JP2020071163A - Surface analyzer - Google Patents

Abstract

To provide a surface analyzer with which it is possible to inhibit vibration from propagating to a sample during measurement.SOLUTION: A surface analyzer comprises: a sample stage 51 for placing a sample; a holding body 55 for holding the sample stage and constituted so as to be capable of sliding in a direction of an axis Y on an XY plane orthogonal to a vertical direction; a reciprocating mechanism 60 for reciprocating the holding body 55 in the direction of the axis Y; and a guide unit for guiding sliding movement of the holding body 55. The reciprocating mechanism 60 includes a moving body 61 provided so as to be capable of moving along the direction of the axis Y, the moving body 61 being constituted so as to have a first state in which, when being moved toward a forward direction of the holding body 55, it comes in contact with the holding body 55 so as move the holding body 55 forward, a second state in which, when being moved toward a backward direction of the holding body 55, it comes in contact with the holding body so as to move the holding body 55 backward, and a third state in which it does not come in contact with the holding body 55 until it transitions from the first state to the second state.SELECTED DRAWING: Figure 2

Description

  The present disclosure relates to a surface analysis device.

  In a conventional scanning probe microscope as a surface analysis device, as described in International Publication No. 2016/189651 (Patent Document 1), a sample is placed using a piezo scanner that can be finely moved in three dimensions before measurement. The initial position of the sample is adjusted by moving the prepared stage.

International Publication No. 2016/189651

  Generally, since the movable range of the piezo scanner is small, it is difficult to measure the area outside the movable range of the piezo scanner when the size of the sample is large. Therefore, when the size of the sample is large, there is a case where it is desired to move the sample stage largely by using a coarse movement mechanism mechanically configured.

  However, since the coarse movement mechanism has a relatively large shape, it is easily affected by vibration even when stopped. In this case, there is a concern that the vibration of the coarse movement mechanism is transmitted to the sample stage and the sample cannot be measured accurately.

  The present disclosure has been made in view of the above problems, and an object of the present disclosure is to provide a surface analysis device that can suppress transmission of vibration to a sample during measurement.

  A surface analyzer according to the present disclosure includes a sample stage for mounting a sample, a holder configured to be slidable in the Y-axis direction on an XY plane orthogonal to the up-down direction, and a holder for holding the sample stage, An advancing / retreating mechanism for advancing / retreating the holding body in the Y-axis direction and a guide portion for guiding the sliding movement of the holding body are provided. The advancing / retreating mechanism includes a moving body provided so as to be movable along the Y-axis direction. The moving body is moved in a first state in which the holding body is in contact with the holding body so as to move the holding body forward when the holding body is moved in the forward direction, and in the backward direction of the holding body. In this case, there is provided a second state in which the holding body is brought into contact with the holding body so as to be retracted, and a third state in which the holding body is not brought into contact with the holding body by the transition from the first state to the second state. It is configured.

  The surface analysis device based on the present disclosure may further include a rotation mechanism for rotating the sample stage about a rotation axis parallel to the vertical direction. In this case, the rotating mechanism is fixed to the sample stage and rotates with the sample stage, and a power transmission path for transmitting power for rotating the rotating body to the rotating body. It is preferable to include a part. Further, it is preferable that the power transmission path portion has a first portion connected to the rotating body and a second portion detachably engaged with the first portion. Further, in the state where the first portion and the second portion are engaged, the power can be transmitted to the rotating body, the engagement between the first portion and the second portion is released, and the second portion is released. It is preferable that the power cannot be transmitted to the rotating body when the portion is separated from the first portion. Further, in this case, the power transmission path portion is in a state in which the first portion and the second portion are engaged in the first state, and the power transmission path portion is not connected to the first portion in any period of the third state. It is preferable that the second portion is disengaged and the second portion is separated from the first portion.

  In the surface analysis device based on the present disclosure, the power transmission path portion may include a rod portion extending along the Y-axis direction, and the first portion and the second portion include the rod portion. The parts may be provided so as to be lined up along the Y-axis direction. Further, the second portion may be supported by the moving body so as to move along the Y-axis direction as the moving body moves. In this case, it is preferable that the second portion engages with the first portion as the moving body moves in the forward direction, and the first portion and the second portion are engaged. When the movable body moves in the backward direction from the combined state, the engagement between the second portion and the first portion is released, and the second portion is separated from the first portion. preferable.

