JP5488444B2 - Radiation temperature control device - Google Patents

Description

  The present invention relates to a radiation temperature adjusting device including a radiation temperature adjusting means for circulatingly supplying a fluid into a radiation panel disposed in a booth to adjust the temperature of the inside of the booth.

Traditionally, various operations using precision instruments such as electron microscopes can be adversely affected by environmental effects such as ambient temperature, so the measurement accuracy and operating conditions may be adversely affected. A temperature control device that adjusts the temperature inside to a predetermined temperature is employed.
As such a temperature control device, there is a blow-type temperature control device that sends temperature-controlled air into a booth and controls the temperature inside the booth to a predetermined temperature. However, in this air temperature control device, since air is sent into the booth, air convection occurs in the booth, which may adversely affect the measurement accuracy and operating state of precision equipment.
Therefore, as a temperature control device that controls the temperature while preventing the flow of air in the booth as much as possible, a radiant panel is arranged in the booth and the fluid is allowed to flow through the radiant panel. There has been proposed a radiation temperature control device that controls the temperature of air in a booth by radiation.

  On the other hand, for example, in the temperature control device disclosed in Patent Document 1, the air temperature-controlled by the heat source device is directly blown into the booth, and the air is blown into the radiation panel disposed on the ceiling of the booth. It is disclosed that both are included. When the indoor load is high, the air temperature is controlled by blowing air to the booth directly, and when the indoor load is small, the temperature-controlled air is passed through the radiant panel. The radiation temperature is adjusted by radiation from the panel.

JP-A-6-201154

  However, the temperature control device disclosed in Patent Document 1 has both a configuration in which the temperature-controlled air is directly blown into the booth and a configuration in which the air is blown into the radiation panel disposed on the ceiling of the booth. Therefore, the structure tends to be complicated, and problems such as an increase in cost, an increase in installation space, and an increase in the size of the apparatus occur.

  On the other hand, as described above, since the air temperature control device may adversely affect the operation state of the precision instrument, it is preferable to employ the radiation temperature control device. Since the structure is such that heat is transferred by radiation from the radiation panel, the rise in the air temperature in the booth becomes very slow. Therefore, at the time of starting the radiation temperature control device, there is a problem that a very long time (for example, about 24 hours or more) is required until the air temperature in the booth becomes the target temperature for air. Further, when adjusting the radiation temperature for such a long time, extra energy is required for the operation of the radiation temperature adjusting means at the start-up.

  The present invention has been made in view of such circumstances, and its purpose is to converge the air temperature in the booth to the air target set temperature in a shorter time with a simple configuration in the startup operation of the radiation temperature adjusting means. An object of the present invention is to provide a radiation temperature control device that can stabilize and realize energy saving.

In order to achieve the above object, a radiation temperature control device according to the present invention comprises a radiation temperature control means for circulating and supplying a fluid to a radiation panel disposed in a booth to adjust the radiation temperature in the booth, and the radiation A radiation temperature control device comprising a control means for controlling the operation of the temperature control means, the characteristic configuration is:
The booth is configured with a ceiling part and a side wall part,
Blower means for blowing air in the booth to the outer surface of the radiation panel is disposed in the booth,
The plate-like radiation panel is disposed along the side wall portion, and the air blowing means is disposed between the radiation panel and the side wall portion,
In the start-up operation of the radiant temperature adjusting means, the control means operates the radiant temperature adjusting means to adjust the radiant temperature inside the booth, and the air blowing means operates the air blown by the air blowing means. It is in the point which sprays on the outer surface of a radiation panel, makes it heat-exchange between the said air and the fluid in the said radiation panel, and temperature-controls the inside of the said booth by the convection of the said air.

