JP5464859B2 - Pellicle storage container - Google Patents

Description

The present invention prevents foreign matter from adhering to a photomask or a reticle used in a lithography process when manufacturing a thin film transistor (TFT), a color filter (CF), or the like constituting an LSI or a liquid crystal display (LCD). It relates container pellicle used for, in particular the area 1000 cm ² or more, further relates to a pellicle container for large pellicle area 10000 cm ² or more.

  The present invention relates to a pellicle storage container. First, the pellicle will be described.

  Conventionally, in a lithography process at the time of manufacturing a circuit pattern such as a semiconductor device or a liquid crystal display, a dust-proof means generally called a pellicle is used to prevent foreign matter from adhering to a photomask or a reticle. The pellicle has a shape matching the shape of the photomask or reticle, and a transparent polymer film (hereinafter referred to as nitrocellulose, cellulose derivative or fluoropolymer) having a thickness of 10 μm or less on the upper edge surface of a frame of about several millimeters thick , "Pellicle film") is spread and bonded, and an adhesive is applied to the lower edge surface of the frame, and a protective film is adhered to the adhesive with a predetermined adhesive force. .

  The pressure-sensitive adhesive is for fixing the pellicle to a photomask or reticle, and the protective film is used to maintain the adhesive strength of the pressure-sensitive adhesive until the pressure-sensitive adhesive is used for that purpose. It protects the adhesive surface.

  Such a pellicle is generally supplied from the manufacturer that manufactures the pellicle to the manufacturer that manufactures the photomask or reticle, where the pellicle is attached to the photomask or reticle, and then the semiconductor manufacturer, the panel manufacturer, etc. Supplied to manufacturers who perform lithography.

  In transporting this pellicle from the manufacturer to the user, in order to prevent foreign matter from adhering to the pellicle film or the like, or to prevent the pellicle from being damaged, the pellicle storage container comprising a pellicle mounting table and a lid In general, it is stored in a dust-proof bag or the like and transported. The pellicle storage container is required to have not only a sealing property for preventing dust from adhering to the pellicle but also a holding property that can securely hold the pellicle membrane in a non-contact state.

The pellicle storage container is generally manufactured by injection molding or vacuum molding using a resin material. However, 5 inch and 6 inch semiconductor pellicle storage containers are often formed by injection molding, but large pellicle storage containers with an area of 1000 cm ² or more are thin and large-sized integrally molded products can be easily obtained. In many cases, vacuum forming is possible. Further, as described in the pamphlet of International Publication No. 2006/080060 (Patent Document 1) by the present applicant, it may be manufactured from a material having a honeycomb structure using a material such as metal.

  Assuming that the shape of the pellicle storage container does not change, the pellicle storage container can securely hold the pellicle storage container in a non-contact state, and the sealing property to prevent foreign matter from entering the pellicle storage container Is required.

  As a means for improving the sealing performance, it is also preferable to sandwich an elastic member such as silicone rubber between the lid and the pellicle mounting table.

  Therefore, as described in Japanese Patent Application Laid-Open No. 2005-49765 (Patent Document 2), the present applicant attaches a reinforcing plate to the pellicle mounting table to prevent the pellicle storage container from being deformed. A technique for preventing the deformation is proposed. Japanese Patent Laid-Open No. 2007-25183 (Patent Document 3) also describes a technique based on the same idea.

  In addition, as described in Japanese Patent Application Laid-Open No. 2007-91296 (Patent Document 4), in the mask blank storage container, a vent hole with outside air is formed, and a filter member is provided inside the container of the vent hole. Thus, even when outside air enters from the vent hole, foreign substances such as chemical substances contained in the outside air are removed by the filter member, thereby ensuring a sealing property to prevent the entry of foreign substances into the storage container. Yes.

  However, as the size of the pellicle increases in size in recent years, the size of the storage container increases, which causes a problem that the lid becomes heavy and difficult to lift. In addition, a large pellicle storage container is often formed by vacuum forming because it is thin and can be easily formed into a large integral molded product, but it is slippery because it has a draft from the mold. If the lid slips and falls onto the pellicle on the tray when the lid is opened, the pellicle is damaged and cannot be used.

