JP5487805B2 - Electronic component supply apparatus, electronic component supply method, and computer program - Google Patents

Description

  The present invention relates to an electronic component supply device that supplies individual electronic components from an electronic component assembly in which a plurality of electronic components are regularly arranged in an electronic component processing unit that performs predetermined processing on the electronic components, and electronic component supply The present invention relates to a method and a computer program.

  Electronic component mounting machines, die bonders, and the like need to pick up individual electronic components from an electronic component assembly (for example, a wafer) in which a plurality of electronic components are regularly arranged. And an electronic component supply device capable of supplying individual electronic components from the electronic component assembly. Also, the electronic component characteristic sorter needs to measure the characteristic of each electronic component, and can supply the individual electronic component from the electronic component assembly to the position of the measuring instrument for measuring the characteristic of the electronic component. An electronic component supply device that can be used is also provided.

  In the electronic component supply apparatus, since a plurality of electronic components are regularly arranged in the electronic component assembly, the electronic component is moved to the electronic component processing unit only by moving the electronic component at an equal pitch according to the distance between adjacent electronic components. Can be fed to any position. However, when the electronic component assembly is set in the electronic component supply apparatus in a state where the arrangement direction of the electronic components and the moving direction of the electronic components are shifted, due to variations in distance between adjacent electronic components, movement pitch errors, etc. In some cases, a deviation may occur between the position of the electronic component to be supplied and the predetermined position of the electronic component processing unit. In view of this, an electronic component supply apparatus has been developed that determines whether or not there is a deviation between the position of the electronic component and the predetermined position of the electronic component processing unit.

  Patent Document 1 discloses an electronic component supply apparatus provided in an electronic component mounting machine that determines whether or not there is a deviation between the position of the electronic component and a predetermined position of the electronic component processing unit. It is disclosed. In the electronic component supply apparatus disclosed in Patent Document 1, a target component is specified when an electronic component is taken out from an electronic component assembly, and it is determined whether or not the position of the specified target component is appropriate. Whether or not the position of the target component is appropriate is determined by the following processing. First, the electronic component assembly is divided into a plurality of subdivisions, the subdivision in which the target component is located is specified, and a reference die having a circuit pattern different from that of a normal electronic component in the specified subdivision is set as a multipoint reference component. Extract and detect position. Then, the position of the target part is detected by image recognition processing, the positional deviation between the target part and each reference part is measured in the small section, and it is determined whether or not the measured positional deviation is within a predetermined allowable range. ing.

JP 2006-80105 A

  However, in the electronic component supply device disclosed in Patent Document 1, unless a reference die having a circuit pattern different from that of a normal electronic component is formed in the electronic component assembly, the position of the electronic component and the predetermined electronic component processing unit are determined. It cannot be determined whether or not there is a deviation from the position. Also, even if a reference die is formed in the electronic component assembly, if the reference die cannot be recognized by the image recognition process, whether or not there is a deviation between the position of the electronic component and the predetermined position of the electronic component processing unit. Cannot be determined.

  Furthermore, the electronic component supply device disclosed in Patent Document 1 determines whether or not there is a deviation between the position of the electronic component and the predetermined position of the electronic component processing unit. Since the electronic component processing unit does not have a configuration for correcting the deviation from the predetermined position, if it is determined that the positional deviation is outside the predetermined allowable range, a process for correcting the positional deviation is separately required.

  The present invention has been made in view of the above circumstances, and the relative relationship between the electronic component assembly and the electronic component processing unit is set so that there is no deviation between the position of the electronic component to be supplied and the predetermined position of the electronic component processing unit. An object of the present invention is to provide an electronic component supply apparatus, an electronic component supply method, and a computer program capable of correcting a typical movement amount.

In order to achieve the above object, an electronic component supply apparatus according to a first aspect of the present invention includes an electronic component assembly in which a plurality of electronic components are regularly arranged in an electronic component processing unit that performs predetermined processing on electronic components. in the electronic component supply device for supplying individual said electronic component, and the positional information regarding the location of each of the electronic component, at least non-defective, defective, have a different circuit patterns and the non-defective, the image recognition processing executed in advance is A mapping unit that maps and maps any attribute of the unrecognizable product that could not be recognized, and a storage unit that stores basic image information of the electronic component that serves as a basis for comparison, and stores in the storage unit Based on certain mapping information, a recognition unit that recognizes attributes for each electronic component in a predetermined order, and an image that acquires image information of the electronic component that has been recognized by the recognition unit. A sensor, and a moving unit that relatively moves the electronic component assembly and the electronic component processing unit to supply the individual electronic components to the predetermined position of the electronic component processing unit in the predetermined order; When the attribute of the electronic component recognized by the recognition unit is a non-defective product or a defective product, the image information of the electronic component acquired by the image sensor and the basic image information of the electronic component stored in the storage unit And a movement correction unit that corrects a relative movement amount between the electronic component assembly and the electronic component processing unit based on a deviation amount between the two image information, and an attribute recognized by the recognition unit cannot be recognized. When two or more of the electronic components that are products are consecutive in the predetermined order, the attribute recognized by the recognition unit bypasses the electronic components that are unrecognizable products, and the attribute recognized by the recognition unit is a non-defective product Or defective products That said moving the image sensor along the electronic component, and a bypass processing unit that performs processing in the shift correction unit by using the image information of the electronic component obtained in the moved position.

The electronic component supply device according to a second aspect of the present invention is the electronic component supply device according to the first aspect, wherein the bypass processing unit is configured such that the electronic component whose attribute recognized by the recognition unit is an unrecognizable product is continuous. The image sensor is moved in the orthogonal direction.

In the electronic component supply device according to a third aspect of the present invention, in the first or second aspect of the invention, the detour processing unit has more than a predetermined number of the electronic components whose attributes recognized by the recognition unit are unrecognizable products. If you are, said attributes recognized by the recognition unit to bypass the electronic component is unrecognizable products, correcting the relative movement amount between the electronic component assembly and the electronic component unit, wherein When one or a predetermined number of the electronic parts whose attributes recognized by the recognition unit are unrecognizable are continuous, the electronic parts whose attributes recognized by the recognition unit are unrecognizable are not bypassed. The relative movement amount between the electronic component assembly and the electronic component processing unit is set to a predetermined pitch.

  The electronic component supply apparatus according to a fourth aspect of the present invention is the electronic component supply device according to any one of the first to third aspects, wherein the mapping information includes position information regarding a position for each electronic component, at least a non-defective product, a defective product, and a test element. , Including information mapped in association with any attribute of the unrecognizable product, the movement correction unit, when the attribute of the electronic component recognized by the recognition unit is a non-defective product, a defective product, a test element, The image information of the electronic component acquired by the image sensor is compared with the basic image information of the electronic component stored in the storage unit, and the electronic component assembly is The amount of movement relative to the electronic component processing unit is corrected.

