JP5534853B2 - Laser irradiation apparatus and laser irradiation method - Google Patents

Description

  The present invention relates to a laser irradiation apparatus including a laser oscillator that oscillates a laser beam, and a plurality of optical fibers that guide the laser beam oscillated from the laser oscillator and irradiate the laser beam to the outside from an end surface. Regarding the method.

  Conventionally, a fiber transmission light (laser light L transmitted by the optical fiber 25) is imaged by the processing optical system 90, and processing is performed by moving the processing optical system 90 relative to the processing substrate 60. Is known (see FIG. 8). When using such a method, in order to increase the processing width or increase the processing efficiency, the imaging size of the fiber transmission light is increased, the beam is expanded in the processing width direction with a cylindrical lens, etc. Techniques such as increasing the score have been used.

  However, in order to increase the imaging size of the fiber transmission light, it is necessary to change the core diameter of the optical fiber 25 and the imaging magnification of the imaging lens to a large one. Moreover, in the method using a cylindrical lens, it is necessary to replace with a cylindrical lens suitable for each according to a desired processing width. Furthermore, in the method of increasing the number of processing points, it is necessary to increase the number of processing optical systems after fiber transmission and the means for moving those processing optical systems.

  For this reason, the conventional method described above has problems such as a lot of time and effort to change the setup, and is impractical, or the number of parts increases and the price of the apparatus becomes expensive.

  In addition, a method is also known in which a plurality of processing points are formed using a split lens / DOE optical system and the like, and processing is performed by rotating them (see Patent Document 1). However, when the imaging beam shape is not circular, for example, rectangular, the processing pitch and processing width can be adjusted by rotating the split lens / DOE optical system and the like by the rotating unit 95 (FIG. 9A). ) (See (b)), since the beam shape changes with respect to the processing progress direction PD, there is a problem that the linearity of the edge of the scribe line is impaired (see FIG. 9B).

Japanese Patent No. 3293136

  The present invention has been made in consideration of such points, and when processing the object to be processed with the laser light transmitted by the optical fiber, the width of the laser light irradiated to the object to be processed can be easily set. An object of the present invention is to provide a laser irradiation apparatus that can be changed and manufactured at low cost, and to provide a laser irradiation method using such a laser irradiation apparatus.

The laser irradiation apparatus according to the present invention comprises:
A laser oscillator that oscillates laser light;
A plurality of optical fibers for guiding laser light oscillated from the laser oscillator and irradiating the laser light to the outside from an end face;
A processing moving unit that moves the end face of the optical fiber relative to the object to be processed along the processing progress direction; and
One imaging lens into which each of the laser beams irradiated from the end face of the optical fiber is incident;
A fiber moving unit connected to at least one of the plurality of optical fibers and moving an end face of the optical fiber in a direction including a component orthogonal to the processing progress direction;
It has.

In the laser irradiation apparatus according to the present invention,
The fiber moving unit may move the end face of the optical fiber while maintaining an axially symmetric positional relationship with respect to the optical axis of the imaging lens.

In the laser irradiation apparatus according to the present invention,
The fiber moving unit may be connected to each of the optical fibers and move each of the end faces of the optical fiber in a direction including a component orthogonal to the processing progress direction.

In the laser irradiation apparatus according to the present invention,
At least one of the plurality of optical fibers may be fixed without moving in a direction including a component orthogonal to the processing progress direction.

In the laser irradiation apparatus according to the present invention,
The end face of the optical fiber may be rectangular.

In the laser irradiation apparatus according to the present invention,
Each of the end faces of the optical fiber is disposed at a position shifted from each other along the processing progress direction,
Processing locations on the object to be processed by the laser light irradiated from the end face of the optical fiber may overlap in a direction orthogonal to the processing progress direction.

The laser irradiation method according to the present invention comprises:
After guiding laser light oscillated from a laser oscillator in a plurality of optical fibers and irradiating the laser light to the outside from each of the end faces of the optical fiber, the laser light is incident on one imaging lens, and then And imaging the laser beam on the object to be processed;
Moving the end face of the optical fiber along the processing progress direction relative to the object to be processed;
Moving at least one end face of the plurality of optical fibers in a direction including a component orthogonal to the processing progress direction;
It has.

In the laser irradiation method according to the present invention,
The end face of the optical fiber may be moved while maintaining an axially symmetric positional relationship with respect to the optical axis of the imaging lens.

  According to the present invention, at least one end face of a plurality of optical fibers can be moved in a direction orthogonal to at least the processing progress direction. For this reason, when processing a to-be-processed object with the laser beam transmitted with the optical fiber, the width | variety of the laser beam irradiated to a to-be-processed object can be changed easily. Further, with this configuration, a laser irradiation apparatus that changes the width of the laser light irradiated to the object to be processed can be manufactured at low cost. In addition, a laser irradiation method using such a laser irradiation apparatus can be provided.

