JP5500220B2 - 振動片、振動子、発振器、及びセンサー - Google Patents

振動片、振動子、発振器、及びセンサー Download PDF

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Publication number
JP5500220B2
JP5500220B2 JP2012184911A JP2012184911A JP5500220B2 JP 5500220 B2 JP5500220 B2 JP 5500220B2 JP 2012184911 A JP2012184911 A JP 2012184911A JP 2012184911 A JP2012184911 A JP 2012184911A JP 5500220 B2 JP5500220 B2 JP 5500220B2
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base
arm
width
vibrating
piezoelectric
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Japanese (ja)
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JP2013017207A (ja
JP2013017207A5 (enExample
Inventor
英雄 棚谷
祥之 山田
幸弘 利根川
勝巳 黒田
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Seiko Epson Corp
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Seiko Epson Corp
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Gyroscopes (AREA)
JP2012184911A 2006-08-18 2012-08-24 振動片、振動子、発振器、及びセンサー Active JP5500220B2 (ja)

Priority Applications (1)

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JP2012184911A JP5500220B2 (ja) 2006-08-18 2012-08-24 振動片、振動子、発振器、及びセンサー

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006223319 2006-08-18
JP2006223319 2006-08-18
JP2012184911A JP5500220B2 (ja) 2006-08-18 2012-08-24 振動片、振動子、発振器、及びセンサー

Related Parent Applications (1)

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JP2007212634A Division JP5115092B2 (ja) 2006-08-18 2007-08-17 圧電振動片、圧電デバイス、及び発振器

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JP2013017207A JP2013017207A (ja) 2013-01-24
JP2013017207A5 JP2013017207A5 (enExample) 2013-09-26
JP5500220B2 true JP5500220B2 (ja) 2014-05-21

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JP2012184911A Active JP5500220B2 (ja) 2006-08-18 2012-08-24 振動片、振動子、発振器、及びセンサー

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JP (1) JP5500220B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9257959B2 (en) 2013-03-29 2016-02-09 Seiko Epson Corporation Resonator element, resonator, oscillator, electronic apparatus, sensor, and moving object
TWI634742B (zh) 2013-11-16 2018-09-01 精工愛普生股份有限公司 振動片、振動子、振盪器、電子機器及移動體
JP6375611B2 (ja) 2013-11-16 2018-08-22 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器および移動体
CN109580030B (zh) * 2019-01-10 2020-08-11 哈尔滨华凡传感技术有限公司 一种具有多枚箭形振臂的高精度谐振式石英温度传感器

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004120802A (ja) * 2004-01-19 2004-04-15 Seiko Epson Corp 振動片、振動子、発振器及び電子機器
JP4301200B2 (ja) * 2004-10-20 2009-07-22 セイコーエプソン株式会社 圧電振動片および圧電デバイス

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JP2013017207A (ja) 2013-01-24

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