JP5505616B2 - Gas analyzer - Google Patents

Description

  A gas separation channel is used to analyze the various gas components separated from each other using a gas separation channel that separates the various gas components in the gas in the direction of the gas flow. Related to gas analyzers.

  A gas containing a plurality of gas components in a flow path of a gas component separation tube containing beads that contain or have been coated with a drug that absorbs and desorbs various gas components of the gas. A gas component separation technique that separates a plurality of gas components in a gas by separating them from each other and discharging them with a time difference is known as gas chromatography.

  A plurality of gas components of the gas discharged from the gas component separation pipe at the different times can be detected by known analysis means and analyzed for type and concentration.

  As these various known analysis means, a thermal conductivity detector, a hydrogen flame detector, and a mass spectrometer are well known, and generally a simple thermal conductivity detector and a hydrogen flame detector. A type detector is used.

  In the thermal conductivity type detector, the carrier gas containing the various gas components discharged as described above is sprayed on the detection unit, and the value of the thermal conductivity changes depending on the type and amount (concentration) of the gas component. Is used.

  In the hydrogen flame utilizing detector, the carrier gas containing each of the various gas components discharged as described above is blown to the hydrogen flame, and as a result, the hydrogen gas depends on the type and amount (concentration) of the blown gas components. It takes advantage of changes in the flame spectrum.

  An example of such a gas analyzer is disclosed in Japanese Patent Laid-Open No. 55-94159 (Patent Document 1).

  Gas chromatography equipped with a detector using a surface acoustic wave element has been put into practical use. By using a surface acoustic wave resonator as a detector and exposing the gas to be analyzed to the region where the surface acoustic wave propagates, the propagation state of the surface acoustic wave changes and the resonance frequency changes based on it. Yes. A circuit that can measure without burning gas and measures the resonance frequency is inexpensive and small in size, and is therefore used as a portable gas analyzer.

  A spherical surface acoustic wave element is used instead of the conventional surface acoustic wave element described above, and combined with a gas separation channel created by grooving a flat wafer substrate using a micromachining microfabrication technique and bonding the glass substrate together Further, a smaller and more accurate gas chromatography has been proposed in International Patent WO 2008 / 056458A1 (Patent Document 2).

  Unlike the conventional planar surface acoustic wave element, the spherical surface acoustic wave element does not have an electrode pattern called a reflector. It is also possible to measure the type and partial pressure of gas with high accuracy by measuring the amount of attenuation of strength when a surface acoustic wave is propagated along a spherical surface for a long distance. There are various types.

JP-A-55-94159 WO 2008 / 05645A1 publication

  In the conventional gas analyzer as described above, a gas separation tube including a bead containing a drug that exhibits different holding times according to the type of gas component is applied to the elongated inner surface, or containing or applied with the drug. In doing so, not only is the work of selecting and using a gas separation tube coated with a medicine suitable for separating more accurately according to the gas component to be analyzed, but also carrying the gas separation tube, It is difficult to reduce the size.

  The gas separation tube can be miniaturized by finely processing (micromachining) the gas separation channel on the silicon substrate by using a photolithography technique.

  For the above-described analysis, the gas separation tube must be combined with known analytical means that are large and cumbersome to operate, such as a thermal conductivity detector, a hydrogen flame detector, and a mass spectrometer. In addition to the above gas separation tube, it is complicated to carry these known analytical means.

  In addition, the thermal conductivity detector and the hydrogen flame detector are not very high in measurement accuracy, or there are restrictions on the types of gas components to be analyzed.

Even if a small gas separation flow path having a cross section of 1 mm ² or less is realized by laminating a silicon wafer or a metal flat member, a relatively large connecting part for entering and discharging gas is required. In particular, when a plurality of gas separation channels are connected in series, the number of gas connection parts increases, making it difficult to reduce the size. Controlling the temperature of the plurality of gas separation flow paths, the connecting portions attached to them, and the detector to a constant temperature requires a large temperature control case and makes it difficult to save power.

  In particular, since the spherical surface acoustic wave element generally has temperature dependency, the quality of the temperature control directly affects the measurement accuracy, which has been a problem for higher accuracy.

Further, it is difficult to install a surface acoustic wave element in a small gas flow path having a cross section of 1 mm ² or less, because at least the conventional planar type surface acoustic wave element is difficult to operate. Since the connection of high-frequency signals required for the above requires a complicated structure, it is difficult to reduce the size and the manufacturing cost increases.

  The present invention has been made under the circumstances described above, and the object of the present invention is to simplify the structure and improve operability and portability as compared with the prior art, and to improve the accuracy of gas component analysis. It is an object of the present invention to provide a gas analyzer that uses a gas separation flow path based on a gas chromatography analysis method that can separate various gas components in a gas from each other at low cost.

A gas analyzer according to the present invention includes: a main body having a first body member having a surface on which a gas separation channel is formed as a groove; and a groove of the gas separation channel on the one surface fixed to the one surface of the first body member. The gas separation flow path of the main body has a gas inlet and a gas outlet, and has various gas components to be analyzed. Gas is supplied from the gas inlet to the gas separation channel together with the carrier gas, and various gas components in the gas and chemicals that absorb and desorb are contained in the gas separation channel, thereby changing the type of gas component Depending on the time of passage through the gas separation flow path, the various gas components are separated from each other;
In addition, the main body includes a spherical outer circumferential circle having a maximum diameter at a predetermined position of the gas separation channel, and the surface acoustic wave can be excited and the excited surface acoustic wave is generated. A base having at least one annular region capable of propagating, and a surface acoustic wave is excited in the annular region of the substrate, and the excited surface acoustic wave circulates along the extending direction of the annular region. A spherical surface acoustic wave element having surface acoustic wave / excitation / detection means for detecting a surface acoustic wave after circulation and generating an electrical signal corresponding to the detected surface acoustic wave;
A spherical surface acoustic wave element is a surface acoustic wave that circulates along the extending direction of an annular region of a substrate, sequentially contacting a gas component in a gas separation channel, and depending on the type and concentration of the contacted gas component. Detecting changes in surface acoustic waves as changes in electrical signals,
It is characterized by that.

  Each of the main body and the spherical surface acoustic wave element including such a gas separation channel can be provided at a low cost with a simple configuration, and the spherical surface acoustic wave element used as the gas component analysis means is It can be easily arranged at a predetermined position in the gas separation channel. That is, the combination of the substrate including the gas separation flow path and the spherical surface acoustic wave element has much improved operability and portability as compared with the conventional combination of the gas component separation tube and the analysis means described above. The spherical surface acoustic wave element used as the gas component analysis means is much smaller than the conventional analysis means described above and can be installed in the flow path. Can be analyzed. Forming a detector consisting of spherical surface acoustic wave elements inside the gas separation channel keeps the temperature of the detector the same as the gas separation channel without using additional temperature control means, resulting in higher accuracy of measurement. To do.

  Detecting a specific gas component with high sensitivity by forming a sensitive film with different characteristics depending on the type of gas component in an annular region where surface acoustic waves can be excited and propagated on the surface of a spherical surface acoustic wave device It is possible to detect a specific gas component with high sensitivity by changing the type of the sensitive film to be formed, or by comprehensively analyzing the responses of a plurality of types of sensitive films using a principal component analysis method or the like.

  A plurality of annular regions as described above can be set on the surface of one spherical surface acoustic wave element. Therefore, different sensitive films can be formed in each of the plurality of annular regions. Also, different sensitive films are formed between the plurality of spherical surface acoustic wave elements in an annular region on the surface of each of the plurality of spherical surface acoustic wave elements. It can also be used in combination.

  In addition, a branch path is provided with a branch valve downstream of the spherical surface acoustic wave element in the gas separation channel of the main body, and the predetermined gas component is separated by flowing the predetermined gas component through the branch path according to the detection result of the spherical surface acoustic wave element. It is possible to take. If a further spherical surface acoustic wave element is provided in the branch path, it is possible to further analyze a predetermined gas component flowing in the branch path.

FIG. 1 is a schematic plan view of a gas analyzer according to a first embodiment of the present invention, in which a main body including a gas separation channel is along a paper surface in order to better show the gas separation channel. It is in cross section. 2 (A), (B), (C), and (D) are longitudinal sectional views schematically showing a plurality of stages in the manufacturing process of the main body including the gas separation channel of the gas analyzer of FIG. It is. FIG. 3 is a schematic perspective view of the spherical surface acoustic wave element of the gas analyzer of FIG. 4 is an enlarged front view schematically showing a spherical surface acoustic wave element used in a modification of the gas analyzer according to the first embodiment of the present invention shown in FIG. . FIG. 5 shows the spherical surface acoustic wave of FIG. 4 at a predetermined position of the gas separation channel of the main body used in the modification of the gas analyzer according to the first embodiment of the present invention shown in FIG. It is a longitudinal cross-sectional view which expands and shows schematically the process in which an element is arrange | positioned. FIG. 6 is a longitudinal sectional view schematically showing an enlarged main part of a modification of the gas analyzer according to the first embodiment of the present invention shown in FIG. FIG. 7 is a schematic plan view of a gas analyzer according to the second embodiment of the present invention, in which the main body including the gas separation channel is along the paper surface in order to better show the gas separation channel. It is in cross section. FIG. 8 shows a spherical surface acoustic wave element and an antenna arranged in a central portion of the gas separation channel of the main body and a predetermined position of the central portion in the gas analyzer according to the second embodiment of the present invention shown in FIG. It is a longitudinal cross-sectional view which expands and shows a means schematically. FIG. 9A shows a spherical surface acoustic wave at a predetermined position of the gas separation channel on the outer surface of the main body including the gas separation channel in the gas analyzer according to the modification of the second embodiment of the present invention. FIG. 10 is a plan view schematically showing external antenna means including a coiled antenna pattern formed to face an element; and FIG. 9B is according to a modification of the second embodiment of the present invention. FIG. 6 is a plan view schematically showing antenna means including a coiled antenna pattern formed on the inner surface of the gas separation channel of the main body corresponding to the spherical surface acoustic wave element at a predetermined position in the gas analyzer. . FIG. 10 corresponds to the spherical surface acoustic wave element at a predetermined position of the gas separation channel on the outer surface of the main body and the inner surface of the gas separation channel shown in FIGS. 9 (A) and (B). 5 is a longitudinal sectional view schematically showing an enlarged view of the external antenna means of the coiled antenna pattern formed and the relative position between the antenna means and the spherical surface acoustic wave element at a predetermined position of the gas separation channel. FIG. 11 is a plan view showing a part of the manufacturing process of the gas analyzer according to the third embodiment of the present invention, in which the antenna member is attached to the gas separation channel of the main body including the gas separation channel. In order to better show from when the spherical surface acoustic wave element is inserted until the spherical surface acoustic wave element with the antenna member is arranged at a predetermined position in the gas separation channel, the main body is cross-sectioned along the plane of the paper. ing. FIG. 12 shows a spherical elasticity with an antenna member arranged at a predetermined position in the vicinity of the outlet of the gas separation channel of the main body and in the vicinity of the outlet in the gas analyzer according to the third embodiment of the present invention of FIG. It is a longitudinal cross-sectional view which expands and shows a surface wave element roughly. FIG. 13 is an enlarged front view schematically showing a spherical surface acoustic wave element used in the gas analyzer according to the fourth embodiment of the present invention. FIG. 14 is an enlarged longitudinal sectional view schematically showing a state in which the spherical surface acoustic wave element of the gas analyzer according to the fourth embodiment of the present invention is arranged at a predetermined position of the gas separation channel of the main body. FIG. FIG. 15 is a schematic plan view of a gas analyzer according to a fifth embodiment of the present invention, in which a main body including a gas separation flow path has a horizontal cross section for clarifying the configuration. FIGS. 16A and 16B show the manufacturing process of the gas analyzer according to the sixth embodiment of the present invention, which includes a main body having a multi-layered long gas separation flow path in order to reduce the planar dimension. It is a schematic longitudinal cross-sectional view shown. FIG. 17 is a schematic longitudinal sectional view showing a gas analyzer according to a seventh embodiment of the present invention, which is provided with a main body in which three gas separation flow paths are formed in multiple layers in order to reduce the planar dimension.

[First Embodiment]
First, a gas analyzer 10 according to a first embodiment of the present invention will be described with reference to FIGS. 1 to 3.

  The gas analyzer 10 is: a conventionally known drug that has a gas inlet and a gas outlet and exhibits different holding times depending on the type of gas (gas component) is applied to the elongated inner surface, Or a main body 12 including a gas separation channel 12a containing a number of beads containing the drug or coated with the drug; and a spherical shape arranged at a predetermined position in the gas separation channel 12a of the main body 12 And a surface acoustic wave element 14.

