JP5417109B2 - Pattern drawing apparatus and light source - Google Patents

Description

  The present invention relates to a pattern drawing apparatus using a light source composed of a plurality of light emitting elements, and a light source.

  2. Description of the Related Art Conventionally, there has been developed a pattern drawing apparatus that uses a plurality of spatial light modulation devices and draws a pattern by irradiating a photosensitive material with light modulated based on drawing pattern data. As such an apparatus, for example, an ultra-high pressure mercury lamp as disclosed in Patent Document 1 is used as a light source, a light path from the light source in the lamp house is branched into a plurality of paths by an optical fiber, and the light is guided to the drawing head to be photosensitive. A pattern drawing apparatus for drawing a pattern by irradiating a material is disclosed. In Patent Document 2, a light source device in which bare chips of a plurality of light emitting diodes are directly mounted on a substrate on which electrodes are formed, and an image recorded on a photosensitive material based on image data using light emitted from the light source. A recording device is disclosed.

JP 2006-337475 A JP 2003-168826 A

  By the way, when a mercury lamp is used as a light source as in Patent Document 1, the light source portion is enlarged and the apparatus size is increased. Further, when considering the life of the mercury lamp, the running cost becomes high. Further, by using a light source device using a substrate on which a large number of light emitting diode bare chips are mounted as a light source as in Patent Document 2, the light source unit and the image recording apparatus can be reduced in size, but a light emitting diode bare chip is used. Therefore, a special mounting apparatus is required for quality control and mounting of the bare chip, and the equipment cost is increased. Moreover, it is technically advanced to arrange with high precision and high density, resulting in high manufacturing cost.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a pattern drawing apparatus using a light source used in a pattern drawing apparatus that is reduced in size and inexpensive.

In order to achieve the above-mentioned object, the present invention irradiates a substrate holding unit that holds the substrate horizontally, a light source unit that emits light, and light emitted from the light source unit toward the substrate held by the substrate holding unit. And a light source portion formed with a plurality of light emitting elements and respective light paths of the light emitting elements, and a plurality of emission holes indicating the arrangement positions of the light emitting portions of the light emitting elements. A positioning member; and a circuit board having an electrode for electrical connection with the light emitting element. The positioning member has an adhesive member on one surface, and the plurality of light emitting elements have an emission hole on one surface by the adhesive member. The light-emitting element that is disposed and fixed facing the substrate and mounted with an adhesive member is mounted on the circuit board, and the positioning member has a mounting reference hole that serves as a mounting position reference when the positioning member is mounted on the circuit board. The light emitting element A reference member having a reference mark serving as a positioning reference for placement on the device is superposed on the positioning member, and the light emitting element is placed on the positioning member based on the reference mark through the emission hole and fixed through the mounting reference hole. A pattern drawing apparatus characterized in that a positioning member in which a light emitting element is fixed to a circuit board by a member is collectively mounted .

  In the invention configured as described above, the light emitting element used as the light source of the pattern drawing apparatus is arranged so that the light emitting portion of the light emitting element is positioned in the emission hole of the positioning member, thereby easily positioning the plurality of light emitting elements. be able to. That is, since the light emitting portions of the light emitting elements can be arranged on the circuit board in the same posture and at equal intervals, uniform light can be emitted, and light can be used with high efficiency. Light that can be handled easily by the light irradiation unit can be obtained. Further, since the light emitting element is small, the entire pattern drawing apparatus can be downsized.

Further, the light source unit, Bei give a circuit board having an electrode for connecting the light emitting element electrically, the positioning member has an adhesive member on one surface, the plurality of light emitting elements on one surface by an adhesive member together are arranged to face fixed to the exit aperture, the fixed light-emitting element with an adhesive member by mounting the circuitry substrate, it is possible to position the light-emitting element with high accuracy.