  In the surface analysis device according to the present disclosure, the rotating body may be configured by a gear. The first portion may have a thread groove that rotatably engages the gear with the gear, and the second portion is rotatably provided around an axis parallel to the Y-axis direction. May be. In this case, by rotating the second portion while the first portion and the second portion are engaged, the first portion rotates integrally with the second portion and the gear rotates. Preferably.

  The surface analysis device based on the present disclosure preferably includes a measurement head unit for measuring the sample placed on the sample stage, and a base unit supporting the measurement head unit. In this case, the base portion may be provided with a notch portion extending along the Y-axis direction, and the holding body may be configured to be movable in the notch portion.

  The surface analysis device based on the present disclosure may be installed on an installation surface, and may include a main body section provided with a vibration damping section that suppresses vibration transmitted to the sample stage from the installation surface side, and the advancing / retreating mechanism is A support body that movably supports the movable body and that is provided outside the main body may be included. In this case, it is preferable that the support is held on the installation surface or a part of the main body section from the installation surface to the vibration damping section.

  According to the present disclosure, it is possible to provide a surface analysis device capable of suppressing the transmission of vibration to a sample during measurement.

1 is a schematic configuration diagram of a scanning probe microscope according to an embodiment. 1 is a schematic side view of a scanning probe microscope according to an embodiment. 1 is a schematic front view of a scanning probe microscope according to an embodiment. FIG. 4 is a sectional view taken along line IV-IV shown in FIG. 3. It is a figure which shows the 1st state of the mobile body which concerns on embodiment. It is a figure which shows the 2nd state of the mobile body which concerns on embodiment. It is a figure which shows the 3rd state of the mobile body which concerns on embodiment.

  Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. In the embodiments described below, a scanning probe microscope (SPM) will be described as an example of the surface analysis apparatus, but the surface analysis apparatus is not limited to the scanning probe microscope, and for example, an electronic probe microanalyzer. (EPMA) or the like. Further, in the embodiments described below, the same or common portions are denoted by the same reference numerals in the drawings, and description thereof will not be repeated.

  FIG. 1 is a schematic diagram showing the configuration of the scanning probe microscope according to the embodiment. A schematic configuration of the scanning probe microscope according to the embodiment will be described with reference to FIG.

  As shown in FIG. 1, the scanning probe microscope 1 includes a measurement head unit 10, a sample stage 51, a scanner 52, and a control unit 90.

  The sample stage 51 is a part for mounting a sample. The sample stage 51 can be finely moved by the scanner 52. The sample stage 51 can be largely moved by a coarse movement mechanism as described later.

  The scanner 52 includes an XY scanner that scans in the two axial directions of the X and Y axes, and a Z scanner that finely moves in the Z axis direction (vertical direction) orthogonal to the X axis and the Y axis. The scanner 52 is controlled by the control unit 90.

  The measurement head unit 10 is a unit for measuring a sample placed on the sample stage. The measurement head unit 10 includes a cantilever 20, a cantilever support unit 21, a light source unit 30, an imaging unit 35, and a light detection unit 40.

  The cantilever 20 is provided so as to be located above the sample placed on the sample stage 51 during measurement. The cantilever 20 has a probe 20a on the tip side. The cantilever 20 is supported by a cantilever support portion 21 so as to be vertically vibrable. The cantilever 20 is detachably supported by the cantilever support portion 21.

  The cantilever support portion 21 may be configured to be movable in the X axis direction, the Y axis direction, and the Z axis direction. In this case, the position of the cantilever 20 can be adjusted by moving the cantilever support portion 21.

  The light source unit 30 and the light detection unit 40 are used to detect the displacement of the cantilever 20 in the Z-axis direction. The light source unit 30 includes a light irradiation unit 31 and an irradiation position adjustment unit 32.