  Therefore, as described in Japanese Patent Application Laid-Open No. 2005-107085 (Patent Document 5), the present applicant joins a locking part on which a hand or a jig such as a hook can be hung and a lid such as a suction cup. A lid opening / closing jig provided with a joint that can be joined to the lid by joining the joint of the lid opening / closing jig to the lid and placing the hand or jig on the locking portion to lift the lid. It proposes a technique for opening.

  Further, JP 2007-328226 A (Patent Document 6) discloses that the center of the lid is flat or convex outward in a sealed state so that the lid does not bend due to its own weight and adhere to the pellicle film. There has been proposed a pellicle storage container characterized by maintaining its shape.

International Publication No. 2006/080060 Pamphlet JP 2005-49765 A JP 2007-25183 A JP 2007-91296 A JP 2005-107085 A JP 2007-328226 A

Ie 5 inches, there is no problem if a small pellicle container 6 inch, 1000 cm 2 area of the ^pellicle, in the even more container for a large pellicle exceeding 10000 cm ^2, ensures the lid There is a need for means for grasping and unsealing.

Conventionally, the area 1000 cm ² or more, more opening operations of the lid of the pellicle receiving container receiving area 10000 cm ² or more large pellicle was done manually. That is, two people held the outer peripheral part of the lid by two persons, and lifted the lid to remove it from the pellicle mounting table. On the other hand, in the case of a small pellicle used for an LSI photomask, the opening operation of the lid of the pellicle storage container is mechanized. That is, the top surface of the lid is sucked with a robot hand having a suction cup, and the lid is lifted off from the pellicle mounting table.

In recent years, the size of large pellicles has been further increased, and the present inventor is also studying those having an area of 35000 cm ² . Such a large storage container is difficult to manually open due to its size and weight, so the opening operation of the lid of the pellicle storage container that stores the large pellicle should be mechanized instead of manually. Is considered desirable.

However, the present inventors found the area 1000 cm ² or more, even in an attempt to machine the opening work of the lid of the pellicle receiving container receiving area 10000 cm ² or more large pellicle adsorbs top surface of the lid in a robot hand with a sucker As a result of trying to lift the lid and remove it from the pellicle mounting table, it turned out that it was not easy.

The lid of the pellicle storage container includes an outer peripheral portion that comes into contact with the pellicle placement table, an inner peripheral top surface portion, and a connecting portion that connects the two. The top surface portion of the large pellicle storage container is bent downward by its own weight. As a result of confirmation by the present inventor, when opening the lid of the pellicle storage container that accommodates a large pellicle having an area of 1000 cm ² or more, the cover bends upward due to an external force applied to the top surface of the lid in the opening operation. It became clear that the lid became difficult to open because the internal volume of the tube increased in a sealed state and the internal pressure decreased. When it becomes a large-sized pellicle storage container having an area of 10,000 cm ² or more, the top surface portion is further bent downward due to the increased weight of the material. For this reason, it has been found that the lid becomes more difficult to open.

  Therefore, an object of the present invention is to provide a pellicle storage container that can prevent the inside from being depressurized by an external force applied to the top surface portion of the lid.

  In order to achieve the above object, a pellicle storage container according to the present invention has the following configuration.

The first configuration, for accommodating an area 10000 cm ² or more large pellicle, at least a lid, in the pellicle container composed of a pellicle mounting table for mounting the large-sized pellicle, the lid upon opening operations of the lid have a deformation preventing means for preventing deformation of, in the deformation preventing means, rigidity of the portion which is gripped by the gripping members of the lid that is used upon opening of the lid, there a higher cover than the rigidity of the surrounding of the portion Thus, the pellicle storage container is characterized in that the gripped portion is the top surface of the lid itself .

