JP5538002B2 - Work processing method and machine tool - Google Patents

Description

  The present invention relates to a workpiece machining method for machining a plurality of machining positions on a workpiece with a machining tool, and a machine tool.

Conventionally, a machine tool called a so-called machining center is known as a machine for processing a large workpiece (see, for example, Patent Document 1).
The thing of this patent document 1 is equipped with the cross rail by which both ends were supported by the portal column. The cross rail is provided with a ram so as to be movable in the Z direction via a saddle supported so as to be movable along the longitudinal direction (Y direction). A tool is attached to the ram via a main shaft. A table on which a work is placed is provided below the ram so as to be movable in the X direction.
And the structure which processes a workpiece | work is taken, moving a table, a saddle, and a ram suitably to a X, Y, Z direction.

Japanese Patent Laid-Open No. 2003-1541

By the way, when finely processing a plurality of processing positions, for example, when processing a lens array having a plurality of fine concave lenses, it is conceivable to use the configuration described in Patent Document 1. In such a case, it is necessary to increase the moving speed of the table in order to improve productivity, but if this moving speed is increased, the positioning accuracy of the processing position deteriorates due to the inertial force acting on the table, and the accuracy is increased. It cannot be finely processed. Therefore, it is conceivable to reduce the weight of the table, which is a moving object, by reducing the size.
However, if the table is downsized, a large workpiece cannot be processed, and the versatility of the machine tool is lost.

  An object of the present invention is to provide a workpiece machining method and a machine tool capable of improving productivity and versatility and realizing highly accurate fine machining.

A workpiece machining method according to the present invention is a workpiece machining method for machining a plurality of machining positions on a workpiece with a machining tool, wherein the long-distance moving table on which the workpiece can be placed and the machining tool are brought into and out of contact with each other. A Z-relative movement unit that relatively moves in the Z direction with a long stroke; an XY relative movement unit that relatively moves the long-distance movement table and the processing tool in a long stroke in at least one of the X direction and the Y direction; , a UV relative movement unit that relatively moves with a short stroke parallel V direction of the workpiece and can be placed a short distance moving table and the machining tool in the Y direction parallel to the U direction in the X direction, wherein the UV relative movement unit includes a U relative movement unit for moving the workpiece in a short stroke in the U direction, and a V relative movement unit for moving the workpiece in a short stroke in the V direction, The U-relative movement unit includes an attachment table attached to the long-distance movement table, a U slider facing the attachment table, and a U drive unit that moves the U slider relative to the attachment table. The relative movement unit includes the short distance movement table facing the U slider, and a V drive unit that moves the short distance movement table with respect to the U slider, and the U slider and the short distance movement table total weight, the set smaller than the long distance table, the short-range mobile table, using a machine tool which is detachably attached to the front Symbol long distance table, the UV relative to the Z relative movement unit After the micro-machining of the unmachined machining position of the workpiece by the machining tool by relative movement by the moving unit, the Z relative moving unit and the XY relative transfer are processed. Relative movement by parts, by repeating the step of moving the machining tool to the machining position of the other raw, characterized in that processing the plurality of processing positions.

Here, examples of the fine processing include drilling processing and cutting processing in units of micrometers and nanometers. Further, examples of the processing tool include a spindle for fine processing, ultrasonic cutting or measurement, a laser head for laser processing, a nozzle for removing fine powder, and the like. In addition, the microfabrication may be one that forms a concave portion or one that forms a convex portion. Furthermore, the workpiece to be finely processed by the processing tool may be a workpiece of at most several millimeters such as a semiconductor or a precision machine that is generally recognized as a target of the fine processing, or for a vehicle or a building. It may be a small work such as for a large apparatus or a large work in centimeter units.
Further, the short distance movement table may be lighter than the long distance movement table, and is not limited to a smaller one than the long distance movement table, and may be the same size or larger. However, considering the amount of material used to manufacture the short distance moving table, the cost, and the effects of insufficient rigidity and increased inertial force due to increased movement stroke, the short distance moving table is Is preferably small. The short distance moving table may be attached or detached manually, or may be configured using a device using a cylinder or a motor as a drive source, such as an auto table changer.
Further, examples of the long stroke include a range of 1000 mm to 1600 mm, and examples of the short stroke include a range of 10 mm to 20 mm.

