-ray generator 15 applies X-rays r1 from the X-ray irradiation unit 15a to the electrode sheet S inserted through the opening 11a as described above, as shown in FIGS. Irradiate. In the present embodiment, the X-ray r1 from the X-ray generator 15 is irradiated in a soft X-ray region having an energy of 10 to 50 keV (for example, 30 keV).

  The detector 17 has an input surface 17a on one side of the upper and lower sides (in this embodiment) on the other side in the upper and lower sides (upper side in the present embodiment) inside the inspection apparatus body 11, that is, on the side facing the X-ray generator 15. (Downward). Then, the X-ray r1 irradiated by the X-ray generator 15 passes through the electrode sheet S, enters the input surface 17a, and is detected by the detector 17.

  Then, the detector 17 converts the amount of the X-ray r1 incident on the detector 17 into an electric signal. Further, this electric signal is transmitted to an image processing device (not shown) that is electrically connected to the detector 17, and the image processing device converts the electric signal into image data. When impurities or defects are present in the electrode sheet S, the density of the X-ray r1 in the image data generated by the image processing apparatus changes. That is, impurities and defects present in the electrode sheet S are detected by detecting the density of the X-ray r1 in the image data.

  As described above, in the inspection method performed in the inspection apparatus 10 according to the present embodiment, the X-ray generator 15 irradiates the electrode sheet S continuously conveyed and inserted into the inspection apparatus body 11 from the X-ray generator 15. Then, when the detector 17 detects the X-ray r1 that has passed through the electrode sheet S, the quality inspection of the electrode sheet S is performed.

Further, as shown in FIGS. 1A, 1B, and 2, the inspection apparatus 10 is provided on each of an upper side that is the detector 17 side and a lower side that is the X-ray generator 15 side in the opening 11a. A first shielding plate 21 and a second shielding plate 31 that are disposed and are shielding members capable of shielding the X-ray r <b> 1 irradiated from the X-ray generator 15 are provided. Specifically, in the inspection apparatus main body 11, the first shielding plate 21 is disposed at the upper end portion of the opening portion 11a so as to block the portion above the opening portion 11a, and the portion below the opening portion 11a. The second shielding plate 31 is disposed at the lower end of the opening 11a so as to close the door.
The 1st shielding board 21 and the 2nd shielding board 31 are arrange | positioned closely so that it may not contact when the electrode sheet S penetrates. That is, the 1st shielding board 21 and the 2nd shielding board 31 are arrange | positioned in the state which opened the gap | interval of the grade which the electrode sheet S conveyed between both does not contact.

  As shown in FIGS. 2 and 3A, an X-ray passage hole 22 through which the X-ray r <b> 1 irradiated by the X-ray generator 15 can pass is opened at a substantially central portion of the first shielding plate 21. . Further, in the first shielding plate 21, the peripheral portion of the opening portion of the X-ray passage hole 22 is configured as a central portion 23 formed of an iron plate, and the peripheral portion of the central portion 23 is a composite such as an iron plate as will be described later. It is comprised as the outer edge part 25 formed with the board.

  The first shielding plate 21 shields X-rays irradiated to portions other than the X-ray passage hole 22. Specifically, since the X-ray r1 is repeatedly reflected by the inner wall surface of the inspection apparatus body 11 inside the inspection apparatus body 11, the first shielding plate 21 transmits the X-rays thus reflected and scattered. Shielded not to.

  Further, an X-ray passage hole 32 through which the X-ray r1 irradiated by the X-ray generator 15 passes is also opened at a substantially central portion of the second shielding plate 31 as shown in FIGS. 2 and 3A. Yes. As shown in FIG. 2, the X-ray r1 is irradiated radially by the X-ray generator 15 (expanding in the direction of the detector 17), so the X-ray passage hole 32 is the X-ray passage hole 22. The inner diameter is formed slightly smaller than that. Since the other structure in the 2nd shielding board 31 is as substantially the same as the 1st shielding board 21, description is abbreviate | omitted.

