JP5394560B2 - Composite multilayer substrate and module using the same - Google Patents

Description

  The present invention relates to a composite multilayer substrate that enables high-density mounting of electronic components and a module using the same.

  Conventionally, downsizing of packages has been vigorously performed as an approach to high-density mounting of electronic components. For example, recently, a chip size package (CSP) and an ultimate bare chip mounting that does not require the package itself are being realized. However, these are based on the premise that a plurality of electronic components are mounted two-dimensionally (planarly) and mounted (planar mounting method), and the areas of each electronic component are added by simple calculation. There is a theoretical limit that the mounting area cannot be reduced below the size.

  In view of this, attention has been focused on embedded mounting of electronic components in a substrate, that is, a mounting method using not only the surface of the substrate but also the inside of the substrate.

The following is an overview of known techniques for embedded mounting and their drawbacks.
<First known example to fourth known example>
As an electronic component embedding structure using an organic substrate, an electronic component is mounted on the surface of a core organic substrate (hereinafter referred to as “core substrate”), and the electronic component is sealed with a prepreg resin when it is multilayered. A structure for stopping is known (hereinafter referred to as “first known example”). Further, a structure in which a groove is formed in an organic substrate and an electronic component is embedded therein is known (hereinafter referred to as “second known example”).
Further, an electronic component is mounted on the surface of the core substrate, a hole corresponding to the size of the electronic component is formed in the prepreg, and the electronic component is embedded in the hole of the prepreg when multilayered (hereinafter referred to as “third known”). Examples ") and structures in which sintered parts are embedded in an organic resin by transfer (hereinafter," fourth known example ") are also known.

  However, the first known example and the fourth known example have a disadvantage that they are disadvantageous for making the substrate thinner, and the second known example and the third known example have a processing cost of grooves and holes. There is a disadvantage that it is necessary. Further, any of the known examples (first to fourth known examples) does not take into consideration heat dissipation measures for electronic components, and thus has a disadvantage that it is particularly inconvenient for mounting electronic components such as semiconductor chips that generate large amounts of heat. .

<Fifth known example>
In Patent Document 1, in order to provide a small, thin, and robust electronic timepiece circuit, a pattern is formed on one side of a printed circuit board, and a metal plate is fixed to the back side, and either one or both of the pattern and the metal plate are used. A printed circuit board and a semiconductor chip are described as having substantially the same thickness by providing a “hole” in the substrate and mounting a semiconductor chip in the hole. However, in this known example, the semiconductor chip is resin-sealed, and in the case of multi-layering, an operation such as grinding the raised resin is necessary, and there is a disadvantage that the manufacturing cost is increased. In addition, the in-hole mounting of an electronic component having a multi-surface electrode such as a five-sided electrode has a drawback in that there are limitations on the types of electronic components that can be mounted because of a structure that is not considered at all.

<Sixth known example>
In Patent Document 2, in order to provide an electronic element chip carrier with improved heat dissipation of electronic components, an insulating resin is laminated on the surface of a metal core of a printed wiring board based on a metal core, and the insulating resin reaches the metal core. In addition to forming a “recess”, the electronic component is mounted in the recess so that the back surface of the electronic component is in contact with the metal core, thereby using the metal core as a heat sink. Further, in this known example, a recess is formed in the insulating resin laminated on the back surface of the metal core (the surface opposite to the mounting surface of the electronic component) so as to reach the metal core to improve heat dissipation. However, in this known example, there is not enough consideration to absorb the thickness of the electronic component, which is disadvantageous for making the substrate thinner.

<Seventh known example>
In Patent Document 3, in order to provide a multilayer chip substrate for mounting a semiconductor chip that enables heat dissipation of a semiconductor chip from a closer position and does not cause poor adhesion with a metal plate for heat dissipation, Use a printed wiring board in which a “hole” for mounting a semiconductor chip is formed in a metal sheet, and a wiring network including the above holes is formed on a single-sided or double-sided copper-clad metal base laminate laminated with a prepreg and a copper foil. It is described. However, in this known example, the relationship between the height of the metal foil or metal sheet on the side wall of the hole for mounting the semiconductor chip and the thickness of the semiconductor chip is not clear, and the configuration considering the heat dissipation of the semiconductor chip is not provided. It is not clear. Since the depth relationship between the thickness of the semiconductor chip and the hole for mounting the semiconductor chip is not clear, it is considered that the consideration for thinning is not sufficient, and the hole for mounting the semiconductor chip is provided on the printed wiring board. Since glass cloth (described later) must also be removed when forming, an increase in manufacturing cost can be easily expected.

<Eighth known example>
In Patent Document 4, a metal sheet having a thickness of 0.1 to 1.0 mm, preferably 0.2 to 0.5 mm, and a thermal expansion coefficient of 9 × 10 −6 cm / cm / ° C. or less is appropriately used. Although it is described that the surface treatment is used to improve the adhesiveness, the same problems as in the seventh known example (think of insufficient thinning and an increase in manufacturing cost) can be considered.

<Ninth known example>
In Patent Document 5, in order to provide a hybrid integrated circuit capable of flowing a large current and enabling small and high-density mounting, an “opening” for mounting a semiconductor chip is formed on a thermoplastic resin plate, Further, there is a description in which a wiring pattern made of a metal plate having substantially the same thickness as a semiconductor chip is arranged on both sides of the semiconductor chip. The thermoplastic resin plate is integrated with a thermoplastic resin plate having a multilayer wiring layer formed by thermocompression bonding, and the lead terminal of the semiconductor chip is a plastic resin plate having a multilayer wiring layer formed. Is inserted into the opening provided in the wiring, and is electrically connected to the wiring layer. However, in this known example, the heat dissipation measures of the semiconductor chip are not clear, and the thermocompression bonding between the thermoplastic resin plate having the opening and the thermoplastic resin plate having the wiring layer formed in multiple layers. It is difficult to encapsulate the resin around the semiconductor chip, and when the thermo-compression bonding is performed in a state where the thermoplastic resin plate is melted, the variation in the interlayer thickness of the portion where the wiring layer is formed in multiple layers is expected. It can be estimated that specification control becomes difficult.