  A second configuration is the pellicle storage container according to the first configuration, characterized in that the deformation preventing means is a ventilation means capable of venting gas inside and outside the pellicle storage container when the lid is opened.

  A third configuration is the pellicle storage container according to the second configuration, wherein the ventilation means is a ventilation hole provided in at least one of a lid or a pellicle mounting table.

  A fourth configuration is the pellicle storage container according to the second configuration, wherein the ventilation means is a gap for ventilation formed in the fitting surface of the lid and the pellicle mounting table.

A fifth configuration is the pellicle storage container according to the first configuration, wherein the deformation preventing means is a top surface of a lid having a convex curved surface shape toward the outside .

  According to a sixth configuration, in any one of the second to fourth configurations, wherein the deformation preventing means is the ventilation means and the top surface of a lid having a convex curved shape toward the outside. It is a pellicle storage container as described.

  A seventh configuration is the pellicle storage container according to any one of the second to fourth configurations, wherein the deformation preventing means is the ventilation means and a rib provided on the top surface of the lid. .

  In an eighth configuration according to any one of the second to fourth configurations, wherein the deformation preventing means is a structure for reinforcing rigidity of the ventilation means and the top surface of the lid. It is a pellicle storage container as described.

  A ninth configuration is characterized in that the deformation preventing means is a lid having a portion having an outer diameter larger than that of the pellicle mounting table when the pellicle mounting table and the cover are fitted. This is a pellicle storage container.

The pellicle storage container of the present invention can prevent the inside from being depressurized by an external force applied to the top surface of the lid, and can easily open the lid by a machine. Effect of the present invention will appear more conspicuously area of the pellicle is the greater, is effective for the surface product 10000 cm ² or larger pellicle especially.

It is a perspective explanatory view showing the configuration of a general pellicle storage container. It is sectional explanatory drawing which shows the structure of a general pellicle storage container. It is sectional explanatory drawing which shows a mode that the hole for ventilation | gas_flowing was provided in the lid | cover of the pellicle storage container. It is sectional explanatory drawing which shows a mode that the hole for ventilation | gas_flowing was provided in the lid | cover of the pellicle storage container. It is sectional explanatory drawing which shows a mode that the hole for ventilation | gas_flowing was provided in the pellicle mounting base of the pellicle storage container. It is sectional explanatory drawing which shows a mode that the clearance gap for ventilation was provided in the lid | cover of the pellicle storage container. It is side surface explanatory drawing which shows a mode that the clearance gap for ventilation was provided in the lid | cover of the pellicle storage container. FIG. 10 is a cross-sectional explanatory view showing a state in which a ventilation gap is provided in the pellicle mounting table of the pellicle storage container. It is side surface explanatory drawing which shows a mode that the clearance gap for ventilation was provided in the pellicle mounting base of the pellicle storage container. It is sectional explanatory drawing which shows a mode that the part which bent the planar shape of the lid | cover was hold | gripped with the suction member by a vacuum. It is sectional explanatory drawing which shows a mode that the curved surface part of the lid | cover was hold | gripped with the adsorption member by vacuum. It is sectional explanatory drawing which shows a mode that the rib structure part of the cover was hold | gripped with the contact member by pinching. It is sectional explanatory drawing which shows a mode that the convex-shaped curved surface shape was provided toward the outer side in the top | upper surface of the lid | cover. It is sectional explanatory drawing which shows a mode that the rib was provided in the top | upper surface of the lid | cover. It is upper surface explanatory drawing which shows a mode that the rib was provided in the top | upper surface of the lid | cover. It is sectional explanatory drawing which shows a mode that the structure for reinforcing rigidity was provided in the top | upper surface of the lid | cover. It is sectional explanatory drawing which shows a mode that a lid | cover has a part with a larger outer diameter than a pellicle mounting base. It is upper surface explanatory drawing which shows a mode that a lid | cover has a part with a larger outer diameter than a pellicle mounting base.

  Embodiments of the present invention will be specifically described below.