According to the above characteristic configuration, when the radiation temperature adjusting means is activated, the radiation temperature is adjusted by radiation from the radiation panel, and the air in the booth blown by the blowing means is blown to the outer surface of the radiation panel. In addition, heat can be exchanged between the air and the fluid in the radiation panel, and convection temperature control in the booth can be performed by convection of the air.
Here, only the heat transfer by radiation from the radiation panel of the radiation temperature control means and the heat transfer by the air in the booth contacting the radiation panel (radiation temperature control), the air temperature in the booth is used for air. It takes a very long time (for example, about 24 hours or more) to converge to the target set temperature. For this reason, by operating the air blowing means at the same time as the radiation temperature adjusting means is activated or slightly delayed, the air in the booth blown by the air blowing means is blown to the outer surface of the radiation panel, and the air and Heat can be forcibly exchanged with the fluid in the radiant panel, and the heat in the fluid in the radiant panel can be transferred to the booth by the convection air (convection temperature control). . That is, the amount of heat supplied from the radiant panel to the booth by the radiant temperature control and the convection temperature control is larger than the amount of heat supplied from the radiant panel to the booth by only the radiant temperature control per unit time. The heat of the fluid in the radiant panel can be used more efficiently for temperature control of the air in the booth.
Thus, with a simple configuration in which the air blowing means is provided in the booth, the radiation temperature adjusting means and the air blowing means can be operated in a shorter time (for example, about 12 hours) when the radiation temperature adjusting means is activated. The air temperature in the booth can be converged and stabilized at the target temperature for air. In addition, since the operation time during the start-up operation is shortened, energy saving can be achieved.
Therefore, when the radiation temperature adjusting means is operated, the air temperature in the booth can be stabilized so as to converge to the air target set temperature in a shorter time with a simple configuration, thereby realizing energy saving.
Furthermore, the booth is formed with a ceiling part and a side wall part so that air or the like does not enter the internal space from the outside, a plate-like radiation panel is disposed along the side wall part, and the air blowing means, It is arrange | positioned between the radiation panel and the side wall part. The place where the air blowing means is disposed is a place (between the radiation panel and the side wall) where heat (cold heat or heat) radiated from the radiation panel and transferred is likely to stay. The air blower blows the air in the booth onto the outer surface of the radiant panel at this location and causes convection, so that the air in the radiant panel has a lot of heat (cold or hot) in the booth. In addition to being able to transfer heat (convection temperature control), heat (cold heat and hot heat) staying between the radiant panel and the side wall can be transferred to the booth by the convection air.
Therefore, the heat in the booth is transferred to the booth by convection air with a larger amount of heat (cold or hot) of the fluid in the radiant panel, and the heat of the fluid in the radiant panel is more efficiently controlled. Can be used.

A further characteristic configuration of the radiation temperature control device according to the present invention includes an air temperature detecting means for detecting an air temperature of the air in the booth,
In the starting operation of the radiation temperature adjusting means, the control means stops the air blowing means when the air temperature detected by the air temperature detecting means reaches the target set temperature for air.

  According to the above characteristic configuration, in the start-up operation of the radiation temperature adjusting means, when the air temperature reaches the target set temperature for air, the control means stops the air blowing means while continuing the operation of the radiation temperature adjusting means. Let As a result, the start-up operation is changed to the normal operation (radiation temperature control), and the inside of the booth is controlled only by the radiation temperature control, and the air temperature is converged to the target set temperature for air and maintained in a stable state. Can do.

A further characteristic configuration of the radiation temperature control device according to the present invention includes an air temperature detecting means for detecting an air temperature of the air in the booth,
In the start-up operation of the radiation temperature adjusting means, when the deviation between the air temperature detected by the air temperature detecting means and the air target set temperature is large, the control means is circulated and supplied into the radiation panel. When the fluid target set temperature is set so that the temperature difference between the fluid target set temperature and the air target set temperature is large, and the deviation between the air temperature and the air target set temperature is small, the fluid The target set temperature for fluid is set so that the temperature difference between the target set temperature for air and the target set temperature for air becomes small.