<Tenth known example>
Patent Document 6 describes “composite multilayer substrate and module using the same” described in detail below.
FIG. 12A is a cross-sectional view of the composite multilayer substrate described in the publication. The composite multilayer substrate 1 has a multilayer structure in which a plurality of layers are stacked. In the illustrated example, the composite multilayer substrate 1 has four layers (hereinafter “resin layers”) 2 to 5 made of a resin material. . These resin layers 2 to 5 are common in that a resin material such as epoxy is used as the material, and only the resin layer 2 of one layer (the uppermost layer in the figure) is as shown in FIG. The difference is that a glass fiber 6 knitted in a net shape (so-called glass cloth 7) is included therein. The glass cloth 7 is a reinforcing material for increasing the physical strength of the composite multilayer substrate 1, and hereinafter, for convenience, the resin layer 2 "having" the glass cloth 7 is referred to as "glass cloth layer 2". The resin layers 3 to 5 that do not have the glass cloth 7 are referred to as “glass cloth-less layers 3 to 5”.

  Further, the composite multilayer substrate 1 is formed by attaching a copper foil to the lowermost surface (the lower surface of the glass clothless layer 5) as a mounting surface, and patterning the copper foil by etching or the like to form a conductor pattern 8 having a required shape. Further, a part of the glass cloth layer 2 is deleted to form a recess (generally called a cavity with the opening closed), and an electronic component (for example, a semiconductor chip) 10 is mounted in the recess 9 Yes.

  The electronic component 10 is “embedded” using the inside of the composite multilayer substrate 1. Therefore, in combination with other component mounting on the surface of the composite multilayer substrate 1, component mounting with higher density can be performed.

JP 54-8871 A JP 61-287194 A JP-A 64-11400 JP-A 64-12598 Japanese Patent Laid-Open No. 2-122534 JP 2002-111226 A

However, since the thing (tenth known example) described in the above publication uses the glass cloth 7 as a reinforcing material for increasing the physical strength of the composite multilayer substrate 1,
(1) Ion migration may occur along the interface between the surface of the glass fiber 6 and the resin (the main material of the glass cloth layer 2), and depending on the strength of electrolysis, the insulation is broken and the electrical characteristics are deteriorated. There is a problem of making it.
(2) Further, in order to form the recess 9 for the cavity, it is necessary to physically remove a part of the resin layer 2, but at that time, the glass fiber 6 inside the resin layer 2 must be cut. In general, such a cutting operation uses a precision processing machine such as a laser. However, it does not deny a cutting error, requires a considerable work time, and if a plurality of recesses 9 are required, the work time is the same as that. However, there is a problem that the manufacturing cost is increased.

  Therefore, an object of the present invention is to avoid deterioration of electrical characteristics due to the occurrence of migration and reduce manufacturing cost by using another reinforcing material instead of glass cloth.

According to the first aspect of the present invention, the flat core member made of a metal material, the front surface side resin layer and the back surface side resin layer covering at least the front surface and the back surface of the core member, and the front and back surfaces of the core member are penetrated. A bottomless hole formed in the core member, an electronic component mounted in the bottomless hole, and positioned directly above or below the electronic component and extending in a vertical direction on the front and back surfaces of the core member A first small hole formed in one or both of the front surface side resin layer and the back surface side resin layer, a first electrode formed inside the first small hole, and directly above the electronic component And positioned directly above or directly below the core member excluding directly below and extending in the vertical direction of the front and back surfaces of the core member and formed on one or both of the front surface side resin layer and the back surface side resin layer. A second small hole and a shape inside the second small hole. An electrical connection to the electronic component via the first electrode, and an electrical connection to the core member via the second electrode. In addition, when the horizontal plane with respect to the surface of the surface-side resin layer covering the surface of the core member is a height reference surface, if there is an electrode only on one side of the electronic component, the surface with the electrode is In the case where electrodes are provided on both surfaces of the electronic component, when at least one of the surfaces having the electrodes is an upper surface, at least the upper surface of the electronic component is substantially higher than the height of the upper surface of the core member. look including one electronic component does not exceed a direction, and a composite multilayer substrate, characterized in that all surfaces of the core member is covered with environmentally resistant material that corresponds to a resin or resin.
The invention according to claim 2 is characterized in that the electrical connection to the core member made through the second electrode is made to an unprocessed portion of the core member. It is a composite multilayer substrate.
According to a third aspect of the invention, claim 1 or 2, wherein the thickness of the electronic component in the stacking direction of the core member is characterized in that it comprises at least one electronic component does not exceed the thickness of the core member The composite multilayer substrate described in 1. above.
The invention according to claim 4 is the composite multilayer substrate according to any one of claims 1 to 3 , wherein the second small hole is close to the bottomless hole that accommodates the electronic component. .
According to a fifth aspect of the present invention, there is provided a flat core member made of a metal material, a front surface side resin layer and a back surface side resin layer covering at least the front surface and the back surface of the core member, and the front and back surfaces of the core member. A bottomless hole formed in the core member, an electronic component mounted in the bottomless hole, and positioned directly above or below the electronic component and extending in a vertical direction on the front and back surfaces of the core member A first small hole formed in one or both of the front surface side resin layer and the back surface side resin layer, a first electrode formed inside the first small hole, and directly above the electronic component And positioned directly above or directly below the core member excluding directly below and extending in the vertical direction of the front and back surfaces of the core member and formed on one or both of the front surface side resin layer and the back surface side resin layer. A second small hole and a shape inside the second small hole. An electrical connection to the electronic component via the first electrode, and an electrical connection to the core member via the second electrode. Further, at least of two surfaces facing the opening of the electronic component mounted in the bottomless hole with respect to the position of the surface in which the opening of the bottomless hole is formed in the core member It is a composite multilayer substrate characterized by including at least one electronic component in which the position of one surface enters the inner direction of the bottomless hole.
A sixth aspect of the present invention is a module comprising the composite multilayer substrate according to any one of the first to fifth aspects.

