JP5441530B2 - burner - Google Patents

Description

  The present invention relates to a burner. More specifically, the present invention relates to a burner for injecting a combustion flame containing a modifying compound that modifies the surface of a solid substance such as a polymer material, metal, or ceramic onto a solid surface.

The surface of a solid substance made of a polymer such as silicon rubber or polyethylene resin, metal, ceramic, or the like may be difficult to be subjected to surface treatment such as adhesion of another member, coating of a paint, or printing.
Thus, conventionally, a surface modification apparatus has been studied that modifies the surface of a solid substance to facilitate surface treatment such as adhesion, painting, and printing (see, for example, Patent Document 1).

  According to the surface reforming apparatus described in Patent Document 1, a modifier compound that modifies the surface of a solid substance is made into a gaseous state, and the gaseous modifier compound and air are mixed to form a fuel gas. The surface of the solid material is reformed by injecting a flame obtained by burning the fuel gas onto the solid material.

  In the above-mentioned patent document 1, as a burner for injecting a flame of fuel gas to a solid substance, a burner having a whole and having one injection port, or a rectangular shape as a whole and a plurality of injections along the longitudinal direction It is described that the mouths are provided in a line.

Japanese Patent No. 3557194

  In a burner having a single injection port as described in Patent Document 1, the portion near the center of the flame (also referred to as inner flame) injected from the injection port is difficult to come into contact with air, and carbon monoxide. There are many. On the other hand, the outer edge of the flame injected from the injection port of the burner and the portion close to the outer edge (also referred to as outer flame) are easy to come into contact with air. In addition, in the burner described in the above-mentioned Patent Document 1, even in a configuration in which a plurality of injection ports are arranged in parallel, flames injected from an injection port without an adjacent injection port, such as an end injection port, The external flame is easy to come into contact with air.

By the way, if a fuel gas containing a gaseous modifier compound is burned, it tends to be a radical combustion flame in an atmosphere where a large amount of carbon monoxide or the like is present, but it is oxidized in an atmosphere that easily comes into contact with air. It tends to be an oxide. If the oxide is agglomerated and adheres to the surface of the solid material, the properties of the solid material may be adversely affected.
Therefore, in order to modify the surface of the solid substance, it is necessary to burn the fuel gas containing the modifier compound in the gaseous state to form a radical combustion flame and to spray the combustion flame onto the solid substance.

However, when the burner described in Patent Document 1 is used, it is unclear which range of the fuel gas flame that is injected from the injection port is blown to the surface of the solid material. Since it is clear, there is a problem that it is difficult to understand the range in which the surface modification treatment of the solid substance can be performed.
In addition, as described above, among the flames of the fuel gas injected from the injection port of the burner described in Patent Document 1, oxide is easily generated at the outer edge or near the outer edge. In the region where the outer edge or the portion near the outer edge is sprayed, sufficient surface modification is not performed. That is, when the burner having the above-described configuration is used, a surface modifying compound that cannot be contributed to the surface modification of the solid substance and is wasted is generated. In addition, with the above configuration, the entire region (processed region) where the surface modification process is to be performed may not be processed by performing a single spray process, so a fuel gas flame may be sprayed multiple times on the solid surface. It was necessary to blow a flame of fuel gas on the solid surface from multiple directions with multiple burners.

  The present invention has been completed based on the above-described circumstances, and can efficiently blow a flame of a gas containing a reforming compound onto a solid substance, and the range in which the reforming process can be performed is easily understood. The purpose is to provide a burner.

  In order to solve the above-mentioned problems, the present invention provides a gaseous state obtained by vaporizing a modifying compound having a metal atom, a metalloid atom, a non-metal atom, and an organic group and modifying the surface of a solid substance. A burner comprising an injection unit for spraying a flame of a fuel gas containing a reforming compound onto the surface of the solid substance, wherein the fuel gas is a combustible gas or air, a gas containing oxygen, and the gaseous gas The injection unit includes: a first injection unit that injects a flame in which the fuel gas is combusted; and a second injecting a flame in which a second gas containing a combustible gas is combusted. The injection parts are alternately arranged to form a multiple structure, and the second injection part is provided at the periphery of the first injection part.