  According to this invention, since the short-distance movement table that is lighter than the long-distance movement table is moved with a short stroke during micro-machining with the machining tool, the inertial force is maintained even if the movement speed of the short-distance movement table is increased. The positioning accuracy of the processing position with respect to the processing tool can be improved without increasing. Therefore, it is possible to realize both improvement of productivity and high-precision fine processing. Furthermore, if the short-distance moving table is removed from the long-distance moving table, a large workpiece placed on the long-distance moving table can be processed, and the versatility of the machine tool can be improved.

Further, in the workpiece machining method of the present invention, the machine tool is further provided with a W relative movement unit that relatively moves the long distance moving table and the machining tool in the W direction parallel to the Z direction with a short stroke. It is preferable that after the machining tool is moved to a position close to the machining position by relative movement by the Z relative movement unit, the machining position is finely machined by relative movement by the W relative movement unit.
Here, the position close to the processing position means a position that can be finely processed by the processing tool only by a short stroke relative movement by the W relative movement unit, for example, a position separated by 1 mm to 10 mm from the processing position. it can.
According to the present invention, the precision of micromachining in the W direction can be improved by moving the working tool in a short stroke in the W direction.

Furthermore, in the workpiece machining method of the present invention, it is preferable that the machining position is finely machined with the machining tool by relative movement by the W relative movement unit and the UV relative movement unit.
In the workpiece processing method of the present invention, the fine processing is preferably lens processing having a convex or convex hemispherical surface.
According to such an invention, it is possible to perform fine processing or lens processing in a two-dimensional direction (UV direction) or a three-dimensional direction (UVW direction) at a plurality of positions of the workpiece, and the versatility of the machine tool is increased. It can be improved.

In the workpiece machining method of the present invention, it is preferable that a machining center is used as the machine tool.
Here, the machining center is a machine tool having a configuration in which tools can be exchanged and having a versatile cutting function.
According to the present invention, it is possible to combine micromachining machines.

The machine tool according to the present invention is a machine tool for machining a workpiece with a machining tool, and the long-distance moving table on which the workpiece can be placed and the machining tool are relative to each other with a long stroke in the Z direction. A Z relative movement unit that moves, an XY relative movement unit that relatively moves the long distance movement table and the machining tool in a long stroke in at least one of the X direction and the Y direction, and the workpiece can be placed. comprising a UV relative movement unit that relatively moves with a short stroke parallel V direction and said working tool and short moving table in the Y direction parallel to the U direction in the X direction, wherein the UV relative movement unit Comprises a U relative movement part for moving the work in the U direction with a short stroke and a V relative movement part for moving the work in the V direction with a short stroke, the U relative movement part being the long distance A mounting table mounted on the moving table; a U-slider facing the mounting table; and a U driving unit that moves the U-slider relative to the mounting table, wherein the V relative moving unit is opposed to the U-slider. The short distance moving table and a V driving unit that moves the short distance moving table with respect to the U slider, and the total weight of the U slider and the short distance moving table is greater than that of the long distance moving table. is also set small, the short-range mobile table is characterized in that it is detachably attached to the front Symbol long distance table.
In the machine tool of the present invention, it is preferable that the machine tool further includes a W relative movement unit that relatively moves the long distance movement table and the machining tool in a W direction parallel to the Z direction with a short stroke.
According to these inventions, the same operational effects as those of the above-described workpiece machining method can be expected.

1 is a perspective view showing a schematic configuration of a machine tool according to an embodiment of the present invention. The perspective view of the lens array in the one embodiment. Sectional drawing of the lens of the lens array in the said one Embodiment. The perspective view which shows partially the processing method of the lens in the said one Embodiment. The perspective view which shows the processing method of the lens array in the said one embodiment entirely. The schematic diagram which shows the mounting | wearing method of the workpiece | work UV movement attachment which concerns on the modification of this invention.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
[Configuration of machine tool]
FIG. 1 is a perspective view showing a schematic configuration of a machine tool according to an embodiment of the present invention.
As shown in FIG. 1, the machine tool 1 is a portal-type machining center having a configuration in which tools can be exchanged and having a versatile cutting function. A large workpiece (not shown) such as for an apparatus is processed in a large size, or the lens array L as a workpiece is finely processed with a fine processing tool 7 as a processing tool. Here, examples of the large machining tool include a spindle that performs drilling in nanometer units, and examples of the micromachining tool 7 include a spindle that performs drilling in nanometer units, and ultrasonic cutting. Examples include a spindle for measurement or measurement, a laser head for laser processing, and a nozzle for removing fine powder. The machine tool 1 includes an X relative movement unit 2 that constitutes an XY relative movement unit, a Y relative movement unit 3 that constitutes an XY relative movement unit, a Z relative movement unit 4, and a tool W movement as a W relative movement unit. An attachment 5, a workpiece UV movement attachment 6 as a UV relative movement unit, and a controller (not shown) that controls the entire machine tool 1 are provided. In addition, 1200 mm can be illustrated as a long stroke in this embodiment, and 20 mm can be illustrated as a short stroke.

