JP5351402B2 - Method for producing a hollow cylinder from quartz glass and apparatus suitable for carrying out this method - Google Patents
Method for producing a hollow cylinder from quartz glass and apparatus suitable for carrying out this method Download PDFInfo
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- JP5351402B2 JP5351402B2 JP2007255730A JP2007255730A JP5351402B2 JP 5351402 B2 JP5351402 B2 JP 5351402B2 JP 2007255730 A JP2007255730 A JP 2007255730A JP 2007255730 A JP2007255730 A JP 2007255730A JP 5351402 B2 JP5351402 B2 JP 5351402B2
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- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
- C03B19/1484—Means for supporting, rotating or translating the article being formed
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
- C03B19/1453—Thermal after-treatment of the shaped article, e.g. dehydrating, consolidating, sintering
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Abstract
Description
本発明は、内部ボアを有するＳｉＯ2スート管を炉内で焼結する際、長手方向軸を備え且つ中空筒状体の形成に伴ってＳｉＯ2スート管により押されるスリーブ状成形要素によって囲まれると共にＳｉＯ2スート管の内部ボアに突出している細長い支持要素を備える支持装置によってＳｉＯ2スート管を支持する、石英ガラスから中空筒状体を製造する方法に関する。 The present invention, when sintering a SiO 2 soot tube with an internal bore in a furnace, is surrounded by a sleeve-like forming element that has a longitudinal axis and is pushed by the SiO 2 soot tube with the formation of a hollow tubular body to support the SiO 2 soot tube by a supporting device comprising an elongated support element that protrudes inside the bore of the SiO 2 soot tube, it relates to a method for producing a hollow cylindrical body of quartz glass.
更に、本発明は、内部ボアを有する多孔性のスート管を焼結するための炉と、スート管を加熱するための加熱要素と、炉内でスート管を支持するための支持装置であって、長手方向軸を備え且つ中空筒状体の形成に伴ってスート管により押されるスリーブ状成形要素によって囲まれていると共にスート管の内部ボアに突出している細長い支持要素を備える支持装置とを備える装置に関する。 Furthermore, the present invention is a furnace for sintering a porous soot tube having an internal bore, a heating element for heating the soot tube, and a support device for supporting the soot tube in the furnace. A support device comprising an elongate support element with a longitudinal axis and surrounded by a sleeve-like forming element pushed by the soot tube as the hollow cylinder is formed and projecting into the internal bore of the soot tube Relates to the device.
合成石英ガラスからなる中空筒状体は、光ファイバー用のプリフォームを製造するための中間体として利用される。いわゆる「スート法」は、ＳｉＯ2粒子からなる多孔性ブランク（ここでは「スート体」又は「スート管」と呼ぶ）を形成する析出工程と、スート体をガラス化するための焼結工程とを製造工程に含む。 A hollow cylindrical body made of synthetic quartz glass is used as an intermediate for producing a preform for optical fibers. The so-called “soot method” includes a precipitation step for forming a porous blank made of SiO 2 particles (herein referred to as “soot body” or “soot tube”) and a sintering step for vitrifying the soot body. Included in the manufacturing process.
スート体の焼結（「ガラス化」とも呼ぶ）は、例えば、欧州特許出願公開第７０１９７５号に記載されており、この文献は、上述したような方法及び装置を開示している。この場合、スート管はガラス化炉に運び込まれると共に、炉内で支持装置によって垂直方向に支持される。この装置は、スート管の内部ボアを通って上部から突き出た支持棒であって、スート管の下端を初期段階で支持する支持台に接続された支持棒を備えている。支持棒は、炭素繊維強化グラファイト（ＣＦＣ：炭素繊維強化カーボン）から構成され且つスート管の内部ボアの領域では純グラファイトからなるガス透過性ジャケット管により覆われている。 Sintering of soot bodies (also referred to as “vitrification”) is described, for example, in European Patent Application No. 701975, which discloses a method and apparatus as described above. In this case, the soot tube is carried into the vitrification furnace and is supported in the vertical direction by a support device in the furnace. This device includes a support bar that protrudes from the upper part through an internal bore of the soot tube and is connected to a support base that supports the lower end of the soot tube in an initial stage. The support rod is made of carbon fiber reinforced graphite (CFC: carbon fiber reinforced carbon) and covered with a gas permeable jacket tube made of pure graphite in the region of the inner bore of the soot tube.
ガラス化のために、スート管は環状の加熱要素に運び込まれ、その中でスート管の上端から始まって領域ごとにガラス化される。この時、スート管は、グラファイト製のジャケット管に対して連続的に倒れ込むと共に、その長さが短くなる。支持装置は、スート管の上端に埋め込まれたグラファイト製の支持リングを備え、第１の焼結段階ではスート管を支持台上に立てて保持し、第２の焼結段階では、グラファイト製の支持リングがグラファイト製のジャケット管に支持され、スート管の上端から吊り下げるように構成される。焼結後に生じた中空筒状体の内径は、理想的にはジャケット管の外径に一致する。 For vitrification, the soot tube is brought into an annular heating element in which it is vitrified region by region starting from the upper end of the soot tube. At this time, the soot tube continuously falls with respect to the graphite jacket tube, and its length is shortened. The support device includes a support ring made of graphite embedded in the upper end of the soot tube, and holds the soot tube upright on a support base in the first sintering stage, and is made of graphite in the second sintering stage. The support ring is supported by a graphite jacket tube and is configured to hang from the upper end of the soot tube. The inner diameter of the hollow cylindrical body generated after sintering ideally matches the outer diameter of the jacket tube.
スート管が倒れ込む際、ジャケット管とスート管の内壁との間の隙間幅は重要な特性であることが分かっている。隙間幅が広いと、ジャケット管へのスート管の収縮が妨げられ、その結果、焼結後の中空筒状体の内径が一定しないものとなる。これに加えて、制御不能な可塑性の変形が起こり、それに伴って条痕が形成されて内部ボア及びガラス化した中空筒状体の品質を全体的に損なわせる可能性があり、同時にこの方法の段階の再現性を低下させる。これを回避するために、一般的には、スート管の内部ボアが可能な限り塞がれるようなジャケット管が用いられる。 It has been found that the gap width between the jacket tube and the inner wall of the soot tube is an important characteristic when the soot tube falls. When the gap width is wide, contraction of the soot tube to the jacket tube is hindered, and as a result, the inner diameter of the hollow cylindrical body after sintering is not constant. In addition to this, uncontrollable plastic deformations can occur, which can lead to the formation of streaks, which can impair the quality of the internal bore and the vitrified hollow cylinder at the same time. Reduce the reproducibility of the stage. In order to avoid this, a jacket tube is generally used in which the inner bore of the soot tube is closed as much as possible.
