JP5468158B2 - Semiconductor light emitting device and manufacturing method thereof - Google Patents

Description

  Embodiments described herein relate generally to a semiconductor light emitting device and a method for manufacturing the same.

  In a semiconductor light emitting element such as an LED (Light Emitting Diode), an improvement in efficiency is desired. In order to improve the efficiency, it is important to improve the extraction efficiency of light emitted from the light emitting layer of the semiconductor light emitting device.

For example, a semiconductor light emitting device includes a transparent electrode that is in ohmic contact with the surface of the contact layer and covers almost the entire surface of the contact layer, and a metal reflective film disposed so as to face almost the entire region of the transparent electrode. There is a configuration.
There is room for improvement in improving the light extraction efficiency.

International Publication No. WO2006 / 006555A1 Pamphlet

  Embodiments of the present invention provide a highly efficient semiconductor light emitting device and a method for manufacturing the same.

  According to the embodiment of the present invention, there is provided a semiconductor light emitting device including a laminated structure, a first electrode, a second electrode, a high resistance layer, and a transparent conductive layer. The stacked structure includes a first semiconductor layer of a first conductivity type, a second semiconductor layer of a second conductivity type, a light emitting layer provided between the first semiconductor layer and the second semiconductor layer, including. The first electrode is provided on a side of the first semiconductor layer opposite to the second semiconductor layer. The second electrode is provided on a side of the second semiconductor layer opposite to the first semiconductor layer, and has a reflectivity with respect to light emitted from the light emitting layer. The high resistance layer is in contact with the second semiconductor layer between the second semiconductor layer and the second electrode, and when viewed along a first direction from the first semiconductor layer toward the second semiconductor layer. Silicon oxide having a portion overlapping the first electrode and having a resistance higher than that of the second semiconductor layer. The transparent conductive layer is in contact with the second semiconductor layer between the second semiconductor layer and the second electrode, has transparency to the emitted light, and has a refractive index higher than that of the second semiconductor layer. 50 nm or more including an oxide having a low refractive index, having a resistance lower than that of the high resistance layer, and including at least one element selected from the group consisting of In, Sn, Zn, and Ti Is the thickness. A part of the transparent conductive layer extends between the high resistance layer and the second electrode. When viewed along the first direction, the second electrode has a portion outside the high resistance layer. The emitted light is extracted from the surface of the first semiconductor layer opposite to the second semiconductor layer. The distance between the surface of the second electrode facing the first electrode on the first electrode side and the second semiconductor layer is the distance of the portion of the second electrode not facing the first electrode. It is longer than the distance between the surface on the first electrode side and the second semiconductor layer.

  According to an embodiment of the present invention, a method for manufacturing a semiconductor light emitting device is provided. The manufacturing method includes: a first semiconductor layer of a first conductivity type; a second semiconductor layer of a second conductivity type; and a light emitting layer provided between the first semiconductor layer and the second semiconductor layer. Forming a high-resistance layer of silicon oxide having a resistance higher than that of the second semiconductor layer on a part of a surface of the stacked structure including the second semiconductor layer opposite to the light emitting layer; Including doing. In the manufacturing method, after the formation of the high resistance layer, the surface of the second semiconductor layer that is not provided with the high resistance layer on the side opposite to the light emitting layer and the high resistance layer Further, the light-transmitting light emitted from the light-emitting layer is transmissive, has a refractive index lower than that of the second semiconductor layer, and has a resistance lower than that of the high-resistance layer. Including an oxide containing at least one element selected from the group consisting of In, Sn, Zn, and Ti, and forming a transparent conductive layer having a thickness of 50 nanometers or more. The manufacturing method has a high reflectivity when viewed along a first direction from the first semiconductor layer toward the second semiconductor layer, having reflectivity with respect to the emitted light on the transparent conductive layer. It further includes forming a second electrode having a portion outside the layer. The manufacturing method forms a first electrode having a portion overlapping the high resistance layer when viewed along the first direction on a surface of the first semiconductor layer opposite to the light emitting layer. In addition. The emitted light is extracted from the surface of the first semiconductor layer opposite to the second semiconductor layer. The transparent conductive layer is formed by setting the distance between the surface of the second electrode facing the first electrode and the surface of the first electrode, and the second semiconductor layer, and the second electrode. Forming the transparent conductive layer so as to be longer than the distance between the surface of the first electrode side of the portion not facing one electrode and the second semiconductor layer.

FIG. 1A and FIG. 1B are schematic views showing a semiconductor light emitting device according to an embodiment. FIG. 2A to FIG. 2C are schematic cross-sectional views illustrating a part of the semiconductor light emitting device according to the embodiment. 3A and 3B are schematic cross-sectional views showing the operation of the semiconductor light emitting device. It is a graph which shows the optical characteristic of a semiconductor light-emitting device. 5A and 5B are schematic cross-sectional views showing the operation of the semiconductor light emitting device. FIG. 6A to FIG. 6C are schematic cross-sectional views in order of steps showing the method for manufacturing the semiconductor light emitting element according to the embodiment. FIG. 7A to FIG. 7C are schematic cross-sectional views in order of steps showing the method for manufacturing the semiconductor light emitting element according to the embodiment. FIG. 8A to FIG. 8C are schematic plan views showing other semiconductor light emitting elements according to the embodiment. FIG. 9A and FIG. 9B are schematic cross-sectional views showing other semiconductor light emitting devices according to the embodiment. It is a flowchart figure which shows the manufacturing method of the semiconductor light-emitting device concerning embodiment. It is a flowchart figure which shows the manufacturing method of the semiconductor light-emitting device concerning embodiment. It is a flowchart figure which shows the manufacturing method of another semiconductor light-emitting device based on embodiment.

Embodiments of the present invention will be described below with reference to the drawings.
The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the size ratio between the parts, and the like are not necessarily the same as actual ones. Further, even when the same part is represented, the dimensions and ratios may be represented differently depending on the drawings.
Note that, in the present specification and each drawing, the same elements as those described above with reference to the previous drawings are denoted by the same reference numerals, and detailed description thereof is omitted as appropriate.