The X relative movement unit 2 moves a work such as the lens array L in a long stroke in the X direction which is one direction in the horizontal plane. The X relative movement unit 2 includes an X guide shaft 21, an X movement table 22 as a long-distance movement table provided in a state of facing the X guide shaft 21, and the X movement table 22 as an X guide shaft 21. And an X drive unit 23 that is moved relative to the X drive unit 23. A workpiece to be processed in large size is placed on the X movement table 22, or the workpiece UV movement attachment 6 is detachably attached via an attachment / detachment mechanism (not shown).
The X driving unit 23, the Y driving unit 34, the W driving unit 53, the U driving unit 613, and the V driving unit 622, which will be described later, are a guide rail and a sliding holding unit that holds the guide rail slidably. And a linear motor.

  The Y relative movement unit 3 moves the fine machining tool 7 and the large machining tool with a long stroke in the Y direction orthogonal to the X direction in a horizontal plane. The Y relative movement unit 3 includes a pair of columns 31 erected on both sides along the Y direction across the X guide shaft 21, and a Y guide shaft erected along the Y direction at the upper end of the column 31. 32, a cylindrical Y slider 33 that faces the Y guide shaft 32, and a Y drive unit 34 that moves the Y slider 33 relative to the Y guide shaft 32.

  The Z relative movement unit 4 moves the fine processing tool 7 and the like with a long stroke in the Z direction perpendicular to the X direction and the Y direction. The Z relative movement unit 4 includes a Z guide shaft 41 provided along the inner periphery of the Y slider 33, a Z slider 42 guided by the Z guide shaft 41 so as to be slidable in the Z direction, and the Z slider 42. A Z driving unit (not shown) for moving The tool W movement attachment 5 is attached to the side surface of the Z slider 42 via an attachment / detachment mechanism (not shown). Further, a large machining tool is detachably attached to the side surface or the lower surface of the Z slider 42 by manual work or the like. In addition, it is good also as a structure by which the tool W movement attachment 5 is attached to the lower surface of Z slider 42, and it is good also as a structure by which the tool for large sized processing is attached to a side surface.

  The tool W movement attachment 5 moves the micromachining tool 7 in a short stroke in the W direction parallel to the Z direction. The tool W movement attachment 5 includes an attachment table 51 that is detachably attached to the Z slider 42, a W movement table 52 that faces the attachment table 51 and is lighter than the Z slider 42, and the W movement table 52 is attached to the attachment table 51. W drive unit 53 that moves relative to 51. A fine processing tool 7 is detachably attached to the W moving table 52 by manual work or the like.

The workpiece UV moving attachment 6 includes a U-relative movement unit 61 that moves a workpiece to be finely processed in a U direction parallel to the X direction with a short stroke, and a V relative that moves the workpiece in a V direction parallel to the Y direction. And a moving unit 62.
The U relative movement unit 61 includes an attachment table 611 that is detachably attached to the X movement table 22, a U slider 612 that faces the attachment table 611, and a U drive unit that moves the U slider 612 relative to the attachment table 611. 613.
The V relative movement unit 62 includes a UV movement table 621 as a short distance movement table facing the U slider 612, and a V drive unit 622 that moves the UV movement table 621 relative to the U slider 612. A workpiece to be finely processed is placed on the UV movement table 621.
The total weight of the U slider 612 and the UV movement table 621 is set to be smaller than that of the X movement table 22. Further, the U slider 612 and the UV movement table 621 are formed smaller than the X movement table 22.
In addition, long stroke or short stroke movement by the X, Y, Z, U, V relative movement units 2, 3, 4, 61, 62 and the tool W movement attachment 5 is in nanometer units or It is controlled in the above units.

[Machine tool operation]
Next, the operation of the machine tool 1 will be described.
2 is a perspective view of the lens array, FIG. 3 is a cross-sectional view of the lens of the lens array, FIG. 4 is a perspective view partially showing a processing method of the lens, and FIG. 5 is an overall processing method of the lens array. It is a perspective view shown in FIG.