しかしながら、この方法によっても焼結後の中空筒状体の内部ボアが、波形又はバナナ型に湾曲して形成される恐れがあり、断面が楕円形になるか又は壁が一方に偏って管の壁厚が半径方向に不均一となることもある。この結果はとりわけスート管の内部ボアの直径が小さい（約４５ｍｍ未満）場合に見られる。 However, even in this method, there is a possibility that the inner bore of the hollow cylindrical body after sintering is formed in a corrugated shape or a banana shape, and the cross-section becomes elliptical or the wall is biased to one side of the tube. The wall thickness may be uneven in the radial direction. This result is seen especially when the inner bore diameter of the soot tube is small (less than about 45 mm).
この原因は、焼結工程においてスート管がジャケット管に対して収縮する際に、スート管の容積又は長さが大きく縮むことによって、支持装置、特にジャケット管及び支持棒の屈曲を引き起こす強い横方向力及び曲げモーメントがそれらに加わることにある。このことは、焼結面が非対称性となってスート管がジャケット管に対して不均一に倒れ込む時、又は区域ごとに焼結する場合のように、倒れ込むスート管がジャケット管に対して連続的に倒れ込む時に特に顕著である。既に存在していたわずかな不均一性が、焼結工程時に支持装置に大きな力を及ぼして、大きな変形をもたらす恐れがある。 This is because the soot tube contracts with respect to the jacket tube during the sintering process, so that the volume or length of the soot tube is greatly reduced, causing strong bending in the support device, particularly the jacket tube and the support rod. There is a force and bending moment on them. This is because when the sintered surface is asymmetrical and the soot tube falls unevenly with respect to the jacket tube, or when the soot tube that falls down is continuous with respect to the jacket tube, as in the case of sintering in each zone. This is particularly noticeable when falling into The slight non-uniformities that already exist can exert a large force on the support device during the sintering process, leading to large deformations.
欧州特許出願公開第７０１９７５号に記載されているような上端から下端への領域ごとの焼結では、スート管及び一部ガラス化した中空筒状体の重量は、第１の焼結段階中は支持台に加わる。スート管が長さ方向に更に収縮する結果、第２の焼結段階では、スート管はグラファイト製の支持リング部分で吊り下げられるようになり、その結果、ジャケット管に負荷が加わるようになり、これが更なる屈曲又は撓みをもたらし、ガラス化されるべき中空筒状体を変形させる。 In sintering for each region from top to bottom as described in EP-A-197575, the weight of the soot tube and the partially vitrified hollow cylinder is during the first sintering stage. Join the support base. As a result of further shrinkage of the soot tube in the length direction, in the second sintering stage, the soot tube is suspended by a support ring portion made of graphite, and as a result, a load is applied to the jacket tube, This leads to further bending or bending and deforms the hollow cylinder to be vitrified.
バナナ型又は波形の内部ボアを有する中空筒状体は、廃棄されるか又は手間の掛かる方法で仕上げ作業を行わなければならない。 Hollow cylinders with banana-shaped or corrugated internal bores must be finished in a way that is discarded or laborious.
従って、本発明の目的は、寸法の安定した内部ボアを有する石英ガラス製の中空筒状体の製造を容易し且つ材料の廃棄を減らすことができる方法を提供することにある。
更に、本発明の目的は、その方法を実施するための装置を提供することにある。
SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a method capable of facilitating the production of a quartz glass hollow cylindrical body having a dimensionally stable internal bore and reducing the material waste.
It is a further object of the present invention to provide an apparatus for performing the method.
この方法に関し、上記課題は、冒頭で述べた方法に基づく本発明に従い、支持要素の長手方向軸に沿って順々に配置される複数のスリーブ状成形要素部品から構成されるスリーブ状成形要素であって、スリーブ状成形要素部品の少なくとも１つが支持要素の長手方向軸に対し横方向に動くスリーブ状成形要素を使用することによって解決される。 With respect to this method, the object is a sleeve-shaped molding element comprising a plurality of sleeve-shaped molding element parts arranged in sequence along the longitudinal axis of the support element according to the invention based on the method described at the outset. This is solved by using a sleeve-like molding element in which at least one of the sleeve-like molding element parts moves transversely to the longitudinal axis of the support element.
本発明による方法では、複数の部品から構成される成形要素が用いられる。この成形要素は、順々に配置され且つ機械的に相互に強固に接続されていない少なくとも２つの短い成形要素部品から構成される。この成形要素部品は、支持要素の長手方向軸と同軸上に配置されており、成形要素部品の少なくとも１つは、支持要素に対向して且つその長手方向軸に対して横方向に動く。このため、スート管が非対称的に焼結することによって成形要素部品に加わる力は、その後、可撓性を有する部分を撓ませるか又は傾斜させる力となる。従って、この可動性は、力の増加に対向して作用することとなり、結果として、特に強い横方向力及び曲げ力が成形要素部品、特に成形要素全体に加わらないようになる。そのため、強い横方向力及び曲げ力による変形が回避される。このように、成形要素が複数に分割されていること及び横方向に動くことは、横方向力及び曲げ力に対して補償的且つ緩衝的に作用する。 In the method according to the invention, a molding element composed of a plurality of parts is used. This forming element is composed of at least two short forming element parts which are arranged one after the other and are not mechanically firmly connected to one another. The molding element part is arranged coaxially with the longitudinal axis of the support element, and at least one of the molding element parts moves opposite the support element and transversely to its longitudinal axis. For this reason, the force applied to the molded element part by asymmetrical sintering of the soot tube is then a force that bends or tilts the flexible portion. This mobility thus acts against an increase in force, so that particularly strong lateral and bending forces are not applied to the molded element parts, in particular the entire molded element. Therefore, deformation due to strong lateral force and bending force is avoided. In this way, the fact that the forming element is divided into a plurality of parts and moves laterally acts in a compensating and buffering manner against the lateral and bending forces.