  The light irradiation unit 31 is arranged above the cantilever 20. The light irradiation unit 31 emits laser light toward the cantilever 20. Specifically, the light irradiation unit 31 emits laser light toward the back surface of the cantilever 20 on the tip side. Depending on the arrangement, a beam splitter or the like may be installed in the optical path.

  The laser light emitted toward the back surface of the cantilever 20 is reflected by the back surface and introduced into the photodetection element 41 of the photodetection unit 40 by the mirror 45.

  The irradiation position adjustment unit 32 adjusts the position of the light irradiation unit 31. By adjusting the position of the light irradiation unit 31, it is possible to adjust the irradiation position (spot) where the laser light is irradiated. The irradiation position adjustment unit 32 may be a biaxial positioning stage or a drive source such as an ultrasonic motor.

  The light detection unit 40 includes a light detection element 41 and a detection position adjustment unit 42. The photodetector element 41 has a light-receiving surface divided into four in the Z-axis direction and the Y-axis direction. When the cantilever 20 is displaced, the ratio of the amount of light incident on these light receiving surfaces changes. The displacement of the cantilever 20 can be calculated by calculating the detection signals corresponding to the plurality of received light amounts by the control unit 90.

  The detection position adjustment unit 42 can adjust the position of the photodetection element 41. The detection position adjustment unit 42 may be a biaxial positioning stage or a drive source such as an ultrasonic motor.

  The imaging unit 35 is arranged above the probe 20a. The imaging unit 35 has a CCD camera. The image pickup unit 35 is used for auxiliary observation of the surface of the sample. The imaging unit 35 is also used to adjust the position of the light irradiation unit 31 while observing the back surface (upper surface) of the cantilever 20.

  FIG. 2 is a schematic side view of the scanning probe microscope according to the embodiment. FIG. 3 is a schematic front view of the scanning probe microscope according to the embodiment. FIG. 4 is a cross-sectional view taken along the line IV-IV shown in FIG. The detailed configuration of the scanning probe microscope 1 will be described with reference to FIGS. 2 to 4.

  As shown in FIG. 2 and FIG. 3, the scanning probe microscope 1 is installed on the installation surface 100, and the main body portion 15 is provided with the vibration damping portion 17 that suppresses the vibration transmitted to the sample stage 51 from the installation surface 100 side. Equipped with. The main body portion 15 includes an outer shell member 11 that constitutes an outer shell of the measurement head portion 10 and a base portion 13 that supports the measurement head portion 10.

  The outer shell member 11 is open toward the negative direction of the Y axis and has an open space 12 inside. The base portion 13 is provided with the cutout portion 13a communicating with the open space 12 as described above. The cutout 13a extends along the Y-axis direction. The cutout portion 13a is opened in the Y-axis direction, and thus the holding body 55 described later can be moved inside the cutout portion 13a. Thereby, the space can be efficiently used.

  As shown in FIGS. 2 to 4, the scanning probe microscope 1 includes a holder 55, an advancing / retreating mechanism 60, a rotating mechanism 70, and a guide unit 80 (see FIG. 4).

  The holder 55 holds the sample stage 51. The holding body 55 is configured to be slidable in the Y-axis direction on the XY plane orthogonal to the vertical direction. The holding body 55 includes a plate-shaped portion 56 extending along the Y-axis direction and a protrusion 57 that protrudes upward from the rear end of the plate-shaped portion 56. The protrusion 57 is provided with an opening 57c penetrating in the Y-axis direction. A connecting portion 612, which is a part of the moving body 61 described later, is inserted into the opening 57c. The width of the opening 57c in the X-axis direction is larger than the width of the connecting portion 612 in the X-axis direction, and the connecting portion 612 is inserted into the opening 57c in a non-contact state.

  Guide portions 80 are provided on both ends of the holding body 55 in the X-axis direction. The guide portion 80 guides the sliding movement of the holding body 55. The guide portion 80 extends along the Y-axis direction. The guide portion 80 is provided so that both ends of the holding body 55 in the X-axis direction can slide.

  The advancing / retreating mechanism 60 moves the holder 55 in the Y-axis direction. The forward direction of the holding body 55 is the Y-axis positive direction, and the backward direction of the holding body is the Y-axis negative direction.