At present, it is possible to finely process a gas separation channel having a cross-sectional area of 1 mm ² or less on a planar substrate such as silicon by using a photolithography technique. Alternatively, it is possible to form a gas separation flow path by forming a groove by etching a thin metal plate and then sealing the other surface by heat welding with another metal plate.

  Specifically, the main body 12 has a flat plate shape, has a flow path through which gas can flow between two planes of the main body 12, and one spiral gas separation flow path 12 a is formed. . The gas inlet and the gas outlet of the gas separation channel 12 a are opened at different positions on the thin side surface of the main body 12.

  The main body 12 according to this embodiment is manufactured by a manufacturing process schematically shown in FIGS. In this manufacturing process, first, as shown in FIG. 2A, first surface plate 12b having a predetermined size made of heat-resistant tempered glass such as Pyrex glass (registered trademark) having a thickness of 0.5 mm, for example. A first main body member in which the silicon wafer 12c is bonded to the plane is prepared. This joining is performed by anodic joining, for example. Next, as shown in FIG. 2B, the silicon wafer 12c of the first main body member is shown in a plane (outer plane) opposite to the first surface plate 12b in a spiral shape in FIG. A photosensitive resin resist pattern 12d corresponding to the extended pattern of the desired shape of the gas separation channel 12a is attached. Further, by etching the above-described opposite plane (outer plane) of the silicon wafer 12c through the resist pattern 12d, the above-described opposite side of the silicon wafer 12c as shown in FIG. The gas separation channel 12a is formed on the plane (outer plane). For the etching process, for example, an etching technique called DRIE (Deep Reactive Ion Etching) is used. Finally, after the resist pattern 12d is removed, as shown in FIG. 2D, the second surface plate 12e, which is the same as the first surface plate 12b, is formed on the opposite surface of the silicon wafer 12c described above ( The flat surface opening of the gas separation channel 12a on the opposite plane (outer plane) is closed by bonding to the outer plane). The bonding of the second surface plate 12e to the above-described opposite plane (outer plane) of the silicon wafer 12c is also performed by anodic bonding. The second surface plate 12e constitutes a second body member that constitutes the main body 12 in cooperation with the first body member (a combination of the first surface plate 12b and the silicon wafer 12c) described above.

  The method for manufacturing the main body 12 as described above with reference to FIGS. 2A to 2D is known as a micromachining technique called so-called micromachining, and includes a main body including a gas separation channel 12a. 12 can be precisely manufactured with dimensions of several centimeters square.

  The structure of the spherical surface acoustic wave element 14 is schematically shown in FIG. 3, and includes a spherical outer peripheral circle 16a formed of a part of a spherical shape so that the surface acoustic wave SAW can be excited. The substrate 16 having an annular region 16b capable of propagating the excited surface acoustic wave SAW, and the surface acoustic wave SAW excited by exciting the surface acoustic wave SAW in the annular region 16b of the substrate 16 A surface acoustic wave / excitation / detection means 18 that circulates along the extending direction of the annular region 16b and generates an electric signal corresponding to the surface acoustic wave SAW detected and detected by the surface acoustic wave 16b after the circulation. It is out.

The substrate 16 can be formed of a piezoelectric crystal material such as quartz, langasite, lithium niobate (LiNbO ₃ ), or lithium tantalate (LiTaO ₃ ). It is used. It is undesirable for the diameter of the piezoelectric crystal material used in this embodiment to take a large space as compared with the other parts of the gas separation channel because it complicates the processing process and changes the gas flow. Or less, and more desirably 0.8 mm or less.

  When the spherical base 16 is formed of the piezoelectric crystal material, along the outer peripheral line formed by the intersection of the plane with the predetermined crystal axis of the piezoelectric crystal material, for example, the Z axis, as a normal line and the above-mentioned spherical base. It has been found that when a surface acoustic wave SAW is excited and propagated under a predetermined condition, the surface acoustic wave SAW can be repeatedly circulated along the line without being diffused in a direction perpendicular to the line. The line at this time is the outermost circle 16a having the maximum diameter, and the range in which the surface acoustic wave SAW propagates on both sides of the line under the predetermined condition is an annular region 16b.

  When the spherical base 16 is formed of the piezoelectric crystal material, a plurality of the maximum diameter outer peripheral circles 16a that can be formed on the outer surface of the base 16, that is, the annular region 16b, can be set. The possible number depends on the type of piezoelectric crystal material.

  In the following description, the use of one annular region 16b will be described for easy understanding of the story.

  The predetermined condition described above is known from, for example, International Publication No. WO 01/45255 A1, and the radius of the outermost circle 16a having the maximum diameter, the surface acoustic wave SAW excited by the surface acoustic wave / excitation / detection means 18, and the like. It is determined by the frequency and the width of the surface acoustic wave SAW over both sides of the outermost circle 16a having the maximum diameter.

  The surface acoustic wave SAW which is excited by the annular region 16b of the base 16 and propagates and circulates along the extending direction of the annular region 16b has an environment where it contacts, that is, an environment where the annular region 16b contacts. If it changes, a change occurs in the propagation speed and the attenuation rate of the intensity, and this change becomes larger as the number of turns increases. That is, as the number of laps becomes larger, a slight change in the environment can be detected, and the change in the environment can be detected with high accuracy.

  This means that when the spherical surface acoustic wave element 14 is used as a detector for detecting a change in the environment, a spherical elastic surface is formed in the annular region 16b in which the surface acoustic wave SAW propagates and circulates in the base 16. It is necessary to prevent an object other than the object detected by the wave element 14 from contacting. On the contrary, even if the above object is brought into contact with a region other than the annular region 16b capable of propagating the surface acoustic wave SAW in the base 16, that is, both sides of the annular region 16b, the elastic surface that circulates around the annular region 16b. It has no effect on the wave SAW. That is, it can be included in a fine flow path manufactured by micromachine technology.

  Therefore, the base 16 is supported by another object in a region other than the annular region 16b, that is, on both sides of the annular region 16b. Further, the base 16 may have any shape other than the annular region 16b, that is, both sides of the annular region 16b. For example, the base 16 has a disk shape in which both sides of the annular region 16b are shaped in parallel to each other. I can do it.

  The cross section of the gas separation channel manufactured by microfabrication of the planar member is generally not a circle but a rectangle having a long side in the thickness direction of the planar member. doing. Even if a conventional planar surface acoustic wave device is inserted into the gas separation channel, a large space must be prepared on the channel because it has two large reflectors, resulting in performance. It is hard to lead to improvement. In other words, it is a spherical surface acoustic wave element that can be introduced into a gas separation channel manufactured using a planar member and exhibit high performance, and the advantage of a spherical surface acoustic wave element is greater if it is a disk shape. .

  In this embodiment, the surface acoustic wave / excitation / detection means 18 is provided by an interdigital electrode formed on the outermost circle 16 a having the maximum diameter in the annular region 16 b of the base 16. The interdigital electrode can be easily formed with a desired dimension at a desired position in the annular region 16b of the base 16 by a known photolithography method.

  The elastic physical properties of the surface of the substrate 16 on which the interdigital electrode is formed and the interval at which the plural electrode branches of the interdigital electrode are arranged mutually are excited to a desired position in the annular region 16b by the interdigital electrode. The frequency of the surface acoustic wave SAW is determined, and the length of the portion of the interdigital electrode branches facing each other becomes the width of the surface acoustic wave SAW excited by the interdigital electrode in the annular region 16b. . In this embodiment, the center of the interdigital electrode is placed on the outermost circle 16a having the maximum diameter, and the plurality of electrode branches are orthogonal to the outermost circle 16a having the maximum diameter.

  In recent years, the path in which the surface acoustic wave actually circulates along the outer circumference circle 16a having the maximum diameter has slightly meandered with respect to the outer circumference circle 16a, and the interdigital electrode is located on the actual meandering circumference path. For example, it is known that the center of the interdigital electrode may not necessarily be on the maximum outer peripheral line, but these meanders are slight.

  In addition, the interdigital electrode of this embodiment performs excitation and detection of surface acoustic waves. However, excitation and detection of surface acoustic waves can be performed by different interdigital electrodes, and external connection terminals of individual interdigital electrodes. May be more than two, including two.

  The pair of external connection terminals 18a and 18b of the interdigital electrodes extend on both sides of the annular region 16b of the base body 16, and the outer peripheral circle 16a having the maximum diameter is assumed to be the earth's equator, assuming the spherical base body 16 as the earth. In this case, the external connection part having a relatively large area is provided at the part corresponding to both poles.

  In this embodiment, the spherical surface acoustic wave element 14 is disposed in the flow path near the gas outlet of the gas separation flow path 12 a of the main body 12.

  The width of the cross section in the vicinity of the gas outlet of the gas separation channel 12a of the main body 12 is larger than the width of the cross section of the region other than the vicinity of the gas outlet of the gas separation channel 12a. The spherical base 16 is set to be larger than the diameter of the outermost circle 16a having the maximum diameter, and the gas flowing in the gas separation channel 12a to the vicinity of the gas outlet does not stay in the vicinity of the gas outlet. It is shaped like this. A pair of portions opposed to each other on the inner surface defining the vicinity of the gas outlet of the gas separation channel 12a includes a silicon wafer as a first body member in the manufacturing process of the body 12 shown in FIG. Before the planar opening of the gas separation channel 12a formed in 12c is covered with the second surface plate member 12e, a pair of external extension wires 20a and 20b are formed. The pair of externally extending wirings 20a and 20b extends to the periphery of the gas outlet on the thin side surface of the silicon wafer 12c in which the gas separation channel 12a is formed in the main body 12.

  When a conventionally known drug that exhibits different holding times depending on the type of gas (gas component) is applied to the inner surface of the gas separation channel 12a, the manufacturing process of the main body 12 illustrated in FIG. Then, after the planar opening of the gas separation channel 12a formed in the silicon wafer 12c of the first main body member is covered with the second surface plate member 12e, the above-mentioned application is performed by injecting a chemical solution containing a drug from the gas inlet. Is called.

  In particular, when a sensitive film is formed in the annular region 16b on the outer surface of the surface acoustic wave element 14, the injection is performed before the chemical solution reaches the position of the spherical surface acoustic wave element in the gas separation path 12a. By discharging the stop chemical solution again from the gas inlet, it is possible to prevent the influence on the characteristics of the sensitive film and the surface acoustic wave element. To which position in the gas separation path 12a the chemical solution has been injected can be determined, for example, by measuring the amount of the injected chemical solution, or can be observed from the outside of the surface plate using an ultrasonic flaw detector. Is possible.

  The sensitive film may slow down the propagation speed of the surface acoustic wave SAW propagating along the annular surface region 16b, for example, in accordance with the mass increased by adsorbing a predetermined gas component on the surface. Alternatively, the propagation of the surface acoustic wave SAW propagating in the annular surface region 16b is performed by storing a predetermined gas component in the sensitive film and changing the mechanical rigidity of the sensitive film in accordance with the amount of occlusion. The speed and attenuation rate may be changed. Furthermore, an endothermic or exothermic reaction is caused according to the amount of the predetermined gas component reacted by reacting with the predetermined gas component, and the elasticity propagating through the annular surface region 16b according to the amount of the endothermic or exothermic reaction. The propagation speed of the surface wave SAW may be changed. The sensitive membrane needs to be a material that reacts reversibly.

For example, as such a sensitive film, hydrogen (H ₂ ) is occluded to form a hydride to change mechanical properties, such as palladium (Pd), ammonia (NH ₃ ) having high adsorptivity to platinum (Pt), hydrogen Tungsten oxide (WO ₃ ), carbon monoxide (CO), carbon dioxide (CO ₂ ), sulfur dioxide (SO ₂ ), nitrogen dioxide (NO ₂ ), etc. that selectively adsorb fluorides, etc. It has been known.

  At the inner ends of the pair of external extension wires 20a and 20b in the vicinity of the gas outlet of the gas separation channel 12a, the silicon wafer 12c of the first main body member is attached to the silicon wafer 12c of the main body 12 shown in FIG. Before the planar opening of the formed gas separation channel 12a is covered with the second surface plate 12e, the surface acoustic wave / excitation / excitation of the spherical surface acoustic wave element 14 inserted in the vicinity of the gas outlet of the gas separation channel 12a. The external connection portions of the pair of external connection terminals 18a and 18b of the interdigital electrode of the detection means 18 are electrically and mechanically connected. Such electrical and mechanical connection is achieved by, for example, the elasticity of the material of the external connection portions of the pair of external connection terminals 18a and 18b of the interdigital electrode and the pair of external extension wires 20a and 20b in the vicinity of the gas outlet. It is performed by a known pressure-welding method or a known electrical / mechanical connection means such as solder or conductive adhesive.