  First, the pellicle storage container 1 to which the present application is applied will be described. As shown in FIG. 1, the pellicle storage container 1 includes a pellicle mounting table 3 on which the pellicle 2 is mounted and a lid 4 that covers an upper portion of the pellicle mounting table 3.

  The material of the pellicle mounting table 3 and the lid 4 is not particularly limited, and examples thereof include engineering plastic, reinforced plastic, metal, and the like. From the viewpoint of weight reduction and moldability, plastic materials are often selected, and acrylic resin, acrylonitrile resin, polycarbonate resin, polyethylene terephthalate resin, acrylonitrile / butadiene / styrene resin, and the like can be used. In addition to the above resins, polyester resins other than polyethylene terephthalate, olefin resins such as polyethylene and polypropylene, polystyrene resins such as polystyrene, acrylonitrile / styrene resins, and the like can also be used. You may give antistaticity to said resin. Fiber reinforced plastics can also be used. When selecting a metal, aluminum can be used from a viewpoint of weight reduction.

  The pellicle mounting table 3 and the lid 4 are manufactured using a plate made of the above-described material by vacuum molding, injection molding, or assembly such as bonding. As for the thickness of the board used, 1 mm-10 mm are desirable. In the case of a large storage container, vacuum molding is more preferable because it is technically difficult to mold by injection molding.

  The dimensions of the pellicle mounting table 3 and the lid 4 in the present invention are determined by the size of the pellicle frame 2a (see FIG. 2) in which the pellicle 2 is stored.

  The pellicle 2 includes a pellicle film 2c, a pellicle frame 2a to which the pellicle film 2c is attached, a mask adhesive 2b for attaching the pellicle frame 2a to a mask or a reticle, and the like. On the surface of the mask adhesive material 2b, a release material 2d made of a protective film or the like such as release paper is stuck and placed on the pellicle placement table 3.

  As a method for fixing the pellicle 2 to the pellicle mounting table 3, the protruding part of the release material 2 d is attached to the pellicle mounting table 3 with an adhesive tape, or is provided on the pellicle mounting table 3 in a locking groove formed on the pellicle frame 2 a. Any known method may be used, such as locking the locking member or holding and fixing the pellicle frame 2a between the pellicle mounting table 3 and the lid 4.

  As shown in FIGS. 1 and 2, the pellicle mounting table 3 is covered with a lid 4 while the pellicle 2 is mounted on the mounting surface 3a of the pellicle 2 of the pellicle mounting table 3 (see FIG. 2). The pellicle 2 is stored. After the pellicle mounting table 3 and the lid 4 are combined, any known method may be used, such as sealing by inserting clips or the like at the four corners, or sealing the adhesive tape around the peripheral edge.

  A feature of the pellicle storage container of the present invention is that it has a deformation preventing means for preventing deformation of the lid during the opening operation of the lid. The features will be described in detail below.

  First, the deformation preventing means is a venting means capable of venting gas inside and outside the pellicle storage container when the lid is opened. By doing this, even if the storage container is deformed and the inside of the storage container is depressurized, the inside of the storage container is returned to normal pressure by being able to supply gas into the storage container by allowing gas to pass through. The storage container returns to its original shape.

  Regarding the gas ventilation inside and outside the pellicle storage container, it is preferable that the ventilation volume (volume) is large in order to shorten the recovery time of decompression. Further, it is desirable that the ventilation rate is slow in order to reduce wind pressure damage to the pellicle membrane and to reduce the risk of foreign matter entering the storage container.

  The ventilation means can be achieved by providing a ventilation hole provided in at least one of the lid or the pellicle mounting table. For example, it is the hole 5a for ventilation | gas_flowing provided in the lid | cover 4 as shown in FIG.3 and FIG.4. Or it is the hole 5b for ventilation | gas_flowing provided in the pellicle mounting base 3 as shown in FIG.

  The shape of the hole for ventilation may be any shape such as a circle or a rectangle.

