JP5464832B2 - Substrate processing system, group management apparatus, remote access method, and remote connection program - Google Patents

Description

  The present invention relates to a substrate processing system for managing a group of one or more substrate processing apparatuses.

  Remote access for operating a device to be operated remotely from a plurality of computers arranged at remote locations connected to the network can be displayed on a screen displayed by the device to be operated with a computer. Are known.

  However, the number of users who can remotely access the device to be operated simultaneously is limited to, for example, one (one computer), and the remote access device requests remote access from another computer There is a problem that remote access fails without knowing which computer is performing remote access.

  It is an object of the present invention to provide a substrate processing system capable of managing a group of one or more substrate processing apparatuses.

  In order to achieve the above object, the present invention is characterized by a substrate processing apparatus that processes a substrate and a group management apparatus that collects and manages data transmitted while the substrate processing apparatus processes a substrate. In the substrate processing system, the group management apparatus is provided in the substrate processing system for confirming whether or not a connection is possible according to a connection status of the substrate processing apparatus when there is a connection request.

  According to the present invention, one or more substrate processing apparatuses can be managed in groups.

Next, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a configuration diagram illustrating a configuration example of a substrate processing system 10 according to an embodiment of the present invention. As shown in FIG. 1, the substrate processing system 10 includes, for example, substrate processing apparatuses 14-1 to 14-4 and devices 15-1 to 15-3 connected to a clean room network 12-1, and an office network 12-2. The management server 18 is connected to the connected operation terminals 16-1 to 16-4 and the clean room network 12-1 and the office network 12-2.

  The clean room network 12-1 and the office network 12-2 may each be a network connected as a LAN, or may be a network connected via the Internet.

  The substrate processing apparatuses 14-1 to 14-4 have a server function that exclusively permits remote access, for example, are disposed in a clean room (not shown), and perform predetermined processing on, for example, a plurality of semiconductor substrates. The devices 15-1 to 15-3 are, for example, control devices having a server function that exclusively permits remote access, and are, for example, computers.

  The operation terminals 16-1 to 16-4 can remotely access the substrate processing apparatuses 14-1 to 14-4 and the devices 15-1 to 15-3 via the clean room network 12-1 and the office network 12-2. For example, a terminal such as a computer having a client function is arranged in a place different from the clean room, for example, in an office.

  The management server 18 is a group management apparatus that manages the substrate processing apparatuses 14-1 to 14-4 and the devices 15-1 to 15-3. For example, the management server 18 is generated during operation of the substrate processing apparatuses 14-1 to 14-4. The operating state data and the like are collected and stored, and transmitted in response to requests from the operation terminals 16-1 to 16-4.

Next, the substrate processing apparatuses 14-1 to 14-4, the devices 15-1 to 15-3, the operation terminals 16-1 to 16-4, and the management server 18 will be described in detail.
Hereinafter, when any one of a plurality of components such as the substrate processing apparatuses 14-1 to 14-4 is indicated without being specified, it may be simply abbreviated as “substrate processing apparatus 14”.

  FIG. 2 is a block diagram showing an outline of the configuration of the substrate processing apparatus 14. The substrate processing apparatus 14 includes, for example, a substrate processing unit 20, a user interface device (UI device) 22, a storage device 24, a communication device 26, and a control device 28. The substrate processing device 14 functions as a computer and has, for example, a plurality of semiconductor substrates. The film forming process is performed.

  The substrate processing unit 20 includes a processing chamber (not shown) that accommodates and processes a plurality of semiconductor substrates, and performs, for example, a film forming process on the semiconductor substrates. The film forming process performed by the substrate processing unit 20 includes, for example, a process for forming a CVD, PVD, oxide film, or nitrogen film, or a process for forming a film containing a metal. Further, the film formation process may be an annealing process, an oxidation process, a nitriding process, a diffusion process, or the like.