The side view which showed the structure of the laser irradiation apparatus by embodiment of this invention. The upper top view which showed the structure in the fiber holding | maintenance housing | casing of the laser irradiation apparatus by embodiment of this invention. The upper top view which showed the structure in the fiber holding housing | casing of the laser irradiation apparatus by the modification of embodiment of this invention. The figure which showed the aspect which processes a to-be-processed substrate with the laser irradiation apparatus by embodiment of this invention. The upper top view which showed the structure in the fiber holding housing | casing of the laser irradiation apparatus by the modification of embodiment of this invention. The figure which showed the aspect which processes a to-be-processed substrate with the laser irradiation apparatus by the modification of embodiment of this invention. The figure which shows an example which changed the arrangement position of the end surface of an actuator and an optical fiber in embodiment of this invention. The figure which shows another example which changed the arrangement position of the end surface of an actuator and an optical fiber in embodiment of this invention. The perspective view which showed the aspect which processes a to-be-processed substrate by an example of the conventional laser irradiation apparatus. The upper top view which showed the aspect which processes a to-be-processed substrate by another example of the conventional laser irradiation apparatus.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of a laser irradiation apparatus and a laser irradiation method according to the present invention will be described below with reference to the drawings. Here, FIG. 1 thru | or FIG. 7 is a figure which shows embodiment of this invention.

  As shown in FIG. 1, the laser irradiation apparatus according to the present embodiment guides a laser oscillator 21 that oscillates laser light L, and the laser light L oscillated from the laser oscillator 21 and transmits the laser light L from the end face to the outside. A plurality of optical fibers 25 that irradiate the optical fiber 25, a processing moving portion 35 that moves the end face of the optical fiber 25 relative to the object to be processed along the processing progress direction PD (see FIG. 2A), The actuator (fiber moving part) 10 (see FIG. 2A) connected to each of the four optical fibers 25 and moving the end face of the optical fiber 25 in a direction orthogonal to the processing progress direction PD, and each optical fiber And an imaging lens 17 (see FIG. 2A) that is provided below the end face of the optical fiber 25 and forms an image of the laser light L emitted from the end face of each optical fiber 25.

  Moreover, as shown in FIG. 1, the holding | maintenance part 1 holding the to-be-processed substrate 60 which is a to-be-processed object is provided in the vicinity of the laser irradiation apparatus. In the present embodiment, a description will be given using a substrate to be processed 60 having a glass substrate (substrate) 61 and a thin film 62 disposed on the glass substrate 61, but the object to be processed is not limited to this. It will never be done.

  Further, as shown in FIG. 1, the end face of the optical fiber 25 is disposed in the fiber holding housing 11. And the end surface of the optical fiber 25 will be moved along the process advancing direction PD by the fiber moving housing | casing 11 being moved along the process advancing direction PD by the process moving part 35. FIG. As shown in FIG. 2A, the actuator 10 is also arranged in the fiber holding casing 11, and the end face of the optical fiber 25 is moved in the fiber holding casing 11 by the actuator 10.

  Further, as shown in FIG. 2A, each of the actuators 10 is disposed at a position shifted from each other along the processing progress direction PD, and drives the end face of the optical fiber 25 in a direction orthogonal to the processing progress direction PD. Is configured to do.

  As shown in FIG. 1, a condensing lens 22 for condensing the laser light L oscillated from the laser oscillator 21 is provided between the laser oscillator 21 and the optical fiber 25. The laser oscillator 21 is connected to a control device 50 that controls ON / OFF of the laser oscillator 21 and laser conditions.

  In the present embodiment, each of the actuators 10 is configured to move each end face of the optical fiber 25 while maintaining an axially symmetric positional relationship with respect to the optical axis of the imaging lens 17. In this respect, the present invention is not limited to this mode, and each of the actuators 10 may be moved without making each of the end faces of the optical fiber 25 axially symmetric.

  In the present embodiment, the end face of the optical fiber 25 is described using an aspect in which the end face of the optical fiber 25 is moved along the processing progress direction PD. However, the end face of the optical fiber 25 is moved relative to the substrate 60 to be processed. If it is, it will not be restricted to this. For example, the holding unit 1 may be moved along the processing progress direction PD, or both the holding unit 1 and the end face of the optical fiber 25 may be moved along the processing progress direction PD. In the present embodiment, the end face of the optical fiber 25 is described using an aspect in which the end face is moved in a direction orthogonal to the machining progress direction PD. However, if the movement direction includes a component orthogonal to the machining progression direction PD, It is not limited to this. For example, the end face of the optical fiber 25 may be moved obliquely in the processing progress direction PD (see FIG. 2B).