In order to achieve the above object, an electronic component supply method according to a fifth aspect of the present invention includes an electronic component assembly in which a plurality of electronic components are regularly arranged in an electronic component processing unit that performs predetermined processing on electronic components. In the electronic component supply method for supplying individual electronic components, the storage unit has position information on the position of each electronic component and at least a non-defective product, a defective product, and a circuit pattern different from the non-defective product, and an image executed in advance Mapping information in which mapping is performed by mapping any attribute of an unrecognizable product that could not be recognized by the recognition processing, and basic image information of the electronic component that is the basis for comparison is stored, and the stored mapping Based on the information, a first step of recognizing the attribute for each electronic component in a predetermined order, and obtaining image information of the electronic component that has recognized the attribute with an image sensor Two steps, and a third step of relatively moving the electronic component assembly and the electronic component processing unit to supply the individual electronic components to the predetermined position of the electronic component processing unit in the predetermined order; When the recognized attribute of the electronic component is a non-defective product or a defective product, the acquired image information of the electronic component is compared with the basic image information of the stored electronic component, and the amount of deviation between the image information A fourth step of correcting a relative movement amount between the electronic component assembly and the electronic component processing unit based on the electronic component, and the electronic component whose attribute recognized in the first step is an unrecognizable product, When two or more consecutive in a predetermined order, the attribute recognized in the first step bypasses the electronic component which is an unrecognizable product, and the attribute recognized in the first step is a good product or a defective product Part The image sensor moves along the, and a fifth step of performing the process in the fourth step by using the image information of the electronic component obtained in the moved position.

The electronic component supply method according to a sixth aspect of the present invention is the electronic component supply method according to the fifth aspect, wherein the attribute recognized in the first step is an unrecognizable product in the fifth step. The image sensor is moved in the orthogonal direction.

The electronic component supply method according to a seventh aspect of the present invention is the electronic component supply method according to the fifth or sixth aspect, wherein in the fifth step, the number of the electronic components whose attributes recognized in the first step are unrecognizable products is greater than a predetermined number. If it is continuous, the attribute recognized in the first step bypasses the electronic component that is an unrecognizable product, and corrects the relative movement amount of the electronic component assembly and the electronic component processing unit. When the electronic component whose attribute recognized in the first step is an unrecognizable product is one or a predetermined number or less, the electronic component whose attribute recognized in the first step is an unrecognizable product The relative movement amount of the electronic component assembly and the electronic component processing unit is set to a predetermined pitch.

The electronic component supply method according to an eighth aspect of the present invention is the electronic component supply method according to any one of the fifth to seventh aspects, wherein the mapping information includes position information regarding a position for each electronic component, at least a non-defective product, a defective product, and a test element. includes information mapped in association with the one of the attributes of unrecognizable article, wherein the electronic component attributes recognized in the first step good, defective, if a test element, the fourth step is The acquired image information of the electronic component is compared with the stored basic image information of the electronic component, and the electronic component assembly and the electronic component processing unit are compared based on the shift amount of the image information. Correct the relative movement.

In order to achieve the above object, a computer program according to a ninth aspect of the present invention provides an electronic component processing unit that performs a predetermined process on an electronic component, and an individual electronic component assembly in which a plurality of electronic components are regularly arranged. In the computer program that can be executed by the electronic component supply device that supplies the electronic component, the electronic component supply device is different from the positional information regarding the position for each electronic component and at least the good product, the defective product, and the good product. Mapping information having a circuit pattern and mapping corresponding to any attribute of an unrecognizable product that could not be recognized by image recognition processing executed in advance , and basic image information of the electronic component that is the basis for comparison And storing the attributes for each electronic component in a predetermined order based on the mapping information stored in the storage unit Recognizing means, image accepting means for accepting image information obtained by imaging the electronic component whose attribute has been recognized by the recognizing means, and a predetermined position of the electronic component processing unit in the predetermined order. To move the electronic component assembly and the electronic component processing unit relative to each other, a movement instructing unit that instructs the moving unit to move relatively, and an attribute of the electronic component recognized by the recognizing unit is non-defective or defective. In the case of a non-defective product, the image information of the electronic component received by the image receiving unit is compared with the basic image information of the electronic component stored in the storage unit, and based on the amount of deviation between the image information. the electronic component assembly wherein by correcting the relative moving amount of the electronic component unit and, moving correction means for indicating the corrected movement amount to the mobile unit, attributes unrecognizable recognized by said recognition means The electronic component is a goods is the case of continuous two or more in a predetermined order, wherein the attributes recognized by bypassing the electronic component is unrecognizable article recognition means attribute good recognized by said recognition means Alternatively, the moving unit is instructed to move the image sensor along the electronic component which is a defective product, and the processing by the movement correcting unit is performed using image information of the electronic component acquired at the moved position. It functions as a detour processing means.

In the first invention and the fifth invention, the moving unit relatively moves the electronic component assembly and the electronic component processing unit to supply the individual electronic components to the predetermined position of the electronic component processing unit in a predetermined order. In the case where the attribute of the electronic component recognized by the recognition unit is a non-defective product or a defective product, the movement correction unit, the image information of the electronic component acquired by the image sensor, and the basic image information of the electronic component stored in the storage unit, Are compared, and the relative movement amount between the electronic component assembly and the electronic component processing unit is corrected based on the shift amount of both pieces of image information. Alternate route processing unit, an electronic component attributes recognized by the recognition unit is an unrecognizable article, when continuously more than one in a predetermined order, the attributes recognized by the recognition unit to bypass the electronic component is unrecognizable products Then, the image sensor is moved along the electronic component whose attribute recognized by the recognition unit is a non-defective product or a defective product, and the processing in the movement correction unit is performed using the image information of the electronic component acquired at the moved position. Therefore, even when electronic parts whose attributes recognized by the recognition unit are unrecognizable products are consecutive in a predetermined order, image information of electronic components whose attributes recognized by the recognition unit are non-defective products or defective products is acquired. Since the processing in the movement correction unit is performed using the image information of the electronic component acquired at the position moved by moving the image sensor so that the position of the electronic component to be supplied and the predetermined position of the electronic component processing unit Therefore, the relative movement amount between the electronic component assembly and the electronic component processing unit can be corrected so that no deviation occurs.

In the second and sixth inventions, since the image sensor is moved in a direction orthogonal to the direction in which the electronic component whose recognition unit is an unrecognizable product is recognized, the attribute recognized by the recognition unit. Therefore, the distance that the image sensor moves can be shortened, and the efficiency of supplying the electronic component to the electronic component processing unit is improved.

In the third and seventh aspects of the invention, when there are more than a predetermined number of electronic components whose attributes recognized by the recognition unit are unrecognizable products, the electronic components whose attributes recognized by the recognition unit are unrecognizable products By correcting the relative movement amount between the electronic component assembly and the electronic component processing unit, one or a predetermined number of electronic components whose attributes recognized by the recognition unit are unrecognizable are continuously detected. If the recognition unit does not bypass the electronic component whose attribute is recognized by the recognition unit, the relative movement between the electronic component assembly and the electronic component processing unit is set to a predetermined pitch. Until an error unacceptable for the apparatus occurs, it can be set not to perform the processing in the detour processing unit, the amount of movement of the image sensor is reduced, and the efficiency of supplying the electronic component to the electronic component processing unit is improved.