  In the case of a round shape, the size of the hole for ventilation is 1 mmφ to 100 mmφ, preferably 10 mmφ to 80 mmφ, and more preferably 20 mmφ to 50 mmφ. In the case of a rectangular shape, the width is 1 mm to 500 mm, preferably 10 mm to 300 mm, more preferably 20 mm to 100 mm, and the height is 1 mm to 100 mm, preferably 10 mm to 80 mm, more preferably 20 mm to 50 mm. It is. The size of the hole is desirably set within a range that can ensure the rigidity of the storage container.

  In addition, in order to maintain the rigidity of the portion where the vent hole is opened, the periphery of the hole may be reinforced by thickening the members around the vent hole. As a specific method of reinforcement, when the storage container is formed by injection molding, the peripheral portion of the vent hole may be locally thickened with a mold. When forming a storage container by vacuum forming, the hole is formed by melting with heat or the like, and the peripheral member of the hole is made thick, or an annular reinforcing member made of metal, plastic, or the like after drilling It may be reinforced by sticking to the peripheral part of the hole, but any method may be used as long as it does not generate foreign matter by other reinforcement.

  In order to shorten the recovery time from the depressurized state, in order to increase the ventilation volume (volume), it is desirable that the size of the ventilation hole is larger. In order to reduce wind pressure damage to the pellicle or reduce the risk of foreign matter intrusion, it is desirable that the size of the vent hole is larger in order to reduce the ventilation speed. The number of ventilation holes may be set arbitrarily. The larger the total ventilation area calculated by the product of the size area and the number of holes, the larger the ventilation volume, which is desirable. The ratio of the preferable total ventilation area of the storage container to the area of the pellicle stored in the storage container is 0.0001 to 0.05. If it is 0.0001 or more, the air flow rate becomes large, which is preferable. Moreover, if it is 0.05 or less, there will be little intensity | strength fall of a storage container.

  Further, as a method of increasing the ventilation rate from the ventilation hole, it is also preferable to open the lid after sending clean air that has passed through a hepa filter or the like into a slightly pressurized state.

  It is desirable that the position of the hole for ventilation is set at a place where the air current entering from the hole does not directly hit the pellicle membrane. For example, the vicinity of the four corners of the storage container can be mentioned.

  The vent hole need not be vented except when the lid is opened. Therefore, from the viewpoint of preventing entry of foreign matter, it is desirable to attach a filter to the ventilation hole from the outside so as to be able to be opened and closed with the lid closed, or to seal with a tape.

  As one mode of such an openable and closable hole, a pipe with a valve that can be opened and closed may be connected around the hole. In this case, it is possible to compensate for the decompression at the time of opening the lid by normally closing the valve and opening the valve by connecting a balloon filled with clean gas to the pipe before opening the lid. .

  Further, the ventilation means can be achieved by providing a ventilation gap formed on the fitting surface of the lid and the pellicle mounting table. For example, as shown in FIGS. 6 and 7, a ventilation gap 6 a provided on the lid 4 side of the fitting surface. Or it is the clearance gap 6b for ventilation | gas_flowing provided in the pellicle mounting base 3 side among fitting surfaces as shown in FIG.8 and FIG.9.

  For the ventilation gap, a semicircular or rectangular groove may be provided on at least one of the lid and the pellicle mounting table on the fitting surface of the lid and the pellicle mounting table.

  Moreover, in order to prevent foreign matter mixing, an adhesive or the like may be applied to the inner wall side of the gap.

  As for the size of the gap for ventilation, the width is 1 mm to 500 mm, preferably 10 mm to 300 mm, more preferably 20 mm to 100 mm, and the height is 1 mm to 30 mm, preferably 3 mm to 20 mm, more preferably, 5 mm to 10 mm. It is desirable to set the size of the gap within a range that can ensure the rigidity of the storage container.

