JP5439764B2 - Solid state light source device, projector, monitor device - Google Patents

Description

  The present invention relates to a laser light source device, a projector, and a monitor device.

  Conventionally, in the field of optical devices such as projectors, high-pressure mercury lamps are frequently used as illumination light sources. The high-pressure mercury lamp has the advantage that high-power light can be obtained, but there are also problems such as limited color reproducibility, difficulty in instantaneous lighting and extinguishing, and short life. Under such circumstances, a laser light source device using a solid light source such as a semiconductor laser is expected. As the semiconductor laser element, a surface emitting type or an edge emitting type is known.

  The semiconductor laser element is composed of a stacked body formed on a semiconductor substrate. The laminate is composed of a pair of electrodes, an active layer provided between the electrodes, and the like. In addition, the laminated body is provided with a reflective layer (DBR layer) having wavelength selectivity and the like, and an internal resonator is constituted by the DBR layer. When a voltage is applied between the pair of electrodes, light is generated in the active layer, and this light is resonated and amplified by the internal resonator. In the surface-emitting type, light travels in the thickness direction of the laminate, whereas in the edge-emitting type, light travels in the surface direction. That is, in the surface emitting type, the resonator length depends on the dimension in the thickness direction of the laminate, and in the end surface emitting type, it depends on the dimension in the surface direction. Therefore, it is much easier to make the resonator length longer in the edge-emitting type than in the surface-emitting type, and the gain due to resonance can be significantly increased.

  For the reasons described above, it is considered that it is easy to increase the output of the laser light source device by using an edge-emitting laser element. Further, as a technique for increasing the output, it is also conceivable to configure a laser light source device with a plurality of laser elements. As a laser light source device having a plurality of laser elements, there are those disclosed in Patent Documents 1 and 2.

  The laser light generating device of Patent Document 1 is provided with a plurality of laser light sources for the purpose of reducing speckle noise. Laser light is excellent in color reproducibility because it is light of a single wavelength, but there is also a problem that speckle noise is likely to occur because of high coherence. In Patent Document 1, a phase modulation unit is provided in each of the laser light sources, and the wavelength is shifted by the phase modulation unit in a plurality of laser light sources. Thereby, as a whole laser beam emitted from a plurality of laser light sources, the spectrum width becomes wide and speckle noise is reduced.

The semiconductor laser array of Patent Document 2 is configured by arranging a plurality of semiconductor lasers having different wavelengths for the purpose of expanding transmission capacity in optical fiber communication. Each of the plurality of semiconductor lasers is provided with a diffraction grating (waveguide layer) that controls the wavelength of the emitted laser light. A plurality of semiconductor lasers have different waveguiding layer thicknesses and are multi-wavelength light sources.
JP 9-121069 A JP-A-7-15092

  As described above, in order to obtain a high-power laser light source device, it is effective to increase the number of laser elements or use an edge-emitting laser element. In addition, since the light emitted from the laser element is emitted from the laser light source device through an optical component such as a lens, it is also effective to increase the light use efficiency in the optical component. However, it is difficult to make these compatible for the following reasons.

  In the edge-emitting type, since light travels in the surface direction of the substrate, it is difficult to increase the degree of integration of the laser elements. In order to achieve high integration, it is necessary to change the optical axis of the light emitted from the laser element and extract the light in a direction inclined with respect to the substrate (for example, a normal direction). In general, light emitted from an edge-emitting laser element has an elliptical cross-sectional shape perpendicular to its optical axis. Therefore, it is necessary to adjust the light intensity distribution in order to increase the light utilization efficiency. is there. Therefore, in order to obtain a high-power laser light source device, it is necessary to provide an optical system for changing the optical axis and an optical system for adjusting the intensity distribution for each laser element.

  Accuracy is required for alignment between the laser element and these optical systems, and if the accuracy is insufficient, the light utilization efficiency decreases. On the other hand, if the accuracy of alignment is to be ensured, the manufacturing cost increases. Such inconvenience becomes more prominent as the number of laser elements is increased. Therefore, it is extremely difficult to achieve high integration while improving the manufacturing cost and the light utilization efficiency.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a light source device capable of significantly increasing output and efficiency. Another object is to provide a projector capable of obtaining a high-quality projection image and a monitor device capable of obtaining a clear captured image.