According to the above characteristic configuration, when the control means has a large deviation between the air temperature (for example, 30 ° C.) and the air target set temperature (for example, 20 to 22 ° C.) (when the indoor load is large (for example, the deviation is 8 to 10 ° C)), the fluid target set temperature (for example, 10 ° C) so that the temperature difference between the fluid target set temperature and the air target set temperature (for example, 20 to 22 ° C) becomes large. The fluid having a target set temperature for fluid (for example, 10 ° C.) having a large temperature difference (for example, 10 to 12 ° C.) with respect to the target set temperature for air (for example, 20 to 22 ° C.) Circulated and supplied by the radiation panel.
Further, when the control means has a small deviation between the air temperature (for example, 25 ° C.) and the air target set temperature (for example, 20 to 22 ° C.) (when the indoor load is small (for example, the deviation is 3 to 5 ° C.)). ), The target set temperature for fluid (for example, 15 to 18 ° C.) is set so that the temperature difference between the target set temperature for fluid and the target set temperature for air (for example, 20 to 22 ° C.) becomes small. The fluid having a target set temperature for fluid (for example, 15 to 18 ° C.) having a small temperature difference (for example, 2 to 7 ° C.) with respect to the target set temperature (for example, 20 to 22 ° C.) Is circulated and supplied.
In both cases where the deviation is large and small, the fluid target set temperature is the temperature on the opposite side of the air target set temperature from the detected air temperature (in the case of cooling operation, the air target set temperature). The temperature is set to the low temperature side of the set temperature, or to the high temperature side of the target set temperature for air in the case of heating operation.
As a result, when the indoor load in the booth is large, a rapid radiation temperature control in the booth can be performed with a fluid having a high amount of heat (cold heat amount or heat amount). On the other hand, when the indoor load is small The inside of the booth can be radiantly temperature-controlled with a fluid having a low amount of heat (cold heat amount or warm heat amount), and can be converged and stabilized at the target set temperature for air.
Further, since the radiation temperature can be adjusted more quickly when the indoor load is large, the operation time in the startup operation of the radiation temperature adjusting means can be reduced, and energy saving can be achieved.

Schematic configuration diagram of a radiation temperature control system equipped with a radiation temperature control device Conceptual diagram showing air temperature, target set temperature for air, fluid temperature, target set temperature for fluid, and operating state of blower fan in start-up operation and normal operation Schematic operation flow diagram of temperature control by the control unit

  The radiation temperature control system D provided with the radiation temperature control apparatus E which concerns on this invention is demonstrated referring FIGS. 1-3.

As shown in FIG. 1, the radiation temperature adjustment system D includes a booth 1 in which an electron microscope F (an example of a precision instrument) is accommodated, and a radiation temperature adjustment device E.
The radiant temperature control device E circulates and supplies a fluid Q (for example, water) in a radiant panel 2a disposed in the booth 1, and radiates the temperature of the air P in the booth 1 to adjust the radiant temperature. A fluid temperature sensor 3 (an example of fluid temperature detection means) that detects a fluid temperature Q1 of the fluid Q supplied into the radiation panel 2a, and an air temperature sensor 4 that detects an air temperature P1 of the air P in the booth 1. (An example of air temperature detection means), a control unit 5 (an example of control means) for controlling the operation of the radiation temperature adjusting means 2 and the like, and a blower fan for blowing the air P in the booth 1 to the outer surface of the radiation panel 2a 20 (an example of a blowing means). Although not shown, the control unit 5 includes a storage unit that can set the target set temperature P2 for air and the target set temperature Q2 for fluid in the booth 1 and can store various set information. Yes.
Below, after explaining the configuration of the booth 1, the radiation temperature control device E, and the blower fan 20, the operation (startup operation, normal operation) of the radiation temperature control device E will be described.

  As shown in FIG. 1, the booth 1 is surrounded by wall surfaces constituting the ceiling part 1 a and the side wall part 1 b and is formed in a substantially cubic shape so that air or the like does not enter the internal space in the booth 1 from the outside. The booth 1 is a clean room. In the booth 1, a pair of plate-like radiation panels 2 a that regulate the temperature of the air P in the booth 1 by radiation from the fluid Q supplied from the radiation temperature control device E are side walls in a state of facing each other. Arranged along the portion 1b. A gantry G is disposed at the bottom of the internal space of the booth 1, and the electron microscope F is placed on the gantry G and is accommodated in the booth 1.

  In the booth 1, an air temperature sensor 4 for detecting the air temperature P1 of the air P in the booth 1 is disposed. The air temperature P1 detected by the air temperature sensor 4 is input to the control unit 5 of the radiation temperature control device E.

  The radiant temperature control means 2 of the radiant temperature control apparatus E is a refrigerant A (refer to the dotted line arrow in the figure) in the order of the compressor 10, the condenser 11, the first electromagnetic valve 14, the expansion valve 12, and the evaporator 13 (an example of a cooling means). ) Is circulated in a refrigeration circuit C. The evaporator 13 is configured to cool the fluid Q by exchanging heat between the expanded refrigerant A and the fluid Q. The expansion valve 12 is configured such that the flow rate of the refrigerant A flowing through the refrigeration circuit C can be adjusted and the refrigerant A can be expanded. Further, the first solenoid valve 14 is configured to be able to switch between the intermittent state of the refrigerant A flowing through the refrigeration circuit C, that is, the stopped state and the flowing state of the refrigerant A. Note that the first electromagnetic valve 14 may be configured such that the flow rate of the refrigerant A can be adjusted when the refrigerant A is flowing.