  In the fourth and eighth inventions, the mapping information is information obtained by mapping the positional information on the position for each electronic component and mapping at least one attribute of a non-defective product, a defective product, a test element, or an unrecognizable product. In the case where the attribute of the electronic component recognized by the recognition unit is a non-defective product, a defective product, or a test element, the movement correction unit includes the image information of the electronic component acquired by the image sensor and the electronic component stored in the storage unit. Compares with basic image information and corrects the relative amount of movement between the electronic component assembly and the electronic component processing unit based on the amount of deviation between the two image information. The correction unit can perform processing, and the relative movement amount between the electronic component assembly and the electronic component processing unit is corrected so that the electronic component to be supplied does not deviate from the predetermined position of the electronic component processing unit. To be able to That.

In the ninth invention, the movement instructing means moves so as to relatively move the electronic component assembly and the electronic component processing unit in order to supply the individual electronic components to the predetermined position of the electronic component processing unit in a predetermined order. If the attribute of the electronic component recognized by the recognition unit is a non-defective product or a defective product, the movement correction unit receives the image information of the electronic component received by the image reception unit and the electronic information stored in the storage unit. Compare the basic image information of the component, correct the relative movement amount between the electronic component assembly and the electronic component processing unit based on the deviation amount of both image information, and instruct the moving unit the corrected movement amount When the electronic component whose attribute recognized by the recognition unit is an unrecognizable product continues in a predetermined order, the detour processing unit bypasses the electronic component whose attribute recognized by the recognition unit is an unrecognizable product is, the attributes that were recognized by the recognition means The moving unit is instructed to move the image sensor along the electronic component which is a defective or defective product, the image information of the electronic component acquired at the moved position, and the basic image information of the electronic component stored in the storage unit The relative movement amount of the electronic component assembly and the electronic component processing unit is corrected so that there is no deviation between the position of the electronic component to be supplied and the predetermined position of the electronic component processing unit. Can do.

An electronic component supply apparatus, an electronic component supply method, and a computer program according to the present invention include an electronic component assembly and an electronic component for a moving unit to supply individual electronic components to a predetermined position of an electronic component processing unit in a predetermined order. When the attribute of the electronic component recognized by the recognition unit is a non-defective product or a defective product, the image information of the electronic component acquired by the image sensor and the electronic component stored in the storage unit are moved. Compare the basic image information, correct the relative movement amount between the electronic component assembly and the electronic component processing unit based on the deviation amount of both image information, and the attribute recognized by the recognition unit is an unrecognizable product When two or more electronic components are consecutive in a predetermined order, the attribute recognized by the recognition unit bypasses the electronic component that is an unrecognizable product, and the attribute recognized by the recognition unit is changed to a non-defective or defective electronic component. Along the image center By comparing the image information of the electronic component acquired at the moved position with the basic image information of the electronic component stored in the storage unit, the position of the electronic component to be supplied and the electronic component processing unit The relative movement amount between the electronic component assembly and the electronic component processing unit can be corrected so that there is no deviation from the predetermined position.

It is a schematic diagram which shows the structure of the electronic component supply apparatus which concerns on embodiment of this invention. It is a top view of the wafer mounted in the XY table of the electronic component supply apparatus which concerns on embodiment of this invention. It is an illustration figure of the mapping information of the wafer of the electronic component supply apparatus which concerns on embodiment of this invention. It is an illustration figure of the mapping information of the conventional wafer. It is a block diagram which shows the structural example of the electronic component supply apparatus which concerns on embodiment of this invention. It is a flowchart which shows the process sequence of CPU of the electronic component supply apparatus which concerns on embodiment of this invention. It is a schematic diagram which shows the operation | movement procedure of the adsorption | suction part and image sensor of the electronic component supply apparatus which concerns on embodiment of this invention.

  Hereinafter, an electronic component supply device, an electronic component supply method, and a computer program according to an embodiment of the present invention will be specifically described with reference to the drawings. The following embodiments do not limit the invention described in the claims, and all combinations of characteristic items described in the embodiments are essential to the solution. It goes without saying that it is not limited.

  Further, in the present embodiment, an electronic component supply apparatus, an electronic component supply method, and a computer program used in an electronic component mounting machine that picks up individual electronic components from a wafer by a suction unit, conveys them to a substrate, and mounts them will be described. However, the present invention is not particularly limited to use in an electronic component mounting machine, and may be used in a characteristic sorting machine for electronic components.

  FIG. 1 is a schematic diagram showing a configuration of an electronic component supply apparatus according to an embodiment of the present invention. The electronic component supply apparatus shown in FIG. 1 has an XY table 3 on which a wafer 2 that is an electronic component assembly in which a plurality of electronic components 1 are regularly arranged, and an XY table 3 and an electronic component 1 are picked up. The electronic part 1 is supplied to a predetermined position of the moving part 5 that moves relative to the suction part 4, the image sensor 6 that acquires image information of each electronic part 1, and the suction part 4 that picks up the electronic part 1. For this purpose, a supply control unit 7 for controlling the moving unit 5 is provided. By using the electronic component supply apparatus according to the present embodiment, the electronic component 1 is picked up from the wafer 2 by the suction unit 4 and conveyed to another table, so that the electronic component mounting machine is provided on another table. The electronic component 1 can be mounted on the substrate 8.

  The plurality of electronic components 1, 1,... Can be formed by cutting the wafer 2 on which the circuit pattern is formed into a lattice shape. The wafer 2 has various sizes such as a diameter of 6 inches (150 mm) and 8 inches (200 mm), and the electronic component 1 formed by cutting the wafer 2 has a comma number of square millimeters to several tens of square millimeters. There are various sizes to the extent. The electronic component assembly is not limited to the wafer 2 and may have other configurations as long as a plurality of electronic components 1 are regularly arranged.

  The moving unit 5 controls the operation of at least one of a motor (not shown) that moves the XY table 3 and a motor (not shown) that moves the suction unit 4, and the wafer 2 placed on the XY table 3 It moves relative to the suction part 4. Further, the moving unit 5 can move the suction unit 4 in the vertical direction with respect to the XY table 3 or another table so that the electronic component 1 can be picked up and transported. In the following, for the sake of simplicity, a case where the suction unit 4 is moved with respect to the wafer 2 will be described.

  The image sensor 6 is an imaging device attached to the front side in the traveling direction of the suction unit 4, and stores image information of the electronic component 1 arranged one forward in the traveling direction from the electronic component 1 picked up by the suction unit 4. get. In other words, the electronic component supply apparatus according to the present embodiment uses the image information of the electronic component 1 arranged one forward in the traveling direction from the electronic component 1 picked up by the suction unit 4. The movement amount (in the present invention, the movement amount is a vector amount) is corrected. Note that the image sensor 6 is not limited to the case where the image sensor 6 is attached to the suction unit 4, and may be provided independently of the suction unit 4. Further, the electronic component 1 for which image information is acquired by the image sensor 6 is not limited to the electronic component 1 that is arranged one forward in the traveling direction from the electronic component 1 picked up by the suction unit 4. Alternatively, the electronic component 1 picked up by the suction unit 4 may be used.

