JP5470417B2 - Transfer apparatus and transfer method - Google Patents

Description

  The present invention relates to a transfer apparatus and a transfer method, and more particularly to a transfer device that transfers a fine transfer pattern formed on a mold onto a molded product.

  In recent years, a mold (template, stamper) is manufactured by forming an ultra-fine transfer pattern on a quartz substrate or the like by an electron beam drawing method, and the mold is predetermined on a resist film formed on the surface of the transfer substrate as a molded product. Research and development has been made on nanoimprint technology for transferring a transfer pattern formed on the mold by pressing with a pressure of (see, for example, Non-Patent Document 1).

  As a method for forming a nano-order fine pattern (transfer pattern) at a low cost, an imprint method using a lithography technique has been devised. This molding method is roughly classified into a thermal imprint method and a UV imprint method.

  In the thermal imprint method, a mold is pressed against a substrate and heated until the resin made of a thermoplastic polymer is sufficiently flowable to flow the resin into a fine pattern. It cools until it becomes below, solidifies the fine pattern transferred to the substrate, and then separates the mold.

  In the UV imprint method, a transparent mold capable of transmitting light is used, and the UV radiation is applied by pressing the mold against the UV curable liquid. Radiant light is applied for an appropriate time to cure the solution and transfer the fine pattern, and then pull back the mold.

  Recently, in rotary storage devices such as hard disks, CDs, and DVDs, there is a high interest in methods that utilize such nanoimprint technology as a means for forming a storage medium (recording medium) for forming high-density data on a disk. It has become to.

  FIG. 3 shows an example of a process for creating a storage medium for a hard disk using the UV imprint method. Here, a fine pattern (for example, a dot pattern of a hard disk) formed on a quartz glass mold 101 is pressed onto a substrate 105 coated with a UV curable resin 103, and the resin 103 is cured by irradiation with UV light ( (Refer FIG. 3 (a), (b)). Thereafter, the mold is released to remove the remaining film 107 (see FIGS. 3C and 3D), and after etching (see FIG. 3D), the fine shape of the mold 101 copied to the resin 103 is obtained. Is transferred to the substrate 105 (see FIG. 3E).

  When a rotational high-density storage medium is formed by the imprint method, it is necessary to create a storage medium having high-precision rotational symmetry so that data can be read stably at high speed. For this purpose, the mold in which fine high-density features are formed and the center position of the disk-shaped storage medium substrate on which the fine high-density features are thermally or UV transferred are positioned with high accuracy. It is very important to mold together.

  In general, when alignment (high-precision positioning) is performed by an imprint method, a method of aligning a mold and a substrate by a method similar to a method conventionally used for semiconductors is used. A typical example of this is shown in FIG. 13 (see, for example, Patent Document 1).

  As shown in FIG. 13, in this example, alignment marks 205 and 206 are attached to a mold 201 and a substrate (wafer) 203, and reference light such as laser light is irradiated from above the mold 201. Reflected light transmitted through the two alignment marks 205 and 206 is received by a light receiving device, and the mold 201 and the substrate 203 are aligned based on the observation result of the light receiving pattern.

JP 2000-323461 A

Precision Engineering Journal of the International Societies for Precision Engineering and Nanotechnology

  By the way, in the method described in Patent Document 1, it is assumed that the mold 201 is light-transmitting, but the mold used for molding a high-density storage medium is a non-transmissive glass containing carbon. In some cases, a material that does not transmit light, such as a substrate or Ni electroforming, may be used. In this case, there is a problem that such a method cannot be applied.

  Here, the alignment mark 206 is also engraved on the substrate 203 (molded product), but a high-density storage medium (recording medium; recording disk) of a rotary storage device such as a hard disk, CD, or DVD is used. In general, it is important to mass-produce at low cost, and the size is very small. Therefore, it is difficult to attach a high-precision alignment mark to each substrate.

  The present invention has been made in view of the above problems, and in a transfer apparatus and transfer method for transferring a fine transfer pattern formed on a mold to a molded product, the mold is made of a material that does not transmit light. It is another object of the present invention to provide an apparatus capable of transferring the fine transfer pattern to an accurate position of the molded product even if the molded product is not provided with an alignment mark.