更には、少なくとも１つの可動性の成形要素部品に作用する横方向力は、（成形要素の全長に比べ）その長さが短いこと及びひいてはてこ力が小さくなることにより、曲げ要素を比較的小さくするので、結果として、それに伴う成形要素部品の変形又は撓みも小さくなる。 Furthermore, the lateral force acting on the at least one movable forming element part is relatively small (relative to the total length of the forming element) and, as a result, the lever force is reduced, thereby making the bending element relatively small. Therefore, as a result, the deformation or deflection of the molded element part is reduced.
可撓性を有する成形要素部品は力を受けて撓むものの、それでも力が成形要素の全長に作用しないだけでなく、成形要素部品の長さにも影響しないため、撓みの振幅も小さくなる。本発明による方法では、大きな振幅を伴う成形要素全体の変形又は撓みに代わって、複数の小さな撓みが起こる。しかし、それらが中空筒状体の内部ボアの品質及び寸法規格へ与える影響はより小さいので、機械的な後加工によって簡単に取り除くことができる。 Although the flexible molded element part is deflected by receiving a force, not only the force does not act on the entire length of the molded element, but also the length of the molded element part is not affected. In the method according to the invention, several small deflections take place instead of deformation or deflection of the entire forming element with a large amplitude. However, they have less influence on the quality and dimensional standards of the hollow bore internal bore and can be easily removed by mechanical post-processing.
支持要素の長手方向軸に対して横方向に動くには、成形要素と支持要素との間に隙間の存在が不可欠である。この隙間の存在により、可動性の部品に作用する横方向力又は曲げモーメントが支持要素に直接作用しないので、支持要素の変形は起こらない。 In order to move transversely to the longitudinal axis of the support element, it is essential that there is a gap between the molding element and the support element. Due to the presence of this gap, no lateral force or bending moment acting on the movable part acts directly on the support element, so that no deformation of the support element takes place.
可動性の成形要素部品の少なくとも１つが横方向に動くことは、好ましくは、支持要素の長手方向軸に対して傾いて又は側方に移動可能なことによる。 The lateral movement of at least one of the movable shaping element parts is preferably due to being tiltable or laterally movable with respect to the longitudinal axis of the support element.
この移動能力は個別に又は組み合わせて存在する。例えば、支持要素の長手方向軸の周囲の回転方向又は支持要素の長手方向軸方向の移動といった他の移動能力を更に加えることもできる。スート管の焼結によって力が可動性部品に作用すると、そのつど成形要素部品が直ちに移動又は傾斜できることが重要である。この可動性は、面の幾何学、例えば丸みの付いた角又は成形要素部品間の溝の形状によっても影響を受ける。しかし、成形要素部品は、一緒に平らな表面を有するか又は相互に平らな表面を有する（flachen Stirnseiten aneinander oder aufeinander）ことが好ましい。 This movement ability exists individually or in combination. Other movement capabilities may also be added, such as, for example, rotational movement around the longitudinal axis of the support element or movement of the support element in the longitudinal axis direction. It is important that the molded element part can be moved or tilted immediately each time force is applied to the movable part by sintering the soot tube. This mobility is also affected by the geometry of the surface, eg rounded corners or the shape of the grooves between the molded element parts. However, it is preferred that the molded element parts have flat surfaces together or have mutually flat surfaces (flachen Stirnseiten aneinander oder aufeinander).
複数の可動性のスリーブ状成形要素部品から構成されるスリーブ状成形要素を使用する場合、スリーブ状成形要素部品それぞれの長さはスリーブ状成形要素の合計長の１／３より短い、好ましくは１／５より短い、特に好ましくは１／１０より短いことが特に有利であることが分かっている。 When using a sleeve-shaped molding element composed of a plurality of movable sleeve-shaped molding element parts, the length of each of the sleeve-shaped molding element parts is shorter than 1/3 of the total length of the sleeve-shaped molding elements, preferably 1 It has been found to be particularly advantageous that it is shorter than / 5, particularly preferably shorter than 1/10.
個々の可動性の成形要素部品が短いほど、スート体の収縮によって生ずるてこ力及び撓みも小さくなる。一方で可動性の成形要素部品の数が増えると、成形要素製造の構成上のコストも増加するため、成形要素部品それぞれが成形要素の全長の３％よりも短い長さを有することは好ましくない。 The shorter the individual moveable molded element parts, the less leverage and deflection caused by soot body contraction. On the other hand, as the number of movable molded element parts increases, the cost of construction of the molded element also increases, so it is not preferable that each molded element part has a length shorter than 3% of the total length of the molded element. .
これに加えて、複数の可動性のスリーブ状成形要素部品から構成される成形要素を使用する場合には、スリーブ状成形要素部品それぞれの長さがその外径の０．２倍〜１５倍の範囲内、好ましくはその外径の４倍〜７倍の範囲内にあると特に有利であることが証明されている。 In addition, when using a molding element composed of a plurality of movable sleeve-shaped molding element parts, the length of each sleeve-shaped molding element part is 0.2 to 15 times its outer diameter. It has proven particularly advantageous to be in the range, preferably in the range from 4 to 7 times its outer diameter.
可動性の成形要素部品の長さ／外径の比が小さいほど、横方向力が加わった時のてこ力及び撓みも小さくなる。しかしながら、長さ／外径の比が４より小さい場合、特には０．２より小さい場合は、顕著なてこ力の低下は生じなくなる。 The smaller the length / outer diameter ratio of the movable molded element part, the smaller the leverage and deflection when a lateral force is applied. However, when the ratio of length / outer diameter is smaller than 4, particularly smaller than 0.2, no significant lever force reduction occurs.
成形要素部品が自由に動くことができることによる強い横方向力及び曲げ力の補償及び緩衝化は、容積が大きく且つ壁の厚い、重量のあるスート管の場合に特に有益である。 Compensation and buffering of strong lateral and bending forces by allowing the molded element parts to move freely is particularly beneficial in the case of heavy soot tubes with large volumes and thick walls.
