JP5397279B2 - Coreless linear motor - Google Patents

Description

  The present invention relates to a coreless linear motor that is used to perform constant speed feed, high speed positioning feed, and the like in the field of semiconductor manufacturing equipment, machine tools, and the like.

  As an example of a conventional coreless linear motor, for example, there is one described in Patent Document 1 (hereinafter, referred to as first prior art as appropriate). In the coreless linear motor according to the first prior art, a plurality of permanent magnets are linearly arranged on a field yoke to constitute a stator. Further, the armature is constituted by an armature having a coreless armature coil formed by arranging at least two coil arrays composed of three phases into a flat plate shape. At this time, the coil array is opposed to the plurality of permanent magnets via a magnetic gap, and a predetermined current corresponding to the position of the armature is passed through the armature coil, whereby the armature coil and the permanent magnet The armature moves linearly by the electromagnetic action.

  On the other hand, in such a coreless linear motor, two-phase coils of the three phases are arranged in one coil row with the substrate sandwiched therebetween, and the winding start / end positions of the remaining one-phase coil are reversed to rotate the substrate. A configuration in which the coil is arranged on the other side of the coil array is also known in the past (hereinafter referred to as second prior art as appropriate). By setting it as such a structure, compared with the structure of the said 1st prior art, since the length of a needle | mover can be set to 2/3, stroke length can be increased.

  FIG. 7 is a cross-sectional view of the coreless linear motor according to the second prior art as seen from the moving direction (described later) of the mover, and FIG. 8 shows the armature base (described later) of the conventional coreless linear motor. It is the top view seen from the top in the removed state. 7 corresponds to a cross-sectional view taken along the line CC in FIG.

  7 and 8, the coreless linear motor 100 has a stator 101 and a mover 102.

  The stator 101 includes at least one (two in this example) field yokes 11 and 12 and magnet rows 14 </ b> A and 14 </ b> B composed of a plurality of permanent magnets 13. The field yokes 11 and 12 are fixed so as to face each other via a field yoke fixing plate 15. In each of the magnet arrays 14A and 14B, the plurality of permanent magnets 13 are arranged inside the field yokes 11 and 12 along the traveling direction of the mover 102 (left and right in FIG. 8) so that the polarities are alternately different. It is arranged linearly. At this time, the permanent magnets 13 are arranged such that adjacent magnets are arranged at a predetermined pitch Pm, and the polarities of the magnets facing each other with the mover 102 interposed therebetween are different.

  The mover 102 has a coreless armature 120. The armature 120 includes an armature base 21 provided at the upper end of the armature 120, a plurality (two in this example) of coil arrays 122A and 122B, and a substrate 23.

  The coil rows 122A and 122B are so-called concentrated winding, and a plurality (three in this example) of coils 130 are fixed together by a resin mold (not shown) and formed into a flat plate shape. 140 is configured.

  In addition, one of the coil groups 122A and 122B, at least one coil group 122A is disposed along the traveling direction so as to face the magnet group 14A via a magnetic gap (two in this example). ) Coil 130. The other coil row 122B includes at least one (in this example, one) coil 130 disposed along the traveling direction so as to face the magnet row 14B via a magnetic gap.

  The board | substrate 23 is interposed and arrange | positioned between adjacent coil row | line | column 122A, 122B, and insulates and connects between the coils 130 with which coil row | line | column 122A, 122B is equipped.

  The armature base 21 can fix a table for placing a load (not shown).

  9 is a side sectional view showing the detailed structure of the coil array of the armature 120 as seen from the side along the AA section in FIG. 7, and FIG. 10 shows the BB section in FIG. It is a cross-sectional view corresponding to the case of viewing.

  As shown in FIGS. 9 and 10 and FIG. 7, the coil array 122A is fixed to one side (left side in FIG. 7, upper side in FIG. 10) of the armature base 21, and the coil array 122B is armature. It is fixed to the other side of the base 21 (the right side in FIG. 7 and the lower side in FIG. 10). All the coils 130 have the same radial direction dimension w and the same thickness direction dimension t.

  In the coreless linear motor 100 configured as described above, a predetermined current corresponding to the position of the armature 120 is passed through the armature coil 140, so that the armature 102 is moved by the electromagnetic action between the armature coil 140 and the permanent magnet 13. It moves linearly along the traveling direction.