The UI device 22 includes an LCD display device or a CRT display device, a keyboard / touch panel, etc., and accepts user operations and displays predetermined information. The storage device 24 includes, for example, an HDD / CD device. The communication device 26 can transmit and receive data to and from devices connected to the clean room network 12-1 and the office network 12-2 by TCP / IP, for example.
The control device 28 includes a CPU 30 and a memory 32 and controls each part constituting the substrate processing apparatus 14. The CPU 30 includes a timer (not shown), and can acquire information related to time such as the current time, for example.

  The substrate processing apparatus 14 has a server function (and client function) based on, for example, RDP (Remote Desktop Protocol) that exclusively permits remote access by installing an OS such as Windows 2003 server (registered trademark). doing.

FIG. 3 is a block diagram showing an outline of the configuration of the operation terminal 16. The operation terminal 16 includes, for example, a user interface device (UI device) 22, a storage device 24, a communication device 26, and a control device 28, and has a function as a computer. In the operation terminal 16, components that are substantially the same as those constituting the substrate processing apparatus 14 shown in FIG. 2 are denoted by the same reference numerals.
The management server 18 and the device 15 are also configured to have substantially the same configuration as the operation terminal 16.

  If the server function is not required, the operation terminal 16 is provided with a client function by installing an OS such as Windows XP professional (registered trademark) that can remotely access the substrate processing apparatus 14. May be.

As described above, the management server 18 is connected to the clean room network 12-1 and the office network 12-2.
Here, when the operation terminal 16 performs remote access (remote desktop) to the substrate processing apparatus 14, the management server 18 serves as a gateway machine having a function as a VPN server, the operation terminal 16, the substrate processing apparatus 14, and the like. It may be arranged to mediate the connection. In addition, the management server 18 allows the operation terminal 16 to remotely access the management server 18 and further allows the management server 18 to remotely access the substrate processing apparatus 14 (for example, a remote desktop chain). The remote access to the substrate processing apparatus 14 may be mediated.

FIG. 4 is a block diagram showing the configuration of the determination program 40 executed by the management server 18.
The determination program 40 includes a first determination unit 42, a connection information database (DB) 44, a second determination unit 46, and valid period data 48.

  The first determination unit 42 accepts a connection permission request (remote access permission request) for any of the substrate processing apparatuses 14 transmitted by any of the operation terminals 16 via the communication device 26, and receives connection information. Whether or not another operation terminal 16 is remotely accessing the substrate processing apparatus 14 that has been requested to permit connection by accessing the DB 44 is indicated in a connected device name 55 and a connected operation terminal name 56 (described later with reference to FIG. 5). Judgment based on. When the first determination unit 42 determines that the other operation terminal 16 is not remotely accessed, the first determination unit 42 displays a determination result that permits the operation terminal 16 that has transmitted the connection permission request to perform remote access exclusively. At the same time, information related to the accepted connection permission request (described later using FIG. 5) is output to the connection information DB 44. If the first determination unit 42 determines that another operation terminal 16 is performing remote access, the first determination unit 42 outputs information regarding the accepted connection permission request to the second determination unit 46.

  The connection information DB 44 is a database that is stored in, for example, the storage device 24 and is accessible by the first determination unit 42 and the second determination unit 46, and includes information included in the connection information table 50 illustrated in FIG. . The connection information table 50 (FIG. 5) is a table in which information about the operation terminal 16 that is remotely accessing the substrate processing apparatus 14 (including information related to the connection permission request) is summarized for each remote access. In the substrate processing system 10, for example, when n independent remote accesses are performed, the connection information table 50 includes connection information 52-1 to 52-n.

  The connection information 52-1 to 52-n includes a connection device type 54, a connection device name 55, a connection operation terminal name 56, a connection user name 57, and a connection time 58, respectively. The connected device type 54 is information indicating the type of device that the operation terminal 16 is remotely accessing. The connected device name 55 is information indicating the name of the device that the operation terminal 16 remotely accesses, and is information that specifies the device that the operation terminal 16 remotely accesses. The connected operation terminal name 56 is information indicating the name of the operation terminal 16 that is performing remote access, and is information that identifies the operation terminal 16 that is performing remote access. The connected user name 57 is information indicating the name of the user who logged in when performing remote access with the operation terminal 16. The connection time 58 is information indicating the time when the operation terminal 16 starts remote access.

