JP5400465B2 - High frequency vibration horn - Google Patents

Description

  The present invention relates to a high-frequency vibration horn that prevents the coarsening of crystal grains of an ultrasonic horn main body that may occur each time a hard material is brazed to the tip of the horn and minimizes the influence on the vibration characteristics of the entire horn. .

  Various ultrasonic devices are manufactured using ultrasonic waves, which are examples of high frequencies. For example, an ultrasonic horn composed of a metal mainly composed of Fe, Ti, or the like is used in the ultrasonic device, and an ultrasonic radiation surface that comes into contact with an object to be processed is provided at the tip of the ultrasonic horn. From the viewpoint of improving durability against abrasion, ceramics and so-called hard materials are joined.

  As an example of a high-frequency horn, for example, an ultrasonic horn as described in JP 2000-70854 A is known (for example, see Patent Document 1).

  According to the above-mentioned patent document 1, the material of the ultrasonic horn main body is composed of a metal mainly composed of Fe or Ti, and it is described that the horn main body and the hard material are bonded by brazing, diffusion bonding, or the like. Yes. As the material of the ultrasonic horn, aluminum alloy, stainless steel, titanium alloy or the like is used depending on the application.

  In addition, the ultrasonic horn generates the generated frequency and the amplitude value of the tip of the horn. The material used is determined in consideration of the Young's modulus, tensile strength, density, longitudinal wave velocity, fatigue strength, etc. It is designed so that the optimum vibration can be obtained under the temperature environment used in the above, that is, the temperature environment at room temperature.

  Furthermore, when ceramics or hard materials are bonded to the tip of the ultrasonic horn with a bonding metal made of a material different from that of the horn main body, if the porosity of the bonding metal portion is less than 15%, ultrasonic vibration It is known that energy absorption is low and efficient processing is possible.

JP 2000-70854 A

  However, in order to join a hard metal or ceramic material to the tip of the ultrasonic horn by brazing or diffusion bonding, the entire ultrasonic horn must be heated to a high temperature in a furnace for a long time to join the hard material. . When the entire ultrasonic horn is heated in the furnace for a long time, the crystal material of the metallic material of the ultrasonic horn becomes coarse and the tensile strength and fatigue strength tend to decrease.

  In addition, in materials where the tensile strength is increased by heat treatment or age hardening in aluminum alloy or titanium alloy, the tensile strength increased by bending, heat treatment or age hardening may be lost when heated to a high temperature in the furnace. Heating the entire horn in the furnace for a long time has led to a decrease in the vibration characteristics of the ultrasonic horn, which has been a major problem.

  The present invention has been made in consideration of the above-mentioned circumstances, and prevents the crystal horn coarsening of the ultrasonic horn main body caused by heating the horn at a high temperature for a long time in the furnace. An object of the present invention is to provide a high-frequency vibration horn in which the influence on vibration characteristics is minimized.

The high-frequency vibration horn according to the present invention is a high-frequency vibration horn that amplifies the amplitude of high-frequency vibration generated in a piezoelectric element that is supplied with a high-frequency current, as described in the claims, in order to solve the above-described problem. A horn base material that transmits high-frequency vibration generated by the piezoelectric element; and a screw-in tip that has a main body portion on which a screw member is erected and is detachably attached to the horn base material. While providing a screw hole for a chip for detachably attaching the screwed tip using a wrench on the side of the base material that transmits the high-frequency vibration to the outside, the screwed tip is fastened to the screw hole, in the high frequency vibration horn configured with said horn base material are integrated, to the main body portion of the screw-tip, hard through the brazed portion A material portion is joined, and the screw-in tip includes a main body side step portion having a flat surface for wrench on the main body portion, and a brazed hard material side step portion including the brazed portion and the hard material portion. The brazing hard material side step portion is formed so as to escape from the main body side step portion to the inner diameter side of the screw portion, and the wrench on the flat surface for the wrench of the main body side step portion The wrench is configured not to come into contact with the brazed hard material side step portion when the screwed tip is fastened by using a screw .

  According to the high frequency vibration horn of the present invention, the horn main body is configured to be detachable by a screw between a screwed tip serving as a horn tip and a horn base material, and only a screwed tip for joining ceramics or a hard material is disposed in the furnace. The horn base material that is heated at high temperature for a long time and the horn base material to which the screwed tip is attached is not heated at all. Coarseness can be prevented.