これに関連して、複数の可動性のスリーブ状成形要素部品から構成される成形要素を使用する場合、スリーブ状成形要素部品の長さＬTは次式に基づいてＳｉＯ2スート管の重量Ｇに応じて決定されることが示されている：
ＬT［ｍｍ］＝１．２×Ｇ［ｋｇ］±０．３Ｇ［ｋｇ］
In this regard, when using the molding element comprising a plurality of movable sleeve-shaped molded component parts, the length L T of the sleeve-like shaping element part weight G of the SiO 2 soot tube according to the following equation Has been shown to be determined by:
L T [mm] = 1.2 × G [kg] ± 0.3 G [kg]
更には、支持装置を使用する際、支持要素と成形要素部品との間に隙間がある場合は、その隙間幅は０．１ｍｍ〜２ｍｍの範囲とすると有利であることが示されている。 Furthermore, it has been shown that when using a support device, if there is a gap between the support element and the molded element part, the gap width is advantageously in the range of 0.1 mm to 2 mm.
支持要素と成形要素との間の隙間によって、成形要素部品は傾いたり、横方向へ滑ったり及び変形することができるようになる。隙間幅が０．１ｍｍより小さい場合には、成形要素部品の自由な移動は減少し、それに応じて横方向力及び曲げ力に対する効果もごくわずかなものとなる。隙間幅が２ｍｍより大きくなると、この大きな隙間幅は支持要素の外径又は成形要素部品の壁の厚さに負荷をもたらすことになり、支持装置の機械的安定性に悪影響を及ぼす。 The gap between the support element and the molding element allows the molding element part to tilt, slide sideways and deform. If the gap width is smaller than 0.1 mm, the free movement of the molded element part is reduced and the effect on the lateral and bending forces is negligible accordingly. If the gap width is greater than 2 mm, this large gap width will cause a load on the outer diameter of the support element or the wall thickness of the molded element part, which adversely affects the mechanical stability of the support device.
成形要素部品は、等しい長さか又は予想される負荷に応じた長さを有し、例えば曲げ負荷の大きい場所では長さを短くしてもよい。 The molded element parts have equal lengths or lengths depending on the anticipated load, for example, the length may be shortened where the bending load is high.
更には、成形要素部品は、全体又は一部がグラファイト、ＣＦＣ又はＳｉＣから成ると有利であることが分かっている。 Furthermore, it has been found advantageous that the molded element part, in whole or in part, consists of graphite, CFC or SiC.
グラファイト製、ＣＦＣ製又はＳｉＣ製の管は、高い純度と様々な多孔性を有しており、それらから対応する成形要素部品を容易に製造することができる。対応する材料からは、わずかな製造コストで成形要素部品を作ることができる。成形要素部品へのコーティングは、例えば密閉（Versiegelung）又は機械的補強のために施すことができる。 Graphite, CFC or SiC tubes have high purity and various porosity, from which the corresponding molded element parts can be easily manufactured. Molded element parts can be made from the corresponding material at a low manufacturing cost. The coating on the molded element part can be applied, for example, for sealing (Versiegelung) or mechanical reinforcement.
スート管を、その一端から焼結するために、炉内に備えられる環状の加熱ゾーンの中に連続的に送り込んで、その中で領域ごとに焼結する方法が好ましい。この方法では、加熱ゾーンが支持要素の長手方向軸方向に長さＬHを有しており、複数の可動性のスリーブ状成形要素部品から構成される成形要素を使用する場合には、その長さＬTは次式に基づいて長さＬHに応じて決定される：
１／４ＬH≦ＬT≦ＬH、好ましくは
ＬT≦１／２ＬH
In order to sinter the soot tube from one end thereof, a method in which the soot tube is continuously fed into an annular heating zone provided in the furnace and sintered in each region is preferable. In this method, the heating zone has a length L H in the longitudinal axis direction of the support element, and when using a molding element composed of a plurality of movable sleeve-shaped molding element parts, the length The length L T is determined according to the length L H based on the following formula:
1 / 4L H ≦ L T ≦ L H , preferably L T ≦ 1 / 2L H
本発明による方法は、特にスート管の領域ごとの焼結に有用である。領域ごとの焼結では、収縮するガラスによりその表面がまずゆっくりと気密的に閉鎖していくことから、スート管からのガスの拡散が容易である。その上、溶融面を軸方向に一定の速度で前進させることで、ガラス化していない領域が炉内に入るのを防いでいる。しかしながら、領域ごとの焼結では石英ガラスの収縮が非対称的に起こりやすく、そのために成形要素及び支持要素に曲げ力及び横方向力が加わる恐れがあるという欠点がある。この欠点は、可動性の成形要素部品により補償されるが、この場合、成形要素部品の長さを加熱ゾーンの長さに応じて調整した時に最適な効果が得られる。成形要素部品の長さが加熱ゾーンの長さの１／４より短い場合、成形要素全体の製造にかかる構成上のコストは比較的高くなる一方で、加熱要素の長さを超える長さの成形要素部品については、横方向力及び曲げ力の補償及び緩衝に関する作用は小さくなる。好ましくは、可動性の成形要素部品の長さは加熱要素の長さの１／４〜１／２の範囲内にある。 The method according to the invention is particularly useful for the sintering of soot tube regions. In the sintering for each region, the surface is first slowly and airtightly closed by the shrinking glass, so that gas diffusion from the soot tube is easy. In addition, the molten surface is advanced at a constant speed in the axial direction to prevent the non-vitrified region from entering the furnace. However, the sintering of each region has the disadvantage that the quartz glass tends to shrink asymmetrically, which can cause bending and lateral forces on the forming and supporting elements. This drawback is compensated for by the movable molding element part, in which case the optimum effect is obtained when the length of the molding element part is adjusted according to the length of the heating zone. When the length of the molded element part is shorter than ¼ of the length of the heating zone, the construction cost for manufacturing the entire molded element is relatively high, while the length of the molded element exceeds the length of the heating element. For component parts, the effect on the compensation and damping of lateral and bending forces is reduced. Preferably, the length of the movable molded element part is in the range of 1/4 to 1/2 of the length of the heating element.
領域ごとの焼結に代わる方法として、ＳｉＯ2スート管の長さにわたる広範囲で均一な温度場を作り出すことによって、ＳｉＯ2スート管の焼結を等温加熱で実施する方法も有効である。 As an alternative to sintering each region by creating a wide, uniform temperature field over the length of the SiO 2 soot tube method of performing sintering of the SiO 2 soot tube under isothermal heating is also effective.