  When the second determination unit 46 (FIG. 4) receives the information regarding the connection permission request output from the first determination unit 42, the second determination unit 46 (FIG. 4) determines effective period data (a predetermined value to be described later) from the effective period data 48. ) Accept and determine whether another operation terminal 16 is remotely accessing the substrate processing apparatus 14 for which a connection permission request has been made, based on the valid period data. When the second determination unit 46 determines that the other operation terminal 16 is not remotely accessed, the second determination unit 46 displays a determination result that permits the operation terminal 16 that has transmitted the connection permission request to perform remote access exclusively. In addition to outputting, information regarding the accepted connection permission request is output to the connection information DB 44. If the second determination unit 46 determines that another operation terminal 16 is performing remote access, the second determination unit 46 outputs the determination result as it is.

  The valid period data 48 is data indicating a period (valid period) during which the operation terminal 16 can continue remote access to the substrate processing apparatus 14, and is stored in the storage device 24, for example. For example, when the time during which the operation terminal 16 can connect to the substrate processing apparatus 14 (elapsed time after login) is limited to 2 hours, the valid period data 48 is stored as information indicating that the valid period is 2 hours. Has been. Note that the period during which remote access can be continued (valid period) can be extended (continuous connection) as will be described later with reference to FIG.

Next, the operation of the substrate processing system 10 will be described.
FIG. 6 is a chart showing the operation of the substrate processing system 10 when the operation terminal 16 requests the management server 18 for permission to remotely access the substrate processing apparatus 14.
As shown in FIG. 6, in step 100 (S100), the operation terminal 16 requests the management server 18 to permit connection (remote access) to the substrate processing apparatus 14 (connection permission request).

  In step 102 (S102), the management server 18 allows the operation terminal 16 (other operation terminal 16) other than the operation terminal 16 that has requested connection permission in S100 to remotely access the substrate processing apparatus 14 that has received the connection permission request. Is determined based on each of the connected device name 55 and the connected operation terminal name 56 in the connection information table 50. If another operation terminal 16 is performing remote access, the process proceeds to S104. In other cases, the process proceeds to S106.

  In step 104 (S104), the management server 18 determines whether another operation terminal 16 is remotely accessing the substrate processing apparatus 14 for which a connection permission request has been made, based on the valid period data 48, and performs another operation. When it is determined that the terminal 16 is not performing remote access, the process proceeds to S106, and when it is determined that another operation terminal 16 is performing remote access, the process proceeds to S116. For example, when the validity period data 48 indicates that the validity period is 2 hours, the management server 18 determines whether or not the difference between the current time obtained from a timer (not shown) and the connection time 58 is less than 2 hours. If the difference is 2 hours or less, it is determined that the other operation terminal 16 is remotely accessing, and if the difference exceeds 2 hours, the other operation terminal 16 is not remotely accessing. judge.

  In step 106 (S106), the management server 18 permits the operation terminal 16 that has requested connection permission to perform remote access, and adds connection information 52, which is information for identifying the permitted operation terminal 16, to the connection information table 50. to add.

  In step 108 (S108), the management server 18 makes a response for permitting connection (remote access) to the operation terminal 16 that has made the connection permission request (connection permission response).

  In step 110 (S110), the operation terminal 16 that has received the connection permission response requests the substrate processing apparatus 14 that is permitted to connect (connection request).

  In step 112 (S112), the substrate processing apparatus 14 that has received the connection request sends a response for completing the connection to the operation terminal 16 (connection response).

  In step 114 (S114), the operation terminal 16 displays the screen of the UI device 22 of the substrate processing apparatus 14 by the UI device 22.