(First embodiment)
FIG. 1A and FIG. 1B are schematic views illustrating the configuration of the semiconductor light emitting device according to the first embodiment.
1B is a schematic plan view, and FIG. 1A is a cross-sectional view taken along line A1-A2 of FIG. 1B.
As illustrated in FIGS. 1A and 1B, the semiconductor light emitting device 110 according to the embodiment includes a stacked structure 10 s, a first electrode 70, a second electrode 80, a high resistance layer 60, and the like. Transparent conductive layer 50.

  The laminated structure 10 s includes a first conductivity type first semiconductor layer 10, a second conductivity type second semiconductor layer 20, and a light emitting layer provided between the first semiconductor layer 10 and the second semiconductor layer 20. 30.

The first semiconductor layer 10, the second semiconductor layer 20, and the light emitting layer 30 include, for example, a nitride semiconductor.
For example, the first conductivity type is n-type and the second conductivity type is p-type. However, the embodiment is not limited to this, and the first conductivity type may be p-type and the second conductivity type may be n-type. In the following description, it is assumed that the first conductivity type is n-type and the second conductivity type is p-type.

  Here, a direction from the first semiconductor layer 10 toward the second semiconductor layer 20 is defined as a Z-axis direction (first direction). One direction perpendicular to the Z-axis direction is taken as an X-axis direction (second direction). A direction perpendicular to the Z-axis direction and perpendicular to the X-axis direction is defined as a Y-axis direction (third direction).

Thus, the 1st semiconductor layer 10, the light emitting layer 30, and the 2nd semiconductor layer 20 are laminated | stacked along the Z-axis direction. Here, in the specification of the present application, “stacking” includes not only the case of being stacked in contact with each other but also the case of being stacked with another layer inserted therebetween.
An example of the configuration of the light emitting layer 30 will be described later.

  The first electrode 70 is provided on the side of the first semiconductor layer 10 opposite to the second semiconductor layer 20. The first electrode 70 is in contact with the first semiconductor layer 10. However, the first electrode 70 only needs to be electrically connected to the first semiconductor layer 10.

  The second electrode 80 is provided on the opposite side of the second semiconductor layer 20 from the first semiconductor layer 10. The second electrode 80 is reflective to the emitted light emitted from the light emitting layer 30. The second electrode 80 is electrically connected to the second semiconductor layer 20 through at least the transparent conductive layer 50.

  The high resistance layer 60 is in contact with the second semiconductor layer 20 between the second semiconductor layer 20 and the second electrode 80. The high resistance layer 60 has a portion overlapping the first electrode 70 when viewed along the Z-axis direction from the first semiconductor layer 10 toward the second electrode 80. The high resistance layer 60 has a resistance higher than that of the second semiconductor layer 20. For example, an insulating material is used for the high resistance layer 60. For example, silicon oxide is used for the high resistance layer 60.

  In this specific example, the planar shape of the first electrode 70 (when viewed along the Z-axis direction) is a rectangle (for example, a rectangle), and the planar shape of the high resistance layer 60 (when viewed along the Z-axis direction). The shape) is a rectangle (for example, a rectangle), but the embodiment is not limited thereto. The first electrode 70 and the high resistance layer 60 may have an arbitrary polygonal shape or an arbitrary back surface shape including a curved outer shape including a flat circle and a circle.

  The transparent conductive layer 50 is in contact with the second semiconductor layer 20 between the second semiconductor layer 20 and the second electrode 80. For example, the transparent conductive layer 50 is juxtaposed with the high resistance layer 60 in a plane (XY plane) perpendicular to the Z-axis direction. The transparent conductive layer 50 is transmissive to the emitted light and has a refractive index lower than that of the second semiconductor layer 20. The transparent conductive layer 50 has a resistance lower than that of the high resistance layer 60.

  The transparent conductive layer 50 includes, for example, an oxide containing at least one element selected from the group consisting of In, Sn, Zn, and Ti. For the transparent conductive layer 50, for example, ITO (Indium Tin Oxide) is used. The refractive index of the transparent conductive layer 50 is, for example, 1.80 or more and 2.20 or less. On the other hand, for example, a GaN layer is used for the second semiconductor layer 20. The refractive index of the second semiconductor layer 20 is, for example, 2.15 or more and 2.70 or less.

  In this specific example, the semiconductor light emitting device 110 is provided between the conductive substrate 93 provided on the opposite side of the second electrode 80 from the second semiconductor layer 20, and between the conductive substrate 93 and the second electrode 80. The first conductive layer 91 and the second conductive layer 92 provided between the conductive substrate 93 and the first conductive layer 91 are further provided. The conductive substrate 93 is electrically connected to the second electrode 80. As the conductive substrate 93, for example, a silicon substrate or the like is used. The first conductive layer 91 and the second conductive layer 92 have a function of bonding the second electrode 80 and the conductive substrate 93, for example. Various metal layers are used for the first conductive layer 91 and the second conductive layer 92.

  As described above, the semiconductor light emitting device 110 includes the conductive substrate 93 and the conductive layers (the first conductive layer 91 and the second conductive layer 92) provided between the second electrode 80 and the conductive substrate 93. Furthermore, it can be provided.

  By providing the conductive substrate 93, heat generated during operation of the laminated structure 10s can be efficiently transmitted to the conductive substrate 93 and efficiently radiated. Thereby, the luminous efficiency in the light emitting layer 30 can be improved.

  The light emitting layer 30 has a single quantum well (SQW) structure or a multiple quantum well (MQW) structure.

FIG. 2A to FIG. 2C are schematic cross-sectional views illustrating the configuration of part of the semiconductor light emitting element according to the first embodiment.
That is, these drawings are schematic diagrams illustrating examples of the configuration of the light emitting layer 30.

  As shown in FIG. 2A, in the semiconductor light emitting device 110a according to this embodiment, the light emitting layer 30 has an SQW structure. That is, the light emitting layer 30 includes a first barrier layer BL1, a p-side barrier layer BLp, and a first well layer WL1 provided between the first barrier layer BL1 and the p-side barrier layer BLp.

  In addition, another layer may be provided between the first barrier layer BL1 and the first well layer WL1, and between the first well layer WL1 and the p-side barrier layer BLp.

  As shown in FIG. 2B, in the semiconductor light emitting device 110b according to this embodiment, the light emitting layer 30 has an MQW structure. That is, the light emitting layer 30 includes a plurality of barrier layers (first to fourth barrier layers BL1 to BL4 and p-side barrier layer BLp) stacked along the Z-axis direction and each of the plurality of barrier layers. Well layers (first to fourth well layers WL1 to WL4) provided therebetween. In this specific example, four well layers are provided, but the number of well layers is arbitrary.