JP 2001-197718 (paragraph 0006, FIG. 4)

  In the coreless linear motor 100 configured as described above, the heat generated from the coil 130 during traveling is transmitted to the armature base 21 and then radiated to the outside by the armature base 21. At this time, in the second prior art, the dimensions are set uniformly so that the coil 130 of the coil array 122A and the coil 130 of the coil array 122B have the same radial dimension w and thickness dimension t. Has been. Therefore, the heat transfer area S (see FIG. 10) when heat generated from the coil 130 in the coil row 122A is transmitted to the armature base 21 is also transmitted to the armature base 21 from the coil 130 in the coil row 122B. The heat transfer area S (see FIG. 10) also remains at a relatively small value. As a result, the heat resistance during the heat transfer increases, and the temperature in the motor tends to rise. Further, an area AR (see FIGS. 8 and 10) where the coil 130 does not exist in the armature 120 remains, and as a result, the occupation ratio of the conductor in the motor is reduced and the efficiency is lowered. The temperature tends to rise. As described above, the uniform setting of the coil dimensions causes a temperature rise due to heat generation of the armature 120, and it is difficult to adjust the temperature of the motor in a desired mode.

  An object of the present invention is to provide a coreless linear motor capable of adjusting a mode of temperature change in the motor due to heat generation of a coil as desired.

  In order to achieve the above object, the present invention is directed to a field in which a plurality of permanent magnets are arranged in a straight line so that the polarities are alternately different from each other and a magnet array of the permanent magnets facing each other in parallel via a magnetic gap. And an armature having a coreless armature coil formed in a flat plate shape by arranging a plurality of coil arrays, wherein one of the field and the armature is a stator and the other is a mover A coreless linear motor that travels the field and the armature along a predetermined traveling direction, wherein the field is configured to oppose two rows of permanent magnets, The coreless armature includes an armature base and a substrate that is attached to the armature base and that insulates the plurality of coil arrays, and the plurality of coil arrays are , Diameter along the direction of travel A plurality of first coils having the same direction dimension and a thickness direction dimension, a first coil group including at least one pair of two first coils, and the first coil group across the substrate A second coil having a radial dimension and a thickness dimension different from those of the first coil is provided corresponding to each of the two first coils of each set. 2 coil arrays.

  In the present invention, two rows of magnets are provided in the field. In each magnet row, a plurality of permanent magnets are linearly arranged so that the polarities are alternately different. On the other hand, a coreless armature is provided with an armature coil in which a plurality of coil arrays attached to an armature base are arranged and formed into a flat plate shape. Is insulated by. Further, the armature is disposed so as to face the magnet row of the permanent magnet via a magnetic gap. Then, by passing a predetermined current according to the position to the armature coil, the armature (one of the armature and the field) is moved to the stator (armature by the electromagnetic action of the coil and the permanent magnet). And the other of the field). Heat generated from the coil at this time is transmitted to the armature base and then radiated to the outside by the armature base.

  In the present invention, the plurality of coil arrays provided in the armature coil include a first coil array and a second coil array provided on opposite sides of the substrate. The first coil array is provided with at least one set of first coils, each having the same radial direction and the same thickness direction dimension, each set having two sets. The second coil array includes second coils, one for each of the two first coils in each set. That is, one second coil is provided on the opposite side across the substrate so as to correspond to a pair of first coils.

  At this time, in the present invention, unlike the conventional structure, the radial dimensions of the first coil and the second coil are made different from each other, and the thickness direction dimensions of the first coil and the second coil are also made different from each other. . By changing the radial dimensions of the first coil and the second coil, the heat transfer area when the heat generated from the first and second coils is transmitted to the armature base is changed. As a result, the amount of heat released from the armature base changes, and as a result, the mode at the time of temperature change due to heat generation of the first coil and the second coil can be adjusted. Also, by changing the thickness direction dimensions of the first coil and the second coil together with the radial direction dimension, the efficiency is increased or decreased by changing the occupation ratio of the conductor in the motor, and this also adjusts the mode of temperature change It becomes possible.

  As described above, in the present invention, the temperature in the motor is increased by the heat generation of the first coil and the second coil by making the radial dimension and the thickness direction dimension of the first coil and the second coil different from each other. The mode of change can be adjusted as desired.

  Preferably, the second coil of the second coil array includes the radial dimension larger than the first coil and the thickness dimension smaller than the first coil.

  This increases the heat transfer area from the second coil to the armature base, reduces the thermal resistance, and reduces heat dissipation compared to the conventional structure in which the radial dimension and the thickness dimension are the same as those of the first coil. Can be promoted. Further, by increasing the diameter of one second coil provided corresponding to the two first coils, it is possible to increase the occupation ratio of the conductor in the motor and improve the efficiency. As a result, the temperature rise in the motor can be suppressed. As a result, a small and highly efficient linear motor can be realized, so that the semiconductor and the liquid crystal manufacturing apparatus can be miniaturized and highly accurate.