  The supply control unit 7 corresponds to position information regarding the position of each electronic component 1 and at least one attribute of a non-recognizable product that cannot be recognized by image recognition processing having a circuit pattern different from a non-defective product, a defective product, and a non-defective product. Then, the mapping information mapped and the basic image information of the electronic component 1 as a basis for comparison with the image information of the electronic component 1 acquired by the image sensor 6, and the mapping stored in the storage unit 71 And a recognition unit 72 that recognizes the attributes of the electronic components 1 in a predetermined order based on the information. Furthermore, when the attribute of the electronic component 1 recognized by the recognition unit 72 is a non-defective product or a defective product, the supply control unit 7 stores the image information of the electronic component 1 acquired by the image sensor 6 and the storage unit 71. The movement correction unit 73 that compares the basic image information of the electronic component 1 and corrects the movement amount of the suction unit 4 based on the comparison result, and the electronic component 1 whose attribute is an unrecognizable product are two in a predetermined order. When two or more consecutive, the electronic component 1 whose attribute is an unrecognizable product is detoured, the image sensor 6 is moved along the electronic component 1 whose attribute is a non-defective product or a defective product, and the electronic acquired at the moved position A detour processing unit 74 that performs processing in the movement correction unit 73 using the image information of the component 1 is provided.

  FIG. 2 is a plan view of the wafer 2 placed on the XY table 3 of the electronic component supply apparatus according to the embodiment of the present invention. FIG. 3 is an exemplary diagram of mapping information of the wafer 2 of the electronic component supply apparatus according to the embodiment of the present invention. FIG. 4 is a view showing an example of conventional wafer mapping information. As shown in FIG. 2, a plurality of electronic components 1 are regularly arranged on the wafer 2 placed on the XY table 3. As a result of inspection by another inspection apparatus, the electronic component 1 is a non-defective product 1a that satisfies a predetermined standard, a defective product 1b that does not satisfy a predetermined standard, and an electronic component that is different from the circuit pattern of the electronic component 1 in an image recognition process. It is classified into three types of attributes of unrecognizable product 1c that cannot be recognized as 1.

  Therefore, in the mapping information of the wafer 2 of the electronic component supply apparatus according to the present embodiment, the non-defective product 1a has the attribute / defective product (1) and the defective product 1b has the attribute / defective product (3) as shown in FIG. The attribute / unrecognizable product (M) is mapped to the unrecognizable product 1c in association with the position information regarding each position. However, as shown in FIG. 4, the conventional wafer mapping information does not discriminate between defective products and unrecognizable products, so attributes / goods (1) are attributed to non-defective products and non-recognizable products. Defective product (3) is mapped in association with position information regarding each position.

  The recognition unit 72 recognizes the attribute for each electronic component 1 based on the mapping information shown in FIG. That is, the recognition unit 72 recognizes the attributes of the non-defective product (1), the defective product (3), and the unrecognizable product (M) based on the mapping information. The order in which the recognition unit 72 recognizes the attributes of the individual electronic components 1 is, for example, the order of arrows 31. In accordance with the order in which the recognition unit 72 recognizes the attributes of the individual electronic components 1, the suction unit 4 moves in the direction of the arrow 41 illustrated in FIG. 2 and picks up the electronic component 1 having the non-defective product (1). The image sensor 6 also moves in the direction of the arrow 41, and acquires image information of the electronic component 1 arranged forward by one in the traveling direction of the electronic component 1 picked up by the suction unit 4.

  The suction unit 4 is moved at an equal pitch according to the distance between the adjacent electronic components 1. However, if the wafer 2 is set on the XY table 3 in a state where the arrangement direction of the electronic parts 1 and the direction in which the electronic parts 1 move are shifted only by moving the suction parts 4 at equal pitches, The position of the suction unit 4 that picks up the electronic component 1 and the position of the desired electronic component 1 may be misaligned due to variations in the distance between the electronic components 1 to be moved, errors in the movement pitch, and the like. The amount of movement of the suction unit 4 is corrected. The movement correction unit 73 compares the image information of the electronic component 1 acquired by the image sensor 6 using the image recognition process with the basic image information stored in the storage unit 71, and the recognition rate obtained by comparison is compared. If it is equal to or higher than a predetermined recognition rate, the shift amount of both pieces of image information is grasped, and the movement amount of the suction unit 4 is corrected based on the shift amount. Here, the recognition rate is a ratio at which image information acquired by the image sensor 6 can be recognized as basic image information stored in the storage unit 71, and is an image sensor for the basic image information stored in the storage unit 71. This is the rate at which the image information acquired in 6 matches. For example, if the rate at which the image information acquired by the image sensor 6 matches the basic image information stored in the storage unit 71 is 80%, the recognition rate is 80%. By correcting the amount of movement of the suction unit 4 by the movement correction unit 73, the position of the suction unit 4 that picks up the electronic component 1 and the position of the desired electronic component 1 can be prevented from shifting.

  When the attribute of the electronic component 1 is a defective product (3), the movement correction unit 73 compares the image information acquired by the image sensor 6 using the image recognition process and the basic image information stored in the storage unit 71. If the recognition rate obtained in this way is equal to or higher than the predetermined recognition rate, it is possible to correct the movement amount of the suction unit 4. However, even when the attribute of the electronic component 1 is defective (3), the movement correction unit 73 stores the image information acquired by the image sensor 6 using the image recognition process and the basic unit stored in the storage unit 71. If the recognition rate obtained by comparing with the image information is smaller than the predetermined recognition rate, the amount of shift between the two image information cannot be grasped, and the amount of movement of the suction unit 4 cannot be corrected. Further, when the attribute of the electronic component 1 is an unrecognizable product (M), the movement correction unit 73 and the basic image information stored in the storage unit 71 and the image information acquired by the image sensor 6 using the image recognition process. As for the recognition rate obtained by comparing with the above, it is impossible to correct the amount of movement of the suction part 4 because a predetermined recognition rate cannot be obtained.

  As shown in FIG. 2, the electronic component 1 whose attribute is an unrecognizable product (M) is eight consecutive in the direction in which the suction unit 4 moves (the direction in which the recognition unit 72 recognizes the electronic component 1). When the section 10 exists, the movement correction unit 73 cannot correct the movement amount of the suction unit 4 in the section 10, and the suction unit 4 moves at an equal pitch according to the distance between the adjacent electronic components 1. It will be. When the wafer 2 is tilted so that the arrangement direction of the electronic components 1 is tilted with respect to the advancing direction of the suction unit 4, the electronic component 1 is picked up only by moving the suction unit 4 at an equal pitch as indicated by an arrow 42. The predetermined position of the suction part 4 to be moved and the position of the desired electronic component 1 may be shifted.

