JP4904433B1 - Surface modification processing equipment - Google Patents

Abstract

Provided is a surface reforming apparatus capable of injecting a flame burned in a state where the apparatus is miniaturized and a modifier compound and a fuel gas are uniformly mixed.
A surface modification treatment apparatus 10 according to the present invention burns a reformed compound having a metal atom, a metalloid atom or a nonmetal atom, and an organic group together with a fuel gas in a burner 18, and a flame F thereof. Is sprayed onto the surface of the solid material S to modify the surface of the solid material S. In the present invention, a liquefied fuel obtained by liquefying a fuel gas and a liquid reforming compound are contained in a cylinder 11 in a mixed state, and a part of the mixed liquid in the cylinder 11 is passed through a vaporizer 14 to cause the reforming compound and The liquefied fuel is vaporized and supplied to the burner 18.
[Selection] Figure 1

Description

  The present invention relates to a surface modification treatment apparatus.

  The surface of a solid substance made of a polymer such as silicon rubber or polyethylene resin, metal, ceramic, or the like may be difficult to be subjected to surface treatment such as adhesion of another member, coating of a paint, or printing. In view of this, a surface modification treatment apparatus has been conventionally studied in which the surface of a solid substance is modified to facilitate surface treatment such as adhesion, painting, and printing.

  As such a surface modification treatment apparatus, the reforming compound is vaporized, and a mixed gas formed by mixing with a flammable gas such as air or an auxiliary combustion gas is burned by a burner and injected onto the surface of a solid substance. The thing which surface treatment is performed is known (for example, refer patent document 1).

  In the surface modification processing apparatus of the type as described above, a storage tank for storing the modifying compound, a storage tank for storing the flammable gas, a mixing chamber for mixing the reforming compound in a gaseous state and the flammable gas, and the like An injection section (burner) for injecting the fuel gas mixed in the mixing chamber is required. For this reason, many types of surface modification treatment apparatuses of this type are large and stationary. When the surface modification treatment apparatus is a stationary type, there is a problem that an installation space is required and the surface modification treatment can be performed only at a place where the apparatus is installed (see FIG. 1 of Patent Document 1). ).

JP 2003-238710 A

  Patent Document 1 also proposes a portable surface modification apparatus using a cartridge-type storage tank. By using a cartridge-type storage tank, the apparatus can be downsized (see FIG. 3 of Patent Document 1).

However, in the portable surface reforming apparatus described in Patent Document 1, a cartridge containing a cartridge filled with tetramethylsilane having a boiling point of 27 ° C., tetramethoxysilane having a boiling point of 122 ° C., and compressed air is used as the fuel gas. A mixed gas is used (see paragraph [0060] of Patent Document 1). Thus, when two kinds of compounds having different boiling points and compressed air (gas) are contained in one cartridge (storage tank), the vaporized compounds (tetramethylsilane and tetramethoxysilane) and compressed air are uniformly distributed. There is a concern that it may be ejected from the container without being mixed.
When the reforming compound and the flammable gas are injected in a non-uniform mixed state, there is a problem that the combustion efficiency deteriorates and the surface modification of the solid substance becomes non-uniform.

  The present invention has been completed on the basis of the above-described circumstances, and is a surface on which the apparatus can be miniaturized and a flame burned in a state where the modifier compound and the fuel gas are uniformly mixed can be injected. An object is to provide a reforming apparatus.

  In order to solve the above-described problems, the present invention burns a modified compound having a metal atom, a metalloid atom or a nonmetal atom, and an organic group with a fuel gas in a burner, and the flame is applied to the surface of a solid substance. In the case of reforming the surface of the solid substance by spraying, the liquefied fuel obtained by liquefying the fuel gas and the liquid reforming compound are accommodated in a cylinder in a mixed state, and a part of the mixed liquid in the cylinder is The surface reforming apparatus is characterized in that the reforming compound and the liquefied fuel are vaporized by passing through a vaporizer and supplied to the burner.