  Since the burner of this invention is equipped with the injection part by which the 2nd injection part which injects the flame of the 2nd gas containing a combustible gas was distribute | arranged to the periphery of the 1st injection part which injects the flame of fuel gas The flame injected from the first injection unit is difficult to come into contact with the air not only at the center but also at the periphery and the periphery. Therefore, in the present invention, a radical combustion flame is injected from almost the entire area of the first injection portion of the burner, and the surface of the solid substance to which the radical combustion flame is injected is modified. As a result, according to the present invention, since the formation region of the first injection portion substantially coincides with the range where the surface modification treatment can be performed, the range where the modification treatment can be performed is easy to understand. In addition, according to the present invention, the oxide is not easily generated at the periphery and the vicinity of the periphery of the flame injected from the first injection unit, so that the solid material is oxidized on the surface of the solid material after the surface modification treatment. Will not be adversely affected by the adhesion.

  Further, according to the present invention, the surface of the solid material can be modified by injecting a flame in which the fuel gas is burned by arranging the first injection unit so as to coincide with a desired region of the solid material. . As a result, according to the present invention, there is no waste in the amount of fuel gas used, the number of spraying operations can be reduced, and work efficiency can be improved. In the present invention, the term “periphery” includes an inner peripheral edge and an outer peripheral edge.

As reference embodiment, the first injection unit is the form that has a shape and the corresponding shape of the treatment portion of the solid material being processed modification by the flame of the fuel gas of the solid substances.
With such a configuration, the surface of the solid substance can be reformed only by blowing once the flame in which the surface reforming gas is burned, so that the working efficiency is excellent.
The present invention may have the following configuration.

The fuel gas may contain 70% to 99% oxygen with respect to the volume of the fuel gas.
With such a configuration, the combustion efficiency can be improved when an inferior combustibility compound is used as the modifier compound.

The fuel gas may contain an auxiliary combustion gas for assisting combustion of the fuel gas.
With such a configuration, the combustion efficiency can be improved when an inferior combustibility compound is used as the modifier compound.

  ADVANTAGE OF THE INVENTION According to this invention, the flame of the gas containing a modification | reformation compound can be efficiently sprayed on a solid substance, and the burner which is easy to understand the range which can be reformed can be provided.

Schematic diagram illustrating a surface modification apparatus provided with the burner of Embodiment 1 Front view of burner viewed from jet side An electron micrograph of a surface to be treated of a solid material subjected to surface treatment using the burner of Embodiment 1 Electron micrograph of the treated surface of a solid material that has been surface treated using a conventional burner Schematic diagram illustrating a surface modification apparatus provided with the burner of Embodiment 2 Front view of burner viewed from jet side Front view of burner shown in other embodiment (2) Front view of burner shown in other embodiment (3)

<Embodiment 1>
A first embodiment embodying the present invention will be described with reference to FIGS.
The burner 30 of the present embodiment is for blowing a combustion flame of a fuel gas containing a modifying compound that modifies the surface of the solid substance S such as a polymer material, metal, or ceramic onto the surface of the solid substance S.
As shown in FIG. 1, the surface modification apparatus 10 including the burner 30 according to the present embodiment includes a vaporization chamber 12 that houses and vaporizes a modified compound, air or a flammable gas, and a modified compound in a gaseous state. A transfer unit 17 that transfers the surface reforming gas from the vaporization chamber 12 and a mixing chamber 18 that mixes the surface reforming gas and a gas containing oxygen to form a fuel gas are provided.

The modifying compound accommodated in the vaporizing chamber 12 is a compound having an action of modifying the surface of the solid substance S to facilitate processing such as painting, printing, and adhesion.
As the modifying compound, it is preferable to use a compound which is liquid at normal temperature (5-35 ° C.) or a low boiling point having a boiling point of 200 ° C. or less. A compound in which one or more organic groups are bonded to a metal atom is used.