  Therefore, the detour processing unit 74 detours the electronic component 1 in the section 10 as indicated by the arrow 43 and moves the image sensor 6 along the electronic component 1 whose attribute is the non-defective product (1) or the defective product (3). To do. Specifically, the detour route indicated by the arrow 43 indicates a direction in which the electronic component 1 whose attribute is the unrecognizable product (M) is continuous when the recognition unit 72 recognizes the first electronic component 1 in the section 10. The image sensor 6 is moved in a direction orthogonal to the direction. Thereafter, the image sensor 6 proceeds in a direction in which the electronic components 1 whose attributes are unrecognizable products (M) are continuous. Further, when the recognition unit 72 recognizes the last electronic component 1 in the section 10, the image sensor 6 is arranged in a direction orthogonal to the direction in which the electronic component 1 whose attribute is an unrecognizable product (M) is continuous. Move back by the distance moved. Specifically, when the electronic component 1 in the section 10 is bypassed, the distance the image sensor 6 is moved in a direction orthogonal to the direction in which the electronic component 1 whose attribute is an unrecognizable product (M) is continuous. The minute is one line of the electronic component 1. By performing processing so that the detour processing unit 74 detours the electronic component 1 in the section 10, the image information of the electronic component 1 having the non-defective product (1) is acquired, and the movement correction unit 73 uses the image information. The movement amount of the suction unit 4 can be corrected. However, in the conventional mapping information, as shown in FIG. 4, the attribute / defective product (3) is also given to the unrecognizable product, and the detour processing cannot be performed on the unrecognizable product. In order to perform processing in the detour processing unit 74, as shown in FIG. 3, mapping information in which an attribute / unrecognizable product (M) is added to the unrecognizable product 1c is required.

  In the section in which the detour processing unit 74 performs processing, two or more electronic components 1 whose attributes are unrecognizable products (M) are continuous in the direction in which the suction unit 4 moves (advancing direction in a predetermined order). The electronic component 1 whose attribute is an unrecognizable product (M) is not limited to a certain section, and may be a section where more than a predetermined number of the electronic parts 1 are continuous. That is, when the electronic component 1 whose attribute is an unrecognizable product (M) continues one or a predetermined number or less in the direction in which the suction unit 4 moves (the direction in which the recognition unit 72 recognizes the electronic component 1). Assuming that the error is acceptable for the electronic component supply device, the processing by the detour processing unit 74 is not performed, and the movement amount of the suction unit 4 is set to an equal pitch.

  The configuration of the electronic component supply device described above can also be described as a configuration in which a computer program is introduced into a computer system. As will be apparent to those skilled in the art, the present invention can be implemented as a computer program that can be partially executed by a computer. Therefore, the present invention can take an embodiment of hardware as an electronic component supply device, an embodiment of software, or an embodiment of a combination of software and hardware. The computer program can be recorded on any computer-readable recording medium such as a hard disk, DVD, CD, optical storage device, magnetic storage device or the like.

  FIG. 5 is a block diagram showing a configuration example of the electronic component supply apparatus according to the embodiment of the present invention. The electronic component supply apparatus according to the present embodiment includes a moving unit 5, an image sensor 6, and a supply control unit 7.

  The moving unit 5 controls at least one of a motor (not shown) that moves the XY table 3 and a motor (not shown) that moves the suction unit 4, and the wafer 2 and the suction unit placed on the XY table 3. 4 is moved relatively. The image sensor 6 acquires image information of the electronic component 1.

  The supply control unit 7 connects at least a CPU (Central Processing Unit) 21, a memory 22, a storage device 23, an I / O interface 24, a video interface 25, a portable disk drive 26, an external device interface 27, and the hardware described above. An internal bus 28 is used. The supply control unit 7 configured as described above functions as a storage unit 71, a recognition unit 72, a movement correction unit 73, and a detour processing unit 74, and a desired electronic component is placed at a predetermined position of the suction unit 4 that picks up the electronic component 1. The operation of the moving unit 5 and the image sensor 6 is controlled so that 1 is supplied.

  The CPU 21 is connected to the above-described hardware units of the supply control unit 7 via the internal bus 28, and controls the operation of the above-described hardware units and stores the computer program 230 stored in the storage device 23. Various software functions are executed according to the above. The memory 22 is composed of a volatile memory such as SRAM or SDRAM, and a load module is expanded when the computer program 230 is executed, and stores temporary data generated when the computer program 230 is executed.

  The storage device 23 includes a built-in fixed storage device (hard disk), a ROM, and the like. The storage device 23 stores a computer program 230, mapping information 231, and basic image information 232 of the electronic component 1. The computer program 230 stored in the storage device 23 is downloaded by the portable disk drive 26 from a portable recording medium 90 such as a DVD or CD-ROM in which information such as a computer program and data is recorded. 23 is expanded into the memory 22 and executed. Of course, it may be a computer program downloaded from an external computer connected to the network.

  The external device interface 27 is connected to the internal bus 28, and by being connected to the moving unit 5 and the image sensor 6, instructions to the moving unit 5 and the image sensor 6, and the electronic component 1 acquired by the image sensor 6. Image information can be acquired.

  The I / O interface 24 is connected to input devices such as a keyboard 241 and a mouse 242, and receives data input. The video interface 25 is connected to a display device 253 such as a CRT monitor or LCD, and displays a predetermined image.

  Furthermore, the operation of the electronic component supply apparatus according to this embodiment will be described using a flowchart. FIG. 6 is a flowchart showing the processing procedure of the CPU of the electronic component supply apparatus according to the embodiment of the present invention. First, the CPU 21 recognizes the attributes of the individual electronic components 1 in a predetermined order based on the mapping information (step S601). The CPU 21 determines whether or not the electronic component 1 whose attribute is an unrecognizable product (M) has been recognized in succession in a predetermined order (step S602).

  When the CPU 21 determines that the electronic component 1 whose attribute is an unrecognizable product (M) has been recognized two or more consecutively in a predetermined order (step S602: YES), the CPU 21 is an item whose attribute is unrecognizable. In order to move the image sensor 6 along the electronic component 1 whose attribute is the non-defective product (1) or the defective product (3), bypassing the electronic component 1 which is (M), It is determined whether or not it is in a position to bypass the component 1 (step S603). Here, the position where the recognized electronic component 1 is detoured is the position of the electronic component 1 in the direction detouring the recognized electronic component 1, for example, the image sensor 6 (the suction unit 4 also moves in the same direction). This is the position of the electronic component 1 moved by one in the direction orthogonal to the traveling direction.

  When the CPU 21 determines that the image sensor 6 is not in a position that bypasses the recognized electronic component 1 (step S603: NO), the CPU 21 moves to a position where the image sensor 6 bypasses the recognized electronic component 1. As described above, a movement instruction is transmitted to the movement unit 5 (step S604). The moving unit 5 receives the movement instruction from the CPU 21 and moves the image sensor 6 to a position that bypasses the recognized electronic component 1. When the CPU 21 determines that the image sensor 6 is in a position to bypass the recognized electronic component 1 (step S603: YES), the CPU 21 asks the image sensor 6 to acquire image information of the electronic component 1. The imaging instruction is transmitted (step S606). The image sensor 6 receives an imaging instruction from the CPU 21 and acquires image information of the electronic component 1. After step S604, the CPU 21 advances the process to step S606.

