JP5394962B2 - Grinding apparatus and grinding method - Google Patents

Description

  The present invention relates to a grinding apparatus and a grinding method, and more particularly to a technique for grinding a workpiece while electrolytically dressing (sharpening) a grinding action surface of a multi-grinding wheel.

  Conventionally, it is known that a high-strength metal bond superabrasive grindstone such as a cast iron fiber bond diamond grindstone is suitable for ultraprecision machining of a hard material with high hardness such as ceramics. As a highly efficient grinding method using the high-strength metal bond superabrasive grindstone, an electrolytic in-process dressing (hereinafter referred to as “ELID”) grinding method is attracting attention.

  The ELID grinding method is a method of dressing (sharpening) a grinding wheel by (in-process) electrolytic action while performing grinding.

  In order to perform this electrolytic action on the grinding surface of the grindstone, for example, in Patent Document 1, in an ELID grinding apparatus, grinding is performed using a multi grindstone in which a plurality of different types of ultrathin grindstones are assembled with a predetermined interval. It has been proposed that when machining, a thin multi-wheel grinding wheel can be electrolytically ground by using a manifold structure so that a conductive machining fluid can be uniformly and sufficiently supplied to each grinding wheel.

  Moreover, patent document 2 is disclosing the groove processing apparatus which gives the same electrolytic dressing to each grindstone with respect to the multi grindstone which piled up the grindstone of the several same count, and forms a some groove | channel on a member. .

JP 2009-172707 A Japanese Patent Laid-Open No. 08-108427

  However, as in Patent Document 1, in the method of uniformly electrolytic dressing using a multi-grinding stone, the multi-grinding stones of different types (grinding stones having different counts) are dressed under the same electrolysis conditions, and in particular, finishing. There is a problem that the forming of the grindstone is broken and it is necessary to reshape the grindstone.

  In addition, in order to raise the count of the grindstone and perform ultra-precision finishing, the oxide film at the time of ELID energization has a great influence on grinding. However, the thicker the oxide film, the better. The oxide film becomes thicker by increasing the voltage, but if the voltage is applied too much, the surface of the grindstone will be rough, and the grindstone will be affected. There was a problem that it occurred in a high-accuracy machining area using a high count grindstone. Also, the thicker the oxide film, the better the machined surface, but if the oxide film is too thick, it takes time to adjust the distance between the grindstone and the workpiece when machining a fine tip. However, it is necessary to control the thickness to be more suitable for processing.

  Moreover, in patent document 2, since the some grindstone of the same count is used, the same dressing liquid is needed by each grindstone. Accordingly, in the multi-grinding wheel in which a plurality of grindstones with different counts are overlapped, specific means for solving the problem with respect to the re-forming of the grindstone is not disclosed.

  The present invention has been made in view of such circumstances, and when grinding is performed using a multi-grinding stone in which a plurality of different types of ultra-thin grinding stones (grinding stones having different counts) are assembled, the grinding stones are subjected to independent electrolytic conditions. The thickness of the oxide film can be arbitrarily controlled by supplying the grinding fluid and the processing fluid whose concentration has been changed to independent grindstones having different roughnesses. This eliminates the need for re-molding due to the deformation of the grindstone with different roughness that occurs when dressing under the same electrolytic conditions (occurs when the voltage is increased to increase the thickness of the oxide film), and the oxide film is thicker. Therefore, an object of the present invention is to provide a grinding apparatus and a grinding method that can greatly reduce the machining time because the labor and time required for adjusting the workpiece and the grindstone are not required.

  In order to achieve the above object, the present invention provides a multi-grinding stone in which a plurality of conductive disc-shaped grindstones arranged in parallel at a predetermined interval along a rotation axis, and grinding of the multi-grinding stone The same number of electrode plates as the plurality of disk-shaped grindstones arranged to face each other with a gap on the working surface, and the plurality of electrode plates are provided with a plurality of sheets so that a voltage can be applied independently for each electrode plate. A plurality of supply means configured to be laminated as sandwiched alternately by insulating plates and supplying different working fluid concentrations between the electrode working surfaces of the plurality of electrode plates and the grinding working surfaces of the grindstones; In addition, by applying a voltage to each of the plurality of electrode plates and supplying a machining fluid with the plurality of supply means, the grinding work surfaces of the plurality of grindstones are processed while being electrolytically dressed corresponding to the counts of the respective grindstones. It is characterized by grinding work To provide a cutting apparatus.