  The metal atoms contained in the modified compound include aluminum, hafnium, indium, iridium, iron, nickel, niobium, lead, ruthenium, tantalum, tin, titanium, vanadium, zirconium, beryllium, cadmium, chromium, cobalt, gold, mercury , Rhenium, thallium, and zinc. Examples of the metalloid atom contained in the modified compound include arsenic, boron, germanium, antimony, and silicon. Examples of the nonmetal atom contained in the modified compound include phosphorus.

  Examples of the organic group contained in the modified compound include a carbonyl group (C═O), an acyl group, an alkoxy group, an alkyl group, an alkenyl group, a phenyl group, an alkylphenyl group, an alkylamino group, and a polyfluoroalkyl group. . The modified compound used in the present invention includes one or more of these organic groups. The modifying compound may have a ligand such as carbon monoxide, halogen, phosphorus compound, or sulfur compound in addition to these organic groups.

Examples of the acyl group include an acetyl group and an acetylaceto group. Examples of the alkoxy group include a methoxy group, an ethoxy group, an n-propoxy group, an i-propoxy group, an n-butoxy group, an i-butoxy group, and a sec butoxy group. Tert-butoxy group, and the like. Examples of the alkyl group include linear, branched, and cyclic alkyl groups having 1 to 6 carbon atoms, such as a methyl group, an ethyl group, a propyl group, a butyl group, a hexyl group, and a cyclohexyl group. Examples of the alkenyl group include an allyl group, a propenyl group, and a cyclopentadienyl group. Examples of the alkylphenyl group include a methylphenyl group, an ethylphenyl group, a propylphenyl group, and a butylphenyl group. The alkyl group bonded to the phenyl group may be linear or branched. Examples of the alkylamino group include a dimethylamino group and a diethylamino group. Examples of the polyfluoroalkyl group include those in which part or all of hydrogen in an alkyl group such as a trifluoromethyl group (—CF ₃ ) is replaced with fluorine.

Specific examples of the modifying compound include Al (O—secC ₄ H ₉ ) ₃ , (CH ₃ ) ₃ Al, (C ₂ H ₅ ) ₃ Al, (C ₂ H ₅ ) ₂ Be, As (O—C _{2 H 5) 3, B (} O-CH 3) 3, B (O-C 2 H 5) 3, B (O-iC 4 H 9) 3, (n-C 4 H 9) 2 B (OH) , tricyclohexyl boron _{[(C 6 H 13) 3} B], (C 2 H 5) 2 Be, (C 2 H 5) 2 Cd, Cr (C 2 H 5 -C 6 H 5) 2, Ge (O _{-C 2 H 5) 4, Ge} (O-nC 3 H 7) 4, Ge (O-tertC 4 H 9) 4, Hf (O-tertC 4 H 9) 4, In (O-CH 3) 3, ethylcyclopentadienyl (1,5-cyclooctadiene) iridium _{[Ir (C 5 H 4 C} 2 H 5) (C 8 _{12)], Fe (CO)} 5, Ni (CO) 4, Nb (O-C 2 H 5) 5, Nb (O-secC 4 H 9) 5, PO (O-CH 3) 3, PO (O _{-C 2 H 5) 3, PO} (O-secC 4 H 9) 3, P (O-CH 3) 3, P (O-secC 4 H 9) 3, Pb (O-iC 3 H 7) 2, bis (ethyl cyclopentadienyl) ruthenium _{[Ru (C 5 H 4 C} 2 H 5) 2], Sb (O-nC 3 H 7) 3, Ta (O-C 2 H 5) 5, diacetyl - Jibutokishisuzu _{[Sn (OC 4 H 9)} 2 (C 5 H 7 O 2) 2], Ti (O-iC 3 H 7) 4, Ti (O-secC 4 H 9) 4, Ti [N (CH 3) 2 ] ₄ , VO (O—C ₂ H ₅ ) ₃ , Zr (O-tertC ₄ H ₉ ) ₄ , (C H ₃ ) ₆ Si ₂ O and the like.
Of these modified compounds, PO (O—C ₂ H ₅ ) ₃ and (CH ₃ ) ₆ Si ₂ O are preferred.