  The CPU 21 determines that the electronic component 1 whose attribute is the unrecognizable product (M) has not been recognized in succession two or more in a predetermined order (step S602: NO), and the CPU 21 has recognized the electronic component 1 recognized. When the CPU 21 determines that the position of the recognized electronic component 1 is not an unrecognizable product (M) and the position of the recognized electronic component 1 is different from the position of the electronic component 1 from which image information can be acquired by the image sensor 6, the CPU 21 A movement instruction is transmitted to the moving unit 5 so as to move the image sensor 6 to a position where the image information of the recognized electronic component 1 can be acquired (step S605). The moving unit 5 receives the movement instruction from the CPU 21 and moves the image sensor 6 to a position where the recognized image information of the electronic component 1 can be acquired. After step S605, the CPU 21 advances the process to step S606.

  The CPU 21 has a recognition rate obtained by comparing the image information of the electronic component 1 acquired by the image sensor 6 using the image recognition process with the basic image information stored in the storage device 23, which is equal to or higher than a predetermined recognition rate. It is determined whether or not (step S607). When the CPU 21 determines that the recognition rate obtained by comparison is equal to or higher than the predetermined recognition rate (step S607: YES), the CPU 21 stores the image information of the electronic component 1 acquired by the image sensor 6 and the storage device 23. The amount of deviation from the stored basic image information is calculated (step S608). Next, the CPU 21 corrects the movement amount of the suction unit 4 based on the deviation amount calculated in step S608, and instructs the movement unit 5 to move the suction unit 4 to a position based on the corrected movement amount. Is transmitted (step S609). For example, the coordinates of the image information of the pattern A in the basic image information stored in the storage device 23 is (x, y) = (0, 0), and the image information 6 in the image information of the electronic component 1 acquired by the image sensor 6 is used. When the coordinates of the image information of the pattern A are (x, y) = (5, 7), the shift amount is changed from the coordinates (x, y) = (0, 0) of the image information to the coordinates (x, y of the image information). ) = Vector quantity changing to (5, 7). The shift amount is 0.5 mm in the x direction and 0.7 mm in the y direction when one unit of the coordinates of the image information is 0.1 mm. The CPU 21 calculates the corrected amount of movement of the suction unit 4 in consideration of the shift amount of 0.5 mm in the x direction and 0.7 mm in the y direction. The moving unit 5 receives the movement instruction from the CPU 21 and moves the suction unit 4 to a position based on the corrected movement amount. When the CPU 21 determines that the recognition rate obtained by comparison is smaller than the predetermined recognition rate (step S607: NO), the CPU 21 can design the suction unit 4 without correcting the movement amount of the suction unit 4. A movement instruction is transmitted to the moving unit 5 so as to move by a predetermined equal pitch (for example, a distance between adjacent electronic components 1) (step S610). The moving unit 5 receives the movement instruction from the CPU 21 and moves the suction unit 4 by an equal pitch. If there is one electronic component 1 whose attribute is an unrecognizable product (M), NO is determined in step S602, and the image information of the electronic component 1 acquired in step S606 is less than the predetermined recognition rate in step S607. Therefore, the CPU 21 advances the process to step S610, and transmits a movement instruction to the moving unit 5 so as to move the suction unit 4 by an equal pitch determined by design or the like.

  The CPU 21 determines whether or not the recognized attribute of the electronic component 1 is a non-defective product (1) (step 611). When the CPU 21 determines that the attribute of the recognized electronic component 1 is a non-defective product (1) (step S611: YES), the CPU 21 instructs the suction unit 4 to pick up the recognized electronic component 1. Transmit (step S612). The suction unit 4 receives the pickup instruction from the CPU 21 and picks up the recognized electronic component 1. When the CPU 21 determines that the attribute of the recognized electronic component 1 is not a non-defective product (1) (step S611: NO), the CPU 21 returns the process to step S601 and repeats the above-described process. The CPU 21 determines whether or not it is the last electronic component 1 of the wafer 2 (step S613). When the CPU 21 determines that it is the last electronic component 1 of the wafer 2 (step S613: YES), the CPU 21 ends the process. When the CPU 21 determines that it is not the last electronic component 1 of the wafer 2 (step S613: NO), the CPU 21 returns the processing to step S601 and repeats the above-described processing.

  Furthermore, based on a specific example, operation | movement of the adsorption | suction part 4 and the image sensor 6 of the electronic component supply apparatus which concerns on this Embodiment is demonstrated. FIG. 7 is a schematic diagram showing an operation procedure of the suction unit 4 and the image sensor 6 of the electronic component supply device according to the embodiment of the present invention. As shown in FIG. 7, the wafer 2 has the electronic components 1 arranged in 6 columns in the X direction and 2 rows in the Y direction. The attributes of the individual electronic components 1 are coordinates (X, Y) = (2, 1), (3, 1), (4, 1) are unrecognizable products (M), and the others are good products (1).

  In step S601, as shown in FIG. 7A, the CPU 21 recognizes the attribute of the electronic component 1 at coordinates (X, Y) = (2, 1) based on the mapping information. The image sensor 6 is located at coordinates (X, Y) = (2, 1) in order to acquire image information of the electronic component 1 at coordinates (X, Y) = (2, 1). In the electronic component supply apparatus according to the present embodiment, when the image sensor 6 is located at the coordinates (X, Y) = (2, 1), the suction unit 4 has the coordinates (X, Y) = (1, 1 ). In FIG. 7, the electronic component 1 with coordinates (X, Y) marked with a circle is the electronic component 1 recognized by the CPU 21, and the electronic component 1 with hatched coordinates (X, Y) is the image sensor 6. Is an electronic component 1 capable of acquiring image information.

  In step S602, since the CPU 21 recognizes the electronic component 1 whose attribute is the unrecognizable product (M) in a predetermined order (in the direction in which the X coordinate increases), the process proceeds to step S603. In step S603, the CPU 21 bypasses the electronic component 1 in which the image sensor 6 is located at the coordinates (X, Y) = (2, 1), and the image sensor 6 has an unrecognizable product (M). Since it is determined that the position (in this example, coordinates (X, Y) = (2, 2)) is not reached, the process proceeds to step S604. In step S604, the CPU 21 sets the image sensor at a position that bypasses the electronic component 1 whose attribute is an unrecognizable product (M), as shown in FIG. 7B, at coordinates (X, Y) = (2, 2). A moving instruction is transmitted to the moving unit 5 so as to move 6. The moving unit 5 receives a moving instruction from the CPU 21 and moves the image sensor 6 to coordinates (X, Y) = (2, 2).