  In order to shorten the recovery time from the reduced pressure state, in order to increase the amount of ventilation (volume), it is desirable that the size of the gap for ventilation is larger. Further, in order to reduce wind pressure damage to the pellicle or reduce the risk of foreign matter intrusion, it is desirable that the size of the ventilation gap is larger in order to reduce the ventilation speed. The number of air gaps may be set arbitrarily. The larger the total ventilation area calculated by the product of the size area and the number of the gaps, the larger the ventilation volume, which is desirable. The ratio of the preferable total ventilation area of the storage container to the area of the pellicle stored in the storage container is 0.0001 to 0.05. If it is 0.0001 or more, the air flow rate becomes large, which is preferable. Moreover, if it is 0.05 or less, there is little fall of the rigidity of a storage container.

  It is desirable to set the position of the ventilation gap at a place where the airflow entering from the gap does not directly hit the pellicle membrane. For example, the vicinity of the four corners of the storage container can be mentioned.

  The air gap need not be vented except when the lid is opened. Therefore, from the viewpoint of preventing entry of foreign matter, it is desirable to attach a filter from the outside or seal with a tape so that the ventilation gap can be opened and closed with the lid closed.

  Next, the deformation preventing means is a lid in which the rigidity of the portion gripped by the lid gripping member used when the lid is opened is higher than the rigidity around the portion. By doing so, since the rigidity of the portion where the lid is gripped is high, deformation of the lid when the lid is gripped and lifted is suppressed, and changes in the internal volume of the storage container are suppressed, so that the decompressed state Can be suppressed.

  The lid gripping member here is not particularly limited as long as it can contact the lid and lift the lid, but, for example, a vacuum adsorbing member 7a as shown in FIGS. Examples include an adsorbing member, an electromagnetic adsorbing member, a contact member 7b sandwiched as shown in FIG. 12, and a contact member hooked.

  As means for increasing the rigidity of the gripped part, the planar shape of the lid is folded as shown in FIG. 10 to grip the bent part, and a local curved surface is provided as shown in FIG. 11 to grip the curved part. As shown in FIG. 12, a rib structure is provided to grip the rib portion, a structure for reinforcing rigidity is locally provided to grip the corresponding portion, and the lid is locally thickened And gripping the corresponding part.

  As described above, for a pellicle storage container that is a lid in which the rigidity of a part or a plurality of parts of the lid is higher than the rigidity around the part, the method of grasping the highly rigid part and opening the lid is preferably applied. Can do. As a part of the lid for increasing the rigidity, the outer peripheral portion of the top surface is preferable as shown in FIGS.

  In order to grip the portion with increased rigidity with the gripping member, the portion with increased rigidity of the lid may be provided with a handle, a recessed shape, or a protruding shape.

  Next, as shown in FIG. 13, the deformation preventing means is a top surface 8 of a lid having a convex curved shape toward the outside. By doing in this way, deformation | transformation of the lid | cover 4 when the top | upper surface 8 of a lid | cover is grasped and lifted is suppressed, and the change of the internal volume of the storage container 1 is suppressed, Therefore It can suppress that it will be in a pressure-reduced state.

  The curvature radius of the convex curved surface shape on the top surface of the lid is 4000 mm to 1000 mm, preferably 3500 mm to 1000 mm, and more preferably 3000 to 1000 mm. The radius of curvature of the convex curved shape is desirable so that the height of the storage container does not become unnecessarily high, and the smaller the curvature radius, the more rigid the lid and the less deformation.

  Next, as shown in FIGS. 14 and 15, the deformation preventing means is a rib 9 provided on the top surface of the lid 4. By doing in this way, since the deformation | transformation of the lid | cover 4 when the top surface of the lid | cover 4 is hold | gripped and lifted and the change of the internal volume of the storage container 1 is suppressed, it can suppress that it will be in a pressure reduction state.

  The rib may be provided by molding on the top surface when the lid is molded.

  As the shape of the rib, an arbitrary shape such as a letter “X”, a ten-letter letter, or a letter shape may be selected.

  As for the size of the rib, the width is 5 mm to 100 mm, preferably 10 mm to 50 mm, more preferably 20 mm to 30 mm, and the height is 3 mm to 50 mm, preferably 5 mm to 30 mm, more preferably 10 mm to 30 mm.