  In the above description, the image forming lens 17 is composed of a single element. However, the present invention is not limited to this. The image forming lens 17 is composed of a plurality of lenses, and a laser is formed by the plurality of lenses. The light L may be imaged.

  In this embodiment, the actuator 10 is used as the fiber moving unit. However, as the actuator 10, a piezoelectric element, a linear motor, a linear coil, a cylinder, or the like can be used. By the way, it is preferable that the fiber moving portion is made of a small size, a high operation response, and a high operation speed. Further, the end face of the fiber 25 may be manually moved without using the actuator 10, and in this case, for example, the end face of the fiber 25 may be moved on a moving gantry (track).

  Next, the operation of the present embodiment having such a configuration will be described.

  First, a substrate to be processed 60 having a glass substrate 61 and a thin film 62 disposed on the glass substrate 61 is prepared. Thereafter, the substrate to be processed 60 is held by the holding unit 1. At this time, the processed substrate 60 is held by the holding unit 1 so that the thin film 62 is positioned below the glass substrate 61 (see FIG. 1).

  Next, a laser beam L is oscillated from the laser oscillator 21 in response to a signal from the control device 50 (see FIG. 1). At this time, the laser condition of the laser beam L is adjusted by the control device 50.

  Then, the laser light L oscillated from the laser oscillator 21 passes through the condenser lens 22 and is then guided in a plurality of (four in the present embodiment) optical fibers 25. Thereafter, the laser beam L is irradiated to the outside from the end face of the optical fiber 25, and the thin film 62 is processed.

  At this time, the end face of the optical fiber 25 is moved along the processing progress direction PD by the processing moving unit 35. As a result, the thin film 62 is processed and removed along the processing progress direction PD, and a scribe line is formed on the thin film 62. Will be formed.

  According to the present embodiment, as shown in FIG. 2A, each of the actuators 10 is disposed at a position shifted from each other along the processing progress direction PD, and each of the end faces of the optical fiber 25 also extends along the processing progress direction PD. Are arranged at positions shifted from each other. Each of the actuators 10 can move the end face of the optical fiber 25 to a free position in a direction orthogonal to the processing progress direction PD.

  Therefore, when the substrate to be processed 60 is processed with the laser light L that has passed through the optical fiber 25, each of the end faces of the plurality of optical fibers 25 can be moved to a free position in a direction orthogonal to the processing progress direction PD. The width D (see FIG. 3) of the laser light L irradiated to the workpiece substrate 60 can be easily and freely changed. As a result, the width of the scribe line formed on the thin film 61 of the substrate to be processed 60 can be freely adjusted.

  Further, each of the end faces of the optical fiber 25 is disposed at a position shifted from each other along the processing progress direction PD, and the laser beams L irradiated from the end face of the optical fiber 25 are shifted from each other along the processing progress direction PD. Imaged. For this reason, the laser beam L can be irradiated to the substrate 60 to be processed with a time difference, and the substrate is not irradiated at the same time. As a result, since the laser light L is synthesized and not irradiated, even if the end face of the optical fiber 25 moves, the condition of the processing point does not change, and the processing state can be made constant regardless of the movement of the end face of the optical fiber 25. it can.

  In addition, according to the present embodiment, the width D of the laser light L can be freely changed by simply driving each of the actuators 10, so that the width D of the laser light L can be used without using a plurality of large devices. The laser irradiation apparatus having such a function can be manufactured at low cost.

  In the present embodiment, each of the actuators 10 moves each of the end faces of the optical fiber 25 while maintaining an axially symmetric positional relationship with respect to the optical axis of the imaging lens 17. For this reason, the symmetry of the intensity distribution of the laser beam L irradiated to the substrate to be processed 60 can be realized, and the substrate to be processed 60 can be processed with high accuracy.

  2A shows the optical fiber 25 whose end face is circular, but the present invention is not limited to this, and the end face of the optical fiber 25 may be rectangular as shown in FIG. . Thus, when using the optical fiber 25 which consists of a rectangular end surface, the linearity of the both edges of the scribe line formed in the thin film 62 can be implement | achieved, and it is preferable (refer FIG. 5).

  For example, in the case of using a method of processing by rotating a split lens / DOE optical system as in Patent Document 1, and using an optical fiber 25 having a rectangular end face, in the processing progress direction PD On the other hand, the beam shape changes, and the linearity of the edge of the scribe line is impaired (see FIG. 9B). On the other hand, according to the present embodiment, the linearity of the edge of the scribe line can be maintained even when the optical fiber 25 having a rectangular end face is used (see FIG. 5). The merit of using the optical fiber 25 composed of the end face can be fully utilized. Note that it is not always necessary to make the end face of the optical fiber 25 rectangular, and the cross section of the laser light L is rectangular by using a mask, optically shaping, or scanning the laser light L. It can be a shape. However, by making the end face of the optical fiber 25 rectangular, it is beneficial because the cross section of the laser light L can be made rectangular without shielding or scanning the laser light L.