  The annular region 16b of the base body 16 of the spherical surface acoustic wave element 14 arranged in the vicinity of the gas outlet of the gas separation channel 12a, together with the surface acoustic wave / excitation / detection means 18, is a gas separation channel 12a. Do not touch the inner surface.

  Thereafter, the planar opening of the gas separation channel 12a formed in the silicon wafer 12c of the first body member in the manufacturing process of the body 12 shown in FIG. 2 is covered with the second surface plate 12e (FIG. 2). (See (D)).

  Instead of being applied to the inner surface of the gas separation channel 12a except for the vicinity of the gas outlet, a conventionally known drug that exhibits different retention times depending on the type of gas (gas component) as described above, When a large number of beads coated with the drug are held in the gas separation flow path 12a, the gas formed on the silicon wafer 12c of the first main body member in the manufacturing process of the main body 12 shown in FIG. After the planar opening of the separation channel 12a is covered with the second surface plate 12e (see FIG. 2D), the beads are supplied into the gas separation channel 12a through the gas inlet of the gas separation channel 12a. The As a result, the numerous beads described above are held in the gas separation channel 12a between the spherical surface acoustic wave element 14 near the gas outlet and the gas inlet.

  One of the outer ends of the pair of external extension wires 20a and 20b is grounded, and the other is connected to the high-frequency signal / transmission / reception means 22, and the high-frequency signal / transmission / reception means 22 is further controlled / analyzed. 24 is connected. The control / analysis unit 24 controls the operation of the high-frequency signal / transmission / reception unit 22, and the high-frequency signal / transmission / reception unit 22 controls the surface acoustic wave / excitation / detection unit 18 of the spherical surface acoustic wave element 14 at a desired timing. By applying a predetermined high-frequency signal, the surface acoustic wave / excitation / detection means 18 excites and propagates a predetermined surface acoustic wave SAW to the annular region 16b of the base 16 along the extending direction of the annular region 16b. Further, the high-frequency signal generated by the surface acoustic wave / excitation / detection means 18 corresponding to the surface acoustic wave SAW that circulates around the annular region 16b of the base 16 is received and analyzed.

  When a large number of beads containing the drug or coated with the drug are held in the gas separation channel 12 a, the beads adjacent to the spherical surface acoustic wave element 14 are formed on the spherical surface acoustic wave element 14. There is a possibility of contact with the annular region 16b of the substrate 16 and the surface acoustic wave / excitation / detection means 18, and a barrier for preventing this may be formed in the gas separation channel, or a member corresponding to the barrier Can be fixed to the spherical surface acoustic wave element. However, the area of the contact point is smaller than the entire area of the surface area wave / excitation / detection means 18 as well as the entire area of the annular region 16b, and is constant. The influence on the surface acoustic wave excited and propagated by the excitation / detection means 18 in the annular region 16b of the base 16 is very small.

  The analysis described above can be a change in intensity or speed of the received high-frequency signal, and the change in speed can be known from the change in phase of the received high-frequency signal. Here, the phase of the high-frequency signal is the position of the predetermined high-frequency signal on the annular region 16b at a predetermined time, and the predetermined high-frequency signal is applied to the surface acoustic wave / excitation / detection means 18 to form an annular shape. From when a predetermined surface acoustic wave is excited on the region 16b to when the surface acoustic wave / excitation / detection means 18 receives the predetermined surface wave that has circulated a predetermined number of times around the annular region 16b. If the time is measured, the position (phase) of the predetermined surface acoustic wave on the annular region 16b at the time when the predetermined time elapses from the time when the predetermined surface acoustic wave is excited as described above is, for example, It can be easily obtained using Fourier analysis, quadrature detection, wavelet transform, or the like. These methods are known and need no explanation.

  A carrier gas supply source 26 is connected to the gas inlet of the gas separation channel 12a. Between the gas inlet and the carrier gas supply source 26, various types of gas to be analyzed by the gas analyzer 10 are provided. A sample injection means 28 for injecting a gas sample containing the gas components into the carrier gas flowing from the carrier gas supply source 26 toward the gas inlet of the gas separation channel 12a is connected. Here, the carrier gas alters the inner surface of the gas separation channel 12a, the aforementioned drug applied to the inner surface, or a large number of the aforementioned beads held in the gas separation channel 12a, or is injected into the carrier gas. Various gas components in the sample to be altered, the base 16 of the spherical surface acoustic wave element 14 and the surface acoustic wave / excitation / detection means 18 arranged in the vicinity of the outlet of the gas separation channel 12a are altered, or in the vicinity of the outlet. The pair of external extension wirings 20a and 20b is selected so as not to degenerate.

  The sample injection means 28 is electrically connected to the control / analysis means 24 and notifies the control / analysis means 24 of the start of sample injection, or the sample injection means 28 performs injection in accordance with instructions from the control / analysis means 24.

  Next, the operation of the gas analyzer 10 according to the first embodiment of the present invention configured as described above will be described.

  While the carrier gas is being supplied from the carrier gas supply source 26 to the gas inlet of the gas separation channel 12a at a predetermined speed, the sample injection means 28 is a gas sample containing a gas component to be analyzed in the gas analyzer 10. Inject.

  While the gas component of the gas sample flows through the gas separation channel 12a, the flow of the carrier gas flows due to the difference in adsorption and detachment reactions with respect to the drug on the inner surface of the gas separation channel 12a or the drug held on the beads. Various gas components are separated from each other in the direction, and as a result, the time (holding time) required for passing through the gas separation channel 12a is different.

  If the various gas components are known in advance, the approximate time for the various gas components to reach from the gas inlet to the gas outlet of the gas separation channel 12a can be known in advance.

  The control / analyzing unit 24 receives the signal indicating the start of sample injection from the sample injection unit 28 or instructs the sample injection unit 28 to start the sample injection and operates the spherical surface acoustic wave element 14 to operate the spherical surface acoustic wave element 14. The transmission / reception means 22 is operated to excite the surface acoustic wave SAW that circulates along the extending direction of the annular region 16b of the base 16 and starts to continuously analyze the change in its output. The mutually separated gas components in the carrier gas flowing in the gas separation channel 12a arrive at the spherical surface acoustic wave element at a time according to the type of the gas component, and the surface acoustic wave according to the type and concentration of the gas component. A change in SAW is detected as a change in intensity or speed (phase) of the corresponding high-frequency electrical signal.

  The control / analyzing means 24 is based on changes in the strength (attenuation rate) and speed (phase) of the high-frequency electrical signal sequentially sent from the spherical surface acoustic wave element 14 via the high-frequency signal / transmitting / receiving means 22. The concentration of each gas component in contact with the surface acoustic wave SAW that is circulating around the extending direction of the annular region 16b of the base 16 in the vicinity of the gas outlet of the gas separation channel 12a is analyzed.

  The control / analysis unit 24 can include a known display unit (not shown) for displaying the analysis result, and can also include a known recording unit (not shown) for recording the analysis result.

  As described above, since a plurality of annular regions 16b can be set on the outer surface of the base 16 of the spherical surface acoustic wave element 14, different sensitive films are formed in each of the plurality of annular regions 16b. The surface acoustic wave / excitation / detection means 18 can be provided in each of the annular regions 16b. In that case, a plurality of external extension wires for the plurality of surface acoustic wave / excitation / detection means 18 are naturally required in the vicinity of the gas outlet of the gas separation channel 12a.

  Also, a plurality of spherical surface acoustic wave elements 14 each having a different sensitive film provided in an annular region on each outer surface may be disposed near the gas outlet of the gas separation channel 12a. I can do it.

[Modification of First Embodiment]
Next, a modification of the gas analyzer 10 according to the first embodiment of the present invention shown in FIGS. 1 to 3 will be described with reference to FIGS. 4 to 6 in the accompanying drawings.

  The modified gas analyzer 10 'differs from the gas analyzer 10 according to the first embodiment of the present invention described above with reference to FIGS. 1 to 3 in that the elasticity of the spherical surface acoustic wave element 14' is different. The surface acoustic wave / excitation / detection means 18 'and the spherical surface acoustic wave element 14' are arranged in the vicinity of the gas outlet of the gas separation channel 12'a of the main body 12 '.

  In this modification, the same components as those of the gas analyzer 10 according to the first embodiment have the same reference numerals as those assigned to the corresponding components of the gas analyzer 10 according to the first embodiment. Reference numerals are assigned and detailed description is omitted.

  As well shown in FIG. 4, the pair of external connection terminals 18'a and 18'b of the interdigital electrode of the surface acoustic wave / excitation / detection means 18 'of the modified spherical surface acoustic wave element 14' The base region 16 extends to one pole of the annular region 16b, and has an external connection portion having a relatively large area independent of each other.

  As well shown in FIG. 5, the gas outlet of the gas separation channel 12′a formed in the silicon wafer 12′c of the main body 12 ′ of the modified example opens to the thin side surface of the silicon wafer 12′c. In addition, the outlet opening 12′f is formed in the portion of the second surface plate 12′e corresponding to the portion serving as the gas outlet in the plane opening of the gas separation channel 12′a formed in the silicon wafer 12′c. Is provided by being formed.

  In the main body 12 'of the modified example, the portion of the first surface plate member 12b facing the gas outlet of the gas separation channel 12'a has the second surface plate member 12'e on the above-described outer plane of the silicon wafer 12'c. After the bonding, the recess 30a for receiving the pole on the other side of the annular region 16b in the base body 16 of the spherical surface acoustic wave element 14 'is provided through the outlet opening 12'f of the second surface plate member 12'e. The accompanying pedestal 30 is fixed, and the pole on the other side of the annular region 16b in the base 16 of the spherical surface acoustic wave element 14 'is seated in the recess 30a of the pedestal 30, and known fixing means such as an adhesive, It is fixed by.

  Thereafter, as shown in FIG. 6, the inner end portion of the cylindrical outlet nozzle 32 is fitted into the outlet opening 12′f of the second surface plate 12′e, and a known fixing means such as an adhesive is used. , Fixed by. The outlet nozzle 32 is formed of a non-conductor such as ceramic or synthetic resin, and is independent from the inner end to the outer end of the inner hole 32a at two positions spaced apart from each other in the circumferential direction in the inner hole 32a. A pair of external extension wires 32b and 32c extending in this manner are formed.

  The inner ends of the pair of externally extending wires 32b and 32c are a pair of poles on one side of the annular region 16b of the base 16 of the spherical surface acoustic wave element 14 'seated in the recess 30a of the base 30. The external connection terminals 18'a and 18'b are pressed and electrically connected to the pair of external connection terminals 18'a and 18'b. One of the outer ends of the pair of external extension wirings 32 b and 32 c is grounded, and the other is electrically connected to the control / analysis unit 24 via the high-frequency signal / transmission / reception unit 22.

  The modified gas analyzer 10 ′ thus configured operates in the same manner as the gas analyzer 10 according to the first embodiment of the present invention described above with reference to FIGS. 1 to 3.

[Second Embodiment]
Next, a gas analyzer 40 according to a second embodiment of the present invention will be described with reference to FIGS. 7 and 8 in the accompanying drawings.

  The gas analyzer 40 according to this embodiment differs from the gas analyzer 10 according to the first embodiment of the present invention described above with reference to FIGS. In addition to the arrangement position of the spherical surface acoustic wave element 14 in the separation channel 12 ″ a and the fixing method to the arrangement position, the operation of the surface acoustic wave / excitation / detection means 18 of the spherical surface acoustic wave element 14 is controlled. Is the method.

  The spherical surface acoustic wave element 14 used in the gas analyzer 40 according to this embodiment is the same as the spherical surface acoustic wave element 14 used in the gas analyzer 10 according to the first embodiment of the present invention described above. The spherical surface acoustic wave element 14 is the same in a predetermined position in an intermediate region between the gas inlet vicinity region and the gas outlet vicinity region of the gas separation channel 12 ″ a of the main body 12 ″, In the embodiment, it is arranged at substantially the center.

  Various types of gases that have flowed into the gas separation flow path 12 ″ a by attaching a thermal conductivity detector, a hydrogen flame detector, or a mass spectrometry detector to the gas outlet of FIG. You can get even more information about the ingredients.