  In the present invention, the liquid reforming compound and the liquefied fuel obtained by liquefying the fuel gas are accommodated in a cylinder in a mixed state. That is, in the present invention, since both the reforming compound and the fuel gas are liquid, they can be ejected from the cylinder in a state of being uniformly mixed at a predetermined mixing ratio. The reforming compound and the fuel gas ejected from the cylinder are in a gas state or a liquid state. The reformed compound and fuel gas (mixed liquid) in the liquid state are ejected from the cylinder together with those in the gas state, and then passed through the vaporizer. In the vaporizer, the mixed liquid is vaporized in a uniform mixed state, and is supplied to the burner together with the liquid ejected in the gaseous state. As a result, according to the present invention, a flame burned in a state where the reforming compound and the fuel gas are uniformly mixed at a predetermined mixing ratio can be injected onto the solid material, so that the surface of the solid material can be made uniform. It can be modified.

Further, in the present invention, since the reforming compound and the fuel gas are uniformly mixed and accommodated in one cylinder, the number of cylinders is compared with that of a configuration in which the reforming compound and the fuel gas are stored separately. The number of parts can be reduced and the apparatus can be miniaturized because only one device is required to control the amount of ejected matter ejected from the cylinder.
As described above, according to the present invention, it is possible to provide a surface reforming apparatus capable of injecting a flame burned in a state in which the apparatus is downsized and the modifier compound and the combustion gas are uniformly mixed. .

The present invention may have the following configuration.
The cylinder may be arranged in a state in which a jet outlet from which the liquefied fuel containing the reforming compound is jetted is directed downward.
For example, when there is a difference between the boiling point of the reforming compound and the boiling point of the fuel gas, if the contents in the cylinder are ejected with the cylinder outlet facing upward, a substance that is easily vaporized will be ejected first. Therefore, there is a concern that the reforming compound and the fuel gas are supplied to the burner in a non-uniform mixed state, and the surface modification of the solid substance becomes non-uniform. Therefore, with the above-described configuration, the liquefied fuel (liquid material) containing the reforming compound is disposed at the jet nozzle, so that there is a difference between the boiling points of the reforming compound and the fuel gas. Also, the reforming compound and the fuel gas are ejected in a uniformly mixed state.

  The vaporizer may include a capillary tube and a vaporization pipe having an inner diameter larger than that of a capillary tube connected to the capillary tube. With such a configuration, the liquefied fuel containing the reforming compound ejected from the cylinder moves smoothly in the capillary tube and vaporizes when it reaches the vaporization pipe having a larger inner diameter than the capillary tube. However, vaporization can be performed smoothly.

  The vaporizer may be provided with a heating device for heating the liquefied fuel containing the reforming compound that passes through the capillary tube. With such a configuration, the vaporization of the liquefied fuel containing the reforming compound in the vaporizer is promoted.

  The burner may be a Bunsen type burner that sucks ambient air by ejecting gas vaporized by the vaporizer. With such a configuration, it is possible to easily control the introduction of air and the amount of introduction of air, thereby easily controlling the combustion efficiency of the gas.

Between the vaporizer and the burner, a liquid removing device including a porous material that allows gas supplied from the vaporizer to the burner to pass therethrough may be disposed. With such a configuration, when the liquefied fuel containing the reforming compound remains in a liquid state without being completely vaporized in the vaporizer, the liquid material is passed by passing the gas containing the liquid material through the porous material. Since vaporization of the liquid is promoted and the liquid material is adsorbed and supplied to the burner, a more uniform surface treatment can be performed.
Moreover, if it is set as the above structures, even if it does not arrange | position a porous material in a cylinder, since vaporization of the liquefied fuel containing a reforming compound can be accelerated | stimulated, a cylinder can be reduced in cost.

  ADVANTAGE OF THE INVENTION According to this invention, the apparatus can be reduced in size and the surface modification processing apparatus which can inject the flame burned in the state which mixed the modifier compound and fuel gas uniformly can be provided.