  As described above, the light emitting layer 30 includes an Nth barrier layer provided on the opposite side of the (N-1) th well layer WL from the (N-1) th barrier layer in an integer N of 2 or more, And an Nth well layer provided on the opposite side of the N barrier layer from the (N-1) th well layer.

  As shown in FIG. 2C, in the semiconductor light emitting device 110c according to the present embodiment, the light emitting layer 30 further includes an intermediate layer provided between the barrier layer and the well layer. That is, the light emitting layer 30 includes the first intermediate layer IL1 provided between the (N-1) th barrier layer and the (N-1) th well layer, the (N-1) th well layer, and the Nth barrier. And a second intermediate layer IL2 provided between the layers. Further, the second intermediate layer IL2 is provided between the Nth well layer and the p-side barrier layer BLp. The first intermediate layer IL1 and the second intermediate layer IL2 are provided as necessary and can be omitted. Further, the first intermediate layer IL1 may be provided and the second intermediate layer IL2 may be omitted. Further, the second intermediate layer IL2 may be provided and the first intermediate layer IL1 may be omitted.

For example, In _x1 Al _y1 Ga _1-x1-y1 N (0 ≦ x1 <1, 0 ≦ y1 <1, x1 + y1) may be used for the barrier layers (for example, the first to fourth barrier layers BL1 to BL4 and the Nth barrier layer). <1) can be used. For example, In _0.02 Al _0.33 Ga _0.65 N can be used for the barrier layer. The thickness of the barrier layer can be set to 12.5 nm, for example.

For example, In _x2 Al _y2 Ga _1-x2-y2 N (0 ≦ x2 <1, 0 ≦ y2 <1, x2 + y2 ≦ 1) can be used for the p-side barrier layer BLp. For example, In _0.02 Al _0.33 Ga _0.65 N can be used for the p-side barrier layer BLp. The thickness of the barrier layer can be set to 12.5 nm, for example.

For example, In _x3 Al _y3 Ga _1-x3-y3 N (0 <x3 ≦ 1, 0 ≦ y3 <1, x3 + y3 ≦ 1) ) Can be used. For example, In _0.15 Ga _0.85 N can be used for the well layer. The thickness of the well layer can be set to 2.5 nm, for example.

  The composition ratio of In contained in the well layer (ratio of the number of In atoms in the group III element) is determined by the barrier layers (first to fourth barrier layers BL1 to BL4, Nth barrier layer, and p-side barrier layer BLp). ) In the composition ratio of In (the ratio of the number of In atoms in the group III element). Thereby, the band gap energy in the barrier layer can be made larger than the band gap energy in the well layer.

For example, In _x4 Ga _1-x4 N (0 ≦ x4 <1) can be used for the first intermediate layer IL1. For example, In _0.02 Ga _0.98 N can be used for the first intermediate layer IL1. The thickness of the first intermediate layer IL1 can be set to 0.5 nm, for example.

For example, In _x5 Ga _1-x5 N (0 ≦ x5 <1) can be used for the second intermediate layer IL2. For example, In _0.02 Ga _0.98 N can be used for the second intermediate layer IL2. The thickness of the second intermediate layer IL2 can be set to 0.5 nm, for example.

  The composition ratio of In contained in the well layer (ratio of the number of In atoms in the group III element) is the composition ratio of In contained in the first intermediate layer IL1 and the second intermediate layer IL2 (in the group III element). Higher than the ratio of the number of In atoms). Thereby, the band gap energy in the first intermediate layer IL1 and the second intermediate layer IL2 can be made larger than the band gap energy in the well layer.

  The first intermediate layer IL1 can also be regarded as a part of the barrier layer. The second intermediate layer IL2 can also be regarded as a part of the barrier layer. That is, the barrier layer stacked with the well layer may include a plurality of layers having different compositions.

  In the SQW structure illustrated in FIG. 2A, the first intermediate layer IL1 and the second intermediate layer IL2 may be provided. In this case, the first intermediate layer IL1 is provided between the first barrier layer BL1 and the first well layer WL1, and the second intermediate layer IL2 is formed between the first well layer WL1 and the p-side barrier layer BLp. Between.

The above is an example of the configuration of the light emitting layer 30, and the embodiment is not limited thereto, and the materials and thicknesses used for the barrier layer, the p-side barrier layer BLp, the well layer, the first intermediate layer IL1, and the second intermediate layer IL2. Various modifications are possible. As described above, the barrier layer, the p-side barrier layer BLp, the well layer, the first intermediate layer IL1, and the second intermediate layer IL2 include a nitride semiconductor.
The semiconductor light emitting device 110 can have the light emitting layer 30 having various configurations described with respect to the semiconductor light emitting devices 110a to 110c.

  FIG. 3A and FIG. 3B are schematic cross-sectional views illustrating the operation of the semiconductor light emitting element. 3A illustrates the optical operation in the semiconductor light emitting device 110 according to the embodiment, and FIG. 3B illustrates the optical operation in the semiconductor light emitting device 119a of the first reference example. ing.

  As shown in FIG. 3B, in the semiconductor light emitting device 119a of the first reference example, the transparent conductive layer 50 is not provided. In this case, a part of the light L5 emitted from the light emitting layer 30 (light traveling toward the second electrode 80) is reflected at the interface 53 between the second semiconductor layer 20 and the second electrode 80. The light L6 is extracted outside the semiconductor light emitting device 119a.

  On the other hand, as illustrated in FIG. 3A, a part of the light L1 emitted from the light emitting layer 30 is reflected at the interface 51 between the second semiconductor layer 20 and the transparent conductive layer 50, The light L2 is extracted outside the semiconductor light emitting device 110. Furthermore, another part of the emitted light L3 is reflected at the interface 52 between the transparent conductive layer 50 and the second electrode 80, and is taken out of the semiconductor light emitting device 110 as light L4.