  The laser light source device of the present invention includes a substrate, a plurality of edge-emitting laser elements that are formed on the substrate and emit light in a surface direction of the substrate, and are bonded in proximity to the substrate. An optical member that reflects and collects each light emitted from the surface in a direction away from the surface direction.

  According to the edge-emitting type laser element, the resonator length can be made longer than that of the surface-emitting type, so that the gain due to resonance can be increased. Thereby, the total output of the light emitted from the plurality of laser elements is remarkably increased, and a high-power laser light source device is obtained. In general, light emitted from an edge-emitting laser element has an elliptical cross-sectional shape orthogonal to its optical axis. In the present invention, since the light emitted from the laser element is collected by the optical member, it is possible to collect the light and adjust the light intensity distribution. Thereby, the utilization efficiency of light can be remarkably increased, and a highly efficient laser light source device can be obtained.

  Further, since the light emitted from the laser element is reflected by the optical member in a direction away from the surface direction of the substrate, the emitted light is not blocked by the laser element in the surface direction. Therefore, the number of laser elements formed on the substrate can be increased remarkably, and a laser light source device with a remarkably high output can be obtained. In addition, since the optical member has both a function of reflecting the light emitted from the laser element and a function of condensing it, the number of parts can be reduced as compared with the case where these functions are assigned to independent parts. Therefore, the alignment between components can be reduced by the amount of the reduced number of components, and the manufacturing cost can be reduced while ensuring the alignment accuracy.

In addition, since the substrate and the optical member are joined close to each other, the distance between the laser element and the optical member is shorter than when the substrate and the optical member are arranged apart from each other. Therefore, the beam diameter when the light emitted from the laser element enters the optical member is reduced, and the light use efficiency in the optical member is increased. Further, since the beam diameter is reduced, the optical member can be reduced in size.
As described above, according to the present invention, it is possible to configure a light source device with high output and high efficiency without increasing the manufacturing cost.

  Further, the optical member has a plurality of beam forming portions formed integrally with the optical member, and each of the plurality of beam forming portions transmits each of light emitted from the plurality of laser elements to the surface. It is good also as a structure containing the reflective surface reflected in the direction away from a direction, and the condensing part which condenses the light reflected by the said reflective surface.

  In this way, since the plurality of beam forming portions are formed integrally with the optical component, by aligning the optical component and the substrate, each of the plurality of beam forming portions and each of the plurality of laser elements are Can be aligned together. This makes it much easier to perform alignment.

Further, the optical member has a reflecting surface that reflects each of the light emitted from the plurality of laser elements in a direction away from the surface direction, and the light reflected by the reflecting surface is collected. The reflection surface may be curved.
In this way, the interface where light enters the optical member from the laser element is minimized (one), so that the light loss in the optical member is minimized.

In addition, a heat radiating plate is provided on the opposite side of the plurality of laser elements from the substrate, and the heat radiating plate is provided with an opening through which the light reflected by the reflecting surface is transmitted. It is preferable that
In this way, light can be extracted through the opening, and a plurality of laser elements can be cooled together.

Preferably, each of the plurality of laser elements has wavelength control means for controlling the wavelength of light emitted from the laser elements, and the wavelengths of light emitted from the plurality of laser elements are different. .
In this way, the light emitted from the light source device has a broad spectrum width as a whole and has low coherence, so speckle noise is reduced.

It is preferable that alignment means for aligning the substrate and the optical member in the plane direction is provided.
In this way, each of the plurality of light emitting units and each of the plurality of light collecting units can be aligned with high accuracy.

A projector according to the present invention includes the laser light source device according to the present invention, a light modulation device that modulates light emitted from the laser light source device, and a projection device that projects light modulated by the light modulation device. It is characterized by having.
According to the laser light source device of the present invention, substantially high output light can be obtained, so that a high-luminance projection image can be obtained and a high-quality projection image can be obtained with a wide dynamic range. Further, since the light use efficiency of the laser light source device of the present invention is high, a projector with low power consumption can be realized.

A monitor device according to the present invention includes the laser light source device according to the present invention, and an imaging device that captures an image of a subject illuminated by light emitted from the laser light source device.
According to the light source device of the present invention, substantially high output light can be obtained, so that the amount of light reflected by the subject is secured, and by picking up an image of the light, a good monitor device can be obtained. . In addition, since the light source device of the present invention has high light utilization efficiency, it can be a monitor device with low power consumption.