  According to the present invention, the electrode is configured as a laminate in which a plurality of electrode plates are alternately sandwiched between a plurality of insulating plates so that each electrode plate can apply a voltage independently, and each electrode plate is ground. The working surface is provided with supply means for supplying a working fluid having a different concentration for each count of the grindstone.

  As a result, when grinding is performed using a multi-grinding wheel in which a plurality of different types of ultra-thin whetstones (whetstones with different counts) are assembled, each of them is supplied with an independent working fluid (difference in grinding fluid concentration) and independent. By forming the grindstone under electrolytic conditions, it is particularly troublesome to reshape the grindstone due to grinding wheel breakage caused by excessive voltage supply generated by a high count grindstone (# 4000 or more), and to be processed due to an excessive oxide film thickness (60-100 μm). The time required for adjusting the position of the object and the grindstone can be greatly shortened, and the processing time can be greatly shortened.

  On the other hand, there is a difference in the degree of corrosion with respect to the work fluid, and generally the grinding fluid having an inorganic substance such as potassium or carbonate is not easily corroded, but the electrical conductivity Tend to be high.

  Further, the thickness of the oxide film has a correlation with the electric conductivity of the processing liquid, and can be obtained by increasing the liquid having a high electric conductivity or the dilution concentration.

  According to the present invention, the number of the grindstone is properly used according to the finish roughness, but since the kind and concentration of the grinding liquid can be adjusted for each grindstone, the thickness of the oxide film is processed in an optimal thickness state. Can do.

  In the present invention, the plurality of supply means can change the electric conductivity by arbitrarily changing the type and concentration of the machining fluid, and the electrolytic dressing corresponding to the grindstone count of the grinding action surfaces of the plurality of grindstones However, it is preferable to grind the workpiece.

  In the present invention, the plurality of supply means supply a plurality of reservoir tanks that store the processing liquid with a desired concentration of pure water and a grinding liquid, and supply the processing liquid from the plurality of reservoir tanks to the plurality of electrode plates. It is preferable to consist of a flow path.

  By comprising in this way, the grinding fluid which is the undiluted | stock solution of a working fluid can be made into arbitrary concentration with a pure water, and it can be set as the working fluid which matches each grindstone, and those machining fluid is supplied for every electrode plate. be able to.

  In the present invention, a plurality of the flow paths are provided for each electrode plate, and each flow path penetrates substantially perpendicularly to the stack in the stack so as to pass in the stacking direction of the stack, and the electrode action of the electrode plate It is preferable that the surface is open.

  By forming the machining fluid flow path in this way, even in a multi-type grinding stone in which a plurality of ultrathin grinding stones are arranged in parallel, separate machining fluids can be supplied to the grinding action surface of each grinding stone.

  In the present invention, the width of the plurality of electrode plates is preferably in the range of 1.5 to 3.5 mm.

  In a grinding apparatus in which the width of each electrode plate is in the range of 1.5 to 3.5 mm, electrodes of a plurality of electrode plates are formed in the laminate so that the flow path passes in the stacking direction of the laminate for each electrode plate. By opening the working surface, it is possible to preferably supply the machining liquid to each electrode plate.

  In the present invention, the electrical conductivity of the machining fluid is preferably in the range of 30 to 50 ms / m (milli Siemens per meter).

  By setting the electrical conductivity of the working fluid in the range of 30 to 50 ms / m, the thickness of the oxide film of the grindstone can be set in a preferable range.

  In this case, the electrical conductivity of the machining fluid when roughing the surface roughness of the work piece with a target of Ra = 0.2 μm is in the range of 30 to 40 ms / m, Ra = 0.02 μm. It is preferable that the electrical conductivity of the working fluid in rough finishing grinding with a target degree is in the range of 40 to 50 ms / m.

  Here, Ra = about 0.2 μm and Ra = 0.02 μm generally mean a range of ± 50%.

  In the present invention, the grinding fluid is preferably two or more types, and it is preferable to use pure water and two or more types of grinding fluids as desired working fluids that match the count of the grinding wheel.

  In order to achieve the above object, the present invention provides a grinding method characterized by performing grinding using the grinding apparatus of the present invention.