Schematic diagram illustrating the surface modification treatment apparatus of Embodiment 1 Schematic diagram illustrating the surface modification treatment apparatus of the second embodiment

<Embodiment 1>
Embodiment 1 of the present invention will be described with reference to FIG.
As shown in FIG. 1, the surface modification treatment apparatus 10 of the present embodiment includes a cylinder 11 that contains a liquid mixture of a liquid reforming compound and a liquefied fuel obtained by liquefying a fuel gas, a vaporizer 14, and a vaporizer. And a burner 18 for blowing a flame F of a reformed gas obtained by mixing air to the gas supplied from the vessel 14 onto the surface of the solid substance S. The surface modification treatment apparatus 10 of this embodiment is of a size and weight that can be accommodated in a portable case (not shown).

  As shown in FIG. 1, the cylinder 11 has a jet outlet 11 </ b> A arranged downward. The cylinder 11 has a substantially columnar shape, and the side disposed on the upper side in the figure is the bottom 11 </ b> B of the cylinder 11. For example, a holding part that holds the cylinder 11 is provided on the lid surface of the case that houses the surface modification treatment apparatus 10, and the cylinder 11 is attached to the holding part with the outlet 11 </ b> A facing downward, so that the cylinder 11 is discharged from the outlet. It is possible to hold 11A in a state of facing downward. Below the spout 11A, a first valve 12 is provided for controlling the amount of ejected matter (gas or liquid fuel gas and reforming compound) ejected from the spout 11A. Below the valve 12, a first transfer pipe 13 for transferring the mixed liquid injected from the jet outlet 11 </ b> A to the vaporizer 14 is connected.

  The liquid mixture (not shown) accommodated in the cylinder 11 is a liquid reforming compound having a function of modifying the surface of the solid substance S to facilitate processing such as painting, printing, and adhesion, and fuel. It is a mixture of liquefied fuel obtained by liquefying gas at a predetermined ratio, and is also referred to as “liquefied fuel containing a reforming compound”.

  As the modifying compound, it is preferable to use a liquid compound at room temperature (5 to 35 ° C.) or a low boiling point having a boiling point of 200 ° C. or less, specifically, a metal atom, a semi-metal atom, or a non-boiling point. A compound in which one or more organic groups are bonded to a metal atom is used.

  The metal atoms contained in the modified compound include aluminum, hafnium, indium, iridium, iron, nickel, niobium, lead, ruthenium, tantalum, tin, titanium, vanadium, zirconium, beryllium, cadmium, chromium, cobalt, gold, mercury , Rhenium, thallium, and zinc. Examples of the metalloid atom contained in the modified compound include arsenic, boron, germanium, antimony, and silicon. Examples of the nonmetal atom contained in the modified compound include phosphorus.

  Examples of the organic group contained in the modified compound include a carbonyl group (C═O), an acyl group, an alkoxy group, an alkyl group, an alkenyl group, a phenyl group, an alkylphenyl group, an alkylamino group, and a polyfluoroalkyl group. . The modified compound used in the present invention includes one or more of these organic groups. The modifying compound may have a ligand such as carbon monoxide, halogen, phosphorus compound, or sulfur compound in addition to these organic groups.

Examples of the acyl group include an acetyl group and an acetylaceto group. Examples of the alkoxy group include a methoxy group, an ethoxy group, an n-propoxy group, an i-propoxy group, an n-butoxy group, an i-butoxy group, and a sec butoxy group. Tert-butoxy group, and the like. Examples of the alkyl group include linear, branched, and cyclic alkyl groups having 1 to 6 carbon atoms, such as a methyl group, an ethyl group, a propyl group, a butyl group, a hexyl group, and a cyclohexyl group. Examples of the alkenyl group include an allyl group, a propenyl group, and a cyclopentadienyl group. Examples of the alkylphenyl group include a methylphenyl group, an ethylphenyl group, a propylphenyl group, and a butylphenyl group. The alkyl group bonded to the phenyl group may be linear or branched. Examples of the alkylamino group include a dimethylamino group and a diethylamino group. Examples of the polyfluoroalkyl group include those in which part or all of hydrogen in an alkyl group such as a trifluoromethyl group (—CF ₃ ) is replaced with fluorine.

