JP2001306530A - Network system, device and method for performing remote access and computer-readable storage medium - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reliably prevent illegal remote access. SOLUTION: When remote access is started between a semiconductor exposure system and a server machine 150 or the like, the semiconductor exposure system acquires the latitude/longitude information of a place where the semiconductor exposure system is installed at present by using a GPS receiver 108 and the received GPS data (latitude/longitude information) is sent via a communication interface 109 and communications equipment 116 to the server machine 150 or the like. In the server machine 150 or the like, the latitude/longitude information of the device installation place, based on the received GPS data, is compared/collated with the latitude/longitude information of a user device installation place to which the remote access is to be permitted and when this information is judged as being unauthorized installation place data or invalid revised or forged GPS receiving data, the remote access is cut off.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a network system, a remote access execution device, a method, and a computer-readable storage medium, and is used particularly in a network construction worldwide, a semiconductor manufacturing factory scattered worldwide, and the like. It is suitable for preventing unauthorized access at the time of remote access such as remote maintenance management of the device.

[0002]

2. Description of the Related Art In recent years, not only general personal computers, but also devices for specific tasks (semiconductor manufacturing equipment, etc.) or mobile terminals have become remote access using public lines due to advances in network technology. It can be easily realized. By using the remote access technology, for example, the latest software can be downloaded via a communication line and used immediately, or if it is a device for a specific business, a 24-hour remote maintenance service can be used to investigate and correct problems. Various applications, such as timely realization without a man going to work or adjustment of apparatus parameters without a service man going to a place where the apparatus is installed, can be realized.

However, in recent years, with the development and spread of the network society, malicious third parties have entered the computer network due to theft and hacking of passwords, and have altered or deleted data, accessed confidential data, The number of serious damages such as information data leakage has been increasing.

[0004] In order to prevent damages caused by such unauthorized access to the network, various methods have conventionally been proposed. For example, when there is no applicable telephone number in the list of permitted telephone numbers by using the callback method of reconnecting from the remote access destination to the telephone number of which access is permitted, or using the notification of the caller ID of the permitted telephone number Uses a one-time password generator (a method that generates a password each time it is connected) using a method that disables connection, a counter synchronization method between the remote access client and server, and a challenge-response method that conforms to the ANSI standard. Access permission.

[0005]

However, software for network hacking and cracking distributed on the Internet and the like is becoming more and more powerful each year by hackers having advanced technology, and has been said to have high security. The method has been broken recently. For this reason, in order to take a drastic measure against unauthorized access, there is a need to provide an unauthorized access prevention system that cannot absolutely or physically crack.

The present invention has been made in view of the above circumstances, and has as its object to prevent unauthorized access without fail.

[0007]

A network system according to the present invention is a network system which enables remote access between predetermined devices, wherein one of the predetermined devices has its own location information. And a transmitting unit for transmitting the position information obtained by the position information obtaining unit, wherein the other of the predetermined devices is the position information transmitted by the transmitting unit. , And matching means for checking whether or not the position information received by the receiving means is within a predetermined range.

[0008] A remote access execution device according to the present invention is a remote access execution device for performing remote access with a predetermined device, wherein the position information obtaining means obtains position information of its own device; And transmitting means for transmitting the position information acquired by the position information acquiring means to the predetermined device at the time of remote access during the period.

[0009] A remote access execution device of the present invention is a remote access execution device for performing remote access to a predetermined device, and at the time of remote access to the predetermined device, position information of the predetermined device is obtained. , And matching means for checking whether or not the position information received by the receiving means is within a predetermined range.

[0010] The network system of the present invention comprises:
A network system enabling remote access between predetermined devices, wherein one of the predetermined devices is obtained by an ID information obtaining unit that obtains ID information of its own device, and is obtained by the ID obtaining unit. Transmitting means for transmitting the ID information, wherein the other one of the predetermined devices is a receiving means for receiving the ID information transmitted by the transmitting means, and the ID information received by the receiving means. And a matching means for checking whether or not the ID is a predetermined ID.

[0011] A remote access execution device according to the present invention is a remote access execution device for performing remote access with a predetermined device.
It is characterized in that it comprises an information obtaining means and a transmitting means for transmitting the ID information obtained by the ID information obtaining means to the predetermined device at the time of remote access between the predetermined device.

[0012] The remote access execution device of the present invention is a remote access execution device for performing remote access with a predetermined device, and the ID information of the predetermined device at the time of remote access with the predetermined device. And a matching unit for checking whether or not the ID based on the ID information received by the receiving unit is a predetermined ID.