  In the present invention, the workpiece is a tip portion of a coater head.

  In the grinding apparatus according to the present invention, when grinding is performed using a multi-grinding wheel in which a plurality of different types of ultra-thin grinding wheels (grinding stones having different counts) are assembled, the grinding stones are used under independent working fluid (grinding fluid concentration) and electrolytic conditions. Can be formed, and there is no need for re-molding due to loss of shape with grindstones with different roughness that occur when dressing under the same electrolysis conditions (especially high count grindstones are generated due to excessive voltage), greatly increasing the processing time. Can be shortened. In addition, since it is necessary to process the tip of the workpiece (the tip of the coater head, etc.) to a sharp edge, the position adjustment must be made on the order of 10 μm, and the oxide film Since the visibility of the edge portion decreases as the thickness increases, it takes a lot of time to adjust the position.

  According to the present invention, when grinding is performed using a multi-grinding wheel in which a plurality of different types of ultra-thin whetstones (grinding stones having different counts) are assembled, the whetstones are processed under independent working fluid (grinding fluid concentration) and electrolytic conditions. It is possible to form, and the grinding time of dressing with different roughness that occurs when dressing under the same electrolytic conditions (especially high-counting whetstone occurs due to excessive voltage) eliminates the need for re-molding, greatly reducing the processing time. can do.

  As an example, processing at the time of forming a sharp edge of the coater head tip is shown. To achieve a tip R shape of 10 μm or less and a surface roughness: Ra 0.02 μm or less, # 400, # 800, # 2000, # Processing was required at 4000 and # 8000, and it took about one week including setting, dressing and adjustment time for each grinding wheel. In Patent Document 2, a multi-wheel grindstone in which different grindstones are combined to solve this problem has been proposed. However, when dressing is performed under the same electrolytic conditions, the grindstone is deformed, and a high count grindstone is remolded. If there was trouble, the processing time could only be shortened from 5 days to 4 days, but the time could not be significantly reduced. The present invention eliminates the need for re-molding from roughing to finishing in the grinding wheel machining process and eliminates the need for position adjustment during machining, greatly reducing machining time by about 80%. be able to.

It is a perspective view which shows an example of the whole structure of the grinding device in this Embodiment. It is AA sectional view taken on the line of the multi grindstone in this Embodiment. It is an expanded cross-sectional schematic diagram of the action surface vicinity of the electroconductive grindstone in this Embodiment. It is the schematic which shows an example of the process liquid supply part and electrode for electrolysis in this Embodiment. It is a perspective view which shows an example of a structure of the electrode for electrolysis in this Embodiment. It is a disassembled perspective view which shows the internal structure of the electrode for electrolysis in this Embodiment. It is a table | surface figure which shows the Example in this Embodiment.

  Hereinafter, preferred embodiments of a grinding apparatus and a grinding method according to the present invention will be described with reference to the accompanying drawings.

  In the present embodiment, an example in which a blade tip portion (workpiece) of a blade coater is ground by a grindstone while dressing a flat grindstone by an in-process electrolytic action. Needless to say, the present invention is not limited to the present embodiment, and can be applied to various workpieces.

  First, an outline of a grinding apparatus according to the present invention will be described.

  FIG. 1 is a perspective view showing an example of the overall configuration of a grinding apparatus 10 in the present embodiment. FIG. 2 is a cross-sectional view taken along line AA of the grinding apparatus 10 of FIG.

  As shown in FIG. 1, the grinding apparatus 10 mainly includes a multi-grinding wheel 14 including a plurality of conductive grindstones 22 having different roughnesses for grinding a workpiece 12, and a grinding action surface 22 </ b> A of the conductive grindstone of the multi-grinding stone 14. (Refer to FIG. 3), an electrolysis electrode 16 for electrolytic dressing the grinding action surface 22 </ b> A, and a conductive working fluid is supplied between the grinding action surface 22 </ b> A of the multi-grinding wheel 14 and the electrolysis electrode 16. And a power supply 20 for applying a voltage between the grinding surface 22A of the multi-grinding wheel 14 and the electrode 16 for electrolysis.