  The positioning member has a mounting reference hole that serves as a mounting position reference when the positioning member is mounted on the circuit board, and a reference member that has a reference mark serving as a positioning reference for placing the light emitting element at a predetermined position; Overlay the positioning member, place the light emitting element on the positioning member on the reference mark through the emission hole, and collectively mount the positioning member on the circuit board with the fixing member through the mounting reference hole Thus, the positioning of the light emitting element can be performed with higher accuracy.

  In addition, since the light emitting element is a light emitting diode in which a light emitting portion is packaged, a commercially available product can be used and the cost can be reduced.

The present invention provides a plurality of light emitting elements that emit light, a positioning member that forms an optical path of each of the light emitting elements, and that has a plurality of emission holes that indicate the positions of the light emitting portions of the light emitting elements, and light emission And a circuit board having an electrode for electrical connection with the element, the positioning member has an adhesive member on one surface, and the plurality of light emitting elements are arranged on one surface facing the emission hole by the adhesive member The light emitting element fixed by the adhesive member is mounted on the circuit board, and the positioning member has a mounting reference hole which becomes a mounting position reference when mounting the positioning member on the circuit board. A positioning member and a reference member having a reference mark for positioning at a predetermined position are overlapped, and a light emitting element is arranged on the positioning member based on the reference mark through an emission hole. A light source, characterized in that collectively implement a positioning member where the light emitting element is fixed to the circuit board by a fixing member via a mount reference hole.

  In the invention configured as described above, a plurality of light emitting elements can be easily positioned by arranging the light emitting elements used for the light source so that the light emitting portions of the light emitting elements are positioned in the emission holes of the positioning members. That is, since the light emitting portions of the light emitting elements can be arranged on the circuit board in the same posture and at equal intervals, the uniform light can be emitted, and the light can be used with high efficiency. Since the light emitting element is small, the size of the light source can be reduced.

Further, Bei give a circuit board having an electrode for connecting the light emitting element electrically, the positioning member has an adhesive member on one surface, facing the exit aperture is a plurality of light emitting elements on one surface by an adhesive member Thus, the light emitting element can be positioned with high accuracy by mounting the light emitting element fixed by the adhesive member on the circuit board.

  The positioning member has a mounting reference hole that serves as a mounting position reference when the positioning member is mounted on the circuit board, and a reference member that has a reference mark serving as a positioning reference for placing the light emitting element at a predetermined position; The positioning member is overlapped, and the light emitting element is arranged on the positioning member based on the reference mark through the emission hole, and the positioning member having the light emitting element fixed to the circuit board by the fixing member is collectively mounted through the mounting reference hole. Thus, the positioning of the light emitting element can be performed with higher accuracy.

  In addition, since the light emitting element is a light emitting diode in which a light emitting portion is packaged, a commercially available product can be used and the cost can be reduced.

  According to the present invention, a plurality of light emitting elements can be easily positioned by arranging the light emitting elements used for the light source of the pattern drawing apparatus so that the light emitting portions of the light emitting elements are positioned in the emission holes of the positioning members. Thus, since uniform light can be emitted, the light can be used with high efficiency, and an excellent effect of reducing the size of the pattern writing apparatus can be achieved.

It is the schematic side view which looked at the pattern drawing apparatus concerning this invention from the side. It is the schematic plan view which looked at the pattern drawing apparatus concerning this invention from the upper part. It is a schematic block diagram which shows the structure of the drawing head of FIG. It is a schematic block diagram which shows the structure of the light source part of FIG. It is the schematic plan view which looked at the light source part of FIG. 4 from upper direction. It is a figure showing the example which arrange | positions package LED based on a positioning member. It is an enlarged view of package LED arrange | positioned based on the positioning member.