The refrigeration circuit C is provided with a branch refrigeration circuit C1 that branches from between the compressor 10 and the condenser 11.
The branch refrigeration circuit C1 is configured to branch the refrigerant A from between the compressor 10 and the condenser 11 and return it between the expansion valve 12 and the evaporator 13 in the refrigeration circuit C. In the branch refrigeration circuit C1, the fluid Q cooled by the evaporator 13 is heat-exchanged with the refrigerant A flowing through the branch refrigeration circuit C1 in order from the upstream side in the flow direction of the refrigerant A to heat the fluid Q. The second solenoid valve 16 is arranged so as to be able to switch between the intermittent state of the refrigerant A flowing through the branch refrigerating circuit C1 and the refrigerant A flowing through the branch refrigeration circuit C1, that is, the stopped state and the flowing state of the refrigerant A. It is installed. The second electromagnetic valve 16 may be configured such that the flow rate of the refrigerant A can be adjusted when the refrigerant A is flowing. In the branch refrigeration circuit C1, the evaporator 13 and the compressor 10 of the refrigeration circuit C are shared.

  In addition, the radiation temperature adjusting means 2 is a fluid circulation that circulates the fluid Q in the order of the evaporator 13, the reheater 15, the electric heater 17, the liquid feed pump 18, the inlet and outlet of the radiation panel 2 a, and the evaporator 13. A flow path 19 is provided. The electric heater 17 provided in the fluid circulation channel 19 is a known electric heater, and is configured to be able to further heat the fluid Q that flows through the fluid circulation channel 19 and is heated by the reheater 15. . Further, the liquid feed pump 18 provided in the fluid circulation channel 19 functions as a circulation means for circulating the fluid Q through the fluid circulation channel 19. The fluid circulation channel 19 branches between the downstream side of the liquid feed pump 18 and the upstream side of the radiation panel 2a, and is configured to be able to supply the fluid Q to the pair of radiation panels 2a, respectively. It joins between the downstream side of the panel 2a and the upstream side of the evaporator 13, and it is comprised so that the fluid Q discharged | emitted from a pair of radiation panel 2a can flow to the evaporator 13 side.

  In the fluid circulation channel 19, between the downstream side of the liquid feed pump 18 and the upstream side of the pair of radiation panels 2a (upstream side from the portion branched to the pair of radiation panels 2a), the pair of radiation panels 2a are connected. A fluid temperature sensor 3 for detecting the fluid temperature Q1 of the supplied fluid Q is disposed. The fluid temperature Q1 detected by the fluid temperature sensor 3 is configured to be input to the control unit 5 of the radiation temperature adjusting device E.

  The radiation panel 2a is constituted by a known radiation panel, and is provided in a pair in the booth 1, for example, an inlet through a heat transfer pipe (not shown) meanderingly disposed in the plate-like radiation panel 2a. When the fluid Q flows from the outlet toward the outlet, the temperature of the air P in the booth 1 can be controlled by radiation (heat transfer) from the fluid Q.

  The control unit 5 includes known information calculation processing means, and operates the compressor 10, the expansion valve 12, the first electromagnetic valve 14, the second electromagnetic valve 16, the electric heater 17, the liquid feed pump 18, the blower fan 20, and the like. The state is controlled, and the flow rate and temperature control of the refrigerant A and the fluid Q are possible. Note that the control unit 5 is configured to receive a signal related to the operating state of each device from each device.

  The blower fan 20 is configured to blow the air P in the booth 1 onto the outer surface of the radiation panel 2a and convect the air P into the booth 1 (for example, an axial blower or a mixed flow blower). Although it is good, in this embodiment, it is comprised by the propeller fan (axial flow fan). The blower fan 20 is disposed in the booth 1 in a gap formed between the side wall 1b of the booth 1 and the radiation panel 2a. Although the number of the blower fans 20 can be set as appropriate, in the present embodiment, two blower fans 20 are disposed in each of the pair of radiation panels 2a, and four blower fans 20 are disposed as a whole. ing. The blower fan 20 is fixedly disposed on the radiation panel 2a, the side wall 1b and the bottom of the booth 1. The operation of the blower fan 20 is controlled by a signal from the control unit 5.