  In the multi-grinding wheel 14, a plurality of disc-shaped conductive grinding stones 22 having different roughnesses (five in FIG. 1) are arranged in parallel with respect to the rotating shaft 15 of the holder 14A, and are rotationally driven by a driving means (not shown). It is configured to be. The counts of the conductive grindstone 22 are, for example, # 400, # 800, # 2000, # 4000, # 8000 in order from the left side. Note that the combination of the conductive grindstones 22 is not limited to the form of FIG. 1. For example, the size of the abrasive grains is the same for each conductive grindstone 22, but the density of the abrasive grains on the grinding surface is not limited. Different grindstones may be used. In addition, the conductive grindstone 22 is not limited to the aspect of FIG. 1, You may arrange 3-4 sheets or 6 sheets or more in parallel.

  For example, the conductive grindstone 22 holds fine diamond abrasive grains with a conductive metal bond material (for example, various metals such as cast iron, copper, and stainless steel).

  The electrode 16 for electrolysis is disposed so as to face the grinding surface 22A of the conductive grindstone 22. The electrode 16 for electrolysis has a laminated structure in which a plurality of electrode plates 24 are laminated via insulating plates 26, 27, 28, 29, 30, 31 respectively. The laminated body of these electrode plates 24 and the insulating plates 26, 27, 28, 29, 30, 31 is assembled, for example, by tightening with a bolt or the like (not shown).

  As shown in FIG. 2, a machining liquid supply port connected to the machining liquid supply unit 50 is formed on the left side surface of the electrolysis electrode 16, and the conductive grindstone 22 is ground through the inside of the electrolysis electrode 16. It is comprised so that a processing liquid can be introduce | transduced between 22A of action surfaces. The internal configurations of the machining fluid supply unit 50 and the electrolysis electrode 16 will be described later.

  The power source 20 is a DC power source or a DC pulse power source, and applies the conductive grindstone 22 to a positive voltage and applies the electrolysis electrode 16 to a negative voltage. In FIG. 1, the conductive grindstone 22 and the holder 14 </ b> A for fixing the conductive grindstone 22 are electrically connected by being made of a conductive material, for example. Further, a switching means 36 for switching conduction for each electrode plate 24 is provided between the minus of the power supply 20 and the electrode 16 for electrolysis, and is configured to switch conduction for each electrode plate. Yes.

  The switching unit 36 includes a relay unit 38 and a controller 40. The relay unit 38 includes a plurality of relays corresponding to each electrode plate 24, one terminal of the relay is connected to the corresponding electrode plate 24, and the other terminal is connected to the power supply 20. The controller 40 includes a programmable controller and is configured to output a signal for turning on an arbitrarily selected relay for an appropriate period of time for each relay.

  With such a configuration, after the conductive machining liquid is supplied between the conductive grindstone 22 and the electrode 16 for electrolysis by the machining liquid supply unit 18, a signal from the controller 40 is received, The corresponding relay is turned on. When the electrode plate 24 corresponding to this relay is connected to the negative of the power source 20 and a predetermined voltage is applied between the electrode plate 24 and the conductive grindstone 22, the grinding surface of the conductive grindstone 22 is electrolytically dressed. The

  In this way, the conductive grindstone 22 for grinding the workpiece 12 can be selectively electrolytically dressed (sharpened) by the switching means 36. In addition, by moving the multi-grinding wheel 14 with respect to the workpiece 12, the workpiece 12 can be continuously and efficiently ground from roughing to finishing.

  In the grinding apparatus 10, the diameter of the multi-grinding wheel 14 is φ250 to φ500 mm, the rotation speed of the multi-grinding wheel 14 is 1000 to 2000 rpm, and the feed speed for moving the multi-grinding wheel 14 with respect to the workpiece 12 is several to several tens of m / min. It is common.

  In this way, in order to perform electrolytic dressing on the very thin conductive grindstones 22 arranged in parallel with each other at a minute interval, the grinding action surface 22A of each conductive grindstone 22 and the electrode of the electrode plate 24 are provided. A working fluid is supplied between the working surface 24A (see FIG. 3). In this case, the machining fluid flows in the rotational direction as the conductive grindstone 22 rotates, and is supplied to the grinding portion of the workpiece 12. At the same time, in order to perform electrolytic dressing on the grinding surface 22A, it is preferable that the grinding fluid 22A and the electrode surface 24A be held in a state where the machining liquid is filled.