First, the lens array L will be described.
As shown in FIGS. 2 and 3, the lens array L includes, for example, an approximately square plate-shaped array body L1 made of resin, and a plurality of substantially hemispherical lenses L2 provided on one surface of the array body L1. It has. Five lenses L2 are provided side by side in directions orthogonal to each other, and are formed by being finely processed by the tool 7 for fine processing.

Next, a processing method of the lens array L by the machine tool 1 will be described.
First, the operator attaches the tool W movement attachment 5 in which the fine machining tool 7 is attached to the W movement table 52 to the Z slider 42 and attaches the workpiece UV movement attachment 6 to the X movement table 22. Further, the unprocessed array body L1 is placed on the UV movement table 621 of the workpiece UV movement attachment 6, and the processing conditions for the lens array L are set and input to the controller. When attaching the workpiece UV moving attachment 6 to the X moving table 22, it is preferable to use positioning means such as inserting a positioning pin provided on one side into an insertion hole provided on the other side. This ensures the positioning of the workpiece UV moving attachment 6 and enables highly accurate fine processing.

  When the machining conditions are set and inputted, the controller of the machine tool 1 first controls the X, Y, and Z relative movement units 2, 3, and 4 so that the fine machining tool 7 comes close to the first machining position. For example, the tool W movement attachment 5 is moved so that the distance from the machining position is 1 mm to 10 mm, for example. Then, the micromachining tool 7 is driven, and the U and V relative movement portions 61 and 62 of the tool W moving attachment 5 and the workpiece UV moving attachment 6 are controlled, as shown in FIG. Is moved into a circular shape, thereby forming a recess having a substantially circular outer shape. Thereafter, as the micromachining tool 7 moves downward, the tool W movement attachment 5 and the U and V relative movement units 61 and 62 are controlled so that the circular shape of the movement trajectory gradually becomes smaller. Thus, the lens L2 is formed.

  After the formation of the lens L2, the controller controls the Z relative movement unit 4 and the tool W movement attachment 5 to separate the fine processing tool 7 from the array body L1, and then the X relative movement unit 2 moves the array body L1. The fine machining tool 7 is positioned on an unmachined machining position by moving in the X direction. Then, as shown in FIG. 5, the lens L2 is formed by the above-described operation. Thereafter, when the fine processing tool 7 is positioned at an unprocessed processing position, the array main body L1 is moved in the X direction by the X relative movement unit 2, or the fine processing tool 7 by the Y relative movement unit 3. Is moved in the Y direction.

Further, when the operator does not use the tool W moving attachment 5 and does not use the tool W moving attachment 5 on the machine tool 1, the operator does not attach the tool W moving attachment 5, and the side surface or the lower surface of the Z slider 42. A fine processing tool 7 is attached to the X movement table 22 and a work UV movement attachment 6 is attached to the X movement table 22.
Then, the controller controls the X, Y, Z relative movement units 2, 3, 4, U, V relative movement units 61, 62 based on the machining conditions set and input, and the fine machining tool 7 is applied to the workpiece. The workpiece is finely processed by relatively moving in the X, Y, Z, U, and V directions.

  Further, when machining a workpiece with the machine tool 1, a large machining tool is attached to the side surface or the lower surface of the Z slider 42 in a state where the tool W movement attachment 5 and the workpiece UV movement attachment 6 are not attached. A workpiece to be processed in large size is placed on the X movement table 22. Then, the controller controls the X, Y, and Z relative movement units 2, 3, and 4 based on the machining conditions that are set and input, and moves the large machining tool relative to the workpiece in the X, Y, and Z directions. By moving it, the workpiece is processed in large size.

[Functional effects of machine tools]
According to the machine tool 1 described above, the following effects can be expected.
(1) The UV movement table 621 that is lighter than the X movement table 22 is moved during fine processing of a workpiece such as the lens array L. For this reason, even if the speed of the UV moving table 621 is increased, the inertial force can be made smaller than when the X moving table 22 is moved, the positioning accuracy of the processing position with respect to the fine processing tool 7 can be increased, and productivity is improved. And high-precision micromachining can be realized. Furthermore, since it can be used for large-scale machining of the workpiece placed on the X movement table 22, the versatility of the machine tool 1 can be improved. And since the tool W movement attachment 5 and the workpiece UV movement attachment 6 are made detachable, the above-mentioned effect can be expected even in a conventional machine tool.

  (2) Since the fine machining tool 7 is moved close to the machining position by the movement by the Z relative movement unit 4 and then fine machining is performed by the movement by the tool W moving attachment 5, the precision of the fine machining in the W direction is improved. It can be improved.

