JP5351074B2 - Sample holder and scanning transmission electron microscope - Google Patents

Description

  The present invention relates to a sample holder having an XYZ driving mechanism for driving a sample mounting portion on which a sample is mounted in the XYZ axial directions by a piezo element, and a scanning transmission electron microscope having the sample holder.

  In scanning transmission electron microscopes, high-resolution observation is possible by scanning the sample placed on the sample holder in the X, Y, and Z axis directions using a piezo element instead of scanning the electron beam. (See Patent Document 1).

JP 2008-270056 A

  However, since the sample holder used in the scanning transmission electron microscope cannot be tilted around the axis in the direction orthogonal to the optical axis of the electron beam, the confocal dark field STEM image with the sample tilted, There is a problem that 3D tomographic images cannot be obtained.

  The present invention has been made in view of the above problems, and its task is to provide a sample holder and a scanning transmission electron microscope capable of obtaining a confocal dark field STEM image, a three-dimensional tomographic image in a state where the sample is inclined. There is to do.

The invention according to claim 1, which solves the above problem, is a sample holder having an XYZ driving mechanism for driving a sample mounting portion on which a sample is mounted in the XYZ axial directions by a piezo element. When the X axis, the optical axis direction of the electron beam is the Z axis, and the X axis, and the direction perpendicular to the Z axis is the Y axis, the sample placement section is provided with the sample on the sample placement section. A tilt mechanism that tilts about an axis, a motor that drives the tilt mechanism, an output shaft of the motor, and the tilt mechanism, and the movement of the XYZ drive mechanism moves through the tilt mechanism to the motor. And the XYZ drive mechanism is connected to the sample mounting unit and drives the sample mounting unit in the X-axis direction by a contraction operation by applying a driving voltage. , The sample placement portion by a swinging action by applying a drive voltage A tube piezo element that drives in the Y-axis and Z-axis directions, the output shaft of the motor is arranged in a cylinder of the tube piezo element, and the tilt mechanism is configured to place the sample on the Y-axis. A sample tilting table that is rotatable about the XZ plane, a first arm that is rotatably provided on the XZ plane and connected to the sample tilting table on the XZ plane, and is different from the first arm on the XZ plane A bell crank having a second arm extending in a direction, a rotation end of the sample tilting table, a pin provided on one of the first arms of the bell crank, and a rotation end of the sample tilting table , Provided on the other one of the first arms of the bell crank, and driven to rotate around the X-axis by the motor and the slot into which the pin fits, and the end surface on the YZ plane side becomes an inclined surface Slope cam, second arm of the bell crank And a drive unit comprising urging means that presses the cam against the cam surface of the inclined cam, and the clutch is one of an output shaft of the motor and an input shaft provided on the inclined cam of the inclined mechanism. A slit formed on the end surface of the shaft of the motor, an output shaft on the motor side, and an input shaft provided on the tilt cam of the tilt mechanism. It is a sample holder characterized by comprising a connecting portion that fits with play in the direction .

When the piezo element of the XYZ drive mechanism is driven to scan the sample in the X, Y, and Z axis directions, the clutch is disengaged to block the movement of the XYZ drive mechanism from being transmitted to the motor.
When tilting the sample using the tilt mechanism, the clutch is connected to transmit the power of the motor to the tilt mechanism.