  According to the present invention, since a core member made of a metal material is provided, it is not necessary to use a glass cloth as a reinforcing material. Therefore, various inconveniences associated with the glass cloth (deterioration of electrical characteristics accompanying the occurrence of migration and It is possible to avoid an increase in manufacturing cost associated with glass cloth cutting.

It is principal part sectional drawing and the principal part perspective view of the composite multilayer substrate in embodiment. 6 is a state diagram when an electronic component 25 is mounted in a bottomless hole 24 of a core member 21. FIG. 6 is a state diagram when an electronic component 25 is mounted in a bottomless hole 24 of a core member 21. FIG. FIG. 6 is a cross-sectional view of a main part in another part of the core member 21 and an external perspective view of the part. It is sectional drawing of the module 40 to which this invention is applied. It is a manufacturing-process figure (1st process-3rd process) of the module 40. FIG. It is an external view after a 3rd process. FIG. 10 is a manufacturing process diagram (fourth process to sixth process) of the module 40. It is an external view after a 5th process. It is a manufacturing-process figure (seventh process-tenth process) of the module 40. FIG. It is an external view after a 10th process. It is sectional drawing of the conventional composite multilayer substrate, and an enlarged plan view of a glass cloth.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
(First embodiment)
FIG. 1A is a main part sectional view and a main part perspective view of a composite multilayer substrate in an embodiment. In this figure, the composite multilayer substrate 20 has a “multilayer structure” in cross section. In the illustrated example, a flat core member 21 made of a material having good electrical conductivity, good thermal conductivity, and high rigidity, and the surface of the core member 21 (the upper surface as viewed in the drawing) are covered. A three-layer structure comprising a resin layer (hereinafter referred to as “front surface side resin layer”) 22 and a resin layer (hereinafter referred to as “back surface side resin layer”) 23 covering the back surface (lower surface as viewed in the drawing) of the core member 21. have.

  As described above, the physical properties necessary for the core member 21 are three: good electrical conductivity, good thermal conductivity, and high rigidity. “Good electrical conductivity” means that it is easy to conduct electricity (ie, low electrical resistance), and “good thermal conductivity” means that it is easy to conduct heat (ie, high thermal conductivity). “High rigidity” means that there is little stress deformation due to bending or compression. The material is not limited. Any material having the above physical characteristics may be used. Typically, metal (metal) is preferable, and among them, metal (metal) such as Cu (copper), 42 alloy, and Invar is more preferable in satisfying the three physical characteristics at the same time.

  Moreover, as a material of the resin layer (the surface side resin layer 22 and the back surface side resin layer 23) which covers the front and back of the core member 21, it has electrical insulation and environmental resistance (water resistance, acid resistance, etc.), and is further necessary Therefore, a material having a required dielectric constant, for example, an epoxy material, a polyimide material, a cyanate ester material, a Teflon (registered trademark) resin material, or an insulating material used for a printed wiring board can be used.

  The core member 21 is formed with a through hole (hereinafter referred to as “bottomless hole”) 24 having a predetermined opening shape penetrating the front and back surfaces thereof (see FIGS. 1A and 1B). The bottomless hole 24 is used as a mounting hole for the electronic component 25, whereby the electronic component 25 can be “embedded” in the composite multilayer substrate 20 to improve the mounting density. It is like that.

  According to the composite multilayer substrate 20 having such a structure, the physical strength (such as bending rigidity) of the composite multilayer substrate 20 can be secured by the rigidity of the core member 21. Therefore, the reinforcing material (glass cloth 7; see FIG. 12) used conventionally can be made unnecessary, and various inconveniences associated with the use of the glass cloth can be avoided.

  That is, since the core member 21 having at least “high rigidity” is used as another reinforcing material in place of the glass cloth, the ion migration problem described at the beginning “along the interface between the surface of the glass fiber 6 and the resin” “Ion migration occurs and the electrical characteristics are deteriorated by breaking the insulation”, and the problem of an increase in manufacturing cost “To form the bottomed hole 9 for the cavity, a part of the resin layer 2 is physically In this case, the glass fiber 6 inside the resin layer 2 must be cut, and such cutting work generally uses a precision processing machine such as a laser. If more than one bottomed hole 9 is required, the work time will be doubled and the manufacturing cost will be increased. ” (To avoid the deterioration of electrical characteristics due to occurrence of migration, and, achieving reduction in manufacturing cost) purposes Ultimate it is possible to achieve.

  In the above description, the example in which the electronic component 25 is mounted in the bottomless hole 24 formed in the core member 21 has been shown. However, the mounting hole of the electronic component 25 is not necessarily a hole “through the front and back” (that is, no Bottom hole). For example, as shown in FIG. 1C, a recess (hereinafter referred to as “bottom hole”) 26 may be formed in the core member 21, and the electronic component 25 may be mounted in the bottom hole 26. In this way, the heat generated in the electronic component 25 is efficiently applied to the core member 21 by bringing the bottom surface 27 of the bottomed hole 26 and the electronic component 25 into contact with each other directly or via a heat conductive adhesive. The core member 21 can be used as a heat dissipation path for the electronic component 25.