  In step 116 (S116), the management server 18 specifies information (connection operation terminal name 56) for specifying the operation terminal 16 that has been successfully accessed remotely to the substrate processing apparatus 14 for which a connection permission request has been made, and information for specifying the user. The CPU 30 acquires (connection user name 57) from the connection information table 50.

  In step 118 (S118), the management server 18 transmits information specifying the operation terminal 16 that has been successfully accessed remotely to the substrate processing apparatus 14 that has made the connection permission request, to the operation terminal 16 that has made the connection permission request. At the same time, a response not accepting the connection (remote access) request is made (response not possible to connect).

  In step 120 (S120), the operation terminal 16 identifies information on the operation terminal 16 that has been successfully accessed remotely based on the information for identifying the operation terminal 16 received in step S118 (connection operation terminal name 56). The user device information (connection user name 57) is displayed by the UI device 22.

FIG. 7 is a chart showing the operation of the substrate processing system 10 when the operation terminal 16 requests the management server 18 for permission to remotely access the substrate processing apparatus 14.
As shown in FIG. 7, in step 200 (S200), the operation terminal 16 requests the management server 18 to permit remote access to the substrate processing apparatus 14 (connection permission request).

  In step 202 (S202), the management server 18 transmits a response permitting remote access to the substrate processing apparatus 14 to the operation terminal 16 (connection permission response).

In step 204 (S204), the operation terminal 16 transmits a request for continuing remote access to the substrate processing apparatus 14 to the management server 18 after a predetermined period (periodic update period) has elapsed after receiving the connection permission response ( Continuous connection request).
The regular update period is a predetermined period set in advance, and is shorter than the period during which the above-described remote access can be continued (valid period).

  In step 206 (S206), in response to the continuous connection request received from the operation terminal 16 that permits remote access, the management server 18 transmits a response permitting continued remote access (continuous connection permission response). .

  In step 208 (S208), the management server 18 updates the data at the connection time 58 to data indicating the time at which the continuous connection permission response is transmitted for the operation terminal 16 permitted to continue the remote access.

  In step 210 (S210), the operation terminal 16 transmits a request for continuing remote access to the substrate processing apparatus 14 to the management server 18 after a predetermined period (periodic update period) has elapsed after receiving the connection permission response ( Continuous connection request).

  In step 212 (S212), in response to the continuous connection request received from the operation terminal 16 that permits remote access, the management server 18 transmits a response permitting continued remote access (continuous connection permission response). .

  In step 214 (S214), the management server 18 updates the data at the connection time 58 to data indicating the time at which the continuous connection permission response is transmitted for the operation terminal 16 permitted to continue the remote access.

  In this way, when receiving a continuous connection request from the operation terminal 16 that permits remote access, for example, the management server 18 permits the remote access to be continued each time.

FIG. 8 is a chart showing the operation of the management server 18 when the operation terminal 16 transmits a request for releasing remote access to the management server 18.
As shown in FIG. 8, in step 300 (S300), when the UI device 22 is operated by the user to release (disconnect) the remote access, the operation terminal 16 issues a request to release (disconnect) the remote access. Transmit to the management server 18 (connection release request).

  In step 302 (S302), in response to the connection release request received from the operation terminal 16 that has permitted remote access, the management server 18 transmits a response permitting release of remote access (connection release response).

  In step 304 (S304), when the operation terminal 16 receives the connection release response, the UI device 22 displays that the remote access has been disconnected.

  In step 306 (S306), the operation terminal 16 notifies the management server 18 that the remote access has been disconnected (disconnection notification).

  In step 308 (S 308), the management server 18 deletes information (connection information 52) related to the operation terminal 16 whose remote access has been released (disconnected) from the connection information table 50.