  Alcohols such as methanol, ethanol and butanol may be added to the modifying compound. The flame color can be changed by adding alcohol, and the amount of alcohol added is preferably 0.01 to 30% by mass with respect to the total mass of the reforming compound and the alcohol in terms of determining the quality of combustion. .

  In the vaporizing chamber 12, a transfer unit that transfers a surface reforming gas including a gas introducing unit 16 that introduces air or a combustible gas, a reforming compound in a gaseous state, and air or a combustible gas to the mixing chamber 18. 17 are attached.

  The gas introducing unit 16 for introducing air or combustible gas is a liquid phase containing the liquid reforming compound in the vaporization chamber 12 from the first gas tank 15 on the left side in the drawing in which air or combustible gas is accommodated. 13 is provided. As a result, air or combustible gas is bubbled into the liquid phase 13 from the first gas tank 15 through the gas introduction part 16. The amount of air or combustible gas introduced can be controlled by operating a first valve 15A provided between the first gas tank 15 and the vaporizing chamber 12.

  As combustible gases, hydrogen gas, hydrogen sulfide gas, carbon monoxide, methane, acetylene, ethane, ethylene, propane, propylene, isobutane, normal butane, isopentane, normal pentane, diethyl ether, hexane, heptane, octane, benzene Or a boron compound such as diborane can be used. Of these combustible gases, propane gas is preferred.

  The transfer unit 17 is provided from the gas phase 14 to the mixing chamber 18 of the vaporization chamber 12. The amount of the surface reforming gas transferred to the mixing chamber 18 by the transfer unit 17 can be controlled by a second valve 17A provided between the vaporizing chamber 12 and the mixing chamber 18.

  The mixing chamber 18 includes a gas supply unit 21 that supplies a gas containing oxygen, and a first transfer pipe 22 that transfers a fuel gas obtained by mixing a surface reforming gas and a gas containing oxygen to the burner 30. Is provided.

  A gas containing oxygen supplied by the gas supply unit 21 is accommodated in a second gas tank 20 on the right side of the figure, and a third valve 20A provided between the second gas tank 20 and the mixing chamber 18 is used. The supply amount is controlled.

As the gas containing oxygen, a gas containing oxygen such as air or oxygen can be used. The oxygen concentration in the gas containing oxygen is preferably set in consideration of the combustion efficiency of the reforming compound used.
In the present invention, the amount of oxygen with respect to the volume of the fuel gas is preferably 70% or more and 99% or less. This is because when oxygen is contained in the above-described ratio, the combustion efficiency of the fuel gas can be improved even when a reforming compound having inferior combustibility is used.

  Now, the burner 30 of this embodiment is provided at one end of the first transfer pipe 22 provided in the mixing chamber 18. As shown in FIG. 2, the burner 30 includes a first injection part 32 that is circular in a front view, and an annular second injection part 33 that surrounds the outer periphery of the first injection part 32. The injection part 31 of a double structure (multiple structure) is provided. The circular first injection unit 32 itself functions as the injection port 32A. In the second injection unit 33, a plurality of circular injection ports 33A are provided so as to surround the first injection unit 32.

The first injection unit 32 is connected to the first transfer pipe 22 that transfers the fuel gas, and a flame in which the fuel gas is burned is injected.
The 2nd injection part 33 is continued from the 2nd transfer pipe 46 which transfers 2nd gas containing flammable gas and gas containing oxygen, and the flame which burned the 2nd gas is injected. It has become so.

As the flammable gas contained in the second gas, the same flammable gas as contained in the surface modified gas can be used. For the flammable gas contained in the second gas and the surface modified gas, Different or the same combustible gas may be included, or two or more of them may be combined.
As the gas containing oxygen contained in the second gas, a gas similar to the gas containing oxygen contained in the fuel gas can be used, and the gas containing oxygen contained in the second gas and the gas contained in the fuel gas can be used. The gas containing oxygen may be different or the same, or two or more of them may be combined.

The combustible gas supply unit 41 is provided from the third gas tank 42 containing the combustible gas to the place where it joins with the oxygen supply unit 40 for supplying oxygen or air, and is connected to the second transfer pipe 46. . The combustible gas supply unit 41 is provided with a fourth valve 41 </ b> A that controls the amount of combustible gas supplied from the third gas tank 42.
The oxygen supply section 40 is connected to the second transfer pipe 46 from the fourth gas tank 43 that stores oxygen or air, and controls the amount of oxygen or air supplied from the fourth gas tank 43. The valve 43A is provided.