  Thus, in the semiconductor light emitting device 119a of the first reference example, the emitted light is reflected at one interface of the interface 53 between the second semiconductor layer 20 and the second electrode 80, whereas in the present embodiment. In the semiconductor light emitting device 110, the emitted light is reflected at two interfaces, that is, the interface 51 between the second semiconductor layer 20 and the transparent conductive layer 50 and the interface 52 between the transparent conductive layer 50 and the second electrode 80. Thus, the light extraction efficiency is higher than that of the semiconductor light emitting device 119a.

FIG. 4 is a graph illustrating the optical characteristics of the semiconductor light emitting device.
That is, the figure shows the optical characteristics of the two-layer laminated film 119s1 and 119s2 having a metal layer and a first transparent layer laminated on the metal layer, the metal layer, the first transparent layer, the metal layer, and the first layer. The simulation result of the optical characteristic of 3 layer laminated film 110s1 and 110s2 which are provided between the transparent layers and which has a 2nd transparent layer which has a refractive index lower than the refractive index of a 1st transparent layer is illustrated. In this simulation, the refractive index of the first transparent layer was 1.78, and the refractive index of the second transparent layer was 1.46. In the two-layer laminated film 119s1 and the three-layer laminated film 110s1, it is assumed that gold (Au) is used as the metal layer. In the two-layer laminated film 119s2 and the three-layer laminated film 110s2, silver (Ag) is used as the metal layer. Was used. The wavelength of the emitted light was 450 nanometers (nm).
The horizontal axis in the figure is the incident angle θ (degrees) of light to the two-layer laminated film or the three-layer laminated film, and the vertical axis is the reflectance Rr.

  The two-layer stacked films 119s1 and 119s2 correspond to the semiconductor light emitting element 119a of the first reference example, and the three-layer stacked films 110s1 and 110s2 correspond to the semiconductor light emitting element 110 according to the embodiment.

  As shown in FIG. 4, when the metal layer is Au, in the two-layer laminated film 119 s 1, the reflectance Rr when the incident angle θ is 0 degree is about 0.3, and the incident angle θ increases. The reflectance Rr gradually increases. When the metal layer is Au, the reflectivity Rr when the incident angle θ is 0 degree is almost the same as that of the two-layer laminated film 119s1 in the three-layer laminated film 110s1, but when the incident angle θ is 50 degrees or more. The reflectance Rr increases rapidly and becomes approximately 1. Thus, in the three-layer laminated film 110s1, the reflectance Rr is remarkably improved as compared with the two-layer laminated film 119s1 when the incident angle θ is 50 degrees or more.

  As shown in FIG. 4, even when the metal layer is Ag, the reflectance Rr is improved in the three-layer laminated film 110s1 as compared with the two-layer laminated film 119s1 when the incident angle θ is 50 degrees or more. .

  Thus, the reason why the reflectance Rr is improved in the three-layer laminated film 110s1 as compared with the two-layer laminated film 119s1 is that the total reflection phenomenon occurs due to the difference in refractive index between the first transparent layer and the second transparent layer. It is.

  This phenomenon is used in the semiconductor light emitting device 110 according to the present embodiment. That is, in addition to the reflection at the interface 52 between the transparent conductive layer 50 and the second electrode 80, for example, the reflection due to the total reflection at the interface 51 between the second semiconductor layer 20 and the transparent conductive layer 50 is used, thereby increasing the light extraction efficiency. Is obtained.

  5A and 5B are schematic cross-sectional views illustrating the operation of the semiconductor light emitting element. That is, FIG. 5A illustrates an electrical operation in the semiconductor light emitting device 110 according to the embodiment, and FIG. 5B illustrates an electrical operation in the semiconductor light emitting device 119b of the second reference example. ing.

  As shown in FIG. 5B, in the semiconductor light emitting device 119b of the second reference example, the transparent conductive layer 50 is provided between the second electrode 80 and the second semiconductor layer 20, and the high resistance layer 60 and the second semiconductor layer 119b. 2 between the semiconductor layers 20. In the semiconductor light emitting device 119b, the current Ic flowing from the second electrode 80 toward the first semiconductor layer 10 spreads in the lateral direction (direction perpendicular to the Z-axis direction) in the transparent conductive layer 50. For this reason, the current Ic also flows in a region where the high resistance layer 60 and the first electrode 70 face each other. Therefore, in the light emitting layer 30, the light emitting region 38 that emits light by the current Ic overlaps the region where the high resistance layer 60 and the first electrode 70 face each other. The light emitted in the region where the high resistance layer 60 and the first electrode 70 are opposed to each other is blocked by the first electrode 70 and therefore is not directly extracted outside. For this reason, in the semiconductor light emitting device 119b of the second reference example, the light extraction efficiency is low.

  On the other hand, as shown in FIG. 5A, in the semiconductor light emitting device 110 according to this embodiment, the current Ic does not substantially flow in the region where the high resistance layer 60 is provided. That is, the current Ic flows from the second electrode 80 toward the first semiconductor layer 10 without spreading in the lateral direction (direction perpendicular to the Z-axis direction). For this reason, the light emitting region 38 that emits light by the current Ic does not substantially overlap the region where the high resistance layer 60 and the first electrode 70 face each other. In other words, in the region where the high resistance layer 60 and the first electrode 70 face each other and are shielded by the first electrode 70, a configuration that does not substantially emit light can be realized. For this reason, in the semiconductor light emitting device 110, the light extraction efficiency is high.

  In the second reference example, since the transparent conductive layer 50 is provided, the reflection at the interface 52 between the transparent conductive layer 50 and the second electrode 80 and the reflection at the interface 51 between the second semiconductor layer 20 and the transparent conductive layer 50 Therefore, optical extraction efficiency higher than that of the first reference example may be obtained optically. However, in the second reference example, since the transparent conductive layer 50 is also provided between the high resistance layer 60 and the second semiconductor layer 20, the current Ic spreads in the lateral direction and is shielded by the first electrode 70. Light is lost because light is emitted in the region where the light is emitted.

  On the other hand, in the semiconductor light emitting device 110 according to the present embodiment, the reflection at the interface 52 between the transparent conductive layer 50 and the second electrode 80 and the reflection at the interface 51 between the second semiconductor layer 20 and the transparent conductive layer 50 Can be used, so that optically high light extraction efficiency can be obtained, and at the same time, the high resistance layer 60 is in contact with the second semiconductor layer 20, and the transparent conductive layer 50 is juxtaposed with the high resistance layer 60, so that the current Ic Does not spread, and light emission in a region shielded by the first electrode 70 is suppressed. Thereby, it is possible to provide a semiconductor light emitting device that suppresses light loss and has high light extraction efficiency. That is, a highly efficient semiconductor light emitting device can be provided by the reflection at the interface of the transparent conductive layer 50 and the control of the current Ic by the high resistance layer 60.