In the present embodiment, the configuration as described above is configured such that X-rays repeatedly reflected inside the inspection apparatus body 11 are difficult to leak out of the inspection apparatus body 11. That is, most of the X-rays that are repeatedly reflected inside the inspection apparatus main body 11 are shielded by the upper surface of the first shielding plate 21 or the lower surface of the second shielding plate 31, and thus the first shielding plate 21 and the second shielding plate 21. It is possible to reduce X-rays (hereinafter referred to as scattered X-rays) r2 that leak between the shielding plate 31 and the outside to an extent that does not affect the operator.
Further, the scattered X-rays r2 leaked between the first shielding plate 21 and the second shielding plate 31 from the X-ray passage hole 22 of the first shielding plate 21 and the X-ray passage hole 32 of the second shielding plate 31 are: Since the light is repeatedly reflected and attenuated between the first shielding plate 21 and the second shielding plate 31 before leaking to the outside, the scattered X-rays r2 leaking to the outside are further reduced.

  Fig.4 (a) is the figure which showed the relationship between arrangement | positioning of the shielding plates 21 * 31 and the amount of X-ray leakage in the experiment which the present applicant conducted. As shown in FIG. 4A, the X-ray leakage amount when the shielding plates 21 and 31 are not arranged is 100%, whereas when only the upper first shielding plate 21 is arranged, X-rays are obtained. The amount of leakage could be reduced to less than 20%. Moreover, when both the 1st shielding board 21 and the 2nd shielding board 31 were arrange | positioned at the upper and lower sides, it was able to be reduced to several%. That is, by providing the first shielding plate 21 and the second shielding plate 31 in the opening portion 11a, X-rays can be made difficult to leak out of the inspection apparatus main body 11.

  In the present embodiment, since many of the X-rays can be kept inside the inspection apparatus 10 as described above, it is necessary to separately provide a structure for shielding the X-rays outside the inspection apparatus 10. Therefore, the device configuration can be made compact.

In addition, since the first shielding plate 21 and the second shielding plate 31 are arranged so as to be close to each other so as not to contact the electrode sheet S, the surface property peeling of the electrode sheet S caused by the contact with the shielding member Generation of wrinkles and lines can be prevented. In addition, since the X-ray is not shielded by repeating the opening / closing operation by the first shielding plate 21 and the second shielding plate 31, the electrode sheet S which is a long sheet can be continuously inspected.
That is, according to the inspection apparatus 10 according to the present embodiment, it is possible to detect the impurities and defects of the electrode sheet S in a non-contact manner while reducing the apparatus configuration while preventing X-ray leakage. .

Moreover, in this embodiment, the 1st shielding board 21 and the 2nd shielding board 31 are comprised by the multilayer composite structure by which the raw material from which the mass becomes large is arrange | positioned in order from the mutually opposing side.
Specifically, as shown in FIG. 3B, the outer edge portion 25 of the first shielding plate 21 is, in order from the side (lower side) facing the second shielding plate 31, a vinyl chloride plate 25 a, an aluminum plate 25 b, It is composed of a four-layer composite structure in the order of a stainless steel plate 25c and an iron plate 25d in which punch holes are opened. That is, from the lower side to the upper side, the light element material is changed to the heavy element material. The outer edge portion 35 of the second shielding plate 31 is also vertically symmetric with respect to the first shielding plate 21 and has the same structure, and thus the description thereof is omitted.

  In the present embodiment, by configuring as described above, the amount of scattered X-rays r2 passing between the first shielding plate 21 and the second shielding plate 31 and leaking outside the inspection apparatus main body 11 is further reduced. be able to. Specifically, as shown in FIG. 3B, when the scattered X-ray r2 enters between the first shielding plate 21 and the second shielding plate 31, a vinyl chloride plate 35a, an aluminum plate 35b, and a stainless steel plate 35c. Reflected on the respective surfaces of the iron plate 35d become X-rays r21 to r24. Further, the respective X-rays r21 to r24 are reflected at the boundary between the layers, and the scattered X-ray r2 is attenuated each time. That is, the scattered X-ray r2 is attenuated each time reflection is repeated between the first shielding plate 21 and the second shielding plate 31, and the amount of leakage to the outside is reduced.

  In the present embodiment, the first shielding plate 21 and the second shielding plate 31 are formed as flat plates. However, the projections may be provided on the surfaces facing each other, or the surfaces facing each other may be configured in a curved shape. Is possible. Thereby, the direction in which the scattered X-rays r2 are reflected can be directed to the inside of the inspection apparatus main body 11, and the amount of the scattered X-rays r2 leaking out of the inspection apparatus main body 11 can be further reduced.