  FIG. 1 is a schematic side view of a pattern drawing apparatus (exposure apparatus) 1 as viewed from the side according to an embodiment of the present invention. FIG. 2 is a schematic plan view of the pattern drawing apparatus 1 of FIG. 1 viewed from above. The pattern drawing apparatus 1 draws a pattern such as a wiring pattern on the surface of the substrate 9 by emitting a light beam to a printed wiring board (hereinafter simply referred to as a board) 9 based on input drawing pattern information. This is a pattern drawing apparatus 1 for this purpose. The substrate 9 may be another substrate such as a photosensitive substrate in addition to the printed wiring board. The pattern drawing apparatus 1 includes a stage 5 that holds a substrate 9, a stage moving mechanism 7 that moves the stage 5 in the Y direction in FIG. 1, and a light beam that is held by the stage 5 on the surface of the substrate 9. The drawing unit 4 for irradiation, the drawing unit stage moving mechanism 13 for moving the drawing unit 4 in the X direction, and the control unit 6 connected to the drawing unit 4 are provided.

  The stage 5 is provided with an adsorption holding mechanism (not shown), and the back surface of the substrate 9 is adsorbed to the adsorption holding mechanism with the surface of the substrate 9, that is, the main surface coated with the photosensitive material facing upward. As a result, the substrate 9 is held on the stage 5. The stage 5 is moved in the Y direction (main scanning direction) in FIG. 1 by a stage moving mechanism 7 provided on the base 2. That is, on the base 2, a pair of rails 711 extending in the main scanning direction are spaced apart and arranged in parallel with each other. A stage support base 3 having a slightly larger planar size than the stage 5 is disposed on the rails 711 so as to be movable in the main scanning direction. A drive mechanism (not shown) in the main scanning direction is connected to the stage support 3 to move the stage support 3 in the main scanning direction. A linear encoder 712 is attached to the stage moving mechanism 7, and the linear encoder 712 detects the scanning position of the stage 5 in the main scanning direction, and a position detection signal indicating the scanning position is output to the control unit 6.

  The drawing unit 4 is fixedly held by the drawing unit stage 15. The drawing unit stage 15 is moved in the X direction (sub-scanning direction) in FIG. 1 by a drawing unit stage moving mechanism 13 provided on the drawing unit support base 11. That is, a pair of rails 131 extending in the sub-scanning direction are spaced apart and arranged in parallel on the drawing unit support base 11. The drawing unit stage 15 is arranged so as to be movable in the sub-scanning direction with respect to the rails 131. A driving mechanism (not shown) in the sub-scanning direction is connected to the drawing unit stage 15 to move the drawing unit stage 15 in the sub-scanning direction. Here, if a drive mechanism for moving the stage 5 in the sub-scanning direction is further provided, the drawing unit 4 may be fixedly arranged. This is because the stage 5 can be moved relative to the substrate 9 by moving in the main scanning direction and the sub-scanning direction.

  The control unit 6 includes a data processing unit 61, an irradiation control unit 62, and a scanning control unit 63, and pattern information such as a wiring pattern generated by CAD or the like is converted into drawing data in the data processing unit 61. The converted drawing data is output to the irradiation control unit 62 and the scanning control unit 63. The irradiation controller 62 converts the drawing data into raster data, and the emission of the light beam from the drawing unit 4 is controlled according to the converted raster data. The scanning control unit 63 controls the stage moving mechanism 7 and the drawing unit stage moving mechanism 13.

  In the present embodiment, five drawing units 4 are arranged on the drawing unit stage 15. These five drawing units 4 have the same configuration. Specifically, each drawing unit 4 includes a drawing head 20 and a light source unit 30. Since each drawing unit 4 has the same configuration, only one drawing unit 4 will be described below.

  FIG. 3 is a diagram illustrating a configuration of the drawing head 20. The drawing head 20 includes a DMD (Digital Micromirror Device) 21 that spatially modulates light, an integrator 224 that guides light emitted from the light source unit 30 described later to the DMD 21, an illumination optical system 22 that is an optical element group, and the DMD 21. A projection lens 23 that guides the light to the substrate 9. The illumination optical system 22 includes a relay lens 221 including a plurality of lenses, a mirror 222, and a condenser mirror 223. The light emitted from the light source unit 30 is guided to the condensing mirror 223 via the relay lens 221 and the mirror 222, and the condensing mirror 223 guides the light to the DMD 21 while condensing the light.