  In addition, even when newly worn ceramics or hard materials are joined, the horn base material is not heated at all, so the vibration characteristics of the horn base material due to repeated high-temperature and long-time heating in the furnace. Changes can be minimized. Further, since no heat is applied to the horn base material, the tensile strength increased by heat treatment or age hardening is not lost, and the life of the horn base material can be extended compared to the conventional horn base material.

Schematic which showed the structure outline of the peening apparatus to which the high frequency vibration horn which concerns on this invention is applied. It is the figure which showed the structure of the 1st screwed tip (an example of a screwed tip) of the high frequency vibration horn which concerns on this invention, (a) is a front view of a 1st screwed tip, (b) is shown to (a). (C) is an arrow view from the direction along the arrow B shown in (a) (a side view of the first screwed tip). Bottom view). It is the figure which showed the structure of the 2nd screwed tip (an example of a screwed tip) of the high frequency vibration horn which concerns on this invention, (a) is a front view of a 2nd screwed tip, (b) is shown to (a). (C) is an arrow view from the direction along the arrow D shown in (a) (bottom surface of the second screwed tip). Figure).

  Hereinafter, embodiments of a high-frequency vibration horn according to the present invention will be described with reference to the accompanying drawings. In addition, the high frequency described in this specification means a so-called high frequency band compared with the commercial frequency, and more specifically means a band of 14 kHz (including an ultrasonic region of 20 kHz or more). .

[First Embodiment]
FIG. 1 is a schematic diagram showing a schematic configuration of a peening apparatus 1 to which a high-frequency vibration horn 10 according to the present invention is applied.

  In the peening apparatus 1 shown in FIG. 1, the piezoelectric element 2 is sandwiched between the first collar 3 and the second collar 4, and the piezoelectric element 2 is sandwiched between the first collar 3 and the second collar 4. The vibration horn 10 is firmly fastened to one end with a fastener such as a mounting bolt 5. Further, a high frequency current is supplied to the piezoelectric element 2 from the high frequency power supply device 6 through the electric wire 7. Then, the piezoelectric element 2 vibrates at a predetermined frequency by the high-frequency current supplied from the high-frequency power supply device 6, and this high-frequency vibration is transmitted to the horn base material 11 of the high-frequency vibrating horn 10.

  The high-frequency vibration transmitted to the horn base material 11 is transmitted from the end face (receiving end face) on the side where the piezoelectric element 2 is fastened (upper side shown in FIG. 1) to the transmission direction of the vibration (lower direction shown in FIG. 1). The material and shape of the horn base material 11 are designed so that the amplitude is maximized at the existing horn end face (feed end face) S1. A high-frequency vibration horn 10 shown in FIG. 1 is an example, and is a simple solid horn having a cylindrical shape called a stepped uniform cross-section horn.

  In addition, the material of the horn base material 11 is appropriately selected from materials having high hardness such as aluminum alloy, carbon steel, and Ti alloy in consideration of the frequency of the high frequency to be used and the magnitude of the amplitude. For example, as a more specific material selected, Ti-3Al-2.5V (meaning a Ti alloy containing 3% (mass%) of Al and 2.5% (mass%) of V. Hereinafter, the same applies. And Ti-6Al-4V and Ti-6Al-7Nb. In particular, Ti-3Al-2.5V, Ti-6Al-4V, and Ti-6Al-7Nb are durable and are preferable when used at a larger amplitude (for example, an amplitude of more than 60 μm).

  The high frequency vibration generated by the piezoelectric element 2 is transmitted from the piezoelectric element 2 side to the horn end surface S1 side of the high frequency vibration horn 10. A screw hole 13 for a chip for attaching and detaching a screw-in chip 12 (refers to a first screw-in chip 12A and a second screw-in chip 12B, which will be described later, hereinafter the same) is formed in the lower part of the horn base material 11. The horn base material 11 and the screwed tip 12 are integrated in a detachable manner by fastening the screwed tip 12 to the horn base material 11 through the tip screw hole 13 with a tightening torque in a removable state. The high-frequency vibration horn 10 that has been made can be realized. From the standpoint of adjusting the fastening condition and preventing screw hole breakage, resin or the like may be coated on at least one of the screw portion 15 of the screw-in tip 12 and the screw hole 13 for tip.