According to a second aspect of the present invention, there is provided a sample holder having an XYZ driving mechanism for driving a sample mounting portion on which a sample is mounted in a XYZ axial direction by a piezo element, wherein the axial direction of the sample holder is an X axis, an electron beam When the optical axis direction is the Z axis, the X axis, and the direction perpendicular to the Z axis is the Y axis, the sample is placed on the sample mounting section, and the sample on the sample mounting section is tilted around the Y axis An inclination mechanism, a motor for driving the inclination mechanism, an output shaft of the motor and the inclination mechanism, and the movement of the XYZ drive mechanism is transmitted to the motor via the inclination mechanism. The XYZ drive mechanism is connected to the sample placement unit, and drives the sample placement unit in the X-axis direction by a contraction operation by applying a drive voltage to apply the drive voltage. The sample placement part is driven in the Y-axis and Z-axis directions by the swing action of And the output shaft of the motor is disposed in a cylinder of the tube piezo element, and the tilt mechanism is provided so as to be rotatable about the Y axis on which the sample is placed. A sample tilting table, a first arm rotatably provided on the XZ plane, connected to the sample tilting table on the XZ plane, and a second arm extending in a different direction from the first arm on the XZ plane. A bell crank, a rotation end of the sample tilting table, a pin provided on one of the first arms of the bell crank, a rotation end of the sample tilting table, and a first arm of the bell crank Provided on the other of them, a screw hole is formed on the outer peripheral surface of the long hole into which the pin fits, a screw member that is driven to rotate around the X axis by the motor, and a female screw is formed on the inner peripheral surface The screw member is screwed, A nut member that is prohibited from rolling, and a drive unit that includes a biasing means that presses the second arm of the bell crank against the end surface of the screw member, and the clutch includes an output shaft of the motor and an inclination of the inclination mechanism A slot formed on an end surface of one of the input shafts provided on the cam, an output shaft on the motor side, and the other of the input shafts provided on the tilt cam of the tilt mechanism. A sample holder comprising a connecting portion formed on a shaft and fitted with play in the circumferential direction with respect to the slit groove .

The invention according to claim 3 is a scanning transmission electron microscope comprising the sample holder according to claim 1 or 2 .

According to the first to third aspects of the invention, the tilt mechanism that tilts the sample of the sample mounting portion around the Y axis, the motor that drives the tilt mechanism, and the movement of the XYZ drive mechanism is the tilt. By having a clutch that cuts off transmission to the motor via a mechanism, by disengaging the clutch and blocking transmission of movement of the XYZ drive mechanism to the motor via the tilt mechanism, The sample can be scanned in the X, Y, and Z axis directions by driving the piezo element of the XYZ drive mechanism.

  Further, the sample can be tilted using the tilt mechanism by connecting the clutch and transmitting the power of the motor to the tilt mechanism. Therefore, a confocal dark field STEM image and a three-dimensional tomographic image can be obtained with the sample tilted.

The tilt mechanism is provided with a sample tilt table on which the sample is mounted and is rotatable about the Y axis, and is rotatably provided on the XZ plane, and is connected to the sample mount on the XZ plane. The first arm, the bell crank having a second arm extending in a different direction from the first arm on the XZ plane, the rotating end of the sample tilting table, or the first arm of the bell crank Meanwhile a pin provided on the specimen rotation stage of the rotating end portion, provided on the other of the first arm of the bell crank, by having a long hole in which the pin is fitted, the bell crank By setting the length of one arm long, fine adjustment of the tilt angle of the tilt mechanism is facilitated. Conversely, by setting the first arm length of the bell crank to be short, the tilt speed of the tilt mechanism can be increased and the sample can be tilted in a short time.

According to the first and third aspects of the invention, the tilting mechanism is provided so as to be rotatable on the XZ plane, and a sample tilting table on which the sample is placed and rotatably provided about the Y axis. A bell crank having a first arm connected to the sample tilting table on the XZ plane, a second arm extending in a direction different from the first arm on the XZ plane, and the X axis by the motor. And an inclined cam whose end surface on the YZ plane side is an inclined surface, and a drive unit comprising a biasing means that presses the second arm of the bell crank against the cam surface of the inclined cam. Operation of a tilting mechanism can be obtained.

According to the inventions according to claim 2 and claim 3 , the tilt mechanism is provided so as to be rotatable on the XZ plane, and a sample tilting table on which the sample is placed and rotatably provided around the Y axis. A bell crank having a first arm connected to the sample tilting table on the XZ plane, a second crank extending in a direction different from the first arm on the XZ plane, and a screw formed on the outer peripheral surface. A screw member that is driven to rotate about the X-axis by the motor, a female screw is formed on the inner peripheral surface, the screw member is screwed together, and the rotation is prohibited; the second arm of the bell crank By comprising the drive part which consists of a biasing means which presses against the end surface of the said screw member, the action | operation of a smooth inclination mechanism can be obtained.

According to the first to third aspects of the present invention, the clutch is formed on the end surface of one of the output shaft of the motor and the input shaft provided on the tilt cam of the tilt mechanism. A connection formed on the other side of the slit, the output shaft on the motor side, and the input shaft provided on the tilt cam of the tilt mechanism , and fitted with play in the circumferential direction with respect to the slot By using the motor, the clutch can be driven, that is, the clutch can be connected or disconnected using the motor that drives the tilt mechanism.