  A pair of external connection terminals 18a of interdigital electrodes of the surface acoustic wave / excitation / detection means 18 of the spherical surface acoustic wave element 14 at the predetermined position on the inner surface of the gas separation channel 12''a of the main body 12 ''; A pair of spaced apart parts corresponding to 18b are formed on the silicon wafer 12''c of the first body member in the manufacturing process of the main body 12 '' similar to the manufacturing process of the main body 12 shown in FIG. Before the planar opening of the formed gas separation channel 12 "a is covered with the second surface plate member 12" e, the antenna means 42 is formed of the antenna material.

  In the present invention, the antenna means means a wiring pattern or member made of a conductor for receiving an electromagnetic wave and generating a high frequency corresponding to the received electromagnetic wave or emitting an electromagnetic wave in response to the high frequency signal when the high frequency signal is supplied. Sure.

  As shown in FIG. 8, at a predetermined position facing the pair of antenna means 42, there are recesses 42a in which the poles on both sides of the annular region 16b of the base 16 of the spherical surface acoustic wave element 14 are seated. Is formed.

  Planar opening of the gas separation channel 12 "a formed in the silicon wafer 12" c of the first main body member in the manufacturing process of the main body 12 "similar to the manufacturing process of the main body 12 illustrated in FIG. Is covered with the second surface plate 12 ″ e, the spherical surface acoustic wave element 14 is disposed at the predetermined position of the gas separation channel 12 ″ a. At this time, one of the poles of the annular region 16b of the base 16 of the spherical surface acoustic wave element 14 is seated in the recess 42a of the one antenna means 42, and the surface acoustic wave / excitation disposed on the one of the poles. / One of the pair of external connection terminals 18a and 18b of the interdigital electrode of the detecting means 18 is electrically and mechanically connected. Such an electrical and mechanical connection is made by known electromechanical connection means such as a conductive adhesive.

  After manufacturing the main body 12 ″, a conventionally known drug that exhibits different holding times depending on the type of gas (gas component) is injected together with the solution from the gas inlet of the gas separation channel 12 ″ a to separate the gas. It is applied to the inner surface of the path 12 ″ a. Furthermore, a conventionally well-known chemical | medical agent which exhibits different holding | maintenance time according to the kind (gas component) of gas is apply | coated to the inner surface of gas separation flow path 12''a from the said predetermined position to the gas inflow side as mentioned above. In the case where a large number of beads containing the drug or coated with the drug are held in the gas separation channel 12 ″ a instead of the predetermined position of the gas separation channel 12 ″ a as described above. After the spherical surface acoustic wave element 14 is disposed, the beads are supplied to the gas inlet side of the spherical surface acoustic wave element 14 at the predetermined position in the gas separation channel 12 ″ a. As a result, the above-described many beads are held on the gas inlet side of the spherical surface acoustic wave element 14 at the predetermined position in the gas separation channel 12a.

  Next, the planar opening of the gas separation channel 12 ″ a formed in the silicon wafer 12 ″ c of the first main body member is covered with the second surface plate material 12 ″ e, so that the other antenna means 42 The other pole of the annular region 16b of the base 16 of the spherical surface acoustic wave element 14 is seated in the recess 42a, and the interdigital electrode of the surface acoustic wave / excitation / detection means 18 disposed on the other pole is placed. The other of the pair of external connection terminals 18a and 18b is electrically and mechanically connected. Such electrical and mechanical connections can be achieved by, for example, pressure welding using the elasticity of the material of the pair of external connection terminals 18a and 18b of the interdigital electrodes and the pair of antenna means 42, or a conductive adhesive. It is performed by a known electromechanical connection means such as

  The annular region 16b of the base body 16 of the spherical surface acoustic wave element 14 thus arranged at the predetermined position of the gas separation channel 12 ″ a, together with the surface acoustic wave / excitation / detection means 18, is the gas separation channel 12. It does not touch the inner surface of ″ ′ a.

  The high-frequency signal / transmission / reception means 22 ′ of this embodiment includes a pair of antenna means 44 on the control / analysis means 24 ′ side that cooperates with a pair of antenna means 42 on the main body 12 ″ side.

  In this embodiment, the surface acoustic wave / excitation / detection means 18 and the high-frequency signal / transmission / reception means 22 ′ of the spherical surface acoustic wave element 14 are controlled / analyzed by a pair of antenna means 42 on the main body 12 ″ side. By bringing the pair of antenna means 44 on the 24 'side closer to each other, the antenna means 42, 44 are electromagnetically connected to each other through a surface plate material while being in a non-contact state.

  In this state, the control / analysis means 24 'controls the operation of the high-frequency signal / transmission / reception means 22', and the high-frequency signal / transmission / reception means 22 'controls the elasticity of the spherical surface acoustic wave element 14 at a desired timing. A predetermined high-frequency signal is applied to the surface wave / excitation / detection means 18 and the surface acoustic wave / excitation / detection means 18 applies a predetermined elasticity to the annular region 16b of the base 16 along the extending direction of the annular region 16b. The surface wave SAW is excited and propagated, and the high frequency signal generated by the surface acoustic wave / excitation / detection means 18 is received and analyzed in response to the surface acoustic wave SAW received around the annular region 16b of the base 16. To do.

  In addition, when a large number of beads containing the drug or coated with the drug are held in the gas separation channel 12 ″ a, the beads adjacent to the spherical surface acoustic wave element 14 are spherical surface acoustic waves. There is a possibility of contact with the annular region 16b of the base 16 of the element 14 and the surface acoustic wave / excitation / detection means 18, but the area of the contact point is not only the whole area of the annular region 16b but also the elasticity. The surface acoustic wave / excitation / detection means 18 is far smaller than the entire area of the surface wave / excitation / detection means 18 and is constant, so that the surface acoustic wave / excitation / detection means 18 is excited and propagated to the annular region 16b of the substrate 16. The influence on the surface acoustic wave is very small.

  During this time, various gas components in the sample from the sample injection means 28 that are supplied into the gas separation channel 12 ″ a together with the carrier gas from the carrier gas supply source 26 pass through the gas separation channel 12 ″ a. During the flow, the flow of the carrier gas in the direction of the carrier gas varies depending on the type of the gas, so that they are separated from each other, and the circles of the spherical surface acoustic wave element 14 at a predetermined position approximately at the center of the gas separation flow path 12 ″ a. It is sequentially brought into contact with the surface acoustic wave SAW that goes around the annular region 16b. The intensity, attenuation, and velocity of the surface acoustic wave SAW change according to the type and concentration of the gas component that is in contact, and this change is caused by changes in the strength and velocity (phase) of the high-frequency signal by the surface acoustic wave / excitation / detection means 18. As electromagnetically transmitted from the pair of antenna means 42 on the spherical surface acoustic wave element 14 side to the pair of antenna means 44 on the control / analyzing means 24 'side, and further controlled via the high frequency signal / transmitting / receiving means 22'. The concentration of each of the plurality of gas components transmitted to the analyzing unit 24 ′ and sequentially brought into contact with the surface acoustic wave SAW is analyzed by the controlling / analyzing unit 24 ′.

  The control / analysis unit 24 'can include a known display unit (not shown) for displaying the analysis result, and can also include a known recording unit (not shown) for recording the analysis result.

  The gas analyzer 40 of the second embodiment configured as described above operates in the same manner as the gas analyzer 10 according to the first embodiment of the present invention described above with reference to FIGS. 1 to 3. However, in the gas analyzer 40 of the second embodiment, the spherical surface acoustic wave element 14 is formed between the gas inlet vicinity region and the gas outlet vicinity region of the gas separation channel 12 ″ a of the main body 12 ″. Since it is arranged at a predetermined position in the intermediate region between them, in this embodiment, substantially in the center, there are a plurality of gas components in the sample flowing along with the carrier gas in the gas separation flow path 12 ″ a. There may be a case where there is a gas component that is not sufficiently separated when the gas separation flow path 12 ″ a reaches the approximate center.

  In that case, as shown in FIGS. 1 and 5, an additional spherical surface acoustic wave element 14 is disposed in the vicinity of the gas outlet of the gas separation channel 12 ″ a and the gas separation channel 12. The gas separation flow path 12 is formed by applying an additional agent as described above to the gas outlet side of the spherical surface acoustic wave element 14 at the predetermined position on the inner surface of ″ a or holding the beads described above. More detailed separation is performed on the gas outlet side than the spherical surface acoustic wave element 14 at the predetermined position on the inner surface of ″ ′ a, and then the additional spherical surface acoustic wave element 14 is additionally separated as described above. What is necessary is just to analyze as mentioned above about the gas component made.

  Further, in this embodiment, instead of the spherical surface acoustic wave element 14 of the gas analyzer 10 according to the first embodiment of the present invention described above with reference to FIGS. 1 to 3, with reference to FIGS. 4 to 6. The spherical surface acoustic wave element 14 ′ used in the modification of the first embodiment described above can also be used. In this case, the two external connection terminals 18'a and 18'b of the interdigital electrode 18 'are arranged only on one side of the annular region 16b on the outer surface of the base material 16 of the spherical surface acoustic wave element 14'. Therefore, the two external connections of the interdigital electrode 18 'on one side of the annular region 16b on the outer surface of the base material 16 of the spherical surface acoustic wave element 14' on the inner surface of the gas separation channel 12 "a Two antenna means 42 that are electrically connected to the two external connection terminals 18'a and 18'b are arranged at two positions corresponding to the terminals 18'a and 18'b. .

  By operating the spherical surface acoustic wave element via antenna means using an electromagnetic field, the detector can be installed at a position away from the inlet or outlet of the gas separation channel. Alternatively, it is possible to manufacture a gas separation channel and a main body including a detector at a low cost without the need for a manufacturing process for forming a through hole for extracting an electrode in a planar member.

“Modification of Second Embodiment”
A modification of the second embodiment will be described with reference to FIGS. 9A and 9B and FIG.

  In this modification, instead of the spherical surface acoustic wave element 14 of the gas analyzer 10 according to the first embodiment of the present invention described above with reference to FIGS. 1 to 3, the above-described modification is described with reference to FIGS. The spherical surface acoustic wave element 14 ′ used in the modified example of the first embodiment is used, and the spherical surface acoustic wave element 14 at a predetermined position of the gas separation channel 12 ″ a of the main body 12 ″ is further used. High-frequency electricity between the two external connection terminals 18'a and 18'b of the interdigital electrode of the 'high-frequency signal generating / receiving means 18' and the high-frequency signal / transmitting / receiving means 22 'outside the main body 12' ' In order to perform electromagnetic transmission and reception without electrical connection of signals, the gas separation flow path 12 ″ is provided on the inner surface of the gas separation flow path 12 ″ a used in the second embodiment described above. a pair of ann formed extending in the extending direction of a A known non-contact electric type using a coil antenna called magnetic field coupling, which is different from the combination of the antenna means 42 and the pair of antenna means 44 outside the main body 12 ″ cooperating with the pair of antenna means 42. The signal transmission / reception method is used.

  In FIG. 9A, the spherical surface acoustic wave element 14 ′ provided at a predetermined position in the gas separation channel 12 ″ a on the outer surface of the second surface plate 12 ″ ″ of the main body 12 ″. External antenna means 45 including a coiled antenna pattern formed at a position corresponding to is shown. Such an external antenna means 45 can be obtained, for example, by forming a conductor film such as chromium and gold at the corresponding position on the outer surface by vapor deposition and then patterning it by photolithography.

  In FIG. 9B, the gas separation channel 12 ″ a is formed on the inner surface of the second surface plate 12 ″ ′ of the main body 12 ″ by a production method similar to the method of forming the external antenna means 45 described above. An antenna means 47 including a coiled antenna pattern formed at a position corresponding to the spherical surface acoustic wave element 14 ′ provided at a predetermined position is illustrated. Hereinafter, the antenna means 47 is referred to as the internal antenna means 47 in order to clarify the distinction from the external antenna means 45.

  The external antenna means 45 and the internal antenna means 47 shown in FIGS. 9A and 9B are the same as the manufacturing process of the main body 12 ″ shown in FIG. Before the planar opening of the gas separation flow path 12 ″ a formed in the silicon wafer 12 ″ c of the first main body member is covered with the second surface plate 12 ″ e, the second surface plate 12 ″ e As described above, the outer surface and the inner surface are respectively formed at predetermined positions.