Next, the operation method of the radiation temperature control apparatus E will be described with reference to FIGS. 2 and 3 in the case where the booth 1 is cooled.
During startup operation of the radiation temperature control device E (before the work of the electron microscope F is started), the user operates the operation unit (not shown) to start the radiation temperature control device E (step # 1), and the booth The air target set temperature P2 is input so that the air temperature P1 of the air P in 1 becomes an optimum temperature for the operation of the electron microscope F (target set temperature P2 for air: 20 to 22 ° C., for example). Set (step # 2). At the same time as the activation of the radiation temperature control device E, the control unit 5 may read a preset temperature from a storage unit (not shown) and use it as the air target set temperature P2.

  And the control part 5 sets the target set temperature Q2 for fluids of the fluid Q circulated and supplied in the radiation panel 2a. That is, as shown in FIG. 2, the controller 5 increases the temperature difference Δs1, which is the temperature difference Δs between the fluid target set temperature Q2 and the air target set temperature P2 (the temperature difference Δs1 is a predetermined value ( For example, the fluid target set temperature Q2 is set to a first fluid target set temperature Q21 (for example, 10 ° C.) as the fluid target set temperature Q2 (step 10). # 3). The first fluid target set temperature Q21 is set to a temperature lower than the air target set temperature P2 in view of the detected air temperature P1.

  Further, simultaneously with the activation of the radiation temperature adjusting device E, the control unit 5 starts the operation of the blower fan 20 and rotates the blower fan 20 at a predetermined rotational speed (step # 4). In this embodiment, steps # 1 to # 4 are performed substantially simultaneously in time.

Thereby, the air P in the booth 1 is blown to the outer surface of the radiant panel 2a by the operation of the blower fan 20, and the air P and the fluid Q in the radiant panel 2a are forcibly heat-exchanged. Can be transferred to the booth 1 by convection air P (convection temperature control).
For example, in the radiant panel 2a disposed on the left side in FIG. 1, the blower fan 20 is blown in the direction from the side wall 1b of the booth 1 toward the radiant panel 2a (the direction from left to right in FIG. 1). The blower is blown to the outer surface of the radiation panel 2a and flows along the outer surface, and then the central portion of the booth 1 in which the electron microscope F is disposed from the upper and lower and left and right ends of the outer surface. It flows through (between a pair of opposed radiation panels 2a). In particular, in the place where the heat (cold heat) radiated from the radiation panel 2a is likely to stay (between the radiation panel 2a and the side wall 1b), the blower fan 20 is placed on the outer surface of the radiation panel 2a on the air P in the booth 1. Can be transferred to the booth 1 by the convection air P (convection temperature control) and the radiation panel 2a. The heat (cold heat) staying between the side wall 1b and the side wall 1b can also be transferred into the booth 1 by the convection air P.

Accordingly, the amount of heat supplied from the radiant panel 2a to the booth 1 by the radiant temperature control and the convection temperature control is more than the amount of heat supplied from the radiant panel 2a to the booth 1 only by the radiant temperature control per unit time. Therefore, the heat of the fluid Q in the radiant panel 2a can be used for the temperature control of the air P in the booth 1 more efficiently.
Therefore, with a simple configuration in which the blower fan 20 is provided in the booth 1, a shorter time (for example, 12) can be obtained simply by operating the radiation temperature adjusting means 2 and the blower fan 20 when the radiation temperature adjusting means 2 is activated. The air temperature P1 in the booth 1 can be converged to the air target set temperature P2 and stabilized in about time). In addition, since the operation time during the start-up operation is shortened, energy saving can be achieved.