  Examples of the material constituting the solid substance S to which the fuel gas flame injected from the injection unit 31 is sprayed include rubbers such as silicon rubber, fluorine rubber, natural rubber, neoprene rubber, chloroprene rubber, urethane rubber, and acrylic rubber. , Various polyethylene resins, polypropylene resins, modified polypropylene resins, polymethylpentene resins, polyester resins, polycarbonate resins, epoxy resins, phenol resins, cyanate resins, urea resins, guanamine resins, etc., aluminum, magnesium, stainless steel, Metal materials such as nickel, chromium, tungsten, gold, copper, iron, silver, zinc, tin, lead, titanium oxide, zirconium oxide, zinc oxide, indium oxide, tin oxide, silica, talc, calcium carbonate, lime, zeolite, Gold, silver, copper, sub , Nickel, tin, lead, solder, glass, materials such as ceramics. The solid substance S may be composed of one kind of material or may be composed of two or more kinds of materials.

  The form of the solid substance S to be reformed by spraying a fuel gas flame has, for example, a planar structure such as a plate shape, a sheet shape, a film shape, a tape shape, a strip shape, a panel shape, and a string shape. It may have a three-dimensional structure such as a cylindrical shape, a columnar shape, a spherical shape, a block shape, a tube shape, a pipe shape, an uneven shape, a film shape, a fiber shape, a fabric shape, a bundle shape, etc. It is not limited to.

The form of the solid substance S may be a composite structure in which the structure exemplified above is combined with a metal part, a ceramic part, a glass part, a paper part, a wooden part, or the like.
If the shape of the solid substance S is matched with the shape of the first injection unit 32, the surface of the solid substance S can be modified by blowing a flame in which the surface-modified gas is burned once. Excellent.

Next, the modification method using the surface modification apparatus 10 provided with the burner 30 of this embodiment is demonstrated.
First, air or combustible gas stored in the first gas tank 15 is introduced into the vaporization chamber 12. Air or combustible gas is introduced from the first gas tank 15 through the gas introduction unit 16 into the liquid phase 13 of the vaporization chamber 12 by bubbling (a bubbling process). The reforming compound contained in the liquid phase 13 changes (vaporizes) from the liquid state to the gas state even when the air or the combustible gas is not bubbled. In this embodiment, the air or the combustible gas is vaporized. By bubbling in the liquid phase 13 of the chamber 12, the reformed compound in the liquid state is agitated and vaporization is promoted, and the reformed compound in the gas state can always be brought close to the saturated vapor pressure state.

  The reforming compound vaporized from the liquid state to the gas state and the air or combustible gas introduced by bubbling move to the gas phase 14 of the vaporization chamber 12. The gaseous reforming compound and air or combustible gas that have moved to the vapor phase 14 of the vaporization chamber 12 are transferred toward the mixing chamber 18 through a transfer portion 17 attached to the upper portion of the vaporization chamber 12.

  In the present embodiment, since the air or combustible gas and the reformed compound in the gas state are mixed in the vaporization chamber 12, the mixing ratio of the reformed compound in the gas state and air or the combustible gas is set to a predetermined ratio. be able to.

In the mixing chamber 18, the gas containing oxygen supplied from the second gas tank 20 via the gas supply unit 21 and the surface reforming gas containing air or the combustible gas and the reforming compound in a gaseous state are mixed. Fuel gas.
The fuel gas is transferred to the first injection unit 32 of the burner 30 through the first transfer pipe 22 provided in the mixing chamber 18.

  On the other hand, the second gas containing the combustible gas supplied from the combustible gas supply unit 41 and the gas containing oxygen supplied from the oxygen supply unit 40 passes through the second transfer pipe 46 to burner. It is transferred to 30 second injection units 33.