  Further, as shown in FIG. 10, a pair of one pole of the base 16 of the spherical surface acoustic wave element 14 ′ is connected to a pair of terminals 48 of the internal antenna means 47 on the inner surface of the second surface plate 12 ″ e. After the external connection terminals 18'a and 18'b are electrically connected and mechanically fixed, the gas separation channel 12''a formed in the silicon wafer 12''c of the first body member A second surface plate 12 ″ e is fixed to the outer plane of the silicon wafer 12 ″ c of the first body member so as to cover the planar opening. Thereby, the spherical surface acoustic wave element 14 ′ is provided at a predetermined position in the gas separation channel 12 ″ a of the main body 12 ″. In this modification, for example, gold bumps 49 are used for the electrical connection and mechanical fixing described above.

  Thereafter, one of the pair of terminals 46 of the external antenna means 45 on the outer surface of the second surface plate 12''e is grounded, and the other is connected to the control / analysis means 24 'via the high-frequency signal generating / receiving means 22'. Has been.

[Third Embodiment]
Next, a gas analyzer 50 according to a third embodiment of the present invention will be described with reference to FIGS. 11 and 12 in the accompanying drawings.

  The gas analyzer 50 according to this embodiment is different from the gas analyzer 10 according to the first embodiment of the present invention described above with reference to FIGS. This is a method for arranging the spherical surface acoustic wave element 14 at a predetermined arrangement position in the flow channel and a method for fixing it to the arrangement position, and controls the operation of the surface acoustic wave / excitation / detection means 18 of the spherical surface acoustic wave element 14. It is a method to do.

  The spherical surface acoustic wave element 14 used in the gas analyzer 50 according to this embodiment is the same as the spherical surface acoustic wave element 14 used in the gas analyzer 10 according to the first embodiment of the present invention described above. In the spherical surface acoustic wave element 14, the pair of interdigital electrodes of the surface acoustic wave / excitation / detection means 18 located on the pair of poles located on both sides of the annular region 16b, that is, the pair of poles, is the same. Antenna means made of an antenna material is electrically and mechanically connected to external connection portions of a relatively large area of the external connection terminals 18a and 18b.

  Specifically, the antenna means is provided by a block-like antenna member 52 made of a conductor, preferably metal, and the electrical and mechanical connections described above are known electrical machines such as solder and conductive adhesives. This is done by means of an automatic connection means. The block-like antenna member 52 is a conductive member in this example, but it goes without saying that it can also serve as a capacitor functional part for improving the efficiency in transmitting and receiving a high-frequency signal, and can include a wiring pattern. .

  The diameter of the inner surface of the gas separation channel 12 ″ ″ a of the main body 12 ″ ″ used in the gas analyzer 50 according to this embodiment is a gas inlet except for a predetermined position in the region near the gas outlet. The outer diameter of the antenna member 52 and the outer diameter of the base 16 of the spherical surface acoustic wave element 14 are the diameters other than the predetermined positions on the inner surface of the gas separation flow path 12 ″ ″. Slightly smaller than. Therefore, the spherical surface acoustic wave element 14 to which the antenna member 52 is connected cannot rotate except for the rotation center in the direction in which the gas separation flow path 12 ″ ″ a extends. A positioning projection 54 is formed at the predetermined position on the inner surface of the gas separation channel 12 ″ ″ a.

  The spherical surface acoustic wave element 14 with the pair of antenna members 52 is shown in FIG. 11 after the main body 12 ″ ″ is manufactured in the same manufacturing process as that of the main body 12 shown in FIG. 2. As shown, one antenna member 52 is inserted into the gas inlet of the gas separation channel 12 ″ ″ of the main body 12 ″ ″ at the head. Subsequently, a solution containing a large number of fillers (for example, styrene / divinylbenzene beads) 56 is injected at a high pressure into the gas inlet by the filler filling device 51.

  The spherical surface acoustic wave element 14 with a pair of antenna members 52 is pushed toward the gas outlet of the gas separation channel 12 ″ ″ a by the solution, and the gas outlet of the gas separation channel 12 ″ ″ a. When the first antenna member 52 comes into contact with the positioning protrusion 54 at a predetermined position in the vicinity region, it is arranged at a predetermined position in the vicinity of the outlet of the gas separation flow path 12 ″ ″ a. After that, the filler filling device 51 discharges only the solution from the gas outlet of the gas separation channel 12 ″ ′ a by supplying an inert gas to the gas inlet, and the gas separation channel 12 ′. A large number of fillers 56 are left between the other antenna member 52 of the spherical surface acoustic wave element 14 at the predetermined position and the gas inlet at “a”.

  An annular region 16b of the spherical surface acoustic wave element 14 between the pair of antenna members 52 is a combination of the pair of antenna members 52 and the base 16 of the spherical surface acoustic wave element 14 as shown in FIG. Are inclined with respect to the longitudinal center line passing through the pair of antenna members 52 and the base 16 of the spherical surface acoustic wave element 14. Therefore, after the combination of the pair of antenna members 52 and the base 16 of the spherical surface acoustic wave element 14 is inserted into the gas separation flow path 12 ″ ″ a of the main body 12 ″ ″, the pair of antenna members 52 is formed. When either one of these contacts the inner surface of the gas separation channel 12 ″ ″ a, of course, both of the pair of antenna members 52 contact the inner surface of the gas separation channel 12 ″ ″ a. However, the annular region 16b of the base 16 of the spherical surface acoustic wave element 14 never comes into contact with the inner surface.

  Fixing the combination of the pair of antenna members 52 and the base 16 of the spherical surface acoustic wave element 14 to a predetermined position of the gas separation channel 12 ″ ″ a places this combination in the gas separation channel 12 ″ ″ a. After the insertion, as described above, a solution containing a large number of fillers (beads) 56 is poured from the gas inlet of the gas separation channel 12 ″ ″ a by the filler filling device 51, as shown in FIG. Then, the combination of the pair of antenna members 52 and the base 16 of the spherical surface acoustic wave element 14 is pressed by the filler (beads) 56 against the positioning protrusion 54 at a predetermined position of the gas separation channel 12 ″ ″ a. I can do it.

  As shown in FIG. 12, the filler (beads) 56 in the gas separation flow path 12 ″ ″ a creates a gap between them, and the gas separation flow path as in the first embodiment of FIG. The carrier gas flow from the carrier gas supply source 26 connected to the gas inlet of 12 ″ ″ a is not obstructed, and the sample injection means 28 together with the carrier gas supplies the gas inlet of the gas separation channel 12 ″ ″ a. The flow of the sample containing various gaseous components to be supplied is not inhibited. The filler (bead) 56 holds or is applied with a drug that exhibits a different holding time in accordance with the type of gas component to be separated. The inner surface of the gas separation channel 12 ″ ″ a, a pair of antenna members 52 and the base 16 of the spherical surface acoustic wave element 14, the carrier gas, and various gas components contained in the sample are not altered.

  The high-frequency signal / transmission / reception means 22 ″ of this embodiment includes a pair of antenna means 58 on the control / analysis means 24 ″ side that cooperates with the pair of antenna members 52 on the spherical surface acoustic wave element 14 side. Yes.

  In this embodiment, the surface acoustic wave / excitation / detection means 18 and the high-frequency signal / transmission / reception means 22 ″ of the spherical surface acoustic wave element 14 are controlled by a pair of antenna members 52 on the spherical surface acoustic wave element 14 side. / A pair of antenna means 58 on the analysis means 24 ″ side are brought close to each other so that they are electromagnetically connected in a non-contact state.

  In this state, the control / analysis means 24 ″ controls the operation of the high frequency signal / transmission / reception means 22 ″, and electromagnetically the spherical surface acoustic wave element is electromagnetically operated by the high frequency signal / transmission / reception means 22 ″ at a desired timing. A predetermined high-frequency signal is applied to the 14 surface acoustic wave / excitation / detection means 18, and the surface acoustic wave / excitation / detection means 18 causes the annular region 16 b of the substrate 16 to extend along the extending direction of the annular region 16 b. A predetermined surface acoustic wave SAW is excited and propagated, and the high-frequency signal generated by the surface acoustic wave / excitation / detection means 18 corresponding to the surface acoustic wave SAW received around the annular region 16b of the base 16 is generated. Receive and analyze.

  During this time, various gas components in the sample from the sample injection means (not shown) supplied into the gas separation channel 12 ″ ″ a together with the carrier gas from the carrier gas supply source (not shown) are separated into the gas separation flow. While flowing between a large number of fillers (beads) 56 in the channel 12 ″ ″ a, they are separated from each other in the direction of the flow of the carrier gas according to their types, and the gas separation channel 12 ″ ″ a The surface acoustic waves SAW are sequentially brought into contact with the circular region 16b of the spherical surface acoustic wave element 14 at a predetermined position in the vicinity of the gas outlet. The strength (attenuation rate) and velocity (phase) of the surface acoustic wave SAW change depending on the type and concentration of the gas component in contact, and this change is caused by the strength (attenuation rate) of the high frequency signal by the surface acoustic wave / excitation / detection means 18. ) And a change in velocity (phase) are electromagnetically transmitted from the pair of antenna members 52 on the spherical surface acoustic wave element 14 side to the pair of antenna means 58 on the control / analyzing means 24 ″ side, and further, a high frequency signal / transmission The concentration of each of the plurality of gas components that are transmitted to the control / analysis unit 24 ″ via the reception unit 22 ″ and sequentially contact the surface acoustic wave SAW is analyzed by the control / analysis unit 24 ″.

  The control / analysis unit 24 ″ can include a known display unit (not shown) for displaying the analysis result and can include a known recording unit (not shown) for recording the analysis result.

  In the present embodiment, the combination of the pair of antenna members 52 and the spherical surface acoustic wave element 14 is a gas separation formed on the silicon wafer 12 ″ ″ c of the first body member in the manufacturing process of the body 12 ″ ″. After the planar opening of the flow path 12 ″ ″ a was covered with the second surface plate 12 ″ ″ e, it was inserted into the gas inlet of the gas separation flow path 12 ″ ″ a, but the silicon wafer 12 ″ Before the planar opening of the gas separation channel 12 ″ ″ a formed in ′ c is covered with the second surface plate 12 ″ ″ e, the pair of antenna member 52 and the spherical surface acoustic wave element 14 are separated from each other. Of course, the planar opening may be covered with the second surface plate 12 '' 'e after being installed at a predetermined position in 12' '' a.

  Further, in this embodiment, the combination of the pair of antenna members 52 and the spherical surface acoustic wave element 14 is the same as the manufacturing process of the main body 12 shown in FIG. Later, the spherical surface acoustic wave element 14 with a pair of antenna members 52 may be inserted at the head of one antenna member 52 from the gas outlet of the gas separation channel 12 ″ ″ of the main body 12 ″ ″. I can do it.

  In this case, after the combination of the pair of antenna member 52 and the spherical surface acoustic wave element 14 is inserted from the gas outlet of the gas separation channel 12 ″ ″ a, the gas flow of the gas separation channel 12 ″ ″ a The positioning protrusion 54 is fixed at a predetermined position near the gas outlet in the outlet or the gas separation channel 12 ″ ″ a. Subsequently, a solution containing a large number of fillers (for example, styrene / divinylbenzene beads) 56 is injected at a high pressure into the gas inlet by the filler filling device 51, and the filler filling device 51 further introduces the inert gas into the gas inlet. By supplying the gas to the gas inlet, only the solution is discharged from the gas outlet of the gas separation channel 12 ″ ″ a, and the gas outlet or the gas outlet near the gas outlet of the gas separation channel 12 ″ ″ a From the inner antenna member 52 of the spherical surface acoustic wave element 14 positioned at the predetermined position in the vicinity of the gas outlet of the gas separation channel 12 ″ ″ to the gas inlet by the positioning projection 54 at the position A number of fillers 56 are left in between.

  The combination of the pair of antenna members 52 and the base 16 of the spherical surface acoustic wave element 14 at the predetermined position in the vicinity of the gas outlet of the gas separation channel 12 ″ ″ is fixed by a filler (bead) 56. By pressing the combination of the antenna member 52 and the base 16 of the spherical surface acoustic wave element 14 to the positioning protrusion 54 at the predetermined position in the vicinity of the gas outlet or the gas outlet of the gas separation channel 12 ″ ″ a. Can be executed.

[Fourth Embodiment]
Next, a gas analyzer 60 according to a fourth embodiment of the present invention will be described with reference to FIGS. 13 and 14 in the accompanying drawings.

  The gas analyzer 60 according to this embodiment is the same as the gas analyzer 10 according to the first embodiment of the present invention described above with reference to FIGS. What is different from the gas analyzer of the modified example of the second embodiment is a method of fixing the spherical surface acoustic wave element 14 ″ in the gas separation channel 12a of the main body 12, and the antenna means is a spherical surface acoustic wave element. This is a method of controlling the operation of the surface acoustic wave / excitation / detection means 18 ″ of the spherical surface acoustic wave element 14 ″.