Specific examples of the modified compound used in the present embodiment include Al (O—secC ₄ H ₉ ) ₃ , (CH ₃ ) ₃ Al, (C ₂ H ₅ ) ₃ , and B (O—C ₂ H ₅ ). _{3, B (O-iC 4} H 9) 3, (n-C 4 H 9) 2 B (OH), tricyclohexylphosphine boron _{[(C 6 H 13) 3} B], (C 2 H 5) 2 Be, _{(C 2 H 5) 2 Cd} , Cr (C 2 H 5 -C 6 H 5) 2, Ge (O-C 2 H 5) 4, Ge (O-nC 3 H 7) 4, Ge (O-tertC _{4 H 9) 4, Hf (} O-tertC 4 H 9) 4, In (O-CH 3) 3, ethylcyclopentadienyl (1,5-cyclooctadiene) iridium _{[Ir (C 5 H 4 C} 2 _{H 5) (C 8 H 12} )], Fe (CO) 5, Ni (CO) 4, Nb (O- _{C 2 H 5) 5, Nb} (O-secC 4 H 9) 5, PO (O-CH 3) 3, PO (O-C 2 H 5) 3, PO (O-secC 4 H 9) 3, P (O—CH ₃ ) ₃ , P (O—secC ₄ H ₉ ) ₃ , Pb (O—iC ₃ H ₇ ) ₂ , bis (ethylcyclopentadienyl) ruthenium [Ru (C ₅ H ₄ C ₂ H ₅ ) ₂ , Sb (O—nC ₃ H ₇ ) ₃ , Ta (O—C ₂ H ₅ ) ₅ , diacetylaceto-dibutoxytin [Sn (OC ₄ H ₉ ) ₂ (C ₅ H ₇ O ₂ ) ₂ ], Ti (O-iC ₃ H ₇ ) ₄ , Ti (O-secC ₄ H ₉ ) ₄ , Ti [N (CH ₃ ) ₂ ] ₄ , VO (O—C ₂ H ₅ ) ₃ , Zr (O-tertC ₄ H ₉ ) ₄ , hexamethyldisiloxane [(CH ₃ ) ₃ Si—O—Si (CH ₃ ) ₃ ] and the like.
Of these modifying compounds, hexamethyldisiloxane is preferred.

The mixing ratio of the modifying compound can be 1 × 10 ⁻⁵ mol% to 50 mol%, and 0.1 mol% to 5 mol% when the total liquid mixture is 100 mol%. preferable. When the mixing ratio of the modifying compound is outside the above range, the modifying effect of the solid substance S may not be exhibited.

  As the fuel gas, a gas that can be made liquid at room temperature (5-35 ° C.) by being compressed is used. Specific examples include liquefied propane and liquefied butane. Of these fuel gases, liquefied butane is preferred.

The vaporizer 14 includes a capillary tube 14A and a vaporization pipe 14B having a larger inner diameter than the capillary tube 14A connected to the capillary tube 14A. In the vaporizer 14, the mixed liquid transferred from the cylinder 11 passes through the inside of the capillary tube 14A and reaches the vaporization pipe 14B, whereby the reforming compound and the liquefied fuel are vaporized from the liquid state to the gas state. ing.
In the present embodiment, a heater 15 is attached so as to surround the capillary tube 14A (an example of a heating device), and the capillary tube 14A is heated by the heater 15 to promote vaporization of the mixed liquid. In the present embodiment, the vaporization pipe 14B that vaporizes the mixed liquid that has passed through the capillary tube 14A also functions as a transfer pipe that transfers the gas generated by vaporization of the reforming compound and the liquefied fuel to the burner 18.

  Between the vaporization pipe 14 </ b> A and the burner 18, a pressure regulator 17 is provided for controlling the flow rate of the gas transferred from the vaporization pipe 14 </ b> A to the burner 18.

  In this embodiment, the burner 18 is a Bunsen type burner 18 that sucks ambient air by ejecting the gas transferred from the vaporizer 14. At the tip of the burner 18, there is provided an injection port 20 for injecting a flame F generated by combustion of the reformed gas obtained by mixing the gas transferred from the vaporizing chamber 14 and air. The tip 19 of the burner 18 including the injection port 20 is rotatable, and an air suction hole (not shown) is opened and closed by the rotation of the tip 19 so that the amount of air sucked can be adjusted. It is said.