  The screwed tip 12 is made of substantially the same material as the horn base material 11. By constituting the screwed tip 12 with substantially the same material as the horn base material 11, the vibration of the horn base material 11 can suppress the occurrence of reflection and attenuation at the screwed tip seat surface S2. Here, substantially the same material means a material that maintains the same property of the material (especially, reflection and attenuation properties) even if the proportion of the composition is somewhat different. Say.

  The screwed tip 12 is a screwed tip base material formed of substantially the same material as the horn base material 11, and is provided with a threaded portion 15 that is fitted into the tip screw hole 13 and fitted therein. A main body portion 16 which is a main body of one screw-in chip 12, a brazing portion 17 formed at the time of brazing on a surface facing the screw portion 15, and a hard material joined to the main body portion 16 via the brazing portion 17. And a hard material portion 18.

  Here, the joining material (brazing material) and the hard material used for brazing are materials usually used in an ultrasonic horn or the like. Considering the purpose and application of applying the high-frequency vibration horn 10, the brazing material is appropriately selected from, for example, Au, Ag, Cu, Pd, pb, etc., and the hard material is, for example, ceramics, cermet, WC, TiC, etc. The sintered alloy is appropriately selected.

  As shown in FIG. 1, the high-frequency vibration horn 10 is a device that sends out high-frequency vibration generated in the piezoelectric element 2 that is supplied with a high-frequency current from a high-frequency power source 6. A horn base material 11 that transmits the horn base material 11 and a screwed tip 12 that is detachably attached to the horn base material 11. The high-frequency vibration of the horn base material 11 is sent to the outside (feed end surface) side, and the screwed tip 12 is detachable. While the screw hole 13 for a chip | tip for attachment is provided, the screwed chip | tip 12 is fastened in this screw hole 13 for a chip | tip, and it is comprised so that the screwed chip | tip 12 and the horn base material 11 may be integrated.

  FIG. 2 is a view showing a structure of a first screwed tip 12A, which is an example of the screwed tip 12 of the high-frequency vibration horn 10 shown in FIG. 1, and FIG. 2 (a) shows the structure of the first screwed tip 12A. A front view (the state shown in FIG. 1 is a front view, and the horn end surface S1 is called a bottom surface), FIG. 2B is a view from the direction along the arrow A shown in FIG. FIG. 2C is a view from the direction along the arrow B shown in FIG. 2A (a bottom view of the first screwed tip 12A). In addition, in this specification, the part only described as FIG. 2 shall point out all the drawings of FIG. 2 (a)-FIG.2 (c).

  According to FIG. 2, as described above, the first screwed tip 12 </ b> A is formed by joining a hard material to the main body portion 16 with a brazing material, and the main body portion 16 provided with the screw portion 15 is brazed. The hard material part 18 is joined via the attaching part 17. Further, a wrench flat surface S3 for attaching the first screwed tip 12A to the horn base material 11 is provided. 2C is a curved surface excluding the wrench flat surface S3 from the outer peripheral (outer diameter) surface of the main body portion 16 of the screw-in tip 12A.

  The first screwed tip 12 </ b> A is firmly screwed to the horn base material 11 through the tip screw hole 13. The thickness of the main body portion 16 of the first screwed tip 12A, that is, the base material thickness t is configured to be larger than the thickness of the fastening wrench, and is fastened with the wrench or attached to and detached from the horn base material 11. At this time, the hard material portion 18 and the brazed portion 17 are prevented from being damaged by applying an excessive torque. The screw hole 13 for the chip of the first screwed tip 12A and the base material thickness t of the first screwed tip 12A are made of substantially the same material as the horn base material 11, and the horn base material 11 The effect on the vibration characteristics is minimized.

  According to the high-frequency vibration horn 10 configured as described above, the screw tip 12 is configured to be detachable in the tip screw hole 13 provided in the screw tip seat surface (end surface of the horn base material 11) S2. When brazing the hard material (hard material portion 18) to the high-frequency vibration horn 10, only the screwed tip 12 may be heated at a high temperature for a long time, and the horn base material 11 is not exposed to a high temperature environment for a long time. As a result, the horn base material 11 can be maintained as it is. As a result, the horn base material 11 can prevent loss of tensile strength and coarsening of crystal grains caused by being exposed to a high temperature for a long time, and extend the life of the high-frequency vibration horn 10 (and the horn base material 11). (Longer life), and changes in vibration characteristics can be minimized (minimized).