Further, the network system of the present invention comprises:
A network system that enables remote access between predetermined devices, wherein one of the predetermined devices includes a position information obtaining unit that obtains first position information of the own device, ID information acquisition means for acquiring ID information in which the two pieces of position information are combined in advance, and transmission means for transmitting the first position information and the ID information,
The other device of the predetermined device is a receiving unit that receives the first position information and the ID information transmitted by the transmitting unit, and is combined with the first position information and the ID information. It is characterized in that it comprises a collating means for collating with the second position information.

[0014] The remote access execution device of the present invention is a remote access execution device for performing remote access with a predetermined device, and a position information obtaining means for obtaining first position information of the own device; ID information acquisition means for acquiring ID information in which the second position information is combined in advance, and at the time of remote access between the predetermined device, the first position information and the ID information are stored in the predetermined device. And a transmitting means for transmitting the data to the computer.

[0015] The remote access execution device of the present invention is a remote access execution device for performing remote access with a predetermined device, and performs a first access of the predetermined device at the time of remote access with the predetermined device. Receiving means for receiving ID information in which the position information of the predetermined device and the second position information of the predetermined device are combined in advance, and the second position combined with the first position information and the ID information It is characterized in that it has a collating means for collating information.

A remote access execution method according to the present invention is a remote access execution method for performing remote access with a predetermined device, comprising: a position information obtaining procedure for obtaining position information of the own device; And transmitting a location information acquired by the location information acquisition procedure to the predetermined device at the time of remote access.

[0017] A remote access execution method according to the present invention is a remote access execution method for performing remote access with a predetermined device, wherein when remote access is performed with the predetermined device, position information of the predetermined device is obtained. And a collation process for collating whether or not the position information received by the reception process is within a predetermined range.

A remote access execution method according to the present invention is a remote access execution method for performing remote access with a predetermined device, and includes an ID for acquiring ID information of its own device.
It is characterized in that an information acquisition process and a transmission process of transmitting the ID information acquired by the ID information acquisition process to the predetermined device at the time of remote access between the predetermined device are performed.

A remote access execution method according to the present invention is a remote access execution method for performing remote access with a predetermined device, wherein when remote access is performed with the predetermined device, ID information of the predetermined device is obtained. And a collation process for collating whether the ID based on the ID information received in the reception process is a predetermined ID.

A remote access execution method according to the present invention is a remote access execution method for performing remote access with a predetermined device, wherein a position information obtaining process for obtaining first position information of the own device, An ID information acquisition process for acquiring ID information in which the second position information is combined in advance, and a remote access between the predetermined device and the first position information and the ID information. And a transmission process for transmitting the data.

[0021] The remote access execution method of the present invention is a remote access execution method for performing remote access with a predetermined device. Receiving the ID information in which the position information of the predetermined device and the second position information of the predetermined device are combined in advance, and the second position combined with the first position information and the ID information It is characterized in that a matching process for matching information is performed.

The computer-readable storage medium of the present invention is a computer-readable storage medium storing a program for performing remote access to a predetermined device, and is a storage location for obtaining location information of the own device. A program for executing an information acquisition procedure and a transmission procedure of transmitting the location information acquired by the location information acquisition procedure to the predetermined apparatus at the time of remote access between the predetermined apparatus. Having.

A computer-readable storage medium according to the present invention is a computer-readable storage medium storing a program for performing remote access to a predetermined device, and is a remote storage medium that can be connected to the predetermined device. At the time of access, a program for executing a reception process for receiving the position information of the predetermined device and a collation process for collating whether the position information received by the reception process is within a predetermined range is stored. It has features.

The computer readable storage medium of the present invention is a computer readable storage medium storing a program for performing remote access to a predetermined device, and is an ID for acquiring ID information of the own device. The information acquisition process and the ID acquired by the ID information acquisition process at the time of remote access between the predetermined device.
It is characterized in that a program for executing a transmission process of transmitting information to the predetermined device is stored.

A computer-readable storage medium according to the present invention is a computer-readable storage medium storing a program for performing remote access to a predetermined device, and is a remote storage medium between the computer and the predetermined device. At the time of access, a program for executing a receiving process of receiving the ID information of the predetermined device and a checking process of checking whether the ID based on the ID information received by the receiving process is a predetermined ID is stored. It is characterized by points.