この場合は、ガラス化面（Verglasungsfront）は、スート管の全長にわたって、外側から内側に向かって進行する。このようにすることで、領域ごとの焼結時に比べて焼結工程を短くできる。しかし、一般的に、スート管が成形要素に対して半径方向について一様には収縮せず、その結果、この方法においても横方向力及び曲げ力が生じるが、これらは有利には、本発明による可動性の成形要素部品によって吸収できることが示されている。 In this case, the vitrification surface (Verglasungsfront) advances from the outside to the inside over the entire length of the soot tube. By doing in this way, a sintering process can be shortened compared with the time of sintering for every area | region. In general, however, the soot tube does not shrink uniformly in the radial direction with respect to the forming element, and as a result, lateral and bending forces are also produced in this way, which are advantageously the present invention. It is shown that it can be absorbed by a mobile molded element part.
この装置に関しては、上記課題は、冒頭で述べた装置に基づく本発明に従い、支持要素の長手方向軸に沿って順々に配置される複数のスリーブ状成形要素部品から構成されるスリーブ状成形要素であって、スリーブ状成形要素部品の少なくとも１つが支持要素の長手方向軸に対し横方向に動くスリーブ状成形要素によって解決される。 With regard to this device, the object is according to the invention based on the device described at the outset, in which a sleeve-shaped molding element comprising a plurality of sleeve-shaped molding element parts arranged one after the other along the longitudinal axis of the support element Wherein at least one of the sleeve-shaped molding element parts is solved by a sleeve-shaped molding element which moves transversely to the longitudinal axis of the support element.
本発明による装置では、成形要素は、順々に配置され機械的に相互に強固に接続されていない複数の短い成形要素部品から構成される。この成形要素部品は、支持要素の長手方向軸に対し同軸に配置されており、成形要素部品の少なくとも１つは、支持要素に対向して且つその長手方向軸に対して横方向に動く。このため、スート管が非対称的に焼結することによって成形要素部品に加わる力は、その後、可撓性を有する部分を撓ませるか又は傾斜させる力となる。従って、この可動性は、力の増加に対向して作用することとなり、結果として、特に強い横方向力及び曲げ力が成形要素部品、特に成形要素全体に加わらないようになる。そのため、強い横方向力及び曲げ力による変形が回避される。このように、成形要素が複数に分割されていること及び横方向に動くことは、横方向力及び曲げ力に対して補償的且つ緩衝的に作用する。 In the device according to the invention, the molding element is composed of a plurality of short molding element parts which are arranged one after the other and are not mechanically firmly connected to one another. The forming element part is arranged coaxially with respect to the longitudinal axis of the support element, at least one of the forming element parts being moved opposite the support element and transverse to the longitudinal axis. For this reason, the force applied to the molded element part by asymmetrical sintering of the soot tube is then a force that bends or tilts the flexible portion. This mobility thus acts against an increase in force, so that particularly strong lateral and bending forces are not applied to the molded element parts, in particular the entire molded element. Therefore, deformation due to strong lateral force and bending force is avoided. In this way, the fact that the forming element is divided into a plurality of parts and moves laterally acts in a compensating and buffering manner against the lateral and bending forces.
更には、少なくとも１つの可動性の成形要素部品に作用する横方向力は、（成形要素の全長に比べ）その長さが短いこと及びひいてはてこ力が小さくなることにより、曲げ要素を比較的小さくするので、その結果として、それに伴う成形要素部品の変形又は撓みも小さくなる。 Furthermore, the lateral force acting on the at least one movable forming element part is relatively small (relative to the total length of the forming element) and, as a result, the lever force is reduced, thereby making the bending element relatively small. Therefore, as a result, the deformation or deflection of the molded element part is reduced.
可撓性を有する成形要素部品は力を受けて撓むものの、それでも力が成形要素の全長に作用しないだけでなく、成形要素部品の長さにも影響しないため、撓みの振幅も小さくなる。本発明による装置を用いた場合は、大きな振幅を伴う成形要素全体の変形又は撓みに代わって、複数の小さな撓みが起こる。しかし、それらが中空筒状体の内部ボアの品質及び寸法規格へ与える影響はより小さいので、機械的な後加工によって簡単に取り除くことができる。 Although the flexible molded element part is deflected by receiving a force, not only the force does not act on the entire length of the molded element, but also the length of the molded element part is not affected. With the device according to the invention, several small deflections occur instead of deformation or deflection of the entire forming element with a large amplitude. However, they have less influence on the quality and dimensional standards of the hollow bore internal bore and can be easily removed by mechanical post-processing.
支持要素の長手方向軸に向かって横方向に動くには、成形要素と支持要素との間に隙間の存在が不可欠である。この間隙の存在により、可動性の部品に作用する横方向力又は曲げモーメントが支持要素に直接作用しないので、支持要素の変形は起こらない。 In order to move laterally towards the longitudinal axis of the support element, the presence of a gap between the forming element and the support element is essential. Due to the presence of this gap, no deformation of the support element takes place, since no lateral force or bending moment acting on the movable part acts directly on the support element.
本発明による装置の好ましい実施の形態は従属請求項から明らかになる。従属請求項に記載されている装置の実施の形態を本発明による方法に関する従属請求項に従って実施する限りにおいて、対応する方法の請求項は上記の実施の形態にとって完全な説明を教示している。 Preferred embodiments of the device according to the invention emerge from the dependent claims. Insofar as the embodiments of the apparatus described in the dependent claims are carried out in accordance with the dependent claims relating to the method according to the invention, the corresponding method claims teach the complete description of the above embodiments.
以下、本発明を実施例及び図面に基づいて詳細に説明する。
図１は、ガラス化炉（２）において焼結時に支持装置によって支持される多孔性のＳｉＯ2スート管（１）を示す断面模式図である。
Hereinafter, the present invention will be described in detail based on examples and drawings.
FIG. 1 is a schematic cross-sectional view showing a porous SiO 2 soot tube (1) supported by a supporting device during sintering in a vitrification furnace (2).