  The advancing / retreating mechanism 60 includes a moving body 61 and a support body 62. The moving body 61 is provided so as to be movable along the Y-axis direction. The moving body 61 has a tip portion 613, a connecting portion 612, a body portion 611, and a knob portion 614.

  The body portion 611 has a substantially columnar shape. The body portion 611 extends along the Y-axis direction. The body 611 is configured to be movable in the Y-axis direction by a feed screw mechanism. The outer peripheral surface of the body portion 611 is provided with a thread groove that constitutes the feed screw mechanism. A knob portion 614 is provided on the rear end side of the body portion 611.

  The connecting portion 612 has a substantially columnar shape. The connecting portion 612 is provided so as to project forward from the front end of the body portion 611. The connecting portion 612 connects the tip portion 613 and the body portion 611.

  The tip portion 613 has a substantially disc shape. The tip portion 613 is provided so as to expand its diameter on the front end side of the connection portion 612. The tip portion 613 has substantially the same width as the body portion 611. The width of the tip portion 613 and the body portion 611 is larger than the width of the connection portion 612.

  The support body 62 movably supports the moving body 61. The support body 62 is provided outside the main body 15. The support body 62 includes a block body 621 and a block body support portion 622.

  The block body 621 is supported by the block body supporting portion 622. The block body 621 has an insertion hole through which the moving body 61 can be inserted. On the inner peripheral surface of the insertion hole, a screw groove for engaging with the outer peripheral surface of the body portion 611 and feeding the moving body 61 is provided. Therefore, by rotating the knob portion 614 of the moving body 61, the moving body 61 moves along the Y-axis direction.

  The block body support portion 622 is provided outside the main body portion 15. The block body support portion 622 has, for example, a pair of leg portions extending in the vertical direction and a connecting portion that connects upper ends of the pair of leg portions. The block body 621 is fixed to this connecting portion.

  In addition, the block body support part 622 may be comprised by the single leg part, and the shape of the block body support part 622 can be changed suitably.

  The block body support portion 622 is installed on the installation surface 100 and is held on the installation surface 100. Accordingly, it is possible to prevent the vibration of the support body 62 (the block body 621 and the block body support portion 622) from being directly transmitted to the main body portion 15.

  Further, even when the vibrations of the block body 621 and the block body supporting portion 622 are transmitted to the main body portion 15 along the installation surface 100, the vibration damping portion 17 alleviates the vibrations. Thereby, the influence of vibration on the sample stage 51 can be reduced.

  The moving body 61 is movably supported by the block body 621. However, during measurement of the sample, as will be described later, the holding body 55 holding the sample stage 51 and the moving body 61 do not come into contact with each other. Is configured. Therefore, at the time of measurement, the vibration of the support body 62 is not directly transmitted from the moving body 61 to the sample stage 51.

  In the above description, the case where the block body support portion 622 is installed on the installation surface 100 has been illustrated, but the block body support portion 622 may be held by the body portion 15 by being connected to the body portion 15. In this case, it is preferable that the block body support portion 622 be held by the portion of the body portion 15 from the installation surface 100 to the vibration damping portion 17. As a result, even when the vibration of the support body 62 is transmitted to the main body portion 15, the vibration is damped by the vibration damping portion 17, so that the influence on the sample stage 51 can be suppressed.

  The rotation mechanism 70 is a mechanism for rotating the sample stage 51 around a rotation axis parallel to the vertical direction. The rotating mechanism 70 includes a rotating body 71 and a rod portion 72 as a power transmission path portion.

  The rotating body 71 is fixed to the sample stage 51 and rotates integrally with the sample stage 51. The rotating body 71 is rotated by the power transmitted from the rod portion 72. The rotating body 71 is composed of, for example, a gear.

  The rod portion 72 transmits power for rotating the rotating body 71 to the rotating body 71. The rod portion 72 is configured to be able to change between a state in which the power can be transmitted to the rotating body 71 and a state in which the power cannot be transmitted.

  Specifically, the rod portion 72 has a first portion 721 to which the rotating body 71 is rotatably connected, and a second portion 722 detachably engaged with the first portion 721. In the state where the first portion 721 and the second portion 722 are engaged, power can be transmitted to the rotating body 71. When the engagement between the first portion 721 and the second portion 722 is released and the second portion 722 is separated from the first portion 721, the power cannot be transmitted to the rotating body 71.