  Further, when the hard material portion 18 in which the hard material is bonded to the main body portion 16 is worn, conventionally, it has been necessary to braze the hard material again to the horn. If prepared in advance, the high-frequency vibration horn 10 can be easily used by removing the screwed tip 12 with the hard material portion 18 worn away from the horn base material 11 and attaching a new screwed tip 12. be able to.

  Furthermore, in the case of using the high frequency vibration horn 10 by changing the amplitude at the high frequency vibration horn 10 from the value that has been used so far, there has conventionally been a situation that a hard material with higher durability is required. In this case, it was necessary to use another high-frequency vibration horn. However, in the high-frequency vibration horn 10, if the screw-in tip 12 corresponding to the amplitude to be used is prepared in advance, the screw-in tip 12 can be simply replaced. The single high frequency vibration horn 10 can be easily used corresponding to a plurality of amplitudes.

[Second Embodiment]
In the high-frequency vibration horn 10 according to the second embodiment of the present invention, the screwed tip 12 shown in FIG. 1 is replaced with a second screwed tip 12 shown in FIG. 3 described later, instead of the first screwed tip 12A shown in FIG. However, the other parts are not substantially different. Therefore, in the second embodiment, the second screw-in tip 12B that is different from the first screw-in tip 12A will be mainly described, and the other components that are not substantially different will be denoted by the same reference numerals and described. Omitted.

  3 is a view showing the structure of a second screwed tip 12B, which is an example of the screwed tip 12 of the high-frequency vibration horn 10 shown in FIG. 1, and FIG. 3 (a) shows the structure of the second screwed tip 12B. A front view (the state shown in FIG. 1 is a front view, the horn end surface S1 is called a bottom surface), and FIG. 3B is an arrow view from the direction along the arrow C shown in FIG. FIG. 3C is a view from the direction along the arrow D shown in FIG. 3A (a bottom view of the second screwed tip 12B). In addition, in this specification, the part only described as FIG. 3 shall point out all the drawings of FIG. 3 (a)-FIG.3 (c).

  According to FIG. 3, the second screwing tip 12B is against the flat surface S3 for wrench provided on the main body portion 16, the brazing portion 17 and the hard material portion 18 of the first screwing tip 12A shown in FIG. The brazing portion 17 and the hard material portion 18 are configured by providing a relief flat surface S4 for escaping from the wrench from the wrench flat surface S3 to the center side (inner diameter side) of the screw portion 15. That is, the second screwed tip 12B prevents the wrench torque from being applied to the wrench flat surface S3 provided on the brazed portion 17 and the hard material portion 18 of the first screwed tip 12A shown in FIG. From a viewpoint, it is the structure which has escaped and arrange | positioned further to the internal diameter side of the thread part 15 rather than the flat surface S3 for wrenches.

  In other words, the outer peripheral surface having the threaded portion 15 of the second screw-in tip 12B as the central axis is formed by the step of the main body portion 16 formed by the wrench flat surface S3 and the curved surface R1, and the outer peripheral surface is formed by the threaded portion 15. It is configured as a two-step step structure having a step of a brazing portion 17 and a hard material portion 18 formed by a relief flat surface S4 provided on the inner diameter side and a curved surface R1.

  The advantage of the second screwed tip 12B configured as described above is that when the screwed tip base material thickness t is small, a sufficient thickness of the wrench flat surface S3 cannot be secured, and the second screwed tip 12B is used as a horn. When fastening to the base material 11, there may occur a case where it cannot be fastened with a predetermined torque. Even in this case, the relief flat surface S4 is provided in the brazed portion 17 and the hard material portion 18, and the wrench contacts the brazed portion 17 and the hard material portion 18 when the second screwed tip 12B is fastened. Therefore, it is possible to prevent an excessive torque from being applied to the brazed portion 17 and the hard material portion 18. Thereby, the possibility that the hard material portion 18 is peeled off from the main body portion 16 and the second screwed tip 12B is damaged can be reduced as compared with the first screwed tip 12A.

  In the second screwed tip 12B shown in FIG. 3, the flat surface S3 for wrench and the flat surface S4 for relief form a parallel surface, but the torque of the wrench is caused by the brazed portion 17 and the hard material portion 18. In such a situation, the relief flat surface S4 does not necessarily have a parallel surface relationship with the wrench flat surface S3, and the relief flat surface S4 does not have to be a flat surface.