  Examples of the material constituting the solid substance S to which the flame F generated by the combustion of the reformed gas is sprayed include rubbers such as silicon rubber, fluorine rubber, natural rubber, neoprene rubber, chloroprene rubber, urethane rubber, acrylic rubber, and the like. Polymer materials such as polyethylene resin, polypropylene resin, modified polypropylene resin, polymethylpentene resin, polyester resin, polycarbonate resin, epoxy resin, phenol resin, cyanate resin, urea resin, guanamine resin, aluminum, magnesium, stainless steel, nickel, chromium Metal materials such as tungsten, gold, copper, iron, silver, zinc, tin, lead, titanium oxide, zirconium oxide, zinc oxide, indium oxide, tin oxide, silica, talc, calcium carbonate, lime, zeolite, gold, silver Copper, zinc, Nickel, tin, lead, solder, glass, materials such as ceramics. The solid substance S may be composed of one kind of material or may be composed of two or more kinds of materials.

  The form of the solid substance S to be reformed by spraying the flame F generated by the combustion of the reformed gas is, for example, a flat surface such as a plate shape, a sheet shape, a film shape, a tape shape, a strip shape, a panel shape, and a string shape. It may have a structure, and has a three-dimensional structure such as a cylindrical shape, a columnar shape, a spherical shape, a block shape, a tube shape, a pipe shape, an uneven shape, a film shape, a fiber shape, a fabric shape, and a bundle shape. However, it is not limited to these.

  The form of the solid substance S may be a composite structure in which the structure exemplified above is combined with a metal part, a ceramic part, a glass part, a paper part, a wooden part, or the like.

Next, a modification method using the surface modification treatment apparatus 10 of the present embodiment will be described.
The surface modification processing apparatus 10 is taken out from the case, the cylinder 11 is arranged with the ejection port 11A facing downward, and the ejection port 20 of the burner 18 is arranged facing the surface of the solid substance S.

  When the first valve 12 is opened, the liquefied fuel containing the reformed compound, which is a mixture of the liquid reformed compound contained in the cylinder 11 and the liquefied fuel obtained by liquefying the fuel gas, is in the gaseous state or in the liquid state. It is transferred to the vaporizer 14 via the transfer pipe 13. Here, in the present embodiment, since the reforming compound and the liquefied fuel are contained in the cylinder 11 in a mixed state, the reformed compound and the liquefied fuel are transferred to the vaporizer 14 in a mixed state at a predetermined mixing ratio. The amounts of the reforming compound and liquefied fuel (gaseous and liquid) transferred from the cylinder 11 to the vaporizer 14 can be adjusted by the first valve 12.

  Even if the liquid fuel containing the reforming compound passes through the capillary tube 14A of the vaporizer 14 and reaches the vaporization pipe 14B, the liquid fuel containing the reforming compound is vaporized from a liquid state to a gaseous state. Since the heater 15 for heating the vaporizer 14 is provided, vaporization is promoted. After passing through the vaporizer 14, the reformed compound and liquid fuel are vaporized and transferred to the burner 18 through the vaporization pipe 14B functioning as a transfer pipe. The flow rate of the gas transferred to the burner 18 can be adjusted by the pressure regulator 17.

  The gas transferred to the burner 18 is mixed with the air sucked from the air suction hole of the burner 18 to be a reformed gas. A flame F generated by the combustion of the reformed gas is sprayed onto the surface of the solid substance S from the injection port 20 to perform the reforming process.

  The solid substance S subjected to the modification treatment by the surface modification treatment apparatus 10 according to the present embodiment improves the effect of improving the adhesion with a different material that has conventionally had a problem with adhesion, and improves the wettability (hydrophilicity). Effect, antistatic effect and the like are imparted. That is, by performing the modification process with the surface modification processing apparatus 10 of the present embodiment, the solid substance S can be modified, and surface treatment such as adhesion, painting, and printing can be facilitated.