  In the present invention, by providing insulating plates 26, 27, 28, 29, 30, 31 on the electrode 16 for electrolysis, in addition to the function of insulating each electrode plate 24, the processing liquid is uniformly distributed to each electrode plate 24. A function of holding the conductive grindstone 22 between the grinding action surface 22A is provided.

  Hereinafter, the configuration of the machining fluid supply unit 50, which is the main part of the present invention, the part where the electrode 16 for electrolysis is disposed opposite to the conductive grindstone 22, and the electrode 16 for electrolysis will be described.

  FIG. 3 is an enlarged schematic cross-sectional view of the vicinity of the grinding action surface of the conductive grindstone 22 in which the electrode 16 for electrolysis is arranged to face in FIG.

  As shown in FIG. 3, the electrode 16 for electrolysis has a plurality of electrode plates 24 stacked via insulating plates 26, 27... 31, and the tips of the insulating plates 26, 27. It is formed so as to protrude to the grindstone side from the working surface 24A. Moreover, when the electrode 16 for electrolysis is attached to the multi-grinding wheel 14, the tip part of the insulating plate 26 is disposed between the grindstones disposed at intervals. As a result, the grinding surface 22A of the conductive grindstone 22 has two insulating plates 26, 27 adjacent to the electrode plate 24 (insulating plates 27, 28, insulating plates 28, 29, insulating plates 29, 30, or an insulating plate). 30 and 31). Further, the electrolysis electrode 16 may be provided with blocks 32a and 32b that sandwich the insulating plate 26 to the insulator 31 (see FIG. 4).

  As a result, for each conductive grindstone 22, a machining liquid holding space 25 is formed between the grinding action surface 22A of the conductive grindstone 22 and the electrode action surface 24A of the electrode plate 24 to hold the working liquid in a filled state. The FIG. 3 is a view showing a state in which the machining liquid is held in the machining liquid holding space 25.

  The length M of the tip of the insulating plates 26, 27... 31 relative to the electrode working surface 24A of the electrode plate 24 is at least the maximum distance L between the electrode working surface 24A of the electrode plate 24 and the grinding working surface 22A of the conductive grindstone 22. For example, it is formed so as to be longer than the maximum distance L by about 1 to 20 mm, preferably about 10 mm.

  In order to uniformly perform electrolytic dressing on the grinding surface 22A of the conductive grindstone 22, the maximum gap L between the grinding surface 22A of the conductive grindstone 22 and the electrode surface 24A of the electrode plate 24 is preferably 100 to 500 μm. . Moreover, 0.1-5 mm is preferable, for example, as for the space | interval C of the adjacent conductive grindstones 22, 0.5-2 mm is more preferable, and 1 mm is still more preferable.

  As the material of the electrode plate 24, various conductive metals such as copper, stainless steel, and carbon can be used. The thickness of the electrode plate 24 is formed to be larger than the thickness of the conductive grindstone 22. The insulating plates 26, 27,... 31 may be any insulating material. For example, acrylic resin, various rubber materials, and the like can be preferably used.

  FIG. 4 is a schematic diagram showing an example of the configuration of the machining fluid supply unit 50 and the electrolysis electrode 16 according to the present invention.

  In FIG. 4, two tanks are provided. One tank 52 stores pure water and the other tank 54 stores grinding fluid. Further, as many reservoir tanks as the number of electrode plates are provided. The pure water and the grinding liquid stored in the tanks 52 and 54 are sent to the reservoir tanks 56, 58, 60, 62, and 64 through distribution pipes 53 and 55 provided in the tanks 52 and 54, respectively. The reservoir tanks 56, 58,... 64 supply the working fluid to the grinding surface 22A of the conductive grindstone 22 via the pipes 57, 59, 61, 63, 65.

  By configuring the machining fluid supply unit 50 in this way, a desired concentration of machining fluid can be supplied to each conductive grindstone 22 with pure water and grinding fluid for each of the plurality of electrode plates 24.

  FIG. 5 is a perspective view showing an example of the configuration of the electrode 16 for electrolysis according to the present invention. FIG. 6 is an exploded perspective view showing the internal structure of the electrode 16 for electrolysis shown in FIG.