The invention according to claim 1 is a transfer device for transferring a fine transfer pattern formed on a mold to a molded product, and holds the mold and approaches the workpiece in a direction approaching / separating from the molded product. A mold holder that is movable and positionable relative to the molded product; holds the molding object, and is relative to the mold holder in a direction crossing the approaching / separating direction of the mold holder. A molded article holder that is movable and positionable; a first position that is inserted between the mold and the molded article when the mold and the molded article are separated by a predetermined distance; A detector that is movable between a second position apart from the mold and the molded article so that the mold and the molded article can contact each other; position of at least two points of the edge of the through hole of the molded article, or of the object to be molded Wherein the mold and, by detecting the positions of at least two points of the circumferential edge, obtains the center position of the object to be molded, the position displacement amount detecting means for detecting a positional deviation amount of the object to be molded against the mold When the product is separated from the product by a predetermined distance, the detector is positioned at the first position to detect the amount of misalignment of the product to be molded. And a control unit that corrects the body by moving the body and controls the transfer so that the mold is brought into contact with the product to be molded.

  According to a second aspect of the present invention, in the transfer apparatus according to the first aspect, the positional deviation amount detecting means is a means for detecting the position of the mold by positioning the detector at the first position. The control unit is a transfer device that is a unit that detects and corrects the misalignment amount based on the detected position of the mold and the detected position of the edge of the molding object.

  According to a third aspect of the present invention, in the transfer device according to the first or second aspect, the detector is formed in a thin plate shape, and this thickness direction is the approach / separation direction of the mold holder. The positional deviation amount detecting means includes a camera provided at a position away from the detector and a reflecting member provided on the detector. And a transfer device which is means for detecting the amount of positional deviation using the camera via the reflecting member.

  According to a fourth aspect of the present invention, in the transfer device according to the third aspect, the positional deviation amount detecting means detects a plurality of positions on the edge of the molded product by switching one camera. It is a transfer device which is means for detecting the amount of positional deviation.

  According to a fifth aspect of the present invention, in the transfer device according to the first or second aspect, the detector is formed in a thin plate shape, and this thickness direction is the approach / separation direction of the mold holder. The positional deviation amount detecting means includes a camera provided at a position away from the detector and an optical fiber provided at the detector. And a transfer device that is means for detecting the amount of positional deviation by the camera via the optical fiber.

  A sixth aspect of the present invention is a transfer method for transferring a fine transfer pattern formed on a mold onto a molded product using the transfer device according to any one of the first to fifth aspects. It is.

  According to the present invention, the mold is made of a material that does not transmit light, and the fine transfer pattern is placed at an accurate position of the molded product even if the molded product is not provided with an alignment mark. There is an effect that it can be transferred.

1 is a front view showing a schematic configuration of a transfer apparatus 1 according to an embodiment of the present invention. It is a side view which shows schematic structure of the transfer apparatus 1, and is II arrow view in FIG. It is a figure which shows an example of the process which produces the storage medium for hard disks using UV imprint method. It is a figure explaining the holding | maintenance form of the type | mold M by the type | mold holding body 9. FIG. It is the figure which looked at the to-be-molded product W hold | maintained at the to-be-molded product holding body 5 toward the downward direction from the upper direction. It is the figure which looked at the detector 15 and the 1st detector support member 29 of the positional deviation amount detection means 11 from the downward direction of the Z-axis toward the upward direction. It is a figure which shows the prism 35 etc. which are the example of the camera 33 and the reflection member which comprise the positional deviation amount detection means 11. FIG. It is a figure which shows the prism 35 etc. which are the example of the camera 33 and the reflection member which comprise the positional deviation amount detection means 11. FIG. It is a figure which shows the image of the type | mold M reflected by the prism 35D and taken in by camera 33D. It is a figure which shows the image of the edge of the through-hole W1 of the to-be-molded product W reflected by the prism 35A etc. and taken in by the camera 33A etc. 2 is a diagram illustrating a schematic configuration of a control device 51. FIG. It is a figure which shows the holding | maintenance form etc. of the to-be-molded product W3 in the case of transferring to the rectangular to-be-molded product W3. It is a figure which shows the example which aligns the conventional type | mold and a board | substrate.

  FIG. 1 is a front view showing a schematic configuration of a transfer device 1 according to an embodiment of the present invention, and FIG. 2 is a side view showing a schematic configuration of the transfer device 1, and is a view taken in the direction of arrow II in FIG. .