  The first portion 721 and the second portion 722 are provided so as to be lined up in the Y-axis direction. The first portion 721 has a screw groove 721a that meshes with the rotating body 71. When the first portion 721 rotates about an axis parallel to the Y-axis direction, the rotating body 71 rotates about a rotation axis parallel to the vertical direction.

  The second portion 722 is supported by the moving body 61 so as to move along the Y-axis direction as the moving body 61 moves. The second portion 722 engages with the first portion 721 as the moving body 61 moves in the forward direction of the holding body 55. When the moving body 61 moves in the backward direction from the state in which the first portion 721 and the second portion 722 are engaged, the engagement between the second portion 722 and the first portion 721 is released, and the second portion is released. 722 is separated from the first portion 721.

  The second portion 722 is supported by the moving body 61 so as to be rotatable relative to the moving body 61. A knob portion 723 is provided at the rear end of the second portion 722. By rotating the knob portion 723, the second portion 722 rotates about an axis parallel to the Y-axis direction. By rotating the second portion 722 while the first portion 721 and the second portion 722 are engaged with each other, the first portion 721 rotates integrally with the second portion 722 and the rotating body 71 rotates.

  FIG. 5: is a figure which shows the 1st state of the mobile body which concerns on embodiment. FIG. 6 is a diagram showing a second state of the moving body according to the embodiment. FIG. 7: is a figure which shows the 3rd state of the mobile body which concerns on embodiment. The manner of movement of the moving body 61 will be described with reference to FIGS. 5 to 7.

  The moving body 61 is configured to have a first state, a second state, and a third state by slidingly moving along the Y-axis direction.

  As shown in FIG. 5, in the first state, when the moving body 61 is moved in the forward direction of the holding body 55, the moving body 61 hits the holding body 55 so as to move the holding body 55 forward. Contact.

  The protrusion 57 of the holder 55 has a front surface 57a and a rear surface 57b at both ends in the Y-axis direction. The tip portion 613 of the moving body 61 has a front surface 613a and a rear surface 613b at both ends in the Y-axis direction. The body 611 of the moving body 61 has a contact surface 611a on the front end side that can contact the rear surface 57b of the protrusion 57.

  When the moving body 61 is moved in the forward direction, the contact surface 611a of the body 611 contacts the rear surface 57b of the protrusion 57. Further, by moving the moving body 61 in the forward direction, the rear surface 57b is pressed by the contact surface 611a, and the moving body 61 and the holding body 55 move integrally in the forward direction.

  As the holder 55 moves forward, the sample stage 51 held by the holder 55 moves forward. As a result, the sample placed on the sample stage 51 can be moved largely and the measurement position can be adjusted in the Y-axis direction.

  When the contact surface 611a of the body portion 611 is in contact with the rear surface 57b of the protrusion 57, the second portion 722 of the rod portion 72 engages with the first portion 721 as described above.

  The first portion 721 is provided so as to be movable in the Y-axis direction relative to the moving body 61. The rear end side of the first portion 721 is inserted into a hole provided in the moving body 61. The diameter of the hole is larger than the diameter of the first portion 721, and the first portion 721 is not in contact with the moving body 61.

  An engagement protrusion that protrudes in the Y-axis direction is provided at the center of the rear end of the first portion 721. An engaging recess that is recessed in the Y-axis negative direction is provided at the center of the tip of the second portion 722. With the movement of the moving body 61 in the forward direction, the second portion 722 moves so as to approach the first portion 721, and in the state of the first state, the engagement concave portion fits into the engagement convex portion.

  By rotating the second portion 722 while the first portion 721 and the second portion 722 are engaged with each other, the first portion 721 rotates integrally with the second portion 722 as described above, and the rotating body 71 is rotated. Rotates. As a result, the sample stage 51 rotates about the rotation axis parallel to the Z-axis direction. As a result, the sample stage 51 can be rotated to adjust the measurement position in the circumferential direction.