  Moreover, it is desirable that the resin layer structures (material selection, layer thickness, etc.) on the front surface side and the back surface side of the core member 21 are substantially the same. The composite multilayer substrate 20 has a front-back symmetrical structure, and the difference in thermal expansion between the front and back resin layers (the front-side resin layer 22 and the back-side resin layer 23) of the core member 21 is reduced. This is because “can be suppressed.

  As described above, the front surface and the back surface of the core member 21 are covered with the front surface side resin layer 22 and the back surface side resin layer 23, respectively. However, it is preferable that the side surface of the core member 21 is also covered with a resin or the like. That is, it is desirable to completely enclose (seal or coat) the “all surfaces” of the core member 21 with resin or an environmental resistant material corresponding thereto. The front surface and the back surface of the core member 21 are covered with the front surface side resin layer 22 and the back surface side resin layer 23, respectively, and there is no fear of oxidation because they do not touch the air, but the side surface of the core member 21 is exposed. In such a case, the surface may be gradually oxidized, and an electrical short circuit or the like may occur between the exposed surface and an adjacent mounting component, causing a malfunction.

(Second embodiment)
FIG. 2A is a state diagram when the electronic component 25 is mounted in the bottomless hole 24 of the core member 21. In this figure, when the upper surface height position of the core member 21 is La and the upper surface height position of the electronic component 25 is Lb, the height difference d (d = La−Lb) is 0 or a value of 0 or more. (That is, La = Lb or La> Lb). In this way, the upper surface height position La of the core member 21 is always higher than the upper surface height position Lb of the electronic component 25, so that the load (front surface side) on the electronic component 25 during the production of the composite multilayer substrate 20 is increased. The load applied when laminating the resin layer 22 and the like) can be received by the core member 21, and damage to the electronic component 25 can be avoided.

  FIG. 2B is a state diagram when the electronic component 25 is mounted in the bottomless hole 24 of the core member 21. The difference from FIG. 2A is that a heat conductive resin 28 is interposed between the electronic component 25 and the back surface side resin layer 23, and a side end of the heat conductive resin 28 is connected to a bottomless hole of the core member 21. It is in the point made to contact the inner wall surface. If it does in this way, the heat which generate | occur | produced in the electronic component 25 can be efficiently escaped to the core member 21 of the inner wall face of a bottomless hole via the heat conductive resin 28. FIG.

  FIG. 3A is also a state diagram when the electronic component 25 is mounted in the bottomless hole 24 of the core member 21. The difference from FIG. 2A is that a bottomless hole 29 is also formed in the back side resin layer 23, and the two bottomless holes 24, 29 are made of a material having good thermal conductivity (for example, copper). The adjustment member 30 is loaded. The electronic component 25 is placed and mounted on the height dimension adjusting member 30.

Here, when the thickness dimension of the core member is Ha, the thickness dimension of the back surface side resin layer 23 is Hb, the height dimension of the electronic component 25 is Hc, and the height dimension of the height dimension adjusting member 30 is Hd, the core member In order to set the height difference d between the upper surface height position La of 21 and the upper surface height position Lb of the electronic component 25 to a desired value,
Ha + Hb = Hc + Hd + d (1)
Since Ha, Hb and Hb are fixed values, for example, in order to set d = 0,
Ha + Hb = Hc + Hd (2)
Therefore, the height Hd of the height dimension adjusting member 30 is set to
Hd = Ha + Hb−Hc (3)
And it is sufficient.

  According to this, even when the height dimension Hc of the electronic component 25 is extremely smaller than the thickness dimension Ha of the core member 21, the above-described dimension difference d can be easily set to a desired value. In addition, various electronic components having different height dimensions can be embedded in the composite multilayer substrate 20 without any trouble. Further, when a material having good thermal conductivity is used as the material of the height dimension adjusting member 30, the heat generated in the electronic component 25 is transferred from the height dimension adjusting member 30 to the core member 21 through the inner wall surface of the bottomless hole. In addition to being able to escape, it can also escape from the lower surface of the height dimension adjusting member 30 to the outside, and the heat dissipation effect of the electronic component 25 can be further enhanced.

  FIG. 3B is a state diagram when the electronic component 25 is mounted in the bottomless hole 24 of the core member 21. The difference from FIG. 3A is that it can be applied to the electronic component 25 having a large height. In the figure, the height dimension Hc of the electronic component 25 exceeds the thickness dimension Ha of the core member 21 (Ha <Hc). The electronic component 25 is mounted over both the bottomless hole 24 formed in the core member 21 and the bottomless hole 31 formed in the back surface side resin layer 23, and a part of the lower surface and side surface of the electronic component 25. Are held in two holes (the bottomless hole 24 and the bottomless hole 31) through the heat conductive resin 32.

  In this way, even in the case of the electronic component 25 having a large height, the dimensional difference d can be easily set to a desired value, and the heat generated in the electronic component 25 is thermally conductive. The resin 32 can escape to the core member 21 through the inner wall surface of the bottomless hole, and can also escape from the lower surface of the heat conductive resin 32 to the outside. Can be increased.

(Third embodiment)
FIG. 4 is a cross-sectional view of a main part in another part of the core member 21 and an external perspective view of the part. In these drawings, a columnar portion 33 is provided at an arbitrary position of the core member 21 (which is adjacent to the bottomless hole 24 in the drawing, but is not limited thereto).

  This columnar portion 33 is originally a part of the core member 21. Specifically, it is a “remaining portion” of the core member 21 generated by forming the cylindrical dividing groove 34 at an arbitrary position of the core member 21. This columnar portion 33 can be used as follows. That is, via holes 35 and 36 are formed in each of the front surface side resin layer 22 and the back surface side resin layer 23 on both the one end side and the other end side of the columnar portion 33, and the electrodes 37 and 38 are formed in the via holes 35 and 36. When the electrode 37 is formed, the electrodes 37 and 38 are electrically connected via the columnar portion 33, and the end surfaces of the respective electrodes 37 and 38 are exposed on the front surface and the back surface of the composite multilayer substrate 20. , 38 and the columnar portion 33 can be used as the double-sided through wiring of the composite multilayer substrate 20, and a transmission path for electrical signals and power supply voltages can be secured.