  As shown in FIG. 5, the electrode 16 for electrolysis has electrode plates 24 and insulating plates 26, 27... 31 stacked alternately, and bolt holes (non-removable) formed in the electrode plates 24 and the insulating plates 26, 27. It is configured so that a bolt can be inserted and fixed in the figure.

  The tip portions of the electrode plate 24 and the insulating plates 26, 27,... 31 are formed in a circular arc shape facing the arc-shaped grinding surface 22A of the conductive grindstone 22 substantially in parallel. 26, 27... 31 are formed so as to protrude from the arc-shaped electrode action surface 24A of the electrode plate 24 by a predetermined length. The electrode working surface 24 </ b> A of the electrode 16 for electrolysis is preferably provided so that the central angle α of the conductive grindstone 22 is 90 degrees or more.

  In the electrode 16 for electrolysis shown in FIG. 6, a long groove-shaped manifold 42A having an arc shape along the rotation direction of the conductive grindstone 22 is formed on the electrode plate 24, and a plurality of machining fluid supply ports 34 are formed at one end thereof. Is formed. Through holes are formed in the electrode plate 24 and the insulating plates 26, 27. The through holes are provided in the number of the electrode plates 24, and the plurality of through holes are connected to the manifold 42 </ b> A of any one of the electrode plates 24.

  As a result, as shown by the dotted lines in FIG. 6, working fluids having different concentrations are introduced into the laminate from the pipes 57, 59, 61, 63, 65 to which the reservoir tanks 56, 58,. The different machining fluids are distributed from the manifold 42A formed on the electrode plate 24 to each electrode plate 24 through the supply port 34, and the machining fluid holding space 25 (FIG. 3) formed for each conductive grinding stone 22 of the multi-grinding stone 14. To be supplied uniformly). Further, by forming a plurality of supply ports 34 in the electrode plate 24, the machining liquid can be supplied uniformly in the rotating direction of the conductive grindstone 22.

  The shape and number of the supply ports 34 are not limited to the embodiment shown in FIG. 6, and may be within a range in which the machining liquid can be sufficiently supplied between the electrode working surface 24 </ b> A and the grinding working surface 22 </ b> A and the electrolytic area can be secured. Any may be used.

  As described above, the flow paths 16a and 16b can distribute the machining liquids having different concentrations into the laminated body constituting the electrolysis electrode 16 and supply the machining liquids to the respective electrode plates 24 between the respective grinding working surfaces 22A. , 16c, 16d, and 16e are configured, so that it is possible to supply an optimum working fluid for electrolytic dressing of each grindstone.

  In the present invention, since each electrode plate 24 is insulated by the insulating plates 26, 27,... 31, the electrode plate 24 connected to the power source 20 is sequentially switched by the switching means 36, and the processing liquid is selectively applied to the electrode plate 24. Can be selectively electrolytically dressed on the grinding surface 22A of the conductive grindstone 22.

  That is, when a voltage is applied between all the electrode plates 24 and all the grinding surfaces 22A without selectively supplying the machining fluid to the electrode plates 24 without providing the switching means 36, the abrasive grains are small. The more conductive the grindstone is, the more abrasive grains are scraped off along with the oxide film during grinding. For this reason, especially about the conductive grindstone with a small abrasive grain (for example, the conductive grindstone for final finishing), a voltage is applied on condition different from other grindstones.

  Thus, in the present invention, electrolytic dressing can be performed independently according to the wear state of each grinding working surface.

  In addition, when a voltage is selectively applied to the electrode plate 24 only by the switching means 36 without selectively supplying the machining fluid to the electrode plate 24, the conductive grindstones 22 having different numbers on the left and right are also electrolytically dressed. Therefore, it is necessary to re-form the conductive grindstones 22 with different counts provided on the left and right.

  Therefore, according to the present invention, it is possible to form a grindstone under independent electrolytic conditions when grinding using a multi grindstone in which a plurality of different types of ultrathin grindstones (grindstones with different counts) are assembled. This eliminates the need for re-molding due to the deformation of the grindstone having different roughness that occurs when dressing under the same electrolytic conditions, and can greatly reduce the processing time.