  As described above, according to the high-frequency vibration horn 10, the screw tip 12 is configured to be detachable in the tip screw hole 13 provided on the screw tip seating surface (end surface of the horn base material 11) S 2, so that the hard material (hard material When the part 18) is brazed to the high-frequency vibration horn 10, only the screwed tip 12 needs to be heated at a high temperature for a long time, and the horn base material 11 does not have to be exposed to a high temperature environment for a long time. The material 11 can be maintained as it is. As a result, the horn base material 11 can prevent the loss of tensile strength and the coarsening of crystal grains caused by being exposed to a high temperature for a long time, extending the life of the high-frequency vibration horn 10 (and the horn base material 11). Thus, the change in vibration characteristics can be minimized.

  On the other hand, the high frequency vibration horn 10 is much more useful than the conventional one in terms of maintenance when the hard material portion 18 is worn. More in detail. When the hard material portion 18 obtained by bonding the hard material to the main body portion 16 is worn, conventionally, it has been necessary to braze the hard material again to the horn. However, in the high-frequency vibration horn 10, the screwed tip 12 is prepared in advance. If this is done, the high-frequency vibrating horn 10 can be easily used by removing the screwed tip 12 with the hard material portion 18 worn away from the horn base material 11 and attaching a new screwed tip 12. .

  Furthermore, in the case of using the high frequency vibration horn 10 by changing the amplitude at the high frequency vibration horn 10 from the value that has been used so far, there has conventionally been a situation that a hard material with higher durability is required. In this case, it was necessary to use another high-frequency vibration horn. However, in the high-frequency vibration horn 10, if the screw-in tip 12 corresponding to the amplitude to be used is prepared in advance, the screw-in tip 12 can be simply replaced. The single high frequency vibration horn 10 can be easily used corresponding to a plurality of amplitudes.

  Further, in the first screwed tip 12A and the second screwed tip 12B in which the wrench flat surface S3 is provided on the outer peripheral surface of the main body portion 16 of the screwed tip 12, the horn base material 11 and the first screwed tip 12A or second When attaching and detaching to and from the screwed tip 12B, screw tightening and screw loosening with a wrench can be easily performed.

  Further, in the second screwed tip 12B, the wrench does not come into contact with the brazed portion 17 and the hard material portion 18 when the second screwed tip 12B is fastened. Torque can be prevented from being applied. Thereby, the possibility that the hard material portion 18 is peeled off from the main body portion 16 and the second screwed tip 12B is damaged can be reduced as compared with the first screwed tip 12A.

  Note that the present invention is not limited to the above-described embodiments as they are, and may be embodied by modifying constituent elements without departing from the scope of the invention in the implementation stage.

1 Peening Device 2 Piezoelectric Element 3 First Collar 4 Second Collar 5 Mounting Bolt 6 High Frequency Power Supply 7 Electric Wire (Cable)
DESCRIPTION OF SYMBOLS 10 High frequency vibration horn 11 Horn base material 12A, 12B Screw tip 13 Tip screw hole 15 Screw portion 16 Body portion 17 Brazing portion 18 Hard material portion S1 Horn end surface S2 Screw tip seat surface S3 Flat surface for relief S4 Flat surface for relief R1 curved surface

Claims (2)

A high-frequency vibration horn that amplifies the amplitude of high-frequency vibration generated in a piezoelectric element that is supplied with a high-frequency current,
A horn base material that transmits high-frequency vibration generated in the piezoelectric element;
It has a main body portion on which a screw member is erected , and includes a screw-in tip that is detachably attached to the horn base material,
A screw hole for a chip for detachably attaching the screwed chip with a wrench is provided on the side of sending out the high-frequency vibration of the horn base material, and the screwed chip is fastened to the screw hole by fastening the screwed chip. In the high-frequency vibration horn configured so that the chip and the horn base material are integrated ,
A hard material part is joined to the main body part of the screwed tip via a brazing part,
The screwed tip is formed with a main body side step portion having a flat surface for wrench in the main body portion, and a brazed hard material side step portion comprising the brazed portion and the hard material portion,
The brazed hard material side stepped portion is arranged to escape from the main body side stepped portion to the inner diameter side of the threaded portion, and the wrench on the flat surface for the wrench of the main body side stepped portion is used. A high frequency vibration horn configured so that the wrench does not come into contact with the brazed hard material side step portion when a screwed tip is fastened . 2. The high frequency vibration horn according to claim 1, wherein a material of the screwed tip base material is substantially the same material as the horn base material .

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