FIG. 4 is an enlarged view of a portion B in FIG. 3, which is a perspective view of the sample holder of the present embodiment. It is sectional drawing of FIG. It is a perspective view of the sample holder of this embodiment. It is sectional drawing seen from the A direction of FIG. It is a figure explaining the action | operation of an inclination mechanism. It is a C direction partial cross section arrow directional view of FIG. It is a perspective view explaining the clutch of FIG. It is a block diagram of the scanning transmission electron microscope of embodiment. It is a figure explaining the other form of the drive part which drives an inclination mechanism.

An embodiment of the present invention will be described with reference to FIGS.
(Scanning transmission electron microscope)
The configuration of the scanning transmission electron microscope of this embodiment will be described with reference to FIG. FIG. 8 is a configuration diagram of the scanning transmission electron microscope of the present embodiment. In the figure, the electron beam emitted from the electron gun 1 is focused by the converging lens 3 on the sample placed on the sample placing portion of the sample holder 5 so as to have a minimum probe diameter.

  The sample placed on the sample placement unit is scanned in the X-axis, Y-axis, and Z-axis directions by the XYZ drive mechanism 7 using a piezoelectric element. The electron beam transmitted through the sample is again focused on the stop 13 on the transmission electron detector 11 by the imaging lens 9.

In the present embodiment, as shown in the drawing, the axial direction of the sample holder 5 is the X axis, the optical axis direction of the electron beam is the Z axis direction, and the direction orthogonal to the X axis and the Y axis is the Y axis.
The electron beam focused on the diaphragm 13 on the transmission electron detector 11 is transmitted through only a part of the central portion by the diaphragm 13 and detected by the transmission electron detector 11.

  The sample is scanned in the direction parallel to the sample surface (XY axis direction) by the XYZ drive mechanism 7. A confocal dark field STEM image is obtained by reading the transmitted electron intensity at each XY point and outputting it as an image from the XY position information and the transmitted electron intensity by a computer.

Further, each time one image is acquired, the sample is moved to the Z axis by the XYZ drive mechanism 7, and a scanning image at each Z position is acquired to obtain a three-dimensional image.
(Overall configuration of sample holder)
The overall configuration of the sample holder 5 will be described with reference to FIGS. FIG. 3 is a perspective view of the sample holder of the present embodiment, and FIG. 4 is a cross-sectional view seen from the direction A in FIG. In these drawings, on one end side of the sample holder 5, a sample mounting unit 21 on which a sample is mounted, a tilting mechanism 23 that tilts the sample of the sample mounting unit 21 around the Y axis, An XYZ drive mechanism 24 for driving the sample on the sample mounting unit 21 in the X-axis direction, the Y-axis direction, and the Z-axis direction is provided. On the other end side of the sample holder 5, a motor 25 that drives the tilt mechanism 23 is provided.

Further, a clutch 27 is provided between the tilt mechanism 23 and the XYZ drive mechanism 24 to block the movement of the XYZ drive mechanism 24 from being transmitted to the motor 25 via the tilt mechanism 23.
(XYZ drive mechanism)
The XYZ drive mechanism 24 will be described with reference to FIGS. 1 is a perspective view of the sample holder of the present embodiment, and is an enlarged view of a portion B in FIG. 3, and FIG. 2 is a cross-sectional view of FIG.

  In these drawings, the sample mounting portion 21 is provided in a frame 31 having an opening 31a on the XY plane, and in the opening of the frame 31, and is provided so as to be rotatable about the Y axis with respect to the frame 31. And a sample tilting table 33 driven by a tilting mechanism to be described later.

  As shown in FIG. 2, a first piezo element attachment member 35 is attached to the base side of the frame body 31. In addition, a first piezo element mounting member 35 and a second piezo element mounting member 37 disposed with a gap in the X-axis direction are attached to the sample holder 5.

  Between the first piezo element attachment member 35 and the second piezo element attachment member 37, one end side is attached to the first piezo element attachment member 35, and the other end side is attached to the second piezo element attachment member 37. A cylindrical tube piezo element 39 extending in the axial direction is provided.