Further, the first shielding plate 21 and the second shielding plate 31 may have other multilayer composite structures. For example, a carbon plate may be arranged between a vinyl chloride plate and an aluminum plate.
However, the multilayer composite structure in the first shielding plate 21 and the second shielding plate 31 in the present embodiment has the least leakage of X-rays from the experimental results in a plurality of patterns by the applicant of the present application. That is, from the viewpoint of preventing X-ray leakage, the first shielding plate 21 and the second shielding plate 31 are configured by laminating a plurality of materials whose masses increase in order from the opposite sides as in the present embodiment. It is desirable to do.

  FIG. 4B is a diagram showing a relationship between the size of the inner diameter of the X-ray passage holes 22 and 32 in the shielding plates 21 and 31 and the X-ray leakage amount in an experiment conducted by the applicant of the present application. As shown in FIG. 4 (b), the X-ray passage holes 22 and 32 have an X-ray leakage amount of 100% when the inner diameter of the X-ray passage holes 22 and 32 is set to a predetermined size in the experiment. The amount of X-ray leakage could be gradually reduced by reducing the inner diameter. That is, it has become clear from experimental results that it is desirable to make the inner diameters of the X-ray passage holes 22 and 32 as small as possible. In the present embodiment, as shown in FIG. 2, the inner diameters of the X-ray passage holes 22 and 32 are determined according to the shape in which the X-ray r1 is irradiated radially by the X-ray generator 15. ing. That is, the inner diameter of the X-ray passage holes 22 and 32 is formed to be slightly larger than the diameter of the portion through which the X-ray r1 passes. In this manner, the X-ray leakage amount is reduced by reducing the inner diameters of the X-ray passage holes 22 and 32 as much as possible.

  Moreover, in this embodiment, the 1st shielding board 21 and the 2nd shielding board 31 are extended and arranged by the outer side of the test | inspection apparatus main body 11 from the opening part 11a. Specifically, as shown in FIG. 2, the first shielding plate 21 and the second shielding plate 31 are formed to have a size extending from the left and right side surfaces of the inspection apparatus main body 11 by an extension length L, and are arranged in the opening 11a. It is established. Moreover, the 1st shielding board 21 and the 2nd shielding board 31 are similarly extended and arrange | positioned from the front surface of the test | inspection apparatus main body 11 (refer FIG.1 (b)).

  In the present embodiment, by configuring as described above, the amount of scattered X-rays r2 passing between the first shielding plate 21 and the second shielding plate 31 and leaking outside the inspection apparatus main body 11 is further reduced. be able to. Specifically, since the lengths of the first shielding plate 21 and the second shielding plate 31 are increased, the number of times that the scattered X-ray r2 is reflected between the first shielding plate 21 and the second shielding plate 31 is increased. Therefore, the attenuation amount of the scattered X-ray r2 can be increased. That is, since the scattered X-ray r2 can be further attenuated by increasing the number of times the scattered X-ray r2 is repeatedly reflected between the first shielding plate 21 and the second shielding plate 31, the scattered X-ray r2 It is possible to reduce the amount of leakage to the outside.

  FIG.4 (c) is the figure which showed the relationship between the extended length L of the shielding plates 21 * 31 and the X-ray leakage amount in the experiment which this applicant performed. As shown in FIG. 4C, when the shielding plates 21 and 31 are not extended (when the extension length L is 0), the extension length L is 100%. The amount of X-ray leakage could be gradually reduced by increasing the value of. That is, it has become clear from experimental results that it is desirable to make the extension length L of the shielding plates 21 and 31 as large as possible. In other words, in the present embodiment, the first shielding plate 21 and the second shielding plate 31 extend from the opening 11a to the outside of the inspection apparatus main body 11 to disperse the scattered X-rays r2 of the inspection apparatus main body 11. It is difficult to leak from the outside.