Next, the effect of this embodiment will be described.
In the present embodiment, the liquid reforming compound and the liquefied fuel obtained by liquefying the fuel gas are accommodated in the cylinder 11 in a mixed state. That is, in this embodiment, since both the reforming compound and the fuel gas are liquid, they can be ejected from the cylinder 11 in a uniformly mixed state at a predetermined mixing ratio. The reforming compound and fuel gas ejected from the cylinder 11 are in a gas state or a liquid state. The reformed compound and fuel gas (mixed liquid) in the liquid state are ejected from the cylinder 11 together with those in the gas state, and then passed through the vaporizer 14. In the vaporizer 14, the mixed liquid is vaporized while being in a uniform mixed state, and is supplied to the burner 18 together with the liquid jetted in the gaseous state. As a result, according to the present embodiment, the flame F burned in a state where the reforming compound and the fuel gas are uniformly mixed at a predetermined mixing ratio can be injected into the solid material S. The surface can be uniformly modified.

Further, in the present embodiment, the reforming compound and the fuel gas are uniformly mixed and accommodated in one cylinder 11, so that the cylinder is compared with a configuration in which the reforming compound and the fuel gas are stored separately. 11 can be reduced, and only one device is required to control the amount of ejected matter ejected from the cylinder 11. Therefore, the number of parts can be reduced and the device can be miniaturized.
As described above, according to the present embodiment, there is provided the surface modification treatment apparatus 10 capable of injecting the flame F burned in a state where the apparatus is downsized and the modifier compound and the combustion gas are uniformly mixed. be able to.

  Further, in the present embodiment, the cylinder 11 is disposed in a state in which the ejection port 11A from which the liquefied fuel containing the reforming compound is ejected is directed downward, so that the ejection port 11A side includes the reforming compound. Liquefied fuel is arranged. Therefore, according to the present embodiment, even when there is a difference between the boiling points of the reforming compound and the fuel gas, the reforming compound and the fuel gas are ejected in a uniformly mixed state. Surface treatment is possible.

  Further, according to the present embodiment, the vaporizer 14 is composed of the capillary tube 14A and the vaporization pipe 14B having a larger inner diameter than the capillary tube 14A connected to the capillary tube 14A, so that the modified compound ejected from the cylinder 11 Since the liquefied fuel containing the fuel moves smoothly in the capillary tube 14A and reaches the vaporizing pipe 14B having an inner diameter larger than that of the capillary tube 14B, it can be vaporized smoothly even with a simple configuration. it can.

  In particular, in the present embodiment, the vaporizer 14 is provided with a heater 15 (heating device) for heating the liquefied fuel containing the reformed compound that passes through the capillary tube 14A. The vaporization of the liquefied fuel containing the compound is promoted.

  Furthermore, in this embodiment, since the vaporization pipe 14B also serves as a transfer pipe for transferring the vaporized gas to the burner 18, the number of parts can be reduced.

<Embodiment 2>
Next, Embodiment 2 of the present invention will be described with reference to FIG. The same reference numerals are used for the parts having the same names as those in the first embodiment, and redundant descriptions of the structure, operation, and effects are omitted.
In the surface modification treatment apparatus 30 according to this embodiment, the heater 15 is not attached to the vaporizer 14 and the liquid removal apparatus 31 is attached between the vaporizer 14 and the burner 18. Different from Form 1.

  The liquid removing device 31 includes a porous material through which gas transferred from the vaporizer 14 to the burner 18 passes. Examples of the porous material include sponge and foamed urethane. The configuration other than the above is substantially the same as that of the first embodiment.

  According to the present embodiment, as in the first embodiment, the apparatus is miniaturized, and the surface reforming apparatus capable of injecting the flame F burned in a state where the modifier compound and the combustion gas are uniformly mixed. 30 can be provided. Also in the present embodiment, the cylinder 11 is arranged with the outlet 11A from which the liquefied fuel containing the reforming compound is ejected facing downward, and therefore the reforming compound is disposed on the side of the outlet 11A. The liquefied fuel containing is arranged. Therefore, according to the present embodiment, even when there is a difference between the boiling points of the reforming compound and the fuel gas, the reforming compound and the fuel gas can be ejected in a uniformly mixed state. Uniform surface treatment is possible.