  Next, the jet part 31 of the burner 30 is directed toward the surface of the solid substance S, and a flame is blown. Then, the fuel gas transferred to the first injection unit 32 through the first transfer pipe 22 burns, and a flame generated by the combustion of the fuel gas is injected from the injection port 32A of the first injection unit 32. On the other hand, in the second injection unit 33, the second gas transferred to the second injection unit 33 through the second transfer pipe 46 is combusted, and from the injection port 33 </ b> A of the second injection unit 33. A flame generated by the combustion of the second gas is injected.

Since the second gas flame is injected from the injection port 33A of the second injection unit 33 so as to surround the periphery of the flame injected from the injection port 32A of the first injection unit 32, the first injection unit 32 In the flame injected from the above, no oxide is generated not only in the central part but also in the periphery and the vicinity of the periphery (see FIG. 3, details will be described later).
That is, in the present embodiment, a radical combustion flame is injected from the entire area of the first injection unit 32, and the surface of the solid substance S is reformed by spraying the radical combustion flame (processing step). ).

  The solid substance S that has been subjected to the modification treatment by the above-described method has an effect of improving the adhesiveness with a different kind of material that has been problematic in the past, an effect of improving wettability (hydrophilicity), and an antistatic property. Effects are given. That is, by performing the modification process with the surface modification apparatus 10, the solid substance S can be modified and the surface treatment such as adhesion, painting, and printing can be facilitated.

Next, the effect of this embodiment will be described.
The burner 30 of the present embodiment is an injection in which a second injection unit 33 for injecting a flame of a second gas containing a combustible gas is arranged on the periphery of the first injection unit 32 for injecting a fuel gas flame. Since the unit 31 is provided, the flame injected from the first injection unit 32 is difficult to come into contact with the air not only at the center but also at the periphery and the vicinity of the periphery.
Therefore, in this embodiment, a radical combustion flame is injected from almost the entire area of the first injection unit 32 of the burner 30, and the surface of the solid material S to which the radical combustion flame is injected is modified. As a result, according to the present embodiment, the formation region of the first injection unit 32 substantially coincides with the range in which the surface modification process can be performed, and thus the range in which the modification process can be performed is easy to understand.

  By the way, when a surface reforming process is performed on, for example, a glass for a spectacle lens using a burner having a conventional configuration (for example, the one described in Patent Document 1), the periphery of the flame of the fuel gas In addition, the vicinity of the periphery may come into contact with air to generate oxides, which may adhere to the surface of the glass (the surface to be processed S1: the solid material S corresponds to the portion to be processed S1). The white granular thing shown in FIG. 4 is an oxide. When such oxide deposition occurs, the glass is irregularly reflected, causing inconvenience. However, according to the present embodiment, it is difficult for oxides to be generated at the periphery and the vicinity of the periphery of the flame injected from the first injection unit 32, so that the oxide does not adhere to the surface S1 of the solid substance S (FIG. 3). As a result, according to the present embodiment, there is no adverse effect caused by the oxide adhering to the surface S1 of the solid material S after the surface modification treatment. This point will be described in detail in a test example described later.

  Further, the burner 30 of the present embodiment is disposed so that the first injection unit 32 coincides with a desired region of the solid substance S, and a flame in which the fuel gas is burned is injected, so that the surface of the solid substance S is modified. Can be quality. As a result, according to the present embodiment, the amount of fuel gas used is not wasted, the number of spraying operations can be reduced, and work efficiency can be improved.

<Test example>
(1) Test example 1
The surface modification treatment was performed under the following conditions using the above-described surface modification apparatus 10 including the burner 30 of the first embodiment.
(CH ₃ ) ₆ Si ₂ O (hexamethyldisiloxane) was used as the modifying compound, and propane gas was used as the gas for bubbling. As the gas containing oxygen, oxygen having an oxygen concentration in the gas of 80 to 85% by volume was used, and as the second gas, a mixed gas of propane gas and air was used. As the solid material S, a polypropylene plate was used.
The treated surface S1 of the polypropylene plate after the modification treatment was photographed with an electron microscope [manufactured by JEOL Ltd., electron beam microanalyzer (JXA-8600S type)] at a magnification of 10,000 times. The photograph taken is shown in FIG. The white line segment shown in the lower right of FIG. 3 indicates a length of 1 μm.
As shown in FIG. 3, no white granular material was observed on the treated surface S1 of the polypropylene plate subjected to surface modification using the burner 30 of the present invention.