The computer readable storage medium of the present invention is a computer readable storage medium storing a program for performing remote access to a predetermined device, and stores the first position information of its own device. Position information acquisition processing for acquiring, ID information acquisition processing for acquiring ID information of the own device in which the second position information of the own device is combined in advance, and remote access between the predetermined device,
It is characterized in that a program for executing a transmission process of transmitting the first position information and the ID information to the predetermined device is stored.

A computer-readable storage medium according to the present invention is a computer-readable storage medium storing a program for performing remote access to a predetermined device, and is a remote storage medium between the computer and the predetermined device. A receiving process for receiving, when accessing, ID information in which the first position information of the predetermined device and the second position information of the predetermined device are combined in advance; and the first position information and the ID information And a program for executing a collation process for collating the second position information combined with the second position information.

[0028]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of a remote access management system, a remote access management apparatus, a method, and a computer-readable storage medium according to the present invention will be described with reference to the drawings. In the present embodiment, as an example to which the present invention is applied, a semiconductor exposure apparatus such as a stepper (light reduction projection exposure apparatus) will be described as an apparatus installed at a geographically distant base. Then, by performing remote access with the server device 150 or the like,
Services such as remote maintenance are realized.

(First Embodiment) FIG. 1 shows a hardware system configuration of a semiconductor exposure apparatus. Reference numeral 101 denotes a console CPU, which controls console display of the semiconductor exposure apparatus and operation control by console command input. Reference numeral 102 denotes a RAM, in which the CPU 101 stores an execution program and data. 103 is R
OM, which stores a program.

An auxiliary storage device 104 is used for storing data and programs. Usually, software programs are stored in the auxiliary storage device 104. The software program generally configures a file system on the auxiliary storage device 104 and manages it as a file. As the auxiliary storage device 104, a magnetic disk device such as a hard disk is often used, but a flash memory, an NV-RAM (non-volatile memory), an EEP-RO
A software rewritable component such as M may be used.

Reference numeral 106 denotes a GPS interface, which communicates with a GPS receiver 108 described later. GPS
Interface 106 is generally RS232
Although a serial communication interface such as C is often used, a parallel interface or a SCSI interface may be used depending on the amount of data in the GPS communication. In addition, the GPS interface 10
In general, a non-procedural asynchronous system is used as a protocol for communication between the GPS receiver 6 and the GPS receiver 108, but a synchronous system or a binary procedure may be employed.

Reference numeral 105 denotes a console device. An operator (operator) receives a console CPU 1 from the device 105.
01 can be issued. As the display device of the console device 105, a CRT, a liquid crystal display device, an E
An L panel, a plasma display, or the like is used. In addition, as an input device of the console device 105, a keyboard for inputting a command by a key is often used. However, the input device may be a pen input device (tablet) using an electronic pen, a touch panel, or the like.

Reference numeral 108 denotes a GPS (Global Positioning Sys
tem) is a receiver, which decodes (decodes) a digital signal in a GPS radio wave from a GPS antenna for receiving a GPS radio wave from a satellite, and detects latitude and longitude information (positional information) and time at which the semiconductor exposure apparatus is installed. Get information.
When the GPS antenna is located in a place where radio waves do not reach, such as a clean room, the GPS antenna can be extended and laid to the outside where radio waves can reach.

A communication interface 109 communicates with an external communication network (such as a public telephone line network).
16 to realize remote access. The communication interface 109 is generally RS232C
In many cases, a serial communication interface such as USB is used, but a high-speed interface such as a parallel interface or USB is often used.

Reference numeral 116 denotes a communication device which realizes remote access to a remote device (the server 150 or the like) using a communication network 117 such as a public line. When the communication network 117 is an analog public line or the like, a device such as a modem is used as the communication device 116. However, when the communication network 117 is a digital public line such as an ISDN or a digital dedicated line, Uses a terminal adapter (TA) for digital communication. Alternatively, in the case of digital communication for a PHS or a mobile phone, a digital communication card for a PHS or a mobile phone may be used.

As a communication protocol for enabling remote access using the communication interface 109 and the communication device 116, a point-to-point connection (PPP connection) based on TCP / IP is generally used. As long as the protocol can be realized, the protocol may be realized by using a basic procedure used in AppleTalk, netware, personal computer communication, or the like.

Reference numeral 110 denotes a main CPU which controls various control devices constituting the semiconductor exposure apparatus as a whole. The main CPU 110 and the console CPU 101 are connected by a main CPU bus 107 and operate as a semiconductor exposure apparatus.