  As well shown in FIG. 13, a pair of external connection terminals 18 ″ a of interdigital electrodes of the surface acoustic wave / excitation / detection means 18 ″ of the spherical surface acoustic wave element 14 ″ of the fourth embodiment. , 18 ″ b extend to the pole on one side of the annular region 16b of the base 16 and constitute the antenna means 18 ″ c having a coiled antenna pattern centered on the one pole. ing. At this time, one external connection terminal 18 ″ b that must cross the antenna means 18 ″ c of the coiled antenna pattern is covered with an insulator 18 ″ d, and the coiled antenna Electrical connection with the pattern antenna means 18''c is avoided.

  As well shown in FIG. 14, the configuration of the main body 12 of the fourth embodiment is the same as the configuration of the main body 12 of the first embodiment described above with reference to FIGS. A spherical surface acoustic wave element 14 '' is arranged at a predetermined position near the gas outlet 12a.

  Specifically, the silicon of the first main body member is formed in the predetermined position on the inner surface defining the vicinity of the gas outlet of the gas separation channel 12a in the manufacturing process of the main body 12 shown in FIG. Before the planar opening of the gas separation channel 12a formed in the wafer 12c is covered with the second surface plate member 12e, an annular shape is formed in the base 16 of the spherical surface acoustic wave element 14 ″ as shown in FIG. A pedestal 62 with a recess 62a for receiving the pole on the other side of the region 16b is fixed, and the other of the annular region 16b in the base 16 of the spherical surface acoustic wave element 14 ″ is further fixed to the recess 62a of the pedestal 62. The side pole is seated and fixed by a known fixing means such as an adhesive. Thereafter, the planar opening of the gas separation channel 12a formed in the silicon wafer 12c of the first main body member is covered with the second surface plate member 12e.

  The annular region 16b of the base body 16 of the spherical surface acoustic wave element 14 ″ arranged in this manner at the predetermined position of the gas separation channel 12a together with the surface acoustic wave / excitation / detection means 18 of the gas separation channel 12a. Do not touch the inner surface.

  The high-frequency signal / transmitting / receiving means 22 ″ ″ of this embodiment is an antenna having a coiled antenna pattern of a spherical surface acoustic wave element 14 ″ disposed at the predetermined position of the gas separation channel 12 a of the main body 12. There is provided a pair of coiled antenna pattern antenna means 64 on the control / analysis means 24 "" side cooperating with means 18 "c.

  In this embodiment, the surface acoustic wave / excitation / detection means 18 and the high frequency signal / transmission / reception means 22 ″ of the spherical surface acoustic wave element 14 ″ are composed of the spherical surface acoustic wave element 14 ″ on the main body 12 side. The surface acoustic wave / excitation / detection means 18 of the pair of external connection terminals 18 ″ a, 18 ″ b has a coil-like antenna pattern antenna means 18 ″ c and a control / analysis means 24 ″ side coil. By connecting the antenna means 64 having a rectangular antenna pattern, they are electromagnetically connected to each other in a non-contact state.

  In this state, the control / analysis means 24 "" controls the operation of the high-frequency signal / transmission / reception means 22 "", and the high-frequency signal / transmission / reception means 22 "" performs electromagnetic spherical elasticity at a desired timing. A predetermined high-frequency signal is applied to the surface acoustic wave / excitation / detection means 18 ″ of the surface wave element 14 ″, and an annular region 16 b of the substrate 16 is annularly formed by the surface acoustic wave / excitation / detection means 18 ″. A predetermined surface acoustic wave SAW is excited and propagated along the extending direction of the region 16b, and the surface acoustic wave / excitation is performed corresponding to the surface acoustic wave SAW received through multiple rounds of the annular region 16b of the base 16 / The high-frequency signal generated by the detecting means 18 '' is received and analyzed.

  During this period, various gas components in the sample from the sample injection means 28 supplied into the gas separation channel 12a together with the carrier gas from the carrier gas supply source 26 are various types while flowing in the gas separation channel 12a. Accordingly, the annular region 16b of the spherical surface acoustic wave element 14 ″ in a predetermined position in the region near the gas outlet of the gas separation channel 12a is separated from each other in the direction of the carrier gas flow by the difference in the holding time. Are sequentially brought into contact with the surface acoustic wave SAW that circulates around the surface. The strength (attenuation rate) and velocity (phase) of the surface acoustic wave SAW change according to the type and concentration of the gas component in contact, and this change is caused by the surface acoustic wave / excitation / detection means 18 ″ Attenuation rate) and speed (phase) changes are electromagnetically transmitted from the antenna means 18 ″ c of the coiled antenna pattern to the antenna means 64 of the coiled antenna pattern on the control / analysis means 24 ″ ″ side, Further, a plurality of gas components which are transmitted to the control / analysis means 24 "" via the high-frequency signal / transmission / reception means 22 "" and sequentially contact the surface acoustic wave SAW by the control / analysis means 24 "". Each concentration is analyzed.

  Instead of forming a coiled antenna pattern on the outer surface of the base 16 of the spherical surface acoustic wave element 14 ″, the spherical surface acoustic wave element according to the fourth embodiment shown in FIGS. The pair of external connection terminals 18 ″ a, 18 ″ b of the interdigital electrodes of the surface acoustic wave / excitation / detection means 18 ″ of 14 ″ are opposite to the pair of external connection terminals 18 of the interdigital electrodes. ″ ″ A and 18 ″ b are extended to the other pole side of the annular region 16 b of the base 16, and a coiled antenna pattern is formed around the recess 62 a on the surface of the pedestal 62. When the other pole side of the substrate 16 of the surface acoustic wave element 14 ″ is seated in the recess 62 a on the surface of the pedestal 62, a pair of external connection terminals 18 ″ a of interdigital electrodes on the other pole side, 18 ″ b is placed on the coiled antenna pattern, for example, gold It can be electrically connected and mechanically fixed using known electromechanical connection means such as bumps.

  The control / analysis unit 24 ″ ″ can include a known display unit (not shown) that displays the analysis result and can also include a known recording unit (not shown) that records the analysis result.

[Fifth Embodiment]
Next, a gas analyzer 70 according to a fifth embodiment of the present invention will be described with reference to FIG. 15 in the accompanying drawings.

The gas analyzer 70 includes: a main body 72 including a first gas separation channel 72a through which a gas containing various gas components flows and separates the various gas components in the gas from each other in the direction of the gas flow according to the type; A first spherical surface acoustic wave element 74 disposed at a predetermined position in the first gas separation flow path 72a of the main body 72. The cross-sectional area of the first gas separation flow path 72a can be generally reduced to 1 mm ² or less by a known micromachining technique (micromachining), and the gas analyzer 70 can be made compact and easy to manufacture.

  Specifically, the main body 72 has a flat plate shape, and one spiral first gas separation channel 72 a is formed between two planes of the main body 72. The gas inlet of the first gas separation channel 72a is open to the thin side surface of the main body 12, and the first spherical surface acoustic wave element 74 is disposed in the vicinity of the gas outlet of the first gas separation channel 72a. .

  The main body 72 of the gas analyzer 70 is further branched into a plurality through a branch valve 76 downstream of the first gas separation channel 72a. In this embodiment, one discharge channel 78, a second gas separation channel are provided. 72b and then branched to a third gas separation channel 72c. The gas outlets of the discharge channel 78, the second gas separation channel 72b, and the third gas separation channel 72c open at different positions on the thin side surface of the main body 12.

  Each of the second gas separation flow path 72b and the third gas separation flow path 72c is caused to flow through a medicine applied to the inner surface thereof or a large number of fillers disposed inside and coated or filled with the medicine. Different holding times can be exhibited depending on the type of gas component due to the interaction of the gas with various gas components. In other words, the spherical surface acoustic wave element 74 is a gas component that could not be separated by the drug applied to the inner surface of the first gas separation flow path 72a or by a large number of fillers disposed or filled therein. The branch valve 76 is operated on the basis of the measurement result of the control / analyzing means 84 that has analyzed the output from the other, and finally separated by the other second gas separation channel 72b or the third gas separation channel 72c. It is possible to detect with the second spherical surface acoustic wave element 80a and the third spherical surface acoustic wave element 80c located downstream. Drugs and fillers that exhibit different retention times for different types of gas components are trade names such as polyphenyl ether, cerebrosides, thermol-1, polyethylene glycol 1000, versamid 900, tricresyl phosphate, apiezon L, ethyl cellulose, etc. Various materials are already available and are used according to the type of gaseous component to be separated.

  The first spherical elastic surface in the first gas separation channel 72a is provided at a predetermined position of each of the second gas separation channel 72b and the third gas separation channel 72c, in this embodiment, in the vicinity of each gas outlet. Second and third spherical surface acoustic wave elements 80 a and 80 b similar to the wave element 74 are arranged.

  As described above, the main body 72 including the first gas separation flow path 72a, the discharge flow path 78, the second gas separation flow path 72b, and the third gas separation flow path 72c corresponds to (A) to (D) of FIG. With reference to the above-described method of manufacturing the plate-shaped main body 12 including the gas separation flow path 12a of the first embodiment, it can be precisely manufactured with a size of several centimeters by so-called micromachining.

  Each of the first spherical surface acoustic wave element 74, the second spherical surface acoustic wave element 80a, and the third spherical surface acoustic wave element 80b is controlled electromagnetically from the outside of the main body 12, for example, in FIG. Like the spherical surface acoustic wave element 14 shown in the figure, it is combined with a pair of antenna members 52 or formed on the inner surface of the gas separation channel 12 ″ a as shown in FIGS. 14 is combined with the antenna means 47 of the looped antenna pattern, or the interdigital electrode of the surface acoustic wave / excitation / detection means 18 ″ of the spherical surface acoustic wave element 14 ″ shown in FIG. A pair of interdigital electrodes of the surface acoustic wave / excitation / detection means (not shown) such as the pair of electrodes 18 ″ a and 18 ″ b constitute antenna means of a coiled antenna pattern. It is made.

  Each of the first spherical surface acoustic wave element 74, the second spherical surface acoustic wave element 80a, and the third spherical surface acoustic wave element 80b is, for example, the spherical surface acoustic wave element 14 shown in FIG. Each of the first gas separation channel 72a, the second gas separation channel 72b, and the third gas separation channel 72c during the manufacturing process of the main body 72 like the spherical surface acoustic wave element 14 ″ shown in FIG. It is arranged and fixed at a predetermined position in the vicinity of the exit.

  The branch valve 76 is configured so that the gas from the first gas separation channel 72a can selectively flow into any of the discharge channel 78, the second gas separation channel 72b, and the third gas separation channel 72c. In addition, the operation is electromagnetically controlled from the outside of the main body 12, but such a branch valve 76 is formed in the main body 72 by a micro precision machining technique called so-called micromachining. It is possible to build in a predetermined position downstream of the gas separation channel 72a.

  The same carrier gas supply source 26 and sample injection means 28 used in the gas analyzer 10 of the first embodiment shown in FIG. 1 are connected to the inlet of the first gas separation channel 72a. The first spherical surface acoustic wave element 74, the second spherical surface acoustic wave element 80a, and the third spherical surface acoustic wave element 80b are electromagnetically connected to the high-frequency signal / excitation / detection means 82 outside the main body 72. The high frequency signal / excitation / detection means 82 is connected to the control / analysis means 84. A branch valve 76 is also electromagnetically connected to the control / analysis means 84.

  Next, the operation of the gas analyzer 70 according to the fifth embodiment of the present invention configured as described above will be described.

  While the carrier gas is being supplied from the carrier gas supply source 26 toward the gas inlet of the first gas separation channel 72a at a predetermined speed, various kinds of analysis are to be performed in the gas analyzer 70 via the sample injection means 28. A sample containing the gas component is injected into the carrier gas.

  Thus, when various gas components in a gas containing various gas components are separated and analyzed from each other, different drugs or drugs are applied or filled depending on the type of gas components to be separated. By selectively using the gas separation channels having different lengths or different lengths, it is possible to realize a gas analyzer that can cope with separation of various gas components. Further, depending on the result of analysis using the first spherical surface acoustic wave element 74 combined with the first gas separation channel 72a, the second gas separation channel 72b downstream of the first gas separation channel 72a, It is also possible to avoid exhausting from the exhaust path 78 that a long gas remains in the third gas separation channel 72c and a long time is required until the next measurement.