  (3) Since the workpiece can be moved in the U and V directions by the workpiece UV moving attachment 6 and the fine processing tool 7 can be moved in the W direction by the tool W moving attachment 5, it is spherical or aspherical. A concave portion or a convex portion such as a cylindrical shape, a prismatic shape, or a cylindrical shape can be formed.

  (4) Since the W moving table 52 is lighter than the Z slider 42, the inertial force can be made smaller than when the Z slider 42 is moved even if the speed of the W moving table 52 is increased. Positioning accuracy can be increased.

[Modification]
The present invention is not limited to the above-described embodiment, and modifications, improvements, and the like within the scope that can achieve the object of the present invention are included in the present invention.

That is, it is good also as a structure which a workpiece | work can move only to one of a U direction and a V direction.
Further, the movement in the X, Y, and Z directions may be coarsely moved, and the movement in the U, V, and W directions may be finely moved. Here, coarse movement means movement control in units of millimeters or micrometers, and fine movement means movement control in units of nanometers or picometers. Further, a ball screw mechanism can be used as the coarse movement mechanism, and a linear motor as in the above embodiment can be used as the fine movement mechanism.
With such a configuration, the workpiece and the micromachining tool 7 are relatively finely moved in the U, V, and W directions at the time of micromachining, and both of the above are performed when the micromachining tool 7 is moved between micromachining positions. The working time can be shortened by relatively coarsely moving in the X, Y, and Z directions.

  In addition, the work UV moving attachment 5 is configured to move the work in the V direction with a short stroke. However, the fine machining tool 7 is moved or slightly moved in the V direction on the Z slider 42 or the mounting table 51 in a short stroke. A configuration may be provided, or a configuration may be provided in which the Z relative movement unit 4 is moved or coarsely moved in the V direction with a short stroke on the Y guide shaft 32.

  Furthermore, although the XY surface of the workpiece is finely processed by the fine processing tool 7, the XZ surface or YZ surface of the workpiece may be finely processed. As a configuration for finely processing the XZ surface, in the machine tool 1 of the above-described embodiment, the fine processing tool 7 is attached to the W moving table 52 so that the longitudinal direction thereof coincides with the X direction. A configuration in which the workpiece is moved in the U and V directions in the direction can be exemplified. In addition, as a configuration for finely processing the YZ surface, an attachment installation portion in which the tool W moving attachment 5 is provided is erected on the Y direction side of the X guide shaft 21, and the longitudinal direction of the fine processing tool 7 coincides with the Y direction. A configuration in which the fine processing tool 7 and the workpiece are relatively moved in the U, V, and W directions by being attached to the W movement table 52 as illustrated in FIG.

Further, as shown in FIGS. 6A to 6E, the work UV moving attachment 6 may be directly placed on the X guide shaft 21.
In this configuration, first, as shown in FIG. 6A, the work UV moving attachment 6 is placed on the X guide shaft 21 by being pushed into the −X direction side (the right side in FIG. 6A). A cylinder 8 is prepared. At the tip of the cylinder shaft 81 of the mounting cylinder 8, a claw portion 82 that can rotate around a rotation shaft 83 is provided. Further, for example, three table convex portions 614 are provided on the lower surface of the attachment table 611 of the work UV moving attachment 6.
The workpiece UV moving attachment 6 is supported on the + X direction side (left side in FIG. 6A) of the X guide shaft 21 by a support mechanism (not shown), and the claw portion 82 of the mounting cylinder 8 is laid down (longitudinal). The cylinder shaft 81 is extended so that the claw portion 82 is positioned between the two table convex portions 614 on the X guide shaft 21 side (with the direction matching the left-right direction in FIG. 6A). . Next, as shown in FIG. 6 (A), the claw portion 82 is erected (the longitudinal direction is made to coincide with the vertical direction in FIG. 6 (A)). Then, as shown in FIG. 6B, the end of the workpiece UV moving attachment 6 is placed on the X guide shaft 21 by extending the cylinder shaft 81 and pushing the table convex portion 614 with the claw portion 82.
Thereafter, as shown in FIGS. 6C to 6D, the cylinder shaft 81 is expanded and contracted, and the claw portion 82 is stood or laid, and the table convex portion 614 is gradually pushed in by the claw portion 82. The entire work UV moving attachment 6 is placed on the X guide shaft 21.

  The machine tool of the present invention is not limited to a machining center, and may be any machine that can machine a workpiece with a machining tool, such as an NC machine tool, a milling machine, or a drilling machine.