(Fourth embodiment)
FIG. 5 is a cross-sectional view of a module made by applying the technical idea of the above embodiment (first to third embodiments).

  In addition, “module (English: module)” generally means “standardized structural unit”. A module is also considered a type of unit or part, but a unit is usually positioned as a replaceable component, and a part is itself positioned as a minimal unit, whereas a module is It is often not assumed, and is often designed and manufactured as having a specific function. However, since it is also true that no strict division is defined, this term (“module”) is defined and used in the present specification as follows. That is, a module includes one or a plurality of semiconductor chips, resistor elements, capacitor elements or other electronic components (collectively referred to as “electronic components”) (a combination of different types of electronic components). ) A device that has been mounted to realize a required electronic circuit function and that can be circulated independently in the market. The ease of replacement after being mounted (mounted) on any electronic device is not particularly considered. The mounting form may be detachable by a connector or the like, or may be a form that is mounted in a substantially fixed state by soldering or the like.

  The module 40 shown in FIG. 5 is, for example, a power amplifier module, an antenna switch module, or an RF module that integrates them, which is a component of an RF (high frequency) unit in a mobile phone or a portable information terminal with a wireless communication function. It can function and can itself be distributed to the market as a product.

  The module 40 has a desired circuit by mounting required electronic components on the surface and inside of a composite multilayer substrate having a structure to which the technical idea of the above-described embodiments (first to third embodiments) is applied. The functions (power amplifier module, antenna switch module, or RF module integrating them) are realized.

  The illustrated module 40 has a structure that is largely divided into “intermediate layer A”, “upper layer B” stacked on the upper surface of the intermediate layer A, and “lower layer C” stacked on the lower surface of the intermediate layer A. Can be divided.

  In the intermediate layer A, the front-side resin layer 42 and the back-side resin layer 43 are laminated on both surfaces of the core member 41, and a plurality of (four in cross-sectional view) bottomless holes 44 to 47 are formed in the core member 41. In addition, each of the bottomless holes 44 to 47 has a structure in which appropriate electronic components 48 to 51 are embedded.

  For convenience of explanation, the leftmost electronic component 48 is a semiconductor chip having a small height, the second electronic component 49 from the left is a capacitor (the height is about the thickness of the core member 41), and the third from the left. It is assumed that the electronic component 50 is a resistor (height dimension is about the thickness dimension of the core member 41), and the electronic component 51 at the right end is a semiconductor chip having a large height dimension.

  Electronic components 49 and 50 having a height dimension approximately equal to the thickness dimension of the core member 41 are embedded and mounted in the bottomless holes 45 and 46 corresponding thereto. As described above, the electronic components 49 and 50 are capacitors and resistors, respectively, and are components with relatively little heat generation. Therefore, unless special heat countermeasures are required, the electronic components 49 and 50 are fixed on the back surface. It may be performed by the adhesives 52 and 53 filled between the side resin layers 43, but when the heat generation of the part is large, the adhesives 52 and 53 corresponding to the parts should have good thermal conductivity. .

  In the case of the electronic component 48 having a small height dimension, the height dimension adjusting member 54 having an appropriate height is inserted to adjust the height dimension, and when the heat generation of the electronic component 48 is large, A material having good thermal conductivity is used as the material of the height dimension adjusting member 54. Further, in the case of the electronic component 51 having a large height dimension, the height dimension is adjusted by being embedded so as to reach the back surface side resin layer 43, and when the heat generation of the electronic component 51 is large, A heat conductive resin 55 is applied so as to cover the side and bottom surfaces of the electronic component 51. In any case, the height dimension adjusting member 54 and the heat conductive resin 55 are partially in contact with the core member 41 and the bottom surface portion is exposed from the lower surface of the intermediate layer A.

  Further, columnar portions 56 and 57 are provided at arbitrary positions of the core member 41, and the columnar portions 56 and 57 are intermediated by electrodes 58, 59, 60 and 61 provided so as to be in contact with both end faces thereof. A signal transmission path or a power transmission path that penetrates the front and back of the layer A is formed. In the intermediate layer A, 62 to 75 are electrodes.

  The lower layer C forms electrode patterns (details will be described later) on both surfaces of the resin layer 76, and the upper layer B also forms electrode patterns (details will be described later) on both surfaces of the resin layer 77. In addition, the electronic components 78 to 82 are surface-mounted on a predetermined electrode pattern, and further, a cover 40a that covers the electronic components 78 to 82 (desirably serving as electromagnetic shielding for EMI countermeasures) Is attached. Although not particularly limited, the electronic components 78, 79, and 81 are capacitors, and the electronic components 80 and 82 are resistors.

  As described above, the module 40 is based on the flat core member 41 made of a material (Cu, 42 alloy, Invar, etc.) having good electrical conductivity, good thermal conductivity and high rigidity. The front surface side and the back surface side of 41 are built up by resin layers 76 and 77. Here, each of the two resin layers 76 and 77 is made of, for example, an epoxy resin, a polyimide resin, a cyanate ester resin, or a Teflon (registered trademark) resin as a main material (dielectric powder, magnetic powder, etc., if desired). In which the functional powder may be mixed), or an insulating material used for a printed wiring board as a main material, and does not have the glass cloth 7 (see FIG. 12) described at the beginning. (In other words, it is a glass clothless layer). This is because the bending rigidity of the module 40 is ensured exclusively by the core member 41 which is the base of the intermediate layer A, and the glass cloth 7 as a reinforcing material is not required.