  This is possible for the first time by using a spherical surface acoustic wave element as a gas component detector. When a conventional thermal conductivity detector or a hydrogen flame detector is used as a gas component detector, it was impossible to place the gas component detector in the gas separation channel of the main body 72. . In other words, as described above, the spherical surface acoustic wave element can control its operation from the outside of the main body even without contact by an electromagnetic method using high frequency. And a hydrogen flame detector, which has a heating mechanism, raises the temperature of the gas to be analyzed, so that when an additional gas component is analyzed downstream of it, the effect of the temperature rise on the analysis result This embodiment uses a plurality of spherical surface acoustic wave elements as a plurality of gas component detectors in a plurality of gas separation channels communicating with each other in an integrally formed body. Moreover, it is not possible to perform highly accurate analysis.

  In addition, it is difficult to supply power necessary for miniaturization, and the spherical surface acoustic wave element can be operated by using an antenna to use a high-frequency signal, but is difficult with the above-described conventional detector.

  Non-contact operation and measurement can be considered by using a conventional surface acoustic wave element, but a conventional surface acoustic wave element is large and large because it needs a reflector inside. It is necessary to create a gas separation channel, and it is impossible to manufacture a corresponding large and large gas distribution channel using micromachining technology. Furthermore, the conventional planar surface acoustic wave device has a problem that the flow of the gas passing through the gas separation channel is irregularly disturbed because the substrate has a planar shape and is not a sphere. Also, the formation of the antenna becomes difficult.

  Furthermore, since the gas to be analyzed burns with the hydrogen flame type detector, it cannot be analyzed in different gas separation channels downstream, so that multiple gas separation channels are placed in one main body. It cannot be realized that it is functionally connected to the system.

  As described above, it is only possible to form a gas separation channel and a detector integrally or to include a plurality of gas separation channels in the main body using a spherical surface acoustic wave element. . In addition, by introducing electromagnetic transmission / reception, there are advantages of improving the performance and suppressing the manufacturing cost such as connection.

  The control / analyzing unit 84 can also include a known display unit (not shown) for displaying the analysis result, and can also include a known recording unit (not shown) for recording the analysis result.

  When a plurality of surface acoustic wave circulation paths are provided on a single substrate, a sensitive film having different gas reaction characteristics is used depending on the circulation path or when using a plurality of spherical surface acoustic wave elements. Each element can be applied. A known method such as an odor sensor can be employed as a method for analyzing gas using such sensitive films that respond differently depending on the type of gas. For example, it is composed of three spherical surface acoustic wave elements, two of which form different sensitive films. Based on the response of the three spherical surface acoustic wave elements, the control / analyzing means controls / analyzes information on gas components. I can get it. Thus, in the present invention, the spherical surface acoustic wave element may have a plurality of paths on its surface, may have different sensitive films, or may be constituted by a plurality of elements. It is not excluded. It is clear that information on more gas components can be obtained by using a plurality of elements in one place or using a plurality of types of sensitive films.

[Sixth Embodiment]
Next, a gas analyzer 120 according to a sixth embodiment of the present invention will be described with reference to FIG. 16 in the accompanying drawings.

  In the gas analyzer 120 according to the sixth embodiment, a gas separation flow path that allows gases containing various gas components to flow and separates the various gas components in the gas from each other in the direction of the gas flow according to the type. 122 a is formed in two layers in the main body 122.

  Specifically, the main body 122 is the same as the main body 12 of the gas analyzer 10 of the first embodiment described above with reference to FIGS. 2A to 2D, and the first main body half 126 manufactured by micromachining. It has. The first main body half 126 includes a silicon wafer 126c sandwiched between a pair of heat-resistant tempered glass first and second surface plate materials 126a and 126b having a predetermined size. After the silicon wafer 126c is anodically bonded to the first surface plate material 126a, the rear half of the gas separation channel 122a is formed by an etching technique called DRIE (Deep Reactive Ion Etching), for example, and the second surface plate material 126b is formed of silicon. Anodically bonded to the wafer 126c so as to cover the planar opening of the gas separation channel 122a of the silicon wafer 126c.

  In order to make one end of the rear half of the gas separation channel 122a function as an entire outlet of the gas separation channel 122a, it corresponds to one end of the rear half of the gas separation channel 122a in the first surface plate 126a of the first main body half 126. An outlet opening is formed in the portion, and an outlet nozzle 126d is fixed to the outlet opening.

  The other end of the rear half of the gas separation channel 122a is the middle of the entire gas separation channel 122a, and a portion corresponding to the other end of the rear half of the gas separation channel 122a in the second surface plate 126b of the first main body half 126. Is formed with an intermediate opening.

  A spherical surface acoustic wave element 128 that is electromagnetically operated is stored in the intermediate opening.

  The main body 122 further includes a second main body half 130 manufactured by micromachining, similar to the main body 12 of the gas analyzer 10 of the first embodiment described above with reference to FIGS. 2 (A) to (D). Yes. The second main body half 130 includes a silicon wafer 130b that is anodically bonded to one of two planes of a third surface plate member 130a having a predetermined size made of one heat-resistant tempered glass. The front half of the gas separation channel 122a is formed on the silicon wafer 130b by an etching technique called DRIE (Deep Reactive Ion Etching) after being anodically bonded to the third surface plate member 130a. The planar opening of the silicon wafer 130 b of the second main body half 130 is closed by overlapping the silicon wafer 130 b of the second main body half 130 with the second surface plate 126 b of the first main body half 126. The wafer 130b is bonded to the second surface plate material 126b of the first main body half 126 by, for example, anodic bonding.

  In order to allow one end of the front half of the gas separation flow path 122a of the silicon wafer 130b of the second main body half 130 to function as the entire inlet of the gas separation flow path 122a, the gas separation flow in the third surface plate member 130a of the second main body half 130 An inlet opening is formed at a portion corresponding to one end of the front half of the path 122a, and an inlet nozzle 130c is fixed to the inlet opening.

  The other end of the front half of the gas separation channel 122a is the middle of the entire gas separation channel 122a, and the portion corresponding to the other end of the rear half of the gas separation channel 122a in the second surface plate 126b of the first main body half 126 And the spherical surface acoustic wave element 128 stored in the intermediate opening is covered.

  The sample injection means 28 and the carrier gas supply source 26 are connected to the inlet nozzle 130c.

  When a sample containing various gas components from the sample injection means 28 together with the carrier gas from the carrier gas supply source 26 is caused to flow into the gas separation channel 122a of the main body 122 through the inlet nozzle 130c, the gas separation channel 122a Various gas components in the sample are separated from each other in the direction of the carrier gas and the sample flow depending on the type.

  In this embodiment, the surface acoustic wave / excitation / detection means 18 on the annular region 16 b of the base body 16 (see FIG. 12) of the spherical surface acoustic wave element 128 is paired with the spherical surface acoustic wave element 128. By bringing the pair of antenna means 58 of the high-frequency signal / transmitting / receiving means 22 "close to the antenna member 128a, the antenna member 128a is electromagnetically connected to the high-frequency signal / transmitting / receiving means 22" in a non-contact state. .

  In this state, the control / analysis means 24 ″ controls the operation of the high frequency signal / transmission / reception means 22 ″, and electromagnetically the spherical surface acoustic wave element is electromagnetically operated by the high frequency signal / transmission / reception means 22 ″ at a desired timing. A predetermined high-frequency signal is applied to the 128 surface acoustic wave / excitation / detection means 18, and the surface acoustic wave / excitation / detection means 18 causes the annular region 16 b of the substrate 16 to extend along the extending direction of the annular region 16 b. A predetermined surface acoustic wave SAW is excited and propagated, and the high-frequency signal generated by the surface acoustic wave / excitation / detection means 18 corresponding to the surface acoustic wave SAW received around the annular region 16b of the base 16 is generated. Receive and analyze.

  During this time, various gas components in the sample from the sample injection means 28 supplied into the gas separation channel 122a together with the carrier gas from the carrier gas supply source 26 are various types while flowing in the gas separation channel 122a. Accordingly, they are separated from each other in the direction of the carrier gas flow, and are sequentially brought into contact with the surface acoustic waves SAW that circulate around the annular region 16b of the spherical surface acoustic wave element 128 at the intermediate position of the gas separation channel 122a. . The strength (attenuation rate) and velocity (phase) of the surface acoustic wave SAW change according to the type and concentration of the gas component that has come into contact, and this change is converted into a high-frequency signal by the surface acoustic wave / excitation / detection means 18. Electromagnetically transmitted from the pair of antenna members 128a on the spherical surface acoustic wave element 128 side to the pair of antenna means 58 on the control / analyzing means 24 "side, and further via the high frequency signal / transmitting / receiving means 22". The concentration of each of the plurality of gas components transmitted to the control / analysis unit 24 ″ and sequentially brought into contact with the surface acoustic wave SAW is analyzed by the control / analysis unit 24 ″.

  The control / analysis unit 24 ″ can include a known display unit (not shown) for displaying the analysis result and can include a known recording unit (not shown) for recording the analysis result.

[Seventh Embodiment]
Next, a gas analyzer 140 according to a seventh embodiment of the present invention will be described with reference to FIG. 17 in the accompanying drawings.

  In the gas analyzer 140 according to the seventh embodiment, a gas containing various gas components is flowed, and the various gas components in the gas are separated from each other in the direction of the gas flow according to the type. Three gas separation channels 142a, 142b, and 142c are formed in the main body 142 in three layers.

  Specifically, the main body 142 is a first main body unit 144 manufactured by micromachining, similar to the main body 12 of the gas analyzer 10 of the first embodiment described above with reference to FIGS. 2 (A) to (D). It has. The first main body unit 144 includes a silicon wafer 144c sandwiched between a pair of heat-resistant tempered glass first and second surface plate members 144a and 144b having a predetermined size. After the silicon wafer 144c is anodically bonded to the first surface plate material 144a, a third gas separation channel 142c is formed by an etching technique called DRIE (Deep Reactive Ion Etching), for example, and the second surface plate material 144b is formed of the silicon wafer 144b. Anodically bonded to 144c so as to cover the planar opening of the third gas separation channel 142c of the silicon wafer 144c.

  An outlet opening is formed in a portion of the first surface plate member 144a corresponding to one end of the third gas separation channel 142c, and an outlet nozzle 145 is fixed to the outlet opening. The outlet nozzle 145 has the same configuration as the outlet nozzle 32 shown in FIG. 6, and a spherical surface acoustic wave element 14 ′ is fixed to one end of the third gas separation channel 142c as shown in FIG. ing.

  The other end of the third gas separation channel 142c serves as the inlet of the third gas separation channel 142c, and the part corresponding to the inlet of the third gas separation channel 142c in the second surface plate 144b of the first main body unit 144 is an inlet. An opening is formed.

  The main body 142 further includes a second main body unit 146 manufactured by micromachining, similar to the main body 12 of the gas analyzer 10 of the first embodiment described above with reference to FIGS. 2 (A) to (D). Yes. The second main body unit 146 includes a silicon wafer 146b that is anodically bonded to one of two planes of a third surface plate member 146a having a predetermined size made of one heat-resistant tempered glass. A second gas separation channel 142b is formed in the silicon wafer 146b by an etching technique called DRIE (Deep Reactive Ion Etching) after being anodically bonded to the third surface plate member 146a. The planar opening of the silicon wafer 146b of the second main body unit 146 is closed by overlapping the silicon wafer 146b of the second main body unit 146 with the second surface plate member 144b of the first main body unit 144, and the silicon of the second main body unit 146 is closed. The wafer 146b is bonded to the second surface plate member 144b of the first main body unit 144 by, for example, anodic bonding.

  An outlet opening is formed in a portion corresponding to one end of the second gas separation flow path 142b on the narrow outer surface of the silicon wafer 146b of the second body unit 146, and an outlet nozzle 148 is fixed to the outlet opening. Yes. The outlet nozzle 148 has the same configuration as the outlet nozzle 32 shown in FIG. 6, and a spherical surface acoustic wave element 14 ′ is fixed to one end of the second gas separation channel 142b as shown in FIG. ing.

  The other end of the second gas separation channel 142c serves as the inlet of the second gas separation channel 142b, and the portion corresponding to the inlet of the second gas separation channel 142b in the third surface plate member 146a of the second body unit 146 is an inlet. An opening is formed.

  The main body 142 further includes a third main body unit 150 manufactured by micromachining, similar to the main body 12 of the gas analyzer 10 of the first embodiment described above with reference to FIGS. 2 (A) to (D). Yes. The third main body unit 150 includes a silicon wafer 150b that is anodically bonded to one of two planes of a fourth surface plate 150a having a predetermined size made of one heat-resistant tempered glass. A first gas separation channel 142a is formed in the silicon wafer 150b by an etching technique called DRIE (Deep Reactive Ion Etching) after being anodically bonded to the fourth surface plate 150a. The planar opening of the silicon wafer 150 b of the first main body unit 150 is closed by overlapping the silicon wafer 150 b of the first main body unit 150 with the third surface plate member 146 a of the second main body unit 146. The wafer 150b is bonded to the third surface plate member 146a of the second main body unit 146 by, for example, anodic bonding.