  In step S606, the CPU 21 transmits an imaging instruction to the image sensor 6 so as to acquire image information of the electronic component 1 at coordinates (X, Y) = (2, 2). The image sensor 6 receives an imaging instruction from the CPU 21 and acquires image information of the electronic component 1 at coordinates (X, Y) = (2, 2). In step S <b> 607, the CPU 21 compares the image information of the electronic component 1 with the coordinates (X, Y) = (2, 2) and the basic image information stored in the storage device 23 using image recognition processing. . Since the attribute of the electronic component 1 at the coordinates (X, Y) = (2, 2) is non-defective (1), the result of image recognition processing is that the recognition rate obtained by comparison is equal to or higher than a predetermined recognition rate, and the CPU 21 Advances the process to step S609. In step S <b> 609, the CPU 21 moves the suction unit 4 based on the amount of deviation between the image information of the electronic component 1 at coordinates (X, Y) = (2, 2) and the basic image information stored in the storage device 23. The movement amount is corrected, and a movement instruction is transmitted to the movement unit 5 so that the suction unit 4 moves to a position based on the corrected movement amount. The moving unit 5 receives the movement instruction from the CPU 21 and moves the suction unit 4 to a position based on the corrected movement amount. In step S609, by moving the suction unit 4, the image sensor 6 moves to the position of coordinates (X, Y) = (3, 2) as shown in FIG.

  In step S611, the CPU 21 determines whether or not the recognized attribute of the electronic component 1 is a non-defective product (1). Since the attribute of the electronic component 1 at the coordinates (X, Y) = (2, 1) is the unrecognizable product (M), the CPU 21 returns the process to step S601. As shown in FIG. 7D, the CPU 21 recognizes the attribute of the electronic component 1 at coordinates (X, Y) = (3, 1) based on the mapping information.

  As for the electronic component 1 with coordinates (X, Y) = (3, 1) and (4, 1), as shown in FIGS. 7D to 7G, coordinates (X, Y) = (2 , 1), the CPU 21 repeatedly executes the processing of steps S601 to S611 performed for the electronic component 1.

  Next, as shown in FIG. 7 (h), the CPU 21 recognizes the attribute (non-defective product (1)) of the electronic component 1 with coordinates (X, Y) = (5, 1), and proceeds to step S605. In this case, the CPU 21 determines that the attribute of the recognized electronic component 1 is not the unrecognizable product (M), but the coordinates (X, Y) = (5, 1) of the recognized electronic component 1 and image information by the image sensor 6. Is determined to be different from the coordinates (X, Y) = (5, 2) of the electronic component 1 that can acquire the image information of the recognized electronic component 1 (coordinates (X, Y) = (5, 1)). A movement instruction is transmitted to the moving unit 5 so as to move the image sensor 6 to a position where it can be acquired. The moving unit 5 receives the movement instruction from the CPU 21 and moves the image sensor 6 to the coordinates (X, Y) = (5, 1). In step S606, as shown in FIG. 7 (i), the CPU 21 moves the image sensor 6 to the coordinates (X, Y) = (5, 1), and then coordinates (X, Y) = (5, 1). An imaging instruction is transmitted to the image sensor 6 so as to acquire image information of the electronic component 1. The image sensor 6 receives an imaging instruction from the CPU 21 and acquires image information of the electronic component 1 at coordinates (X, Y) = (5, 1). In step S <b> 607, the CPU 21 compares the image information of the electronic component 1 with coordinates (X, Y) = (5, 1) with the basic image information stored in the storage device 23 using image recognition processing. . Since the attribute of the electronic component 1 at the coordinates (X, Y) = (5, 1) is non-defective (1), the result of the image recognition process is that the recognition rate obtained by comparison is equal to or higher than a predetermined recognition rate, and the CPU 21 Advances the process to step S609. In step S <b> 609, the CPU 21 moves the suction unit 4 based on the amount of deviation between the image information of the electronic component 1 at coordinates (X, Y) = (5, 1) and the basic image information stored in the storage device 23. The movement amount is corrected, and a movement instruction is transmitted to the movement unit 5 so that the suction unit 4 moves to a position based on the corrected movement amount. The moving unit 5 receives the movement instruction from the CPU 21 and moves the suction unit 4 to a position based on the corrected movement amount. In step S609, by moving the suction unit 4, the image sensor 6 moves to the position of coordinates (X, Y) = (6, 1) as shown in FIG.

  In step S612, since the attribute of the electronic component 1 with the recognized coordinates (X, Y) = (5, 1) is non-defective (1) as shown in FIG. A pickup instruction is transmitted to the suction unit 4 so as to pick up. The moving unit 5 receives the pick-up instruction from the CPU 21 and picks up the electronic component 1 with the coordinates (X, Y) = (5, 1).

  As described above, the electronic component supply apparatus according to the present embodiment bypasses the electronic component 1 when two or more electronic components 1 whose attributes are unrecognizable products (M) are consecutive in a predetermined order. In this way, the image sensor 6 is moved, the image information of the electronic component 1 at the detoured position is compared with the basic image information of the electronic component 1, and the wafer 2 and the suction unit 4 are Therefore, even if the electronic component 1 whose attribute is an unrecognizable product (M) continues in the predetermined order of travel, the electronic component 1 is bypassed and the attribute is good. The relative movement amount of the wafer 2 and the suction unit 4 can be corrected using the electronic component 1 which is (1) or a defective product (3), and the position of the electronic component 1 to be supplied and the predetermined position of the suction unit 4 can be corrected. It is possible to prevent a deviation from occurring in the position.

  In the electronic component supply apparatus according to the present embodiment, the mapping information is limited to information obtained by mapping each electronic component 1 in association with any attribute of a good product, a defective product, or an unrecognizable product. Instead, it may be information in which each electronic component 1 is mapped in association with any attribute of a good product, a defective product, a test element, or an unrecognizable product. In the electronic component 1 whose attribute is a test element, an element TEG (Test Element Group) is formed to test whether or not the circuit pattern formed on the wafer 2 is normal. For the electronic component 1 whose attribute is the test element, the movement correcting unit 73 also stores the image information of the electronic component 1 acquired by the image sensor 6 and the storage unit 71 in the same way as the non-defective and defective electronic components 1. Can be compared with the basic image information of the electronic component 1 stored in the table, and the relative movement amount of the wafer 2 and the suction unit 4 can be corrected based on the comparison result. The basic image information of the electronic component 1 stored in the storage unit 71 includes image information of the electronic component 1 having a non-defective attribute and image information of the TEG.