The tube piezo element 39 is configured to drive the sample mounting portion 21 in the X-axis direction via the first piezo element mounting member 35 by a contraction operation effect by applying a drive voltage. In addition, the sample placement unit 21 is driven in the Y-axis and Z-axis directions via the first piezo element mounting member 35 by a swinging action by applying a drive voltage.
(Tilt mechanism)
The tilt mechanism 23 will be described with reference to FIGS. 1, 2, 5, and 6. FIG. 5 is a diagram for explaining the operation of the tilting mechanism, and FIG. 6 is a partial cross-sectional view in the C direction of FIG.

In these drawings, a hole 33a whose diameter decreases as it goes downward is formed in the sample tilting table 33, and the sample is placed in the hole 33a.
As shown in FIG. 6, the sample tilting table 33 can be rotated around the Y axis by using a pin 32 attached to the frame 31. The pin 32 is provided so as to intersect the central axis of the hole 33a. An elongated hole 33 b is formed at the rotating end of the sample tilting table 33.

  As shown in FIGS. 2 and 5, the frame body 31 is provided with a bell crank 41 rotatably provided on the XZ plane using a pin 40. The bell crank 41 includes a first arm portion 41a extending toward the sample mounting portion 21 and a second arm portion 41b extending in a different direction from the first arm portion 41a on the XZ plane.

  The first arm portion 41 a of the bell crank 41 is provided with a pin 43 that fits into the elongated hole 33 b of the sample tilting table 33. Therefore, when the bell crank 41 is rotated by a drive unit described later, the sample tilting table 33 tilts in the vertical direction around the pin 32.

As shown in FIG. 2, holes 35 a and 37 a extending in the X-axis direction are formed at the center of the first piezo element attachment member 35 and the second piezo element attachment member 37.
Here, the drive part which rotationally drives the bell crank 41 of an inclination mechanism is demonstrated. A hole 31 b is formed in the frame 31 so as to face the hole 35 a of the first piezo element attachment member 35. A cam member 51 is provided in the hole 35a of the first piezoelectric element mounting member 35 so as to be rotatable about the X axis. The cam member 51 is rotatably connected to the hole 35a of the first piezo element mounting member 35, and is connected to the fitting part 51a. The cam member 51 is inserted into the hole 31b of the frame 31 and has an end surface that is external. An obliquely cut cylindrical cam main body portion 51b exposed to 1 and a connecting portion 51c connected to the fitting portion 51a, extending in the direction of the motor 25, and having a substantially oval cross-sectional shape. The end surface 51d exposed to the outside of the cam main body 51b is a surface inclined with respect to the YZ plane.

  The second arm portion 41b of the bell crank 41 is pressed against the end surface 51d of the cam member 51 by an urging means described later. Therefore, when the cam member 51 rotates, the bell crank 41 rotates, and the sample tilting table 33 tilts in the vertical direction around the pin 32. That is, the cam body 51b of the cam member 51 functions as an inclined cam having the end surface 51d as a cam surface.

  In the biasing means of this embodiment, the intermediate portion is wound around the pin 40 of the bell crank 41, one end side is locked to the frame body 31, and the other end side is locked to the sample tilting table 33. Spring 53. Due to the urging force of the spring 53, the end of the sample tilting table 33 on the side where the elongated hole 33b is formed is lowered, and the second arm portion 41b of the bell crank 41 is moved to the end surface (cam) of the cam main body (slope cam) 51b. Face) 51d. In the present embodiment, a ruby ball 45 is provided on the second arm portion 41b of the bell crank 41, and this ruby ball 45 is pushed against the end surface (cam surface) 51d of the cam body portion (inclined cam) 51b. It comes to touch.

The cam member 51 is rotated about the X axis by a leaf spring 57 whose base end is attached to the frame 31 using screws 55 and whose distal end is pressed against the peripheral surface of the cam body 51 b of the cam member 51. Is regulated.
(clutch)
This will be described with reference to FIGS. FIG. 7 is a perspective view for explaining the clutch of FIG.

  In these drawings, the output shaft 61 of the motor 25 extends in the direction of the tilting mechanism, and a slit groove 61a is formed on the end surface thereof. The connecting portion 51c of the cam member 51 is loosely fitted in the slit groove 61a. As shown in FIG. 7, in the inner wall surface of the slit groove 61a, the circumferential surface is inclined with respect to the central portion side surface so that the width of the slit groove 61a is wider than the central portion. It is said that the surface. Therefore, the fitting between the connecting portion 51 c and the slit groove 61 a is a fitting with a large play in the circumferential direction of the output shaft 61.