  In the embodiment, it is desirable that the thickness of the high resistance layer 60 be 50 nanometers (nm) or more and 200 nm or less. When the thickness of the high resistance layer 60 is less than 50 nm, the blocking property of the current Ic by the high resistance layer 60 may be reduced, and the controllability of the current Ic may be reduced. When the thickness of the high resistance layer 60 is thicker than 200 nm, the flatness of the second electrode 80 is deteriorated, and the adhesion between the first conductive layer 91 and the second conductive layer 92 described later may be lowered. However, the embodiment is not limited to this, and the thickness of the high resistance layer 60 is arbitrary.

Hereinafter, an example of a method for manufacturing the semiconductor light emitting device 110 will be described.
FIG. 6A to FIG. 6C are schematic cross-sectional views in order of the processes, illustrating the method for manufacturing the semiconductor light emitting element according to the first embodiment.
FIG. 7A to FIG. 7C are schematic cross-sectional views in order of the processes, illustrating the method for manufacturing the semiconductor light emitting element according to the first embodiment.
In the following manufacturing method, for example, metal organic chemical vapor deposition (MOCVD) is used for crystal growth of a semiconductor layer. In addition, crystal growth may be performed by molecular beam epitaxy (MBE).

As shown in FIG. 6A, the buffer layer 6 is formed on the main surface of the substrate 5 such as sapphire. Various materials such as GaN, SiC, Si, and GaAs can be used for the substrate 5 in addition to sapphire. For the buffer layer 6, for example, an Al _x0 Ga _1-x0 N (0 ≦ x0 ≦ 1) layer is used. A crystal of the first semiconductor layer 10 is grown on the buffer layer 6. For example, an n-type GaN layer is used for the first semiconductor layer 10. A crystal of the light emitting layer 30 is grown on the first semiconductor layer 10. Various configurations described with reference to FIGS. 2A to 2C are applied to the light emitting layer 30. A crystal of the second semiconductor layer 20 is grown on the light emitting layer 30. For example, a p-type GaN layer is used for the second semiconductor layer 20.

  For example, an ITO film is formed on the second semiconductor layer 20, and the ITO film is processed into a predetermined shape to form the transparent conductive layer 50. For this processing, for example, wet etching is used. An insulating film 60 f to be the high resistance layer 60 is formed on the transparent conductive layer 50 and on the second semiconductor layer 20 exposed from the transparent conductive layer 50. For example, silicon oxide is used for the insulating film 60f. For example, CVD (Chemical Vapor Deposition) is used to form the insulating film 60f.

  As shown in FIG. 6B, the insulating film 60f is polished and flattened, and the surface of the transparent conductive layer 50 is exposed. Thereby, the high resistance layer 60 is formed.

  As shown in FIG. 6C, the second electrode 80 is formed on the high resistance layer 60 and the transparent conductive layer 50. An Ag layer is used as the second electrode 80. In this specific example, the second electrode 80 further includes a Ni layer provided on the Ag layer. That is, the second electrode 80 includes the first metal layer 81 (for example, the Ni layer), between the first metal layer 81 and the high resistance layer 60, and between the first metal layer 81 and the transparent conductive layer 50. And a second metal layer 82 (silver layer) that is higher in reflectance than the first metal layer 81. The first metal layer 81 functions as, for example, a barrier metal layer, and for example, nickel or the like is used.

  Further, the first conductive layer 91 is formed on the second electrode 80. Specifically, the third metal layer 91c is formed on the second electrode 80, the fourth metal layer 91d is formed on the third metal layer 91c, and the fifth metal layer is formed on the fourth metal layer 91d. 91e is formed. For example, a Ti layer is used for the third metal layer 91c, a Pt layer is used for the fourth metal layer 91d, and an Au layer is used for the fifth metal layer 91e.

  As shown in FIG. 7A, the second conductive layer 92 provided on the main surface of the conductive substrate 93 and the first conductive layer 91 are disposed to face each other. As the second conductive layer 92, a layer containing Au and Sn is used. In a state where the second conductive layer 92 and the first conductive layer 91 are in contact with each other, a pressure is applied for a predetermined time at a high temperature of, for example, 250 ° C.

  Thereby, as shown in FIG. 7B, the first conductive layer 91 and the second conductive layer 92 are bonded to each other.

Then, an ultraviolet laser (for example, a laser having a KrF wavelength of 248 nm) is pulsed from the side of the substrate 5 opposite to the first semiconductor layer 10.
Thereby, as illustrated in FIG. 7B, the laminated structure 10 s is peeled from the substrate 5. Thus, by removing the substrate 5 used when forming the laminated structure 10s, in the semiconductor light emitting device 110, heat dissipation can be improved and high light emission efficiency can be obtained.

  Thereafter, the laminated structure 10s is processed into a predetermined shape. That is, a plurality of laminated structures 10s are formed on the substrate 5, and are separated for each of the plurality of laminated structures 10s. At this time, the first metal layer 81 is exposed between the separated laminated structures 10s. In the stacked structure 10s, for example, the area of the stacked structure 10s in the XY plane increases from the first semiconductor layer 10 toward the second semiconductor layer 20. That is, a tapered mesa shape in which the sidewall of the laminated structure 10s is inclined with respect to the Z-axis direction is formed.

  A silicon oxide film (not shown) is formed as a protective layer so as to cover the laminated structure 10 s and the first metal layer 81. Since the laminated structure 10s has a mesa shape, the coverage of the protective layer is improved. The protective layer is provided as necessary, and may be omitted depending on circumstances.

  A part of the protective layer covering the upper surface of the first semiconductor layer 10 (the surface opposite to the second semiconductor layer 20) is removed, and the first semiconductor layer 10 is exposed. For example, the first semiconductor layer 10 is etched for 15 minutes using potassium hydroxide having a concentration of 1 mol / liter (mol / l) and a temperature of 70 ° C. Thereby, the upper surface of the first semiconductor layer 10 is roughened. The roughening of the first semiconductor layer 10 is performed as necessary, and may be omitted in some cases.