  Further preferably, when the radial dimension of the first coil is w1, the thickness dimension is t1, the radial dimension of the second coil is w2, and the thickness dimension is t2, w2> It is configured so that w1 and 0.6 × t1 ≦ t2 <t1.

  As a result, the heat dissipation from the second coil through the armature base can be surely promoted, and the occupation ratio of the conductor in the motor can be reliably increased to improve the efficiency.

  Preferably, the stator includes a field yoke provided with a magnet row constituting the field, and the mover is the coreless armature.

  As a result, in the configuration in which the coreless armature travels along the predetermined traveling direction with respect to the field yoke or the magnet array, the mode when the temperature changes due to the heat generation of the first coil and the second coil is adjusted as desired. can do.

  Preferably, the second coil has a back-and-forth relationship of the winding start position and the winding end position of the coil winding along the traveling direction that is opposite to any one of the corresponding first coil. Inverted and arranged.

  Thus, in order to shorten the armature and increase the stroke length, the coil winding start / winding end position is reversed from the first coil to form the second coil, and the temperature is generated by the heat generation of the first coil and the second coil. The manner in which the value changes can be adjusted as desired.

  According to the present invention, the mode of temperature change in the motor due to the heat generated by the coil can be adjusted as desired.

It is the cross-sectional view which looked at the coreless linear motor by one Embodiment of this invention from the advancing direction of the needle | mover. It is the top view which looked at the coreless linear motor of FIG. 1 from the top in the state which removed the armature base. It is the sectional side view showing the detailed structure of the coil row | line | column of an armature which looked at the AA cross section in FIG. 1 from the side surface. It is a cross-sectional view equivalent to the case where the BB cross section in FIG. 1 is seen from right below. It is explanatory drawing which illustrates notionally the relationship between the radial direction dimension and thickness direction dimension of an armature coil. It is a graph showing the loss reduction effect by the coreless linear motor of FIG. It is the cross-sectional view which looked at the conventional coreless linear motor from the advancing direction of the needle | mover. It is the top view which looked at the coreless linear motor of FIG. 7 from the top in the state which removed the armature base. It is the sectional side view showing the detailed structure of the coil row | line | column of an armature which looked at the AA cross section in FIG. 7 from the side surface. FIG. 8 is a transverse cross-sectional view corresponding to a case where the BB cross section in FIG. 7 is viewed from directly below.

  Embodiments of the present invention will be described below with reference to the drawings. 7 and FIG. 8 are denoted by the same reference numerals, and description thereof is omitted or simplified as appropriate.

  FIG. 1 is a cross-sectional view of a coreless linear motor according to an embodiment of the present invention as viewed from the moving direction (described later) of a mover, and corresponds to FIG. FIG. 2 is a plan view of the coreless linear motor of FIG. 1 viewed from above with the armature base removed, and corresponds to FIG. 1 corresponds to a cross-sectional view taken along the line CC in FIG.

  1 and 2, the coreless linear motor 1 of this embodiment includes a stator 51 and a mover 52.

  The stator 51 includes field yokes 11 and 12 and two rows of magnet rows 14 </ b> A and 14 </ b> B composed of a plurality of permanent magnets 13, similarly to the stator 101 of the above-described prior art. As described above, the permanent magnets 13 are arranged such that adjacent magnets are arranged at a predetermined pitch (distance between magnetic poles) Pm, and the magnets facing each other with the mover 52 interposed therebetween have different polarities. ing.

  The mover 52 has a coreless armature 20. The armature 20 includes an armature base 21 and a substrate 23 similar to the above, and a plurality (two in this example) of coil arrays 22A and 22B.

  The coil rows 22A and 22B are configured in a concentrated manner similar to the coil rows 122A and 122B, and a plurality (three in this example) of coils 30A and 30B are fixed together and formed into a flat plate shape. 40. One coil row 22A includes a plurality (two in this example) of coils 30A arranged along the traveling direction so as to face the magnet row 14A via a magnetic gap. The other coil row 22B includes at least one coil 30B (one in this example) arranged along the traveling direction so as to face the magnet row 14B via a magnetic gap. 23 on the opposite side of the coil array 22A. The coil 30A constitutes the first coil described in each claim, and the coil row 22A constitutes the first coil row. The coil 30B constitutes the second coil described in each claim, and the coil group 22B constitutes the second coil group.

  FIG. 3 is a side sectional view showing the detailed structure of the coil array of the armature 20 as seen from the side along the AA section in FIG. 1, and corresponds to FIG. FIG. 4 is a cross-sectional view corresponding to the cross section taken along the line B-B in FIG. 1 and corresponds to FIG. 10 described above.