When the connecting portion 51c is not in contact with the inner wall surface of the slit groove 61a, the clutch is disengaged and the movement of the XYZ drive mechanism is not transmitted to the motor 25 via the tilt mechanism. Further, when the inner wall surface of the slit groove 61a is in contact with the connecting portion 51c, the clutch is engaged, and the rotational driving force of the motor 25 is transmitted to the tilt mechanism.
(Operation)
Here, the operation of the above configuration will be described.

 1. When scanning the sample in the X, Y, and Z axis directions, first, it is confirmed whether or not the connecting portion 51c of the cam member 51 is in contact with the inner wall surface of the slit groove 61a. When the connecting portion 51c of the cam member 51 is in contact with the inner wall surface of the slit groove 61a, the motor 25 is driven to rotate the output shaft 61 so that the connecting portion 51c of the cam member 51 is formed in the slot groove 61a. It is assumed that the inner wall surface is not in contact (the clutch is disengaged). Then, the tube piezo element 39 of the XYZ drive mechanism is driven to scan the sample in the X, Y, and Z axis directions.

 2. When tilting the sample about the Y axis, the motor 25 is driven. Then, the connecting portion 51c comes into contact with the inner wall surface of the slit groove 61a (a state where the clutch is engaged), and the rotational driving force of the motor is transmitted to the tilt mechanism, so that the sample tilts around the Y axis.

According to such a configuration, the following effects can be obtained.
(1) By disengaging the clutch and blocking the movement of the XYZ drive mechanism from being transmitted to the motor via the tilt mechanism, the tube piezo element 39 of the XYZ drive mechanism is driven, and the sample is moved to X, Y, Z Scan in the axial direction.

In addition, by connecting the clutch and transmitting the power of the motor 25 to the tilt mechanism, the sample can be tilted using the tilt mechanism.
Therefore, a confocal dark field STEM image and a three-dimensional tomographic image can be obtained with the sample tilted.

 (2) By making the length (crank length) of the first arm portion 41a of the bell crank 41 longer, fine adjustment of the tilt angle of the tilt mechanism is facilitated. Conversely, by setting the length (crank length) of the first arm portion 41a of the bell crank 41 short, the tilt speed of the tilt mechanism can be increased and the sample can be tilted in a short time.

 (3) The bell crank 41 having the first arm portion 41a and the second arm portion 41b, the cam member 51 that is an inclined cam, and the end surface 51d that is the cam surface of the cam member 51 is the second arm portion 41b of the bell crank 41. By having a spring (biasing means) 53 that presses against the spring, a smooth operation of the tilt mechanism can be obtained.

 (4) The clutch includes a slit groove 61a and a connecting portion 51c that fits in the circumferential direction with play in the slot groove 61a, thereby driving the clutch using the motor 25 that drives the tilt mechanism. That is, the clutch can be engaged or disengaged.

In addition, this invention is not limited to the said embodiment. In the above embodiment, the following modifications are possible.
(1) In the above embodiment, the sample tilt table 33 is provided with the long hole 33b, and the bell crank 41 is provided with the pin 43 that engages with the long hole 33b. Conversely, the bell crank 41 is provided with the long hole and the sample tilt table 33. A pin that engages with the elongated hole may be provided.

 (2) In the above embodiment, the slot 61a is provided on the output shaft 61 of the motor 25, and the connecting portion 51c is provided on the cam member 51 so as to be loosely fitted in the slot 61a. You may provide the connection part which loosely fits in the slot and the output shaft 61 of a groove | channel and the motor 25. FIG.

 (3) In the above embodiment, the tilt cam is used as the drive unit for driving the bell crank 41 of the tilt mechanism. However, the structure shown in FIG. 9 may be used. FIG. 9 is a diagram for explaining another form of the drive unit for driving the tilting mechanism.

  A male screw is formed on the peripheral surface of the fitting portion 51 a of the cam member 51. On the other hand, on the inner wall surface of the hole 35a of the first piezo element mounting member 35, which is prohibited from rotating, a female screw that engages with the male screw formed on the fitting portion 51a is formed.

  Therefore, when the cam member 51 is rotationally driven by the motor 25, the cam member 51 moves along the X axis and rotates the bell crank 41.