Next, the control unit 5 derives a deviation Δt between the detected air temperature P1 and the air target set temperature P2, and when the deviation Δt is large (when the deviation Δt is greater than or equal to a predetermined value) (step # 5: Yes), the operation is continued at the set target set temperature Q21 for the first fluid (for example, 10 ° C.). In FIG. 2, the deviation Δt at this time is referred to as deviation Δt1, and the temperature difference Δs between the first fluid target set temperature Q21 and the air target set temperature P2 is described as a temperature difference Δs1. The predetermined value for determining whether or not the deviation Δt is large is set to the air target set temperature P2 + α (for example, P2 + 2 to 3 ° C.).
On the other hand, when the deviation Δt between the air temperature P1 (for example, 25 ° C.) and the air target set temperature P2 (for example, 20 to 22 ° C.) is small (the deviation Δt is a predetermined value (for example, P2 + 2 to 2). (Step # 5: No), the first target fluid temperature setting Q21 is less than the target fluid temperature target temperature Q2 and the air target temperature setting P2. In such a manner (so that the temperature difference Δs2 becomes smaller than a predetermined value (eg, 10 ° C.)), it is changed (reset) to the second fluid target set temperature Q22 (eg, 15-18 ° C.) (step # 6). ). In FIG. 2, the deviation Δt at this time is described as a deviation Δt2, and the temperature difference Δs between the second fluid target set temperature Q22 and the air target set temperature P2 is described as a temperature difference Δs2. The second fluid target set temperature Q22 is set to a temperature lower than the air target set temperature P2 in view of the detected air temperature P1.
Therefore, the control unit 5 actually corresponds to the deviation Δt (deviations Δt1, Δt2) between the air temperature P1 of the air P in the booth 1 detected by the air temperature sensor 4 and the air target set temperature P2. Then, the fluid target set temperature Q2 (Q21, Q22) is set such that the fluid target set temperature Q2 and the air target set temperature P2 respectively generate a predetermined temperature difference Δs (temperature differences Δs1, Δs2). .

  Thereby, at the time of start-up operation of the radiation temperature control device E, the air P in the booth 1 is changed to the target set temperature P2 for the air by the fluid Q that has been temperature-controlled by the radiation temperature control means 2 and has become the target set temperature Q2 for the fluid. The radiation temperature can be adjusted so that Furthermore, when the indoor load of the booth 1 is large (deviation Δt1), the rapid radiation temperature in the booth 1 is obtained by the fluid Q (first fluid target set temperature Q21) having a high amount of heat (cooling amount or heating amount). In contrast, when the indoor load is small (deviation Δt2), the inside of the booth 1 is radiated by the fluid Q (second fluid target set temperature Q22) having a low calorific value (cold heat amount or warm heat amount). The temperature can be adjusted to converge and stabilize at the air target set temperature P2. Further, since the radiation temperature can be adjusted more quickly when the indoor load is large, the operation time in the startup operation of the radiation temperature adjusting means 2 can be reduced, and energy saving can be achieved.

  When the deviation Δt becomes zero (substantially zero) (step # 7: Yes), that is, when the air temperature P1 in the booth 1 becomes the air target set temperature P2, The operation of the blower fan 20 is stopped (step # 8). In this state, the booth 1 has a temperature suitable for the operation of the electron microscope F. Therefore, the convection temperature control by the blower fan 20 is stopped, and the startup operation is changed to the normal operation (radiation temperature control). By adjusting the temperature within 1 only by adjusting the radiation temperature, the air temperature P1 can be converged to the air target set temperature P2 and maintained in a stable state (step # 9). If the deviation Δt is not zero (substantially zero) (step # 7: No), the operation of the blower fan 20 and the like is continued.

  In the normal operation, the control unit 5 controls the operation of the radiation temperature adjusting means 2 and supplies the radiation panel 2a with the fluid so that the air temperature P1 converges to the air target set temperature P2 and maintains a stable state. The fluid temperature Q1 of Q and the target set temperature Q2 for fluid are appropriately changed. In this normal operation, the inside of the booth 1 is temperature-controlled only by the radiation temperature control, so that almost no convection of the air P occurs in the booth 1 and it is possible to prevent the work of the electron microscope F from being adversely affected.

  Therefore, in the radiation temperature control apparatus E according to the present application, the air temperature P1 in the booth 1 is converged to the air target set temperature P2 in a shorter time with a simple configuration in the startup operation of the radiation temperature control means 2. It is possible to stabilize and save energy, and in normal operation, the work by the electron microscope F can be performed without being affected by the convection of the air P or the like.

[Another embodiment]
(A) In the above embodiment, activation of the radiation temperature adjusting means 2 (step # 1 in FIG. 3), setting of the air target set temperature P2 (step # 2), and setting of the fluid target set temperature Q2 (step #) 3) Although the start of the operation of the blower fan 20 (step # 4) is performed almost simultaneously in time, the radiation temperature control and the convection temperature control are performed during the start-up operation of the radiation temperature control means 2, and the booth If it can be stabilized so that the inside of 1 is converged to the target temperature P2 for air in a shorter time, it is not particularly limited to this configuration.
For example, the steps # 1 to # 3 may be performed substantially simultaneously, and thereafter, the operation of the blower fan 20 may be started (step # 4 is performed) at a time slightly delayed in time. That is, when the fluid temperature Q1 of the fluid Q in the radiant panel 2a reliably converges to the set fluid target set temperature Q2 (for example, the first fluid target set temperature Q21), the blower fan 20 is operated. By setting it as the structure which starts, heat exchange with the air P in the booth 1 and the fluid Q in the radiation panel 2a can be performed more efficiently. Further, steps # 1 to # 4 can be executed sequentially.