  As shown in FIGS. 3 and 4 and FIG. 1, the coil array 22A is fixed to one side (left side in FIG. 1, upper side in FIG. 4) of the armature base 21, and the coil array 22B is armature. It is fixed to the other side of the base 21 (the right side in FIG. 1, the lower side in FIG. 4).

  As a feature of the present embodiment, the coil array 22A is provided with at least one set (one set in this example) including two coils 30A as one set, and each set of coils 30A and 30A is provided in the coil array 22B. One coil 30B is provided corresponding to each (only one in this example). The coil 30A of the coil array 22A has a radial dimension w1 and a thickness dimension t1. The coil 30B of the coil array 22B has a radial dimension w2 different from w1 and a thickness dimension t2 different from t1.

  In this example, the radial dimension w2 of the coil 30B is larger than the w1, and the thickness dimension t2 is smaller than the t1. Specifically, as conceptually shown in FIG. 5, w2> w1 and 0.6 × t1 ≦ t2 <t1 are set. As a result, the heat transfer area S2 (see FIG. 4) when heat generated from the coil 30B of the coil array 22B is transmitted to the armature base 21 is transmitted to the armature base 21 from the coil 30A of the coil array 22A. It is larger than the heat transfer area S1 (see FIG. 4).

  In addition, although detailed illustration about the phase belt | band | zone of each coil row | line | column 22A, 22B is abbreviate | omitted, the winding start position and winding end position of the coil winding of the coil 30B are either one of a corresponding set of coils 30A, 30A. The winding start positions and winding end positions of the coil windings are reversed and arranged so that the front-rear relationship along the traveling direction is reversed (so-called winding direction is reversed).

  In the coreless linear motor 1 of the present embodiment configured as described above, a predetermined current corresponding to the position of the armature 20 in the coils 30A and 30B is the same as that of the coreless linear motor 100 shown in FIGS. , The mover 52 moves linearly along the traveling direction by the electromagnetic action of the coils 30A and 30B and the permanent magnet 13. Heat generated from the coils 30 </ b> A and 30 </ b> B at this time is transmitted to the armature base 21 and then radiated to the outside by the armature base 21.

  At this time, in this embodiment, unlike the above-described conventional structure, the radial dimension w1 of the coil 30A and the radial dimension w2 of the coil 30B are different. As a result of mutually changing the radial dimensions of the coils in this way, the heat transfer area S1 for transmitting heat generated from the coil 30A to the armature base 21 and the heat transfer area S2 for transmitting heat generated from the coil 30B to the armature base 21. Can be different from each other. By setting the size of the coils 30A and 30B in the radial direction of the coil, the mode of temperature change in the motor due to the heat generated by the coils 30A and 30B can be appropriately adjusted. In the present embodiment, the thickness direction dimension t1 of the coil 30B and the thickness direction dimension t2 of the coil 30B are also different from each other. Along with the setting of the coil radial dimension, the thickness t1 and t2 of the coil 30A and the coil 30B are made different from each other in this way, whereby the efficiency can be increased or decreased by changing the occupation ratio of the conductor in the motor. This also makes it possible to adjust the mode of temperature change.

  As described above, in the present embodiment, the radial dimensions w1, w2 and the thickness direction dimensions t1, t2 along the moving direction of the mover of the coils 30A and 30B are made different from each other. The mode when the temperature in the motor changes due to heat generation can be adjusted as desired. In particular, in this example, the radial dimension w2 of the coil 30B is made larger than the radial dimension w1 of the coil 30A, and the thickness direction dimension t2 of the coil 30B is made smaller than the thickness direction dimension t1 of the coil 30A. . Thereby, compared with the heat transfer area S from the said coil 30 to the armature base 21 in the conventional structure where the radial direction dimension w and the thickness direction dimension t were the same in all the coils 30, the armature base 21 The heat transfer area S2 can be increased to reduce the thermal resistance, and heat dissipation can be promoted (in the example of this embodiment, the heat transfer area S1 from the coil 30A to the armature base 21 is also the above heat transfer area. It is larger than the area S). Further, by providing one coil 30B having a large diameter corresponding to the two coils 30A, the occupation ratio of the conductor in the motor can be increased, and the efficiency can be improved. As a result, the temperature rise in the motor can be suppressed. Therefore, since a small and highly efficient linear motor can be realized, it is possible to reduce the size and accuracy of semiconductors and liquid crystal manufacturing apparatuses.