  In the fourth surface plate member 150a of the third main body unit 150, an inlet opening is formed at a portion corresponding to one end of the first gas separation channel 142a, and an inlet nozzle 152 is fixed to the inlet opening. The sample injection means 28 is connected to the inlet nozzle 152 together with the carrier gas supply source 26.

  The other end serving as the outlet of the first gas separation channel 142a communicates with an inlet opening formed in a portion corresponding to the inlet of the second gas separation channel 142b in the third surface plate member 146a of the second main body unit 146. ing. The first spherical surface acoustic wave element 14 combined with a pair of antenna members 52 as shown in FIG. 12 is stored at the other end serving as the outlet of the first gas separation channel 142a.

  A three-way valve 160 is accommodated at the inlet of the second gas separation channel 142b. The three-way valve 160 is connected to an outlet opening (not shown) of the three-way valve 160, an outlet of the first gas separation channel 142a, an inlet of the second gas separation channel 142b, and an inlet of the third gas separation channel 142c.

  In this embodiment, the second gas separation channel 142b and the third gas separation channel 142c have different gas separation characteristics by filling different fillers therein.

  The first spherical surface acoustic wave element 14 combined with the pair of antenna members 52 at the outlet of the first gas separation flow path 142a is electromagnetically high-frequency signals via a pair of antenna means 58 corresponding to the pair of antenna members 52. The second and third spherical surface acoustic wave elements 14 ′ connected to the transmitting means 22 ″ and exiting the second and third gas separation flow paths 150 b are not shown in the outlet nozzles 148 and 145. It is connected to the high-frequency signal / transmitting means 22 through a pair of external extension wires and is grounded. A high-frequency signal / transmitting means 22 ″ for the first spherical surface acoustic wave element 14 combined with a pair of antenna members 52 at the outlet of the first gas separation channel 142a, and second and third gas separation channels 142b; The high frequency signal / transmitting means 22 for the second and third spherical surface acoustic wave elements 14 ′ at the outlet of 142 c is connected to a common control / analysis means 162, and the control / analysis means 162 further includes a three-way valve. 160 is also connected.

  The gas analyzer 140 according to the eighth embodiment configured as described above functions in the same manner as the gas analyzer 70 according to the fifth embodiment shown in FIG.

  While the carrier gas is being supplied from the carrier gas supply source 26 toward the inlet nozzle 152 of the first gas separation flow path 142a at a predetermined speed, various kinds of analysis are to be performed in the gas analyzer 140 via the sample injection means 28. A sample containing the gas component is injected into the carrier gas.

  At this time, the three-way valve 160 communicates the outlet of the first gas separation channel 142a with an outlet opening (not shown) of the three-way valve 160, and communicates with the second gas separation channel 142b and the third gas separation channel 142c. Not. The three-way valve 160 can determine whether to introduce the gas into the second gas separation channel 142b or the third gas separation channel 142c based on the result of separation and measurement in the first gas separation channel 142a.

  The control / analyzing unit 162 can also include a known display unit (not shown) that displays the analysis result, and can also include a known recording unit (not shown) that records the analysis result.

  In addition, the gas analyzer 140 of this embodiment is illustrated in FIG. 15 that performs the same function because the first to third gas separation channels 142a, 142b, and 142c are three layers in the main body 142. In the gas analyzer 70 according to the fifth embodiment, the first to third gas separation channels 72 a, 72 b, and 72 c are compared with the plane of the main body 142 as compared to the same plane in the main body 72. The dimension can be approximately 略.

DESCRIPTION OF SYMBOLS 10 ... Gas analyzer, 12 ... Main body, 12a ... Gas separation flow path, 12b ... 1st surface board (1st main body member), 12c ... Silicon wafer (1st main body member), 12d ... Resist pattern, 12e ... 2nd Surface plate material (second body member), 14 ... spherical surface acoustic wave element, SAW ... surface acoustic wave, 16 ... substrate, 16a ... circumferential circle of maximum diameter, 16b ... annular region, 18 ... surface acoustic wave / excitation / Detection means, 18a, 18b ... external connection terminals, 20a, 20b ... external extension wiring, 22 ... high frequency signal / transmission / reception means, 24 ... control / analysis means, 26 ... carrier gas supply source, 28 ... sample injection means;
10 '... Gas analyzer, 12' ... Main body, 12'a ... Gas separation channel, 12'c ... Silicon wafer (first main body member), 12'e ... Second surface plate (second main body member), 12 'F ... outlet opening, 14' ... spherical surface acoustic wave element, 18 '... surface acoustic wave excitation / detection means, 18'a, 18'b ... external connection terminal, 30 ... pedestal, 30a ... recess, 32 ... Outlet nozzle, 32a ... inner hole, 32b, 32c ... externally extending wiring;
40 ... Gas analyzer, 12 "... Main body, 12" a ... Gas separation flow path, 12 "b ... First surface plate (first main body member), 12" c ... Silicon wafer (first main body member) ), 12 '"e ... second surface plate (second body member), 22' ... high frequency signal / transmitting / receiving means, 24 '... control / analyzing means, 42 ... antenna means, 42a ... recess, 44 ... antenna means;
45 ... external antenna means, 46 ... terminal, 47 ... antenna means, 48 ... terminal, 49 ... gold bump;
DESCRIPTION OF SYMBOLS 50 ... Gas analyzer, 51 ... Filler filling apparatus, 12 "" ... Main body, 12 "'a ... Gas separation flow path, 12"' b ... 1st surface board (1st main body member), 12 '"" C ... silicon wafer (first body member), 12 "" e ... second surface plate (second body member), 22 "... high frequency signal / transmitting / receiving means, 24" ... control / analyzing means 52 ... Antenna member, 54 ... Positioning protrusion, 56 ... Filler (bead), 58 ... Antenna means;
60 ... Gas analyzer, 14 "... spherical surface acoustic wave element, 18" ... surface acoustic wave / excitation / detection means, 18 "a, 18" b ... external connection terminal, 18 "c ... antenna means , 18'd ... insulator, 22 "'... high frequency signal / transmitting / receiving means, 24"' ... control / analyzing means, 62 ... pedestal, 62a ... support recess, 64 ... antenna means;
DESCRIPTION OF SYMBOLS 70 ... Gas analyzer, 72 ... Main body, 72a ... 1st gas separation flow path, 72b ... 2nd gas separation flow path, 72c ... 2nd gas separation flow path, 74 ... 1st spherical surface acoustic wave element, 76 ... Branch Valve, 78 ... discharge channel, 80a ... second spherical surface acoustic wave element, 80b ... third spherical surface acoustic wave element, 82 ... high frequency signal / transmitting / receiving means, 84 ... control / analyzing means;
DESCRIPTION OF SYMBOLS 120 ... Gas analyzer, 122 ... Main body, 122a ... Gas separation flow path, 126 ... 1st main body half, 126a ... 1st surface board material, 126b ... 2nd surface board material, 126c ... Silicon wafer, 126d ... Outlet nozzle, 128 ... Spherical surface acoustic wave element, 128a ... antenna member, 130 ... second main body half, 130a ... third surface plate, 130b ... silicon wafer, 130c ... inlet nozzle;
DESCRIPTION OF SYMBOLS 140 ... Gas analyzer, 142 ... Main body, 142a ... 1st gas separation flow path, 142b ... 2nd gas separation flow path, 142c ... 3rd gas separation flow path, 144 ... 1st main body unit, 144a ... 1st surface board material 144b ... second surface plate material, 144c ... silicon wafer, 145 ... exit nozzle, 146 ... second body unit, 146a ... third surface plate material, 146b ... silicon wafer, 148 ... outlet nozzle, 150 ... third body unit, 150a ... fourth surface plate material, 150b ... silicon wafer, 152 ... inlet nozzle, 160 ... three-way valve, 162 ... control / analyzing means.

Claims (7)

A first body member having a surface on which the gas separation channel is formed as a groove; and a second body member fixed to one surface of the first body member and closing an opening of the groove of the gas separation channel on the one surface. The gas separation flow path of the main body has a gas inlet and a gas outlet, and a gas containing various gas components to be analyzed is transferred from the gas inlet to the carrier gas. In addition to the various gas components in the gas and the agent that absorbs and desorbs in the gas separation channel, the time for passing through the gas separation channel according to the type of the gas component To separate various gas components from each other;
In addition, the main body includes a spherical outer circumferential circle having a maximum diameter at a predetermined position of the gas separation channel, and the surface acoustic wave can be excited and the excited surface acoustic wave is generated. A base having at least one annular region capable of propagating, and a surface acoustic wave is excited in the annular region of the substrate, and the excited surface acoustic wave circulates along the extending direction of the annular region. A spherical surface acoustic wave element having surface acoustic wave / excitation / detection means for detecting a surface acoustic wave after circulation and generating an electrical signal corresponding to the detected surface acoustic wave;
A spherical surface acoustic wave element is a surface acoustic wave that circulates along the extending direction of an annular region of a substrate, sequentially contacting a gas component in a gas separation channel, and depending on the type and concentration of the contacted gas component. Detecting changes in surface acoustic waves as changes in electrical signals,
A gas analyzer characterized by that. The surface acoustic wave / excitation / detection means of the spherical surface acoustic wave element includes an interdigital electrode,
The external connection terminal of the interdigital electrode is electrically connected to the antenna means formed on either the outer surface of the base material of the spherical surface acoustic wave element or the inner surface of the gas separation channel of the main body,
The interdigital electrode electromagnetically transmits and receives electrical signals without electrical connection to the outside of the main body via the antenna means, and receives electrical signals from the outside via the antenna means. The surface acoustic wave is excited along the extending direction of the annular region of the substrate, and the surface acoustic wave is propagated and circulated, and the electricity generated corresponding to the surface acoustic wave that has circulated in the annular region is generated. Electromagnetically transmitting a signal to the outside via the antenna means;
The gas analyzer according to claim 1. The spherical surface acoustic wave element with the antenna means is inserted from a gas inlet or a gas outlet into a predetermined position of the gas separation channel of the main body,
The gas analyzer according to claim 2. The antenna means connected to the interdigital electrode has a coiled antenna pattern, and the outside of the gas separation channel of the main body is electromagnetically electrically connected to the antenna means without being electrically connected. External antenna means including a coiled antenna pattern for transmitting and receiving signals is formed,
The antenna means connected to the interdigital electrode transmits / receives an electric signal by magnetic field coupling with the outside of the main body via the external antenna means, and receives an electric signal from the outside via the external antenna means. In response to the surface acoustic wave that has excited the surface acoustic wave along the extending direction of the annular region of the base and propagated the surface acoustic wave around the interdigital electrode. The electromagnetic signal generated by the interdigital electrode is electromagnetically transmitted to the outside via the external antenna means.
The gas analyzer according to claim 2 or 3, characterized in that. The antenna means includes an antenna pattern extending along the inner surface of the gas separation channel,
The interdigital electrodes transmit and receive electromagnetic signals electromagnetically without electrical connection to the outside of the main body through the antenna pattern, and receive electric signals from the outside through the antenna pattern. An electric signal generated in response to the surface acoustic wave that has excited the surface acoustic wave along the extending direction of the annular region of the substrate, propagated the surface acoustic wave, and circulated around the annular region. Electromagnetically transmitted to the outside through the antenna pattern,
The gas analyzer according to claim 2 or 3, The gas separation channel of the main body is branched into a plurality through a branch valve downstream of the spherical surface acoustic wave element, and at least one of the plurality of branch channels functions as a gas separation channel,
The branch valve is operated according to a result of analyzing the output of the spherical surface acoustic wave element in the gas separation channel, and guides the gas from the gas separation channel to any one of the plurality of branch channels. Item 6. The gas analyzer according to any one of Items 1 to 5. The annular region where the surface acoustic wave of one or more spherical surface acoustic wave elements propagates is sensitive to at least one of the gas components to be analyzed, and an annular region is formed depending on the degree of sensitivity. A plurality of different sensitive films that affect the propagation of propagating surface acoustic waves are arranged,
The gas analyzer according to claim 6, wherein the branch valve determines a branch path through which the gas is guided according to a change in propagation of surface acoustic waves based on the sensitivity of the plurality of sensitive films.

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