  Semiconductor chips (electronic components 48 and 51), capacitors (electronic components 49), and resistors (electronic components 50) are embedded in the four cavities (formed by the bottomless holes 44 to 47) of the core member 41, respectively. It is. Of those electronic components that generate large amounts of heat (electronic components 48 and 51), a part of the bottom and side surfaces (if necessary) of each component is made of a material with good thermal conductivity (height adjustment). It connects to the core member 41 via the member 54 and the heat conductive resin 55), and also connects to the upper surface electrode patterns 82 and 83 of the lower layer C. The upper surface electrode patterns 82 and 83 of the lower layer C are connected to the lower surface electrode pattern 86 of the lower layer C via the internal electrodes 84 and 85 of the lower layer C, and eventually the heat generated in the electronic components 48 and 51 is obtained. Is released to the core member 41 through the inner wall surface of the bottomless hole, and is also released to the substrate of the electronic device on which the module 40 is mounted, via the lower surface electrode pattern 86 of the lower layer C. A sufficient heat dissipation effect can be obtained.

  In addition, a semiconductor chip (electronic component 48) having a small height was placed in a cavity (formed by a through hole at the same position as the bottomless hole 44 of the core portion 41) in the lower layer C. Height dimension adjusting member 54 (may be an independent member or may be a plated layer. It has good thermal conductivity and can adjust the height dimension of the electronic component 48. As long as the mounting height is raised to a desired position, the relationship between the upper surface height position of the electronic component 48 and the upper surface height position of the core member 41 (the relationship between La and Lb in FIG. 2). Can be kept appropriate.

  In addition, a semiconductor chip (electronic component 51) having a large height dimension is placed in a cavity (formed by a through hole at the same position as the bottomless hole 47 of the core portion 41) formed in the lower layer C. The relationship between the upper surface height position of the electronic component 51 and the upper surface height position of the core member 41 (see the relationship between La and Lb in FIG. 2) can be maintained appropriately.

  Patterning of the core member 41 of the intermediate layer A (formation of the bottomless holes 44 to 47 and the columnar portions 56 and 57) should be performed in a state where the back surface side resin layer 43 is bonded to the lower surface of the core member 41. This is because, when the core member 41 is patterned in this state, in particular, the “island” portion in the sea-island structure portion does not fall off, so that the portion can be used as the columnar portions 56 and 57. Therefore, a columnar structure (so-called “post”: formed by columnar portions 56 and 57 and electrodes 58, 59, 60, and 61 connected to both ends thereof) for connecting the front and back of the intermediate layer A is a core member. 41 can be easily formed by physical processing (for example, etching). When the core member 41 is etched with a normal etchant such as ferric chloride, the material of the core member 41 can be Cu, 42 alloy, Invar, or the like in view of the resin physical properties. However, when 42 alloy or invar is selected, it is preferable to perform Cu plating on the surface of 42 alloy or invar from the viewpoint of preventing ion migration or the like.

Next, the manufacturing process of the module 40 will be described.
(First step: FIG. 6A)
First, a flat core member 41 having good electrical conductivity, good thermal conductivity, and high rigidity, for example, the lower surface of the core member 41 such as Cu, 42 alloy or Invar (when the upper and lower sides face the drawing) The resin layer (back surface side resin layer 43) is bonded to the lower surface of the resin layer 43, and a thin film 90 having good conductivity and good thermal conductivity is bonded to the lower surface of the back surface resin layer 43.

  Here, as a material of the back surface side resin layer 43, for example, an epoxy-based, polyimide-based, cyanate ester-based, or Teflon (registered trademark) -based resin material or an insulating material used for a printed wiring board can be used. . Moreover, as the thin film 90, what has said characteristic, typically a copper foil can be used.

  In addition, you may use what integrated the back surface side resin layer 43 and the thin film 90. FIG. For example, a copper foil with resin may be used, or a dry film in which a copper foil is laminated may be used.

(Second step: FIG. 6B)
Next, the core member 41 is patterned to form bottomless holes 44 to 47 and columnar portions 56 and 57. The bottomless holes 44 to 47 become cavities for embedding the electronic components 48 to 51, respectively. The patterning of the core member 41 can be performed by, for example, a subtractive method. In this case, an etchant used in a normal printed wiring board such as ferric chloride or cupric chloride can be used.

(Third step: FIG. 6C)
Next, with respect to the bottomless holes 44 and 47 corresponding to the electronic parts (electronic parts 48 and 51) that generate a large amount of heat, the bottom-side resin layer 43 below is removed with the same opening shape as the bottomless holes 44 and 47. The thin film 90 is exposed (see the wavy line). The removal of the back surface side resin layer 43 can be performed by, for example, laser ablation or plasma etching.

  7A and 7B are external views after the third step, where FIG. 7A is a top perspective view and FIG. 7B is a bottom perspective view. 7 and FIG. 6 (FIG. 6) do not correspond exactly. The points to be understood in FIG. 7 are “cavities” and “posts” formed in the core member 41. That is, in FIG. 7, a resin layer 91 (corresponding to the back side resin layer 43 in FIG. 6) and a copper foil 92 (corresponding to the thin film 90 in FIG. 6) are bonded to the lower surface of the core member 41. Are patterned to form several cavities 93 to 95 (corresponding to the bottomless holes 44 to 47 in FIG. 6) and several posts 96 to 103 (corresponding to the columnar portions 56 and 57 in FIG. 6). .