An illumination device 111 controls a light source for exposing a semiconductor manufacturing wafer. Reference numeral 112 denotes a reticle driving device for controlling loading and unloading of a reticle (photomask) on which a pattern to be exposed on a semiconductor manufacturing wafer is drawn. Reference numeral 113 denotes a stage driving device, which drives and controls the wafer on an XY stage or the like in order to expose a semiconductor manufacturing wafer by a step-and-repeat method. 114 is an alignment TV system,
This is for accurately controlling the position of a semiconductor manufacturing wafer. Each of these devices 111 to 114
It is under the control of the main CPU 110 by the peripheral device bus 115. In the present embodiment, the peripheral device bus 11
Although SCSI is used as 5, any general-purpose standard bus may be used.

Next, based on the flowchart of FIG.
A processing operation for preventing unauthorized access according to the first embodiment will be described. As a premise, from a user who has permitted remote access, the latitude and longitude information of the installation location of the semiconductor exposure apparatus of the user is obtained in advance. The server device 150 or the like that performs remote access with the semiconductor exposure apparatus includes the previously acquired latitude / longitude information of the installation location of the semiconductor exposure apparatus and the allowable latitude / longitude offset range (how long the movement is. Is stored in advance.

The program routine shown in the flowchart of FIG. 2 is executed when remote access between the semiconductor exposure apparatus and the server 150 or the like is started, and is repeated many times based on a certain standard during remote access. Be executed.

In the semiconductor exposure apparatus, the GPS receiver 108 embedded in the semiconductor exposure apparatus acquires the latitude and longitude information of the place where the semiconductor exposure apparatus is currently installed (step 201). The GPS reception data (latitude / longitude information) is transmitted to the communication interface 10.
9 and to the server 150 or the like, which is a remote access partner, via the communication device 116 (step 20).
2).

The server device 150 or the like receives the GPS reception data from the semiconductor exposure apparatus, and calculates the latitude / longitude information of the installation location based on the GPS reception data by adding an allowable latitude / longitude offset range. A comparison is made with the latitude / longitude information of the user device installation location to which remote access is to be permitted (step 203). As a result of the comparison and collation, if the latitude / longitude information of the device installation location based on the GPS reception data is out of the offset range, invalid installation location data or invalid GPS reception data due to tampering or forgery. Is determined (step 204), and the process proceeds to step 205 to disconnect the remote access.

By the operation described above, it is possible to prevent unauthorized access from a location other than the installation location of the semiconductor exposure apparatus for which remote access is permitted. In particular, in a semiconductor exposure apparatus and the like, since remote access is often used for network connection such as remote maintenance between bases located worldwide, the unauthorized remote access prevention method according to the present embodiment is effective. is there. In an actual operation, the method described in the present embodiment may be used in combination with a conventional method, for example, a callback method, a method for checking a called telephone number, a one-time password method, or the like.

(Second Embodiment) In the first embodiment, unauthorized access is prevented by transmitting the latitude and longitude information of the semiconductor exposure apparatus acquired by the GPS receiver 108. In the second embodiment, unauthorized access is prevented by transmitting an ID unique to the semiconductor exposure apparatus, which is written on an optical system component or a medium.

The basic configuration of the hardware system of the semiconductor exposure apparatus according to the second embodiment is the same as that described with reference to FIG. 1, but the GPS receiver 108 and the GPS interface 106 are not required. Device-specific I
ID reading means for reading D is required.

In the semiconductor exposure apparatus, the main CPU 110
In response to an instruction from the device, the lighting device 111 and the like are operated, and in the case of each device, for example, the reticle driving device 112, the device-specific ID written on the reticle is read, and the data of the ID is transmitted to the peripheral device bus 115. And the main C
The ID data is transferred to the PU 110.

The data of the ID is written from the main CPU 110 to the RAM 102,
The command is passed to the communication interface 109 and the communication device 116 in accordance with the command 1 and is transmitted to the remote access partner server 150 or the like via the communication network 117. The data of the ID may be, for example, data such as ASCII text. However, when writing to the reticle, some sort of encryption is performed, and the encrypted data is transmitted as it is. An embodiment in which decryption is performed using a secret key managed by a certain server 150 or the like is desirable.

FIG. 3 is a schematic view of a semiconductor exposure apparatus. 3, reference numeral 301 denotes an exposure light source of the illumination device 111; 302, a shutter for controlling an exposure amount; 303, a reticle serving as an original plate of a circuit pattern;
A reticle stage 305 for holding the reticle 03 is a reticle hand for carrying the reticle 303.