  Fig.5 (a) is the figure which showed the relationship between the space | interval of shielding board 21 * 31 and the amount of X-ray leakage in the experiment which this applicant performed. As shown in FIG. 5A, the interval between the shielding plates 21 and 31 is made smaller than the case where the X-ray leakage amount is 100% when the interval between the shielding plates 21 and 31 is set to a predetermined size in the experiment. As a result, the amount of X-ray leakage could be gradually reduced. This is because the number of reflections of the scattered X-ray r2 repeated at a predetermined length when the distance d1 between the shielding plates 81 and 91 shown in FIG. 5B1 is wide is the same as that of the shielding plates 21 and 31 shown in FIG. It is thought that this is because the distance d2 is smaller than that in the case where the distance d2 is narrow.

  That is, the number of reflections of the scattered X-rays r <b> 2 repeated between the first shielding plate 21 and the second shielding plate 31 is increased by narrowing the interval between the shielding plates 21 and 31. Thereby, as shown in FIG. 5 (b2), the scattered X-rays r2 are absorbed by the shielding plates 21 and 31 as attenuated X-rays r3. That is, since the scattered X-ray r2 can be further attenuated, the amount of the scattered X-ray r2 leaking to the outside can be reduced. In the present embodiment, as shown in FIG. 2, the first shielding plate 21 and the second shielding plate 31 are arranged close to each other so as not to contact the electrode sheet S, thereby reducing the amount of X-ray leakage. It is configured.

  In the present embodiment, as shown in FIG. 1, the inspection apparatus main body 11 is placed on the upper surface of the base portion 12. Specifically, two rails 13, 13 facing in the front-rear direction are disposed on the upper surface of the base portion 12, and the inspection apparatus main body 11 is placed on the rails 13, 13 in the front-rear direction (FIG. 1B). ) It is slidably arranged in the direction of the arrow α shown in the figure. More specifically, the inspection apparatus main body 11 is connected to the rails 13 and 13 via an actuator (not shown) such as a motor, a hydraulic cylinder, or an electric cylinder, and the slide on the rails 13 and 13 is driven by driving this actuator. It is configured to do. That is, the inspection apparatus main body 11 is configured to be slidable in the direction (front-rear direction) perpendicular to the left and right side surfaces, which are two of the side surfaces on which the opening 11a is formed, on the upper surface of the base 12. It is. The opening 11a is formed continuously on the front surface and the left and right side surfaces of the inspection apparatus body 11.

  In this embodiment, by configuring as described above, the inspection apparatus main body 11 can be arranged at two positions, that is, a front inspection position and a rear standby position. That is, when X-ray inspection is performed using the inspection apparatus 10, the inspection apparatus main body 11 is moved to the front side, and the electrode sheet S is inserted through the opening 11 a to be an inspection position. When the X-ray inspection is not performed, the inspection apparatus main body 11 is moved to the rear side, and the electrode sheet S is extracted from the opening portion 11a to be a standby position.

Thereby, the workability of the inspection apparatus 10 can be improved. That is, since the electrode sheet S can be inserted or extracted without opening the inspection apparatus main body 11, leakage of X-rays due to opening of the inspection apparatus main body 11 can be prevented. The inspection apparatus main body 11 is permitted by law to be opened only by an engineer (X-ray engineer) who is qualified for handling X-rays. That is, according to the inspection apparatus 10 according to the present embodiment, the electrode sheet S can be inserted and extracted even when an X-ray technician is absent.
Further, by moving the inspection apparatus main body 11 to the standby position, it becomes easy to perform maintenance and cleaning of the inspection apparatus main body 11 by interrupting the replacement of the electrode sheet S and the inspection work, and improving the workability of the X-ray inspection. It is possible to make it.

  The inspection apparatus 10 is not limited to the electrode sheet S that is a battery component, and can be applied to the case where X-ray inspection is performed on other long components. However, the point that it is possible to detect the impurities and defects in the inspection object in a non-contact manner while reducing the apparatus configuration while preventing the leakage of X-rays is applied to the X-ray inspection on the electrode sheet S. In some cases.

[Second Embodiment]
Next, an inspection apparatus according to a second embodiment of the present invention will be described with reference to FIGS. In addition, about the inspection apparatus demonstrated by this embodiment, about the part which is common in said 1st embodiment, the same code | symbol is attached | subjected and detailed description shall be abbreviate | omitted.