1 Electronic Component 2 Wafer (Electronic Component Assembly)
3 XY table 4 Suction unit (electronic component processing unit)
5 Moving unit 6 Image sensor 7 Supply control unit 71 Storage unit 72 Recognizing unit 73 Movement correcting unit 74 Detour processing unit

Claims (9)

In an electronic component supply device that supplies individual electronic components from an electronic component assembly in which a plurality of electronic components are regularly arranged in an electronic component processing unit that performs predetermined processing on electronic components,
Position information regarding the position of each electronic component, and at least a non-recognizable product having at least a non-defective product, a non-defective product, and a circuit pattern different from the non-defective product, which could not be recognized by image recognition processing executed in advance. A storage unit that stores mapping information that is mapped in association with each other, and basic image information of the electronic component that is a basis for comparison;
A recognition unit for recognizing attributes for each electronic component in a predetermined order based on mapping information stored in the storage unit;
An image sensor for acquiring image information of the electronic component whose attribute is recognized by the recognition unit;
A moving unit that relatively moves the electronic component assembly and the electronic component processing unit in order to supply the individual electronic components to the predetermined position of the electronic component processing unit in the predetermined order;
When the attribute of the electronic component recognized by the recognition unit is a non-defective product or a defective product, the image information of the electronic component acquired by the image sensor and the basic image information of the electronic component stored in the storage unit And a movement correction unit that corrects a relative movement amount between the electronic component assembly and the electronic component processing unit based on a shift amount of both image information,
When two or more electronic components whose attributes recognized by the recognition unit are unrecognizable are consecutive in the predetermined order, the electronic components whose attributes recognized by the recognition unit are unrecognizable are bypassed. Then, the image sensor is moved along the electronic component whose attribute recognized by the recognition unit is a non-defective product or a defective product, and image information of the electronic component acquired at the moved position is used in the movement correction unit. An electronic component supply apparatus comprising: a detour processing unit that performs processing. 2. The detour processing unit moves the image sensor in a direction orthogonal to a direction in which the electronic components whose attributes recognized by the recognition unit are unrecognizable are continuous. The electronic component supply apparatus described in 1. The detour processing unit, when the electronic component whose attribute recognized by the recognizing unit is an unrecognizable product is continuously larger than a predetermined number, the electronic device whose attribute recognized by the recognizing unit is an unrecognizable product. By bypassing the component, the relative movement amount between the electronic component assembly and the electronic component processing unit is corrected, and one or a predetermined number of the electronic components whose attributes recognized by the recognition unit are unrecognizable When the number of consecutive parts is less than a certain number, the attribute recognized by the recognition unit does not bypass the electronic component that is an unrecognizable product, and the relative movement amount between the electronic component assembly and the electronic component processing unit is predetermined. The electronic component supply apparatus according to claim 1, wherein the electronic component supply apparatus has a pitch of 5 mm. The mapping information includes position information related to the position of each electronic component and information obtained by mapping at least one attribute of a non-defective product, a defective product, a test element, or an unrecognizable product,
When the attribute of the electronic component recognized by the recognition unit is a non-defective product, a defective product, or a test element, the movement correction unit stores image information of the electronic component acquired by the image sensor and the storage unit. The basic image information of a certain electronic component is compared, and a relative movement amount between the electronic component assembly and the electronic component processing unit is corrected based on a shift amount of both pieces of image information. Item 4. The electronic component supply device according to any one of Items 1 to 3. In an electronic component supply method for supplying individual electronic components from an electronic component assembly in which a plurality of electronic components are regularly arranged in an electronic component processing unit that performs predetermined processing on electronic components,
Position information regarding the position of each electronic component in the storage unit and at least a non-defective product, a defective product, or a non-recognizable product that has a circuit pattern different from the non-defective product and could not be recognized by image recognition processing executed in advance . Mapping information mapped in association with the attributes of the image and basic image information of the electronic component as a basis for comparison are stored. Based on the stored mapping information, the attributes of the electronic components are stored in a predetermined order. The first step recognized in
A second step of acquiring image information of the electronic component whose attribute has been recognized by an image sensor;
A third step of relatively moving the electronic component assembly and the electronic component processing unit to supply the individual electronic components to the predetermined position of the electronic component processing unit in the predetermined order;
When the recognized attribute of the electronic component is a non-defective product or a defective product, the acquired image information of the electronic component is compared with the stored basic image information of the electronic component, and the amount of deviation between the image information is determined. A fourth step of correcting a relative movement amount between the electronic component assembly and the electronic component processing unit based on:
When two or more electronic components whose attributes recognized in the first step are unrecognizable products are consecutive in the predetermined order, the electronic components whose attributes recognized in the first step are unrecognizable products By detouring, the image sensor is moved along the electronic component whose attribute recognized in the first step is a non-defective product or a defective product, and the image information of the electronic component acquired at the moved position is used for the fourth. And a fifth step of performing processing in steps. The image sensor is moved in a direction orthogonal to a direction in which the electronic component whose attribute recognized in the first step is an unrecognizable product is continuous in the fifth step. 5. The electronic component supply method according to 5. In the fifth step, if the number of the electronic components whose attributes recognized in the first step are unrecognizable products continues more than a predetermined number, the attributes recognized in the first step are unrecognizable products. By bypassing the electronic component, the relative movement amount of the electronic component assembly and the electronic component processing unit is corrected, and the electronic component whose attribute recognized in the first step is an unrecognizable product is One or a predetermined number or less, the attribute recognized in the first step does not bypass the electronic component that is an unrecognizable product, and the relative relationship between the electronic component assembly and the electronic component processing unit The electronic component supply method according to claim 5 or 6, wherein the movement amount is set to a predetermined pitch. The mapping information includes position information related to the position of each electronic component and information obtained by mapping at least one attribute of a non-defective product, a defective product, a test element, or an unrecognizable product,
When the attribute of the electronic component recognized in the first step is a non-defective product, a defective product, or a test element, the fourth step includes the acquired image information of the electronic component and the basic of the stored electronic component. 8. The image information is compared with each other, and a relative movement amount between the electronic component assembly and the electronic component processing unit is corrected based on a shift amount between the two pieces of image information. The electronic component supply method according to one item. It can be executed by an electronic component supply device that supplies individual electronic components from an electronic component assembly in which a plurality of electronic components are regularly arranged in an electronic component processing unit that performs predetermined processing on the electronic components. Computer program,
The electronic component supply device;
Position information regarding the position of each electronic component, and at least a non-recognizable product having at least a non-defective product, a non-defective product, and a circuit pattern different from the non-defective product, which could not be recognized by image recognition processing executed in advance. Storage means for storing mapping information mapped in association with each other, and basic image information of the electronic component as a basis for comparison,
Recognition means for recognizing attributes for each electronic component in a predetermined order based on mapping information stored in the storage means;
Image receiving means for receiving image information obtained by imaging the electronic component whose attribute is recognized by the recognition means with an image sensor;
Movement for instructing a moving unit to move the electronic component assembly and the electronic component processing unit relatively to supply the individual electronic components to the predetermined position of the electronic component processing unit in the predetermined order. Instruction means,
When the attribute of the electronic component recognized by the recognition unit is a non-defective product or a defective product, image information of the electronic component received by the image receiving unit and the basic image of the electronic component stored in the storage unit Compare the information, correct the relative movement amount of the electronic component assembly and the electronic component processing unit based on the shift amount of both image information, and move the movement unit to instruct the corrected movement amount Correction means,
When two or more electronic parts whose attributes recognized by the recognition unit are unrecognizable are consecutive in the predetermined order, the electronic components whose attributes recognized by the recognition unit are unrecognizable are bypassed. Then, the moving unit is instructed to move the image sensor along the electronic component whose attribute recognized by the recognition unit is a non-defective product or a defective product, and image information of the electronic component acquired at the moved position is obtained. A computer program which is used to function as a detour processing means for performing processing by the movement correction means.

Images