  As shown in FIG. 7C, the first electrode 70 is formed on the first semiconductor layer 10 (on the side opposite to the second semiconductor layer 20). That is, a conductive film that becomes the first electrode 70 is formed on the first semiconductor layer 10, and this conductive film is viewed along the Z-axis direction from the first semiconductor layer 10 toward the second semiconductor layer 20. Processing is performed so as to have a portion overlapping the high resistance layer 60.

  Note that the order of forming the first electrode 70 and roughening the first semiconductor layer 10 may be interchanged. For the first electrode 70, for example, a material containing any one selected from the group consisting of Pt, Au, Ni, and Ti can be used. However, in the embodiment, any conductive material can be used for the first electrode 70.

  Through the steps as described above, the semiconductor light emitting device 110 illustrated in FIGS. 1A and 1B can be manufactured.

  As shown in FIG. 1B, in the semiconductor light emitting device 110, the outer edge 70p when viewed along the Z-axis direction of the first electrode 70 is as viewed along the Z-axis direction of the high resistance layer 60. It is located inside the outer edge 60p. Thereby, it is suppressed that the electric current Ic is supplied into the area | region covered with the 1st electrode 70 among the light emitting layers 30, and efficiency improves easily.

  The area of the high resistance layer 60 is smaller than the area of the transparent conductive layer 50. That is, the high resistance layer 60 only needs to be controlled so that the current Ic is not supplied to the region corresponding to the first electrode 70 in the second semiconductor layer 20. By making the area of the high resistance layer 60 smaller than the area of the transparent conductive layer 50, the area to which the current Ic is applied can be increased, that is, the light emitting region 38 can be set large. Thereby, efficiency can be improved more.

  In the semiconductor light emitting device 110, the distance between the second semiconductor layer 20 and the surface 80 a on the first electrode 70 side of the portion of the second electrode 80 facing the first electrode 70 is the first electrode 70. The distance between the second semiconductor layer 20 and the surface 80b on the side of the first electrode 70 that does not face the electrode is the same.

  That is, in this specific example, the distance between the surface 60a on the second electrode 80 side of the high resistance layer 60 and the second semiconductor layer 20 is the same as the surface 50a on the second electrode 80 side of the transparent conductive layer 50 and the second semiconductor. It is the same as the distance to the layer 20. The surface 60a on the second electrode 80 side of the high resistance layer 60 and the surface 50a on the second electrode 80 side of the transparent conductive layer 50 are located in the same plane. The surface 60a and the surface 50a are flat.

  Accordingly, the surface of the second electrode 80 on the side opposite to the second semiconductor layer 20 can be easily flattened, and the adhesion between the first conductive layer 91 on the second electrode 80 and the second conductive layer 92 is more stable. Can be implemented.

FIG. 8A to FIG. 8C are schematic plan views illustrating the configuration of another semiconductor light emitting element according to the first embodiment.
As shown in FIG. 8A, in the semiconductor light emitting device 111a according to the embodiment, the position of the outer edge 70p in the XY plane when viewed along the Z-axis direction of the first electrode 70 is the high resistance layer. 60 substantially coincides with the position of the outer edge 60p in the XY plane when viewed along the Z-axis direction.

  As shown in FIG. 8B, in the semiconductor light emitting device 111b according to the embodiment, the position of the outer edge 70p in the XY plane when viewed along the Z-axis direction of the first electrode 70 is the high resistance layer. This is different from the position of the outer edge 60p in the XY plane when viewed along the Z-axis direction of 60. However, also in this case, the high resistance layer 60 has a portion that overlaps the first electrode 70 when viewed along the Z-axis direction.

  As shown in FIG. 8C, in the semiconductor light emitting device 111c according to the embodiment, the position of the outer edge 70p along the Y-axis direction when viewed along the Z-axis direction of the first electrode 70 is high resistance. The position of the outer edge 60p when viewed along the Z-axis direction of the layer 60 substantially coincides with the position along the Y-axis direction. The position along the X-axis direction of the outer edge 70p when viewed along the Z-axis direction of the first electrode 70 is along the X-axis direction of the outer edge 60p when viewed along the Z-axis direction of the high resistance layer 60. The position is different. Thus, one position of the outer edge 70p may coincide with the position of the outer edge 60p, and another position of the outer edge 70p may be different from the position of the outer edge 60p.

  8A to 8C, the first electrode 70 and the high resistance layer 60 have an arbitrary polygonal shape or an arbitrary back surface shape including a curved outer shape including a flat circle and a circle. Also in this case, the position of the outer edge 70p in the XY plane when viewed along the Z-axis direction of the first electrode 70 and the outer edge when viewed along the Z-axis direction of the high resistance layer 60 The position of the 60p in the XY plane can be variously modified.

FIG. 9A and FIG. 9B are schematic cross-sectional views illustrating the configuration of another semiconductor light emitting element according to the first embodiment.
As shown in FIG. 9A, in the semiconductor light emitting device 112 according to the embodiment, a part of the transparent conductive layer 50 extends between the high resistance layer 60 and the second electrode 80. As described above, each of the high resistance layer 60 and the transparent conductive layer 50 only needs to be in contact with the second semiconductor layer 20, and electrical connection between the second semiconductor layer 20 and the second electrode 80 can be obtained. The shape of the transparent conductive layer 50 is arbitrary.

  Also in the semiconductor light emitting device 112, the distance between the second semiconductor layer 20 and the surface 80 a on the first electrode 70 side of the portion facing the first electrode 70 of the second electrode 80 is the distance of the second electrode 80. The distance between the second semiconductor layer 20 and the surface 80b on the side of the first electrode 70 that does not face the first electrode is the same.

  As shown in FIG. 9B, in the semiconductor light emitting device 113 according to the embodiment, a part of the transparent conductive layer 50 extends between the high resistance layer 60 and the second electrode 80. In this case, the distance between the surface 80 a on the first electrode 70 side of the portion of the second electrode 80 facing the first electrode 70 and the second semiconductor layer 20 is the same as that of the second electrode 80. It is longer than the distance between the second semiconductor layer 20 and the surface 80b on the side of the first electrode 70 that does not face the electrode. That is, there is a step on the surface of the second electrode 80 on the first electrode 70 side (surface 80a and surface 80b). Also in this case, a highly efficient semiconductor light emitting device can be provided.