  As shown in FIGS. 6B and 6C, in the inspection apparatus according to this embodiment, the X-ray generator 115 and the detector 117 are configured so that the positions inside the inspection apparatus main body 11 can be varied up and down. . Specifically, each is slidable up and down by an actuator (not shown). Thereby, the ratio of the distance from the X-ray generator 115 to the detector 117 with respect to the distance from the X-ray generator 115 to the electrode sheet S is changed, and the magnification (resolution) of the image in the X-ray inspection is made variable. -ing

  That is, as shown in FIG. 6B, when the distance from the X-ray generator 115 to the detector 117 is made smaller than the distance from the X-ray generator 115 to the electrode sheet S, the image enlargement ratio ( Resolution) is relatively small. On the other hand, when the distance from the X-ray generator 115 to the detector 117 is made larger than the distance from the X-ray generator 115 to the electrode sheet S as shown in FIG. The resolution can also be relatively increased.

  Further, as shown in FIG. 6A, the size of the X-ray passage hole 122 opened in the first shielding plate 121 which is a shielding member is also variably configured. Specifically, a plurality of iron plates 123, 123... Are rotatably superimposed on the central portion of the first shielding plate 121. And the magnitude | size of the X-ray passage hole 122 is adjusted by adjusting the rotation angle of this iron plate 123 * 123 .... That is, the size of the X-ray passage hole 122 can be changed like a diaphragm of a camera. Since the second shielding plate 131 is configured in the same manner as the first shielding plate 121, the description thereof is omitted.

  The sizes of the X-ray passage holes 122 and 123 in the first shielding plate 121 and the second shielding plate 131 are configured to be adjustable according to the distance from the X-ray generator 115 to the electrode sheet S. That is, as shown in FIG. 6B, when the distance from the X-ray generator 115 to the electrode sheet S is large, the X-ray passage holes 122 and 123 are formed large, and as shown in FIG. When the distance from the line generator 115 to the electrode sheet S is small, the X-ray passage holes 122 and 123 are formed small.

  Here, it is known that the dose of X-rays attenuates with the square of the distance. For this reason, when the distance from the X-ray generator 115 to the electrode sheet S is reduced in order to increase the enlargement ratio of the image, the X-ray generator 115 and the electrode sheet S are larger than when the distance is increased. The amount of attenuation of radiation dose is relatively small, and strong X-rays may leak out.

  However, in the present embodiment, by configuring as described above, the amount of scattered X-rays r2 passing between the first shielding plate 121 and the second shielding plate 131 and leaking outside the inspection apparatus main body 11 is further increased. The configuration is reduced. That is, as shown in FIG. 4B, the smaller the inner diameter of the X-ray passage hole, the more the X-ray leakage can be reduced. For this reason, when the distance from the X-ray generator 115 to the electrode sheet S is reduced, the scattered X-rays r2 are generated outside the inspection apparatus body 11 by forming the opening areas of the X-ray passage holes 122 and 123 small. This reduces the amount of leakage.

  As described above, in the present embodiment, even when the distance from the X-ray generator 115 to the electrode sheet S is reduced in order to increase the enlargement ratio of the image, the first shielding plate 121 and the second shielding plate are used. By adjusting the size of the X-ray passage holes 122 and 123 in the plate 131, the amount of scattered X-rays r2 leaking out of the inspection apparatus main body 11 is reduced.

DESCRIPTION OF SYMBOLS 10 Inspection apparatus 11 Inspection apparatus main body 11a Opening part 12 Base part 15 X-ray generator 17 Detector 21 First shielding board 31 Second shielding board S Electrode sheet

Claims (11)