(2) Test example 2
Surface modification treatment was performed in the same manner as in Test Example 1 except that a burner having one injection port (the one shown in FIG. 1 of Patent Document 1) was used. The treated surface of the polypropylene plate after the modification treatment was photographed with an electron microscope in the same manner as in Test Example 1. The photograph taken is shown in FIG. The white line segment shown in the lower right of FIG. 4 indicates a length of 1 μm.
As shown in FIG. 4, a white granular material was recognized in the entire surface of the treated surface of the polypropylene plate subjected to surface modification using a conventional burner, and a white lump of about 0.3 μm was also recognized. . It was confirmed by analysis (XPS analysis, FT-IR analysis) that the white particles and white lump were oxides of the modified compounds.

<Embodiment 2>
Next, a second embodiment of the present invention will be described with reference to FIGS. The same reference numerals are used for the parts having the same names as those in the first embodiment, and redundant descriptions of the structure, operation, and effects are omitted.
As shown in FIG. 6, the burner 30 of the present embodiment includes a first injection unit 32 having an oval shape in a front view, and an annular second injection unit 33 that surrounds the outer periphery of the first injection unit 32. A double-structure injection unit 31 is provided. The first injection unit 32 is provided with six circular injection ports 32A in parallel. In the second injection unit 33, a large number of circular injection ports 33A surround the first injection unit. Is provided.

  In the mixing chamber 18 of the surface reforming apparatus 10 including the burner 30 of the present embodiment, in addition to the gas supply unit 21 that supplies a gas containing oxygen and the first transfer pipe 22, the amount of combustion of the fuel gas is adjusted. An auxiliary combustion gas supply unit 51 that supplies auxiliary combustion gas is provided.

The auxiliary combustion gas supply unit 51 is provided from the fifth gas tank 50 containing the auxiliary combustion gas to the mixing chamber 18. The auxiliary combustion gas supply unit 51 controls the amount of auxiliary combustion gas supplied from the fifth gas tank 50. A sixth valve 50A is provided.
Examples of the auxiliary combustion gas include hydrocarbon gases such as methane, ethane, and butane. Other configurations are the same as those in the first embodiment.

Next, the surface modification method using the surface modification apparatus 10 provided with the burner 30 of this embodiment is demonstrated.
First, air or combustible gas stored in the first gas tank 15 is introduced into the liquid phase 13 of the vaporizing chamber 12 by bubbling. The reforming compound vaporized from the liquid state to the gas state and the air or combustible gas introduced by bubbling move to the gas phase 14 of the vaporization chamber 12. The gaseous reforming compound and air or combustible gas that have moved to the vapor phase 14 of the vaporization chamber 12 are transferred toward the mixing chamber 18 through a transfer portion 17 attached to the upper portion of the vaporization chamber 12.

In the mixing chamber 18, a gas containing oxygen supplied from the second gas tank 20 via the gas supply unit 21, a surface reforming gas containing air or a flammable gas and a reforming compound in a gaseous state, and a fifth gas tank The auxiliary combustion gas supplied from 50 through the auxiliary combustion gas supply unit 51 is mixed to obtain a fuel gas.
The fuel gas is transferred to the first injection unit 32 of the burner 30 through the first transfer pipe 22 provided in the mixing chamber 18.

  On the other hand, the second gas containing the combustible gas supplied from the combustible gas supply unit 41 and the gas containing oxygen supplied from the oxygen supply unit 40 passes through the second transfer pipe 46 to burner. It is transferred to 30 second injection units 33.

  Next, the jet part 31 of the burner 30 is directed toward the surface of the solid substance S, and a flame is blown. Then, the fuel gas transferred to the first injection unit 32 through the first transfer pipe 22 burns, and a flame generated by the combustion of the fuel gas is injected from the injection port 32A of the first injection unit 32. The On the other hand, in the second injection unit 33, the second gas transferred to the second injection unit 33 through the second transfer pipe 46 is combusted, and from the injection port 33 </ b> A of the second injection unit 33. A flame generated by the combustion of the second gas is injected.