  Hereinafter, although one embodiment of the present invention is described, the technical scope of the present invention is not limited to the following embodiment. In the following description, various structures are illustrated using drawings, but in order to show the characteristic parts of the structures in an easy-to-understand manner, the structures in the drawings are shown in different sizes and scales from the actual structures. There is.

[First Embodiment]
FIG. 1A is a plan view showing a schematic configuration of the laser light source device of the first embodiment, and FIG. 1B is a cross-sectional view taken along the line BB ′ in FIG. As shown in FIGS. 1A and 1B, the laser light source device 100 includes a light source substrate (substrate) 100 </ b> A, a plurality of edge-emitting laser elements 110, and an optical element 120.

Hereinafter, the positional relationship of the members will be described based on the XYZ orthogonal coordinate system shown in FIGS. In this XYZ orthogonal coordinate system, the thickness direction of the light source substrate 100A is the Z direction, and two directions along the surface direction of the light source substrate 100A are the X direction and the Y direction. The laser elements 110 are arranged in an array, and the X direction and the Y direction are the arrangement directions of the laser elements 110, respectively. Here, two laser elements 110 are arranged in the X direction, and four laser elements 110 are arranged in the Y direction (a total of eight). Note that the traveling direction of light inside the laser element 110 is substantially the X direction, and light is emitted from the right end of the laser element 110 in FIGS.

  The light source substrate 100A uses, for example, a semiconductor substrate made of silicon as a base material. A laser element 110 is formed on one surface (surface on the Z positive direction side) of the light source substrate 100A. The laser element 110 emits laser light in a direction along the one surface (X positive direction side). An optical element 120 is provided on the surface on the Z positive direction side of the light source substrate 100A on the X positive direction side of the laser element 110. Here, an optical element (optical member) 120 is arranged for each laser element 110.

  In the optical element 120, the side surface on the X negative direction side facing the corresponding laser element 110 is a reflection surface 121. The reflecting surface 121 is a concave curved surface toward the laser element 110. The laser light emitted from the laser element 110 is reflected by the reflecting surface 121, the optical axis is bent, and proceeds in a direction away from the light source substrate 100A. Here, the reflected laser light travels in the normal direction (Z positive direction) of the light source substrate 100A.

  An alignment mark (positioning means) 122 is provided on the upper surface of the optical element 120. The optical element 120 is bonded to the light source substrate 100A with an adhesive while the optical element 120 is aligned with the light source substrate 100A using the alignment mark 122.

  In the light source substrate 100A, on the arrangement surface side (Z positive direction side) where the laser element 110 and the optical element 120 are arranged, a heat radiating plate 130 is provided in contact with the upper surface of the laser element 110. Further, in the light source substrate 100A, a heat radiating plate 140 is also provided on the back side of the arrangement surface. The heat sinks 130 and 140 can release heat during the operation of the laser element 110. The heat dissipation plate 130 is provided with an opening 130A, and the laser light reflected by the reflecting surface 121 is extracted to the outside through the opening 130A.

FIG. 2 is an enlarged cross-sectional view showing a main part of one laser element 110 and an optical element 120 corresponding thereto in the laser light source device 100.
As shown in FIG. 2, the laser element 110 is configured by a stacked body having an active layer 114 between a first electrode 111n and a second electrode 111p. In this laminate, in order from the light source substrate 100A side (Z negative direction side), the first electrode 111n, the n-type base layer 112, the n-type semiconductor layer (cladding layer) 113n, the active layer 114, and the p-type semiconductor layer (cladding layer). 113p and the 2nd electrode 111p are arrange | positioned. Each layer constituting the laminate is formed by forming a material for forming each layer on the semiconductor substrate and then patterning the film using a resist technique, a photolithography method, an etching technique, or the like. In the stacked body, the upper surface and the side surface excluding the laser light emitting portion are covered and protected by an insulating film 116. Between the n-type semiconductor layer 113n and the p-type semiconductor layer 113p, DBR layers 115 are provided on both sides of the active layer 114 in the light traveling direction (X direction) in the laser element 110. The DBR layer 115 reflects or transmits incident light according to its wavelength.