Reference numeral 306 denotes a projection lens, 307 denotes a wafer serving as a semiconductor substrate, and 308 holds the wafer 307.
A wafer Z stage for focusing on the exposure light source 301; 309, an XY stage for moving the wafer Z stage 308 in the XY directions; 310, a laser interferometer for measuring the position of the XY stage 309;
Reference numeral 1 denotes a wafer supply hand for supplying a wafer 307 for exposure processing to the wafer Z stage 308;
Is the wafer Z stage 3
This is a wafer collection hand for collecting from the wafer 08.

The optical apparatus such as the semiconductor exposure apparatus shown in FIG. 3 includes special components such as a reticle 303 and a reticle stage 304, or a wafer Z stage 308 and an XY stage 309. On the reticle 303, the stages 304, 308, 309, etc., micrometer units such as a reticle set mark, a reticle reference mark, a stage reference mark, a TTL-AF reference mark, or a wafer reference mark for aligning a reticle or a wafer. Pattern mark figure is written,
For reading these patterns and marks, various special optical system scopes for reading minute patterns are used.

In this embodiment, an ID unique to the apparatus is written as a fine pattern on a test reticle or a test wafer or a stage that is unlikely to be replaced semipermanently as the pattern or mark, and the ID is written in the optical system. By providing means for reading by a scope,
Generate D.

A special optical system device and an optical system reading device are required to generate the ID, and the ID cannot be obtained unless the reading means is always executed at the time of remote access. It is a powerful defense against tampering or unauthorized access by bypassing the ID reading means.

It is desirable that data such as a character pattern written on an optical component such as a reticle is obtained as character data by performing character recognition from a digital image read by the optical system scope. The character data described above may be directly written in ASCII code or the like as the device serial number or the like, and may be used as the ID. However, the character data obtained by encrypting the device serial number or the like using a secret key may be used as a special character such as a reticle. The encrypted ID is written in the optical system component and decrypted using the secret key managed on the server device 150 or the like, which is the remote access partner, and the ID of the ID for which remote access is permitted. It is desirable to adopt a configuration that performs comparison with a list.

Next, based on the flowchart of FIG.
A processing operation for preventing unauthorized access according to the second embodiment will be described. As a premise, a list of IDs for which remote access is permitted is stored in the server 150 or the like that performs remote access with the semiconductor exposure apparatus.

The program routine shown in the flowchart of FIG. 4 is executed when remote access between the semiconductor exposure apparatus and the server 150 or the like is started, and is repeated many times based on a certain standard during the remote access. Be executed.

In the semiconductor exposure apparatus, an ID unique to the apparatus written in a special optical system component such as a reticle is obtained (step 401). Then, the data of the ID is transmitted to the remote access partner server 150 or the like via the communication interface 109 and the communication device 116 (step 402).

The server 150 receives the data of the ID from the semiconductor exposure apparatus, and compares whether the ID is in a list of IDs permitting remote access.
Collation is performed (step 403). As a result of the comparison and collation, if the ID is not in the list, it is determined that the ID is invalid (step 404), and the process proceeds to step 405 to disconnect the remote access.

By the above-described operation, it is possible to prevent unauthorized access from a semiconductor exposure apparatus that cannot acquire an ID for which remote access is permitted. The means for reading the ID from a special optical system component using a special optical system device such as a scope is embedded in a remote access program so as to be performed as needed on a predetermined basis during remote access. That is, during the operation of the remote access program, the reading means always operates to read the ID, so it can be said that it is extremely difficult to bypass the unauthorized access prevention method in the present embodiment and perform remote access.

As described above, the ID encrypted using the secret key managed by the server 150 or the like as the remote access partner is written into a special optical system component such as a reticle. On the other hand, the ID transmitted on the communication protocol is encrypted, and the security level can be improved.

Conventionally, as a method for holding an ID unique to the device and a secret key of the one-time password method described above, the ID is written and held in a storage element (memory) made of a semiconductor. In the form, IDs and secret keys are written on parts or media that have special physical and optical characteristics, and they are read optically, so even a hacker with advanced technology forgeries IDs etc. And it is possible to effectively prevent unauthorized access.

(Third Embodiment) In the third embodiment, the latitude and longitude information acquired by the GPS receiver 108 as described in the first embodiment and the second embodiment are used. As described in the above section, an unauthorized access is prevented by transmitting an optical system component of the semiconductor exposure apparatus or an ID unique to the apparatus to a server 150 or the like, which is a remote access partner. Furthermore, by using a composite ID combining device installation location information as an ID, a multi-stage unauthorized access prevention method can be provided, and unauthorized access can be more reliably prevented.