By the way, when the heater 15 is not attached to the vaporizer 14 as in this embodiment, a part of the mixture that has passed through the capillary tube 14A may be transferred to the burner 18 while remaining in a liquid state.
However, in this embodiment, since the liquid removal apparatus 31 provided with the porous material which lets the gas transferred from the vaporizer 14 to the burner 18 pass between the vaporizer 14 and the burner 18, the reforming is performed. When the liquefied fuel containing the compound is not completely vaporized in the vaporizer 14 and remains in a liquid state, the gas containing the liquid material is passed through the porous material, thereby promoting the vaporization of the liquid material and the liquid material. Since the gas after adsorbed is supplied to the burner 18, more uniform surface treatment can be performed.
Further, when the liquid removing device 31 is arranged, vaporization can be promoted without arranging a porous material arranged so that the liquid liquefied fuel and the reforming compound are not ejected in a liquid state in the cylinder 11. Cost can be reduced.

<Other embodiments>
The present invention is not limited to the embodiments described with reference to the above description and drawings. For example, the following embodiments are also included in the technical scope of the present invention.
(1) In the above-described embodiment, the example in which the cylinder outlet is arranged downward is shown. However, the cylinder outlet may be arranged upward.

(2) In the above embodiment, a surface provided with a vaporizer provided with a heater but not provided with a liquid removal device, and a surface provided with a vaporizer provided with a liquid removal device but not provided with a heater. Although the reforming apparatus is shown, the heater is not provided in the vaporizer, and the liquid removal apparatus may not be provided, or the vaporizer provided with the heater and the liquid removal apparatus are provided. It may be a thing.
(3) In the said embodiment, the thing of the structure which the vaporization pipe which the liquid mixture which passed through the capillary tube vaporizes also functions as a transfer pipe which transfers the gas containing a reforming compound and fuel gas to a burner is shown However, a transfer pipe for transferring the gas to the burner may be provided separately from the vaporization pipe.
(4) In the above embodiment, the surface modification treatment apparatus accommodated in the portable case has been shown. However, the present embodiment can also be applied to a stationary surface modification treatment apparatus.

DESCRIPTION OF SYMBOLS 10, 30 ... Surface modification processing apparatus 11 ... Cylinder 11A ... Jet port 14 ... Vaporizer 14A ... Capillary tube 14B ... Vaporization pipe 15 ... Heater (heating apparatus)
18 ... Burner 20 ... Jet 31 ... Liquid removal device F ... Flame S ... Solid matter

Claims (6)

A reforming compound having a metal atom, a metalloid atom or a nonmetal atom, and an organic group is burned with a fuel gas by a burner, and the flame is blown onto the surface of the solid material to modify the surface of the solid material. In what to do,
The liquefied fuel obtained by liquefying the fuel gas and the liquid reforming compound are accommodated in a cylinder in a mixed state, and a part of the mixture liquid in the cylinder is passed through a vaporizer to thereby remove the reforming compound and the liquefied fuel. A surface modification treatment apparatus characterized by being vaporized and supplied to the burner. The surface modification processing apparatus according to claim 1, wherein the cylinder is arranged with a jet outlet from which the liquefied fuel containing the reforming compound is jetted facing downward. The surface reforming apparatus according to claim 1 or 2, wherein the vaporizer includes a capillary tube and a vaporization pipe having an inner diameter larger than that of a capillary tube connected to the capillary tube. The surface reforming apparatus according to claim 3, wherein the vaporizer is provided with a heating device that heats the liquefied fuel containing the reforming compound that passes through the capillary tube. The surface modification according to any one of claims 1 to 4, wherein the burner is a Bunsen type burner that sucks ambient air by ejecting gas vaporized by the vaporizer. Quality processing equipment. The liquid removal apparatus provided with the porous material which lets the gas supplied to the said burner from the said vaporizer pass between the said vaporizer and the said burner is arrange | positioned. The surface modification processing apparatus according to claim 5.

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