  As shown in FIG. 6, in the second state, when the moving body 61 is moved in the retracting direction of the holding body 55, the moving body 61 contacts the holding body so as to move the holding body 55 backward. ..

  Specifically, when the moving body 61 is moved in the backward direction, the rear surface 613b of the tip portion 613 contacts the front surface 57a of the protrusion 57. Further, by moving the moving body 61 in the backward direction, the front surface 57a is pressed by the rear surface 613b, and the moving body 61 and the holding body 55 move integrally in the backward direction.

  As the holder 55 moves backward, the sample stage 51 held by the holder 55 moves backward. As a result, the sample placed on the sample stage 51 can be moved largely and the measurement position can be adjusted in the Y-axis direction.

  In addition, when the rear surface 613b of the tip portion 613 is in contact with the front surface 57a of the protruding portion 57, the second portion 722 and the first portion 721 are disengaged from each other, and the second portion 722 is It is located away from the first portion 721 in the negative direction of the Y-axis.

  As shown in FIG. 7, in the third state, the moving body 61 does not contact the holding body 55. The third state is an intermediate state between the first state and the second state, and is a state until the transition from the first state to the second state. The third state is also a state during the transition from the second state to the first state.

  In the third state, specifically, the rear surface 613b of the tip portion 613 is separated from the front surface 57a of the protruding portion 57 in the Y-axis positive direction, and the contact surface 611a of the body portion 611 is the rear surface of the protruding portion 57. It is separated from 57b in the negative direction of the Y-axis. As a result, the moving body 61 does not contact the holding body 55.

  When transitioning from the first state to the second state, the moving body 61 is retracted from the state in which the first portion 721 and the second portion 722 are engaged. When the moving body 61 is retracted, the second portion 722 is retracted together with the moving body 61. As a result, the second portion 722 moves in a direction away from the first portion 721. As a result, the engagement between the first portion 721 and the second portion 722 is released and the second portion 722 is separated from the first portion 721 in any period of the third state. In this case, even if the second portion 722 is rotated, the first portion 721 does not rotate, so the rotational force of the second portion 722 is not transmitted to the rotating body 71.

  As described above, in the third state, the moving body 61 is not in contact with the holding body 55. Further, the first portion 721 is provided so as not to contact the moving body 61 as described above, and is separated from the second portion 722 in the third state. Therefore, even when the moving body 61 vibrates, the vibration is not transmitted to the sample stage 51.

  Therefore, by adjusting the position of the sample stage 51 with the moving body 61 in the first state or the second state and then starting the measurement with the moving body 61 in the third state, vibration from the moving body 61 side to the sample stage. The sample can be measured in the untransmitted state. As a result, in the scanning probe microscope 1 according to the present embodiment, it is possible to suppress the transmission of vibration to the sample during measurement.

  Further, by providing the rotation mechanism 70, the measurement position of the sample can be adjusted in the circumferential direction. In this case, as described above, the rotation mechanism 70 is configured to have the first portion 721 and the second portion 722 that is removably engaged with the first portion 721, and the rotation mechanism 70 is configured to have the first portion 721 during any period of the third state. Disengagement of the portion and the second portion and the state in which the second portion is separated from the first portion also suppresses transmission to the sample stage 51 through the rotation mechanism 70. it can.

  In the above-described embodiment, the case where the rotation mechanism 70 is provided has been described as an example, but the present invention is not limited to this, and the rotation mechanism 70 may not be provided.

  In the above-described embodiment, the case where the first portion 721 has the screw groove that meshes with the rotating body 71 and the rotating body 71 rotates when the first portion 721 rotates has been described as an example. Not limited. The first portion 721 and the rotating body 71 may form a rack and pinion mechanism, and the rotating body 71 may rotate by moving the first portion 721 in the Y-axis direction.

  In the above-described embodiment, the case where the second portion 722 is manually rotated has been described as an example, but the second portion 722 is not limited to this and may be rotated by a drive source such as a motor. In this case, the operation of the drive source is preferably controlled by the controller 90.

  As described above, the embodiments disclosed this time are exemplifications in all respects, and are not restrictive. The scope of the present invention is shown by the claims, and includes meanings equivalent to the claims and all modifications within the scope.