A processing operation for preventing unauthorized access according to the third embodiment will be described with reference to the flowchart of FIG. The program routine shown in the flowchart of FIG. 5 is executed when remote access between the semiconductor exposure apparatus and the server device 150 or the like is started, and is repeatedly executed many times on a predetermined basis during the remote access. .

In the semiconductor exposure apparatus, the GPS receiver 108 embedded in the semiconductor exposure apparatus acquires the latitude and longitude information of the place where the semiconductor exposure apparatus is currently installed (step 501). Also, a composite ID is obtained by combining the device-specific manufacturing serial number or the like written on a special optical system component such as a reticle with the device installation location information (step 502). Then, the GPS reception data (latitude / longitude information) and the data of the composite ID are transmitted to the remote access partner server 150 or the like via the communication interface 109 and the communication device 116 (step 503).

The server 150 receives the GPS reception data and the data of the composite ID from the semiconductor exposure apparatus, and converts the latitude / longitude information of the installation location based on the GPS reception data into an allowable latitude / longitude offset. A comparison is made with the latitude / longitude information of the user device installation location to which the remote access is to be permitted calculated by adding the range (step 504). Further, it compares and checks whether or not the composite ID is in the list of IDs permitting remote access (step 506).

As a result of the comparison and collation, if the latitude / longitude information of the currently installed location of the semiconductor exposure apparatus deviates from the offset range, incorrect installation location data, falsification, or forgery Invalid GPS
It is determined that the data is received data (step 508), and the process proceeds to step 511 to disconnect the remote access. Similarly, if the ID is not in the list of IDs permitting remote access, it is determined that the ID is invalid (step 5).
09), the process proceeds to step 511 to disconnect the remote access. Further, if there is a difference between the device installation location information on the composite ID and the latitude / longitude information based on the GPS reception data (step 510), the process proceeds to step 511 to disconnect the remote access.

With the above-described operation, the effects described in the first and second embodiments can be obtained. In addition, by using a composite ID combining information on the installation location of the device, it is possible to prevent multi-stage unauthorized access. A method can be provided, and unauthorized access can be more reliably prevented.

It should be noted that the interface between the GPS receiver 108 and the device shown in FIG. 1 is not embedded in the device, but via a communication network such as a LAN.
An embodiment for transmitting data from the GPS receiver 108 is also feasible. For example, this is effective when a semiconductor exposure apparatus is installed in a clean room and it is difficult to lay an antenna from a GPS receiver embedded in the apparatus to a place where GPS radio waves can be received.

However, in this system, since the communication interface with the network is interposed between the GPS receiver 108 and the device, the illegal copy prevention system of this system is broken by falsification of network packet contents or decryption of encryption. There is a possibility that it will. The most powerful embodiment is
This is a mode in which an inseparable interface between the GPS receiver 108 and the device is secured inside the device.

(Other Embodiments) In order to operate various devices to realize the functions of the above-described embodiments, an apparatus connected to the various devices or a computer in a system is used in the above-described embodiments. Supply the software program code to realize the functions of
The present invention also includes those implemented by operating the various devices according to programs stored in a computer (CPU or MPU) of the system or apparatus.

In this case, the program code itself of the software realizes the functions of the above-described embodiment, and the program code itself and means for supplying the program code to the computer,
For example, a recording medium storing such a program code constitutes the present invention. As a recording medium for storing such a program code, for example, a floppy (registered trademark) disk, hard disk, optical disk, magneto-optical disk, C
D-ROM, magnetic tape, nonvolatile memory card, R
OM or the like can be used.

Further, when the computer executes the supplied program code, not only the functions of the above-described embodiment are realized, but also the OS (operating system) or other operating system in which the program code runs on the computer. It goes without saying that such program codes are also included in the embodiments of the present invention when the functions of the above-described embodiments are realized in cooperation with the application software or the like.

Further, after the supplied program code is stored in a memory provided in a function expansion board of a computer or a function expansion unit connected to the computer, the function expansion board or the function expansion unit is operated based on the instruction of the program code. It is needless to say that the present invention also includes a case where the CPU or the like provided for performs part or all of the actual processing, and the processing realizes the functions of the above-described embodiments.

The shapes and structures of the respective parts shown in the above-described embodiments are merely examples for embodying the present invention, and the technical scope of the present invention is thereby reduced. It should not be interpreted restrictively. That is, the present invention can be implemented in various forms without departing from the spirit or main features thereof.

[0074]

As described above, according to the present invention, it is possible to discover a remote access from a place other than a place where a remote access is permitted or a remote access from an apparatus having no ID for permitting the remote access. And unauthorized access can be prevented.