(Fourth step: FIG. 8A)
Next, the height dimension adjusting member 54 is inserted into the bottomless hole 44 at the left end, and the heat conductive resin 104 is applied on the height dimension adjusting member 54. Adhesives 52 and 53 are applied to the second and third bottomless holes 45 and 46 from the left, and a heat conductive resin 55 is applied to the bottomless hole 47 at the right end. The height dimension adjusting member 54 may be an independent member, or may be one obtained by growing a plating such as Cu. Any material having good thermal conductivity and capable of adjusting the height of the electronic component 48 may be used. As the name suggests, the thermally conductive resins 104 and 55 have a function of radiating heat, and also have a function of temporarily fixing the embedded electronic components 48 and 51. The adhesives 52 and 53 need only have a function of fixing the embedded electronic components 49 and 50.

  Here, the electronic components 49 and 50 that do not require special heat dissipation measures are fixed with adhesives 52 and 53, but the present invention is not limited to this. For example, in the first step (FIG. 6A), when the core member 41 and the resin layer (back side resin layer 43) are laminated and bonded, the resin layer is not fully cured, leaving an uncured portion. Lamination is completed in the state, and when the electronic components 49 and 50 are mounted in the fourth step (FIG. 8A), the adhesive strength of the resin layer is slightly recovered by raising the temperature to a high temperature. , 50 may be fixed. In this way, the application work of the adhesives 52 and 53 can be made unnecessary.

(Fifth step: FIG. 8B)
Next, the electronic components 48 to 51 corresponding to the bottomless holes 44 to 47 are mounted. With respect to one electronic component 48 that requires heat dissipation, the heat can be released to the core member 41 and the thin film 90 through the heat conductive resin 104 and the height dimension adjusting member 54, With respect to the electronic component 51, the heat can be released to the core member 41 and the thin film 90 via the heat conductive resin 55.

(Sixth step: FIG. 8C)
Next, the core member 41 after mounting the electronic components 48 to 51 is sealed with resin. By this sealing, the surface side resin layer 42 in the first to third embodiments is formed, and by this surface side resin layer 42, the surface of the core member 41, cavities (bottomless holes 44 to 47), and via posts. The gap around the (columnar portions 56, 57) is completely blocked. Here, it is desirable that the side end surface of the core member 41 (see the wavy line surrounding portions A and B in FIG. 8C) is also completely sealed with resin. The resin that seals the side end surface may serve as a part of the surface-side resin layer, but a side-side resin layer may be provided separately from the surface-side resin layer. By doing so, all surfaces of the core member 41 can be shielded from the environmental atmosphere (atmosphere), and oxidation of the core member 41 due to oxygen, moisture, etc. in the air can be prevented, and the electrical connection between adjacent mounting components can be prevented. This is because it is possible to prevent a short circuit and avoid malfunction.

  Here, as the material of the surface-side resin layer 42, for example, an epoxy-based, polyimide-based, cyanate ester-based, or Teflon (registered trademark) -based resin material or an insulating material used for a printed wiring board can be used. .

  FIG. 9 is an external view after the fifth step (a) and an external view after the sixth step (b). In addition, FIG. 9 and said process drawing (FIG. 8) do not respond | correspond strictly. The points to be understood in FIG. 9 are the mounting state of the electronic component in the “cavity” formed in the core member 41 and the sealing state by the resin (surface-side resin layer 42). That is, in FIG. 9, corresponding electronic components 105 to 107 (corresponding to the electronic components 48 to 51 in FIG. 8) are mounted in the cavities 93 to 95 formed in the core member 41, respectively. The core member 41 with the 107 mounted thereon is completely sealed with a resin 108 (corresponding to the front surface side resin layer 42 in FIG. 8). In FIG. 9B, the side surface of the core member 41 after being sealed with the resin 108 is exposed, but this is for convenience of illustration. Actually, the side surface is completely covered with the resin 108.

(Seventh step: FIG. 10A)
Next, the thin film 90 is patterned. By this patterning, a heat radiation pattern 83 for directly releasing heat is formed in the thin film 90 through the thermally conductive resin 55 among the electronic components 48 and 51 requiring heat radiation countermeasures. That is, the thin film 90 is etched out so as to leave only the heat radiation pattern 83.

(Eighth step: FIG. 10B)
Next, small holes 109 to 125 are formed in each of the front surface side resin layer 42 and the back surface side resin layer 43. For example, the resin in each layer is partially removed with a CO2 gas laser, UV laser, excimer laser, or the like, and then the resin residues are removed with permanganic acid or plasma ashing to form the small holes 109 to 125.

(Ninth step: FIG. 10C)
Next, copper plating or etching is performed on the small holes 109 to 125 to form electrodes 63, 64, 65, 66, 67, 68, 69, 73 for electrical interlayer connection with the terminals of the electronic components 48 to 49. Electrodes 58, 59, 60, 61, 62, 70, 71, 72, 74 and the like for performing interlayer connection via the core member 41 are formed. In addition, in order to ensure the adhesiveness of resin and plated copper, the surface of the resin may be roughened by permanganic acid or the like as necessary to increase the surface area. Reference numerals 126 to 154 denote electrodes or wiring patterns formed on the exposed surfaces of the front surface side resin layer 42 and the rear surface side resin layer 43. By the tenth step, the intermediate layer A in FIG. 5 is formed.

(Tenth step: FIG. 10D)
Next, the upper layer B and the lower layer C in FIG. 5 are formed by bonding the resin to the front surface side resin layer 42 and the back surface side resin layer 43 and forming the necessary solder resist patterns on the front and back surfaces of those resins. It is done.

  11A and 11B are external views after the tenth step, where FIG. 11A is a top perspective view and FIG. 11B is a bottom perspective view. In addition, FIG. 11 and said process drawing (FIG. 10) do not respond | correspond strictly. The points to be understood in FIG. 11 are that the upper layer B is laminated on the intermediate layer A, the lower layer C is laminated below the intermediate layer A, and on the exposed surfaces of the upper layer B and the lower layer C. The required conductive patterns 155 to 170 are formed. Among these conductive patterns 155 to 170, for example, one having the largest area (conductive pattern 166) located on the exposed surface of the lower layer C is a heat dissipation pattern for releasing heat of the electronic components 48 and 51. Used as

  After performing the above steps, the required surface mount components (electronic components 78 to 82 in FIG. 5) are attached, and if necessary, the cover 40a is attached to complete the module 40 shown in FIG.