  Hereinafter, for convenience of explanation, one horizontal direction is defined as an X-axis direction, another horizontal direction that is perpendicular to the X-axis direction is defined as a Y-axis direction, and the X-axis direction and the Y-axis direction. A direction (vertical direction; vertical direction) perpendicular to Z may be referred to as a Z-axis direction.

  The transfer apparatus 1 applies a fine transfer pattern formed on the surface (for example, a planar lower surface) of a mold (transfer stamper) M to the surface of the product W (for example, a planar upper surface). This is a device for transferring the surface by bringing the surface into contact with the surface of the product W and pressing it. As the molded product W, a disk-shaped information recording disk (for example, a CD-ROM, a DVD-ROM, a BD-ROM (Blu-Ray Disc ROM)), an HD having a circular through-hole provided in the center portion thereof. DVD-ROM (High-Definition Digital Versatile Disc ROM), recording medium for hard disk) can be considered.

  The transfer is performed for the above-described thermal imprint method or UV imprint method, and the transfer apparatus 1 performs the steps shown in FIGS. 3A to 3C, for example. I am in charge.

  The transfer device 1 includes a base frame 3, and a base product 3 is provided with a molded product holder 5. The to-be-molded product holder 5 has, for example, an upper surface that is flat, and on the top surface, a to-be-molded product W such as a CD-ROM can be placed and held. The molded product W placed and held in this way has a thickness direction in the Z-axis direction, and is located at a predetermined position in the X-axis direction and the Y-axis direction.

  The molded product holder 5 is supported by the base frame 3 via the XY stage 7. Accordingly, by driving an actuator (not shown) such as a servo motor that constitutes the XY stage 7 under the control of the control device 51 (see FIG. 11), the molded product holding body 5 has the X axis or the Y axis. It can move and position freely in any direction.

  A mold holder 9 is provided on the base frame 3. For example, the lower surface of the mold holding body 9 is flat, and the mold M can be held by the lower surface. In the mold M held in this way, the lower surface on which the fine transfer pattern is formed is opposed to the molded product holder 5 (molded product W).

  The mold holding body 9 is supported by the base frame 3 via a linear guide bearing (not shown), and drives an actuator (not shown) such as a servo motor under the control of the control device 51 to thereby move in the Z-axis direction. It can be moved and positioned freely.

  As already understood, the surface contact or pressing between the mold M for transfer and the molded product W is performed in such a manner that the mold M is placed in the direction intersecting the surface of the mold M (Z-axis direction). Is made by moving relative to. For example, the surface of the mold M on which the fine transfer pattern is formed is flat, and the surface of the molded product W onto which the fine transfer pattern is transferred is also flat. Before the contact is made, the planar surface of the mold M on which the fine transfer pattern is formed and the planar surface of the molded product W onto which the fine transfer pattern is transferred are separated from each other and parallel to each other. It has become. The surface contact and the pressing are performed by moving the mold M in the downward direction of the Z-axis (the direction in which the mold M approaches the workpiece W) from the parallel state. ing.

  Further, the transfer device 1 is provided with a UV light generator (not shown) for irradiating the molding target W with ultraviolet rays and a heating device (not shown) for heating the molding target W. The heat imprint method or the UV imprint method is used as appropriate.

  Further, the transfer apparatus 1 is provided with a positional deviation amount detection means 11 and a positional deviation amount correction means 13.

  The positional deviation amount detection means 11 is before the transfer and when the mold M and the molded product W are separated by a predetermined distance (distance L1 shown in FIG. 1) (for example, the mold M and the molded product W). By detecting the position of the edge of the product W (for example, the edge of the through-hole W1 provided in the center of the CD-ROM; see FIG. 5). This is a means for detecting the amount of misalignment of the product W with respect to. The displacement amount is a relative displacement amount in the development direction (X-axis direction or Y-axis direction) of the surface of the mold M or the surface of the product W.

  The misregistration amount correction means 13 is a means for correcting the relative misregistration amount of the workpiece W detected by the misregistration amount detection means 11 and eliminating the misregistration amount.

  Further, the positional deviation amount detection means 11 detects, for example, not only the molded product W but also the position of the mold M almost simultaneously, and by the detected position of the mold M and the detected position of the edge of the molded product W, The position shift amount is detected. The position of the mold M is detected by detecting the position of the alignment mark M1 (see FIG. 9) attached to the mold M. However, the position of the edge of the mold M is detected. It may be configured.

  More specifically, the misregistration amount detection means 11 includes a thin plate-like detector 15, and the thickness direction of the detector 15 is the Z-axis direction. Further, before the transfer, the detector 15 is inserted between the mold M and the molded product W to detect the amount of positional deviation of the molded product W with respect to the mold M.

  When the detector 15 is inserted between the mold M and the molded product W in order to detect the amount of displacement, the mold M and the molded product W are as close as possible, and there is almost no dimensional allowance. In this state, it is desirable that the detector 15 be inserted between the mold M and the workpiece W.

  For example, when the detector 15 is inserted between the mold M and the product W in order to detect the amount of displacement, a distance L3 between the detector 15 and the mold M is shown in FIG. Is about 0.5 mm to 3 mm, and it is desirable that the distance L5 between the detector 15 and the workpiece W is also about 0.5 mm to 3 mm. In addition, at least in a portion located between the surface of the mold M and the surface of the workpiece W, the thickness of the detector 15 (dimension in the Z-axis direction) is formed to be as small as possible. desirable.

  Further, the misregistration amount detection means 11 obtains, for example, the positions of at least two points of the edge of the through hole W1 in the center of the product to be molded W, and uses the obtained two points to determine the center of the product to be molded W. The position is obtained, and the amount of positional deviation of the molded product W with respect to the mold M is detected. The positional deviation amount detection means 11 obtains the positions of at least two points on the outer peripheral edge of the molded product W, and detects the positional deviation amounts of the molded product W with respect to the mold M using the obtained two positions. It may be configured to.

  More specifically, the positional deviation amount detection means 11 uses at least three positions of the edge of the through-hole W1 of the molded product W or at least three positions of the outer peripheral edge of the molded product W, The center position of the molded product W is obtained, and the positional deviation amount of the molded product W with respect to the mold M is detected.

  In addition, the positional deviation amount detection means 11 has at least two positions of the edge of the through-hole W1 of the molded product W and the diameter of the through-hole W1 of the molded product W, or at least the outer edge of the molded product W. The center position of the molded product W may be obtained by using the position of the two points and the outer diameter of the molded product W, and the positional deviation amount of the molded product W with respect to the mold M may be detected.

  Further, the positional deviation amount detection means 11 uses each normal line at at least two points on the edge of the through hole W1 of the molded product W or each normal line at at least two points on the outer peripheral edge of the molded product W. The center position of the molded product W may be obtained and the amount of positional deviation of the molded product W with respect to the mold M may be detected.

  Further, the misalignment detection means 11 uses the normal line at one point of the edge of the through-hole W1 of the molded product W and the normal line at one point of the outer periphery of the molded product W, and the molded product W. The center position may be obtained, and the amount of positional deviation of the product W with respect to the mold M may be detected.

  Here, the holding | maintenance form of the type | mold M by the type | mold holding body 9 is demonstrated in detail, referring FIG.

  A through hole for allowing the ultraviolet rays generated by the UV light generator to pass through is provided at the center of the mold holder 9. A mold M is installed so as to close the through hole on the lower surface of the mold holder 9. A pressing member 17 is integrally provided around the through hole of the mold holder 9. The side surface of the mold M is an inclined surface, and when the inclined surface is pushed by the set screw 21 via the shoe 19 provided on the pressing member 17, the mold M is urged upward, and the mold M becomes the mold. The holder 9 is integrally held. Note that the UV light generation device and the through hole of the mold holder 9 are necessary when the UV imprint method is employed, and are not necessary when the thermal imprint method is employed.

  Next, referring to FIG. 5 (view of the molded product W held by the molded product holding body 5 as viewed from above downward), the form of holding the molded product W by the molded product holding body 5 Will be described in detail.

  A spindle 23 is provided so as to slightly protrude upward at a substantially central portion of the planar upper surface of the molded product holder 5. The spindle 23 includes a columnar central member 25 having a low height, and pressing members 27A, 27B, and 27C that come into contact with and press the edge of the through-hole W1 of the molded product W.

  Each pressing member 27A, 27B, 27C is provided at a position where the outer periphery of the central member 25 is equally arranged. The pressing members 27A and 27B are provided integrally with the central member 25. However, the pressing member 27C is movable in the radial direction of the central member 25 and away from the central member 25. It is biased by the elastic member.

  Each pressing member 27A, 27B, 27C contacts and presses the edge of the through-hole W1 of the molded product W, thereby positioning the molded product W in the X-axis direction and the Y-axis direction (molded product holder). Positioning with respect to 5). Further, in the Z-axis direction, the molded product W is held by the molded product holding body 5 by, for example, vacuum suction.

  The positional deviation amount detection means 11 will also be described in more detail.

  The detector 15 of the misregistration amount detection means 11 is a first position (see FIG. 5) inserted between the mold M and the molded product W when the mold M and the molded product W are separated by a predetermined distance. 1 (refer to the detector 15 indicated by a solid line in FIG. 1) and a second position away from the mold M and the molded product W such that the mold M and the molded product W can contact each other (see FIG. 1). Between the detector 15 shown by a two-dot chain line).

  More specifically, the detector 15 is provided integrally with the first detector support member 29 on the distal end side of the first detector support member 29, and the first detector support member 29 is It is provided so as to be movable with respect to the second detector support member 31 in the X-axis direction via a linear guide bearing (not shown). Then, under the control of the control device 51, an actuator (not shown) such as a pneumatic cylinder is used to insert the first position (position indicated by a solid line in FIG. 1) and the second position (FIG. 1) apart from the first position. To the position indicated by a two-dot chain line).

  The second detector support member 31 is provided so as to be movable in the Z-axis direction with respect to the base frame 3 via a linear guide bearing (not shown). Under the control of the control device 51, the actuator can be moved and positioned in the vertical direction by an actuator (not shown) such as a servo motor and a ball screw (not shown).

  Therefore, the position of the detector 15 in the Z-axis direction can be adjusted according to the form of the mold M and the product W.

  Here, the control device 51 of the transfer device 1 will be described with reference to FIG.

  The control device 51 includes, for example, an alignment unit 53, an image processing controller 55, a fine transfer device controller 57, an XY stage controller 59, and a sequence controller 61.

  The alignment unit 53 moves between a first position where the detector 15 exists between the mold M and the molded product W and a second position where the detector 15 is separated from the mold M and the molded product W. Thus, the pneumatic cylinder is driven and controlled. The image processing controller 55 performs predetermined image processing on an image captured by each camera 33 (see FIGS. 6 to 8) described later. The fine transfer device controller 57 controls the transfer device 1 as a whole. The XY stage controller 59 controls the XY stage 7. The sequence controller 61 controls a servo motor that moves and positions the mold holder 9 in the Z-axis direction, and controls a servo motor that moves and positions the second detector support member 31 in the Z-axis direction. It receives signals from other sensors provided in the apparatus 1 and controls other actuators provided in the transfer apparatus 1.

  Here, the positional deviation amount detection means 11 will be described in more detail with reference to FIGS.

  FIG. 6 is a view of the detector 15 and the first detector support member 29 of the misregistration amount detection means 11 as viewed from the lower direction of the Z axis upward, and FIGS. It is a figure which shows the prism 35 etc. which are the example of the camera 33 which comprises the quantity detection means 11, and a reflection member.

  The camera 33 of the positional deviation amount detection means 11 is provided at a position away from the detector 15 (for example, the first detector support member 29). Further, the detector 15 is provided with a prism 35, and is configured such that the camera 33 detects a positional shift of the molded product W or the mold M via the prism 35. That is, light that has traveled in the Z-axis direction from the mold M or the product to be molded W is reflected by the prism 35 so as to travel in the X-axis direction and the Y-axis direction, and each camera 33 takes in the reflected light. It is like that. Note that the thickness of the detector 15 described above is a thickness including each prism 35 shown in FIG. Further, instead of each prism 35, a reflection mirror or the like may be provided.

  Furthermore, as shown in FIG. 6, the first detector support member 29 is provided with four cameras 33A, 33B, 33C, and 33D, and the detector 15 has four prisms 35A, 35B, 35C and 35D are provided. Each camera 33A, 33B, and 33C and each prism 35A, 35B, and 35C shown in FIG. 6 photograph the edge of the central through hole W1 of the molded product W. The camera 33D and the prism 35D shown in FIG. The alignment mark M1 attached to the mold M is photographed. Note that light emitting means using light emitting diodes (LEDs) 37 </ b> A, 37 </ b> B, 37 </ b> C, and the like are provided in the detector 15 in order to ensure the brightness when photographing.

  Then, as shown in FIG. 7, the camera 33D photographs the alignment mark M1 of the mold M and the vicinity thereof. An image photographed in this manner is shown in FIG. Further, as shown in FIG. 8, the camera 33A, 33B, and 33C are used to photograph the edge of the through hole W1 at three positions where the circumference of the through hole W1 of the molded product W is approximately three equally spaced. . An image photographed in this way is shown in FIG.

  An image FD shown in FIG. 9 is a diagram showing an image reflected by the prism 35D and captured by the camera 33D.

  An image FA shown in FIG. 10 is a diagram showing an image reflected by the prism 35A and captured by the camera 33A, and an image FB is a diagram showing an image reflected by the prism 35B and captured by the camera 33B. The image FC is a diagram showing an image reflected by the prism 35C and captured by the camera 33C.

  As shown in FIG. 9, an image photographed using the camera 33D is subjected to image processing using the image processing controller 55, and the amount of displacement Δx and Δy of the mold M with respect to the target value is calculated.

  Further, as shown in FIG. 10, an image photographed using each of the cameras 33A, 33B, and 33C is subjected to image processing using the image processing controller 55, and a deviation amount of the molded product W with respect to the target value is calculated. It has become.

  Explaining in detail with an example, the X coordinate and the Y coordinate of the point P1 at the center of the edge of the through hole W1 shown in the image FA (the center of the edge path) constitute the edge of the through hole W1, for example. It is calculated by obtaining an average value of a large number of points. Similarly, the X coordinate and Y coordinate of the center point P2 of the edge of the through hole W1 shown in the image FB, and the X coordinate and Y coordinate of the center point P3 of the edge of the through hole W1 shown in the image FC are calculated. The X coordinate Y coordinate of the center of the through hole W1 is obtained from the X coordinate Y coordinate of the three points P1, P2, and P3. Using the obtained center X-coordinate and Y-coordinate, the amount of positional deviation of the molded product W with respect to the target value is calculated. Further, a relative positional deviation amount of the molded product W with respect to the mold M is obtained from the obtained positional deviation amount of the mold M and the obtained positional deviation amount of the molded product W.

  It should be noted that by obtaining the equation of the normal at the point P1 of the image FA (the normal of the edge of the through hole W1) and the equation of the normal at the point P2 of the image FB (the normal of the edge of the through hole W1), You may obtain | require the X coordinate Y coordinate (coordinate of the intersection of each said normal line equation) of the center of the through-hole W1. In this case, since the shape of the edge in each image FA, FB is a shape closer to a straight line than in the case shown in FIG. 10, the shape of the edge in each image FA, FB is approximated to a straight line expression, You may obtain | require the X coordinate Y coordinate of the center of the through-hole W1 by calculating | requiring the intersection of each perpendicular | vertical line (for example, each vertical bisector) in each point P1, P2 of these straight lines.

  Further, the radius and diameter of the through-hole W1 are input to the control device 51 via an input means (not shown) and stored (stored in a memory (not shown) of the control device 51). The center position of the through hole W1 may be obtained using the radius and the diameter. Further, as described above, the amount of deviation of the mold M may be detected by detecting the edge of the mold M without providing markings on the mold M.

  Further, the outer periphery of the product to be molded W may be photographed with the camera 33, and the center position of the product to be molded W (through hole W1) may be obtained in the same manner as in the case of the through hole W1.

  Next, the operation of the transfer device 1 will be described.

  First, as an initial state, the mold holder 9 and the mold M are elevated, and the molded article W before transfer is installed in the molded article holder 5. It is assumed that it exists at a position away from the mold M and the product W (second position indicated by a two-dot chain line in FIG. 1). It is assumed that the detector 15 has already been positioned in the vertical direction.

  In the initial state, under the control of the control device 51, the mold holding body 9 is lowered to a predetermined position (until the distance between the mold M and the workpiece W becomes L1 shown in FIG. 1).

  Subsequently, the detector 15 is inserted between the mold M and the workpiece W (the detector 15 is moved to the first position indicated by the solid line in FIG. 1), and the alignment mark M1 of the mold M and the molding are formed. The edge of the through-hole W1 of the product W is photographed, and the positional deviation amount of the product W with respect to the mold M is obtained.

  The XY stage 7 is driven according to the amount of displacement obtained in this way, and the center position of the mold M and the center position of the product W in the X-axis direction and the Y-axis direction are made to coincide with each other.

  Subsequently, after the detector 15 is moved to a second position away from the mold M and the molded product W, the mold holder 9 is further lowered, the mold M is brought into contact with the molded product W, and ultraviolet rays are irradiated. Then, after the transfer, the mold holder 9 is raised, and the molded product W that has been transferred is replaced with the next molded product W that has not yet been transferred, and the initial state is restored.

  By the way, the parts and units constituting the transfer device are processed without any processing error, and the assembly of the parts and units constituting the transfer device 1 is also free of assembly errors. If the assembly is performed in the state, the relative position of the mold M and the molding target W installed in the transfer device 1 does not shift. However, in practice, a processing error and an assembly error always occur although they are very small, and the above-mentioned very small error should not be overlooked in a transfer apparatus that transfers a fine transfer pattern.

  However, according to the transfer device 1, by detecting the position of the edge of the molded product W, the amount of positional deviation of the molded product W with respect to the mold M is detected, and the detected relative of the molded product W to the mold is detected. Since the amount of misalignment is not corrected, even if the transfer device has errors such as the slight assembly described above, or even if the mold M is made of a material that does not transmit light, Even if the alignment mark is not provided, the position of the molded product W with respect to the mold M can be made accurate, and a fine transfer pattern can be transferred to the accurate position of the molded product W. That is, transfer with high rotational symmetry can be performed.

  Moreover, since it is not necessary to attach an alignment mark to the molding target W, the configuration of the molding target W can be simplified and the manufacturing cost can be reduced.

  Further, according to the transfer device 1, the position of the mold M is also detected, and the amount of misalignment (the position of the molded product W with respect to the mold M) is determined by the detected position of the mold M and the position of the edge of the molded product W. Since the displacement amount) is detected, the position of the product W with respect to the mold M can be made more accurate.

  That is, since the relative position shift amount is detected by detecting the positions of the mold M and the workpiece W at the same time, the detector 15 may be detected when the position of the mold M is shifted due to the replacement of the mold M or for some reason. Even if the repeat accuracy of (the repeat stop accuracy on the side of the molded product W or the mold M; the repeat stop accuracy at the first position on the left side drawn by the solid line in FIG. 1) is slightly deteriorated, Since the positional accuracy between the prisms 35 and the cameras 33 does not deteriorate, the position of the molded product W with respect to the mold M can be accurately detected.

  Further, according to the transfer apparatus 1, the mold M and the workpiece W are brought close to each other before the transfer, and the amount of displacement is detected, so that the error when the mold M descends is very slight. Even if it exists, that is, when the mold M is lowered in the Z-axis direction for transfer, even if it is not lowered straight in the Z-axis direction but is bent slightly slightly, the transfer accuracy due to the error is not improved. Deterioration can be minimized.

  Note that the positional deviation amount detection means 11 may detect a plurality of positions at the edge of the through-hole W1 of the molded product W by switching one camera to detect the positional deviation amount. That is, for example, a mechanism for appropriately switching the position of one camera or prism under the control of the control device 51 is provided to detect the positions of a plurality of points on the edge of the through-hole W1 of the molded product W, or 1 A mechanism for appropriately switching the optical path to the camera of the base under the control of the control device 51 may be provided to detect the positions of a plurality of points on the edge of the through-hole W1 of the molded product W.

  Further, an optical fiber may be provided in the detector 15 instead of a reflecting member such as a prism, and the position of the edge of the through hole W1 of the molded product W may be detected by a camera via the optical fiber.

  In the transfer device 1, a plurality of types of transfer programs can be stored in the control device 51 (fine transfer device controller 57). Even if the type of the product W or the mold M changes, It is possible to respond flexibly just by changing the program to be used.

  Incidentally, in the transfer apparatus 1, the mold holder 9 moves in the Z-axis direction, but instead of or in addition to the mold holder 9 moving in the Z-axis direction, the molded article holder 5 May move in the Z-axis direction. Similarly, the mold holder 9 may move in the X-axis direction and the Y-axis direction.

  In the transfer device 1 described above, a disk-shaped (ring-shaped) molded product having a circular through hole at the center is described as an example. However, a molded product having a shape other than the ring shape (for example, In addition, the image may be transferred to a rectangular plate-shaped product as seen on a light guide plate of a liquid crystal display device.

  For example, as shown in FIG. 12, when transferring to a rectangular plate-shaped product W3, stoppers 23A, 23B, and 23C (stoppers on which the edges of the product W3 abut) are placed on the product-holding body. The position of the edge point of the molded product W3 is detected at each of the parts A1, A3, A5, the positional deviation amount of the molded product W3 in the X-axis Y-axis direction, and the Z-axis of the molded product W3. The amount of displacement of the surrounding posture (the amount of displacement of the rotation angle) is detected, the amount of positional displacement in the X-axis and Y-axis directions of the mold, and the amount of displacement of the posture about the Z-axis of the mold (deviation amount of the rotation angle) For example, by detecting two marks attached to the mold with two cameras, and correcting the position of the product W3 with respect to the mold in accordance with the detected displacement amount. It may be. In this case, in addition to the XY stage 7, it is assumed that a Z-axis stage for correcting the posture of the product W3 around the Z-axis is provided.

  In the above description, the X-axis direction and the Y-axis direction are the horizontal directions and the Z-axis direction is the vertical direction, but the Z-axis direction may be the horizontal direction. Furthermore, as long as the X-axis direction, the Y-axis direction, and the Z-axis direction are orthogonal to each other, the directions may be oblique directions.

DESCRIPTION OF SYMBOLS 1 Transfer apparatus 3 Base frame 5 Molded product holding body 7 XY stage 9 Mold holding body 11 Position shift amount detection means 13 Position shift amount correction means 15 Detector 33 Camera 35 Prism 51 Control apparatus M type M1 Alignment mark W, W3 Molded product W1 Through hole

Claims (6)

In a transfer device for transferring a fine transfer pattern formed on a mold to a molded product,
A mold holder that holds the mold and is movable and positionable relative to the molded article in a direction approaching / separating from the molded article;
A molded article holder that holds the molded article and is movable and positionable relative to the mold holder in a direction that intersects the approach / separation direction of the mold holder;
A first position inserted between the mold and the molded article when the mold and the molded article are separated by a predetermined distance, and the mold and the molded article are in contact with each other And a detector that is movable between a second position away from the mold and the molded product so that the at least two points of the edge of the through-hole of the molded product can be provided. Or a position at which the center position of the molded product is obtained by detecting the position of at least two points on the outer peripheral edge of the molded product, and the position deviation amount of the molded product with respect to the mold is detected. A deviation amount detecting means;
When the mold and the molded product are separated from each other by a predetermined distance, the detector is positioned at the first position to detect the positional deviation amount of the molded product, and the detected positional deviation amount is calculated. Correction means by relatively moving the mold holder, and control means for controlling the mold to come into contact with the article to be molded to perform the transfer,
A transfer device characterized by that. The transfer device according to claim 1,
The positional deviation amount detecting means is means for detecting the position of the mold by positioning the detector at the first position,
The control means is means for detecting and correcting the positional deviation amount based on the detected position of the mold and the detected position of the edge of the molded product.
A transfer device characterized by that. In the transfer device according to claim 1 or 2,
The detector is formed in a thin plate shape, and the thickness direction is provided so as to be the approach / separation direction of the mold holder,
The positional deviation amount detecting means includes a camera provided at a position away from the detector and a reflecting member provided on the detector, and the camera is disposed via the reflecting member. A means for detecting the amount of misalignment using,
A transfer device characterized by that. The transfer device according to claim 3, wherein
The misregistration amount detection means is a means for detecting a plurality of positions at the edge of the molded product by switching one camera and detecting the misregistration amount.
A transfer device characterized by that. In the transfer device according to claim 1 or 2,
The detector is formed in a thin plate shape, and the thickness direction is provided so as to be the approach / separation direction of the mold holder,
The positional deviation amount detection means includes a camera provided at a position away from the detector and an optical fiber provided in the detector, and the camera is provided via the optical fiber. The means for detecting the amount of positional deviation in
A transfer device characterized by that. Using the transfer device according to any one of claims 1 to 5, a fine transfer pattern formed on a mold is transferred to a product to be molded.
A transfer method characterized by the above.