  In addition, the specific structure and procedure for carrying out the present invention can be appropriately changed to other structures and the like within a range in which the object of the present invention can be achieved.

  INDUSTRIAL APPLICABILITY The present invention can be used for a workpiece machining method for machining a plurality of machining positions on a workpiece with a machining tool, and a machine tool.

DESCRIPTION OF SYMBOLS 1 ... Machine tool 2 ... X relative movement part which comprises XY relative movement part 3 ... Y relative movement part which comprises XY relative movement part 4 ... Z relative movement part 5 ... Tool W movement attachment as W relative movement part 6 ... Work UV movement attachment as a UV relative movement section 7... Fine processing tool as a machining tool 22. X movement table as a long distance movement table 621... UV movement table as a short distance movement table L.

Claims (7)

A workpiece machining method for machining a plurality of machining positions on a workpiece with a machining tool,
A Z-relative movement unit for relatively moving the long-distance movement table on which the workpiece can be placed and the machining tool with a long stroke in the Z-direction that makes contact with and away from each other;
An XY relative movement unit that relatively moves the long distance movement table and the processing tool with a long stroke in at least one of the X direction and the Y direction;
And UV relative movement unit that relatively moves with a short stroke parallel V Direction of the workpiece and can be placed a short distance moving table and the machining tool in the Y direction parallel to the U direction in the X direction, the Prepared,
The UV relative movement unit includes a U relative movement unit that moves the workpiece in the U direction with a short stroke, and a V relative movement unit that moves the workpiece in the V direction with a short stroke,
The U relative movement unit includes an attachment table attached to the long distance movement table, a U slider facing the attachment table, and a U drive unit that moves the U slider with respect to the attachment table,
The V relative movement unit includes the short distance movement table facing the U slider, and a V drive unit that moves the short distance movement table with respect to the U slider,
The total weight of the U slider and the short distance moving table is set smaller than the long distance moving table,
The short-range mobile table, using a machine tool which is detachably attached to the front Symbol long distance moving table,
By finely processing an unprocessed processing position of the workpiece with the processing tool by relative movement by the Z relative movement unit and the UV relative movement unit, and by relative movement by the Z relative movement unit and the XY relative movement unit. The workpiece machining method characterized by machining the plurality of machining positions by repeating the step of moving the machining tool to another unmachined machining position. In the workpiece processing method according to claim 1,
Further, the machine tool is provided with a W relative movement unit that relatively moves the long distance movement table and the processing tool in a W direction parallel to the Z direction with a short stroke,
The workpiece machining is performed by moving the machining tool to a position close to the machining position by relative movement by the Z relative movement unit, and then moving the machining tool by the W relative movement unit to finely machine the machining position. Method. In the workpiece processing method according to claim 2 ,
The workpiece machining method, wherein the machining position is finely machined by the machining tool by relative movement by the W relative movement unit and the UV relative movement unit. In the workpiece processing method according to claim 2 or 3 ,
The fine machining is a lens machining having a convex or convex hemispherical surface. In the work processing method in any one of Claims 1-4 ,
A machining method using a machining center as the machine tool. A machine tool for machining a workpiece with a machining tool,
A Z-relative movement unit for relatively moving the long-distance movement table on which the workpiece can be placed and the machining tool with a long stroke in the Z-direction that makes contact with and away from each other;
An XY relative movement unit that relatively moves the long distance movement table and the processing tool with a long stroke in at least one of the X direction and the Y direction;
And UV relative movement unit that relatively moves with a short stroke parallel V Direction of the workpiece and can be placed a short distance moving table and the machining tool in the Y direction parallel to the U direction in the X direction, the Prepared,
The UV relative movement unit includes a U relative movement unit that moves the workpiece in the U direction with a short stroke, and a V relative movement unit that moves the workpiece in the V direction with a short stroke,
The U relative movement unit includes an attachment table attached to the long distance movement table, a U slider facing the attachment table, and a U drive unit that moves the U slider with respect to the attachment table,
The V relative movement unit includes the short distance movement table facing the U slider, and a V drive unit that moves the short distance movement table with respect to the U slider.
The total weight of the U slider and the short distance moving table is set smaller than the long distance moving table,
The short-range mobile table, a machine tool, characterized in that it is detachably attached to the front Symbol long distance table. The machine tool according to claim 6 ,
The machine tool further comprising: a W relative movement unit that relatively moves the long distance movement table and the machining tool in a W direction parallel to the Z direction with a short stroke.

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