The module 40 having such a structure has the following effects.
(1) Since the plate-shaped core member 41 made of a material (Cu, 42 alloy, Invar, etc.) having good electrical conductivity, good thermal conductivity and high rigidity is used as a base, bending the substrate The stress can be received by the rigidity of the core member 41, and undesirable substrate deformation can be avoided or suppressed. Therefore, since the conventional reinforcing material (glass cloth) is not required, various problems related to the glass cloth (problems of ion migration and manufacturing cost increase associated with glass cloth cutting when forming the cavity) are not caused. A special effect is obtained.

(2) When “sea island” is formed in a required portion in a state where resin (back surface side resin layer 43) is attached to one surface (back surface in the embodiment) of the core member 41, the “island” portion does not fall off. Therefore, the portion can be used as the columnar portions 56 and 57. Further, the electric signal transmission path and the power transmission path between the layers can be easily configured via the columnar portions 56 and 57, and the module design can be facilitated.

(3) A cavity (bottomless holes 44 to 47) is formed in the core member 41, and the electronic components 48 to 51 can be easily embedded in the cavity, and the mounting density of the substrate can be improved in combination with the surface mounting. it can.

(4) Furthermore, when embedding an electronic component having a large height dimension or a small height dimension, the height dimension adjusting member 54 is inserted, or a hole in the back surface side resin layer 43 is used to The height dimension of the component can be easily adjusted, and the upper surface height position of the core member 41 can be appropriately set so that the upper surface height position of the electronic component does not exceed. For this reason, the load at the time of manufacture of a multilayer substrate can be received with the core member 41, and damage to an electronic component can be prevented.

(5) When releasing heat from the electronic component, the core member 41 is used as a heat dissipation path, or a heat dissipation pattern (electrode pattern 166 in FIG. 11B) formed on the exposed surface of the lower layer C is used. It can be used for a heat dissipation path, and can be particularly suitable for use in a module 40 configured by embedding electronic components 48 and 51 that generate large heat.

(6) Further, by making the upper layer B and the lower layer C substantially symmetric with respect to the intermediate layer A, it is possible to avoid or suppress the warpage of the substrate.

20 Composite Multilayer Substrate 21 Core Member 22 Front Side Resin Layer 23 Back Side Resin Layer 24 Bottomless Hole 25 Electronic Component 26 Bottomed Hole 40 Module 41 Core Member 42 Front Side Resin Layer 43 Back Side Resin Layer 44-47 Bottomless Hole 48 ~ 51 Electronic parts

Claims (6)

A flat core member made of a metal material;
A front surface side resin layer and a back surface side resin layer covering at least the front surface and the back surface of the core member;
A bottomless hole formed in the core member through the front and back of the core member;
An electronic component mounted in the bottomless hole;
A first position located directly above or below the electronic component and extending in a direction perpendicular to the front and back surfaces of the core member and formed on one or both of the front surface side resin layer and the back surface side resin layer. With a small hole,
A first electrode formed inside the first small hole;
Either of the front surface side resin layer and the rear surface side resin layer, which is located directly above or below the core member excluding directly above and directly below the electronic component and extends in a direction perpendicular to the front and back surfaces of the core member. A second eyelet formed in one or both;
A second electrode formed inside the second small hole,
The electrical connection to the electronic component is performed through the first electrode, and the electrical connection to the core member is performed through the second electrode,
Furthermore, when the horizontal plane for the surface of the surface-side resin layer covering the surface of the core member is a height reference plane,
If there is an electrode only on one side of the electronic component, the surface with the electrode is the top surface,
When there are electrodes on both sides of the electronic component, if any one of the surfaces with the electrodes is the top surface,
Look including at least the electronic component one upper surface of never substantially exceeds upward the height of the upper surface of the core member of the electronic component, and, all surfaces of the core member corresponds to the resin or resin A composite multilayer board characterized by being covered with an environmentally resistant material .   2. The composite multilayer substrate according to claim 1, wherein the electrical connection to the core member made through the second electrode is made to an unprocessed portion of the core member. Composite multilayer substrate according to claim 1 or 2, wherein the thickness of the electronic component in the stacking direction of the core member is characterized in that it comprises at least one electronic component does not exceed the thickness of the core member. The second small holes, composite multilayer substrate according to claim 1, wherein said proximate to a bottomless hole for accommodating the electronic component. A flat core member made of a metal material;
A front surface side resin layer and a back surface side resin layer covering at least the front surface and the back surface of the core member;
A bottomless hole formed in the core member through the front and back of the core member;
An electronic component mounted in the bottomless hole;
A first position located directly above or below the electronic component and extending in a direction perpendicular to the front and back surfaces of the core member and formed on one or both of the front surface side resin layer and the back surface side resin layer. With a small hole,
A first electrode formed inside the first small hole;
Either of the front surface side resin layer and the rear surface side resin layer, which is located directly above or below the core member excluding directly above and directly below the electronic component and extends in a direction perpendicular to the front and back surfaces of the core member. A second eyelet formed in one or both;
A second electrode formed inside the second small hole,
The electrical connection to the electronic component is performed through the first electrode, and the electrical connection to the core member is performed through the second electrode,
Further, at least one of the two surfaces facing the opening of the electronic component mounted in the bottomless hole with respect to the position of the surface on which the opening of the bottomless hole is formed in the core member Including at least one electronic component that is positioned so as to enter the inner direction of the bottomless hole.
A composite multilayer substrate characterized by that . 6. A module comprising the composite multilayer substrate according to claim 1.

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