  When power is supplied between the first electrode 111n and the second electrode 111p, light is generated in the active layer 114. A part of the n-type semiconductor layer 162n has a concavo-convex shape (internal grating pattern) whose surface shape is arranged at a predetermined interval in the X direction, and light having a wavelength matching the concavo-convex selectively travels in the X direction. That is, the internal grating pattern functions as a wavelength control unit that controls the wavelength of the laser light emitted from the laser element 110.

  The light that has traveled through the active layer 114 in the X positive direction side enters the DBR layer 115 on the positive direction side. Of light incident on the DBR layer 115, light having a fundamental wavelength is emitted toward the optical element 120 through the DBR layer 115, and light other than the fundamental wavelength is reflected by the DBR layer 115. The light reflected by the DBR layer 115 reciprocates between the two DBR layers 115 sandwiching the active layer 114. As a result, laser oscillation occurs and light passing through the active layer 114 is amplified. As described above, the laser beam having the fundamental wavelength is emitted toward the reflecting surface 121 of the optical element 120.

  In the present embodiment, each of the plurality of laser elements 110 emits an infrared laser beam L having a wavelength of about 920 nm as a fundamental wavelength laser beam. Further, the intervals of the concave and convex portions of the internal grating pattern are made different among the plurality of laser elements 110 so that the wavelength of the laser light emitted from each of the plurality of laser elements 110 has a variation width of about 1 to 10 nm. Yes.

  In general, in an edge-emitting laser element, light traveling along the surface direction resonates, and in a surface-emitting laser element, light traveling in a direction orthogonal to the surface direction resonates. Therefore, according to the edge-emitting type, the resonator length can be made longer than that of the surface-emitting type. Therefore, the edge-emitting type is more advantageous than the surface-emitting type from the viewpoint of increasing the output of light obtained from one element. The luminous flux emitted from the edge-emitting laser element has an elliptical cross-sectional shape perpendicular to the optical axis. In the present embodiment, the luminous flux emitted from the laser element 110 is such that the full width at half maximum of the intensity distribution with respect to the diffusion angle is perpendicular to the light traveling direction (X direction) and along the surface of the active layer 114 (Y direction). It is about 10 °, and is about 40 ° in the thickness direction (Z direction) of the active layer 114.

  Light emitted from the laser element 110 enters the reflecting surface 121. The reflecting surface 121 is a curved surface, and the laser light L reflected by the reflecting surface 121 is collected. Here, the reflecting surface 121 is formed of a parabolic surface, and the point light source when the laser element 110 is regarded as a point light source is positioned at the focal point of the parabolic surface. Thereby, the laser beam L reflected by the reflecting surface 121 is condensed at infinity.

Further, the curvature of the curved surface of the reflecting surface 121 is adjusted so as to change the intensity distribution of the laser light before and after the reflection. As described above, the intensity distribution of the laser light before reflection is wider in the Z direction than in the Y direction. In other words, the light beam before reflection has an elliptical cross-sectional shape perpendicular to the optical axis, with the Z direction as the major axis and the Y direction as the minor axis. Here, the curvature of the curved surface is adjusted so that the cross-sectional shape of the reflected light beam is circular. Specifically, the curvature of the reflecting surface 121 in a cross section parallel to the substrate surface of the light source substrate 100A is larger than the curvature of the reflecting surface 121 passing through the focal point and orthogonal to the substrate surface of the light source substrate 100A.
In this way, the laser beam L that is condensed and beam-shaped is emitted through the opening 130 </ b> A and is taken out of the laser light source device 100.

  In the laser light source device 100 of the first embodiment as described above, since the edge-emitting laser element 110 is used, the gain due to resonance is higher than that of the surface-emitting type, and the laser light source apparatus 100 can be obtained from one laser element 110. The light output is higher. Further, the laser light emitted from the laser element 110 is reflected by the reflecting surface 121 and travels away from the light source substrate 100A, so that the laser element 110 can be highly integrated. Thereby, the total output of the laser beams emitted from the plurality of laser elements 110 is remarkably increased.