ＳｉＯ2スート管（１）は、長さが３．５ｍ、外径が４００ｍｍ、内径４３ｍｍの内部ボアを（７）有し、重量は約２４０ｋｇである。 The SiO 2 soot tube (1) has an internal bore (7) having a length of 3.5 m, an outer diameter of 400 mm and an inner diameter of 43 mm, and has a weight of about 240 kg.
支持装置は、支持棒（５）、複数のスリーブ（４）から構成されているジャケット管（３）、支持リング（６）及び支持台（１０）を具備している。 The support device includes a support rod (5), a jacket tube (3) composed of a plurality of sleeves (4), a support ring (6), and a support base (10).
支持棒（５）は、ＣＦＣ製であり、ＳｉＯ2スート管（１）の内部ボア（７）中に伸びている。支持棒（５）は、本実施例では一体的に形成されているが、例えば先端がネジによって相互に接続される複数の棒から構成されてもよい。支持棒（５）は、３１ｍｍの外径を有しており、ジャケット管（３）により囲まれている。 The support rod (5) is made of CFC and extends into the internal bore (7) of the SiO 2 soot tube (1). The support bar (5) is integrally formed in the present embodiment, but may be composed of, for example, a plurality of bars whose ends are connected to each other by screws. The support bar (5) has an outer diameter of 31 mm and is surrounded by the jacket tube (3).
ジャケット管（３）は、接続されずに互いに積み重ねられている複数の短いグラファイト製スリーブ（４）（本実施例では１０個のスリーブ（４）がある）から構成される。スリーブ（４）は、それぞれが４１ｍｍの外径、４．５ｍｍの壁厚及び２００ｍｍの長さを有している。 The jacket tube (3) is composed of a plurality of short graphite sleeves (4) (in this embodiment, there are 10 sleeves (4)) that are stacked without being connected. The sleeves (4) each have an outer diameter of 41 mm, a wall thickness of 4.5 mm and a length of 200 mm.
その結果、ＳｉＯ2スート管（１）の内壁とジャケット管（３）との間には平均隙間幅１ｍｍの環状の隙間（９）が残り、またジャケット管（３）と支持棒（５）との間には平均隙間幅０．５ｍｍの環状の隙間（８）が残る。スリーブ（４）は、相互に接続されておらず、互いに対する摩擦もなく半径方向に自由に動くことができ、また環状の隙間（８）によってあらかじめ画定された範囲内で支持棒（５）の長手方向軸（１６）に対して傾斜することもできる。 As a result, an annular gap (9) having an average gap width of 1 mm remains between the inner wall of the SiO 2 soot pipe (1) and the jacket pipe (3), and the jacket pipe (3) and the support rod (5) An annular gap (8) with an average gap width of 0.5 mm remains in between. The sleeves (4) are not connected to each other, can move freely in the radial direction without friction against each other, and of the support rod (5) within a range predefined by the annular gap (8) It can also be inclined with respect to the longitudinal axis (16).
支持装置は、ＳｉＯ2スート管（１）の内部ボア（７）の上部にネジ止めされているネジ山（１１）付きグラファイト製支持リング（６）に加えて、焼結工程開始時にＳｉＯ2スート管（１）を垂直に固定する支持台（１０）を具備する。 Support apparatus, in addition to the internal bore thread (11) with the graphite support ring is screwed to the upper part (7) (6) of the SiO 2 soot tube (1), SiO 2 soot at the start sintering step A support base (10) for fixing the pipe (1) vertically is provided.
環状の加熱要素（１３）は、５０ｃｍの長さ（高さ）を有する。ＳｉＯ2スート管（１）は、加熱要素（１３）に沿って方向矢印（１２）が示す方向に動くことができる。 The annular heating element (13) has a length (height) of 50 cm. The SiO 2 soot tube (1) can move along the heating element (13) in the direction indicated by the directional arrow (12).
以下に、合成石英ガラスから中空筒状体を製造するための本発明による方法の実施例を、図１に示した装置を例にして詳しく説明する。 In the following, an embodiment of the method according to the invention for producing a hollow cylindrical body from synthetic quartz glass will be described in detail by taking the apparatus shown in FIG. 1 as an example.
ＳｉＣｌ4を火炎加水分解して、分離バーナーの火炎中でＳｉＯ2スート粒子を生成させ、これを長手方向軸の周囲を回転するＡｌ2Ｏ3製の担体棒の上に層状堆積させ、多孔性のＳｉＯ2スート体を形成する。担体棒は、平均直径約５０ｍｍの円錐型の外観を有する軽量の担体で、堆積工程終了後に取り除かれる。こうして得られたＳｉＯ2スート管（１）の密度は石英ガラスの密度の約２５％である。これを材料にして、以下に例示的に説明する方法に従って透明な石英ガラス管を製造する。 SiCl 4 is flame hydrolyzed to produce SiO 2 soot particles in the flame of the separation burner, which is layered on a support rod made of Al 2 O 3 that rotates around the longitudinal axis, and is porous The SiO 2 soot body is formed. The carrier rod is a lightweight carrier having a conical appearance with an average diameter of about 50 mm and is removed after the deposition process is completed. The density of the SiO 2 soot tube (1) thus obtained is about 25% of the density of quartz glass. Using this as a material, a transparent quartz glass tube is manufactured according to the method described below as an example.
グラファイト製の支持リング（６）が設けられたＳｉＯ2スート管（１）の内部ボア（７）の中に、支持棒（５）及びそれを取り囲むグラファイト製のスリーブ（４）を入れる。これらを備えたＳｉＯ2スート管（１）をガラス化炉（２）の中に運び込み、その中で支持装置（３、４、５、６、１０、１１）を使って垂直方向に支持する。 A support rod (5) and a graphite sleeve (4) surrounding it are placed in the internal bore (7) of the SiO 2 soot tube (1) provided with a graphite support ring (6). The SiO 2 soot tube (1) provided with these is carried into the vitrification furnace (2) and is supported in the vertical direction using the support devices (3, 4, 5, 6, 10, 11) therein.