  However, when the surface of the second electrode 80 opposite to the second semiconductor layer 20 is flat, the adhesion between the first conductive layer 91 and the second conductive layer 92 can be more stably performed, More desirable.

(Second Embodiment)
The second embodiment is a method for manufacturing a semiconductor light emitting device.
FIG. 10 is a flowchart illustrating the method for manufacturing the semiconductor light emitting element according to the second embodiment.
As shown in FIG. 10, in the method for manufacturing a semiconductor light emitting device according to the embodiment, the first conductivity type first semiconductor layer 10, the second conductivity type second semiconductor layer 20, and the first semiconductor layer 10. And the light emitting layer 30 provided between the second semiconductor layer 20 and the second semiconductor layer 20 on the surface opposite to the light emitting layer 30 of the stacked structure 10s. A transparent conductive layer 50 is formed (step S110).
The high resistance layer 60 has a resistance higher than that of the second semiconductor layer 20. The transparent conductive layer 50 is transmissive to the emitted light emitted from the light emitting layer 30, has a refractive index lower than that of the second semiconductor layer 20, and is lower than the resistance of the high resistance layer 60. Has resistance.

  In this manufacturing method, the second electrode 80 having reflectivity for the emitted light emitted from the light emitting layer 30 is formed on the high resistance layer 60 and the transparent conductive layer 50 (step S120).

  In this manufacturing method, when the first semiconductor layer 10 has a high resistance when viewed along the Z-axis direction from the first semiconductor layer 10 toward the second semiconductor layer 20 on the surface of the first semiconductor layer 10 opposite to the light emitting layer 30. The first electrode 70 having a portion overlapping with the layer 60 is formed (step S130).

  That is, for example, the processing described with reference to FIGS. 6A to 6C and FIGS. 7A to 7C is performed. Thereby, reflection by the interface of the transparent conductive layer 50 and control of the current Ic by the high resistance layer 60 become possible, and a highly efficient semiconductor light emitting device can be manufactured.

FIG. 11A and FIG. 11B are flowcharts illustrating another method for manufacturing a semiconductor light emitting device according to the second embodiment.
In the method illustrated in FIGS. 11A and 11B, the high resistance layer 60 is formed after the transparent conductive layer 50 is formed.

  That is, as shown in FIG. 11A, the formation of the high resistance layer 60 and the transparent conductive layer 50 (step S <b> 110) is a part of the surface of the second semiconductor layer 20 on the side opposite to the light emitting layer 30. Forming a transparent conductive layer 50 thereon (step S111a).

  In step S110, after the formation of the transparent conductive layer 50, the high resistance layer 60 is formed on the surface of the second semiconductor layer 20 on the side opposite to the light emitting layer 30 where the transparent conductive layer 50 is not provided ( Step S112a) is further included. That is, the process described with reference to FIG.

  As shown in FIG. 11B, the formation of the high resistance layer (step S112a) is performed on the surface of the second semiconductor layer 20 on the side opposite to the light emitting layer 30 where the transparent conductive layer 50 is not provided. And forming a high resistance material film on the transparent conductive layer 50 (step S112b) and polishing the high resistance material film to expose the transparent conductive layer 50 (step S112c).

  In the above, any method can be used for forming the transparent conductive layer 50 and the high-resistance layer 60. After forming the film to be the transparent conductive layer 50 or the high resistance layer 60, the transparent conductive layer 50 or the high resistance layer 60 can be formed by photolithography and etching. Further, a lift-off method may be used.

FIG. 12 is a flowchart illustrating another method for manufacturing a semiconductor light emitting element according to the second embodiment.
As shown in FIG. 12, in the present manufacturing method, the formation of the high resistance layer 60 and the transparent conductive layer 50 (step S <b> 110) is performed on one surface of the second semiconductor layer 20 on the side opposite to the light emitting layer 30. Forming a high resistance layer 60 on the portion (step S112d).

  In step S110, after the formation of the high resistance layer 60, the transparent conductive layer 50 is formed on the surface of the second semiconductor layer 20 on the side opposite to the light emitting layer 30 where the high resistance layer 60 is not provided. (Step S111b).

  Thereby, for example, the semiconductor light emitting device 113 illustrated in FIG. 9B can be manufactured.

  As shown in FIG. 12, in the manufacturing method, step S110 may further include polishing and flattening the transparent conductive layer 50 (step S113). Thereby, the distance between the surface 80a on the first electrode 70 side of the portion of the second electrode 80 facing the first electrode 70 and the second semiconductor layer 20 is opposed to the first electrode of the second electrode 80. The distance between the surface 80b on the first electrode 70 side and the second semiconductor layer 20 in the portion not to be removed can be the same as the distance, and the adhesion between the first conductive layer 91 and the second conductive layer 92 is more stably performed. Can and is more desirable.

  According to the embodiment, a highly efficient semiconductor light emitting device and a manufacturing method thereof can be provided.

In this specification, “nitride semiconductor” means B _x In _y Al _z Ga _1-xyz N (0 ≦ x ≦ 1, 0 ≦ y ≦ 1, 0 ≦ z ≦ 1, x + y + z ≦ 1) Semiconductors having all compositions in which the composition ratios x, y, and z are changed within the respective ranges are included. Furthermore, in the above chemical formula, those further containing a group V element other than N (nitrogen), those further containing various elements added for controlling various physical properties such as conductivity type, and unintentionally Those further including various elements included are also included in the “nitride semiconductor”.

  In the present specification, “vertical” and “parallel” include not only strictly vertical and strictly parallel, but also include, for example, variations in the manufacturing process, and may be substantially vertical and substantially parallel. It ’s fine.

  The embodiments of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, regarding a specific configuration of each element such as a substrate, a buffer layer, a semiconductor layer, a barrier layer, a well layer, a stacked structure, an electrode, a high resistance layer, a transparent conductive layer, and a conductive layer included in a semiconductor light emitting device, It is included in the scope of the present invention as long as a person skilled in the art can carry out the present invention by selecting appropriately from the known ranges and obtain the same effect. For example, the composition and film thickness described in the above embodiment are examples, and various selections are possible.

  Moreover, what combined any two or more elements of each specific example in the technically possible range is also included in the scope of the present invention as long as the gist of the present invention is included.