  The laser light emitted from the edge-emitting laser element 110 has an elliptical cross-sectional shape that is orthogonal to the optical axis as usual, but the light intensity distribution is adjusted by the optical element 120 so that the cross-sectional shape is circular. become. Further, the laser light emitted from the laser element 110 is converged to infinity by the optical element 120 to become substantially parallel light. As described above, the optical element 120 has both the function of reflecting the laser beam emitted from the laser element 110 and the function of condensing it, so that the number of parts can be reduced rather than sharing these functions with independent optical parts. Can be reduced. Therefore, alignment between parts becomes easy and an increase in manufacturing cost is avoided.

  The light intensity of the extracted laser light is distributed symmetrically around the optical axis and concentrated around the optical axis. Therefore, when a device is configured using the laser light source device 100, the light use efficiency is remarkably increased in the components of the device. For example, when a projector is configured using the laser light source device 100, the optical axis of the laser beam and the optical axis of a component such as a light valve or a projection lens on which the laser beam is incident coincide with each other. The usage efficiency will be much higher. As described above, according to the laser light source device 100, high output light is obtained and the utilization efficiency thereof is remarkably increased, so that substantially high output light can be obtained substantially.

[Second Embodiment]
Next, a second embodiment of the present invention will be described. The second embodiment is different from the first embodiment in that an optical member is provided in common for a plurality of laser elements arranged one-dimensionally.

  FIG. 3 is a plan view showing a schematic configuration of the laser light source device of the second embodiment, and members having the same functions as those of the first embodiment are denoted by the same reference numerals. As shown in FIG. 3, the laser light source device 200 includes a light source substrate 100 </ b> A, a plurality of laser elements 110, and an optical member 220. The optical member 220 is provided in common to a plurality (four in the drawing) of laser elements 110 arranged in the Y direction perpendicular to the direction in which light is emitted from the laser elements 110.

An alignment mark (positioning means) 222 is provided on the peripheral edge of the optical member 220. The optical member 220 is bonded to the light source substrate 100A by an adhesive or the like in a state of being aligned with the light source substrate 100A using the alignment mark 222.
The optical member 220 is formed with a plurality (four in the drawing) of reflecting surfaces 121. Laser light emitted from each of the plurality of optical elements 110 arranged in the Y direction is reflected and collected by each of the plurality of reflecting surfaces 121 formed on one optical member 220.

  In the laser light source device 200 as described above, each of the plurality of laser elements 110 and the plurality of reflection surfaces 121 are collectively aligned by aligning the light source substrate 100A and the optical member 220. be able to. Thereby, it becomes much easier to perform the alignment, and an increase in manufacturing cost is avoided.

[Third Embodiment]
Next, a third embodiment of the present invention will be described. The third embodiment is different from the first embodiment in that a laser light source device is configured by an optical member having a plurality of beam forming portions.

  FIG. 4A is a cross-sectional view showing a schematic configuration of the laser light source device of the third embodiment, and FIG. 4B is an enlarged view of a main part. 4A and 4B, members having the same functions as those in the first embodiment are denoted by the same reference numerals. As shown in FIG. 4A, the laser light source device 300 includes a light source substrate 100A, a plurality of laser elements 110, and a condensing substrate (optical member) 320. In the present embodiment, a condensing substrate 320 is provided in common to the plurality of laser elements 110 arranged two-dimensionally.

  The condensing substrate 320 is formed using a transparent substrate made of glass, quartz, or the like as a base material, and is joined to the light source substrate 100A by an adhesive or the like. A concave portion 323 is formed on the condensing substrate 320 on the opposite surface side (Z negative direction side) facing the light source substrate 100A. The laser element 110 is accommodated inside the recess 323 in a state where the light source substrate 100A and the condensing substrate 320 are bonded. On the emission side of the laser element 110 inside the concave portion 323, a prism-like reflecting portion 324 that protrudes from the bottom of the concave portion 323 to the light source substrate 100A side is provided. The reflection unit 324 of this embodiment has a transmission surface that is substantially orthogonal to the optical axis of the light emitted from the laser element 110 and a reflection surface 321 that forms an angle of 45 ° with this surface. Between the bottom of the recess 323 and the laser element 110, a heat radiating plate 330 is provided in contact with the laser element 110. The heat radiating plate 330 is formed by forming copper molybdenum, aluminum nitride, boron oxide or the like on the surface of the laser element 110 through an insulating film as appropriate.