ガラス化炉（２）の中では、ＳｉＯ2スート管（１）はその上端から始まって環状の加熱要素（１３）の間を通されることによって領域ごとに軟化及び焼結され、同時にＳｉＯ2スート管（１）はジャケット管（３）に対して連続的に収縮する。これに合わせてＳｉＯ2スート管（１）は、加熱要素（１３）に沿って下から上に向かって連続的に動く。 In the vitrification furnace (2), the SiO 2 soot tube (1) is softened and sintered in each region by passing between the annular heating elements (13) starting from its upper end, and simultaneously SiO 2 The soot tube (1) continuously contracts with respect to the jacket tube (3). Correspondingly, the SiO 2 soot tube (1) moves continuously from bottom to top along the heating element (13).
焼結工程は、ＳｉＯ2スート管（１）が支持台（１０）の上に立てて配置される第１焼結段階、及び冒頭で述べた欧州特許出願公開第０７０１９７５号に記載されているようにＳｉＯ2スート管（１）を支持リング（６）に吊り下げる第２焼結段階を含む。 The sintering process is as described in the first sintering stage in which the SiO 2 soot tube (1) is arranged upright on the support base (10), and in European Patent Application No. 0701975 mentioned at the beginning. A second sintering stage in which the SiO 2 soot tube (1) is suspended from the support ring (6).
焼結工程の第１段階だけでなく第２段階の間でも、スリーブ（４）と収縮したＳｉＯ2スート管（１）とが接触するようになる。ＳｉＯ2スート管（１）の容積及び長さが連続的に収縮することによって、強い横方向力及び曲げモーメントが１つになって支持装置、特にグラファイト製のスリーブ（４）に加わる。個々のスリーブ（４）は、半径方向に自由に運動できること及び長手方向軸（１６）に対して傾斜できることによって、それらに加わる力によって撓み、加わった力の大きさと方向に応じて動くことができる。しかし、これにより、加熱ゾーン外で支持装置の構成要素が固定又は変形することが防止されるか又は最小限に留められる。 The sleeve (4) and the shrunk SiO 2 soot tube (1) come into contact not only during the first stage of the sintering process but also during the second stage. The continuous shrinkage of the volume and length of the SiO 2 soot tube (1) brings together a strong lateral force and bending moment into the support device, in particular the graphite sleeve (4). The individual sleeves (4) can freely move in the radial direction and can be tilted with respect to the longitudinal axis (16), so that they can bend by the force applied to them and move according to the magnitude and direction of the applied force. . However, this prevents or minimizes the fixing or deformation of the components of the support device outside the heating zone.
個々のスリーブ（４）が負荷を除くように動くため、可動性のスリーブ（４）の数にほぼ一致する多数の小さな歪みが生じる。 As the individual sleeves (4) move out of the load, a large number of small strains are produced which roughly correspond to the number of movable sleeves (4).
その結果、図２に概略的に図示するように、焼結後に内径がある程度変動している内部ボア（７）を有する石英ガラス製の中空筒状体（２０）が得られる。 As a result, as shown schematically in FIG. 2, a quartz glass hollow cylindrical body (20) having an internal bore (7) whose inner diameter varies to some extent after sintering is obtained.
焼結工程が終了すると、支持棒（５）及びスリーブ（４）は取り除かれる。このようにして、長さ約２．５０ｍ、外径１５０ｍｍ、特に約４０ｍｍの小さな内径を特徴とし、高品質の内部ボア（７）を有する石英ガラス製の中空筒状体（２０）が得られる。焼結工程におけるスリーブ（４）の撓みにより生じた直径の小さな変動は数ミリメートルの範囲内であり、機械を用いた後処理によって比較的容易に取り除くことができる。内部ボアが全長にわたってバナナ型に曲がった場合、内部ボア（７）の最終的な直径を約４４ｍｍにすることはほとんど不可能である。 When the sintering process is finished, the support bar (5) and the sleeve (4) are removed. In this way, a hollow cylindrical body (20) made of quartz glass characterized by a small inner diameter of about 2.50 m in length and an outer diameter of 150 mm, in particular about 40 mm, and having a high quality internal bore (7) is obtained. . Small variations in diameter caused by the deflection of the sleeve (4) in the sintering process are in the range of a few millimeters and can be removed relatively easily by post-processing using a machine. If the inner bore is bent into a banana shape over its entire length, it is almost impossible to make the final diameter of the inner bore (7) about 44 mm.
スリーブ（４）の可動性により、支持装置全体にかかる負荷が軽減され、相応の大きさの撓みを伴って支持棒（５）又はジャケット管（３）全体が曲がることが防止される。このようにして中空筒状体（２０）が全長にわたって楕円形となること、又は壁厚が不均一になることが防止される。 Due to the mobility of the sleeve (4), the load on the entire support device is reduced and the support rod (5) or the entire jacket tube (3) is prevented from bending with a corresponding amount of deflection. In this way, it is possible to prevent the hollow cylindrical body (20) from becoming elliptical over the entire length or from having a nonuniform wall thickness.
１ ＳｉＯ2スート管、２ ガラス化炉、３ ジャケット管、４ スリーブ、５ 支持棒、６ 支持リング、７ 内部ボア、８，９ 環状の隙間、１０ 支持台、１１ ネジ山、１２ 方向矢印、１３ 加熱要素、１５ 炉内部、１６ 長手方向軸、２０ 中空筒状体。 1 SiO 2 soot tube, 2 vitrification furnace, 3 jacket tube, 4 sleeve, 5 support rod, 6 support ring, 7 internal bore, 8, 9 annular gap, 10 support base, 11 thread, 12 direction arrow, 13 Heating element, 15 furnace interior, 16 longitudinal axis, 20 hollow cylinder.