It is formed as a hollow casing that shields X-rays, and an opening is formed in the middle of at least two opposing side surfaces, and a band-shaped object to be measured is inserted through the opening. , Inspection device body,
An X-ray generator that is housed on one side of the inspection apparatus main body divided into two by the opening, and irradiates the object to be measured inserted through the opening with X-rays;
A detector that is housed on the other side of the inspection apparatus body and that detects X-rays that are irradiated by the X-ray generator and transmitted through the object to be measured;
A plate that is disposed on the X-ray generator side of the opening so as to close a portion on the X-ray generator side of the opening and can shield X-rays emitted from the X-ray generator. A first shielding member having a shape;
A plate-like second plate disposed on the detector side of the opening so as to block a portion of the detector from the opening and capable of shielding X-rays emitted from the X-ray generator. A shielding member,
The first shielding member and the second shielding member are arranged in a state where there is a gap so that the object to be measured conveyed between them is not in contact,
Each of the first shielding member and the second shielding member is opened with an X-ray passage hole capable of transmitting X-rays emitted from the X-ray generator,
The X-ray generator emits X-rays to the object to be measured that is continuously conveyed between the first shielding member and the second shielding member and is inserted into the opening of the inspection apparatus main body. The quality of the measurement object is checked by the detector detecting X-rays transmitted through the measurement object.
An inspection apparatus characterized by that. The shielding member is plate-shaped, and is configured in a multilayer composite structure in which materials that increase in mass from the opposite sides are arranged.
The inspection apparatus according to claim 1, wherein: The shielding member is arranged to extend from the opening to the outside of the inspection apparatus body.
The inspection apparatus according to claim 1, wherein the inspection apparatus is characterized. The opening is formed continuously in the middle of the three side surfaces of the inspection apparatus body,
The inspection apparatus main body is configured to be slidable on the base portion in a direction orthogonal to two opposing sides of the side surface on which the opening is formed, while being placed above the base portion.
The inspection apparatus according to any one of claims 1 to 3, wherein the inspection apparatus is characterized. The X-ray generator and the detector are configured to be variably positioned within the inspection apparatus main body,
The size of the X-ray passage hole opened in the shielding member is configured to be adjustable according to the distance from the X-ray generator to the object to be measured.
The inspection apparatus according to any one of claims 1 to 4, wherein the inspection apparatus is characterized in that: It is formed as a hollow casing that shields X-rays, and an opening is formed in the middle of at least two opposing side surfaces, and a band-shaped object to be measured is inserted through the opening. An X-ray generator for irradiating an object to be measured, which is housed on one side of the inspection apparatus main body and the inspection apparatus main body divided into two by the opening, and is inserted through the opening; And a detector that is housed on the other side of the inside of the inspection apparatus main body, detects X-rays that are irradiated by the X-ray generator and transmitted through the object to be measured, and the X-ray generator in the opening. And a plate-like first shielding member that is disposed so as to block a portion of the X-ray generator from the opening, and can shield X-rays emitted from the X-ray generator, On the side of the detector in the opening, the opening is more than the opening. Is arranged so as to close the part of the output device side, and a shieldable plate-shaped second shielding member X-rays emitted from the X-ray generator, wherein the first shielding member and the second shielding The members are arranged in a state where there is a gap so that the object to be measured conveyed between them is not in contact with each other , and each of the first shielding member and the second shielding member is provided by the X-ray generator. An inspection method for performing a quality inspection of the object to be measured in an inspection apparatus in which an X-ray passage hole capable of transmitting irradiated X-rays is opened,
The X-ray generator emits X-rays to the object to be measured that is continuously conveyed between the first shielding member and the second shielding member and is inserted into the opening of the inspection apparatus main body. The quality of the object to be measured is checked by the detector detecting X-rays transmitted through the object to be measured.
An inspection method characterized by the above. The shielding member is plate-shaped, and is configured in a multilayer composite structure in which materials that increase in mass from the opposite sides are arranged.
The inspection method according to claim 6, wherein: The shielding member is arranged to extend from the opening to the outside of the inspection apparatus body.
The inspection method according to claim 6 or 7, characterized by the above. The opening is formed continuously in the middle of the three side surfaces of the inspection apparatus body,
The inspection apparatus main body is configured to be slidable on the base portion in a direction orthogonal to two opposing sides of the side surface on which the opening is formed, while being placed above the base portion.
The inspection method according to any one of claims 6 to 8, wherein the inspection method is characterized by the above. The X-ray generator and the detector are configured to be variably positioned within the inspection apparatus main body,
The size of the X-ray passage hole opened in the shielding member is configured to be adjustable according to the distance from the X-ray generator to the object to be measured.
The inspection method according to any one of claims 6 to 9, wherein the inspection method is characterized. The object to be measured is a battery electrode sheet,
Using the inspection method according to any one of claims 6 to 10, comprising an inspection step of performing a quality inspection of the electrode sheet.
A method for producing a battery.

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