21 Sample Placement Unit 23 Inclination Mechanism 24 XYZ Drive Mechanism 25 Motor 41 Bell Crank 51 Cam Member 51c Connection Portion 53 Spring 61 Output Shaft 61a Slotted Slot

Claims (3)

In a sample holder having an XYZ driving mechanism for driving a sample mounting portion on which a sample is mounted in the XYZ axial directions by a piezoelectric element,
The axial direction of the sample holder is the X axis,
The optical axis direction of the electron beam is the Z axis,
When the direction perpendicular to the X axis and the Z axis is the Y axis,
An inclination mechanism that is provided in the sample mounting portion and tilts the sample of the sample mounting portion around the Y axis;
A motor for driving the tilt mechanism;
A clutch that is disposed between the output shaft of the motor and the tilt mechanism, and that blocks movement of the XYZ drive mechanism from being transmitted to the motor via the tilt mechanism;
Have,
The XYZ drive mechanism is
The sample mounting unit is connected to the sample mounting unit, and the sample mounting unit is driven in the X-axis direction by a contraction operation by applying a driving voltage. It has a tube piezo element that is driven in the axial direction,
The output shaft of the motor is arranged in a cylinder of the tube piezo element,
The tilt mechanism is
A sample tilting table on which the sample is placed and rotatably provided around the Y axis,
A bell crank having a first arm rotatably provided on the XZ plane and connected to the sample tilting table on the XZ plane; and a second arm extending in a different direction from the first arm on the XZ plane;
A pin provided on one of the rotating end of the sample tilting table and the first arm of the bell crank;
An elongated hole that is provided on the other end of the rotating end of the sample tilting table and the first arm of the bell crank;
Drive comprising: a slope cam whose end surface on the YZ plane side is an inclined surface, and a biasing means for pressing the second arm of the bell crank against the cam surface of the slope cam, which is driven to rotate about the X axis by the motor. And consists of
The clutch is
A slit formed on an end surface of one of the output shaft of the motor and the input shaft provided on the tilt cam of the tilt mechanism;
An output shaft on the motor side and a connecting portion that is formed on the other shaft of the input shafts provided on the tilt cam of the tilt mechanism and that fits in the circumferential direction with play in the slit groove. A sample holder characterized by. In a sample holder having an XYZ driving mechanism for driving a sample mounting portion on which a sample is mounted in the XYZ axial directions by a piezoelectric element,
The axial direction of the sample holder is the X axis,
The optical axis direction of the electron beam is the Z axis,
When the direction perpendicular to the X axis and the Z axis is the Y axis,
An inclination mechanism that is provided in the sample mounting portion and tilts the sample of the sample mounting portion around the Y axis;
A motor for driving the tilt mechanism;
A clutch that is disposed between the output shaft of the motor and the tilt mechanism, and that blocks movement of the XYZ drive mechanism from being transmitted to the motor via the tilt mechanism;
Have
The XYZ drive mechanism is
The sample mounting unit is connected to the sample mounting unit, and the sample mounting unit is driven in the X-axis direction by a contraction operation by applying a driving voltage. It has a tube piezo element that is driven in the axial direction,
The output shaft of the motor is arranged in a cylinder of the tube piezo element,
The tilt mechanism is
A sample tilting table on which the sample is placed and rotatably provided around the Y axis,
A bell crank having a first arm rotatably provided on the XZ plane and connected to the sample tilting table on the XZ plane; and a second arm extending in a different direction from the first arm on the XZ plane;
A pin provided on one of the rotating end of the sample tilting table and the first arm of the bell crank;
An elongated hole that is provided on the other end of the rotating end of the sample tilting table and the first arm of the bell crank;
Screw member formed on the outer peripheral surface and rotated by the motor around the X axis, and female screw formed on the inner peripheral surface, the screw member screwed together, and the nut member prohibited from rotating , And a driving portion comprising a biasing means for pressing the second arm of the bell crank against the end face of the screw member,
The clutch is
A slit formed on an end surface of one of the output shaft of the motor and the input shaft provided on the tilt cam of the tilt mechanism;
An output shaft on the motor side and a connecting portion that is formed on the other shaft of the input shafts provided on the tilt cam of the tilt mechanism and that fits in the circumferential direction with play in the slit groove. A sample holder characterized by. A scanning transmission electron microscope comprising the sample holder according to claim 1.

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