(B) Although the cooling operation has been described in the above embodiment, the radiation temperature control device E of the present application can be favorably applied also during the heating operation.

(C) In the above-described embodiment, the target set temperature Q2 for the fluid Q supplied to the radiation panel 2a by the radiation temperature adjusting means 2 during the start-up operation is set to, for example, 10 ° C. according to the magnitude of the deviation Δt. The example in which the temperature is set to two stages of the target set temperature Q21 for 1 fluid and 15 to 18 ° C. (target set temperature Q22 for the second fluid) has been described. If convergence and stabilization can be achieved, the set temperature and the number of steps can be changed as appropriate.
Further, during normal operation, the target set temperature Q2 for the fluid Q may be set to the target set temperature P2 for air.

(D) In the above embodiment, the evaporator 13 of the refrigeration circuit C is adopted as the cooling means, and the electric heater 17 and the reheater 15 of the branch refrigeration circuit C1 are adopted as the heating means. However, as the cooling means and the heating means, May be a known cooling means capable of cooling the fluid Q or a known heating means capable of heating. The number of cooling means and heating means can also be set as appropriate.

  As described above, in the start-up operation of the radiation temperature control means, the radiation temperature control capable of realizing energy saving by stabilizing the air temperature in the booth to converge to the target temperature for air in a shorter time with a simple configuration. It can be effectively used as a device.

DESCRIPTION OF SYMBOLS 1 Booth 1a Ceiling part 1b Side wall part 2 Radiation temperature control means 2a Radiation panel 3 Fluid temperature sensor (fluid temperature detection means)
4 Air temperature sensor (air temperature detection means)
5 Control unit (control means)
20 Blower fan (Blower unit)
P1 Air temperature P2 Air target set temperature Q1 Fluid temperature Q2 Fluid target set temperature C Refrigeration circuit C1 Branch refrigeration circuit (refrigeration circuit)
E Radiation temperature control device F Electron microscope (Precision equipment)
P Air Q Fluid Δt1, Δt2 Deviation Δs1, Δs2 Temperature difference

Claims (3)

Radiation temperature control means comprising: a radiation temperature adjusting means for circulatingly supplying a fluid into a radiation panel disposed in the booth to adjust the radiation temperature inside the booth; and a control means for controlling the operation of the radiation temperature adjusting means. A device,
The booth is configured with a ceiling part and a side wall part,
Blower means for blowing air in the booth to the outer surface of the radiation panel is disposed in the booth,
The plate-like radiation panel is disposed along the side wall portion, and the air blowing means is disposed between the radiation panel and the side wall portion,
In the start-up operation of the radiant temperature adjusting means, the control means operates the radiant temperature adjusting means to adjust the radiant temperature inside the booth, and the air blowing means operates the air blown by the air blowing means. A radiation temperature control device that sprays on the outer surface of a radiation panel to exchange heat between the air and the fluid in the radiation panel, and adjusts the temperature of the booth by convection of the air. Air temperature detecting means for detecting the air temperature of the air in the booth,
2. The control device according to claim 1, wherein, in the start-up operation of the radiation temperature adjusting unit, the control unit stops the air blowing unit when the air temperature detected by the air temperature detecting unit becomes a target set temperature for air. Radiation temperature control device. Air temperature detecting means for detecting the air temperature of the air in the booth,
In the start-up operation of the radiation temperature adjusting means, when the deviation between the air temperature detected by the air temperature detecting means and the air target set temperature is large, the control means is circulated and supplied into the radiation panel. When the fluid target set temperature is set so that the temperature difference between the fluid target set temperature and the air target set temperature is large, and the deviation between the air temperature and the air target set temperature is small, the fluid The radiation temperature adjusting device according to claim 1 or 2, wherein the target temperature setting for fluid is set so that a temperature difference between the target temperature setting for air and the target temperature setting for air is small.

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