  In the above description, the actuator 10 is connected to each optical fiber 25 and each end face of the optical fiber 25 is moved in a direction orthogonal to the processing progress direction PD. However, the present invention is not limited to this. For example, one of the plurality of optical fibers 25 is fixed without moving in a direction orthogonal to the processing progress direction PD, and other optical fibers 25 are fixed to the optical fiber 25 fixed in this way. You may use the aspect moved to the direction orthogonal to.

  In the above description, a plurality of laser oscillators 21 are used. However, the present invention is not limited to this. The laser light L emitted from one laser oscillator 21 is branched, and the branched laser lights L are separated from each other. An embodiment in which the light is irradiated from the end face through the optical fiber 25 may be employed.

  In the above description, the end face of the optical fiber 25 has been described using an aspect in which the end face is displaced along the processing progress direction PD. However, the present invention is not limited to this, and each end face of the optical fiber 25 or each of the plurality of optical fibers 25 is not limited thereto. A part of the end face may be located at a position overlapping in the direction along the processing progress direction PD (see FIGS. 6A and 6B and FIGS. 7A and 7B). Further, the intervals between the end faces of the optical fiber 25 may be formed with non-uniform pitches. Furthermore, the processing location on the substrate 60 to be processed by the laser light L irradiated from the end face of the optical fiber 25 may overlap in a direction orthogonal to the processing progress direction PD (see FIGS. 3 and 5). The end faces of the optical fiber 25 do not necessarily have to overlap in the direction orthogonal to the processing progress direction PD.

  When the end face of the optical fiber 25 is located at a position that overlaps in the direction along the processing progress direction PD, for example, the position of the actuator 10 may be shifted in the vertical direction (see FIG. 6B). The actuators 10 that move the end faces of the overlapping optical fibers 25 may be separated to some extent so as not to interfere with each other (see FIGS. 7A and 7B). 6 (a) and 7 (a) are upper plan views showing the arrangement positions of the end faces of the actuator 10 and the optical fiber 25. FIGS. 6 (b) and 7 (b) are diagrams respectively. It is the front view which looked at 6 (a) and Drawing 7 (a) from the direction of arrow B.

1 Holding part 10 Fiber moving part (actuator)
17 Imaging Lens 21 Laser Oscillator 25 Optical Fiber 35 Processing Moving Unit 50 Control Device 60 Substrate 61 Glass Substrate (Substrate)
62 Thin film L Laser light

Claims (8)

A laser oscillator that oscillates laser light;
A plurality of optical fibers for guiding laser light oscillated from the laser oscillator and irradiating the laser light to the outside from an end face;
A processing moving unit that moves the end face of the optical fiber relative to the object to be processed along the processing progress direction; and
One imaging lens into which each of the laser beams irradiated from the end face of the optical fiber is incident;
A fiber moving unit connected to at least one of the plurality of optical fibers and moving an end face of the optical fiber in a direction including a component orthogonal to the processing progress direction;
Equipped with a,
The laser irradiation apparatus according to claim 1, wherein end faces of the optical fibers are arranged at positions shifted from each other along a processing progress direction .   The laser irradiation apparatus according to claim 1, wherein the fiber moving unit moves the end face of the optical fiber while maintaining an axially symmetric positional relationship with respect to the optical axis of the imaging lens.   The said fiber moving part is connected with each of each optical fiber, and each of the end surface of this optical fiber is moved to the direction containing the component orthogonal to the said process progress direction, Either of Claim 1 or 2 characterized by the above-mentioned. Laser irradiation device.   3. The laser irradiation apparatus according to claim 1, wherein at least one of the plurality of optical fibers is fixed without moving in a direction including a component orthogonal to the processing progress direction. 4. .   The laser irradiation apparatus according to claim 1, wherein an end face of the optical fiber has a rectangular shape. Machining spot of the object to be processed on the body by the laser light irradiated from the end face of the optical fiber, as claimed in any one of claims 1 to 5, characterized in that overlap in a direction perpendicular to the working direction of travel Laser irradiation device. After guiding laser light oscillated from a laser oscillator in a plurality of optical fibers and irradiating the laser light to the outside from each of the end faces of the optical fiber, the laser light is incident on one imaging lens, and then And imaging the laser beam on the object to be processed;
Moving the end face of the optical fiber along the processing progress direction relative to the object to be processed;
Moving at least one end face of the plurality of optical fibers in a direction including a component orthogonal to the processing progress direction;
With
The laser irradiation method according to claim 1, wherein the end faces of the optical fibers are arranged at positions shifted from each other along the processing progress direction .   The laser irradiation method according to claim 7, wherein the end face of the optical fiber is moved while maintaining an axially symmetric positional relationship with respect to the optical axis of the imaging lens.

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