  Next, as shown in FIG. 16, the deformation preventing means is a structure 10 for reinforcing rigidity attached to the top surface of the lid 4. By doing in this way, since the deformation | transformation of the lid | cover 4 when the top surface of the lid | cover 4 is hold | gripped and lifted and the change of the internal volume of the storage container 1 is suppressed, it can suppress that it will be in a pressure reduction state.

  As the material of the structure, a material having rigidity for maintaining the shape of the structure, such as metal, engineering plastic, reinforced plastic, ceramics, or the like can be used.

  The structure may be fixed to the top surface of the lid by a method such as adhesion or screwing.

  As the shape of the structure, an arbitrary shape such as an X character, a cross character, a rice field, or the like may be selected.

  The structure has a width of 5 mm to 100 mm, preferably 10 mm to 50 mm, more preferably 20 mm to 30 mm, and a height of 3 mm to 50 mm, preferably 5 mm to 30 mm, more preferably 10 mm. ~ 30 mm.

  Further, a transparent plate may be bonded to the outer surface of the top surface, or may be coated. In that case, the top surface portion may be bonded or coated, or the entire top surface may be bonded or coated. As a material for pasting or coating, a plastic material that can be used as a material for the lid is preferable. The thickness of the laminate or coating is preferably 0.1 to 2 times, more preferably 0.1 to 1 times the top surface thickness of the lid. When the thickness is 0.1 times or more, the effect of improving the rigidity becomes remarkable, and when the thickness is 2 times or less, the decrease in transparency and the increase in weight are small.

  In the case of the structure for reinforcing the convex curved surface shape on the top surface of the lid, the rib provided on the top surface of the lid, or the rigidity attached to the top surface of the lid, Combined with the gap, it has a better effect.

  Next, as shown in FIGS. 17 and 18, the deformation preventing means is a lid 4 having a portion whose outer diameter is larger than that of the pellicle mounting table 3 when the pellicle mounting table 3 and the lid 4 are fitted. Features. In this way, the portion 11 having a larger outer diameter than the pellicle mounting table 3 of the lid 4 and the portion belonging to the same plane as the portion can be gripped by a method such as suction, which is more rigid than the top surface of the lid 4. By gripping the outer diameter portion of the lid, the deformation of the lid 4 is suppressed, and the change in the internal volume of the storage container 1 is suppressed, so that the decompression state can be suppressed.

  The size of the portion of the lid having a larger outer diameter than the pellicle mounting table is such that the length in the protruding direction is 5 mm to 100 mm, preferably 10 mm to 50 mm, more preferably 20 mm to 30 mm. The length along is 5 mm to 500 mm, preferably 10 mm to 300 mm, more preferably 20 mm to 100 mm.

  What is necessary is just to set arbitrarily the position and number of a part with an outer diameter larger than the pellicle mounting base of a lid | cover according to the machine and jig used for the opening operation | work of a lid | cover.

  Specific examples and comparative examples will be shown below, and their evaluation will be described in detail.

[Example 1]
The pellicle 2 has an outer diameter of 1366 mm × 1146 mm and a height of 7 mm. The pellicle mounting table 3 of the pellicle storage container 1 is made of aluminum having a honeycomb structure with an outer diameter of 1526 mm × 1306 mm and a height of 34 mm. The cover 4 covering the upper part of the panel and pellicle mounting table 3 was a vacuum molded product of a 3 mm thick acrylic resin plate having an outer diameter of 1526 mm × 1306 mm and a height of 80 mm.

  Then, 1 mm thick silicone rubber is pasted on the surface where the pellicle mounting table 3 is in contact with the lid 4, and a 30 mmφ round shape is provided in the vicinity of the four corners of the lid 4 as a ventilation means that can vent gas inside and outside the pellicle storage container when the lid is opened. After providing a total of four holes of shape, the lid 4 was put on.