FIG. 9 is a chart showing the operation of the substrate processing system 10 when a plurality of operation terminals 16 request the management server 18 to permit remote access to the substrate processing apparatus 14 without abnormality.
As shown in FIG. 9, in step 400 (S400), the operation terminal 16-1 requests the management server 18 to permit connection (remote access) to the substrate processing apparatus 14 (connection permission request). If remote access to the substrate processing apparatus 14 does not exist, the operation terminal 16-1 succeeds in remote access and occupies remote access to the substrate processing apparatus 14.

  In step 402 (S402), the management server 18 makes a response for permitting connection (remote access) to the operation terminal 16-1 that has made the connection permission request (connection permission response).

  In step 404 (S404), the operation terminal 16-1 receives the connection permission response and transmits a request to continue the remote access to the substrate processing apparatus 14 to the management server 18 after a predetermined period (periodic update period) has elapsed. (Continuous connection request) Here, the operation terminal 16-1 extends the period (effective period) during which the remote access can be substantially continued.

  In step 406 (S406), the operation terminal 16-2 requests the management server 18 to permit connection (remote access) to the substrate processing apparatus 14 (connection permission request).

  In step 408 (S408), the management server 18 transmits a response permitting the remote access to be continued in response to the continuous connection request received from the operation terminal 16-1 that permits remote access (continuous connection permission). response).

  In step 410 (S410), since the management server 18 has remote access to the substrate processing apparatus 14, the remote access to the substrate processing apparatus 14 that has requested connection permission to the operation terminal 16-2 has succeeded. In addition to transmitting information specifying the operating terminal 16 being connected, a response not accepting a connection (remote access) request is made (connection impossible response).

  In step 412 (S412), the operation terminal 16-1 receives the connection permission response and transmits a request to continue the remote access to the substrate processing apparatus 14 to the management server 18 after a predetermined period (periodic update period) has elapsed. (Continuous connection request) Here, the operation terminal 16-1 extends the period (effective period) during which the remote access can be substantially continued.

  In step 414 (S414), in response to the continuous connection request received from the operation terminal 16-1 that permits remote access, the management server 18 transmits a response permitting continued remote access (continuous connection permission). response).

  In step 416 (S416), the operation terminal 16-1 transmits a request to release (disconnect) remote access to the management server 18 (connection release request). That is, the operation terminal 16 that occupies remote access to the management server 18 is eliminated.

  In step 418 (S418), the management server 18 transmits a response permitting the remote access to be released in response to the connection release request received from the operation terminal 16-1 that has been permitted the remote access (connection release response). ).

  In step 420 (S420), the operation terminal 16-2 requests the management server 18 to permit connection (remote access) to the substrate processing apparatus 14 (connection permission request). Since there is no remote access to the substrate processing apparatus 14, the operation terminal 16-2 succeeds in remote access and occupies the remote access to the substrate processing apparatus 14.

  In step 422 (S422), the management server 18 makes a response permitting connection (remote access) to the operation terminal 16-2 that has requested connection permission (connection permission response).

FIG. 10 shows a substrate processing system when another operation terminal 16 requests the management server 18 to permit remote access to the substrate processing apparatus 14 after an abnormality has occurred in the operation terminal 16 that has not released remote access. 10 is a chart showing 10 operations.
In the chart shown in FIG. 10, the same reference numerals are assigned to the substantially same steps as those shown in FIG.
As shown in FIG. 10, in step 408 (S408), after receiving a response permitting the operation terminal 16-1 to continue remote access, a request for releasing (disconnecting) remote access is sent to the management server 18. For example, if a failure occurs in the operation terminal 16-1 before transmission, the management server 18 cannot receive a connection release request from anywhere.

  In step 500 (S500), the management server 18 did not receive a continuous connection request such as the processing of S404 from the operation terminal 16-1 that permitted remote access within the valid period (without receiving the continuous connection request). When the valid period has elapsed), information (connection information 52) regarding the operation terminal 16-1 that has permitted remote access is deleted from the connection information table 50. That is, it is considered that there is no operation terminal 16 that occupies remote access to the substrate processing apparatus 14 that was remotely accessed by the operation terminal 16-1 (initialization of the connection information 52).