  In the present invention, the width of each of the plurality of electrode plates 24 is preferably in the range of 1.5 to 3.5 mm. In the grinding apparatus in which the width of each electrode plate is in the range of 1.5 to 3.5 mm, a plurality of channels are formed in the laminate so that the flow path passes in the stacking direction of the laminate for each electrode plate as shown in FIG. This is because the machining liquid can be preferably supplied to each electrode plate by opening the electrode action surface of the electrode plate. Moreover, 1.5 mm or more is required to flow the working fluid at a flow rate of 30 L / min, and an electrode for electrolysis that is usually 30 mm or less needs to be 3.5 mm or less when the number of grinding wheels is five. is there.

  Moreover, in this invention, it is preferable that the electrical conductivity of a process liquid is the range of 30-50 ms / m, respectively. By setting the electrical conductivity of the working fluid in the range of 30 to 50 ms / m, the thickness of the oxide film of the grindstone can be set in a preferable range.

  In this case, the electrical conductivity of the machining fluid when roughing the surface roughness of the workpiece with a target of Ra = 0.2 μm is in the range of 30 to 40 ms / m, Ra = 0. The electrical conductivity of the working fluid when rough finishing grinding with a target of about 0.02 μm is preferably in the range of 40 to 50 ms / m.

  Furthermore, in this invention, it is preferable to use 2 or more types of grinding fluids, and it is set as the desired working fluid which matches a count of a grindstone with a pure water and 2 or more types of grinding fluids. That is, in FIGS. 1, 2, and 4, another one or more tanks 54 containing other grinding fluids are provided, and the processing fluids stored in the reservoir tanks 56, 58, 60, 62, and 64 are purified water and two types. It is comprised with the above grinding fluid. Thereby, the electrolytic dressing according to each grinding surface can be performed more preferably.

  As mentioned above, although preferable embodiment of the grinding apparatus and method which concerns on this invention was described, this invention is not limited to the said embodiment, Various aspects can be taken.

  For example, in the above-described embodiment, as described in the example in which the grinding action surface of the conductive grindstone 22 and the electrode action surface 24A of the electrode plate 24 are both flat, the grinding action surface 22A and the electrode action surface 24A are both Is preferably a polygon, but is not limited to this, and any combination is possible.

  In the above embodiment, an example in which the switching unit 36 is configured by the relay unit 38 and the controller 40 has been described. However, the present invention is not limited to this example, and the electrode plate 24 and the power source 20 can be sequentially switched and connected. Any configuration may be used.

  In the above-described embodiment, the example in which the blade tip portion of the blade coater is ground as the workpiece 12 has been described. However, the present invention is not limited to this. For example, the lip tip portion (work) of the extrusion die is The present invention can also be preferably applied when grinding.

  In the above embodiment, the example in which the present invention is applied to the surface grinding apparatus has been described. However, the present invention is not limited to this, and can be applied to other grinding apparatuses such as a cylindrical grinding apparatus and a centerless grinding apparatus. .

  Using a surface grinder (DSG 205) manufactured by Okamoto Seisakusho, a coating apparatus having a width of 1000 mm was produced. Wheels with counts of # 400, # 800, # 2000, # 4000, and # 8000 were set. The electrode plate was made of carbon, the insulating plate was made of PMMA, and the block was made of SUS304 (see FIG. 4). The width of the electrode plate, the insulating plate, and the block was 2.5 mm. When grinding, a working fluid was supplied to each electrode plate and a voltage was applied. A voltage of 150V was applied.

  Here, the grinding fluid is H0CUT 702 manufactured by Nippon Horton Co., Ltd., or VARDEN Vanisole No. manufactured by Sato Special Oil. 1018 is diluted with pure water to obtain a working solution having the concentration and electrical conductivity shown in the table of FIG. 7, and the electrode working surface of the electrode plate and the grinding working surface of the grindstone so that the flow rate is 30 L / min. Supplied during.

  Here, the thickness of the oxide film, the shape of the grindstone, the time required for adjusting the grinding position, the presence or absence of chipping of the workpiece, and the surface roughness of the workpiece after grinding were measured and evaluated. In addition, the surface roughness of the workpiece was measured with Handy Surf E-40A manufactured by Tokyo Seimitsu Co., Ltd. FIG. 7 shows the measurement / evaluation.