  The DMD 21 is provided with a group of micromirrors that are arranged in a two-dimensional grid and whose posture can be individually changed, and the light from the condensing mirror 223 is reflected by the micromirror group of the DMD 21 so as to be spatially arranged in two dimensions. Modulated light is derived. The DMD 21 is a spatial light modulation device having a group of micromirrors in which a plurality of micromirrors can be independently deflected on a silicon substrate, and according to data written in a memory cell corresponding to each micromirror. Each micromirror is inclined by a predetermined angle with respect to the surface of the DMD 21 by electrostatic action. Then, the light (that is, the spatially modulated light) formed only by the reflected light from the micromirror in the posture corresponding to the predetermined ON state is guided to the projection lens 23, and the light from the projection lens 23 is The light irradiation region on the substrate 9 optically conjugated to the micromirror group is irradiated.

  Next, the internal configuration of the light source unit 30 shown in FIG. 1 will be described. FIG. 4 is a schematic configuration diagram showing the configuration of the light source unit 30. FIG. 5 is a schematic plan view of the light source unit 30 shown in FIG. 4 as viewed from above. The light source unit 30 includes a plurality of surface-mounted light emitting diode packages (hereinafter simply referred to as package LEDs 311), a single plate-like electrode substrate 313 for mounting the plurality of package LEDs 311, and a package LED 311 with high accuracy. An optical block having an alignment sheet 319 for two-dimensional arrangement on 313, guide pins 321 for fixing the alignment sheet 319 to the electrode substrate 313, and a lens array 317 constituting a lens system one-on-one with respect to the package LED 311. The light emitted from the package LED 311 is guided to the drawing head 20 through the lens array 317.

  On the upper surface of the electrode substrate 313, a current supply circuit (not shown) for electrical connection with an electrode provided on the package LED 311 is formed.

  The package LED 311 includes an LED bare chip 315 serving as a light emission source therein, and has an electrode surface for electrical connection with the electrode substrate 313 on the surface opposite to the light emission surface. The LED bare chip 315 is molded with high precision using a technique such as semiconductor manufacturing, but there are few cases where the relative arrangement of the LED bare chip 315 in the package has an accuracy of the order of several microns. There are some cases where there is misalignment from the center. An anode electrode and a cathode electrode are formed on the electrode surface.

  The alignment sheet 319 is provided with the same number of output holes 325 as the light path for passing the light emitted from the arranged package LED 311 and the number of the package LEDs 311 arranged on the alignment sheet 319, and further aligned with the electrode substrate 313. A double-sided pressure-sensitive adhesive sheet for fixing the package LED 311 is provided on the surface where the fixing hole 323 for fixing the sheet 319 and the package LED 311 are arranged. The alignment sheet 319 is formed of a rectangular thin plate made of stainless steel or the like. Moreover, by using the adhesive sheet, it is easy to perform rearrangement when the package LED 311 is arranged. The adhesive sheet only needs to be able to fix the package LED 311 to the electrode substrate 313, and may have any size and shape.

  The guide pins 321 collectively fix the alignment sheet 319 having the package LED 311 fixed to the electrode substrate 313 through the fixing holes 323 provided in the alignment sheet 319. The lens array 317 is for adjusting the light emitted from the package LED 311 mounted on the electrode substrate 313 and guiding it to the drawing head 20, and for example, a mold lens or the like may be used.