  Also in the present embodiment, as in the first embodiment, the second gas flame from the injection port 33A of the second injection unit 33 so as to surround the periphery of the flame injected from the injection port 32A of the first injection unit 32. Therefore, the flame injected from the first injection part 32 generates no oxide not only in the central part but also in the periphery and the vicinity of the periphery.

Next, the effect of this embodiment will be described.
According to the present embodiment, in addition to the same effects as those of the first embodiment, the following effects are exhibited.
According to the present embodiment, the auxiliary combustion gas is mixed with the fuel gas in the mixing chamber 18, so that it is possible to improve the combustion efficiency even when the inferior combustibility is used as the modifier compound. An effect is obtained.

<Other embodiments>
The present invention is not limited to the embodiments described with reference to the above description and drawings. For example, the following embodiments are also included in the technical scope of the present invention.
(1) In the above embodiment, as the surface modification device 10, the one that introduces air or combustible gas into the liquid phase 13 of the vaporization chamber 12 by bubbling is shown, but the method of introducing air or combustible gas is bubbling. It does not have to be. In addition, a heater (not shown) may be attached to the vaporizing chamber 12 to promote vaporization of the modifying compound.

(2) In the above embodiment, the burner 30 including the injection unit 31 including the second injection unit 33 having the plurality of injection ports 33A is shown. For example, the second injection is performed as in the burner 30 illustrated in FIG. The part 33 may have one injection port 33A.
The injection unit 31 of the burner 30 in FIG. 7 includes a first injection unit 32 having an oval shape in a front view, and an annular second injection unit 33 that surrounds the outer periphery of the first injection unit 32. The first injection unit 32 is provided with eight circular injection ports 32A arranged in parallel, and in the second injection unit 33, an annular portion constituting the second injection unit 33 is an injection port. 33A.
(3) In the above embodiment, the burner 30 including the dual-structure injection unit 31 in which the second injection unit 33 is arranged on the outer peripheral edge of the first injection unit 32 is shown. The multiple structure described above may be used, or the second injection unit 33 may be disposed on both the inner and outer peripheral edges of the first injection unit 32.
Specifically, as shown in FIG. 8, in order from the inside, the annular second injection unit 33 that surrounds the outer periphery of the circular hole in front view, and the outer periphery of the second injection unit 33 are surrounded. The burner 30 which has the injection part 31 which makes the 1st injection part 32 of a ring shape and the 2nd injection part 33 surrounding the outer periphery of the 1st injection part 32 overlap, and makes | forms a triple structure may be sufficient.
In addition, the shape of the injection part 31 may be an ellipse or a shape other than a circle, and can be selectively used depending on the shape of the solid substance S or the shape of the processing surface.

DESCRIPTION OF SYMBOLS 30 ... Burner 31 ... Injection | pouring part 32 ... 1st injection part 33 ... 2nd injection | emission part S ... Solid substance S1 ... To-be-processed surface (to-be-processed part)

Claims (4)

A fuel gas flame containing a gaseous reforming compound having a metal atom, a metalloid atom, a non-metal atom, and an organic group, and vaporizing a reforming compound that modifies the surface of a solid substance. A burner comprising an injection part for spraying on the surface of a substance,
The fuel gas includes a combustible gas or air, a gas containing oxygen, and the gaseous reforming compound,
The injection unit alternately includes a first injection unit that injects a flame in which the fuel gas is combusted and a second injection unit that injects a flame in which a second gas containing a combustible gas is combusted. Arranged to form a multiple structure,
The burner characterized in that the second injection part is arranged on the periphery of the first injection part. The burner according to claim 1, wherein the first injection unit has an oval shape in a front view . The burner according to claim 1 or 2, wherein the fuel gas contains 70% or more and 99% or less oxygen with respect to the volume of the fuel gas. The burner according to any one of claims 1 to 3, wherein the fuel gas includes an auxiliary combustion gas for assisting combustion of the fuel gas.

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