[Brief description of the drawings]

FIG. 1 is a diagram illustrating a hardware configuration of a semiconductor exposure apparatus.

FIG. 2 is a flowchart illustrating a processing operation according to the first embodiment.

FIG. 3 is a schematic view of a semiconductor exposure apparatus.

FIG. 4 is a flowchart illustrating a processing operation according to the second embodiment.

FIG. 5 is a flowchart illustrating a processing operation according to the third embodiment.

[Explanation of symbols]

 101 Console CPU 102 RAM 103 ROM 104 Auxiliary storage device 105 Console device 106 GPS interface 107 Main CPU bus 108 GPS receiver 109 Communication interface 110 Main CPU 111 Lighting device 112 Reticle drive 113 Stage drive 114 TV system 115 Peripheral equipment Bus 116 communication device 117 communication network 150 server machine

Claims (34)

[Claims] 1. A network system that enables remote access between predetermined devices, wherein one of the predetermined devices includes: a position information obtaining unit that obtains position information of its own device; A transmitting unit that transmits the position information acquired by the information acquiring unit, wherein the other device of the predetermined device receives the position information transmitted by the transmitting unit; A network system comprising: a collation unit configured to collate whether the received position information is within a predetermined range. 2. A remote access execution device for performing remote access with a predetermined device, comprising: a position information acquisition unit for acquiring position information of the own device; Transmitting means for transmitting the position information acquired by the position information acquiring means to the predetermined device. 3. The remote access execution device according to claim 2, wherein said position information acquiring means acquires said position information by a GPS receiver. 4. A remote access execution device for performing remote access with a predetermined device, wherein at the time of remote access with the predetermined device, receiving means for receiving position information of the predetermined device; A remote access execution device comprising: a verification unit configured to verify whether the position information received by the reception unit is within a predetermined range. 5. The remote access according to claim 4, further comprising remote access disconnecting means for disconnecting remote access when the position information is determined not to be within the predetermined range by the collating means. Execution device. 6. The remote access execution device according to claim 4, wherein said collation means repeatedly performs collation during remote access with said predetermined device. 7. A network system that enables remote access between predetermined devices, wherein one of the predetermined devices is an ID information acquisition unit that acquires ID information of its own device, and Transmitting means for transmitting the ID information obtained by the obtaining means, wherein the other of the predetermined devices receives the ID information transmitted by the transmitting means, and receives by the receiving means And a collating means for collating whether or not the ID based on the obtained ID information is a predetermined ID. 8. A remote access execution device for performing remote access with a predetermined device, comprising: ID information acquisition means for acquiring ID information of the own device; I above
Transmitting means for transmitting the ID information acquired by the D information acquiring means to the predetermined device. 9. The apparatus according to claim 8, wherein the ID information acquiring means reads and acquires an ID written at a predetermined location of the own device or at a predetermined position of a member used for the own device.
A remote access execution device according to claim 1. 10. The remote access execution device according to claim 8, wherein the remote access execution device is a semiconductor manufacturing device. 11. The apparatus according to claim 1, wherein the ID is written on at least one of a reticle, a lens, a wafer, a stage, and a reticle reference mark.
0. The remote access execution device according to item 0. 12. The remote access execution device according to claim 11, further comprising an optical system reading unit that optically reads the ID. 13. A remote access execution device for performing remote access with a predetermined device, comprising: receiving means for receiving ID information of the predetermined device at the time of remote access with the predetermined device; ID according to the ID information received by the receiving means
And a collating means for collating whether the ID is a predetermined ID. 14. The remote access according to claim 13, further comprising remote access disconnecting means for disconnecting a remote access when the collation means determines that the ID based on the ID information is not the predetermined ID. Execution device. 15. The remote access execution device according to claim 13, wherein the verification unit repeatedly performs verification during remote access to the predetermined device. 16. A network system that enables remote access between predetermined devices, wherein one of the predetermined devices is a position information acquisition unit that acquires first position information of the own device. ID for acquiring ID information in which the second position information of the own device is combined in advance
Information transmitting means for transmitting the first position information and the ID information, wherein the other of the predetermined devices is the first position information and the ID transmitted by the transmitting means. A network system comprising: receiving means for receiving information; and matching means for matching the first position information with the second position information combined with the ID information. 17. A remote access execution device for performing remote access with a predetermined device, wherein: a position information acquisition unit for acquiring first position information of the own device; and a second position information of the own device. ID information acquisition means for acquiring previously combined ID information; and transmission means for transmitting the first position information and the ID information to the predetermined device at the time of remote access between the predetermined device. A remote access execution device, comprising: 18. The remote access execution device according to claim 17, wherein said position information acquiring means acquires said first position information by a GPS receiver. 19. The remote control according to claim 17, wherein said ID information obtaining means reads and obtains an ID written at a predetermined position of the own device or a predetermined position of a member used in the own device. Access execution device. 20. A remote access execution device for performing remote access with a predetermined device, wherein at the time of remote access with the predetermined device, first position information of the predetermined device, and the predetermined position The second of the equipment