  In addition, all semiconductor light-emitting devices and methods for manufacturing the same that can be implemented by those skilled in the art based on the semiconductor light-emitting devices and methods for manufacturing the same described above as embodiments of the present invention are also included in the gist of the present invention. As long as it is included, it belongs to the scope of the present invention.

  In addition, in the category of the idea of the present invention, those skilled in the art can conceive of various changes and modifications, and it is understood that these changes and modifications also belong to the scope of the present invention. .

  Although several embodiments of the present invention have been described, these embodiments are presented by way of example and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

  DESCRIPTION OF SYMBOLS 5 ... Board | substrate, 6 ... Buffer layer, 10 ... 1st semiconductor layer, 10s ... Laminated structure, 20 ... 2nd semiconductor layer, 30 ... Light emitting layer, 33 ... Light emitting area, 50 ... Transparent conductive layer, 50a ... Surface, 51 , 52, 53 ... interface, 60 ... high resistance layer, 60a ... surface, 60f ... insulating film, 60p ... outer edge, 70 ... first electrode, 70p ... outer edge, 80 ... second electrode, 80a, 80b ... surface, 81 ... First metal layer, 82 ... Second metal layer, 91 ... First conductive layer, 91c, 91d, 91e ... Third, fourth and fifth metal layers, 92 ... Second conductive layer, 93 ... Conductive substrate, θ ... Incident angle, 110, 110a to 110c ... Semiconductor light emitting element, 110s1, 110s2 ... Three layer laminated film, 111a to 111c, 112, 113, 119a, 119b ... Semiconductor light emitting element, 119s1, 119s2 ... Two layer laminated Films, BL1 to BL4, first to fourth barrier layers, BLp, p-side barrier layer, IL1, IL2, first and second intermediate layers, Ic, current, L1 to L6, light, Rr, reflectance, WL1 WL4 ... well layer

Claims (9)

A laminated structure including a first semiconductor layer of a first conductivity type, a second semiconductor layer of a second conductivity type, and a light emitting layer provided between the first semiconductor layer and the second semiconductor layer; ,
A first electrode provided on a side of the first semiconductor layer opposite to the second semiconductor layer;
A second electrode provided on the opposite side of the second semiconductor layer from the first semiconductor layer and having reflectivity for the emitted light emitted from the light emitting layer;
The first semiconductor layer is in contact with the second semiconductor layer between the second semiconductor layer and the second electrode, and overlaps the first electrode when viewed in a first direction from the first semiconductor layer toward the second semiconductor layer. A high resistance layer of silicon oxide having a portion and a resistance higher than that of the second semiconductor layer;
The second semiconductor layer is in contact with the second semiconductor layer between the second semiconductor layer and the second electrode, is transparent to the emitted light, and has a refractive index lower than the refractive index of the second semiconductor layer. A transparent conductive film having a resistance lower than that of the high resistance layer, including an oxide containing at least one element selected from the group consisting of In, Sn, Zn, and Ti, and having a thickness of 50 nanometers or more Layers,
With
A part of the transparent conductive layer extends between the high resistance layer and the second electrode,
When viewed along the first direction, the second electrode has a portion outside the high resistance layer,
The emitted light is extracted from a surface of the first semiconductor layer opposite to the second semiconductor layer,
The distance between the surface of the second electrode facing the first electrode on the first electrode side and the second semiconductor layer is the distance of the portion of the second electrode not facing the first electrode. A semiconductor light emitting element characterized by being longer than the distance between the surface on the first electrode side and the second semiconductor layer.   2. The semiconductor light emitting element according to claim 1, wherein a part of the emitted light is reflected at an interface between the second semiconductor layer and the transparent conductive layer.   The outer edge of the first electrode when viewed along the first direction is located inside the outer edge of the high resistance layer when viewed along the first direction. Semiconductor light emitting device.   4. The semiconductor light emitting element according to claim 1, wherein an area of the high resistance layer is smaller than an area of the transparent conductive layer. A conductive substrate provided on the opposite side of the second electrode from the second semiconductor layer;
A conductive layer provided between the second electrode and the conductive substrate;
The semiconductor light-emitting device according to claim 1, further comprising:   The semiconductor light emitting element according to claim 5, wherein the second electrode and the conductive layer are in contact with each other, and an interface between the second electrode and the conductive layer is flat.   7. The semiconductor light emitting device according to claim 1, wherein a thickness of the high resistance layer is not less than 50 nanometers and not more than 200 nanometers. A stacked structure including a first semiconductor layer of a first conductivity type, a second semiconductor layer of a second conductivity type, and a light emitting layer provided between the first semiconductor layer and the second semiconductor layer. Forming a high resistance layer of silicon oxide having a resistance higher than the resistance of the second semiconductor layer on a part of the surface of the second semiconductor layer opposite to the light emitting layer;
After the formation of the high-resistance layer, the light-emitting layer is formed on the surface of the second semiconductor layer that is not provided with the high-resistance layer, on the surface opposite to the light-emitting layer, and on the high-resistance layer. Having a permeability lower than that of the second semiconductor layer, lower resistance than that of the high resistance layer, In, Sn, Including an oxide containing at least one element selected from the group consisting of Zn and Ti, forming a transparent conductive layer having a thickness of 50 nanometers or more;
On the transparent conductive layer, is reflective to the emitted light, and is located outside the high resistance layer when viewed along a first direction from the first semiconductor layer toward the second semiconductor layer. Forming a second electrode having a portion;
Forming a first electrode having a portion overlapping the high resistance layer when viewed along the first direction on a surface of the first semiconductor layer opposite to the light emitting layer;
The emitted light is extracted from a surface of the first semiconductor layer opposite to the second semiconductor layer,
The transparent conductive layer is formed by setting the distance between the surface of the second electrode facing the first electrode and the surface of the first electrode, and the second semiconductor layer, and the second electrode. Forming the transparent conductive layer so as to be longer than the distance between the surface of the first electrode side of the portion not facing one electrode and the second semiconductor layer. Manufacturing method of light emitting element. A step of joining the second electrode and the conductive substrate with a conductive layer;
The method for manufacturing a semiconductor light emitting element according to claim 8, wherein the second electrode and the conductive layer are in contact with each other, and an interface between the second electrode and the conductive layer is flat.

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