  Next, creation of the light source unit 30 will be described in detail with reference to FIGS. 4 to 7. As described above, the LED bare chip 315 provided inside the package of the package LED 311 may be displaced from the center position of the package (see FIG. 5). Therefore, in order to guide the uniform light to the drawing head 20, the package LEDs 311 are not arranged based on the outer shape of the package, but are arranged two-dimensionally at the same posture and at equal intervals on the basis of the LED bare chips 315. It is necessary to arrange so that. As an example, in the present invention, the package LEDs 311 are arranged in 3 × 4 rows. Here, the same attitude of the LED bare chip 315 means a state in which the respective surfaces of the LED bare chips 315 are arranged flush with each other along the two-dot chain line as shown by the two-dot chain line in FIG.

  In order to arrange each LED bare chip 315 on the alignment sheet 319 in the same posture and at equal intervals, a positioning sheet 327 having a grid-like positioning line 329 serving as a positioning reference mark is used. The positioning line 329 is formed such that when the alignment sheet 319 and the positioning sheet 327 are overlapped with each other, the intersection of the positioning lines 329 comes to the approximate center of the emission hole 325.

  When the LED bare chip 315 is enlarged, for example, in the embodiment, the LED bare chip 315 is divided into a 4 × 4 lattice shape, and is configured in a state where chip elements 333 having gaps 331 are arranged. The arrangement of these chip elements 333 is formed with very high accuracy using a semiconductor manufacturing technique or the like. While observing the gap 331 and the positioning line 329 from below with an observation system such as an inverted microscope, the LED bare chips 315 are positioned on the alignment sheet 319 while adjusting so that the positioning line 329 is positioned in the gap 331. Go. The positioned LED bare chip 315 is fixed to the adhesive sheet 320. By doing so, the LED bare chip 315 is positioned in the emission hole 325. That is, the emission hole 325 functions as a position where the LED bare chip 315 is arranged.

  By disposing the package LED 311 on the alignment sheet 319 in the same posture with the LED bare chip 315 as a reference and at equal intervals, the package LED 311 can be collectively mounted on the electrode substrate 313. That is, for mounting on the electrode substrate 313, bonding is performed via a conductive adhesive material such as solder (for example, lead-free solder). Even when the solder is melted and bonded, the package LED 311 is fixed to the alignment sheet 319 and further fixed to the electrode substrate 313 with the guide pins 321 through the fixing holes 323 of the alignment sheet 319. It is possible to prevent the positional deviation of the package LED 311 due to the above.

  Further, the relative positional relationship between the fixing hole 323 formed in the alignment sheet 319 and the package LED 311 arranged in the alignment sheet 319 with high accuracy is guaranteed. Therefore, after the guide pin 321 is removed, the fixing hole 323 is fixed to the optical block 318 and the alignment sheet 319 via the fixing hole 323 with screws or the like, so that the center of the optical axis of the lens array 317 and the LED corresponding thereto are fixed. It also functions as an optical adjustment hole for aligning the light emitting surface center of the bare chip 315 with high accuracy.

  In the pattern drawing apparatus 1, by using the alignment sheet 319 to arrange the LED bare chips 315 in the same posture and at equal intervals, a plurality of package LEDs 311 can be easily mounted on the electrode substrate 313 with high accuracy. . An inexpensive package LED 311 can be used, the cost can be reduced, a small light source can be created, and the pattern writing apparatus can be downsized.

  In particular, since the emission hole 325 of the alignment sheet 319 is used to arrange the LED bare chip 315, the LED bare chip 315 is surely positioned on the optical path. Moreover, since it can work while visually confirming that the LED bare chip 315 is located in the emission hole 325, the package LED 311 can be easily positioned.

  The present invention is mounted on the basis of the light emitting portion of the packaged LED, and the package LED 311 may be a planar mounting type light emitting diode or a shell type light emitting diode.

  Alternatively, the package LED 311 may be fixed to the alignment sheet 319 and collectively mounted on the electrode substrate 313, and then guided to the drawing head 20 via the lens array 317 with the alignment sheet 319 removed.

  Further, as the light emitting element, not only a light emitting diode but also a semiconductor laser or the like may be used.