  Therefore, in step 420 (S420), when the operation terminal 16-2 requests the management server 18 to permit connection (remote access) to the substrate processing apparatus 14 (connection permission request), remote access to the substrate processing apparatus 14 is performed. Therefore, the operation terminal 16-2 succeeds in remote access and occupies remote access to the substrate processing apparatus 14.

As described above, in the substrate processing system 10, each operation terminal 16 can remotely access the substrate processing apparatus 14 even if each operation terminal 16 is not arranged in the same clean room as the substrate processing apparatus 14.
In the above-described embodiment, the case where the substrate processing system 10 includes the substrate processing apparatus 14 that performs the film forming process on the semiconductor substrate has been described as an example. May be an exposure device, a coating device, a drying device, a heating device, or the like. Further, the substrate processing apparatus 14 may be an apparatus for processing a glass substrate such as an LCD device.

As described above, the present invention is characterized by the matters described in the scope of claims, but the following embodiments may be further employed.
(1) A substrate processing apparatus for processing a substrate, a group management apparatus for collecting and managing data transmitted while the substrate processing apparatus processes a substrate, and an analysis process for the data connected to the group management apparatus A plurality of operation terminals that perform a plurality of operation terminals, wherein the group management device responds to a connection status between another operation terminal and the substrate processing apparatus when a connection request is received from any one of the operation terminals. The substrate processing system is characterized by confirming whether the connection is possible.
(2) A group management apparatus that manages a substrate processing apparatus that processes a substrate and a plurality of operation terminals connected to the substrate processing apparatus, and transmits data to be transmitted while the substrate processing apparatus is processing a substrate. Collecting and when any of the plurality of operation terminals makes a connection request to the substrate processing apparatus, an operation for which a connection request is made according to a connection status between any of the operation terminals and the substrate processing apparatus A group management apparatus that checks whether or not a terminal is in a connectable state.
(3) One or more substrate processing apparatuses that process a substrate, and a server function that exclusively permits remote access, and remote access to the substrate processing apparatus via a network, display information. A plurality of operation terminals having a client function enabled, and a management server connected to the plurality of operation terminals via a network and managing remote access performed by the plurality of operation terminals, the management server Any one of a receiving unit that receives information specifying the operation terminal that has been successfully accessed remotely with respect to the substrate processing apparatus, a storage unit that stores information received by the receiving unit, and the operation terminal When the remote controller requests remote access, one of the other operation terminals is reset for the substrate processing apparatus requested for remote access. Based on information stored in the storage means, and when the determination means determines that remote access is being performed, based on information stored in the storage means And a control means for controlling to transmit to the operation terminal that has requested remote access information identifying the operation terminal that has been successfully accessed remotely with respect to the substrate processing apparatus that has been requested for remote access. A substrate processing system.
(4) A server function that exclusively permits remote access, and a plurality of client functions that enable remote access to a substrate processing apparatus that processes substrates via a network and display information. Receiving means for receiving information for identifying any one of the operating terminals, storage means for storing the information received by the receiving means, and requesting remote access when any of the operating terminals requests remote access Determination means for determining whether any of the other operation terminals is remotely accessing the substrate processing apparatus, based on information stored in the storage means, and the determination means performs remote access. If the substrate processing apparatus is requested to be remotely accessed based on the information stored in the storage means. Information specifying, the operating terminal remote access is successfully Te management server and a control means for controlling so as to be transmitted to the operation terminal that requested the remote access (group management device).

  As described above, the present invention can be used in a substrate processing system that manages a group of one or more substrate processing apparatuses.