  A condensing lens (condenser) 322 is provided on the opposite side of the condensing substrate 320 from the concave portion 323 at a position overlapping the reflecting portion 324 in plan view. The condensing lens 322 and the reflecting portion 324 are formed integrally with the condensing substrate 320, and one condensing lens 322 and one reflecting portion 324 constitute one beam forming portion. The beam shaping unit is two-dimensionally arranged corresponding to the plurality of laser elements 110.

  As shown in FIG. 4B, the laser light emitted from the laser element 110 is reflected by the reflecting surface 321 through the transmitting surface of the reflecting portion 324, and the traveling direction is bent toward the condenser lens 322 side. Then, the light reflected by the reflecting surface 321 enters the condenser lens 322, and is condensed at infinity by the condenser lens 322. The condenser lens 322 adjusts the intensity distribution of the incident laser light. The light emitted from the condenser lens 322 becomes substantially parallel light, and the cross-sectional shape orthogonal to the optical axis is circular.

  The laser light source device 300 as described above is a laser light source device having a high output and a high light rate, as in the first and second embodiments. Further, by aligning the condensing substrate 320 and the light source substrate 100A, each of the plurality of beam forming portions and the plurality of laser elements 110 are aligned together. Therefore, it becomes much easier to perform alignment, and an increase in manufacturing cost is avoided.

  Next, an embodiment of the projector of the present invention will be described. FIG. 5 is a schematic configuration diagram showing the projector 400 of the present embodiment. As shown in FIG. 8, the projector 400 includes laser light source devices (light source devices) 410R, 410G, and 410B, transmissive liquid crystal light valves (light modulation devices) 430R, 430G, and 430B, a cross dichroic prism 440, and a projection device. 450. Laser light source devices 410R, 410G, and 410B emit red light, green light, and blue light, respectively, and the emitted color lights are modulated into liquid crystal light valves 430R, 430G, and 430B, respectively. The modulated color lights are combined by the dichroic prism 440, and the combined light is projected by the projection device 450.

  In addition, the projector 400 according to this embodiment includes uniformizing optical systems 420R, 420G, and 420B that uniformize the illuminance distribution of the laser light emitted from the laser light source devices 410R, 410G, and 410B. Accordingly, the liquid crystal light valves 430R, 430G, and 430B are illuminated with light having a uniform illuminance distribution. Here, the homogenizing optical system 420R includes a hologram 421R, a field lens 422R, and the like, and the homogenizing optical systems 420G and 420B have the same configuration.

  The color light modulated by each of the liquid crystal light valves 430R, 430G, and 430B enters the cross dichroic prism 440. The cross dichroic prism 440 is formed by bonding four right-angle prisms, and a dielectric multilayer film that reflects red light and a dielectric multilayer film that reflects blue light are arranged in a cross shape on the inner surface thereof. The three color lights are synthesized by these dielectric multilayer films and become light representing a color image. The combined light is enlarged and projected on the screen 460 by the projection device 450, whereby a projected image is displayed.

  In the projector 400 of the present embodiment, since the laser light source devices 410R, 410G, and 410B are configured by the light source device of the present invention, the projector can obtain a high-quality projection image with a wide dynamic range. In addition, since the laser light source devices 410R, 410G, and 410B have high efficiency, the projector has low power consumption.

  Although a transmissive liquid crystal light valve is used as the light modulator, a reflective light valve may be used, or a light modulator other than liquid crystal may be used. Examples of such a light valve include a reflective liquid crystal light valve and a digital mirror device (DMD). What is necessary is just to change suitably the structure of a projection optical system according to the kind of light valve used. Further, although the cross dichroic prism is used as the color light combining means, the present invention is not limited to this. As the color light synthesizing means, for example, a dichroic mirror having a cross arrangement to synthesize color light, or a dichroic mirror arranged in parallel to synthesize color light can be used.

Next, another embodiment of the projector according to the present invention will be described. This embodiment is different from the above embodiment in that it is a scanning projector. FIG. 6 is a schematic configuration diagram showing the scanning projector according to the present embodiment.
The scanning projector 500 of the present embodiment includes a laser light source device 510, a condenser lens 520, and a MEMS mirror (light modulation device, projection device) 530. The laser light emitted from the laser light source device 510 is condensed on the MEMS mirror 530 by the condenser lens 520. The condensed laser light is modulated by the MEMS mirror 530 and is scanned in the horizontal direction and the vertical direction on the screen 540 by driving the MEMS mirror 520. As a result, an image is drawn on the screen 540.