  In the above embodiment, the double-sided pressure-sensitive adhesive sheet is used as the pressure-sensitive adhesive member. However, the present invention is not limited to this, and it is sufficient that the package LED 311 and the alignment sheet 319 can be fixed. Adhesives and other sticky materials may be used.

  In the above embodiment, the case where the LED bare chip 315 in the package LED 311 is displaced from the center position in the package has been described. Since the package LED 311 can be easily mounted on the electrode substrate 313 by using the emission hole 325 of the alignment sheet 319 to arrange the 315, uniform light can be emitted using a commercially available light emitting diode or the like. A small-sized light source that can emit light can be created, whereby the pattern drawing apparatus can be reduced in size and cost.

  The present invention relates to a semiconductor wafer, a glass substrate for photomask, a glass substrate for liquid crystal display, a glass substrate for plasma display, a substrate for FED (Field Emission Display), a substrate for optical disk, a substrate for magnetic disk, a substrate for magneto-optical disk, etc. The present invention can be applied to a pattern drawing apparatus for drawing a pattern on a substrate and its light source.

DESCRIPTION OF SYMBOLS 1 Pattern drawing apparatus 4 Drawing unit 5 Stage 6 Control part 7 Stage moving mechanism 9 Substrate 13 Drawing unit stage moving mechanism 15 Drawing unit stage 20 Drawing head 22 Illumination optical system 30 Light source part 311 Package LED
313 Electrode substrate 315 LED bare chip 317 Lens array 319 Alignment sheet 320 Adhesive sheet 321 Guide pin 323 Fixing hole 325 Output hole 327 Positioning sheet 329 Positioning line 333 Chip element

Claims (4)

A substrate holder for horizontally holding the substrate;
A light source that emits light;
A light irradiation unit that irradiates the light emitted from the light source unit toward the substrate held by the substrate holding unit, and
The light source unit is
A plurality of light emitting elements;
A positioning member that forms the respective optical paths of the light emitting elements and is formed with a plurality of emission holes that indicate the arrangement positions of the light emitting portions of the light emitting elements;
A circuit board having an electrode for electrically connecting to the light emitting element,
The positioning member has an adhesive member on one side;
The plurality of light emitting elements are arranged and fixed to the one surface facing the emission hole by the adhesive member, and the light emitting elements fixed by the adhesive member are mounted on the circuit board,
The positioning member has a mounting reference hole serving as a mounting position reference when the positioning member is mounted on the circuit board.
A reference member having a reference mark serving as a positioning reference for disposing the light emitting element at a predetermined position is overlapped with the positioning member, and the light emitting element is used as the positioning member based on the reference mark through the emission hole. A pattern drawing apparatus characterized in that a positioning member having the light emitting element fixed to the circuit board by a fixing member is collectively mounted through the mounting reference hole . The pattern drawing apparatus according to claim 1 ,
The pattern drawing apparatus, wherein the light emitting element is a light emitting diode in which the light emitting unit is packaged. A plurality of light emitting elements that emit light;
A positioning member that forms the respective optical paths of the light emitting elements and is formed with a plurality of emission holes that indicate the arrangement positions of the light emitting portions of the light emitting elements;
A circuit board having an electrode for electrically connecting to the light emitting element,
The positioning member has an adhesive member on one side;
The plurality of light emitting elements are arranged and fixed to the one surface facing the emission hole by the adhesive member, and the light emitting elements fixed by the adhesive member are mounted on the circuit board,
The positioning member has a mounting reference hole serving as a mounting position reference when the positioning member is mounted on the circuit board.
A reference member having a reference mark serving as a positioning reference for disposing the light emitting element at a predetermined position is overlapped with the positioning member, and the light emitting element is used as the positioning member based on the reference mark through the emission hole. A light source comprising: a positioning member on which the light emitting element is fixed to the circuit board by a fixing member through the mounting reference hole . The light source according to claim 3 ,
The light source, wherein the plurality of light emitting elements are light emitting diodes in which the light emitting unit is packaged.