  As can be seen from FIG. 7, the electrical conductivity of the working fluid is preferably in the range of 30 to 50 ms / m. Here, in Comparative Example 1, the electric conductivity is as high as 60 ms / m, the oxide film formed on the surface of the grindstone is excessively thick, and it is difficult to align the position with the fine lip tip of the coating apparatus and a positional deviation occurs. For this reason, it is thought that the tip was chipped. In Comparative Example 2, it is considered that the electric conductivity was as low as 20 ms / m, the oxide film formed on the surface of the grindstone became thin, and the grindstone could not be formed. That is, the thickness of the oxide film of a grindstone can be made into a preferable range by making electric conductivity into the range of 30-50 ms / m.

  Note that the grinding fluids of Examples 4 and 5 were VARDEN Vanisole No. 1018 was used. This is because the VARDEN vanisole grinding fluid is characterized by good corrosion resistance of the workpiece, so it can be used for # 4000 and 8000 grindstones of finish count. The purpose is to remove the fine corroded surface generated during intermediate finishing.

  DESCRIPTION OF SYMBOLS 10 ... Grinding device, 12 ... Workpiece, 14 ... Multi grindstone, 15 ... Rotary shaft, 16 ... Electrode for electrolysis, 16a, 16b, 16c, 16d, 16e ... Flow path, 20 ... Power supply, 22 ... Conductive grindstone, 22A ... Grinding working surface, 24 ... electrode plate, 24A ... electrode working surface, 26, 27, 28, 29, 30, 31 ... insulating plate, 32a, 32b ... block, 34 ... supply port, 36 ... switching means, 38 ... relay unit 40 ... Controller, 42A ... Manifold, 50 ... Working fluid supply unit, 52 ... Tank, 53 ... Distribution piping, 56 ... Reservoir tank, 57 ... Piping

Claims (10)

A multi-grinding wheel in which a plurality of disc-shaped grindstones having conductivity are arranged in parallel at a predetermined interval along the rotation axis;
The same number of electrode plates as the plurality of disk-shaped grinding wheels arranged to face each other with a gap on the grinding surface of the multi-grinding wheel,
The plurality of electrode plates are configured as a laminate that is alternately sandwiched between a plurality of insulating plates so that a voltage can be applied independently for each electrode plate,
A plurality of supply means for supplying different working fluids between the electrode working surfaces of the plurality of electrode plates and the grinding working surfaces of the grindstone,
By applying a voltage to each of the plurality of electrode plates and supplying a machining fluid by the plurality of supply means, the workpiece is processed while electrolytically dressing the grinding action surfaces of the plurality of grindstones corresponding to the numbers of the respective grindstones. Grinding machine characterized by grinding.   The plurality of supply means can change the electric conductivity by arbitrarily changing the type and concentration of the working fluid, and the workpiece is processed while electrolytically dressing the grinding action surfaces of the plurality of grindstones corresponding to the numbers of the respective grindstones. The grinding apparatus according to claim 1, wherein the object is ground.   The plurality of supply means includes a plurality of reservoir tanks that store the processing liquid in a desired concentration with pure water and a grinding liquid, and a flow path that supplies the processing liquid from the plurality of reservoir tanks to each of the plurality of electrode plates. The grinding apparatus according to claim 1 or 2, wherein A plurality of the flow paths are provided for each electrode plate,
4. The flow path according to claim 3, wherein each flow path penetrates the stacked body substantially perpendicularly to the stack so as to pass in the stacking direction of the stacked body and is open to an electrode working surface of the electrode plate. Grinding equipment.   5. The grinding apparatus according to claim 4, wherein each of the plurality of electrode plates has a width in a range of 1.5 to 3.5 mm.   The said grinding fluid is 2 or more types, Comprising: Pure water and 2 or more types of grinding fluid are set as the desired working fluid which suits the count of the said grindstone. The grinding apparatus as described.   The grinding apparatus according to any one of claims 2 to 6, wherein the electrical conductivity of the machining fluid is in a range of 30 to 50 ms / m.   The electrical conductivity of the machining fluid when roughing the surface roughness of the workpiece with a target of Ra = 0.2 μm is targeted in the range of 30 to 40 ms / m and Ra = 0.02 μm. The grinding apparatus according to claim 7, wherein the electrical conductivity of the working fluid when rough finishing is in the range of 40 to 50 ms / m.   A grinding method comprising performing grinding using the grinding apparatus according to claim 1.   The grinding method according to claim 9, wherein the workpiece is a tip portion of a coater head.

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