It is a block diagram which shows the structural example of the substrate processing system which concerns on embodiment of this invention. It is a block diagram which shows the outline | summary of a structure of a substrate processing apparatus. It is a block diagram which shows the outline | summary of a structure of an operating terminal. It is a block diagram which shows the structure of the determination program performed by the management server. It is a graph which shows the outline | summary of a connection information table. It is a chart which shows operation | movement of a substrate processing system when the operation terminal requests | requires the permission which accesses a substrate processing apparatus remotely with respect to a management server. It is a chart which shows operation | movement of a substrate processing system when the operation terminal requests | requires the permission which accesses a substrate processing apparatus remotely with respect to a management server. It is a chart which shows operation | movement of a management server when the operation terminal transmits the request | requirement which cancel | releases remote access with respect to a management server. It is a chart which shows operation | movement of the substrate processing system when the operation server requests | requires the permission of remote access to a substrate processing apparatus without abnormality with respect to a management server. It is a chart which shows operation | movement of the substrate processing system when the other operation terminal requests | requires permission to perform remote access to a substrate processing apparatus with respect to a management server after abnormality has arisen in the operation terminal which has not released remote access.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Substrate processing system 12-1 Clean room network 12-2 Office network 14-1 to 14-4 Substrate processing apparatus 15-1 to 15-3 Equipment 16-1 to 16-4 Operation terminal 18 Management server 20 Substrate processing part 22 UI device 24 storage device 26 communication device 28 control device 30 CPU
32 memory 40 determination program 42 first determination unit 44 connection information DB
46 Second determination unit 48 Valid period data 50 Connection information tables 52-1 to 52-n Connection information 54-1 to 54-n Connection device types 55-1 to 55-n Connection device names 56-1 to 56-n Connection operation terminal names 57-1 to 57-n Connection user names 58-1 to 58-n Connection time

Claims (11)