Receiving means for receiving ID information preliminarily combined with the first position information, and matching means for comparing the first position information with the second position information combined with the ID information A remote access execution device, characterized in that: 21. Remote access disconnection means for disconnecting remote access when the collation means determines that the first location information and the second location information combined with the ID information are different. 21. The remote access execution device according to claim 20, wherein: 22. The remote access execution device according to claim 20, wherein the collation unit repeatedly performs collation during remote access with the predetermined device. 23. A remote access execution method for performing remote access with a predetermined device, comprising: a position information obtaining procedure for obtaining position information of the own device; Transmitting the position information acquired by the position information acquisition procedure to the predetermined device. 24. A remote access execution method for performing remote access with a predetermined device, comprising: a reception process of receiving position information of the predetermined device at the time of remote access with the predetermined device; A collation process for collating whether or not the position information received by the reception process is within a predetermined range. 25. A remote access execution method for performing remote access with a predetermined device, comprising: an ID information acquisition process for acquiring ID information of the own device; I above
Transmitting the ID information obtained by the D information obtaining process to the predetermined device. 26. A remote access execution method for performing remote access with a predetermined device, comprising: a reception process of receiving ID information of the predetermined device at the time of remote access with the predetermined device; ID based on the ID information received by the reception process
A collation process for collating whether or not is a predetermined ID. 27. A remote access execution method for performing remote access with a predetermined device, comprising: a position information acquisition process for acquiring first position information of own device; and a second position information of own device. ID information acquisition processing for acquiring previously combined ID information, and transmission processing for transmitting the first position information and the ID information to the predetermined apparatus at the time of remote access with the predetermined apparatus. A remote access execution method characterized by performing: 28. A remote access execution method for performing remote access with a predetermined device, wherein at the time of remote access with the predetermined device, first position information of the predetermined device and the predetermined The second of the equipment
Performing a receiving process of receiving ID information in which the position information is combined in advance, and a matching process of comparing the first position information with the second position information combined with the ID information. Characteristic remote access execution method. 29. A computer-readable storage medium storing a program for performing remote access with a predetermined device, comprising: a position information obtaining procedure for obtaining position information of the own device; A program for executing a transmission procedure of transmitting the location information acquired by the location information acquisition procedure to the predetermined device at the time of remote access between the storage medium and the computer. 30. A computer-readable storage medium storing a program for performing remote access with a predetermined device, wherein a position of the predetermined device is set when remote access is performed with the predetermined device. A computer-readable storage storing a program for executing a receiving process for receiving information, and a matching process for checking whether or not the position information received by the receiving process is within a predetermined range. Medium. 31. A computer-readable storage medium storing a program for performing remote access with a predetermined device, comprising: an ID information acquisition process for acquiring ID information of the own device; At the time of remote access between
A computer-readable storage medium storing a program for executing a transmission process of transmitting the ID information acquired by the D information acquisition process to the predetermined device. 32. A computer-readable storage medium storing a program for performing remote access with a predetermined device, wherein the ID of the predetermined device is set when remote access is performed with the predetermined device. A receiving process for receiving information, and an ID based on the ID information received by the receiving process
A computer-readable storage medium storing a program for executing a collation process for collating whether or not is a predetermined ID. 33. A computer-readable storage medium storing a program for performing remote access with a predetermined device, comprising: a position information obtaining process for obtaining first position information of the own device; An ID information acquisition process for acquiring the ID information of the own device in which the second position information of the device is previously combined, and the first position information and the ID information at the time of remote access with the predetermined device. A computer-readable storage medium storing a program for executing a transmission process for transmitting to the predetermined device. 34. A computer-readable storage medium storing a program for performing remote access with a predetermined device, wherein the computer-readable storage medium stores a program for remote access with the predetermined device, 1 and the second information of the predetermined device.
A program that executes a receiving process of receiving ID information in which the position information of the above is combined in advance, and a checking process of checking the first position information and the second position information combined with the ID information A storage medium readable by a computer, characterized by storing therein.