Claims (14)
スリーブ状成形要素部品（４）の少なくとも１つが、支持要素（５）の長手方向軸（１６）に対し横方向に動くこと、
焼結時、炉（２）内に設置され且つ支持要素（５）の長手方向軸（１６）の方向に長さＬHを有する環状の加熱ゾーン（１３）中にＳｉＯ2スート管（１）を一端から連続的に送り込むことによって領域ごとに焼結すること、
スリーブ状成形要素（３；４）として、複数の可動性のスリーブ状成形要素部品（４）から構成され且つそれぞれの長さＬTが次式：
１／４ＬH≦ＬT≦ＬH
に基づいて長さＬHに応じて決定されるものを使用すること、及び
支持要素（５）とスリーブ状成形要素部品（４）との間に、０．１ｍｍ〜２ｍｍの範囲の隙間幅を有する隙間（８）が設けられた支持装置（３、４、５、６、１０、１１）を使用すること
を特徴とする石英ガラスから中空筒状体を製造するための方法。 When sintering a SiO 2 soot tube (1) having an internal bore (7) in a furnace (2), a plurality of tubes arranged in sequence along the longitudinal axis (16) of the elongated support element (5) It is composed of a sleeve-shaped molding element part (4) and is surrounded by a sleeve-shaped molding element (3; 4) which is pushed by the SiO 2 soot tube (1) with the formation of the hollow cylindrical body (20) and SiO The SiO 2 soot tube (1) is supported by a support device (3, 4, 5, 6, 10, 11) comprising an elongated support element (5) protruding into the internal bore (7) of the 2 soot tube (1). A method for producing a hollow cylindrical body (20) from quartz glass,
At least one of the sleeve-shaped element parts (4) moves transversely to the longitudinal axis (16) of the support element (5);
During sintering, the SiO 2 soot tube (1) is placed in an annular heating zone (13) installed in the furnace (2) and having a length L H in the direction of the longitudinal axis (16) of the support element (5). Sintering for each region by continuously feeding from one end,
The sleeve-shaped molding element (3; 4) is composed of a plurality of movable sleeve-shaped molding element parts (4), and each length LT is represented by the following formula:
1 / 4L H ≦ L T ≦ L H
The use of what is determined in accordance with the length L H based on, and support elements (5) between the sleeve-like molded component parts (4), the gap width in the range of 0.1mm~2mm A method for producing a hollow cylindrical body from quartz glass, characterized in that it uses a supporting device (3, 4, 5, 6, 10, 11) provided with a gap (8).
ＬT［ｍｍ］＝１．２×Ｇ［ｋｇ］±０．３Ｇ［ｋｇ］
に基づいて前記ＳｉＯ2スート管（１）の重量Ｇに応じて決定されるものを使用することを特徴とする請求項１〜４のいずれか一項に記載の石英ガラスから中空筒状体を製造するための方法。 The sleeve-shaped molding element (3; 4) is composed of a plurality of movable sleeve-shaped molding element parts (4), and each length LT is represented by the following formula:
L T [mm] = 1.2 × G [kg] ± 0.3 G [kg]
The hollow cylindrical body is made of quartz glass according to any one of claims 1 to 4, characterized in that the one determined according to the weight G of the SiO 2 soot tube (1) is used. Method for manufacturing.
ＬT≦１／２ＬH
に基づいて長さＬHに応じて決定されるものを使用することを特徴とする請求項１〜６のいずれか一項に記載の石英ガラスから中空筒状体を製造するための方法。 The sleeve-shaped molding element (3; 4) is composed of a plurality of movable sleeve-shaped molding element parts (4), and each length LT is represented by the following formula:
L T ≦ 1 / 2L H
The method for producing a hollow tubular body of silica glass according to any one of claims 1 to 6, wherein the use of what is determined in accordance with the length L H based on.
スリーブ状成形要素部品（４）の少なくとも１つが、支持要素（５）の長手方向軸（１６）に対し横方向に動くこと、
加熱要素（１３）が、支持要素（５）の長手方向軸（１６）の方向に長さＬHを有すること、
スリーブ状成形要素（３；４）は、複数の可動性のスリーブ状成形要素部品（４）から構成され且つそれぞれの長さＬTが次式：
１／４ＬH≦ＬT≦ＬH
に基づいて長さＬHに応じて決定されるものであること、及び
支持要素（５）とスリーブ状成形要素部品（４）との間に、０．１ｍｍ〜２ｍｍの範囲の隙間幅を有する隙間（８）が設けられていることを特徴とする装置。 In a furnace (2) for sintering a porous soot tube (1) having an internal bore (7), a heating element (13) for heating the soot tube (1), and in the furnace (2) Support devices (3, 4, 5, 6, 10, 11) for supporting the soot tube (1), which are arranged in sequence along the longitudinal axis (16) of the elongated support element (5). And is surrounded by a sleeve-shaped molding element (3; 4) which is composed of a plurality of sleeve-shaped molding element parts (4) and is pushed by the soot tube (1) as the hollow cylindrical body (20) is formed. supporting device comprising an internal bore elongate support element that protrudes (7) (5) of the soot tube (1) (3,4,5,6,10,11) and any one of claims 1-7 comprising An apparatus for carrying out the method according to claim
At least one of the sleeve-shaped element parts (4) moves transversely to the longitudinal axis (16) of the support element (5);
The heating element (13) has a length L H in the direction of the longitudinal axis (16) of the support element (5);
The sleeve-shaped forming element (3; 4) is composed of a plurality of movable sleeve-shaped forming element parts (4) and each length LT is given by:
1 / 4L H ≦ L T ≦ L H
It is to be determined according to the length L H based on, and between the support element (5) and the sleeve-like molded component parts (4), a gap width in the range of 0.1mm~2mm A device characterized in that a gap (8) is provided.
ＬT［ｍｍ］＝１．２×Ｇ［ｋｇ］±０．３Ｇ［ｋｇ］
に基づいて前記スート管（１）の重量Ｇに応じて決定されるものであることを特徴とする請求項８〜１１のいずれか一項に記載の装置。 The sleeve-shaped forming element (3; 4) is composed of a plurality of movable sleeve-shaped forming element parts (4) and each length LT is represented by the following formula:
L T [mm] = 1.2 × G [kg] ± 0.3 G [kg]
12. The device according to claim 8, wherein the device is determined according to the weight G of the soot tube (1) based on
ＬT≦１／２ＬH
に基づいて長さＬHに応じて決定されるものであることを特徴とする請求項８〜１３のいずれか一項に記載の装置。 The sleeve-shaped forming element (3; 4) is composed of a plurality of movable sleeve-shaped forming element parts (4) and each length LT is represented by the following formula:
L T ≦ 1 / 2L H
The apparatus according to claim 8, wherein the apparatus is determined according to the length L H on the basis of the length L H.
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| DE102006046620.9 | 2006-09-29 | ||
| DE102006048024A DE102006048024B4 (en) | 2006-09-29 | 2006-10-09 | Method for producing a hollow cylinder made of quartz glass and apparatus suitable for carrying out the method |
| DE102006048024.4 | 2006-10-09 |
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