  Next, an embodiment of a monitor device according to the present invention will be described. FIG. 7 is a schematic configuration diagram showing the monitor device of the present embodiment. The monitor apparatus 600 of this embodiment includes an apparatus main body 610 and an optical transmission unit 620, and the apparatus main body 610 is provided with a camera (imaging device) 611 and the laser light source device 612 of the present invention. The light transmission unit 620 is provided with a light guide 621 for illumination and a light guide 622 for light reception. The light guides 621 and 622 are a bundle of a large number of optical fibers, and can send laser light to a distant place. In the illumination light guide 621, a diffusion plate 623 is provided at one end (tip) on the emission side, and the other end is connected to the laser light source device 612. The laser light emitted from the laser light source device 612 is sent to the diffusion plate 623 through the light guide 621 and is diffused by the diffusion plate 623 to irradiate the subject.

  An imaging lens 624 is provided at the tip of the light transmission unit 620, and light reflected by the surface of the subject enters the imaging lens 624. The light incident on the imaging lens 624 is sent to a camera 611 provided in the apparatus main body 610 through a light guide 622 for receiving light. As described above, the laser light emitted from the laser light source device 612 irradiates the subject, and the light reflected by the subject surface can be captured by the camera 611.

    In the monitor device 600 of the present embodiment, the light source device of the present invention is used for the laser light source device 612, so that the subject can be illuminated with high-power laser light. Therefore, the amount of light reflected from the surface of the subject is secured, and a good monitor device can be obtained from which a clear captured image can be obtained. Further, since the laser light source device is highly efficient, it becomes a monitor device with low power consumption.

(A) is a schematic plan view of 1st Embodiment, (b) is B-B 'arrow sectional drawing. It is a principal part enlarged view of a laser light source device. It is a top view which shows schematic structure of the laser light source apparatus of 2nd Embodiment. (A) is sectional drawing of 3rd Embodiment, (b) is a principal part enlarged view. It is a schematic block diagram which shows a projector. It is a schematic block diagram which shows a scanning projector. It is a schematic block diagram which shows a monitor apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100, 200, 300, 410R, 410G, 410B, 510, 612 ... Laser light source device, 100A ... Light source substrate, 110 ... End-emitting laser element, 120 ... Optical element (optical member) 121 ... reflecting surface, 130 ... heat sink, 130A ... opening, 220 ... optical member, 320 ... light collecting substrate (optical member), 321 ... reflecting surface, 322. ..Condensing lens (condensing unit), 400... Projector, 500... Scanning type projector (projector), 600.

Claims (7)

A substrate,
A plurality of solid state light sources that are formed on the main surface of the substrate and emit light in a direction parallel to the in-plane direction of the main surface of the substrate;
A plurality of optical elements that are provided corresponding to each of the plurality of solid light sources , and on which light emitted from each of the plurality of solid light sources is incident,
The optical element is
A prism portion that reflects light incident on the inside of the optical element in a direction away from the main surface;
A lens part that makes a radiation angle of light reflected by the prism part smaller than a radiation angle of light emitted from the solid state light source,
The solid light source device, wherein the prism portion and the lens portion are integrated.   The solid light source device according to claim 1, wherein a heat radiating plate is provided on a side of the solid light source opposite to the substrate.   The solid-state light source device according to claim 2, wherein the optical element is supported in contact with the heat radiating plate. Each of the plurality of solid light sources has wavelength control means for controlling the wavelength of light emitted from the solid light sources, and the wavelengths of light emitted from the plurality of solid light sources are different. solid-state light source device according to any one of claims 1 to 3. Solid-state light source device according to any one of claims 1 to 4, characterized in that the said substrate and the optical element positioning means for positioning in the main surface direction is provided. A solid light source device according to any one of claims 1 to 5 ,
A light modulation device that modulates light emitted from the solid-state light source device;
A projector that projects light modulated by the light modulator. A solid light source device according to any one of claims 1 to 5 ,
A monitor device comprising: an imaging device that images a subject illuminated by light emitted from the solid-state light source device.

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