JP5348216B2 - Iii族窒化物半導体レーザ素子、及びiii族窒化物半導体レーザ素子を作製する方法 - Google Patents

Iii族窒化物半導体レーザ素子、及びiii族窒化物半導体レーザ素子を作製する方法 Download PDF

Info

Publication number
JP5348216B2
JP5348216B2 JP2011230895A JP2011230895A JP5348216B2 JP 5348216 B2 JP5348216 B2 JP 5348216B2 JP 2011230895 A JP2011230895 A JP 2011230895A JP 2011230895 A JP2011230895 A JP 2011230895A JP 5348216 B2 JP5348216 B2 JP 5348216B2
Authority
JP
Japan
Prior art keywords
oxide
axis
oxynitride
group iii
nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2011230895A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012015563A5 (https=
JP2012015563A (ja
Inventor
祐介 善積
陽平 塩谷
孝史 京野
真寛 足立
慎司 徳山
隆道 住友
昌紀 上野
隆俊 池上
浩二 片山
孝夫 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP2011230895A priority Critical patent/JP5348216B2/ja
Publication of JP2012015563A publication Critical patent/JP2012015563A/ja
Publication of JP2012015563A5 publication Critical patent/JP2012015563A5/ja
Application granted granted Critical
Publication of JP5348216B2 publication Critical patent/JP5348216B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Semiconductor Lasers (AREA)
JP2011230895A 2011-10-20 2011-10-20 Iii族窒化物半導体レーザ素子、及びiii族窒化物半導体レーザ素子を作製する方法 Expired - Fee Related JP5348216B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011230895A JP5348216B2 (ja) 2011-10-20 2011-10-20 Iii族窒化物半導体レーザ素子、及びiii族窒化物半導体レーザ素子を作製する方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011230895A JP5348216B2 (ja) 2011-10-20 2011-10-20 Iii族窒化物半導体レーザ素子、及びiii族窒化物半導体レーザ素子を作製する方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2009228894A Division JP5397136B2 (ja) 2009-09-30 2009-09-30 Iii族窒化物半導体レーザ素子、及びiii族窒化物半導体レーザ素子を作製する方法

Publications (3)

Publication Number Publication Date
JP2012015563A JP2012015563A (ja) 2012-01-19
JP2012015563A5 JP2012015563A5 (https=) 2012-11-08
JP5348216B2 true JP5348216B2 (ja) 2013-11-20

Family

ID=45601537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011230895A Expired - Fee Related JP5348216B2 (ja) 2011-10-20 2011-10-20 Iii族窒化物半導体レーザ素子、及びiii族窒化物半導体レーザ素子を作製する方法

Country Status (1)

Country Link
JP (1) JP5348216B2 (https=)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008187044A (ja) * 2007-01-30 2008-08-14 Rohm Co Ltd 半導体レーザ

Also Published As

Publication number Publication date
JP2012015563A (ja) 2012-01-19

Similar Documents

Publication Publication Date Title
JP5387302B2 (ja) Iii族窒化物半導体レーザ素子、及びiii族窒化物半導体レーザ素子を作製する方法
JP5397136B2 (ja) Iii族窒化物半導体レーザ素子、及びiii族窒化物半導体レーザ素子を作製する方法
JP4475357B1 (ja) Iii族窒化物半導体レーザ素子、及びiii族窒化物半導体レーザ素子を作製する方法
JP5206699B2 (ja) Iii族窒化物半導体レーザ素子、及びiii族窒化物半導体レーザ素子を作製する方法
CN102025104B (zh) Iii族氮化物半导体激光器元件及其制作方法
CN104737394A (zh) Iii族氮化物半导体激光元件、制作iii族氮化物半导体激光元件的方法、评价iii族氮化物半导体激光元件的光谐振器用的端面的方法、评价刻划槽的方法
WO2013172070A1 (ja) Iii族窒化物半導体レーザ素子
JP5348217B2 (ja) Iii族窒化物半導体レーザ素子、及びiii族窒化物半導体レーザ素子を作製する方法
JP5348216B2 (ja) Iii族窒化物半導体レーザ素子、及びiii族窒化物半導体レーザ素子を作製する方法
JP5387649B2 (ja) Iii族窒化物半導体レーザ素子、及びiii族窒化物半導体レーザ素子を作製する方法
JP5387650B2 (ja) Iii族窒化物半導体レーザ素子、及びiii族窒化物半導体レーザ素子を作製する方法
JP5152391B2 (ja) Iii族窒化物半導体レーザ素子
JP2012015564A (ja) Iii族窒化物半導体レーザ素子、及びiii族窒化物半導体レーザ素子を作製する方法
JP2012019243A (ja) Iii族窒化物半導体レーザ素子、及びiii族窒化物半導体レーザ素子を作製する方法
JP5152392B2 (ja) Iii族窒化物半導体レーザ素子
JP5152393B2 (ja) Iii族窒化物半導体レーザ素子、及びiii族窒化物半導体レーザ素子を作製する方法
JP2011003880A (ja) Iii族窒化物半導体レーザ素子、及びiii族窒化物半導体レーザ素子を作製する方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120920

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20120920

A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20120920

A975 Report on accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A971005

Effective date: 20121025

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20121030

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20121227

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20130319

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130619

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20130626

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20130723

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130805

R150 Certificate of patent or registration of utility model

Ref document number: 5348216

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees