JP5150309B2 - Transfer apparatus and transfer method - Google Patents

Description

  The present invention relates to a transfer apparatus and a transfer method, and more particularly to a transfer device that transfers a fine transfer pattern formed on a mold onto a molded product.

  In recent years, a mold (mold) is produced by forming an ultrafine transfer pattern on a quartz substrate or the like by an electron beam drawing method or the like, and the mold is applied to a resist film formed on the surface of the substrate to be molded as a predetermined pressure. Research and development has been conducted on nanoimprint technology for transferring the transfer pattern formed on the mold by pressing (see, for example, Non-Patent Document 1).

  As a method for forming a nano-order fine pattern (transfer pattern) at a low cost, an imprint method using a lithography technique has been devised. This molding method is roughly classified into a thermal imprint method and a UV imprint method.

  In the thermal imprint method, a mold is pressed against a substrate and heated until the resin made of a thermoplastic polymer is sufficiently flowable to flow the resin into a fine pattern. It cools until it becomes below, solidifies the fine pattern transferred to the substrate, and then separates the mold.

  In the UV imprint method, a transparent mold capable of transmitting light is used, and the UV radiation is applied by pressing the mold against the UV curable liquid. Radiant light is applied for an appropriate time to cure the solution and transfer the fine pattern, and then pull back the mold.

  Recently, in rotary storage devices such as hard disks, CDs, and DVDs, there is a high interest in methods that utilize such nanoimprint technology as a means for forming a storage medium (recording medium) for forming high-density data on a disk. It has become to.

FIG. 5 shows an example of a process for creating a storage medium for a hard disk using the UV imprint method. Here, a fine pattern (for example, a dot pattern of a hard disk ) formed on a mold ( quartz glass mold ) M is pressed onto a substrate W1 coated with a UV curable resin W2, and the resin W2 is cured by irradiation with UV light. (See FIGS. 5A and 5B). Thereafter, the mold is released and the remaining film W3 is removed by O ₂ ashing or the like (see FIGS. 5C and 5D), and etching is performed (see FIG. 5D), which is copied to the resin W2. The fine shape (fine transfer pattern) of the mold M is transferred to the substrate W1 (see FIG. 5E).

  Generally, when alignment adjustment (high-precision positioning) is performed by the imprint method, a method of aligning the mold and the substrate in a manner similar to that conventionally used for semiconductors is used. Yes. A typical example of this is shown in FIG. 12 (see, for example, Patent Document 1).

As shown in FIG. 12, in this case, alignment marks 205 and 206 are attached to a mold 201 and a substrate (wafer) 203, and a reference beam such as a laser beam is irradiated from above the mold 201. Reflected light transmitted through the two alignment marks 205 and 206 is received by a light receiving device, and the mold 201 and the substrate 203 are aligned based on the observation result of the light receiving pattern.
Precision Engineering Journal of the International Societies for Precision Engineering and Nanotechnology 25 (2001) 192-199 JP 2000-323461 A

  By the way, in the method described in Patent Document 1, the rotational alignment of the mold with respect to the substrate (molded product) cannot be adjusted, and a fine transfer pattern can be transferred to the molded product with an accurate posture. There is a problem that it may not be possible.

The present invention, wherein has been the Do in view of the problems, a fine transfer pattern formed on the mold, the transfer device and the transfer method of transferring to the molded article, the rotation of the mold with respect to the moldings It is an object of the present invention to provide a transfer device capable of transferring a fine transfer pattern formed on a mold to a molded product with an accurate posture by adjusting alignment, and a transfer method using the transfer device. To do.

Invention according to claim 1, a fine transfer pattern formed on the mold, the transfer device for transferring the object to be molded, and the molded article holder for holding the object to be molded, and holds the type , Move relative to the molding object holder in a direction approaching / separating, and rotate relative to the molding object holder about an axis extending in the approaching / separating direction A mold holding body that can be positioned; and a positional deviation amount detecting means for detecting a rotational positional deviation amount of the mold relative to the molded product, wherein the molded product holding body is orthogonal to the approaching / separating direction. The position deviation detecting means is a means for detecting the amount of position deviation of the mold in the orthogonal direction with respect to the molded product. Yes, it is detected by the positional deviation amount detecting means. Based on the amount of rotational position deviation, the mold holder is relatively rotated so as to eliminate the amount of rotational position deviation, and after this rotation, the mold holder is moved to the molded article holder, and the transfer is performed. Control means for performing control, and the control means is configured to eliminate the amount of positional deviation in the orthogonal direction based on the amount of positional deviation in the orthogonal direction detected by the positional deviation amount detection means. A means for moving the holder relatively in the orthogonal direction, and moving the mold holder to the molded article holder after the movement, and controlling the transfer, a base frame, and a base frame A movable member provided movably, and the mold holder is supported by the movable member via a bearing so that the mold holder is fixed to the molded article holder. Approach / separate And a relative rotation with respect to the molded product holder with the shaft extending in the approaching / separating direction as the center of rotation. The amount of positional deviation in the orthogonal direction and the amount of positional deviation in the rotational direction are detected, and each deviation amount between the molded product and the mold is corrected, and the molded product and the mold are set to an arbitrary rotation angle. The mold holding body is moved in the orthogonal direction with respect to the molded article holding body and rotated and positioned relatively, and the first group is transferred by the mold. The amount of deviation between the product and the mold is detected and corrected, and the mold holder is moved relative to the molded article holder in the orthogonal direction and rotated to be positioned relatively. Two groups of transfer are performed to connect fine transfer patterns in a ring shape. And a transfer device for transferring to the molding object .

According to a second aspect of the invention, the transfer device according to claim 1, a through hole extending along the central axis of rotation is provided on the mold carrier, ultraviolet ray generator in the through-hole The transfer device is provided with an apparatus, or configured to irradiate the molding object with ultraviolet rays through the through hole.

A third aspect of the present invention is a transfer method for transferring a fine transfer pattern formed on a mold onto a molded product using the transfer device according to the first or second aspect .

  According to the present invention, in a transfer apparatus and transfer method for transferring a fine transfer pattern formed on a mold to a molded product, the pattern is formed on the mold by adjusting the rotational alignment of the mold with respect to the molded product. There is an effect that a fine transfer pattern can be transferred to a molding object with an accurate posture.

  FIG. 1 is a front view showing a schematic configuration of a transfer device 1 according to an embodiment of the present invention, and FIG. 2 is a side view showing a schematic configuration of the transfer device 1, and is a view taken in the direction of arrow II in FIG. .

  FIG. 3 is a cross-sectional view illustrating a schematic configuration of the mold holder 9 provided in the transfer apparatus 1, and FIG. 4 is a block diagram illustrating a schematic configuration of the control system 100 of the transfer apparatus 1.

  Hereinafter, for convenience of explanation, one horizontal direction is defined as an X-axis direction, another horizontal direction that is perpendicular to the X-axis direction is defined as a Y-axis direction, and the X-axis direction and the Y-axis direction. A direction (vertical direction; vertical direction) perpendicular to Z may be referred to as a Z-axis direction.

  The transfer device 1 uses a fine transfer pattern formed on a surface of a mold (mold) M (for example, a planar lower surface), and a surface of the mold M on a surface of a product W (for example, a planar upper surface). It is an apparatus for transferring the surface of the product W by bringing it into surface contact and pressing it. As the molded product W, an information recording disk (for example, a DVD-ROM, a recording medium for a hard disk), a backlight light guide plate of a liquid crystal display device, or the like can be considered.

  The transfer is performed for the thermal imprint method or the UV imprint method described above, and the transfer device 1 is in charge of the steps shown in FIGS. 5A to 5C, for example. It is. Hereinafter, the UV imprint method will be described as an example.

  The transfer device 1 includes a base frame 3, and the base frame 3 is provided with a molded product holder 5 and a mold holder 9.

  The molded product holder 5 is supported by the base frame 3 via the XY stage 7. Accordingly, by driving an actuator (not shown) such as a servo motor that constitutes the XY stage 7 under the control of the control device 101 (see FIG. 4), the molded product holder 5 is placed in the X axis or Y axis. It is movable and positionable relative to the mold holder 9 in the direction.

  The mold holding body 9 holds the mold M and moves in a direction approaching / separating from the molding object holding body 5 (Z-axis direction) and extending in a direction approaching / separating (Z-axis direction) (Θ-axis) CL1 can be rotated and positioned relative to the molded product holder 5 with the center of rotation as CL1. The axis CL1 passes through the center of the mold holder 9 and the mold M held by the mold holder 9, for example.

  The to-be-molded product W is formed in a thin flat plate shape such as a rectangle or a circle. A fine transfer pattern is formed on one surface (the upper surface in FIGS. 1 and 2) in the thickness direction of the product W. The other surface (the lower surface in FIGS. 1 and 2) in the thickness direction of the molded product W is in contact with the planar holding portion of the molded product holding body 5 and, for example, the molded product holding body 5 by vacuum suction. Thus, the molded product W is held.

The mold M is formed in a thin flat plate shape such as a rectangle or a circle, and a fine transfer pattern is formed on one surface in the thickness direction (the lower surface in FIGS. 1, 2 and 3). The other surface in the thickness direction of the mold M (the upper surface in FIGS. 1, 2, and 3) is in contact with the planar holding portion (the lower surface in FIG. 3) of the backup glass 11 of the mold holding body 9. 13 and the backup glass 11 are sandwiched between the mold M and the mold holder 9.

  The mold holder 9 is provided, for example, above the molded article holder 5. The mold holder 9 holds the mold M on the lower side, and the molded article holder 5 is on the molded article W on the upper side. Is supposed to hold. In a state where the mold holder 9 holds the mold M and the molded product holder 5 holds the molded product W, the surface of the mold M on which the fine transfer pattern is formed and the fine transfer pattern are transferred. The surfaces of the molded product W are substantially parallel to and opposed to each other, and are perpendicular to the Z axis.

  Then, when the mold holder 9 moves (lowers) and approaches the molded product holder 5, the mold M comes into contact with the molded product W, and the mold M presses the molded product W to be transferred. It has become so.

In the above description, the molded product holder 5 can be moved and positioned in the X-axis direction and the Y-axis direction, the mold holder 9 can be moved and positioned in the Z-axis direction, and the mold holder 9 Although There is rotatable positioning in the rotation center axis CL1, addition or instead particular have become freely be molded article holder 5 is moved and positioned in the X-axis direction and the Y-axis direction type carrier 9 May be movable and positionable in the X-axis direction and the Y-axis direction, and the mold holder 9 is movable and positionable in the Z-axis direction. The mold holder 9 is rotationally positioned around the axis CL1. Instead of or in addition to being free, the molded product holder 5 can be moved and positioned in the Z-axis direction, and the molded product holder 5 can be rotated and positioned around the axis CL1. It may be.

  In addition, the transfer device 1 includes a rotational displacement amount (a mold) of a mold (a mold held by the mold holder 9) M with respect to a molded article (a molded article held by the molded article holder 5) W. A positional deviation amount detecting means 15 for detecting a rotational positional deviation amount about the axis CL1 which is the rotation center axis of the holding body 9 is provided.

  This positional deviation amount detection means 15 is provided in the X-axis direction and the Y-axis with respect to the molded product (molded product held by the molded product holder) W of the mold (mold held by the mold holder 9) M. A positional deviation amount in the direction can also be detected.

  Here, the positional deviation amount detection means 15 will be described in detail.

  The positional deviation amount detection means 15 is before the transfer and when the mold M and the product W are at a predetermined distance (distance L1 shown in FIG. 1) (for example, the mold M and the product W are Are positioned close to each other to some extent), the position of the molded product W (for example, the position of the alignment mark provided on the molded product W) and the position of the mold M (for example, the alignment provided on the mold M). The position of the mark) is detected almost simultaneously, and the amount of displacement is detected based on the detected position of the mold M and the detected position of the molded product W.

  In addition, it is the structure which detects the position of the to-be-molded product W by detecting the position of the fine pattern already formed in the to-be-molded product W instead of using an alignment mark. Alternatively, instead of using the alignment mark, the position of the mold M is detected by detecting the position of the fine transfer pattern formed on the edge or corner of the mold M or the mold M. There may be.

  The positional deviation amount detection means 15 will be described in more detail.

  The misregistration amount detection means 15 includes a thin plate-shaped detector 17, and the thickness direction of the detector 17 is the Z-axis direction. Further, before the transfer, the detector 17 is inserted between the mold M and the molded product W to detect the amount of positional deviation of the molded product W with respect to the mold M.

  When the detector 17 is inserted between the mold M and the molded product W in order to detect the amount of displacement, the mold M and the molded product W are as close as possible, and there is almost no dimensional allowance. In this state, it is desirable that the detector 17 be inserted between the mold M and the workpiece W.

  For example, when the detector 17 is inserted between the mold M and the workpiece W in order to detect the amount of displacement, a distance L3 between the detector 17 and the mold M is shown in FIG. Is about 0.5 mm to 3 mm, and the distance L5 between the detector 17 and the molded product W is also preferably about 0.5 mm to 3 mm. Further, it is desirable that the thickness of the detector 17 (dimension in the Z-axis direction) be as small as possible at least in a portion located between the mold M and the product W.

  The detector 17 of the misalignment detection means 15 is inserted between the mold M and the molded product W when the mold M and the molded product W are separated by a predetermined distance (distance L1 shown in FIG. 1). The first position (see the detector 17 indicated by a solid line in FIG. 1) is separated from the mold M and the molded product W such that the mold M and the molded product W can contact each other. It is movable between the second position (see the detector 17 indicated by a two-dot chain line in FIG. 1).

  That is, the detector 17 is provided integrally with the first detector support member 19 on the distal end side of the first detector support member 19, and the first detector support member 19 is a linear (not shown). It is provided so as to be movable with respect to the second detector support member 21 in the X-axis direction via a guide bearing (not shown). Then, under the control of the control device 101, an actuator (not shown) such as a pneumatic cylinder is used to insert the first position (position indicated by a solid line in FIG. 1) from the second position (FIG. 1). To the position indicated by a two-dot chain line).

  The second detector support member 21 is provided so as to be movable in the Z-axis direction with respect to the base frame 3 via a linear guide bearing (not shown). Under the control of the control device 101, the actuator can be moved and positioned in the vertical direction by an actuator (not shown) such as a servo motor and a ball screw (not shown). Therefore, the position of the detector 17 in the Z-axis direction can be adjusted according to the form of the mold M and the product W.

  Here, the detector 17 of the positional deviation amount detection means 15 will be described in detail.

  FIG. 6 is a diagram of the detector of the misregistration amount detection unit 15 as viewed from the Z-axis direction, and FIG. 7 is a diagram of the misregistration amount detection unit 15 as viewed from the X-axis direction.

  The camera 23 of the positional deviation amount detection means 15 is provided at a position away from the detector 17 (for example, the first detector support member 19). In addition, the detector 17 is provided with a prism 25, and is configured so that the camera 23 detects a positional shift of the molded product W or the mold M via the prism 25. That is, light that has traveled in the Z-axis direction from the mold M or the workpiece W is reflected by the prism 25 so as to travel in the X-axis direction and the Y-axis direction, and each camera 23 takes in the reflected light. It is like that. It should be noted that the thickness of the detector 17 described above includes the prisms 25 shown in FIG. Further, instead of each prism 25, a reflecting mirror or the like may be provided.

  Furthermore, as shown in FIG. 6, the first detector support member 19 is provided with, for example, four cameras 23A, 23B, 23C, and 23D, and the detector 17 includes four prisms 25A, 25B, 25C, and 25D are provided.

The cameras 23A and 23B and the prisms 25A and 25B shown in FIG. 6 photograph the alignment marks AM (AM1 and AM2) attached to the mold M. The cameras 23C and 23D and the prism 25C shown in FIG. , 25D is for photographing the alignment mark WM (WM1, WM2) attached to the product W. Note that a light emitting means (not shown) using a light emitting diode (LED) or the like is provided in the detector 17 in order to ensure the brightness when photographing.

  Then, the image processing unit 105 (see FIG. 4) is used to perform image processing on the images photographed by the respective cameras 23, and for example, by obtaining the positions of the alignment marks AM and WM, the detector (first position; FIG. 1 (detector having a position indicated by a solid line in FIG. 1) 17 is a displacement amount of the mold M or the workpiece W (a displacement amount in the X-axis direction or the Y-axis direction or a rotational displacement amount around the axis CL1). It comes to ask for. Then, based on the obtained result, the relative displacement amount of the mold M held by the mold holding body 9 with respect to the molded article W held by the molded article holding body 5 can be obtained. It can be done.

  Note that the amount of positional deviation obtained in this way is displayed on a touch panel (display operation unit) 107 (see FIG. 4), which is an example of output means.

  Further, the transfer device 1 is provided with a control device 101 that controls the operation of the entire transfer device 1. Then, under the control of the control device 101, based on the rotational displacement amount detected by the displacement amount detection means 15, the mold holder 9 is appropriately rotated and positioned around the axis CL1 so as to eliminate this rotational displacement amount, Further, if necessary, the molded product is configured to eliminate the positional deviation amounts in the X-axis direction and the Y-axis direction based on the positional deviation amounts in the X-axis direction and the Y-axis direction detected by the positional deviation amount detection means 15. The holding body 5 is appropriately moved and positioned in the X-axis direction and the Y-axis direction. Subsequently, after these positioning, the mold holder 9 is moved to the molded article holder 5 to perform transfer.

  Here, the control system of the transfer apparatus 1 will be described in detail with reference to FIG.

  The control system 100 includes a control device 101 that includes a memory and a CPU that store an operation program of the transfer device 1. Further, the control system 100 is provided with a sequencer 103, through which the θ-axis servo amplifier 113 rotates the θ-axis rotation drive motor 111 and rotates the mold holder 9 about the axis CL1. It is designed to be positioned. In this case, closed-loop feedback control is performed by the rotation scale 115.

  Further, the control system 100 is provided with an XY axis control unit 109 and a Z axis control unit 117. The XY axis control unit 109 controls the actuator of the XY stage 7. Under the control of the control device 101, the molded product holder 5 is moved in the X axis and Y axis directions via the XY axis control unit 109. It is designed to move and position with. The Z-axis control unit 117 controls an actuator or the like that moves and positions the mold holder 9 in the Z-axis direction, and the mold holder 9 is controlled via the Z-axis control unit 117 under the control of the control device 101. It is moved and positioned in the Z-axis direction.

  Further, the control system 100 is provided with an image processing unit 105. Then, the image captured by the camera 23 is subjected to image processing by the image processing unit 105, and the mold M held by the mold holding body 9 is relative to the molding target W held by the molding product holding body 5. The amount of misalignment (the amount of misalignment in the X-axis and Y-axis directions, the amount of rotational misalignment around the axis CL1) is calculated, and the calculation result is sent to the control device 101 via the sequencer 103.

  Then, under the control of the control device 101, the XY stage 7 and the θ-axis rotation drive motor 111 are controlled via the XY-axis control unit 109 and the θ-axis servo amplifier 113, and the molded product holder 5 is appropriately moved, The mold holder 9 is appropriately moved so as to eliminate the amount of displacement.

  Incidentally, the transfer device 1 is provided with a moving member 27 (see FIG. 3). The moving member 27 is provided on the base frame 3 so as to be movable in the Z-axis direction. The mold holding body 9 is supported by the moving member 27 via one cross roller bearing 29, so that the mold holding body 9 approaches and separates from the molded product holding body 5 (Z-axis). The axis CL1 (θ axis) extending in the Z-axis direction and the center of rotation as the center of rotation.

  The molded product holder 5 is provided on one side (lower side) of the base frame 3 in the Z-axis direction. The moving member 27 is provided on the other side (upper side) of the base frame 3 in the Z-axis direction. The moving member 27 includes a cylindrical hole 31 that is open on the molded article holding body 5 side (lower side). A cross roller bearing 29 is provided at the opening portion of the hole 31. The center axis of the cross roller bearing 29, the center axis of the hole 31, and the rotation center axis CL1 of the die holder 9 are substantially coincident with each other.

  The cross roller bearing 29 is provided integrally with the moving member 27 so that the outer ring 33 is located at the outer periphery of the opening of the hole 31. Further, the inner ring 35 of the cross roller bearing 29 is provided integrally with the mold holder 9.

  A portion 37 on the one end side (lower side) in the Z-axis direction of the mold holding body 9 extends from the cross roller bearing 29 toward the molded product holding body 5 side (lower side). In addition, a portion 39 on the other end side (upper side) in the Z-axis direction of the mold holding body 9 is formed in a columnar shape having an outer diameter smaller than the inner periphery of the hole 31, and extends from the cross roller bearing 29 into the hole 31. It extends to. As a result, the mold holder 9 is rotatably supported by the moving member 27 via the cross roller bearing 29 at an intermediate portion in the extending direction of the rotation center axis CL1.

  The mold M is held at one end (lower end) of the mold holder 9. The rotor 41 of the motor 111 is integrally provided on the outer periphery of the portion 39 on the other end side of the mold holding body 9 extending into the hole 31, and the stator of the motor 111 is provided on the inner periphery of the hole 31. 43 is provided integrally. Then, by driving the motor 111, the mold holder 9 rotates with respect to the moving member 27.

  On the other end (upper part) of the mold holder 9, a main body 45 of a rotary scale (a rotary scale having a high resolution for adjusting the alignment of a fine pattern) 115 is integrally provided. The center axis of the main body 45 of the ring-shaped rotation scale 115 and the rotation center axis CL1 of the mold holding body 9 coincide with each other. Further, the reading head 47 is provided integrally with the moving member 27 via a bracket (not shown). The read head 47 is for reading the rotation angle of the main body 45 of the rotary scale 115.

  Then, the rotation angle of the mold holder 9 read by the rotation scale 115 is input to the control device 101 via the sequencer 103, whereby the rotation angle is displayed by the display operation unit 107, and the motor 111 is closed loop. Thus, the die holding body 9 can be rotationally positioned to the target value with high accuracy, and the rotational displacement can be corrected.

  The moving member 27 is guided through a linear guide member such as a linear guide bearing (not shown) and is moved and positioned with respect to the base frame 3 using an actuator such as a motor and a mechanism such as a ball screw. It has become.

  Note that a cooling means for cooling the motor 111 may be provided at a portion of the moving member 27 on the molded article holding body 5 side. Specifically, a flow path through which a cooling medium such as cooling water flows is provided in a portion 49 of the moving member 27 on the molded product holding body 5 side, and the cooling water cooled by a cooling unit provided outside the transfer device 1. However, it may circulate through the flow path. By providing the cooling means in this way, it is possible to suppress the temperature rise of the mold holder due to the heat generated from the heater in the thermal imprint method.

  The mold holder 9 is engaged with a flat backup glass (member through which ultraviolet rays pass) 11, a mold pressing member 13, a backup glass holding member 51 that holds the backup glass 11, and an inner ring 35 of the cross roller bearing 29. The cross roller bearing engaging member 53 and the rotor support member 55 that supports the rotor 41 of the motor 111 are provided.

  Then, as described above, by pressing the mold M with the pressing member 13, the surface of the mold M (a fine transfer pattern) is placed on the flat surface (lower surface) of the backup glass 11 on one end side (lower side) of the mold holding body 9. The surface opposite to the surface on which the surface is formed; the upper surface) is in contact, and the mold holder 9 can hold the mold M.

  Further, the mold M and the mold pressing member 13, the backup glass holding member 51 and the backup glass 11, the cross roller bearing engagement member 53, and the rotor support member 55 are arranged in this order from bottom to top in the Z-axis direction.

  The backup glass holding member 51 and the cross roller bearing engaging member 53 are formed in an annular shape, and the backup glass 11 is provided integrally with the backup glass holding member 51 on the lower side inside the backup glass holding member 51. It has been. Further, an ultraviolet ray generator 57 is provided on the upper side inside the backup glass holding member 51. Inside the cross roller bearing engaging member 53, a cooling device (for example, a Peltier element) 59 for cooling the ultraviolet ray generator 57 is provided. Since the ultraviolet ray generating device 57 is provided inside the backup glass holding member 51, ultraviolet rays can be irradiated from above the mold M to the product W during transfer. Further, the ultraviolet ray generating device 57 can be positioned near the product to be molded W, so that the product to be molded W can be efficiently irradiated with ultraviolet rays.

  In addition, when employ | adopting a thermal inblint method, the type | mold M is heated by incorporating the heater instead of backup glass in the backup glass holding member 51, for example. In this case, the cross roller bearing engaging member 53 and the backup glass holding member 51 are made of a material having low thermal conductivity, and the heat of the heater is present above the cross roller bearing 29 and the motor 111. Such a rotation mechanism is difficult to propagate.

  Here, the operation of the transfer apparatus 1 will be described.

  First, as an initial state, the mold holding body 9 is positioned at the rising end, the mold holding body 9 holds the mold M, and the molded product holder 5 holds the molded product W before transfer, and is detected. It is assumed that the child 17 is located at the second position (position indicated by a two-dot chain line in FIG. 1).

  In this initial state, under the control of the control device 101, the mold holder 9 is lowered until the distance between the mold M and the product W is “L1”, and the detector 17 is moved to the first position (FIG. 1). (Position indicated by a solid line).

Subsequently, using the camera 23 and the image processing unit 105, the amount of positional deviation of the mold M with respect to the workpiece W is obtained, and the positional deviation is eliminated based on the obtained amount of positional deviation (for example, the mold M as already angle fine pattern formed is constant relationship) and a fine transfer pattern formed on the molded article W, the rotational positioning of the rotary drive and mold carrier 9 of the motor 111 and, if necessary, by driving the XY stage 7, is positioned to be molded article holder 5 X-axis direction, the Y-axis direction, Ru retracts the detectors 17 in the second position.

  Subsequently, the mold holder 9 is further lowered, the molded product W is pressed by the mold M, and the molded product W is irradiated with ultraviolet rays from the ultraviolet generator 57 to cure the ultraviolet curable resin W2 of the molded product W. Let

After ultraviolet curable resin W2 is cured, by raising the mold holding member 9 away mold M from the molded product W, it is replaced to be molded article W which transcription is the next of the moldings W, the initial Return to state.

  At the time of transfer, the Z-axis drive servomotor moves the mold M (mold holding body 9) toward the molded product W (molded product holding body 5), and the distance between them is a specific value. Then, the servo system is switched from the position control mode to the force control mode, and the mold M is pressed and transferred to the workpiece W.

  According to the transfer device 1, the mold holder 9 can be rotated and positioned around the rotation center axis CL1 extending in the Z-axis direction, so that the rotational alignment of the mold M with respect to the workpiece W can be adjusted. The fine transfer pattern formed on the mold M can be transferred to the product W in an accurate posture.

  In addition, since the mold holder 9 can be rotated and positioned around the rotation center axis CL1 extending in the Z-axis direction, the fine pattern already transferred to the molded product W and the fine pattern to be transferred from now on can be obtained. The angle formed with the pattern (the fine transfer pattern formed on the mold M) can be made an accurate angle.

That is, as shown in FIG. 8A (FIG. 8B is a VIII-VIII cross section in FIG. 8A), a fine transfer pattern is connected to the product W and transferred. If the fine pattern IM1 formed by the first transfer is tilted, the second transfer IM2 can also be tilted in the same manner as the first transfer, and in the rotational direction with respect to the first transfer. Transfer without deviation can be performed. Then, it is possible to transfer a fine pattern to accurately bond the fine pattern I M1, IM2 each other in a wide region of the molding W. In this case, the molded product holder 5 holding the molded product W is appropriately moved and positioned in the X-axis direction and the Y-axis direction.

  Further, since the mold holder 9 can be rotated and positioned around the rotation center axis CL1 extending in the Z-axis direction, transfer of superposition such as a fine pattern for two-dimensional photonic crystal (fine And transferring a fine transfer pattern in an overlapping manner at a different angle to the region of the molded product W to which the pattern has already been transferred.

  Here, a transfer process of a fine pattern for a photonic crystal will be described with reference to FIGS.

First, a photonic crystal refers to a structure whose atomic arrangement waits for periodicity of the order of the wavelength of light, and causes Bragg reflection in which the phase of the scattered wave is aligned with the light in the visible light region. . This result, which acts as an insulator with respect to light of a particular frequency band, it is possible to miniaturize the optical element to a multiple of the size of the wavelength of light, as the platform for future optical integrated circuit It is what is expected.

  First, as shown in FIG. 5, a line (elongated convex part) L and a space (elongated concave part) are formed on the substrate W1 by a mold M in which a fine transfer pattern is formed from lines and spaces (L & S). A fine pattern in which S and C appear alternately is formed (see FIG. 9A).

Subsequently, the substrate W1 shown in FIG. 9 (a), a thin film of the ultraviolet curable resin W2 provided, and a fine line L and space S of the mold M, a substrate shown in FIG. 9 (a) For example, the mold M is formed so as to be orthogonal to the fine line L and the space S formed in W1 (not necessarily orthogonal, and may intersect at an angle other than 90 °). Rotate 90 °. Then, similarly to the case shown in FIG. 5, the product W is pressed with the mold M (see FIG. 9B), and the ultraviolet curable resin W <b> 2 is cured by irradiating ultraviolet rays. Thereafter, when the mold M is separated from the product W, the product to be molded as shown in FIG. 9C (in the direction orthogonal to the line L and the space S shown in FIG. A product to be molded (W) in which the transferred lines L and spaces S extend can be obtained.

  Thereafter, etching is performed using the ultraviolet curable resin W2 as a masking member, and the ultraviolet curable resin W2 is removed, whereby a two-dimensional photonic crystal fine pattern as shown in FIG. 9D is transferred to the substrate W1. The

By the way, when rotating the mold M or the molded product W having a fine shape (fine pattern), it is necessary to precisely control the angle. Since the fine pattern has a size of several tens to 100 nm (nanometer), the rotation accuracy is required to be about 1 μrad (about 5.7 × 10 ⁻⁶ degrees). In the case of the UV imprint method, since the light must pass through the mold M, the mold M and the backup glass 11 should not obstruct the light path. Furthermore, in the case of the thermal imprinting method, the mold M is pressed against the molded product W with a certain pressure, and the molded product W and the mold M are heated and transferred, so that the mold holder 9 is supported rotatably. It is also necessary that the portion being provided has a sufficiently high rigidity to withstand the pressurization when the mold M is pressed, and also has heat resistance. Further, in the transfer device, it is necessary to transfer a fine pattern having a size of several tens to 100 nm, and a precise rotation mechanism that satisfies all of these requirements is incorporated in the transfer head (the mold holder 9 and the moving member 27). To do this, special consideration is required.

  However, according to the transfer device 1, the mold holder 9 is supported by the moving member 27 with high rigidity and high accuracy using the cross roller bearing 29, and the high-precision rotary scale 115 and the linear motion motor 111 are connected to each other. Since the rotation angle of the mold holder 9 is adjusted with high accuracy, a fine pattern can be transferred from the mold M to the product W with high accuracy.

  Further, according to the transfer device 1, the positional deviation amount detection means 15 detects the rotational positional deviation amount of the mold M with respect to the molded product W and displays it on the display operation unit 107. The rotational position deviation amount becomes clear before transfer, and accurate transfer can be performed without trial transfer or the like.

  In addition, according to the transfer device 1, since the molded product holder 5 can be moved and positioned in the X-axis direction and the Y-axis direction, the molded product W held by the molded product holder 5 and Even when there is a positional shift in the X-axis direction or the Y-axis direction with the mold M held by the mold holding body 9, this positional shift can be corrected and accurate transfer can be performed. .

Furthermore, according to the transfer device 1, it is possible to transfer the fine transfer pattern formed on the mold M to the molding target W by connecting it in an annular shape, for example. That is, as shown in FIG. 10, the mold holder 9 is moved relative to the molded article holder 5 in the X-axis direction and the Y-axis direction and rotated to be relatively positioned. The transfer TR1 is performed, and then the mold holder 9 is moved relative to the molded article holder 5 in the X-axis direction and the Y-axis direction and rotated to be relatively positioned. If TR2 is performed, a fine transfer pattern can be transferred to the molding target W, for example, connected in a ring shape.

Further, according to the transfer device 1, under the control of the control device 101, the mold holder 9 is rotated based on the rotational displacement amount detected by the displacement amount detector 15 so as to eliminate the rotational displacement amount. Therefore, it is possible to automate the process of transferring while correcting the rotational position deviation.

  Further, according to the transfer device 1, the mold holding body 9 is supported by the moving member 27 via one cross roller bearing 29, so that the mold holding body 9 is in the Z axis with respect to the molded product holding body 5. In addition, the support structure for the mold holder 9 is simplified because the mold holder 9 is rotated about the axis CL1 extending in the Z-axis direction as the center of rotation.

  Further, since the mold holder 9 is held by the cross roller bearing 29 having high rigidity, the mold holder 9 is lowered and the mold M is pressed against the workpiece W even when the mold M is pressed against the workpiece W. It is possible to hold the load in the thrust direction with high rigidity.

Further, the rotation moment mold holding member 9 about the Z-axis the direction of which is supported on the moving member 27 at the intermediate portion, rotating the mold carrier 9 Mome down bets (X-axis and Y-axis by the cross roller bearing 29 ), It is possible to suppress the change in the posture of the die holder 9 (particularly, the amount of positional deviation at the upper and lower ends) as much as possible. For example, the rotor 41 and the stator 43 of the motor 111 can be suppressed. And the gap between the rotary scale body 45 and the read head 47 can be prevented from changing as much as possible.

  Furthermore, since the mold holding body 9 is supported using one cross roller bearing 29, the mold holding body 9 is supported with appropriate rigidity. For example, the mold holding body 9 holds the mold holding body 9. The area (surface) on which the fine transfer pattern of the mold M is formed and the surface to which the molded product W held on the molded product holder 5 is transferred are not completely parallel to each other. Even if it is tilted slightly, the mold M swings slightly (swings around the X axis and Y axis) due to the force received from the molded product W during transfer so as to follow the molded product W. It has become. Therefore, uniform transfer onto the molding target W can be performed over the entire area where the fine transfer pattern is formed without using the cymbal mechanism.

  Here, a modified example of the transfer device 1 will be described.

  FIG. 11 is a view showing a modification of the transfer apparatus 1 and corresponds to FIG.

  11 differs from the transfer apparatus 1 shown in FIG. 3 in that the mold holder 9 (rotor support member 55) is provided with a hole 61 penetrating in the Z-axis direction. The point is configured in substantially the same manner as the transfer apparatus 1 shown in FIG. 3, and has substantially the same effect.

  That is, the mold holding body 9 of the transfer apparatus 1a shown in FIG. 11 is provided with a through hole 61 extending along the rotation center axis CL1, whereby the mold holding body 9 is formed in a substantially cylindrical shape. Has been. And the ultraviolet ray generator 57 is provided in the upper side inside the through-hole 61 (the place where the rotor 41 of the motor 111 is provided in the height direction), and the ultraviolet ray generated by the ultraviolet ray generator 57 is The molded product W is irradiated at the time of transfer through the lower side of the through hole 61, the backup glass 11 and the mold M.

  The ultraviolet ray generating device 57 is provided integrally with the moving member 27. In the transfer device 1a shown in FIG. 11, the cross roller bearing engaging member 53 shown in FIG. 3 and the rotor support member 55 shown in FIG. Are integrally formed.

  By the way, in the transfer apparatus 1a shown in FIG. 11, an ultraviolet ray generator 57 is provided on the upper part (for example, the moving member 27) of the mold holder 9, and the ultraviolet rays emitted from the ultraviolet ray generator 57 are transmitted through the through holes 61 of the mold holder 9. It may be configured to irradiate the molded product W through the like.

  In the transfer devices 1 and 1a described above, the control device 101 automatically corrects the misalignment of the mold M with respect to the workpiece W. However, the misalignment may be manually corrected.

  That is, the amount of displacement obtained by the detector 17 or the image processing unit 105 (the X axis of the mold M held by the mold holder 9 with respect to the molded article W held by the molded article holder 5) The Y-axis direction positional deviation amount and the rotational positional deviation amount about the axis CL1 are displayed on the display / operation unit 107, and based on this display, the operator of the transfer device 1, 1a inputs the correction value and is an example of an input unit. Input may be performed via the display operation unit 107.

  Then, based on the input correction value, the amount of displacement of the mold holder 9 is adjusted under the control of the control device 101. After this adjustment, the mold holder 9 is moved to the molded product W side, and the transfer is performed. You may make it perform.

  In the above description, the X-axis direction and the Y-axis direction are the horizontal directions and the Z-axis direction is the vertical direction, but the Z-axis direction may be the horizontal direction. Furthermore, as long as the X-axis direction, the Y-axis direction, and the Z-axis direction are orthogonal to each other, the directions may be oblique directions.

  The transfer devices 1 and 1a are transfer devices that transfer a fine transfer pattern formed on a mold to a molded product, and rotational alignment adjusting means that adjusts the rotational alignment of the mold with respect to the molded product. It is an example of the transfer apparatus which has.

1 is a front view showing a schematic configuration of a transfer apparatus 1 according to an embodiment of the present invention. It is a side view which shows schematic structure of the transfer apparatus 1, and is II arrow view in FIG. 3 is a cross-sectional view showing a schematic configuration of a mold holder 9 provided in the transfer apparatus 1. FIG. 2 is a block diagram illustrating a schematic configuration of a control system 100 of the transfer apparatus 1. FIG. It is a figure which shows an example of the process which produces the storage medium for hard disks using UV imprint method. It is the figure which looked at position shift amount detection means 15 grade from the Z-axis direction. It is the figure which looked at position shift amount detection means 15 grade from the X-axis direction. It is a figure which shows the state in which the diagonal fine pattern was formed in the to-be-molded product W. FIG. It is a figure which shows the outline | summary about the transfer process of the fine pattern for photonic crystals. It is a figure which shows the case where a fine pattern is formed in the to-be-molded product W cyclically | annularly. It is sectional drawing which shows the modification of the type | mold holding body provided in the transfer apparatus 1a. It is a figure which shows the example which aligns the conventional type | mold and a board | substrate.

Explanation of symbols

1, 1a Transfer device 3 Base frame 5 Molded product holder 7 XY stage 9 Mold holder 15 Position shift amount detection means 27 Moving member 29 Cross roller bearing 45 Rotating scale body 57 Ultraviolet generator 101 Control device 105 Image processing unit 111 θ axis rotation drive motor 115 rotation scale

Claims (3)

In a transfer device for transferring a fine transfer pattern formed on a mold to a molded product,
A molded product holder for holding the molded product;
The mold is held and relatively moved in a direction approaching / separating from the molding object holding body, and an axis extending in the approaching / separating direction is set as a rotation center to the molding object holding body. A mold holder which is relatively rotatable relative to the mold;
A positional deviation amount detecting means for detecting a rotational positional deviation amount of the mold with respect to the workpiece;
The molded article holder is configured to be movable and positionable relative to the mold holder in a direction orthogonal to the approaching / separating direction,
The positional deviation amount detecting means is means for detecting the positional deviation amount in the orthogonal direction with respect to the molded product of the mold,
Based on the rotational displacement amount detected by the displacement amount detection means, the mold holder is relatively rotated so as to eliminate this rotational displacement amount, and after this rotation, the mold carrier is held by the molded product. Control means for moving to the body side and performing the transfer,
The control means relatively moves the workpiece holder in the orthogonal direction so as to eliminate the orthogonal positional deviation amount based on the orthogonal positional deviation amount detected by the positional deviation amount detection means. Moving, and after this movement, the mold holder is moved to the molded article holder, and the transfer is controlled.
A base frame, and a moving member provided movably on the base frame;
Since the mold holder is supported by the moving member via a bearing, the mold holder moves in a direction approaching / separating from the molded article holder, and the approach / It is designed to rotate relative to the molded article holder with an axis extending in a direction away from the rotation center,
Detecting the amount of misalignment in the orthogonal direction and the amount of misalignment in the rotational direction between the molded product to be molded and the mold, and correcting each misalignment between the product to be molded and the mold, and The mold is set to an arbitrary rotation angle and molded again, or the mold holder is moved relative to the molded article holder in the orthogonal direction and rotated to position it relative to the mold holder. Perform a group of transfer, detect and correct the amount of deviation between the molded product and the mold, and move and rotate the mold holder relative to the molded product holder. A transfer apparatus characterized by relatively positioning, transferring a second group by the mold, transferring a fine transfer pattern in an annular shape, and transferring it to the product to be molded . The transfer device according to claim 1 ,
A through hole extending along the rotation center axis is provided in the mold holder,
Wherein either ultraviolet generating device is provided in the through hole, or ultraviolet rays through the through hole transfer apparatus characterized that you have been configured to be irradiated to the molded article. Using a transfer device according to claim 1 or claim 2, a fine transfer pattern formed on the mold, transfer method characterized by transferring onto the molded article.

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