A substrate processing apparatus for processing a substrate;
A group management device for collecting and managing data transmitted while the substrate processing apparatus is processing a substrate;
A substrate processing system having an operation terminal for remote access to the substrate processing apparatus,
The group management device includes:
Holds effective period data indicating a period during which the operation terminal can continue remote access to the substrate processing apparatus,
When there is a connection permission request from the operation terminal to the substrate processing apparatus, a difference between a current time and a connection time indicating a time when remote access is started is the effective period data according to a connection status of the substrate processing apparatus. As a result of determining whether another operation terminal is remotely accessing based on whether or not it is within the indicated validity period ,
If no other operation terminal is remotely accessing the substrate processing apparatus, a connection permission response for permitting remote access of the operation terminal is sent to the operation terminal, and information on the remotely accessed substrate processing apparatus is sent to the operation terminal. Display
If another operation terminal is remotely accessing the substrate processing apparatus, a connection failure response indicating that remote operation of the operation terminal is not possible is sent to the operation terminal, and information and users of other operation terminals remotely accessing The substrate processing system is characterized in that information for specifying is displayed on the operation terminal. A group management device that collects data to be transmitted while the substrate processing apparatus is processing a substrate, and transmits the data to an operation terminal that remotely accesses the substrate processing apparatus,
Holds effective period data indicating a period during which the operation terminal can continue remote access to the substrate processing apparatus,
When there is a connection permission request from the operation terminal to the substrate processing apparatus, a difference between a current time and a connection time indicating a time when remote access is started is the effective period data according to a connection status of the substrate processing apparatus. As a result of determining whether another operation terminal is remotely accessing based on whether or not it is within the indicated validity period ,
If no other operation terminal is remotely accessing the substrate processing apparatus, a connection permission response for permitting remote access of the operation terminal is sent to the operation terminal, and information on the remotely accessed substrate processing apparatus is sent to the operation terminal. Display
If another operation terminal is remotely accessing the substrate processing apparatus, a connection failure response indicating that remote operation of the operation terminal is not possible is sent to the operation terminal, and information and users of other operation terminals remotely accessing A group management apparatus, characterized in that information for specifying the information is displayed on the operation terminal. Furthermore, it has a connection information table including at least one of connected device type, connected device name, connected operation terminal name, connected user name, and connection time,
The group management apparatus according to claim 2, wherein it is determined whether another operation terminal is remotely accessing based on the connection device name and the connection operation terminal name. The group management device according to claim 2 , wherein the effective period can be extended after a predetermined period. A substrate processing apparatus for processing a substrate;
A group management device for collecting and managing data transmitted while the substrate processing apparatus is processing a substrate;
A remote access method in a substrate processing system having an operation terminal for remote access to the substrate processing apparatus,
The group management device includes:
Holds effective period data indicating a period during which the operation terminal can continue remote access to the substrate processing apparatus,
When there is a connection permission request from the operation terminal to the substrate processing apparatus, a difference between a current time and a connection time indicating a time when remote access is started is the effective period data according to a connection status of the substrate processing apparatus. Based on whether or not it is within the indicated validity period, it is determined whether or not another operation terminal is remotely accessing ,
If no other operation terminal is remotely accessing the substrate processing apparatus, a connection permission response for permitting remote access of the operation terminal is sent to the operation terminal, and information on the remotely accessed substrate processing apparatus is sent to the operation terminal. Display
If another operation terminal is remotely accessing the substrate processing apparatus, a connection failure response indicating that remote operation of the operation terminal is not possible is sent to the operation terminal, and information and users of other operation terminals remotely accessing A remote access method for causing the operation terminal to display information for identifying the user. 6. The remote access method according to claim 5 , wherein after the periodic update period has elapsed since the connection permission response was received, the operation terminal transmits a continuous connection request for continuing remote access to the substrate processing apparatus to the group management apparatus. In response to the continuous connection request received from the operation terminal that permits remote access, the group management device transmits a continuous connection permission response that permits continuation of remote access, and the time at which remote access is started for the operation terminal The remote access method according to claim 6 , wherein the connection time data indicating the update time is updated to data indicating the transmission time of the continuous connection permission response. The remote access method according to claim 6 , wherein the continuous connection request is repeated every periodic update period. And a plurality of operation terminals including a first operation terminal that has received the connection permission response or a continuous connection permission response that permits continuation of remote access.
The first operation terminal transmits a connection release request for releasing remote access to the substrate processing apparatus to the group management apparatus, and the group management apparatus releases remote access in response to the connection release request. The connection release response to be permitted is transmitted, and the connection permission request from the other operation terminal that is not the first operation terminal in a state where there is no remote access to the substrate processing apparatus, 6. The remote access method according to claim 5 , wherein remote access of the operation terminal is permitted. When an abnormality occurs in the first operation terminal and a period in which remote access to the substrate processing apparatus can be continued has elapsed, the group management apparatus occupies remote access to the substrate processing apparatus. The remote access method according to claim 9 , wherein the first operation terminal is not occupied and remote access of the other operation terminal is permitted in response to a connection permission request from another operation terminal that is not the first operation terminal. A substrate processing apparatus for processing a substrate;
A group management device for collecting and managing data transmitted while the substrate processing apparatus is processing a substrate;
A remote connection program executed in a substrate processing system having an operation terminal for remote access to the substrate processing apparatus,
When there is a connection permission request from the operation terminal to the substrate processing apparatus, depending on the connection status of the substrate processing apparatus, the difference between the current time and the connection time indicating the time when remote access is started is other operating terminal to determine whether or not the remote access based on whether it is within the effective period shown by the valid period data indicating the period during which it is possible to continue the remote access to the substrate processing apparatus Steps,
If no other operation terminal is remotely accessing the substrate processing apparatus, a connection permission response permitting remote access of the operation terminal is transmitted to the operation terminal, and information on the remotely accessed substrate processing apparatus is transmitted to the operation terminal. Steps to display
If another operation terminal is remotely accessing the substrate processing apparatus, a connection failure response indicating that remote access of the operation terminal is not possible is transmitted to the operation terminal, and information on the other operation terminals that are remotely accessed and Displaying information identifying the user on the operation terminal;
Remote connection program with.

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