  In the present embodiment, in particular, the radial dimensions w1 and w2 and thickness dimensions t1 and t2 of the coil 30A and the coil 30B are configured such that w2> w1 and 0.6 × t1 ≦ t2 <t1. doing. Thereby, the heat dissipation from the coil 30B through the armature base 21 can be surely promoted, and the occupation ratio of the conductor in the motor can be reliably increased to improve the efficiency. This will be described in detail with reference to FIG.

  FIG. 6 is a graph in which the horizontal axis represents the ratio of the thickness direction dimension t2 of the coil 30B to the thickness direction dimension t1 of the coil 30A, and the vertical axis represents loss. The loss is expressed as a relative value with respect to the loss value in the comparative example (a structure in which t2 is slightly larger than t1 and substantially equal) substantially corresponding to the above-described conventional structure.

  The curves shown in FIG. 6 are set by variously changing the thickness direction dimensions t1 and t2 of the coils 30A and 30B under the condition that the radial dimensions w1 and w2 of the coils 30A and 30B are fixed to the same value. This is a result obtained by examining the loss value in this case by the present applicant. As is apparent from the figure, by setting the range of 0.6 × t1 ≦ t2 <t1, the loss value is 94% to 96% of the comparative example, and the loss value is reduced (in other words, Efficiency). Since this curve is the result of examination under the condition of w1 = w2 as described above, it can be seen that the efficiency can be improved more reliably in the present embodiment where w2> w1.

  In the present embodiment, in particular, the winding start position and the winding end position of the coil winding of the coil 30B are reversed to one corresponding coil 30A, and reversed so that the winding direction of the coil 30A and the coil is reversed. It is arranged. Thereby, the armature 20 can be shortened and the stroke length can be increased.

  In the above description, the field yokes 11 and 12 provided with the magnet arrays 14A and 14B are used as the stator, and the coreless armature 20 runs as the mover. However, the present invention is not limited to this. I can't. On the contrary, the coreless armature 20 may be a stator and the field yokes 11 and 12 provided with the magnet rows 14A and 14B may be used as a mover. In this case, the same effect as described above can be obtained.

  In addition to those already described above, the methods according to the above-described embodiments and modifications may be used in appropriate combination.

  In addition, although not illustrated one by one, the present invention is implemented with various modifications within a range not departing from the gist thereof.

  According to the present invention, a small and highly efficient linear motor can be realized, and miniaturization and high accuracy of a semiconductor and a liquid crystal manufacturing apparatus can be achieved.

DESCRIPTION OF SYMBOLS 1 Coreless linear motor 11, 12 Field yoke 13 Permanent magnet 14A, 14B Magnet row 20 Armature 21 Armature base 22A Coil row (1st coil row)
22B Coil array (second coil array)
23 substrate 30A coil (first coil)
30B coil (second coil)
40 Armature coil 51 Stator 52 Mover t Thickness direction dimension t2 Thickness direction dimension w Radial direction dimension w2 Radial dimension

Claims (5)

A magnetic field in which a plurality of permanent magnets are arranged in a straight line so that the polarities are alternately different;
An armature having a coreless armature coil, which is arranged in parallel with a magnet row of the permanent magnets and a magnetic gap, and a plurality of coil rows are arranged in a flat plate shape;
A coreless linear motor that travels the field and the armature along a predetermined traveling direction with either the field or the armature as a stator and the other as a mover,
The field magnet is configured so that two rows of permanent magnets are opposed to each other.
The coreless armature includes an armature base and a substrate that is attached to the armature base and that insulates the plurality of coil rows,
The plurality of coil arrays are:
A plurality of first coils having the same radial dimension and thickness direction dimension along the traveling direction, and a first coil array including at least one set of two first coils,
A second coil provided on the opposite side of the first coil array across the substrate and having the radial dimension and the thickness dimension different from the first coil is used as each of the two first coils in each set. A second coil array provided correspondingly one by one;
A coreless linear motor comprising: The coreless linear motor according to claim 1,
The second coil of the second coil row is
A coreless linear motor comprising the radial dimension larger than the first coil and the thickness dimension smaller than the first coil. The coreless linear motor according to claim 2,
The radial dimension of the first coil is w1, the thickness dimension is t1,
When the radial dimension of the second coil is w2, and the thickness dimension is t2,
w2> w1 and 0.6 × t1 ≦ t2 <t1
A coreless linear motor characterized by being configured as follows. The coreless linear motor according to any one of claims 1 to 3, wherein the stator is
A field yoke provided with a magnet row constituting the field,
The mover is
A coreless linear motor that is the coreless armature. The coreless linear motor according to claim 4,
The second coil is
The winding start position and the winding end position of the coil winding are arranged so as to be reversed so that the front-rear relation along the traveling direction is opposite to any one of the corresponding first coil of the set. Coreless linear motor characterized by

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