  1 scanning probe microscope, 10 measuring head part, 11 outer shell member, 12 open space, 13 base part, 13a notch part, 15 main body part, 17 vibration damping part, 20 cantilever, 20a probe, 21 cantilever support part, 30 light source section, 31 light irradiation section, 32 irradiation position adjusting section, 35 imaging section, 40 light detecting section, 41 light detecting element, 42 detection position adjusting section, 45 mirror, 51 sample stage, 52 scanner, 55 holder, 56 Plate-like portion, 57 protruding portion, 57a front surface, 57b rear surface, 57c opening portion, 60 advancing / retreating mechanism, 61 moving body, 62 support body, 70 rotating mechanism, 71 rotating body, 72 rod portion, 80 guide portion, 90 control portion, 100 installation surface, 611 body portion, 611a contact surface, 612 connection portion, 613 tip portion, 613a front surface, 613b rear surface, 61 Knob, 621 block body, 622 block body supporting portion, 721 first portion 721a screw groove, 722 a second portion, 723 pinch portion.

Claims (6)

A sample stage for placing a sample,
A holder configured to be slidable in the Y-axis direction on an XY plane orthogonal to the vertical direction and holding the sample stage;
An advancing / retreating mechanism for advancing / retreating the holding body in the Y-axis direction;
A guide part for guiding the sliding movement of the holding body,
The advancing / retreating mechanism includes a moving body provided so as to be movable along the Y-axis direction,
The moving body is moved in the first state in which the holding body is in contact with the holding body so as to move the holding body forward when moved in the forward direction of the holding body, and in the backward direction of the holding body. In this case, there is provided a second state in which the holding body is brought into contact with the holding body so that the holding body is retracted, and a third state in which the holding body is not brought into contact with the holding body until the holding state transitions from the first state to the second state. A surface analyzer configured. Further comprising a rotation mechanism for rotating the sample stage around a rotation axis parallel to the vertical direction,
The rotating mechanism includes a rotating body which is fixed to the sample stage and rotates integrally with the sample stage, and a power transmission path portion for transmitting power for rotating the rotating body to the rotating body,
The power transmission path portion has a first portion connected to the rotating body, and a second portion detachably engaged with the first portion,
In the state where the first portion and the second portion are engaged, the power can be transmitted to the rotating body,
In a state where the engagement between the first portion and the second portion is released and the second portion is separated from the first portion, the power cannot be transmitted to the rotating body,
The power transmission path portion is in a state where the first portion and the second portion are engaged with each other in the first state, and in any one of the periods of the third state, The surface analysis device according to claim 1, wherein the second portion is disengaged from the first portion, and is disengaged from the first portion. The power transmission path portion includes a rod portion extending along the Y-axis direction,
The first portion and the second portion are provided in the rod portion so as to be aligned along the Y-axis direction,
The second portion is supported by the moving body so as to move along the Y-axis direction as the moving body moves,
By moving the moving body in the forward direction, the second portion is engaged with the first portion,
When the moving body moves in the backward direction from the state in which the first portion and the second portion are engaged with each other, the engagement between the second portion and the first portion is released and the first portion is released. The surface analysis device according to claim 2, wherein two portions are separated from the first portion. The rotating body is composed of a gear,
The first portion has a thread groove that rotatably engages with the gear,
The second portion is rotatably provided around an axis parallel to the Y-axis direction,
The gear is rotated by rotating the first portion integrally with the second portion by rotating the second portion while the first portion and the second portion are engaged with each other. The surface analyzer according to. A measurement head unit for measuring the sample placed on the sample stage,
A base portion that supports the measurement head portion,
The base portion is provided with a notch portion extending along the Y-axis direction,
The surface analysis device according to claim 1, wherein the holder is configured to be movable in the cutout portion. The main body is installed on an installation surface, and includes a main body provided with a vibration suppression unit that suppresses vibration transmitted from the installation surface to the sample stage.
The advance / retreat mechanism movably supports the movable body, and includes a support body provided outside the main body section,
The surface analysis device according to claim 1, wherein the support is held on the installation surface or a part of the main body portion from the installation surface to the vibration damping portion.

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