  The outer peripheral part of the top surface of the lid was sucked and held by four suction cups with a diameter of 15 cm arranged at the apex of the square, lifted upward, and opened, but the lid became a pellicle due to the decompression in the storage container. The lid could be lifted smoothly without adsorbing to the mounting table.

[Example 2]
As a deformation preventing means for preventing deformation of the lid at the time of opening the lid, a storage container similar to that in Example 1 is used except that the top surface of the lid is a convex curved surface having a radius of curvature of 2000 mm toward the outside. It was.

  The center of the top surface of the lid was sucked and held by the same suction cup as in Example 1, and was lifted upward, and the opening operation was performed, but the lid did not stick to the pellicle mounting table due to the decompression in the storage container, The lid could be lifted smoothly.

Example 3
As a deformation preventing means for preventing deformation of the lid at the time of opening the lid, when the lid is fitted to the pellicle mounting table and the lid, the length in the protruding direction of the portion whose outer diameter is larger than that of the pellicle mounting table is 30 mm. A storage container similar to that of Example 1 was used except that a lid having a length along the outer diameter of 100 mm was used.

  The portion of the lid having a larger outer diameter than that of the pellicle mounting table is sucked and held by the same suction cup as in the first embodiment, lifted upward, and opened, but the lid is removed due to decompression in the storage container. The lid could be lifted smoothly without adsorbing to the surface.

[Comparative Example 1]
A storage container similar to that of Example 1 was used except that the storage container was not pierced.

  The center of the top surface of the lid was sucked and held by the same suction cup as in Example 1, and was lifted upward and opened, but the lid was adsorbed to the pellicle mounting table due to decompression in the storage container, The lid lifted with the mounting table.

  The present invention can be used as a pellicle storage container.

DESCRIPTION OF SYMBOLS 1 ... Pellicle storage container 2 ... Pellicle 2a ... Pellicle frame 2b ... Mask adhesive 2c ... Pellicle film 2d ... Release material 3 ... Pellicle mounting table 3a ... Mounting surface 4 ... Lid 5a ... Ventilation hole 5b ... Ventilation hole Hole 6a ... Ventilation gap 6b ... Ventilation gap 7a ... Vacuum suction member 7b ... Pinch contact member 8 ... Lid top surface 9 ... Rib 10 ... Structure 11 ... Outer diameter larger than lid pellicle mounting table portion

Claims (9)

For housing an area 10000 cm ² or more large pellicle, at least a lid, in the pellicle container composed of a pellicle mounting table for mounting the large pellicle,
Have a deformation preventing means for preventing the deformation of the lid upon opening operations of the lid,
In the deformation preventing means, the rigidity of the portion gripped by the gripping member of the lid used when opening the lid is higher than the rigidity around the portion, and the gripped portion is the top surface of the lid pellicle container, characterized in that it is itself.   2. The pellicle storage container according to claim 1, wherein the deformation preventing means is a ventilation means capable of venting gas inside and outside the pellicle storage container when the lid is opened.   The pellicle storage container according to claim 2, wherein the ventilation means is a ventilation hole provided in at least one of a lid or a pellicle mounting table.   The pellicle storage container according to claim 2, wherein the ventilation means is a ventilation gap formed on a fitting surface of the lid and the pellicle mounting table. 2. The pellicle storage container according to claim 1, wherein the deformation preventing means is a top surface of a lid having a convex curved surface shape toward the outside .   The pellicle storage container according to any one of claims 2 to 4, wherein the deformation preventing means is the ventilation means and a top surface of a lid having a convex curved shape toward the outside. .   The pellicle storage container according to any one of claims 2 to 4, wherein the deformation preventing means is the ventilation means and a rib provided on a top surface of the lid.   The pellicle storage container according to any one of claims 2 to 4, wherein the deformation prevention means is a structure for reinforcing the rigidity attached to the top surface of the ventilation means and the lid. .   2. The pellicle storage container according to claim 1, wherein the deformation preventing means is a lid having a portion having an outer diameter larger than that of the pellicle mounting table when the pellicle mounting table and the lid are fitted to each other.

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